i i Jürgen Jahns and Stefan Helfert: Introduction to Micro- and Nanooptics — 2012/4/5 — page 423 — le-tex i i 423 Index a diffraction limit 104 amplitude object 70 diffraction theory angular spectrum 34–36 – rigorous 164, 169 apodization 96 diffractive lens 158 arrayed waveguide grating 312 diffractive optical element (DOE) 137 AWG 312 dispersion relation 269, 274 axicon 152 Drude model 325 b e band structures 373 effective index 148, 263, 269 beam guiding 238 effective medium 165 beam homogenization 235 effective refractive index 263 beam steering 239 eigenmode 262 Bessel beam 89, 152 electric field 11 Bloch 359 electrowetting 217 boundary condition 14 etch depth 141 Bragg grating 147 etching 185 Bragg reflection 357 – anisotropic 185 Brewster angle 261 – chemical 186 Brillouin zone 372 – deep reactive ion 194 bulk micromachining 129 – dry 187 – isotropic 185 c – physical 187 Clausius–Mosotti relation 167 – plasma 187 complex number 1 evanescent modes 290 coupled mode theory 301 evanescent wave 37 coupling length 298 Ewald sphere 34 critical angle 255, 260 cut-off 272 f cut-off frequency 272 4f setup 103 cut-off wavelength 272 fabrication – holographic 201 d far-field 82 Dammann grating 145 fiber parameter 284 deposition 188 film parameter 269 – chemical vapor 190 Floquet 359 – physical vapor 188 Fourier spectrum 3 – thermal 188 Fourier transform 3 diffraction efficiency 144 Fourier transformation 3 Introduction to Micro- and Nanooptics, First Edition. Edited by J. Jahns, S. Helfert. © 2012 WILEY-VCH Verlag GmbH & Co. KGaA. Published 2012 by WILEY-VCH Verlag GmbH & Co. KGaA. i i i i i i Jürgen Jahns and Stefan Helfert: Introduction to Micro- and Nanooptics — 2012/4/5 — page 424 — le-tex i i 424 Index free-space optics 41, 69 lithography – integrated 241 – analog 202 free space wave impedance 252, 257 – contact 178 free space wave number 252 – electron beam 179 free spectral range 322 – laser 179 Fresnel–Kirchhoff formula 77 – mask-based 177 Fresnel number 82 – projection 179 Fresnel zone plate (FZP) 158 – proximity 179 Littrow mount 134 g local period 139 Gabor superlens 230 Lorentzian function 6 Gaussian beam 31, 35 –Poyntingvector 55 m 2 Gaussian function 6 M -parameter 62 Goos–Haenchen shift 273 magnetic field 11 Gouy phase 33 Maxwell’s equations 11 gradient-index element (GRIN) 116 McCutchen’s theorem 86 grating method of stationary phase 15 – beamsplitter 144 microelectromechanical system – blazed 134, 201 (MEMS) 192 – Bragg 147 microlens – fabrication 198 – gradient-index 120 – lamellar 168 – GRIN rod 123 –linear 96 – membrane-based 220 – zero-order 167 – microfluidic 217 – tunable 207 h micromachining – bulk 192 Helmholtz equation 30 – surface 193 – paraxial 31 microoptics high resolution lens 406 – tunable 207 Huygens–Fresnel–Kirchhoff theory 75, 76 microprism 127 molecular beam epitaxy (MBE) 190 i Moore’s law 173 imaging 100 – hybrid 233 n – integral 229 near field 82 – microchannel 232 nondiffracting beam 152 – microoptical 225 Novolac 176 – multi-aperture 225 numerical aperture 280 integrated free-space optics 241 – MEMS 241 o – PIFSO 242 optical interconnection 231 – stacked 242 intensity 49 p irreducible Brillouin zone 372 paraxial approximation 27, 28 pattern transfer 184 k perfect lens 406 Kirchhoff approximation 70 period 138 permeability 11 l permittivity 11 LIGA 195 PHASAR 312 liquid crystal 208 phase front 28 lithographic process 174 phase object 70 i i i i i i Jürgen Jahns and Stefan Helfert: Introduction to Micro- and Nanooptics — 2012/4/5 — page 425 — le-tex i i Index 425 phase parameter 269, 284 spatial light modulator phase quantization 137 – liquid crystal 208 photon sieve 162 – MEMS 215 photoresist 175 spatial light modulator (SLM) 208 planar integrated free-space optics speed of light 20, 23 (PIFSO) 242 spherical wave 26 plane wave 22 sputtering 189 PMMA 175 strip loaded waveguide 307 Poynting vector 47, 48, 407 strip waveguide 306 proximity effect 181 structuring 173 SU-8 176 supermode 296 r surface micromachining 128 radiation modes 290 ray of light 29 t Rayleigh criterion 106 Talbot effect 87 Rayleigh parameter 32, 33 thick element 70 Rayleigh–Sommerfeld–Debye theory 76 thin element 70 reciprocal lattice 369 thin lens 73, 75 rect-function 4 total internal reflection 39, 251, 255, 260 rectangular waveguides 305 transversal electric 252 reflection coefficient 259 transversal magnetic 252 reflective microoptics 115 triangle function 5 reflow process 118 two-photon absorption 183 refractive index 21 refractive microoptics 115 u resolution 105 ultraprecision micromachining 196 retroreflector 131 w wave admittance 293, 389 s wave equation 19, 20 scaling 111 – time-independent 30 self-imaging 87 wave impedance 293, 389, 393 shift theorem 9 wave number 24 sinc-function 4 wave vector 22 Snell’s law 115, 255, 404 waveguide optics 42 space-bandwidth product 57 WGR 312 spatial frequency 3 woodpile structure 182 i i i i.