Silicon-On-Insulator Technology: Materials to VLSI Materials to VLSI

Silicon-On-Insulator Technology: Materials to VLSI Materials to VLSI

J.-P. Colinge Silicon-on-Insulator Technology: Materials to VLSI Materials to VLSI Silicon-on-Insulator Technology: Materials to VLSI, Third Edition, retraces the evolution of SOI materials, devices and circuits over a period of roughly twenty years. Twenty years of progress, research and development during which SOI material fabrication techniques have been born and abandoned, devices have been invented and forgotten, but, most importantly, twenty years during which SOI Technology has little by little proven it could outperform bulk silicon in every possible way. The turn of the century turned out to be a milestone for the semiconductor industry, as high-quality SOI wafers suddenly became available in large quantities. From then on, it took only a few years to witness the use of SOI technology in a wealth of applications ranging from audio amplifiers and wristwatches to 64-bit microprocessors. This book presents a complete and state-of-the-art review of SOI materials, devices and circuits. SOI fabrication and characterization techniques, SOI CMOS processing, and the physics of the SOI MOSFET receive an in-depth analysis. 3rd ed. 2004, XIII, 366 p. Printed book Hardcover ▶ 199,99 € | £179.99 | $249.99 ▶ *213,99 € (D) | 219,99 € (A) | CHF 236.00 eBook Available from your bookstore or ▶ springer.com/shop MyCopy Printed eBook for just ▶ € | $ 24.99 ▶ springer.com/mycopy Order online at springer.com ▶ or for the Americas call (toll free) 1-800-SPRINGER ▶ or email us at: [email protected]. ▶ For outside the Americas call +49 (0) 6221-345-4301 ▶ or email us at: [email protected]. The first € price and the £ and $ price are net prices, subject to local VAT. Prices indicated with * include VAT for books; the €(D) includes 7% for Germany, the €(A) includes 10% for Austria. Prices indicated with ** include VAT for electronic products; 19% for Germany, 20% for Austria. All prices exclusive of carriage charges. Prices and other details are subject to change without notice. All errors and omissions excepted..

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