USOO8053269B2 (12) United States Patent (10) Patent No.: US 8,053,269 B2 Tanaka (45) Date of Patent: Nov. 8, 2011 (54) METHOD OF FORMING DISPLAY DEVICE 5,940,732 A 8, 1999 Zhang THAT INCLUDES REMOVING MASK TO 239, 38. S.aCal Caal FORM OPENING IN INSULATING FILM 6,715,871 B2 4/2004 Hashimoto et al. 6,849,308 B1 2/2005 Speakman et al. (75) Inventor: Koichiro Tanaka, Kanagawa (JP) 6,849,549 B1 2, 2005 E. al 6,861,670 B1 3/2005 Ohtani et al. (73) Assignee: Semiconductor Energy Laboratory 6,905,906 B2 6/2005 Sirringhaus et al. Co., Ltd., Kanagawa-Ken (JP) 7,160,794 B1* 1/2007 Hsueh et al. .................. 438,593 (Continued) (*) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 FOREIGN PATENT DOCUMENTS U.S.C. 154(b) by 0 days. CN 1649.096 8, 2005 (21) Appl. No.: 12/795,771 (Continued) (22) Filed: Jun. 8, 2010 OTHER PUBLICATIONS O O Office Action (Application No. 200710148218.1; CNO9907) Dated (65) Prior Publication Data Mar. 2, 2010. US 2010/0248405 A1 Sep. 30, 2010 Primary Examiner — Stephen W Smoot Related U.S. Application Data (74) Attorney, Agent, or Firm — Nixon Peabody LLP: (63) Continuation of application No. 1 1/889.546, filed on Jeffrey L. Costellia Aug. 14, 2007, now Pat. No. 7,736,936. (57) ABSTRACT (30) Foreign Application Priority Data To improve the use efficiency of materials and provide a Aug. 29, 2006 (JP) ................................. 2006-231956 technique of fabricating a display device by a simple process. s The method includes the steps of providing a mask on a (51) Int. Cl. conductiveductive layer, forming an insulating1nSulating filmfil Over theh conducd HOIL 3L/8 (2006.01) tive layer provided with the mask, removing the mask to form (52) U.S. Cl. ............ 438/69 438/98. 438/149 438/675: an insulating layer having an opening; and forming a conduc s s 2 57AE21. 589 tive film in the opening so as to be in contact with the exposed (58) Field of Classification Search 438/926 conductive layer, whereby the conductive layer and the con See application file for com lete search histo ductive film can be electrically connected through the insu pp p ry. lating layer. The shape of the opening reflects the shape of the (56) References Cited maSK.sk A maSKk havinghav1ng a COlumnar1 Snapehap (e.g.,g., a pr1Sm,p i a cylinder, or a triangular prism), a needle shape, or the like can U.S. PATENT DOCUMENTS be used. 5,275,973 A 1/1994 GelatOS 5,880,038 A 3, 1999 Yamazaki et al. 28 Claims, 35 Drawing Sheets 586 596 587a 590a 590b 594 595587b 689 588 NNSN NSN N 580 US 8,053,269 B2 Page 2 U.S. PATENT DOCUMENTS 2005/0266693 A1 12/2005 Maekawa 7,202,497 B2 4/2007 Ohtani et al. 2006 0043592 A1* 32006 Tanaka. 