IEEE NEMS2016 Sunday 17 April Conference schedule April 17, 2016 Sendai, Japan IEEE-NEMS2016 & iCAN'16 IEEE-NEMS2016 Technical Tour April 18-20, 2016 Matsushima, Japan Studio Hall, L-Park Sendai Gallery Hall, L-Park Sendai Tohoku University 9:00 Registration (NEMS2016) (9:10- ) Registration (iCAN'16) (9:30-10:30) 10:00 Premium Tutorial by Prof. Masayoshi Esashi 11:00 (9:30-12:30) Exhibition (iCAN'16) (10:30-13:30) 12:00 13:00 14:00 Presentation of Applications (iCAN'16) (13:00-16:10) Technical Tour (NEMS2016) 15:00 (14:00-17:30) ①Jun-ichi Nishizawa Memorial Research Center 16:00 ②Department of Engineering ③Micro/Nano-Machining Research and Education 17:00 Center Award Ceremony (iCAN'16) 18:00 (17:30-18:30) NEMS2016 & iCAN'16 Joint Reception 18:30-20:00 (18:30-20:00) Monday 18 April Hotel Matsushima Taikanso Room A Room B1-2 Room B3 Room C Room D Room E (Fuji) (Chiyo1+Chiyo2) (Chiyo3) (Hagi) (Tokiwa) (Suehiro) 8:30-9:30 Registration 9:30-9:40 Grand Opening Plenary 1 9:40-10:30 Prof. Neto Break Break A1L-A A1L-B A1L-C A1L-D A1L-E 10:50-12:25 Micro-fluidics Integration & Nanometrics 1 Nano-biology and Molecular Robotics and Nano-fluidics 1 Systems Informatics Session I (*) Lunch Lunch A2L-A A2L-B A2L-C A2L-D A2L-E CM Ho Best Paper Exhibition NEMS/MEMS Graphene and Biomedical Molecular Robotics 13:25-15:00 Award Session （10:30-17:15） Fabrication Related Materials Micro/Nano devices Session II (*) (13:25-15:15) Break Break A3L-A A3L-B A3L-C A3L-D A3L-E Micro-fluidics NEMS/MEMS 1 Conference Paper Nano Scale Molecular Robotics 15:20-16:55 and Nano-fluidics 4 Award Session Fabrication Session III (*) (15:35-16:35) Break Break A4P-B 17:15-19:05 Poster Session 19:05-21:05 Banquet（Banquet Room:TENKAI） (* International Symposium on Molecular Robotics) Co-sponsored by KAKENHI Molecular Robotics ) Tuesday 19 April Hotel Matsushima Taikanso Room A Room B1-2 Room B3 Room C Room D Room E (Fuji) (Chiyo1+Chiyo2) (Chiyo3) (Hagi) (Tokiwa) (Suehiro) 8:00-8:35 Registration Plenary 8:35-9:25 Prof. Ayazi Break Break B1L-A B1L-B B1L-C B1L-D B1L-E Tactile Devices and Advanced Micro/Nano Nanoscale Robotics, Micro-fluidics and Metamaterial 9:45-11:00 Systems Fabrication Technologies Assembly, and Nano-fluidics 2 Special Session 1 (**) Exhibition 1 Automation Break （9:25-12:20） Break B2L-A B2L-B B2L-C B2L-D B2L-E Piezoelectric MSMS Advanced Micro/Nano Nano-biology and Cell Molecular Sensors 1 Metamaterial 11:20-12:20 Fabrication Technologies Special Session 2 (**) 2 (11:10-12:25) Lunch B3P-B 13:20-15:10 Poster Session /Exhibit Inspection B4L-A B4L-B B4L-C B4L-D B4L-E NEMS/MEMS 2 Fabrication of Student Paper Award 2D Materials and Nanophotonics/ 15:10-16:45 Organic Materials Session Their Application Microoptics 1 (15:10-17:00) (** Cooperation with IEEJ (code:E) Investigating R&D Committee on Applications of Metamaterials and Plasmonics to Optical and Electronic Devices) Wednesday 20 April Hotel Matsushima Taikanso Room A Room B1 Room B3 Room C Room D Room E (Fuji) (Chiyo１) (Chiyo3) (Hagi) (Tokiwa) (Suehiro) 8:30-8:55 Registration Special Talk 8:55-9:20 Prof. Takata Break C1L-A C1L-F C1L-B C1L-C C1L-D C1L-E Bio & Medical Devices Micro/Nanomechanics Fabrication of Molecular Sensors 2 Nanocarbon based Nanophotonics/ 9:30-10:55 and instrumentation 1 Functional Materials Devices and Systems 1 Microoptics 2 (9:30-11:00) Break C2L-A C2L-F C2L-B C2L-C C2L-D C2L-E 11:10-12:35 Micro-fluidics and Micro/Nanomechanics Application of MEMS with Nanocarbon based Nanophotonics/ Nano-fluidics 3 and instrumentation 2 Nano/Micro Structures Molecular Sensor Devices and Systems 2 Microoptics 3 Break Award Ceremony 12:45-13:00 & Closing IEEE-NEMS 2016 Program Schedule April 17, 2016 Sendai, Japan April 18-20, 2016 Matsushima, Japan ******************************************************************************** Session Code: A0L-A Session Title: Plenary 1 Session Date/Hours: 9:40 AM - 10:30 AM, April 18, 2016 Session Room: Room A (FUJI, 1F) Session Chair: Masaaki Tanemura, Nagoya Institute of Technology Session Co-chair: Takahito Ono, Tohoku University ******************************************************************************** Paper ID: A0L-A-1 PLEANARY TALK - 2D Materials: science and technology Antonio H. Castro Neto Director, Centre for Advanced 2D Materials and Graphene Research Centre, Distinguished Professor, Department of Physics, Professor, Department of Electrical and Computer Engineering, Professor, Department of Materials Science Engineering, National University of Singapore Abstract – Over the last five years the physics of two-dimensional (2D) materials and heterostructures based on such crystals has been developing extremely fast. From one hand, with new 2D materials, more and more truly 2D physics started to appear (Kosterlitz-Thouless (KT) behaviour, 2D excitons, commensurate-incommensurate transition, etc). From another - we see the appearance of novel heterostructure devices - tunnelling transistors, resonant tunnelling diodes, light emitting diodes, etc. Composed from individual 2D crystals, such devices utilise the unique properties of those crystals to create functionalities which were not accessible to us in other heterostructures. In this talk I will review the properties of novel 2D crystals and how those properties are used in new heterostructure devices. 