USOO9232618B2 (12) United States Patent (10) Patent No.: US 9.232,618 B2 Bourke, Jr. et al. (45) Date of Patent: Jan. 5, 2016 (54) UP AND DOWN CONVERSION SYSTEMS (58) Field of Classification Search FOR PRODUCTION OF EMITTED LIGHT CPC .............. H01J9/00; H01J 61/00; A61N 5700; FROM VARIOUS ENERGY SOURCES G01N33/00; G01N 2003/0003; G01N 33/53; INCLUDING RADIO FREQUENCY, G01N 33/551; G01N33/54346; G01N 33/553; MCROWAVE ENERGY AND MAGNETC G01N 23/02; G02B 26/00 USPC ....................................................... 250/458.1 INDUCTION SOURCES FOR UPCONVERSION See application file for complete search history. (56) References Cited (75) Inventors: Frederic A. Bourke, Jr., Greenwich, CT (US); Zakaryae Fathi, Raleigh, NC U.S. PATENT DOCUMENTS (US); Ian Nicholas Stanton, Durham, NC (US); Michael J. Therien, Durham, 4,608.222 A 8, 1986 Brueckner .................... 376/104 NC (US); Paul Rath Stauffer, Durham, 5,118,422 A * 6/1992 Cooper et al. ................ 210,636 NC (US); Paolo MacCarini. Durham, (Continued) NC (US); Katherine Sarah Hansen, Cary, NC (US); Diane Renee Fels, FOREIGN PATENT DOCUMENTS Morrisville, NC (US); Cory Robert EP 2130553 A1 * 12/2009 ............. A61K 41.00 Wyatt, Durham, NC (US); Mark Wesley WO WO 2008, 118234 A2 10/2008 Dewhirst, Durham, NC (US) WO WO 2008118234 A2 * 10, 2008 .............. HOL 31,04 (73) Assignees: IMMUNOLIGHT, LLC, Detroit, MI OTHER PUBLICATIONS (US); DUKE UNIVERSITY, Durham, International Search Report and Written Opinion of the International NC (US) Searching Authority issued Mar. 28, 2011, in Patent Application No. PCT/US 2010/0561.78. *) Notice: Subject to anyy disclaimer, the term of this patent is extended or adjusted under 35 (Continued) U.S.C. 154(b) by 927 days. Primary Examiner — David Porta (21) Appl. No.: 12/943,787 Assistant Examiner — Djura Malevic (74) Attorney, Agent, or Firm — Oblon, McClelland, Maier (22) Filed: Nov. 10, 2010 & Neustadt, L.L.P. (65) Prior Publication Data (57) ABSTRACT US 2011 FO1 172O2A1 May 19, 2011 Methods and systems for producing a change in a medium. A first method and system (1) place in a vicinity of the medium at least one upconverter including a gas for plasma ignition, with the upconverter being configured, upon exposure to ini Related U.S. Application Data tiation energy, to generate light for emission into the medium, (60) Provisional application No. 61/259,940, filed on Nov. and (2) apply the initiation energy from an energy source 10, 2009. including the first wavelength w to the medium, wherein the emitted light directly or indirectly produces the change in the (51) Int. Cl. medium. A second method and system (1) place in a vicinity GOIN 23/02 (2006.01) of the medium an agent receptive to microwave radiation or H05B 4I/28 (2006.01) radiofrequency radiation, and (2) apply as an initiation energy the microwave radiation or radiofrequency radiation by (Continued) which the agent directly or indirectly generates emitted light (52) U.S. Cl. in the infrared, visible, or ultraviolet range to produce at least CPC .............. H05B4I/2806 (2013.01); A61N 2/00 one of physical and biological changes in the medium. (2013.01); A61N 5/10 (2013.01); Y02B 20/22 (2013.01) 135 Claims, 67 Drawing Sheets US 9.232,618 B2 Page 2 (51) Int. 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Figure D U.S. Patent Jan.5, 2016 Sheet 3 of 67 US 9.232,618 B2 Intensity (W.cm) 8-s-s-s-s-sw-xx-xx-aawaaaaaaaaaa-va-va-varsssss---w-------------a-wear oku.... - . 3 3: 34 38 2 Wavelength (nm) Figure 2. U.S. Patent Jan. 5, 2016 Sheet 4 of 67 US 9.232,618 B2 rig - 8: 3 x8 : : ; ; ; : 8.8. 8 3 88 8 s 8 i 38: 4. &83 38: ---...........-koo-oooo Figure 4 U.S. Patent Jan. 5, 2016 Sheet 5 of 67 US 9.232,618 B2 wask Starting Wafer 2. Pr?, 2 *X^***Xix 32 Release layer if 3. Carrier Wafer Figures dry etch 38 ask Starting Wafer Release layer Carrier Wafer Figure 6A U.S. Patent Jan. 5, 2016 Sheet 7 of 67 US 9.232,618 B2 Figure 8A Figure 8B U.S. Patent Jan.5, 2016 Sheet 8 of 67 US 9.232,618 B2 Figure 9 Figure 10 U.S.