TOHOKU UNIVERSITY Sendai, Japan MEMS Innovation at th Tohoku University The 100 Anniversary of Tohoku University in 2007 Kentaro Totsu Tohoku University was founded in 1907 Assistant Professor as the 3rd National University Office of Cooperative Research and Development Tohoku University JUNBA 2008, January 11, 2008 TOHOKU UNIVERSITY Sendai, Japan TOHOKU UNIVERSITY Sendai, Japan Fundamental Policies 1. “Research-intensive University” as its mission 2. “Have University’s doors open to the World and Community” Nature, 2006 as its principle From Tokyo to Sendai: 96 min 3. “Development of Leading Population of Sendai: 1 million Human Resources” Result of popularity vote in 2004 : 1st: Sapporo, 2nd: Shizuoka, 3rd: Sendai, 4th: Tokyo as its educational goal Bullet train “Shinkansen” TOHOKU UNIVERSITY Sendai, Japan Overview of TOHOKU UNIVERSITY Research and Education Organization Major Research institutes with Arts and Letters our tradition of “Practical Science” Administration Bureau Education University Library(4) Law University Hospital Economics and Management 䊶Institutes for Materials Research Arts and Letters Science – KS steel by Dr. Kotaro Honda Education Medicine 䊶 Law Dentistry Research Institute of Electrical Communication Economics Pharmaceutical Sciences – Yagi Antenna by Dr. Hidetsugu Yagi Undergraduate Schools Science Engineering 䊶Semiconductor Research Institute, (10) Medicine Agricultural Science A congratulatory message on Dentistry International Cultural Studies Semiconductor Research Foundation the establishment of “Tohoku Pharmaceutical Sciences Information Sciences Tohoku University Engineering Life Sciences 䊶Research Institute for Electric and Magnetic Materials Metal Industries Co., Ltd” by Dr. Agriculture Environmental Studies Kotaro Honda (15) Educational Informatics, Research Graduate Schools Division/Education Division ISTU Forerunner of University Ventures Professional Graduate Schools Law School before the Second World War (3) School of Public Policy Institute for Materials Research Accounting School Yagi-Uda Antenna(1929) Institute of Development, Aging and Cancer 䊶Tohoku Metal Industries Co., Ltd. Research Institutes Institute of Fluid Science (5) Research Institute of Electrical Communication (present: NEC TOKIN Corporation) Institute of Multidisciplinary Research for Advanced Materials 䊶Yagi Antenna Co., Ltd Inter-Department Institute for Education and Research (9) (present: Hitachi Kokusai Electric Inc.) University Collaborating Institutions Magnetic recording system (8) Magnetoron(1927) (1932) Biomedical Engineering Research Organization (TUBERO) (1) Overview of TOHOKU UNIVERSITY Overview of TOHOKU UNIVERSITY Liaison and Overseas Offices (As of July 2007) Tohoku University US office Harvard University Supporting strategic application of research achievements to the world University of Cambridge Russian Academy of Supporting collaboration with overseas academia and international Sciences organizations (planning and holding symposium and seminar; developing Moscow State University Syracuse University collaborative researches and contract researches) Supporting cooperative educational opportunity with overseas academia and international organizations for symposium, distant learning, e-learning, short- and long-term overseas education KAIST Supporting Tohoku University Global Promotion Center Institute of Supporting formation of alumni organization in US and its activity Physics, CAS • 4410 El Camino Real, suite #111, Los Altos, CA94022, USA • Tel; +650-947-0664 Fax; +650-947-0244 Web; www.tohoku-u.us Tohoku University Tohoku University Royal Institute China Office US Office of Technology Stanford University Institute National des Sciences Appliquees The University of de Lyon New South Wales Liaison Office: 11 Overseas Office: 2 Overview of TOHOKU UNIVERSITY What’s MEMS MEMS: Micro Electro Mechanical Systems Research Paper Citations Tiny system combining electrical and mechanical components National International Field Citations Papers Ranking Ranking Small and high performance sensor and actuator 1 3 Materials Science 27,139 4,782 ex.) Gyroscope, TOKIMEC, Japan 2 9 Physics 101,289 10,390 2-axis angular velocity and 3-axis acceleration 4 18 Chemistry 59,753 5,935 Mechanical part 2 36 Engineering 11,448 3,173 I4mm I4mm silicon rotor rotor 6 66 All Fields 337,898 38,371 15 x 15 x 2 mm Electrical part Electrostatic levitation control Resource: ISI Essential Science IndicatorsSM, January 1, 1997 – February 28, 2007 rotation speed: 12,000 rpm working as “the heart” or “the key” in a system MEMS products from Tohoku Univ-Industry collaboration MEMS R&D at Tohoku Univ ~over 30 faculties~ Prof. Esashi Prof. Nishizawa MEMS Bio MEMS Nikei-Sangyo (Dec.12,2003) Catheter pH, PCO2 monitor Portable pH