www.hitachi.com/rev Volume 65 Number 7 August 2016 and Analysis Technologies Measurement Science and Social Innovation for Future Hitachi Review Vol. 65 No. 7 August 2016 Measurement and Analysis Technologies for Future Science and Social Innovation Volume 65 Number 7 August 2016 From the Editor Measurement and analysis technologies contribute to science and technology by enabling new discoveries such as the deoxyribonucleic acid (DNA) double helix and the detection of neutrinos. They also deliver numerous benefits in our daily lives, such as conducting clinical analyses at a health check and testing the composition of food. In industry, they are used in research and development and in process and quality control. Advanced measurement and analysis technologies are recognized as promoting innovation and boosting scientific and technical competitiveness. In these ways, measurement and analysis technologies can be thought of as underpinning the progress of science and society. This issue of Hitachi Review presents the latest trends and solutions in measurement and analysis from numerous fields, including the environment and renewable energy, new materials, life science, and electronics. In Expert Insights, Prof. Daisuke Shindo, a professor at Tohoku University who is also team leader of Emergent Phenomena Observation Technology Research Team at the National Research and Development Institute, RIKEN, has contributed an article about This Issue’s Editorial Coordinators his expectations for the world’s first atomic-resolution holography Katsutaka Kimura electron microscope, which was developed by Hitachi with support Toshio Masuda from the Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program). Planning Committee In Technotalk, leaders active in leading-edge research talk about Norihiro Suzuki (chairman) the latest trends in the field of measurement and analysis technology Nobuya Abematsu and prospects for the future. We also have articles, Special Kunio Uchiyama Contributions, about work being undertaken in partnership with Kenji Katou Hitachi covering the latest university research. Prof. Dr. Max Haider Keiichiro Nakanishi Takashi Hotta from Corrected Electron Optical Systems GmbH (CEOS) of Germany Kazuo Minami also contributes an article about joint development with Hitachi Kazuaki Otomo dealing with the aberration corrector that enabled the Masayuki Shimono atomic-resolution holography electron microscope to achieve Takeshi Yoshikawa Editorial Coordinator, world-leading resolution. Masahiro Mimura “Measurement and Analysis Technologies Yasushi Yokosuka for Future Science and Social Innovation” Other articles describe various products and solutions for Kouji Nomura Issue measurement and analysis from Hitachi that satisfy the latest Takahiro Tachi requirements. As requirements become more diverse, measurement Yoshiki Kakumoto and analysis technologies are being called on to deliver not only higher Shuuichi Kanno performance but also new functions for specific purposes or ways of Takayuki Suzuki integrating or merging different measurement and analysis techniques. Takeshi Inoue The articles in this issue cover numerous initiatives of this nature. Akira Banno Through collaborative creation, Hitachi is working to develop new businesses and services by establishing a common understanding of Hitachi Review Volume 65 Number 7 August 2016 the challenges facing customers and partners. Above all else, ISSN 0018-277X Hitachi Review is published by Hitachi, Ltd. measurement and analysis technologies are closely linked to their Visit our site at www.hitachi.com/rev requirements, and Hitachi collaborates with key opinion leaders to Toshio Masuda, P.E.Jp Address correspondence to: The Editor, Hitachi Review, Advertising create leading-edge technologies and solutions. Dept., Corporate Brand & Communications Div., Hitachi, Ltd. Chief Engineer I hope that this issue of Hitachi Review will foster understanding of Shin-Otemachi Building, 2-1, Otemachi 2-chome, Chiyoda-ku, Tokyo, Planning and Facilitating Department 100-0004 Japan Research and Development Division Hitachi’s measurement and analysis technologies and its work on Editor-in-Chief: Akira Banno Hitachi High-Technologies developing products and solutions, and will provide us all with ©2016 Hitachi, Ltd. Corporation (serving as editor at time this issue was written) opportunities for the collaborative creation of new value. Date of Issue: August, 2016 Printed in Japan by Hitachi Document Solutions Co., Ltd. Other company and product names in this booklet may be trademarks or XR-E065 registered trademarks of their respective owners. Measurement and Analysis Technologies for Future Science and Social Innovation Contents Expert Insights 81 Measurement of Surface Profi le and Layer 6 Expectations for Atomic-resolution Holography Cross-section with Wide Field of View and High Electron Microscope Precision Daisuke Shindo —VS1000 Series Coherence Scanning Interferometer— Technotalk Yugo Onoda, Kiyotaka Ishibashi, Kaori Yanagawa, Yoshihiro Sato 8 Use of Interdisciplinary Knowledge to Improve 86 Fluorescence Pattern Analysis to Assist Food Measurement and Analysis Technology Safety Hiroshi Kitagawa, Tatsuo Ushiki, Masaaki Sugiyama, Sukehiro Ito, —Food Analysis Technology Driven by Fluorescence Ryuichiro Tamochi, Hiroyuki Shinada Fingerprints— Overview Jun Horigome, Michinari Kozuma, Toshihiro Shirasaki 14 Hitachi’s Measurement and Analysis Technologies 93 Compact Mass Detector for Drug Discovery for Future Science and Social Innovation Research Ryuichiro Tamochi, Sukehiro Ito, Katsumi Hayakawa, Toshio Masuda —Chromaster 5610 Mass Detector— Special Contributions Masaki Watanabe, Norimasa Minamoto, Masaki Yoshie, Kosaku Toyosaki, —Development of Leading-edge Products and Solutions Shinji Yoshioka through Collaboration— 100 Rapid Detection and Element Identifi cation of 28 Development of Aberration Correctors for the Fine Metal Particles for Underpinning Battery HD-2700, the HF3300S, the 1.2 MV FIRST Quality Program, and Future Prospects —X-ray Particle Contaminant Analyzer EA8000— Max. Haider, Heiko Müller Tsuneo Sato, Yoshiki Matoba 34 Studies on Degradation Mechanism of 105 Coating Thickness Measurement with High- Electrocatalysts for Fuel Cells through In-situ performance for Latest Electronic Fine SEM/STEM Observation Components of Mobile Devices Akari Hayashi —FT150 Series Fluorescent X-ray Coating Thickness 39 Microstructure Analysis by Means of the Gauge— Orthogonally-arranged FIB-SEM Haruo Takahashi, Masaki Izumiyama, Ryusuke Hirose, Toshiyuki Takahara Toru Hara 110 Ultrasonic Imaging of Microscopic Defects to 45 Development of High-performance Zeolite Help Improve Reliability of Semiconductors and Catalysts for Effective Use of Carbon Resources Electronic Devices Toshiyuki Yokoi,Takashi Tatsumi —Scanning Acoustic Tomograph— Kaoru Kitami, Kaoru Sakai, Takashi Tomita, Kazuyoshi Kurosawa 50 Advanced Biomedical Transmission Electron Microscopy 115 An Inspection and Measurement Technology Akira Sawaguchi Platform Leading the Way to More Advanced Manufacturing 56 Development of SEM for Realtime 3D Imaging Takenori Hirose, Maki Tanaka, Hiroyuki Nakano, Shin-ichi Taniguchi, and Its Applications in Biology Toshiharu Miwa Tatsuo Ushiki, Futoshi Iwata, Wataru Kotake, Sukehiro Ito Topics Featured Articles 121 Global Collaboration with CEMES, French Supplying Innovations in Measurement, Analysis, and National Center for Scientifi c Research Observation and a Wide Range of Solutions —Joint Project to Implement Aberration Corrector in High- 63 Easy-to-use Atmospheric-pressure Scanning end TEM— Electron Microscope for Food, Plants, and Tissue Hitoshi Iida, Yoshifumi Taniguchi —AE1500 Tabletop Atmospheric SEM— 124 TM Series Tabletop Microscopes: Creating a New Yusuke Ominami, Kenji Nakahira, Akiko Hisada, Makoto Nakabayashi, Minami Shoji, Mai Yoshihara, Kenichi Sato, Sukehiro Ito Market, Initiatives for Social Responsibility 71 Nanoscale Imaging, Material Removal and —Advancing Electron Microscopes with Improved Usability Deposition for Fabrication of Cutting-edge and Accessibility— Masahiko Ajima, Daihei Terada, Robert J.Gordon Semiconductor Devices —Ion-beam-based Photomask Defect Repair Technology— Anto Yasaka, Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda 76 Measurement of Microscopic Three-dimensional Profi les with High Accuracy and Simple Operation —AFM5500M Scanning Probe Microscope— Satoshi Hasumura, Shigeru Wakiyama, Masato Iyoki, Kazunori Ando Measurement and Analysis Technologies for Future Science and Social Innovation From the latest academic research to corporate technology development and production, measurement and analysis technologies are used in a variety of places in various forms. In the natural sciences in particular, advanced measurement and analytical instruments are vital to leading-edge research and the discovery of new knowledge. Hitachi has developed and commercialized a wide range of instruments for these technologies, particularly electron microscopes and analyzers. These proprietary technologies and diverse products of Hitachi are, together with the solutions that integrate them, contributing to advances in measurement and analysis technology itself and to the progress of science and society, and are helping to achieve social innovations that seek technology-based solutions for the issues faced by society. 168 Hitachi Review Vol. 65 (2016), No. 7 Expert Insights Expectations for Atomic-resolution Holography Electron Microscope Prof. Daisuke