Trichlorosilane Safety Data Sheet P-4823 This SDS conforms to U.S. Code of Federal Regulations 29 CFR 1910.1200, Hazard Communication. Issue date: 01/01/1984 Revision date: 02/09/2021 Supersedes: 10/25/2017 Version: 1.0 SECTION: 1. Product and company identification 1.1. Product identifier Product form : Substance Substance name : Trichlorosilane CAS-No. : 10025-78-2 Formula : Cl3HSi Other means of identification : Chlorosilane A-19, Silicochloroform, trichloromonosilane 1.2. Relevant identified uses of the substance or mixture and uses advised against Use of the substance/mixture : Industrial use; Use as directed. 1.3. Details of the supplier of the safety data sheet Praxair, Inc. 10 Riverview Drive Danbury, CT 06810-6268 - USA T 1-800-772-9247 (1-800-PRAXAIR) - F 1-716-879-2146 www.praxair.com 1.4. Emergency telephone number Emergency number : Onsite Emergency: 1-800-645-4633 CHEMTREC, 24hr/day 7days/week — Within USA: 1-800-424-9300, Outside USA: 001-703-527-3887 (collect calls accepted, Contract 17729) SECTION 2: Hazard identification 2.1. Classification of the substance or mixture GHS US classification Flam. Liq. 1 H224 Water-react. 1 H260 Acute Tox. 3 (Inhalation) H331 Skin Corr. 1A H314 Eye Dam. 1 H318 STOT SE 3 H335 2.2. Label elements GHS US labeling Hazard pictograms (GHS US) : GHS02 GHS05 GHS06 GHS07 Signal word (GHS US) : Danger Hazard statements (GHS US) : H224 - EXTREMELY FLAMMABLE LIQUID AND VAPOR H260 - IN CONTACT WITH WATER RELEASES FLAMMABLE GASES WHICH MAY IGNITE SPONTANEOUSLY H314 - CAUSES SEVERE SKIN BURNS AND EYE DAMAGE H331 - TOXIC IF INHALED CGA-HG04 - MAY FORM EXPLOSIVE MIXTURES WITH AIR CGA-HG22 - CORROSIVE TO THE RESPIRATORY TRACT Precautionary statements (GHS US) : P202 - Do not handle until all safety precautions have been read and understood. P210 - Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No EN (English US) SDS ID: P-4823 1/12 This document is only controlled while on the Linde US website and a copy of this controlled version is available for download. Linde cannot assure the integrity or accuracy of any version of this document after it has been downloaded or removed from our website. Trichlorosilane Safety Data Sheet P-4823 This SDS conforms to U.S. Code of Federal Regulations 29 CFR 1910.1200, Hazard Communication. Issue date: 01/01/1984 Revision date: 02/09/2021 Supersedes: 10/25/2017 Version: 1.0 smoking. P222 - Do not allow contact with air. P223 - Do not allow contact with water. P231+P232 - Handle under inert gas. Protect from moisture. P233 - Keep container tightly closed. P235 - Keep cool. P240 - Ground/Bond container and receiving equipment. P241 - Use explosion-proof electrical, ventilating and lighting equipment. P242 - Use only non-sparking tools. P243 - Take precautionary measures against static discharge. P260 - Do not breathe vapors P264 - Wash hands thoroughly after handling P271+P403 - Use and store only outdoors or in a well-ventilated place. P280 - Wear protective gloves/protective clothing/eye protection/face protection. P370+P378 - In case of fire: Use AFFF alcohol-compatible foam to extinguish P381 - Eliminate all ignition sources if safe to do so. P402 - Store in a dry place. P404 - Store in a closed container. P405 - Store locked up. P501 - Dispose of contents/container in accordance with container Supplier/owner instructions CGA-PG05 - Use a back flow preventive device in the piping. CGA-PG20 - Use only with equipment of compatible materials of construction and rated for cylinder pressure. CGA-PG12 - Do not open valve until connected to equipment prepared for use. CGA-PG06 - Close valve after each use and when empty. CGA-PG18 - When returning cylinder, install leak tight valve outlet cap or plug. CGA-PG02 - Protect from sunlight when ambient temperature exceeds 52°C (125°F). P302 - IF ON SKIN: P335+P334 - Brush off loose particles from skin. Immerse in cool water/wrap in wet bandages. P303, P361, P353, P363, P310 - IF ON SKIN OR (HAIR): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. Immediately call a poison center or doctor/physician. P304+P340 - IF INHALED: Remove person to fresh air and keep comfortable for breathing. P311 - Call a POISON CENTER or doctor/physician. P305, P351, P338, P310 - IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Immediately call a poison center or doctor/physician. P332+P313 - IF SKIN IRRITATION OCCURS: Get medical advice/attention. 2.3. Other hazards Other hazards which do not result in : Reacts with moisture to form hydrochloric acid (aqueous hydrogen chloride). classification Trace amounts may be present in the product. 2.4. Unknown acute toxicity (GHS US) No data available SECTION 3: Composition/Information on ingredients 3.1. Substances Name Product identifier % Trichlorosilane (CAS-No.) 10025-78-2 100 (Main constituent) 3.2. Mixtures Not applicable SECTION 4: First aid measures 4.1. Description of first aid measures First-aid measures after inhalation : Remove to fresh air and keep at rest in a position comfortable for breathing. If not breathing, give artificial respiration. If breathing is difficult, trained personnel should give oxygen. Call a physician. WARNING: To avoid possible chemical burns, the rescuer should avoid breathing any exhaled air from the victim. EN (English US) SDS ID: P-4823 2/12 This document is only controlled while on the Linde US website and a copy of this controlled version is available for download. Linde cannot assure the integrity or accuracy of any version of this document after it has been downloaded or removed from our website. Trichlorosilane Safety Data Sheet P-4823 This SDS conforms to U.S. Code of Federal Regulations 29 CFR 1910.1200, Hazard Communication. Issue date: 01/01/1984 Revision date: 02/09/2021 Supersedes: 10/25/2017 Version: 1.0 First-aid measures after skin contact : In case of contact, immediately flush affected areas with plenty of water for at least 15 minutes while removing contaminated clothing and shoes. Call a physician. Wash clothing before reuse. Discard contaminated shoes. First-aid measures after eye contact : Immediately flush eyes thoroughly with water for at least 15 minutes. Hold the eyelids open and away from the eyeballs to ensure that all surfaces are flushed thoroughly. Contact an ophthalmologist immediately. First-aid measures after ingestion : Do NOT induce vomiting. If patient is fully conscious, give two glasses of milk or water at once. Get immediate medical attention. Never give anything by mouth to an unconscious person. 4.2. Most important symptoms and effects, both acute and delayed Symptoms/effects after inhalation : MAY CAUSE RESPIRATORY IRRITATION. Symptoms/effects after eye contact : CAUSES SERIOUS EYE DAMAGE. Symptoms/effects after ingestion : Swallowing a small quantity of this material will result in serious health hazard. 4.3. Indication of any immediate medical attention and special treatment needed No additional information available SECTION 5: Firefighting measures 5.1. Extinguishing media Suitable extinguishing media : DO NOT EXTINGUISH A LEAKING GAS FIRE UNLESS THE LEAK CAN BE STOPPED. Carbon dioxide. Dry sand. Alcohol resistant foam. Unsuitable extinguishing media : Water. Dry chemical, soda ash or lime. 5.2. Special hazards arising from the substance or mixture Fire hazard : DANGER! Flammable, corrosive liquid and vapor. Explosion hazard : Dousing fire with water might generate hydrogen gas creating dangerous explosion hazard especially in confined areas. Vapors may form explosive mixture with air and oxidizing agents. Reactivity : Vapor has a very low autoignition temperature. (~ 220 °F (104 °C)). May ignite on hot surfaces at about this temperature or greater. Vapor burns rapidly in air. Reacts violently with water to form hydrogen chloride fumes. 5.3. Advice for firefighters Firefighting instructions : DANGER! Flammable, corrosive liquid and vapor. Evacuate all personnel from the danger area. Use self-contained breathing apparatus (SCBA) and protective clothing. Immediately cool containers with water from maximum distance. Stop flow of gas if safe to do so, while continuing cooling water spray. Remove ignition sources if safe to do so. Remove containers from area of fire if safe to do so. On-site fire brigades must comply with OSHA 29 CFR 1910.156 and applicable standards under 29 CFR 1910 Subpart L—Fire Protection. Special protective equipment for fire fighters : Wear gas tight chemically protective clothing in combination with self contained breathing apparatus. Specific methods : If venting or leaking gas catches fire, do not extinguish flames. Flammable vapors may spread from leak, creating an explosive reignition hazard. Vapors can be ignited by pilot lights, other flames, smoking, sparks, heaters, electrical equipment, static discharge, or other ignition sources at locations distant from product handling point. Explosive atmospheres may linger. Before entering an area, especially a confined area, check the atmosphere with an appropriate device. In large fires where leakage may occur, water spray may be used if applied in quanitities sufficient to absorb the heat of reaction and knock down the hydrogen chloride fumes. For small fires, use copious quantities of water spray to react with the chlorosilane, which reacts violently with water to form hydrogen chloride fumes. Despite the reaction with water, trichlorosilane fires can be extinguished with a 6 percent solution in water of medium-expansion Hazmat II foam. EN (English US) SDS ID: P-4823 3/12 This document is only controlled while on the Linde US website and a copy of this controlled version is available for download. Linde cannot assure the integrity or accuracy of any version of this document after it has been downloaded or removed from our website. Trichlorosilane Safety Data Sheet P-4823 This SDS conforms to U.S. Code of Federal Regulations 29 CFR 1910.1200, Hazard Communication.