Helios NanoLab 400 / 400 S / 400 ML / 600 User Operation Manual 1st Edition 9 December, 2010 Copyright © 2010 FEI Company All rights reserved Trademark Acknowledgments FrameMaker™ is a trademark of Adobe Systems Incorporated. Microsoft® is a registered trademark of Microsoft Corporation. Windows XP™ is a trademark of Microsoft Corporation. Production Acknowledgments This manual was produced using FrameMaker™ document publishing software Technical Author Martin Dufek TABLE OF CONTENTS Chapter 1 System Overview User Manuals . 1-1 FEI Microscope Systems Safety Manual . 1-1 User Operation Manual. 1-1 System Capabilities. 1-2 System Performance . 1-3 Computer Control . 1-4 Vacuum System. 1-4 Stage . 1-4 Image Viewing and Capture . 1-4 Beams Control. 1-4 Gas Injection System (GIS) . 1-5 Analysis Capability. 1-5 Chapter 2 System Control Interface Elements . 2-1 Software . 2-1 Hardware . 2-1 Microscope Console Control Panel . 2-2 Vacuum System . 2-3 Vacuum Status . 2-3 Pump button . 2-4 Vent button . 2-4 System States . 2-5 Power Off . 2-8 Emergency Off. 2-8 Equipments . 2-9 Detector Types and Usage . 2-9 Stages. 2-10 X-section Sample Holder. 2-10 Loadlock . 2-11 Multiloader . 2-11 Stage movement limits . 2-12 Chapter 3 Software Control Software Interface. 3-1 Other Software and Hardware . 3-1 Software Interface Elements. 3-2 Icons . 3-2 Tool-Tips . 3-2 Pull-down Menus . 3-2 Using the Mouse . 3-2 Using the Keyboard . 3-2 Command Buttons . 3-3 List Boxes . 3-3 Property Editors . 3-3 Edit Boxes. 3-3 Radio Buttons / Check Boxes . 3-3 C-i Adjusters. 3-4 Exponential Adjuster . 3-4 Linear Adjuster. 3-4 Preset Adjuster . 3-4 Spinner . 3-4 2D Controls. 3-5 Modules . 3-5 Dialogues . 3-5 Tabs . 3-5 Progress bars . 3-5 xT microscope Server Software . 3-6 xT microscope Control Software . 3-7 Title Bar. 3-8 Menu Bar . 3-8 File Menu (Alt + F) . 3-8 Edit Menu (Alt + E). 3-10 Detectors Menu (Alt + D) . 3-10 Scan Menu (Alt + C) . 3-11 Beam Menu (Alt + B) . 3-14 Patterning Menu (Alt + P) . 3-15 Stage Menu (Alt + S) . 3-16 Tools Menu (Alt + T) . 3-18 Window Menu (Alt + W) . 3-20 Help Menu (Alt + H) . 3-22 Toolbar . 3-23 Magnification / High Voltage / Beam current List Boxes . 3-23 Imaging Pixel Resolution List Box . 3-23 Direct Measurement . 3-23 Imaging Area. 3-24 Databar . 3-24 Pages (Alt + P) and Modules . 3-25 1. Vacuum Module . 3-25 2. System Module . 3-26 3. Column Module . 3-26 4. Magnification Module . 3-26 5. Beam Module . 3-27 6. Rotation Module . ..