Excellent Customer Support is a Commitment INFICON provides a global network of sales and service centers. These centers are staffed with local service and application experts who can assist you in choosing the best solution for your individual product application and provide fast support if service is needed. Korea INFICON Ltd. Gyoenggi-do Phone : +82 31 783 2942 E-mail : [email protected] Asia and Pacific Singapore, South Asia and China Australia / New Zealand INFICON Ltd. INFICON PTE Ltd. Beijing Singapore Augent™ ADVANTAGES AT A GLANCE Phone : +86 10 6590 0164 Phone : +65 6631 0300 Europe, Middle East E-mail : [email protected] E-mail : [email protected] Americas and Africa n Fast chamber leak check n Withstand process chemistry Augent™ OPG550 Japan Taiwan INFICON Inc. INFICON GmbH INFICON Co. Ltd. INFICON Co. Ltd. n Increase in productivity and yield n Smart algorithm for easy integration East Syracuse, NY Cologne Kawasaki-shi, Kanagawa-ken Chupei City n Long life time, no filament burns n Compact size Phone : +1 315 434 1100 Phone : +49 221 567 881 00 Phone : +81 44 822 1111 Phone : +886 3 552 5828 Vacuum Gauge E-mail : [email protected] E-mail : [email protected] E-mail : [email protected] E-mail : [email protected] The compact and intelligent solution for vacuum monitoring Chamber leak check www.inficon.com [email protected] Due to our continuing program of product improvements, specifications are subject to change without notice. tibc52e1 ©2020 INFICON Augent™ OPTICAL MEASUREMENT EARLY AND ACCURATE FAULT DETECTION QUICK AND EASY WIDE PRESSURE RANGE FOR PRINCIPLE SAVES MONEY MAINTENANCE GAS TYPE MONITORING Light emitted from a plasma depends n Fast leak check n Spare sensor for field replacement n 1×10 -7 … 5 mbar OPG550 Optical on the gas mixture in the vacuum n available n Leak check more frequently No additional pumping chamber. A light analyzer digitizes n n Higher tool up time No calibration required after sensor the signal as a function of wavelength replacement, calibration data stored Plasma Gauge n Increase in productivity and counts. INFICON’s smart on replacement sensor OPG550 algorithm fits the optical data to n Higher production yield The INFICON Augent™ Optical Plasma known gas spectra. It identifies the n Possible to find internal leaks RGA RGA with differential pump Gauge is a compact and intelligent solution TYPICAL APPLICATIONS gas species and the composition of 1E-10 1E-8 1E-6 1E-4 1E-2 1 for vacuum monitoring. Augent™ combines n Chamber leak check, the mixture. two sensor technologies into one compact faster RoR (rate of rise) test Operating Pressure mbar device for gas type monitoring from 1x10-7 LIGHT ANALYZER n Leak check to find internal leaks to 5 mbar (0.75 x 10-8 to 3.75 Torr) and to measure total pressure from 1x10-7 mbar n Real time clean endpoint detection (0.75 x 10-8 Torr) to atmosphere at the same n Gas type and concentrations time. Augent™ is protected by an integrat- monitoring ENVIRONMENT PROTECTION ed Pirani sensor to switch off plasma above MATERIALS EXPOSED n Less power consumption <5W compared with RGA >20W 20 mbar (15 Torr). TO VACUUM n Weight and size reduced – n Stainless steel saves packaging and freight cost Augent™ vacuum gauges comes with fully in- n Ceramic AL O 2 3 n Environmentally beneficial packaging ADVANTAGES AT A GLANCE tegrated digital electronics, providing ultimate n Molybdenum n RoHS and WEEE compliant n flexibility and smart algorithm for easy system High speed leak detection n Titanium integration. Quick and easy maintenance due n Replacement sensor – no need to scrap electronic unit n Increase of productivity and yield n Metal sealed, no FKM to available spare sensor cell. Metal sealed TRUE TOTAL PRESSURE n Withstand process chemistry n Long life time, air inrush protection sensor cell and material exposed to vacuum READING withstand process chemistry. n No internal sensor leaks n Withstand process chemistry n No calculation based on partial pressure reading n Smart algorithm for easy integration n Output from cold cathode and n Compact design and small footprint Pirani sensors n Reliable and fast start up n Pressure reading up to atmospheric pressure GOLDEN STATE CHECK n Higher production yield OUTSTANDING LIFETIME COMPACT SIZE n Water concentration monitoring n Proven gauge protection keeps n Design freedom and flexibility for n Check of process start conditions by-product away chamber design n No emitted light n Easy integration on existing n No filament burns out chambers n Self-protection, automatic plasma n “1/2” diameter tube, less Hydrogen switch off interference with process Nitrogen 26,9% 71,6% EASY TOOL INTEGRATION Oxygen 1,5% n NO additional software needed n Direct communication with tool Counts control Reference n RS232 and analog output Measured n Smart algorithm in the sensor Wafelength.