SAFETY DATA SHEET Silicon Tetrachloride Issue Date: 21.04.2015 Version: 1.1 SDS No.: 000010022851 Last Revised Date: 04.05.2021 1/32

SAFETY DATA SHEET Silicon Tetrachloride Issue Date: 21.04.2015 Version: 1.1 SDS No.: 000010022851 Last Revised Date: 04.05.2021 1/32

SAFETY DATA SHEET Silicon tetrachloride Issue Date: 21.04.2015 Version: 1.1 SDS No.: 000010022851 Last revised date: 04.05.2021 1/32 SECTION 1: Identification of the substance/mixture and of the company/undertaking 1.1 Product identifier Product name : Silicon tetrachloride Additional identification Chemical name: silicon tetrachloride Chemical formula: SiCl4 INDEX No. 014-002-00-4 CAS-No. 10026-04-7 EC No. 233-054-0 REACH Registration No. 01-2119489367-22-0019 UK-01-4307115051-0-0001 1.2 Relevant identified uses of the substance or mixture and uses advised against Identified uses : Industrial and professional. Perform risk assessment prior to use. Transfilling gas or liquid, Formulation of mixtures with gas in pressure receptacles. Use for electronic component manufacture. Using gas alone or in mixtures for the calibration of analysis equipment. Uses advised against Consumer use. 1.3 Details of the supplier of the safety data sheet Supplier BOC Telephone : 0800 111 333 Priestley Road, Worsley M28 2UT Manchester E-mail: [email protected] 1.4 Emergency telephone number: 0800 111 333 SECTION 2: Hazards identification 2.1 Classification of the substance or mixture Classification according to Regulation (EC) No 1272/2008 as amended. Health Hazards Acute toxicity (Oral) Category 3 H301: Toxic if swallowed. Acute toxicity (Inhalation - vapour) Category 3 H331: Toxic if inhaled. Skin corrosion Category 1A H314: Causes severe skin burns and eye damage. Serious eye damage Category 1 H318: Causes serious eye damage. 2.2 Label Elements Contains : silicon tetrachloride SDS_GB - 000010022851 SAFETY DATA SHEET Silicon tetrachloride Issue Date: 21.04.2015 Version: 1.1 SDS No.: 000010022851 Last revised date: 04.05.2021 2/32 Signal Word : Danger Hazard Statement(s) : H301+H331: Toxic if swallowed or if inhaled H314: Causes severe skin burns and eye damage. Precautionary Statements General None. Prevention : P261: Avoid breathing dust/fume/gas/mist/vapours/spray. P264: Wash hands thoroughly after handling. P280: Wear protective gloves/protective clothing/eye protection/face protection. Response : P301+P330+P331: IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. P310: Immediately call a POISON CENTER/doctor. P303+P361+P353: IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water [or shower]. P304+P340: IF INHALED: Remove person to fresh air and keep comfortable for breathing. P311: Call a POISON CENTER/doctor. P305+P351+P338: IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Storage : P403+P233 : Store in a well -ventilated place. Keep container tightly closed. Disposal None. Supplemental information EUH014 : Reacts violently with water. 2.3 Other hazards None. SDS_GB - 000010022851 SAFETY DATA SHEET Silicon tetrachloride Issue Date: 21.04.2015 Version: 1.1 SDS No.: 000010022851 Last revised date: 04.05.2021 3/32 SECTION 3: Composition/information on ingredients 3.1 Substances Chemical name silicon tetrachloride INDEX No. : 014-002-00-4 CAS -No. : 10026-04-7 EC No. : 233-054-0 REACH Registration No. : 01-2119489367-22-0019 UK-01-4307115051-0-0001 Purity : 100% The purity of the substance in this section is used for classification only, and does not represent the actual purity of the substance as supplied, for which other documentation should be consulted. Trade name : - Chemical name Chemical Concentration CAS -No. REACH M-Factor: Notes formula Registration No. silicon tetrachloride SiCl4 100% 10026-04-7 01- - 2119489367- 22-0019 UK-01- 4307115051- 0-0001 The concentrations of the components in the SDS header, product name on page one and in section 3.2 are in mol due to regulatory requirements. All concentrations are nominal. # # This substance has workplace exposure limit(s). PBT: persistent, bioaccumulative and toxic substance. vPvB: very persistent and very bioaccumulative substance. SECTION 4: First Aid Measures General : Remove victim to uncontaminated area wearing self contained breathing apparatus. Keep victim warm and rested. Call a doctor. Apply artificial respiration if breathing stopped. 