Safety Data Sheet Material Name: HFCL4 SDS ID: 00227583P Section 1 - PRODUCT AND COMPANY IDENTIFICATION Material Name HFCL4 Synonyms HAFNIUM TETRACHLORIDE; HAFNIUM (IV) CHLORIDE; (T-4) HAFNIUM CHLORIDE (HfCl4); HAFNIUM CHLORIDE; Cl4Hf Chemical Family metal, halides Product Use semiconductor manufacture Restrictions on Use None known Details of the supplier of the safety data sheet Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America) Emergency Telephone Number: CHEMTREC - U.S. - 1-800-424-9300 CHEMTREC - Intl. - 1-703-527-3887 E-mail: [email protected] Section 2 - HAZARDS IDENTIFICATION Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Combustible Dust Skin Corrosion/Irritation - Category 1B Serious Eye Damage/Eye Irritation - Category 1 Specific target organ toxicity - Single exposure - Category 3 ( respiratory system ) GHS Label Elements Symbol(s) Signal Word Danger Hazard Statement(s) ____________________________________________________________ Page 1 of 9 Issue date: 2021-05-11 Revision 6.0 Print date: 2021-05-12 Safety Data Sheet Material Name: HFCL4 SDS ID: 00227583P May form combustible dust concentrations in air. Causes severe skin burns and eye damage. May cause respiratory irritation. Precautionary Statement(s) Prevention Do not breathe dust. Wear protective gloves/protective clothing/eye protection/face protection. Wash thoroughly after handling. Use only outdoors or in a well-ventilated area. Response Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment may be needed, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Storage Store in a well-ventilated place. Keep container tightly closed. Store locked up. Disposal Dispose of contents/container in accordance with local/regional/national/international regulations. Other Hazards None known. Section 3 - COMPOSITION / INFORMATION ON INGREDIENTS CAS Component Name Percent 13499-05-3 HAFNIUM CHLORIDE 100 Section 4 - FIRST AID MEASURES Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing before reuse. Destroy contaminated shoes. Eyes Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion If swallowed, do NOT induce vomiting. Rinse mouth. Get immediate medical attention. Most Important Symptoms/Effects Acute ____________________________________________________________ Page 2 of 9 Issue date: 2021-05-11 Revision 6.0 Print date: 2021-05-12 Safety Data Sheet Material Name: HFCL4 SDS ID: 00227583P respiratory tract burns, skin burns, eye burns, mucous membrane burns Delayed No information on significant adverse effects. Note to Physicians For inhalation, consider oxygen. Avoid gastric lavage or emesis. Section 5 - FIRE FIGHTING MEASURES Extinguishing Media Suitable Extinguishing Media carbon dioxide, regular dry chemical, alcohol-resistant foam. Large fires: Use dry chemical, carbon dioxide, alcohol-resistant foam or water spray. Unsuitable Extinguishing Media Water Special Hazards Arising from the Chemical Negligible fire hazard. Avoid generating dust; fine dust dispersed in air in sufficient concentrations, and in the presence of an ignition source is a potential dust explosion hazard. Hazardous Combustion Products Chlorine, hafnium, hydrogen chloride Advice for firefighters Negligible fire hazard. Avoid generating dust; fine dust dispersed in air in sufficient concentrations, and in the presence of an ignition source is a potential dust explosion hazard. Fire Fighting Measures Move container from fire area if it can be done without risk. Cool containers with water spray until well after the fire is out. Use extinguishing agents appropriate for surrounding fire. Do not get water directly on material. Do not get water inside container. Large fires: Flood with fine water spray. Reduce vapors with water spray. Apply water from a protected location or from a safe distance. Avoid inhalation of material or combustion by-products. Stay upwind and keep out of low areas. Special Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. Section 6 - ACCIDENTAL RELEASE MEASURES Personal Precautions, Protective Equipment and Emergency Procedures Wear personal protective clothing and equipment. Methods and Materials for Containment and Cleaning Up Do not