257/758 7.425,474 B2 * 9/2008 Kawase et al. ................ 438,151 2007/0292986 Al 12/2007 Fujii 7,510.905 B2 3/2009 Fujii et al. 2008/0227232 A1* 9, 2008 Yamazaki et al. .............. 438/34 7,655.499 B2 2/2010 Fujii et al. 2009/0148971 A1 6/2009 Fujii et al. 2002/0106887 A1 8/2002 Chang 2005.0062057 A1 3, 2005 Yamazaki et al. FOREIGN PATENT DOCUMENTS 2005/0074963 A1 4/2005 Fujii et al. JP 10-112499 4f1998 2005/0158665 A1 7/2005 Maekawa et al. JP 2000-133636 5, 2000 2005/0170565 A1 8/2005 Fujii et al. 2005/0170643 A1 8/2005 Fujii et al. * cited by examiner U.S. Patent Nov. 8, 2011 Sheet 2 of 35 US 8,053,269 B2 FIG. 2A 730 73 FIG. 2B w. - 732 FIG. 2C FIG. 2D s 's . * w w SN% w r U.S. Patent Nov. 8, 2011 Sheet 3 Of 35 US 8,053,269 B2 FIG. 3A 2202 220 is st y 3 2200 FIG. 3B 2203 2204b. N------ N 22O5 FIG. 3C 22O6 U.S. Patent Nov. 8, 2011 Sheet 4 of 35 US 8,053,269 B2 FIG 4A FIG 4B 312310 300303 301C 301 a 301 d 301b. 3O 1 a 30 b FIG. 4C FIG. 4D 302 §§ 302 FIG. 4E FIG. 4F 305a 306 305b. 305c 305d FIG. 4G FIG, 4H sy N. 307a U.S. Patent Nov. 8, 2011 Sheet 5 Of 35 US 8,053,269 B2 FIG. 5 1618 16O2 1624 66 N% ()% 1627 %% ?N 1625 !!!!!!!!!'; ZÁZÉZZZZZZZZZZZZZZZZZZZZZZZZ,ZZZ 603 623 169 1626 629 U.S. Patent US 8,053,269 B2 CO S2 l U.S. Patent Nov. 8, 2011 Sheet 7 of 35 US 8,053,269 B2 FIG. 7 632 1640 1641 §§§? S`N?§`N U.S. Patent Nov. 8, 2011 Sheet 8 Of 35 US 8,053,269 B2 FIG FIG. 8B O7 FIG. 8C 105 OO U.S. Patent Nov. 8, 2011 Sheet 9 Of 35 US 8,053,269 B2 /) % FIG. 9B FIG. 9C U.S. Patent Nov. 8, 2011 Sheet 10 Of 35 US 8,053,269 B2 FIG OA 115 139b -**=••=-…_„ **,No.- FIG. 1 OB 120a 14 12Ob 139a FIG. OC 19 s 39b U.S. Patent Nov. 8, 2011 Sheet 11 of 35 US 8,053,269 B2 FIG. 24 FIG. 1 C NSSSS U.S. Patent Nov. 8, 2011 Sheet 12 Of 35 US 8,053,269 B2 FIG 12A A D 26 FIG. 2B FIG. 12C 22 S. É2 É %2223 2% NS NN SSy U.S. Patent Nov. 8, 2011 Sheet 13 Of 35 US 8,053,269 B2 FIG. 13A 31 SS NNSySSry S ps MSNNSSN N N 132 133 131 37A272/7222222222222222222222222222 %xxxxz: SS SN 3: U.S. Patent Nov. 8, 2011 Sheet 14 of 35 US 8,053,269 B2 FIG. 14A FIG. 14B FIG. 14C FIG. 1 4D * r * * * N S. s. s ', T st . U.S. Patent Nov. 8, 2011 Sheet 15 of 35 US 8,053,269 B2 U.S. Patent Nov. 8, 2011 Sheet 16 of 35 US 8,053,269 B2 ^ - - - - - - - - r + ** U.S. Patent Nov. 8, 2011 Sheet 17 Of 35 US 8,053,269 B2 FIG. 17A 487s"gs'"495a 495b 487b 498 zzzzzzzzzzzzzzzzzzzzzzzzzzzzzzzzzzz iS2E2a23323; 22%axxessa S &s FIG. 17B Zzzzzzzzzzzzzzzzzzzzzzzzzzzzzzzzz KY Aaaaaaaaa...E.Y2Yea-2a. SSSSSSSSSSSSSSSSSSSSSS Eaxxxxaasaxxaa 461 460 FIG. 17C zzzzzzzYZZZZZZZZZZZZZZZZZZZZZZZZZ322 zzzzzzzzzzzzzzzzzzzzzzzzzzzzzzzzzzz SNSN SNSNS U.S. Patent Nov. 8, 2011 Sheet 19 of 35 US 8,053,269 B2 !