4.1 Description of first aid measures Inhalation : Move the exposed person to fresh air at once. If breathing stops, provide artificial respiration. Symptoms may include: Dizziness. Nausea, vomiting. Eye contact : Flush thoroughly with water. If irritation occurs, get medical assistance. Skin Contact : Promptly flush contaminated skin with soap or mild detergent and water. Promptly remove clothing if penetrated and flush the skin with water. Ingestion : Do not induce vomiting. If vomiting occurs, the head should be kept low so that stomach vomit doesn't enter the lungs. Get medical attention immediately. SDS_GB - 000010022851 SAFETY DATA SHEET Silicon tetrachloride Issue Date: 21.04.2015 Version: 1.1 SDS No.: 000010022851 Last revised date: 04.05.2021 4/32 4.2 Most important symptoms and Vapour concentrations above recommended exposure levels are irritating to the effects, both acute and eyes and the respiratory tract, may cause headaches and dizziness, are delayed: anaesthetic and may have other severe central nervous system effects. Repeated exposure may cause skin dryness or cracking. May be fatal if inhaled. May be fatal if swallowed. 4.3 Indication of any immediate medical attention and special treatment needed Hazards : Vapour concentrations above recommended exposure levels are irritating to the eyes and the respiratory tract, may cause headaches and dizziness, are anaesthetic and may have other severe central nervous system effects. Repeated exposure may cause skin dryness or cracking. May be fatal if inhaled. May be fatal if swallowed. Treatment : Do not give direct mouth-to-mouth resuscitation if swallowed. To protect rescuer, use air-viva, oxy-viva or one-way mask. Resuscitate in a well-ventilated area. If ingested, material may be aspirated into the lungs and cause chemical pneumonitis. Treat appropriately. Treat with a corticosteroid spray as soon as possible after inhalation. SECTION 5: Firefighting Measures General Fire Hazards : Heat may cause the containers to explode. Material reacts with water. 5.1 Extinguishing media Suitable extinguishing media : Dry powder. Dry sand. Carbon dioxide. Foam. Unsuitable extinguishing Water. Water Spray or Fog media: 5.2 Special hazards arising from the Fire or excessive heat may produce hazardous decomposition products. substance or mixture: 5.3 Advice for firefighters Special fire fighting In case of fire: Stop leak if safe to do so. Use of water may result in the formation procedures: of very toxic aqueous solutions. Keep run-off water out of sewers and water sources. Dyke for water control. Continue water spray from protected position until container stays cool. Use extinguishants to contain the fire. Isolate the source of the fire or let it burn out. Special protective equipment Gas tight chemically protective clothing (Type 1) in combination with self for firefighters: contained breathing apparatus. SECTION 6: Accidental Release Measures 6.1 Personal precautions, Evacuate area. Provide adequate ventilation. Monitor the concentration of the protective equipment and released product. Prevent from entering sewers, basements and workpits, or any emergency procedures: place where its accumulation can be dangerous. Wear self-contained breathing apparatus when entering area unless atmosphere is proved to be safe. EN 137 Respiratory protective devices - Self-contained open-circuit compressed air breathing apparatus with full face mask - Requirements, testing, marking. SDS_GB - 000010022851 SAFETY DATA SHEET Silicon tetrachloride Issue Date: 21.04.2015 Version: 1.1 SDS No.: 000010022851 Last revised date: 04.05.2021 5/32 6.2 Environmental Precautions : Prevent further leakage or spillage if safe to do so. Reduce vapour with fog or fine water spray. Keep run-off water out of sewers and water sources. Dyke for water control. 6.3 Methods and material for Provide adequate ventilation. Wash contaminated equipment or sites of leaks containment and cleaning up: with copious quantities of water. 6.4 Reference to other sections : Refer to sections 8 and 13. SECTION 7: Handling and Storage : 7.1 Precautions for safe handling : Do not handle until all safety precautions have been read and understood. Avoid exposure - obtain special instructions before use. Use only properly specified equipment which is suitable for this product, its supply pressure and temperature. Refer to supplier's handling instructions. The substance must be handled in accordance with good industrial hygiene and safety procedures. Protect containers from physical damage; do not drag, roll, slide or drop. Do not remove or deface labels provided by the supplier for the identification of the container contents. When moving containers, even for short distances, use appropriate equipment eg. trolley, hand truck, fork truck etc. Provide adequate ventilation. Suck back of water into the container must be prevented. Do not allow backfeed into the container. Keep container below 50°C in a well ventilated place. Avoid suckback of water, acid and alkalis. Observe all regulations and local requirements regarding storage of containers. When using do not eat, drink or smoke. Store in accordance with local/regional/national/international regulations. Never use direct flame or electrical heating devices to raise the pressure of a container. Leave valve protection caps in place until the container has been secured against either a wall

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