Program Key Conference Topics 2D 2D Materials AC Actinides and Rare Earths Focus Topic AP Atomic Scale Processing Focus Topic AS Applied Surface Science Division BI Biomaterial Interfaces Division BP Biomaterials Plenary Session CA Chemical Analysis and Imaging Interfaces Focus Topic DM Fundamental Aspects of Material Degradation Focus Topic EL Spectroscopic Ellipsometry Focus Topic EM Electronic Materials and Photonics Division EW Exhibitor Technology Spotlight Workshops HC Fundamental Discoveries in Heterogeneous Catalysis Focus Topic HI Advanced Ion Microscopy and Ion Beam Nano-engineering Focus Topic LS Frontiers of New Light Sources Applied to Materials, Interfaces, and Processing Focus Topic MI Magnetic Interfaces and Nanostructures Division MN MEMS and NEMS Group MS Manufacturing Science and Technology Group NS Nanometer-scale Science and Technology Division OX Complex Oxides: Fundamental Properties and Applications Focus Topic PS Plasma Science and Technology Division QS Materials and Processes for Quantum Information, Computing and Science Focus Topic RA New Challenges to Reproducible Data and Analysis Focus Topic SE Advanced Surface Engineering Division SS Surface Science Division TF Thin Films Division TL Energy Transition Focus Topic VT Vacuum Technology Division Key to Session/Paper Numbers Sessions sponsored by multiple topics are labeled with all topic acronyms (e.g. AC+EM+SS), then a number to indicate simultaneous sessions sponsored by the same topic(s) (e.g. SS1, SS2), then a dash followed by the first two characters of the day of the week: Monday, Tuesday, Wednesday, Thursday, Friday, then a single letter for Morning, Afternoon, Evening, Poster, and finally a number indicating the starting time slot for the paper. Example: SS1-MoM9 (Surface Science, Monday morning, 11:00 am). Program Key 1 Program Overview Room A120-121 A122-123 A124-125 A210 A211 /Time SuA BP-SuA: Biomaterials Interfaces Plenary (ALL INVITED SESSION) MoM BI+AS+NS-MoM: TF+EM+MI+MN+OX+PS- TF-MoM: Thin Films for MN-MoM: MEMS, AS+BI+RA-MoM: Biofabrication, MoM: Functional Thin Electrochemistry and BioMEMS, and MEMS for Quantitative Surface Bioanalytics, Biosensors, Films: Ferroelectric, Energy Storage Energy: Processes, Analysis I/Reproducibility Diagnostics, Multiferroics, and Materials, and Devices I Issues in Quantitative XPS Biolubrication and Wear Magnetic Materials MoA BI+AS-MoA: Cutting Edge TF+SE-MoA: HiPIMS and TF+2D+AP+EL+SS-MoA: MN-MoA: RA+AS+NS+SS-MoA: Bio: Bio-Nano, Bio- Reactive HiPIMS for ALD and CVD: Nucleation, Microfabricated Systems Quantitative Surface Energy, 3D Bio Novel Thin Films Surface Reactions, for Gas Chromatography Analysis II/Big Data, Mechanisms, and and Nanomechanical Theory and Kinetics Mass Sensing Reproducibility TuM BI+AS-TuM: TF+EM+MI-TuM: Thin TF+AP-TuM: ALD and MN-TuM: MEMS, AS+BI+RA-TuM: Characterization of Films for CVD: Precursors and BioMEMS, and MEMS For Quantitative Surface Biological and Microelectronics, Process Development Energy: Processes, Analysis III/Other Surface Biomaterial Surfaces Photonics, and Materials, and Devices II Analysis Methods Optoelectronic TuL Applications TuA BI+AS-TuA: Biomolecules TF-TuA: Emerging TF+PS-TuA: Epitaxial Thin MN+QS-TuA: Devices for AS+BI+CA+LS-TuA: and Biophysics and Applications for Thin Films Quantum Information Beyond Traditional Interfaces & Flash Films and Quantum Surface Analysis Session Nanomechanics TuP WeM BI+AS-WeM: Microbes TF1-WeM: Vapor RA+AS+CA+PS+TF-WeM: MI+2D-WeM: Emerging and Fouling at Surfaces Deposition of Functional Reproducibility in Science Multifunctional Magnetic Polymer Thin Films and and Engineering, Materials I and Composites including materials and Magnetocaloric Materials energy systems WeA CA+NS+SS+VT-WeA: TF+EM-WeA: Emerging RA+AS+BI-WeA: MI+2D-WeA: Emerging AS+CA+LS-WeA: Chemical Analysis and Thin Film Materials: Addressing Multifunctional Magnetic Operando Imaging of Ultra-wide Bandgap and Reproducibility Materials II Characterization Liquid/Vapor/Solid Phase Change Materials Challenges using Multi- Techniques for In situ Interfaces I Technique Approaches Surface Analysis of ThM CA+2D+AS+BI+NS-ThM: TF+EM+NS+SS-ThM: Thin LS+AS+SS-ThM: MI+2D+AS+EM-ThM: EnergyAS-ThM: Devices Advances in Chemical Analysis and Films for Energy Operando Methods for Novel Magnetic Materials Depth Profiling, Imaging Imaging of Harvesting and Unraveling Fundamental and Device Concept for and Time-resolved Liquid/Vapor/Solid Conversion Mechanisms in Devices Energy efficient Analysis Interfaces II Towards Renewable Information Processing ThA CA+NS+SS+VT-ThA: TF+SS-ThA: Metal Halide EnergieTF+AS+EL+PS+RAs -ThA: andLS+AC+HC+SS Storage -ThA: AS-ThA: Role of Surfaces Progress in Perovskites, Other LS+HC+SSCharacterization-ThM: Frontiers of Thin Emerging Methods with and Interfaces in Energy Instrumentation and Organic/Inorganic Hybrid ofFilm Time Processes-resolved and New Coherent Light Material and Industrial Methods for Spectro- Thin Films & Flash TechniquesProperties for Energy & Sources Problems microscopy of Interfaces Session Catalysis Highlight LS+AC+NS-ThA: Photon ThP Session Science for Imaging Materials from the Meso- to the Nanoscale FrM Program Overview 2 Program Overview Room A212 A213 A214 A215 A216 /Time SuA MoM HC+SS-MoM: Utilization VT-MoM: Pumping, AP+2D+EM+PS+TF-MoM: AC+LS+MI-MoM: 2D+EM+MI+NS-MoM: of Theoretical Models, Outgassing, leaks, and Area Selective Deposition Magnetism, Complexity, Properties of 2D Machine Learning, and Vacuum Pressure and Selective-Area Superconductivity, and Materials including Artificial Intelligence for Measurement Patterning Electron Correlations in Electronic, Magnetic, Heterogeneously- the Actinides and Rare Mechanical, Optical, and MoA CatalyzedTL+2D+HC+SS Reactions-MoA: VT-MoA: Gas Dynamics, EM+PS+TF-MoA: New EarthsAC-MoA: Early Career Thermal2D+AP+EM+MI+NS+PS+T Properties I Surface Reaction Surface Science for Devices and Materials for Scientists F-MoA: 2D Materials Mechanisms in Energy Accelerators, and Ultra- Logic and Memory Growth and Fabrication Conversion (ALL INVITED Clean Vacuum Systems SESSION) TuM TL+MS+VT-TuM: VT-TuM: Accelerators EM+2D+AP+NS+PS-TuM: AC+AS+LS-TuM: 2D+AS+MI+NS-TuM: 2D Implications of and Large Vacuum New Devices and Chemistry and Physics of Materials Implementation: Making Systems Materials for Electronics the Actinides and Rare Characterization Energy Transition a and Photonics Earths including Microscopy and Reality (ALL INVITED Spectroscopy TuL SESSION) TuA VT-TuA: Advanced EM+OX+TF-TuA: Nikolaus AC+AS+LS-TuA: Forensics, 2D+EM+MI+NS-TuA: Applications of Vacuum Dietz Memorial Session: Science and Processing Properties of 2D Technology Wide and Ultra-wide for Nuclear Energy Materials including Band Gap Materials and Electronic, Magnetic, Devices Mechanical, Optical, and TuP Thermal Properties II WeM EL+AS+EM+TF-WeM: HC+2D+SS-WeM: Exotic EM+2D+AS+MI+MN+NS+ 2D+AS+MI+NS-WeM: 2D Optical Characterization Nanostructured Surfaces TF-WeM: Nanostructures Materials of Thin Films and for Heterogeneously- and Characterization by Nanostructures Catalyzed Reactions Nanocharacterization of Scanning Probe Electronic and Photonic Microscopy and WeA EL+EM-WeA: HC+OX+SS-WeA: Metal- DevicesEM+2D+NS+TF -WeA: SE+AS+TF-WeA: Spectroscopy2D+EM+MN+NS -WeA: 2D Spectroscopic Support Interactions THEME Session: Nanostructured Thin Device Physics and Ellipsometry: Novel Driving Heterogeneously- Electronics and Photonics Films and Coatings Applications Applications and Catalyzed Reactions for a Low-Carbon Future Theoretical Approaches ThM DM+BI+SS-ThM: Material HC+2D+SS-ThM: EM+AP+MS+NS+TF-ThM: SE+PS-ThM: Plasma- 2D+EM+MI+NS+QS+SS- Stabilities and Nanoscale Surface Advanced Processes for assisted Surface ThM: Dopants, Defects, Technology for Structure in Interconnects and Modification and and Interfaces in 2D Degradation Protection Heterogeneously- Devices Deposition Processes Materials Catalyzed Reactions ThA DM1+BI+SS-ThA: Low HC+SS+TL-ThA: Reaction EL-ThA: Spectroscopic 2D+AS+BI+HC+MN+NS+P Fouling Interfaces and Pathways and Addressing Ellipsometry Late New S+SS+TL-ThA: Surface Environmental Challenges for Energy Session Chemistry, Degradation Production in the 21st SE-ThA: New Challenges Functionalization, Bio, DM2+BI+SS-ThA: Century & and Opportunities in Energy and Sensor ThP Fundamentals of Catalyst Heterogeneous Catalysis Surface Engineering Applications Degradation: Dissolution, Graduate Student Award Oxidation and Sintering Presentation FrM HC+SS-FrM: Catalysis at 2D-FrM: 2D Late News TF-FrM: Theory and Complex Interfaces Session Characterization of Thin SE+AS+SS-FrM: Tribology: Film Properties From Nano to Macro- scale Program Overview 3 Program Overview Room A220-221 A222 A226 B130 /Time SuA MoM PS2-MoM: Plasma Modeling MoA SS+HC-MoA: CO2, CO, Water, 2D+AP+EM+MI+MN+NS+PS+TF- PS+AS+EM+SS+TF-MoA: Plasma- and Small Molecule Chemistry MoA: Nanostructures including Surface Interactions at Surfaces Heterostructures and Patterning of 2D Materials TuM SS+2D+HC-TuM: Atom 2D+EM+MI+MN+NS+QS-TuM: PS-TuM: Plasma Diagnostics and Manipulation and Novel Quantum Phenomena Sources I Synthesis/Oxide Surface Reactions & Flash Session TuL TuA OX+EM+HC+MI+NS+SS+TF-TuA: NS-TuA: Recent Advances in TL+AS+SS+TF-TuA: AP+EL+MS+PS+SS+TF-TuA: Complex Oxides: Catalysis, Nanoscale Probing and Breakthroughs and Challenges Advancing Metrology and Dielectric Properties and Fabrication in Applied Materials for Energy Characterization to enable Memory Applications Transition (ALL INVITED Atomic Layer Processing SESSION)