1 IEEE-NEMS 2016 Program Schedule April 17, 2016 Sendai, Japan April 18-20, 2016 Matsushima, Japan ******************************************************************************** Session Code: B0L-A Session Title: Plenary 2 Session Date/Hours: 8:35 AM - 9:25 AM, April 19, 2016 Session Room: Room A (FUJI, 1F) Session Chair: Shuji Tanaka, Tohoku University Session Co-chair: Takahito Ono, Tohoku University ******************************************************************************** Paper ID: B0L-A-1 PLEANARY TALK - Inertial-Navigation-on-a-Chip: Self-Calibrating Bulk Acoustic Wave Gyroscopes Farrokh Ayazi Ken Byers Professor of Microsystems Director, Center for MEMS and Microsystems Technologies Georgia Institute of Technology Abstract – Navigation using integrated inertial sensors (gyroscopes and accelerometers) is one of the grand challenges that MEMS researchers have tried to address. A number of challenges have hindered the development of integrated inertial measurement units that can be used for navigation in applications such as autonomous cars, drones, and personal navigation, with the most important one being the “drift” of the gyroscope. High-frequency bulk acoustic wave (BAW) gyroscopes are a new class of MEMS inertial sensors that enable the level of accuracy and robustness against environmental signal that are needed for inertial navigation. In this talk, integration of high frequency tri-axial bulk acoustic gyroscopes and accelerometers on a single-chip using a high aspect-ratio nano-gap process will be presented. Novel self-calibration architectures are being developed to eliminate the drift in gyroscopes, which will be discussed along with wafer level packaging of the IMU and integration with electronics. 2 IEEE-NEMS 2016 Program Schedule April 17, 2016 Sendai, Japan April 18-20, 2016 Matsushima, Japan ******************************************************************************** Session Code: C0L-A Session Title: Special Talk Session Date/Hours: 8:55 AM - 9:20 AM, April 20, 2016 Session Room: Room A (FUJI, 1F) Session Chair: Shuji Tanaka, Tohoku University Session Co-chair: Masaya Toda, Tohoku University ******************************************************************************** Paper ID: C0L-A-1 SPECIAL TALK - The SLiT-J Project: Promising Tool for Science, Technology & Innovation of the Nano-Disciplines Masaki Takata Executive Advisor to the President：SLiT-J Project Tohoku University Abstract – Advanced Synchrotron Radiation(SR) has been recognized as a premier research tool for developments of nano Science and Technology. Large-scale SR facilities around the world constantly evolved to provide super brilliant and superdirective X-ray and has built a new range of applications of the nano-disciplines. Soon after the Great East Japan Earthquake in 2011, a low emittance 3GeV SR facility, Synchrotron Light in Tohoku(SLiT-J), has been projected. The primary target of the project is to achieve single nanometer scale resolution imaging as a “Super Light Source for Industrial Technology”. A unique concept of industry-academy alliance for SR application, “Coalition Concept”, is also arising out of the dialogue with industries and professors about outlook of SLiT-J. The latest status and the perspectives on the project will be presented. 3 IEEE-NEMS 2016 Program Schedule April 17, 2016 Sendai, Japan April 18-20, 2016 Matsushima, Japan ******************************************************************************** Session Code: A1L-A Session Title: Micro-fluidics and Nano-fluidics 1 Session Date/Hours: 10:50: AM - 12:25 PM, April 18, 2016 Session Room: Room A (FUJI, 1F) Session Chair: Hiroaki Takehara, Nara Institute of Science and Technology (NAIST) Session Co-chair: Takanori Ichiki, University of Tokyo ******************************************************************************** Paper ID: A1L-A-1 (#1351) Practical Microfluidic Devices for High Sensitive and Low-Cost Analysis in Biomedical and Environmental Fields Yuzuru Takamura Japan Advanced Institute of Science and Technology, Japan Paper ID: A1L-A-2 (#1274) Microfluidic-Based Diagnostic Device for Early Cancer Detection Takanori Ichiki University of Tokyo, Japan Paper ID: A1L-A-3 (#1127) A Self-Driven Microfluidic