Nanosurf FlexAFM Operating Instructions for SPM Control Software Version 3.1 “NANOSURF” AND THE NANOSURF LOGO ARE TRADEMARKS OF NANOSURF AG, REGISTERED AND/OR OTHERWISE PROTECTED IN VARIOUS COUNTRIES. COPYRIGHT © JULY 2012, NANOSURF AG, SWITZERLAND. OPERATING INSTRUCTIONS V3.1R0, BT03710-15. Table of contents Table of contents PART A: INTRODUCTION TO THE INSTRUMENT CHAPTER 1: The FlexAFM 15 1.1: Introduction.............................................................................................. 16 1.2: Components of the system...................................................................... 17 1.2.1: Contents of the Tool Set .................................................................................18 1.3: Connectors, indicators and controls....................................................... 19 1.3.1: The FlexAFM scan head ..................................................................................19 1.3.2: The Easyscan 2 Controller..............................................................................20 1.3.3: The FlexAFM sample stage............................................................................22 CHAPTER 2: Installing the FlexAFM 23 2.1: Installing the SPM Control Software....................................................... 24 2.1.1: Preparations before installing ......................................................................24 2.1.2: Initiating the installation procedure..........................................................24 2.2: Installing the hardware............................................................................ 25 2.2.1: Installing the Easyscan 2 controller............................................................26 2.2.2: Installing the FlexAFM Video Camera........................................................26 2.2.3: Installing the Signal Module A.....................................................................28 2.2.4: Installing the FlexAFM Scan Head ..............................................................28 2.3: Hardware recognition.............................................................................. 30 CHAPTER 3: Preparing for measurement 31 3.1: Introduction.............................................................................................. 32 3.2: Initializing the Easyscan 2 Controller ..................................................... 32 3.3: Installing the cantilever........................................................................... 33 3.3.1: Selecting a cantilever ......................................................................................34 3.3.2: Removing the Cantilever Holder.................................................................35 3.3.3: Inserting the cantilever in the Cantilever Holder..................................36 3.3.4: Attaching the Cantilever Holder to the Scan Head ..............................38 3.4: Installing the sample................................................................................ 38 3.4.1: Preparing the sample......................................................................................38 3.4.2: Nanosurf samples.............................................................................................39 3.4.3: The Sample Stage .............................................................................................42 3.4.4: Mounting a sample..........................................................................................44 CHAPTER 4: A first measurement 45 4.1: Introduction.............................................................................................. 46 4.2: Running the microscope simulation....................................................... 46 4.2.1: Entering and changing parameter values ...............................................47 4 4.3: Preparing the instrument ........................................................................ 48 4.4: Approaching the sample ......................................................................... 48 4.4.1: Manual coarse approach using the FlexAFM Sample Stage .............49 4.4.2: Manual fine approach using the leveling screws..................................51 4.4.3: Automatic final approach ..............................................................................52 4.5: Starting a measurement .......................................................................... 55 4.6: Selecting a measurement area................................................................ 56 4.7: Storing the measurement........................................................................ 57 4.8: Creating a basic report............................................................................. 58 4.9: Further options......................................................................................... 58 CHAPTER 5: Improving measurement quality 61 5.1: Removing interfering signals.................................................................. 62 5.1.1: Mechanical vibrations .....................................................................................62 5.1.2: Electrical interference......................................................................................62 5.1.3: Infrared and other light sources..................................................................63 5.2: Adjusting the measurement plane ......................................................... 63 5.3: Judging tip quality ................................................................................... 67 CHAPTER 6: Finishing measurements 69 6.1: Finishing scanning................................................................................... 70 6.2: Turning off the instrument ...................................................................... 70 6.3: Storing the instrument ............................................................................ 71 PART B: SOFTWARE REFERENCE CHAPTER 7: The user interface 75 7.1: General concept and layout..................................................................... 76 7.2: The workspace.......................................................................................... 77 7.3: Operating windows.................................................................................. 78 7.3.1: Entering and changing parameter values ...............................................79 7.4: Document space ....................................................................................... 80 7.5: Panels ........................................................................................................ 81 7.6: Ribbon....................................................................................................... 83 7.7: Status bar.................................................................................................. 84 7.8: View tab..................................................................................................... 85 7.8.1: Workspace group..............................................................................................85 7.8.2: Panels group.......................................................................................................85 7.8.3: Window group ...................................................................................................86 7.9: SPM Parameters dialog............................................................................ 86 5 CHAPTER 8: Operating modes 89 8.1: Introduction.............................................................................................. 90 8.2: Acquisition tab......................................................................................... 90 8.2.1: Preparation group ............................................................................................90 8.3: Static Force mode ..................................................................................... 93 8.4: Dynamic Force mode................................................................................ 93 8.5: Phase Contrast mode ............................................................................... 94 8.6: Force Modulation mode........................................................................... 96 8.7: Spreading Resistance mode .................................................................... 97 8.8: Lateral Force mode................................................................................... 98 8.9: Kelvin Probe Force Microscopy ............................................................... 98 8.9.1: Introduction........................................................................................................98 8.9.2: Operating principle..........................................................................................99 8.9.3: System requirements.......................................................................................99 8.9.4: Procedures..........................................................................................................101 8.10: Scanning Thermal mode......................................................................... 110 8.10.1: SThM measurements......................................................................................110 8.10.2: Nano-TA measurements................................................................................110 8.10.3: System requirements and procedures.....................................................111 8.11: SPM Parameters dialog..........................................................................