1972 – 1975 First oil-free piston Johan K. Fremerey vacuum pump Spinning rotor John L. Farrant vacuum gauge 1974 1972 Low-Pressure Chemical Vapor Deposition of Silicon Dioxide from Tetraethoxysilane Dan L. Burt, Richard F. Taraci and John E. Zavion U.S. Patent 3934060 (1976), filed 1973 Altair 8800 Computer 1975 Structure Zone Model for sputter-deposited films John A. Thornton 1974 R. C. Merrill G.J. Egan, B.W. Paszek and A.J. Aronson Roll coater for deposition on Ferrofluidic™ rotary shaft seal plastic film Reactive ion etching Ferrofluidics Corp. 1972 Horuhiko Abe, Japan Steven Yoneo Muto 1974 Plasma etching of semiconductors U.S. Patent 3971684 (1976) U.S. Patent 3880684 (1975) filed 1973 filed 1973 Kalrez ® perfluorocarbon elastomers E. I. du Pont de Nemours & Co. c. 1975 Last Apollo Mission Cryo-pumps for The Earth in the vacuum Space Simulation and of space – from Apollo-17 semiconductor fabrication (NASA - 1972) John S. Chapin 1975 Planar magnetron sputter Low-Pressure Chemical Deposition deposition source Special Report: Vacuum of Polysilicon U.S. Patent 4166018 (1979 ) Zenith shuts down Physics Today Jerry L. Kruma and Paul G. Hilton filed 1974 Lansdale, PA unit August 1972 U.S. Patent 3900597 (1975) 1975 filed 1973 1972 1975 Vacuum Science & Technology Timeline Kai Manne Börje Siegbahn Nicolaas Bloembergen Ernst August Friedrich Ruska 1976 – 1989 (1919–1981) and Arthur L. Schawlow (1906-1988) Nobel Prize in Physics Nobel Prize in Physics Nobel Prize for transmission for high resolution for laser spectroscopy electron microscope electron spectroscopy 1981 1981 1986 Wolfgang Paul Gerd Binnig and Heinrich Rohrer Nobel Prize in Physics Nobel Prize in Physics for for Paul Trap for scanning tunneling microscopy Intel 8086 charged particles 1986 Viking I and II 16-bit microprocessor. 1989 land on Mars 29,000 transistors 1976 4.77 MHz (100 mm wafers) Sputter coating Hans Georg Dehmelt June 1978 for computer Nobel Prize in Physics Gas Friction Vacuum hard disks for use of Penning Trap Meter (spinning rotor gauge) First commercial c. 1983 to study charged particles Johan K. Fremery and Bernd convection Pirani gauge 1989 1977 Lindenau, Germany U.S. Patent 3395914 (1983 ) Gerd Binnig, Calvin F. Quate filed 1981 Compound Molecular Pump and Christof Gerber Osaka Vacuum Ltd. Improved halogen Atomic Force Microscope 1980 incandescent lamp 1986 Walter K. Brinn, et al. U.S. Patent 4547704 (1985 ) 150 mm wafers Large non-evaporable 1983 fabricated December 1983 getter panel 1.2 million-transistor 1976 Computer Compact Disc with vacuum-deposited Intel 80486™ 25 MHz processor Motorola 68000 thin films April 1989 microprocessor chip Hexode Reactive Ion Etch 1984 (used in 1984 Apple Tool WE 215A vacuum tube Macintosh) David N. Wang, Frank D. manufacture shutdown 1981 Edwards Co. (England) 1979 Egitto, and Dan Maydan – Dry vacuum pump Applied Materials (U.S.A.) 1985 RCA closes Harrison, NJ U.S. Patent 4376672 (1983) receiving tube plant filed 1981 Sylvania takes over The Journal of Richard E. Smalley Nuvistor line The last major U.S. vacuum tube Vacuum Science & (1943-2005), April 30, 1976 Tokamak Fusion Test Reactor production line shut down Technology splits Harry Kroto, et al. AVS logo begins operation (U.S.) (Raytheon) into A & B issues C molecule adopted 1982 60 1986 1983 discovered 1979 1985 1976 1989 Vacuum Science & Technology Timeline Molecular beam 1990 – 1999 epitaxy experiments Eric Allin Cornell, Wolfgang Ketterle, Hubble Space Telescope in space and Carl Edwin Wieman placed in orbit NASA Synthesize Bose-Einstein condensate NASA 1995 1995 1990 Ultra high vacuum production sputter deposition system Avi Tepman, Howard Grunes, Sasson Somekh, Dan Maydan – Mass spectrum of Jupiter’s atmosphere Applied Materials (U.S.A.) Hubble Space Telescope 1996 U.S. Patent 5186718 (1993 ) fully functional after repair 1991 NASA 1993 First mass production First 200 mm vacuum processing semiconductor Sumio Ijima Light emitting system for organic light wafers produced 1-nm carbon polymer devices emitting diode displays April 1992 nanotubes reported demonstrated 1999 1991 1996 First commercial plasma Thin film structure control by C named 60 color television display (21-inch) glancing angle deposition (GLAD) ‘Molecule of the Year’ 1992 Kevin J. Robbie and SCIENCE Magazine Michael J. Brett (Canada) Digital Versatile Disc (DVD) 1991 1997 with vacuum-deposited thin films 1996 The Bell Jar subscription quarterly First Issue of Intel introduces Glass vacuum tube New AVS logo for the amateur scientist, Surface Science Pentium™ processor manufacturers remaining in 1997: becomes an internet site adopted Spectra (200-mm wafers) USA (7)), Eastern Europe (7), 1990 Stephen P. Hansen 1992 March 1993 China (2), Russia (2), and France (1) January 1992 1990 1999 Vacuum Science & Technology Timeline Eric Allin Cornell, 2000 – 2007 Alan Graham MacDiarmid Wolfgang Ketterle, John L. Hall and (1927-2007) , Hideki and Carl Edwin Wieman Theodor W. Hänsch Shirakawa, and Alan J. Nobel Prize in Physics Nobel Prize in Physics for Heeger for production of contributions to the Nobel Prize in Chemistry for Bose-Einstein condensate development of laser-based the discovery of 2001 precision spectroscopy conducting polymers 2005 2000 Zhores I. Alferof (1930- ) Large Hadron Collider Jack St. Clair Kilby and Herbert Kroemer (1928- ) to start operation (1923-2005) Nobel Prize in Physics European Particle Nobel Prize in Physics Heterojunction transistor, Physics Laboratory Integrated Circuit solid state laser (CERN) 2000 2000 2007? Mass spectrum of water Plasma chemical vapor plume on Saturn satellite deposition and vacuum NASA evaporation used in mass 2006 production of organic light-emitting diode displays Integrated circuits on 2006 300-mm silicon wafers in mainstream production The world's smallest high- 2005 performance quadrupole mass spectrometer (16-rods) installed in Flat panel TV displays made on the International Space Station 60 x 70-inch glass sheets Nividia graphics chip set, 2001 2004 128 processors, 681 million transistors 2006 Cathode ray tube displays become obsolete 50-inch diagonal plasma Russian-made vacuum 2005 television displays Kodak digital camera with tubes used in audio 2006 2.3-inch organic light amplifiers (England) 50th Anniversary of AVS emitting diode display 2007 2003 2003 © 2003-2007 AVS (AmericanVacuum Society) Electron Tube Research: Perham Foundation Intel images courtesy of Intel Corporation 2000Revision date: August 2007 www. avs. org 2007 Vacuum Science & Technology Timeline.