touch spilled material. Stop leak if possible without personal risk. If sweeping of a contaminated area is necessary, use a dust suppressant agent. Collect spill using a vacuum cleaner with a HEPA filter or wet and scoop up dry spills. Avoid sweeping spilled dry material. Eliminate ignition sources including sources of electrical, static or frictional sparks. Small spills. Collect spilled material in appropriate container for disposal. Large spills. Keep unnecessary people away, isolate hazard area and deny entry. Environmental Precautions Avoid release to the environment. Section 7 - HANDLING AND STORAGE Precautions for Safe Handling Do not breathe dust. Use methods to minimize dust. Wash thoroughly after handling. Wear protective gloves/clothing and eye/face protection. Use only outdoors or in a well-ventilated area. Avoid significant ____________________________________________________________ Page 3 of 9 Issue date: 2021-05-11 Revision 6.0 Print date: 2021-05-12 Safety Data Sheet Material Name: HFCL4 SDS ID: 00227583P deposits of material, especially on horizontal surfaces, which may become airborne and form combustible dust clouds and may contribute to secondary explosions. Conditions for Safe Storage, Including any Incompatibilities Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store and handle in accordance with all current regulations and standards. Avoid contact with water or moisture. Store in a cool, dry place. Store in original package that provides an inert atmosphere or ensure the transfer of material remains stored in an inert environment. Keep separated from incompatible substances. Incompatible Materials Acids, metals, oxidizing materials Section 8 - EXPOSURE CONTROLS / PERSONAL PROTECTION Component Exposure Limits HAFNIUM CHLORIDE 13499-05-3 ACGIH: 0.5 mg/m3 TWA as Hf (related to Hafnium compounds) NIOSH: 0.5 mg/m3 TWA as Hf (related to Hafnium compounds) 50 mg/m3 IDLH as Hf (related to Hafnium compounds) Mexico: 0.5 mg/m3 TWA [VLE-PPT ] as Hf (related to Hafnium compounds) ACGIH - Threshold Limit Values - Biological Exposure Indices (BEI) There are no biological limit values for any of this product's components. Engineering Controls Provide local exhaust or process enclosure ventilation system. Ensure that dust-handling systems (such as exhaust ducts, dust collectors, vessels, and processing equipment) are designed in a manner to prevent the escape of dust into the work area (i.e., there is no leakage from the equipment). Ensure compliance with applicable exposure limits. Individual Protection Measures, such as Personal Protective Equipment Eye/face protection Wear splash resistant safety goggles with a faceshield. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Skin Protection Wear appropriate chemical resistant clothing. Respiratory Protection Under conditions of frequent use or heavy exposure, respiratory protection may be needed. Respiratory protection is ranked in order from minimum to maximum. Consider warning properties before use. Any particulate respirator equipped with an N95, R95, or P95 filter (including N95, R95, and P95 filtering facepieces) except quarter-mask respirators. The following filters may also be used: N99, R99, P99, N100, R100 or P100. Any air-purifying full-facepiece respirator equipped with an N95, R95, or P95 filter. The following filters may also be used: N99, R99, P99, N100, R100 or P100. Any air-purifying respirator with a high-efficiency particulate filter. Any powered, air-purifying respirator with a tight-fitting facepiece and a high-efficiency particulate filter. Any supplied-air respirator with a full facepiece that is operated in a pressure-demand or other positive-pressure mode. For Unknown Concentrations or Immediately Dangerous to Life or Health - Any supplied-air respirator with a full facepiece that is operated in a pressure-demand or other positive-pressure mode in combination with an auxiliary self-contained breathing apparatus operated in ____________________________________________________________ Page 4 of 9 Issue date: 2021-05-11 Revision 6.0 Print date: 2021-05-12 Safety Data Sheet Material Name: HFCL4 SDS ID: 00227583P pressure-demand