Carl Zeiss SMT - Nano Technology Systems Division AURIGA® series Modular CrossBeam® workstation Instruction Manual EnablingEnabling thethe Nano-AgeNano-Age WorldWorld®® AURIGA® series Modular CrossBeam® workstation Original instructions Carl Zeiss NTS GmbH A Carl Zeiss SMT AG Company Carl-Zeiss-Str. 56 73447 Oberkochen Germany phone: +49 73 64 / 20 44 88 [email protected] www.smt.zeiss.com/nts 346500-8098-000 Document name: Instruction Manual AURIGA series Revision: en04 Effective from: September 2010 © by Carl Zeiss NTS GmbH ® The photo on the front page shows an AURIGA workstation. This document or any part of it must not be translated, reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying, recording, or by any information or retrieval system. Violations will be prosecuted. The use of general descriptive names, registered names, trademarks, etc. in this document does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. Software programs will fully remain the property of Carl Zeiss NTS/SMT. No program, documentation or subsequent upgrade thereof may be disclosed to any third party, unless prior written consent of Carl Zeiss NTS/SMT has been procured to do so, nor may they be copied or otherwise duplicated, even for the customer’s internal needs apart from a single back-up copy for safety purposes Due to an ongoing process of improvement Carl Zeiss NTS reserves the right to make modifications of this document without notice. `çåíÉåíë Table of contents 1. About this manual ........................................................................................ 9 1.1. Safety instructions in this manual ................................................................ 10 1.2. Typographical conventions .......................................................................... 11 1.3. Definition of terms ......................................................................................... 12 2. Safety .......................................................................................................... 13 2.1. Intended use ................................................................................................... 13 2.2. Prevention of accidents and of improper use ............................................. 15 2.3. Safety summary ............................................................................................. 16 2.3.1. Hazards related to personal injury ......................................................................... 16 2.3.2. Hazards not related to personal injury ................................................................... 19 2.4. Safety equipment ........................................................................................... 20 2.4.1. Safety devices ....................................................................................................... 20 2.4.1.1. Protective cover panels ................................................................................................. 20 2.4.1.2. Interlock system ............................................................................................................ 20 2.4.1.3. ON/OFF switch.............................................................................................................. 21 2.4.1.4. EMO box with main switch (optional, but mandatory with FIB and/or GIS upgrade)..... 21 2.4.1.5. EMO button (optional, but mandatory with FIB and/or GIS upgrade)............................ 22 2.4.1.6. Main shut-off valves ...................................................................................................... 22 2.4.2. Safety labels and labels ........................................................................................ 23 2.4.2.1. At the front of the workstation........................................................................................ 23 2.4.2.2. At the rear of the workstation ........................................................................................ 24 2.4.2.3. At the rear of the electron optical column...................................................................... 25 2.4.2.4. Inside the workstation.................................................................................................... 25 2.4.3. Material Safety Data Sheets .................................................................................. 25 2.5. Safety instructions for handling precursors (with GIS upgrade only) ...... 26 3. Description ................................................................................................. 27 3.1. Overview ......................................................................................................... 27 3.2. Basic workstation .......................................................................................... 28 3.2.1. View ....................................................................................................................... 28 3.3. Upgraded workstation ................................................................................... 29 3.3.1. View ....................................................................................................................... 29 3.3.2. FIB upgrade ........................................................................................................... 30 3.3.3. Gas injection system (GIS) upgrade ..................................................................... 30 3.3.3.1. Five-channel GIS........................................................................................................... 30 3.3.3.2. Single GIS ..................................................................................................................... 30 3.3.4. Charge compensation upgrade ............................................................................. 31 3.3.4.1. Charge Compensator .................................................................................................... 31 3.3.4.2. Five-channel GIS with integrated charge compensation............................................... 31 fåëíêìÅíáçå=j~åì~ä=^rofd^®=ëÉêáÉë=ÉåMQ =fff `çåíÉåíë 3.4. Control elements ............................................................................................32 3.4.1. SmartSEM® user interface .................................................................................... 32 3.4.2. Dual joystick .......................................................................................................... 33 3.4.3. Optional control panel ........................................................................................... 34 3.5. Principle of operation .....................................................................................35 3.5.1. Vacuum system ..................................................................................................... 35 3.5.2. Specimen stage ..................................................................................................... 36 3.5.3. Electron optics (GEMINI® column) ........................................................................ 37 3.5.4. Ion optics (FIB column) .......................................................................................... 39 3.5.4.1. Imaging modes.............................................................................................................. 41 3.5.5. Signal detection ..................................................................................................... 42 3.5.5.1. In-lens detector ............................................................................................................. 43 3.5.5.2. SE2 detector ................................................................................................................. 45 3.5.5.3. EsB® detector (optional) ............................................................................................... 46 3.5.5.4. SESI detector (optional, with FIB upgrade only) ........................................................... 47 3.6. Specification ...................................................................................................48 3.6.1. Basic workstation ................................................................................................... 48 3.6.2. Workstation with FIB upgrade ............................................................................... 50 3.7. Technical data .................................................................................................51 3.7.1. Layout and connections ....................................................................................... 51 3.7.2. System layout ........................................................................................................ 52 3.7.2.1. AURIGA® ...................................................................................................................... 52 3.7.2.2. AURIGA® 60 ................................................................................................................. 53 3.7.3. Installation requirements ...................................................................................... 55 3.8. Options ............................................................................................................58 3.8.1. Airlock .................................................................................................................... 58 3.9.