Microscope Components for Reflected Light Applications Microscope Components for Reflected Light Applications Select a Nikon microscope unit for your manufacturing equipment and other systems that require high precision The development, manufacture, and evaluation of products require sub-micron precision, as symbolized by semiconductor manufacturing technology. Nikon's microscope units support such high precision and can be integrated with a variety of equipment. This brochure presents technical data on using Nikon's microscope units. #ONTENTS L-IM Modular Focusing Unit 4 Revolving Nosepieces 17 LV-IM IM Modules 6 CF&IC Objectives 18-21 LV-FM FM Modules 7 Compact Reflected Microscopes CM Series 22-24 LVDIA-N DIA Base N 8 Objectives for Measuring microscopes 24 LV-ARM Basic Arm 9 2nd Objective Lens Units 25 LV-ECON E Controller 9 Filters 26 CFI60-2 / CFI60 Objectives 10-14 Eyepiece Tubes 27 LV-UEPI-N Universal Epi-Illuminator 14 Double Port 27 LV-UEPI2 Universal Epi-Illuminator 2 15 Straight Tubes 27 LV-UEPI2A Motorized Universal Epi-Illuminator 2 15 Eyepiece Lenses 28-29 TI-PS100W/A Power Supply 16 CCTV Camera Adapters 30 LV-EPILED White LED Illuminator 16 Glossary 31 CFI60-2/CFI60 Optical System (for modular focusing unit) 3YSTEM$IAGRAM)NDEX 02817 ")&37*5 02817 ")&37*5 > > 02817)&37*56 */&< $*/&< > > *16 *16 > 13928 13928 > "*0&= "*0&= */&<*16 *27 ? *27 ? 3$-'$"$$+/$/ # #(-( 6%( 9 )-!+ 9 9 .! )-!+ 9 9 9 (/5(3,/* .! 9 9 (-(4&01( 31#*()34$'2 +"('(&$ (+- .%+*+)'! .'*+!1(.1 # '(0'*%.'*+!1(.1 # .'*+!1(.1 # .'*+!1(.1 # '*+!1(.1 # '*+!1(.1 # ,& *( %*"%') 36136*.2+361&8.327**4&,* (.%!(+- ""*# $)%'( 5#(#2#( '/#. %"*!,%)%!*) %*"'%*( $ /$-:;(34 $ ) -$3*!0 -#31),' 0-$3,;(34 ,)2 '$/!+,% )$%%.&$'-(+ )6),' ,-5(34 ,)2 &-0/3).+%,2 &-0712%+1 '5/,5*.(/2'0*'%'2 #$-! 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('-+(%%!+ (+%#*), $+'%3*5'2 .#!#*0#.#" ,#. > > > > > ),&+1/# ,#. > > ,#. > > ,#." > > > ,#." > > > > ,#. > > > > > ! ,#." > > > /&1 /&1 08(3611-: > > >> " ,#.0/ > > > ,#.0/ > > > # 1,/(95(/4,0/ > > ,#.0/ > ,#.0/ > > &14-397* &03',43(26,3(' ,#. > > > > !($"0'2$/ *48.5*66*3&5&7*/<&9&./&'/*&)&37*5 , )--ODULAR&OCUSING5NIT)- !CCOMMODATESANEPI ILLUMINATORANDMOTORIZEDNOSEPIECE ORAMAXIMUMLOADOFKGBYADDINGABALANCER !CCOMMODATESTHE,6 5%0) .OR,6 %0),%$UNIVERSAL ILLUMINATORASWELLASAMOTORIZEDNOSEPIECE • Attachment of the LV-UEPI-N Universal Epi-illuminator enables the use of brightfield, darkfield and Nomarski DIC techniques. • The built-in balancer ensures smoother vertical motion, even when the arm is heavily loaded. • The standard maximum load is 4kg, which is expandable to 10 kg by adding a balancer. • A coarse motion stroke of 5.2 mm per revolution improves the equipment's load handling capability and increases durability. • The distance from the optical axis to the mounting surface is 141 mm. Note: For adding a balancer, consult your Nikon representative. L-IM Modular Focusing Unit MBD64010 / 2000 g Stroke 30 mm Coarse focusing 5.2 mm/rotation Fine focusing 0.1 mm/rotation Scale 1 μm ÈÈÊ`i«Ì ÊÇ {7ÎÉnÊ`i«Ì Ê£ä Unit: mm , )-!DAPTERFOR-ODULAR&OCUSING5NIT/PTION Used to attach the L-IM Modular Focusing Unit to a ø24.5 mm post. L-IM Adapter for Modular Focusing Unit MXA23079 / 500 g {ÊÝÊ iÝ>}ÊÃViÌÊ i>`ÊV>«ÊÃVÀiÜ Unit: mm `i«Ì ÊÎÎ CFI60-2/CFI60 Optical System (for LV modules) 3YSTEM$IAGRAM)NDEX !