Springer Handbook of Nanotechnology Springer Handbooks provide a concise compilation of approved key information on methods of research, general principles, and functional relationships in physi- cal sciences and engineering. The world’s leading experts in the fields of physics and engineer- ing will be assigned by one or several renowned editors to write the chapters comprising each vol- ume. The content is selected by these experts from Springer sources (books, journals, online content) and other systematic and approved recent publications of physical and technical information. The volumes are designed to be useful as readable desk reference books to give a fast and comprehen- sive overview and easy retrieval of essential reliable key information, including tables, graphs, and bibli- ographies. References to extensive sources are provided. HandbookSpringer of Nanotechnology Bharat Bhushan (Ed.) 3rd revised and extended edition With DVD-ROM, 1577 Figures and 127 Tables 123 Editor Professor Bharat Bhushan Nanoprobe Laboratory for Bio- and Nanotechnology and Biomimetics (NLB2) Ohio State University 201 W. 19th Avenue Columbus, OH 43210-1142 USA ISBN: 978-3-642-02524-2 e-ISBN: 978-3-642-02525-9 DOI 10.1007/978-3-642-02525-9 Springer Heidelberg Dordrecht London New York Library of Congress Control Number: 2010921002 c Springer-Verlag Berlin Heidelberg 2010 This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. 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Skolaut, Heidelberg Typography and layout: schreiberVIS, Seeheim Illustrations: Hippmann GbR, Schwarzenbruck Cover design: eStudio Calamar S.L., Spain/Germany Cover production: WMXDesign GmbH, Heidelberg Printing and binding: Stürtz GmbH, Würzburg Printed on acid free paper Springer is part of Springer Science+Business Media (www.springer.com) 62/3180/YL 543210 V Foreword by Neal Lane In a January 2000 speech at the California Institute of can sense, control, and activate on Technology, former President W.J. Clinton talked about the micro/nanoscale and can func- the exciting promise of nanotechnology and the impor- tion individually or in arrays to gen- tance of expanding research in nanoscale science and erate effects on the macroscale. Due engineering and, more broadly, in the physical sciences. to the enabling nature of these sys- Later that month, he announced in his State of the Union tems and the significant impact they Address an ambitious US$ 497 million federal, multia- can have on both the commercial gency national nanotechnology initiative (NNI)inthe and defense applications, industry fiscal year 2001 budget; and he made the NNI atop as well as the federal government Prof. Neal Lane science and technology priority within a budget that em- have taken special interest in seeing Malcolm Gillis University phasized increased investment in US scientific research. growth nurtured in this field. Micro- Professor, Department of Physics With strong bipartisan support in Congress, most of this and nanosystems are the next logical and Astronomy, request was appropriated, and the NNI was born. Often, step in the silicon revolution. Senior Fellow, James A. Baker III Institute federal budget initiatives only last a year or so. It is most The discovery of novel mater- for Public Policy encouraging that the NNI has remained a high priority ials, processes, and phenomena at Rice University Houston, Texas of the G.W. Bush Administration and Congress, reflect- the nanoscale and the development Served in the Clinton Admin- ing enormous progress in the field and continued strong of new experimental and theoreti- istration as Assistant to the interest and support by industry. cal techniques for research provide President for Science and Tech- nology and Director of the White Nanotechnology is the ability to manipulate indi- fresh opportunities for the develop- House Office of Science and vidual atoms and molecules to produce nanostructured ment of innovative nanosystems and Technology Policy (1998–2001) and, prior to that, as Director of materials and submicron objects that have applica- nanostructured materials. There is the National Science Foundation tions in the real world. Nanotechnology involves the an increasing need for a multidis- (1993–1998). While at the White House, he was a key figure in production and application of physical, chemical and ciplinary, systems-oriented approach the creation of the NNI. biological systems at scales ranging from individual to manufacturing micro/nanodevices atoms or molecules to about 100 nm, as well as the which function reliably. This can only be achieved integration of the resulting nanostructures into larger through the cross-fertilization of ideas from different systems. Nanotechnology is likely to have a profound disciplines and the systematic flow of information and impact on our economy and society in the early 21st people among research groups. century, perhaps comparable to that of information Nanotechnology is a broad, highly interdisciplinary, technology or cellular and molecular biology. Science and still evolving field. Covering even the most im- and engineering research in nanotechnology promises portant aspects of nanotechnology in a single book breakthroughs in areas such as materials and manu- that reaches readers ranging from students to active facturing, electronics, medicine and healthcare, energy researchers in academia and industry is an enormous and the environment, biotechnology, information tech- challenge. To prepare such a wide-ranging book on nology and national security. Clinical trials are already nanotechnology, Prof. Bhushan has harnessed his own underway for nanomaterials that offer the promise of knowledge and experience, gained in several indus- cures for certain cancers. It is widely felt that nanotech- tries and universities, and has assembled internationally nology will be the next industrial revolution. recognized authorities from four continents to write Nanometer-scale features are built up from their el- chapters covering a wide array of nanotechnology top- emental constituents. Micro- and nanosystems compo- ics, including the latest advances. The authors come nents are fabricated using batch-processing techniques from both academia and industry. The topics include that are compatible with integrated circuits and range in major advances in many fields where nanoscale science size from micro- to nanometers. Micro- and nanosys- and engineering is being pursued and illustrate how the tems include micro/nanoelectro-mechanical systems field of nanotechnology has continued to emerge and (MEMS/NEMS), micromechatronics, optoelectronics, blossom. Given the accelerating pace of discovery and microfluidics and systems integration. These systems applications in nanotechnology, it is a challenge to cap- VI ture it all in one volume. As in earlier editions, professor third edition. It is increasingly important that scientists Bhushan does an admirable job. and engineers, whatever their specialty, have a solid Professor Bharat Bhushan’s comprehensive book grounding in the fundamentals and potential applica- is intended to serve both as a textbook for university tions of nanotechnology. This third edition addresses courses as well as a reference for researchers. The first that need by giving particular attention to the widening and second editions were timely additions to the litera- audience of readers. It also includes a discussion of the ture on nanotechnology and stimulated further interest social, ethical and political issues that tend to surround in this important new field, while serving as invaluable any emerging technology. resources to members of the international scientific and The editor and his team are to be warmly congrat- industrial community. The increasing demand for up- ulated for bringing together this exclusive, timely, and to-date information on this fast moving field led to this useful nanotechnology handbook. VII Foreword by James R. Heath Nanotechnology has become an increasingly popular cuits constructed from relatively buzzword over the past five years or so, a trend that has simple components – extended solids. been fueled by a global set of publicly funded nano- The biotech revolution is really de- technology initiatives. Even as researchers have been pendent upon the ability to reverse struggling to demonstrate some of the most fundamental engineer three-dimensional analog and simple aspects of this field, the term nanotechnol- systems constructed from quite com- ogy has entered into the public consciousness through plex components – proteins. Given articles in the popular press and popular fiction. As that the basic science behind biotech a consequence, the expectations