=~~~=~~~~, U.S. Patent Nov. 8, 2011 Sheet 20 Of 35 US 8,053,269 B2 &&&&&&&&&&&&&&&&&ZZZZZZZZZZZZZZZZZZZZZZZZZZ.z.; (ZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZZ Z162 U.S. Patent Nov. 8, 2011 Sheet 21 Of 35 US 8,053,269 B2 FIG. 21 586 587a 590a 590b. 594 595587b 589 588 SSSSSN NSN NSN V N Y . s 584 585a 582 581 585b 583 598 580 U.S. Patent Nov. 8, 2011 Sheet 22 Of 35 US 8,053,269 B2 FIG.22A FIG. 22B U.S. Patent Nov. 8, 2011 Sheet 23 Of 35 US 8,053,269 B2 FIG. 23A S EARIAAAH H REl:R E. E.R i ElS FIG. 23B SN IEEE KHHHHHs s: : E:E. s S SSSSS SSS LN W N RNSSS S N THISISHRA. H. B l E.EA N RNSy U.S. Patent Nov. 8, 2011 Sheet 24 of 35 US 8,053,269 B2 FIG 24A FIG 24B FIG 24C EE |- |---- E No. E E |---- -----[IE |---- |- E No. ---- |---- EZ S SSS S S S NN SNSN S. U.S. Patent Nov. 8, 2011 Sheet 25 Of 35 US 8,053,269 B2 FIG. 25A ania 270 2700 l FIG. 25B 'Y-..., 370 3700 IIr: from YI U.S. Patent Nov. 8, 2011 Sheet 26 of 35 US 8,053,269 B2 FIG. 26A 270 700 2 NYS -- N wara ?ae U.S. Patent Nov. 8, 2011 Sheet 27 of 35 US 8,053,269 B2 FIG. 27 U.S. Patent Nov. 8, 2011 Sheet 28 of 35 US 8,053,269 B2 FIG. 28A 2003 CCC NNNNNXSYSWNS U.S. Patent Nov. 8, 2011 Sheet 29 Of 35 US 8,053,269 B2 U.S. Patent Nov. 8, 2011 Sheet 31 Of 35 US 8,053,269 B2 FIG. 31 8500 8502 U.S. Patent Nov. 8, 2011 Sheet 32 Of 35 US 8,053,269 B2 FIG. 32 UD WDD CL UDB LIN 860 8605 8612 860 LIN2 86O7 is OU 8602 RSTS-8609 RIN1 a 860 863 8608 RIN2 8604 86 U.S. Patent Nov. 8, 2011 Sheet 33 Of 35 US 8,053,269 B2 FIG. 33 WDD GND U.S. Patent Nov. 8, 2011 Sheet 34 of 35 US 8,053,269 B2 FIG. 34A FIG. 34B 351 353 350 w 2--------------------------- is . we as XXXXXX XXX. 1. FIG. 34C 1 353 352 w is --------4----------4--- R a lar ru - is lak u is IX ***•), *===**•–—· U.S. Patent Nov. 8, 2011 Sheet 35 of 35 US 8,053,269 B2 FIG. 35 N III IIHIA N US 8,053,269 B2 1. 2 METHOD OF FORMING DISPLAY DEVICE ductive layer and the conductive film are electrically con THAT INCLUDES REMOVING MASK TO nected at the opening provided in the insulating layer. FORM OPENING IN INSULATING FILM The shape of the opening reflects the shape of the mask. Therefore, any mask with which an opening with a desired BACKGROUND OF THE INVENTION shape can be formed is acceptable. The mask can have a columnar shape (e.g., a prism, a cylinder, or a triangular 1. Field of the Invention prism), a needle shape, or the like.