#-'1#&#03'12 -/4.3#-'1# 35;4:"$+(6:,8 35;4: "$+(6:,8 A A 35;4:+(6:,89 ! ,2(? & ,2(? A A ,49 ,49 A 35;4: 35;4: A "$ ,2(? "$ ,2(? ,2(?,49 ,49 A ,49 A 6'0*'%''.2'2 " '"$ .494 "$";), > *'59+7 #% A $ A! " &" $"$ ";),+(6:,8 #% A A A ,4:,804. "$":(+ A A ",2,9*56, 31#*()34$'2 6-3231/) !368 $" $"" " "" " 7-4342/) " "7/34):1'7":(+! "/19/3-"7/34):1'7":(+ "7/34):1'7":(+ "7/34):1'7":(+" /34):1'7":(+ /34):1'7":(+ & 5&/)&%&3$&1.3$+&.02 39(0+368 25025*.1+250&7.216**3&,* =+0+:+0 /7+6 !(&)&'%!*) " 10641..)4 '$/!+,%)$%%.&$'-(+ .#,9:'23 /,#2+:'23 " '$/!+,%)$%%.&$'-(+ +,4'23 %5-'4/ " " " " 1(7.) 1(7.) 1(7.) 1(7.) (-(+$3! '$/!+,% 6%+)5 )$%%.&$'-(+ 10()05)45 $-.7* //80.1&725 ('-+(%%(+ "%5) # !-.6(&1127'*86*) 72,*7-*5:.7-%28'/*3257 ,&#,!%&)'!) ,)*-.6)4'1/&-0%6-106,%6-5%66%',)( %66,)6-/)1*6,)&.-+,6*-).(1&5)48%6-10 $ 0'8+ $# $# $ 39+11/0+39 #2/:+67'0 !+<8940+ +28+6/2- $# $# $# #3/;+78'1 9/28940+ 9/28940+ 37+4/+)+ 9/28940+ 3836/>+* 3836/>+* 3836/>+* :/39:51+ 37+4/+)+ 37+4/+)+ 37+4/+)+ #2/:+67'0 #2/:+67'0 #2/:+67'0 48+5/+)+ ! ! $ 9/28940+ 9/28940+ 9/28940+ ! %("!'&) !0/*+6 37+4/+)+ 37+4/+)+ 37+4/+)+ ! +!!'-!+! 5.606 &)#(.,! (0!+.))%2 )$'!1-!',$(' )37-4)55)2%4%6).;%8%-.%&.)" 1614-<)(15)2-)')10641..)4 (+ $,+!*.$+! $*&%2)4&1 $ (36/5;9, +#- ? ? ? ? ? +#- ? ? +#- @ @ +#-" @ @ @ +#-" @ @ @ @ +#- @ @ @ @ @ /&1 +#-" @ @ @ +#-/. @ @ @ > > /&1! $!+ +#-/. @ @ @ +#-/. @ > > >> +!!'-!+ +#-/. @ @ $!+ )-!+ +#- @ @ @ @ "*!,) $!+%%.&$'-(+ )37-4)55)2%4%6).;%8%-.%&.)%(%26)4 ,6 )-)--ODULES 4HISFOCUSINGMODULEENABLESTHEMOUNTINGOFAUNIVERSALILLUMINATOR,6 5%0) .,6 5%0) ,6 5%0)!OR,6 %0),%$ ANDAMOTORIZEDNOSEPIECE 6iÀÌV>ÊÃÌÀi\ ,6 )-!)--ODULE!-OTORIZED £ÊÕ«Ü>À`]Ê£Ê`ÜÜ>À` Þi«iViÊÌÕLiÊÕÌ}ÊÃÕÀv>Vi • Selectable mounting surface (back or bottom). • 20 mm vertical stroke. • Dramatically improved rigidity enables the mounting of the Ãi«iVi LV-UEPI2A motorized universal illuminator, etc. ÕÌ}ÊÃÕÀv>Vi • External control is possible via LV-ECON E Controller. • The standard maximum permissible weight is 4-7 kg, which is Ó{Ê`i«Ì Ên expandable to 10 kg by adding a balancer. {ÈÊ`i«Ì Ê£ä Ó©Ê`i«Ì Êΰ{ `i«Ì Êΰ{ LV-IMA IM Module A (Motorized) MBD64070 / 4000 g Vertical stroke 20 mm -VÀiÜÊ`i«Ì ÊvÀÊÃÕÀv>ViÊ ÊÊÀÊiÃà `i«Ì Êΰ{ Resolution 0.05 μm Unit: mm Max. speed 2.5 mm/sec (Resolution 0.05 μm) 6iÀÌV>ÊÃÌÀi\ ÓÊÕ«Ü>À`]Ê£Ê`ÜÜ>À` ,6 )-)--ODULE-ANUAL Þi«iViÊÌÕLiÊÕÌ}ÊÃÕÀv>Vi • Selectable mounting surface (back or bottom). • 30 mm vertical stroke. • Dramatically improved rigidity enables the mounting of the Ãi«iVi ÕÌ}ÊÃÕÀv>Vi LV-UEPI2A