Agilent B1500A Semiconductor Device Analyzer Data Sheet Introduction The Agilent B1500A Semiconductor Device Analyzer is the only parameter analyzer with the versatility to provide a wide range of device characterization capabilities, uncompromised measurement reliability, and eficient and repeatable measurement. It supports all state-of-the-art measurements (IV, CV, and fast pulsed IV), giving it the ability to cover the electrical characterization and evaluation of devices, materials, semiconductors, active/passive components, or virtually any other type of electronic device. In addition, the B1500A’s modular architecture with ten available slots allows you to add or upgrade measurement modules if your measurement needs change over time. Agilent EasyEXPERT, resident GUI-based software running on the B1500A’s embedded Windows 7 platform, supports eficient and repeatable device characterization ranging from interactive manual measurements all the way up to test automation across a wafer in conjunction with a semiautomatic wafer prober. With hundreds of ready-to-use measurements (application tests) furnished at no charge, EasyEXPERT makes it easy to perform complex device char- acterization immediately. The EasyEXPERT GUI can be accessed using the B1500A’s 15-inch touch screen, as well as through an optional USB keyboard and mouse. EasyEXPERT also allows you the option of storing test condition and measurement data automati- cally after each measurement in unique workspaces, ensuring that valuable information is not lost and that measurements can be repeated at a later date. Finally, EasyEXPERT has built-in analysis capabilities and a graphical programming environment that facilitate the development of complex testing algorithms. Basic Features Measurement capabilities: Current versus voltage (IV) measurement Pulse Generation Speciication conditions • Accurate and precise measurement • Up to ±40 V voltage pulsing and arbitrary The measurement and output accuracy ranges of 0.1 fA - 1 A and 0.5 µV - 200 V waveform generation for non-volatile are speciied at the rear panel connector memory evaluation terminals when referenced to the Zero • Spot and sweep measurement Check terminal. The B1530A WGFMU • Single channel two-level and three level • Time sampling measurements (100 µs measurement and output accuracy are pulsing capability minimum sampling rate) speciied at the output terminal of the RSU. B1500A platform: • Pulsed measurement with minimum Accuracy is speciied under the following pulse widths of 50 µs using the MCSMU • 15-inch touch screen supports all capa- conditions: or 500 µs using the HPSMU, MPSMU, or bilities of the intuitive GUI for convenient HRSMU device characterization 1. Temperature: 23 °C ±5 °C 2. Humidity: 20 % to 60 % • The ASU (atto-sense and switch unit) • Conigurable and upgradable measure- can be used with the MPSMU, or ment modules with 10 slots per 3. After 40 minute warm-up followed by HRSMU to provide 0.1 fA measure- mainframe self-calibration ment resolution and SMU/AUX path • GPIB, USB, LAN interfaces, and VGA 4. Ambient temperature change less than switching video output port ±1 °C after self-calibration execution, • Two analog-to-digital converter choices EasyEXPERT software: not applicable for MFCMU and WGFMU (high-resolution ADC or high-speed 5. Measurement made within one hour ADC) available for each SMU type • GUI based operation on an embedded Windows 7 OS after self-calibration execution, not (HPSMU, MPSMU and HRSMU) applicable for MFCMU and WGFMU Capacitance measurement • Furnished with over 300 ready-to-use application tests 6. Calibration period: 1 year • Multi-frequency AC impedance measure- 7. SMU integration time setting: • Graphical display, analysis and printing ment supports CV (capacitance versus 1 PLC (1 nA to 1A range, voltage range) voltage), C-t (capacitance versus time) capabilities facilitate data analysis and report generation 20 PLC (100 pA range) and C-f (capacitance versus frequency) 50 PLC (1 pA to 10 pA range) measurement • Individualized workspace environments Averaging of high-speed ADC: and automated test data recording • Capacitance measurement frequency 128 samples per 1 PLC simplify data management range of 1 kHz to 5 MHz 8. SMU ilter: ON (for HPSMU, MPSMU • Quasi-Static Capacitance-Voltage • Curve tracer like knob control of and HRSMU) measurement parameters supports inter- (QS-CV) measurement with leakage 9. SMU measurement terminal connection: current compensation active real-time device characterization and automatic data recording feature Kelvin connection • Automated switching between IV and 10. WGFMU load capacitance: 25 pF or less CV measurements using either the • Oscilloscope view (available for the optional SCUU (SMU CMU unify