sensor Pyroli detector Highest evaluation by industry (Nippon koden) (Shindengen) (Nippon koden) Prof. Hane Prof. Koyanagi Optical MEMS LSI-Bio fusion, Packaging Prof. Kuwano Prof. Arai Prof. Samukawa Nano-system Bio, Medical Plasma nano- Sensor system MEMS processing Integrated capacitive pressure Diaphragm vacuum gage MEMS microphone 2-axes optical scanner sensor (JTEKT) (Canon anelva) (NHK, Panasonic) (Nippon signal) Prof. Niitsuma Prof. Haga Prof. Yamaguchi Medical MEMS Magnetic, Enviromental RF MEMS MEMS Prof. Miura Prof. Matsue Prof. Yugami MEMS fracture Bio MEMS Micro energy analysis source Resonating gyroscope Electrostatically levitated rotational MEMS relay for LSI tester Sacrificial dry etcher (Toyota motors) gyroscope (Tokimec) (Advantest) (Chemitronics) MEMS R&D facility at Tohoku University National project on MEMS at Tohoku University Special Coordination Funds for Promoting Science and Technology supported by MEXT (Japanese Ministry of Education, Science, culture, sports) Formation of Innovation Center for Fusion of Advanced Technologies on; 2 120 m MEMS clean room Micro/Nanomachining Research and 400 users and 40 laboratories registered Tohoku University R&D Center of Excellence for Education Center (MNC) 600 m2 CMOS and MEMS clean room and Integrated Microsystems evaluation facilities 500 users and 100 laboratories registered Term: 2007~2016 (Max.) 2 cm x 2 cm, 2 and 4 inch facilities Budget: ~$70M More than 100 companies dispatched their researchers (full time) Concept R&D Center of Excellence for Integrated Microsystems R&D center based on open innovation • Next generation industry-university linkage system Innovation (Formation of Innovation Center for Fusion of Advanced Technologies • Human resource development beyond several fields sponsored by Ministry of Education...) 2007~2009 (2016) Creative space for MEMS + LSI (SoC(System on Chip) & SiP(System in Package)) • Seeds of next generation industry intelligent production • Integrated microsystem technology Safety space for automobile Elec, Mech. Optics Required technology Arrayed MEMS, Capacitive sensors, RF integrated MEMS, Disposable devices Microsystem process for Hetero-system Realize MEMS having good mechanical property on advanced small feature size LSI Chem. integration Material MEMS-LSI integration Problems to be solved : Bio Information 䂾 Low temperature processes (bonding or deposition) for MEMS having good Med. mechanical properties for micromechanical resonator, switch etc.. scale down limitation FUSION 䂾 Damage-free and compatible processes (temperature, etching, electrostatic Microsystem LSI discharge etc.) Technology technology 䂾 Packaging, Test, Interconnection and so on. Structure Core company A B C D RICOH Member company Ricoh 䊶 TOYOTA Toyota motors 䊶 Shuttle service shared in project PIONEER Pioneer 䊶 SUMITOMO 㩿Toppan technical design center) PRECISION Nippon signal MEMS Core 䊶 KITAGAWA Kitagawa machine works Tohoku University 䊶 NIPPON SIGNAL MEMS process 䊶 COPAL Sumitomo precision 䊶 NDK Nippon densan copal TOPPAN 䊶 MEMSAS Nippon denpa MEMSAS Low temperature additive MEMS process Tohoku Univ. (MEMS core) LSI design “Bus” wafer MEMS Park Consortium NICT Wireless Research Center Shuttle service shared in our project + Low temperature MEMS process Industrial Technology Institute, Miyagi Pref Miyagi Pref. City of Sendai Wireless sensor䋬Ultra- Next generation wireless Wireless sensor䋬Ultra- Optical microsystem group Next generation wireless Sensitive sensor group Optical microsystem group system group Sensitive sensor group MEMS activity in Sendai area system group Miura Kumano, Esashi Ono䋬 Miura,, Kumano, Esashi,, Ono䋬 Hane,Hane, Kanamori, Kanamori, Totsu Totsu,,KawaiKawai Esashi, Yamaguchi, Yugami, Tanaka, Nagasawa Esashi, Yamaguchi, Yugami, Tanaka, Nagasawa Ricoh,Ricoh, Nippon Nippon signal signal Tanaka, Ono Tanaka, Ono Kitagawa,Kitagawa, Sumitomo Sumitomo precision precision MIYAGI OKI ELECTRIC Co., Ltd KURAMOTO SEISAKUSHO CO.,LTD Toppan TDC, Pioneer, Nippon Toppan TDC, Pioneer, Nippon Product,Product, Toyota Toyota motor, motor, Nidec Nidec MEMS acceleration sensor MEMS manufacturing services Denpa Kogyo, Ricoh, NICT Denpa Kogyo, Ricoh, NICT copalcopal electronics electronics ALPS ELECTRIC Co., Ltd 䃂 R&D CENTER MEMS process technology MEMS CORE Co., Ltd Development and trial FREESCALE manufacture of MEMS 2D optical scanner Laser projector MultiprobeMultiprobe data data storage storage On-chip On-chip filter filter WirelessWireless sensor sensor for for harsh harsh environment environment 2D optical scanner Laser projector SEMICONDUCTOR JAPAN Ltd. Sendai R&D design Center 䃂 SONY, SENDAI FabricationTest FabricationTest TechnologyTechnology Society Society TOHOKU SEMICONDUCTOR Magnetic micro devices BioMedical Microsystem