motorized universal illuminator, etc. • The standard maximum permissible weight is 4-7 kg, which is expandable to 10 kg by adding a balancer. Ó{Ê`i«Ì Ên {ÈÊ `i«Ì Ê£ä Ó©Ê`i«Ì Êΰ{ LV-IM IM Module (Manual) MBD64080 / 4000 g `i«Ì Êΰ{ Stroke 30 mm Coarse focusing 5.2 mm/rotation Fine Focusing 0.1 mm/rotation Scale 1 μm -VÀiÜÊ`i«Ì ÊvÀÊÃÕÀv>ViÊ `i«Ì Êΰ{ ÊÊÀÊiÃà Unit: mm ,6 &-&--ODULES ,6 &-&--ODULESENABLEMOUNTINGOFAUNIVERSALILLUMINATOR ,6 5%0) .,6 5%0),6 5%0)!OR,6 %0),%$ ANDAMOTORIZEDNOSEPIECE ,6 &-!&--ODULE!-OTORIZED {{Ê`i«Ì Ên • Only the bottom mounting surface is supported. • 20 mm vertical stroke. • Enables an enhanced system with motorized up/down mechanism when combined with the LVDIA-N DIA Base N. • External control is possible via the LV-ECON E Controller. Þi«iViÊÌÕLiÊ ÕÌ}ÊÃÕÀv>Vi • The standard maximum permissible weight is 3-6 kg, which is expandable to 9 kg by adding a balancer. Ãi«iVi ÕÌ}Ê ÃÕÀv>Vi 6iÀÌV>ÊÃÌÀi\ £ÊÕ«Ü>À`]Ê £Ê`ÜÜ>À` / ViÃÃÊvÊwÝ}Ê«>Ìi `i«Ì Êΰ{ -VÀiÜÊ`i«Ì ÊvÀÊÃÕÀv>ViÊ ÊÊÀÊiÃà LV-FMA FM Module A (Motorized) MBD65040 / 5000 g `i«Ì Êΰ{ Vertical stroke 20 mm Ó©Ê`i«Ì Êΰ{ Resolution 0.05 μm Max. speed 2.5 mm/sec (Resolution 0.05 μm) Unit: mm ,6 &-&--ODULE-ANUAL {{Ê`i«Ì Ên • Only the bottom mounting surface is supported. • 30 mm vertical stroke. • Creates a system with revolving up/down mechanism that has an ultra-long vertical stroke of 68 mm when combined with the LVDIA-N DIA Base N. Optimal for operations such as semiconductor probe inspections. • The standard maximum permissible weight is 3-6 kg, which is Þi«iViÊÌÕLiÊ ÕÌ}ÊÃÕÀv>Vi expandable to 9 kg by adding a balancer. Ãi«iVi ÕÌ}Ê ÃÕÀv>Vi 6iÀÌV>ÊÃÌÀi\ ÓÊÕ«Ü>À`]Ê £Ê`ÜÜ>À` / ViÃÃÊvÊwÝ}Ê«>Ìi `i«Ì Êΰ{ -VÀiÜÊ`i«Ì ÊvÀÊÃÕÀv>ViÊ ÊÊÀÊiÃà LV-FM FM Module (Manual) MBD65050 / 5000 g `i«Ì Êΰ{ Stroke 30 mm Coarse focusing 5.2 mm/rotation Ó©Ê`i«Ì Êΰ{ Fine Focusing 0.1 mm/rotation Scale 1 μm Unit: mm ,6$)! .$)!"ASE. 4HISBASEUNITISFORTHE%#,)03%,6SERIESOFMODULARMICROSCOPES4HEATTACHMENTOFAN OPTIONALPOWERSOURCEENABLESTHEINCORPORATIONOFATRANSMISSIONILLUMINATOR ,iviÀiViÊ i Enlarged view A LVDIA-N DIA Base N MBD65015 / 5600 g Unit: mm ,6 !2-"ASIC!RM 4HISARMUNITISFORTHE%#,)03%,6SERIESOFMODULARMICROSCOPES Þi«iVi À¿ÃÊÀiviÀiViÊ«>i ÕÌ} ÃÕÀv>Vi Ãi«iViÊÕÌ}ÊÃÕÀv>Vi ÕÌiÀLÀiÊvÊ`>°£Î]Ê`i«Ì Ê£Ê ÕÌiÀLÀiÃÊ >ÛiÊÃ>iÊ`iÃà Ê>ÊÃÝÊV>Ìà ,iviÀiViÊ i LV-ARM Basic Arm MBD65030 / 1400 g Unit: mm ,6 %#/.%#ONTROLLER 4HISCONTROLLERENABLESEXTERNALCONTROLOFVARIOUSUNITSFROMA0#ANDOTHERDEVICES • Enables external control of motorized universal reflection illuminators and various light sources, universal motorized revolvers, and motorized focusing modules from a PC or other devices. • Communication with PC possible via USB. • Max. 11˚ inclination when using tilt (unit's feet). Unit: mm LV-ECON E Controller MBF12200 / 2000 g #&)40LAN%0)#&)450LAN&LUOR%0)#&),0LAN%0) "RIGHTlELD/BJECTIVES #&) #&)OBJECTIVESFORBRIGHTlELDUSE.OMARSKI$)#ISALSOPOSSIBLEWITHTHE45TYPE