unit) MCSMU) supports pulsed voltage and Note: This document lists speciications and GSWU (guard switch unit) or a pair current waveform viewing for quick and and supplemental characteristics for the of ASUs easy timing veriication B1500A and its associated modules. The Pulsed IV/Fast IV/Transient IV • Quick test mode supports test speciications are the standards against measurement sequencing without programming which the B1500A and its associated modules are tested. When the B1500A and • Provides high speed and high sensitivity • Classic test mode provides the familiar look, feel and terminology of the legacy any of its associated modules are shipped measurement capability for ultra-fast IV from the factory, they meet the speciica- Agilent 4155/56 parameter analyzer (current-voltage), pulsed IV and transient tions. The “supplemental” characteristics IV measurements, including NBTI/PBTI • Eficient data back-up of individual work- described in the following speciications and RTN (Random Telegraph Signal space environments (includes device are not warranted, but provide useful Noise) measurements deinitions, measurement settings, my information about the functions and favorite setups, measurement data and • Arbitrary waveform generation with 10 performance of the instrument. ns programmable resolution customized application libraries). • GUI-based control of the Agilent Note: Agilent Technologies is responsible • Simultaneous high-speed voltage/ for removing, installing, and replacing the current measurement (200 MSa/s, 5 ns B2200A, B2201A and E5250A switching matrices B1500A modules. Contact your nearest sampling rate) Agilent Technologies to install and • SMU technology supports pulsed IV • EasyEXPERT remote control function calibrate the B1500A modules. measurement without load line effects supports the remote execution of application tests via the LAN interface • Self-test, self-calibration, diagnostics 2 B1500A Speciications Supported plug-in modules The B1500A supports ten slots for plug-in modules. Slots Module Name Key Features occupied B1510A High power 2 - Range up to 200 V/1 A with 4-quadrant operation source/monitor unit - Minimum measurement resolution 10 fA/2 µV - Spot, sweep and more measurement (HPSMU) capabilities B1511B Medium power 1 - Range up to 100 V/0.1 A with 4-quadrant operation - Sampling (time domain) measure source/monitor unit - Minimum measurement resolution 10 fA/0.5 µV ment from 100 μs (MPSMU) - Optional ASU (atto-sense and switch unit) for 100 - Pulse measurement from 500 μs aA resolution and IV/CV switching capability pulse width B1517A High resolution 1 - Range up to 100 V/0.1 A with 4-quadrant operation - Accurate Quasi-Static Capacitance source/monitor unit - Minimum measurement resolution 1 fA/0.5 µV Voltage (QS-CV) measurement with (HRSMU) - Optional ASU (atto-sense and switch unit) for 100 leakage current compensation aA resolution and IV/CV switching capability B1514A 50 µs Pulse 1 - Range up to 30 V/1 A pulsed (0.1 A DC) with 4-quadrant operation medium current - Pulse measurement from 50 μs pulse width with 2 μs resolution source/monitor unit - Oscilloscope view (voltage/current waveform viewer) is supported (50 µs Pulse MCSMU) - Minimum measurement resolution 10 pA/0.2 µV B1520A Multi- 1 - AC impedance measurement (C-V, C-f, C-t) frequency capacitance - 1 kHz to 5 MHz frequency range with minimum 1 mHz frequency resolution measurement unit - 25 V built-in DC bias and 100 V DC bias with SMU and SCUU (SMU CMU Unify Unit) (MFCMU) - Easy and fast yet accurate IV and CV automated connection change by SCUU B1525A High voltage 1 - High voltage output up to ±40 V applicable for non-volatile memory testing semiconductor - Two-level and three-level pulse capability by single channel pulse generator unit - Flexible arbitrary waveform generation with 10 ns resolution (arbitrary linear waveform (HV-SPGU) generation function) - Two channels per module B1530A Waveform 1 -Ultra-fast IV measurement capability for the pulsed IV and transient IV such as NBTI/PBTI, generator / fast RTN, etc. measurement unit -Waveform generation with 10 ns programmable resolution (WGFMU) -Simultaneous high-speed IV measurement capability (200 MSa/s, 5 ns sampling rate) -10V peak-to-peak output -No load line effect accurate pulsed IV measurement by dynamic SMU technology 3 Maximum module coniguration When one or more WGFMU modules are Ground unit (GNDU) speciication installed in the B1500A mainframe, the The GNDU is furnished standard with the The total power consumption of all SMU following table applies. Multiply the values B1500A mainframe. modules cannot exceed 84 W. given below by the number of installed Under this rule, the B1500A can contain modules of that type and add the products Output voltage: 0 V ±100 µV