Safety Data Sheet Material Name: SiCl4; 四氯化矽 SDS ID: 00229710 (TAIWAN) SECTION 1: Identification of the substance/mixture and of the company/undertaking Product identifier Chemical name: SiCl4; 四氯化矽 Synonyms: SILICON CHLORIDE; TETRACHLOROSILANE; SILICON TETRACHLORIDE; TETRACHLOROSILICON; PERCHLOROSILANE; SILICON CHLORIDE (SiCl4); SILICON(IV) CHLORIDE; UN 1818; Cl4Si Chemical Family: Halogenated Silane Recommended Use: semiconductor manufacture Restrictions on Use: None known Details of the supplier of the safety data sheet Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America) 製造者ヽ輸入者或供應者名稱、地址及電話： 美商英特格有限公司台灣分公司 30059新竹市水利路81號4樓之7 03-5710178 (代表號) 緊急聯絡電話/傳真電話： 0800-057-119 00801-14-8954(CHEMTREC) 03-5729520(傳真) +1-703-527-3887 (國際) E-mail: [email protected] SECTION 2: Hazards identification Chemical Hazard(s) Classification: Acute Toxicity - Oral - Category 3 Acute Toxicity - Inhalation - Vapor - Category 3 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 3 ( respiratory system ) Label content: Hazard symbols ____________________________________________________________ Page 1 of 10 Issue date: 2021-06-02 Revision 3.1 Print date: 2021-06-02 Safety Data Sheet Material Name: SiCl4; 四氯化矽 SDS ID: 00229710 (TAIWAN) Signal word Danger Hazard statements H331 Toxic if inhaled. H301 Toxic if swallowed. H314 Causes severe skin burns and eye damage. H335 May cause respiratory irritation. Precautionary statements Prevention P260 Do not breathe vapor or mist. P264 Wash thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P271 Use only outdoors or in a well-ventilated area. P270 Do not eat, drink or smoke when using this product. Response P310 Immediately call a POISON CENTER or doctor. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P321 Specific treatment (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Storage P403+P233 Store in a well-ventilated place. Keep container tightly closed. P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Other hazards: Reacts violently with water. SECTION 3: Composition / information on ingredients Component Name CAS Hazardous ingredients (% of the content) SILICON TETRACHLORIDE 10026-04-7 100 Impurities and stabilizing additives contributing to the GHS Classification None ____________________________________________________________ Page 2 of 10 Issue date: 2021-06-02 Revision 3.1 Print date: 2021-06-02 Safety Data Sheet Material Name: SiCl4; 四氯化矽 SDS ID: 00229710 (TAIWAN) SECTION 4: First aid measures Description of Necessary Measures Inhalation: If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin contact: Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing before reuse. Destroy contaminated shoes. Eye contact Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion: If swallowed, do NOT induce vomiting. Rinse mouth. Get immediate medical attention. Most Important Symptoms/Effects Symptoms: Immediate: Toxic if inhaled, toxic if swallowed, respiratory tract burns, skin burns, eye burns, mucous membrane burns Symptoms: Delayed: No information on significant adverse effects. Protection of first-aiders Wear suitable protective clothing. Perform first aid measures in a safe area. Indication of any immediate medical attention and special treatment needed: Treat symptomatically and supportively. Note to Physicians: For inhalation, consider oxygen. Avoid gastric lavage or emesis. SECTION 5: Firefighting measures Suitable extinguishing media: carbon dioxide, regular dry chemical, dry sand, alcohol-resistant foam. Large fires: water spray or fog, alcohol-resistant foam Unsuitable Extinguishing Media: Do not use water. Specific hazards arising from the chemical: Negligible fire hazard. Fire Fighting Measures: Move container from fire area if it can be done without risk. Do not scatter spilled material with high- pressure water streams. Fight fire from maximum distance or use unmanned hose holders or monitor nozzles. Do not get water inside container. Cool containers with water spray until well after the fire is out. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. Stay away from the ends of tanks. Use extinguishing agents appropriate for surrounding fire. Avoid inhalation of material or combustion by-products. Stay upwind and keep out of low areas. Dike for later disposal. Protective Equipment and Precautions for Firefighters: Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. Hazardous combustion products: hydrogen chloride, oxides of silicon ____________________________________________________________ Page 3 of 10 Issue date: 2021-06-02 Revision 3.1 Print date: 2021-06-02 Safety Data Sheet Material Name: SiCl4; 四氯化矽 SDS ID: 00229710 (TAIWAN) SECTION 6: Accidental release measures Personal precautions: Wear personal protective clothing and equipment. Environmental precautions: Avoid release to the environment. Methods for Containment: Eliminate all ignition sources if safe to do so. All equipment used when handling the product must be grounded. Do not touch spilled material. Stop leak if possible without personal risk. Do not get water inside container. Reduce vapors with water spray. Cleanup Methods: Absorb with sand or other non-combustible material. Collect spilled material in appropriate container for disposal. Avoid contact with combustible materials. Only personnel trained for the hazards of this material should perform clean up and disposal. Keep unnecessary people away, isolate hazard area and deny entry. Ventilate closed spaces before entering. SECTION 7: Handling and storage Precautions for safe handling: Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/clothing and eye/face protection. Use only outdoors or in a well-ventilated area. Do not eat, drink or smoke when using this product. Conditions for safe storage, including any incompatibilities: Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store and handle in accordance with all current regulations and standards. Store in a cool, dry place. Store under an inert atmosphere. Avoid contact with water or moisture. Keep separated from incompatible substances. Incompatible Materials: acids, alcohols, bases, metals, oxidizing materials SECTION 8: Exposure controls/personal protection Exposure Guidelines Component Exposure Limits Taiwan and ACGIH have not developed exposure limits for any of this product's components. ACGIH - Threshold Limit Values - Biological Exposure Indices (BEI) There are no biological limit values for any of this product's components. Appropriate engineering controls: Provide local exhaust or process enclosure ventilation system. Ensure compliance with applicable exposure limits. PERSONAL PROTECTIVE EQUIPMENT Respiratory Protection: Under conditions of frequent use or heavy exposure, respiratory protection may be needed. Respiratory protection is ranked in order from minimum to maximum. Consider warning properties before use. Any air- purifying full-facepiece respirator equipped with an N95, R95, or P95 filter. The following filters may also be used: N99, R99, P99, N100, R100 or P100. Any powered, air-purifying respirator with a tight-fitting facepiece and a high-efficiency particulate filter. Any supplied-air respirator with a full facepiece that is operated in a pressure-demand or other positive-pressure mode. For Unknown Concentrations or ____________________________________________________________ Page 4 of 10 Issue date: 2021-06-02 Revision 3.1 Print date: 2021-06-02 Safety Data Sheet Material Name: SiCl4; 四氯化矽 SDS ID: 00229710 (TAIWAN) Immediately Dangerous to Life or Health -. Any supplied-air respirator with a full facepiece that is operated in a pressure-demand or other positive-pressure mode in combination with an auxiliary self-contained breathing apparatus operated in pressure-demand or other positive-pressure mode. Any self-contained breathing apparatus that has a full facepiece and is operated in a pressure-demand or other positive-pressure mode. Hand protection: Wear appropriate chemical resistant gloves. Eye/face protection: Wear splash resistant safety goggles with a faceshield. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Skin and Body Protection: Wear appropriate chemical resistant clothing. Protective Materials: