Intel Corporation Type 4 Air Contaminant Discharge Permit Application Prepared for Oregon Department of Environmental Quality December 2014 Prepared by This page intentionally left blank ii Contents Section Page Acronyms and Abbreviations .................................................................................................................... vii 1 Introduction ............................................................................................................................... 1‐1 1.1 Background ............................................................................................................................ 1‐1 1.2 Application Organization ....................................................................................................... 1‐1 2 Project Description ..................................................................................................................... 2‐1 2.1 Semiconductor Manufacturing Operations ........................................................................... 2‐1 2.2 Manufacturing Support Operations ....................................................................................... 2‐1 3 Emissions Information ................................................................................................................ 3‐1 3.1 Manufacturing Process Description ....................................................................................... 3‐1 3.1.1 Oxidation ................................................................................................................... 3‐1 3.1.2 Photolithography ...................................................................................................... 3‐1 3.1.3 Etching ...................................................................................................................... 3‐1 3.1.4 Doping ....................................................................................................................... 3‐2 3.1.5 Deposition ................................................................................................................. 3‐2 3.1.6 Planar ........................................................................................................................ 3‐2 3.1.7 Cleaning .................................................................................................................... 3‐2 3.1.8 Auxiliary Steps ........................................................................................................... 3‐2 3.2 Utility Support Systems .......................................................................................................... 3‐2 3.2.1 Rotor Concentrator Thermal Oxidizers ..................................................................... 3‐2 3.2.2 Packed‐Bed Wet Chemical Scrubbers ....................................................................... 3‐2 3.2.3 Boilers ....................................................................................................................... 3‐3 3.2.4 Emergency Generators and Fire Water Pumps ........................................................ 3‐3 3.2.5 Cooling Towers ......................................................................................................... 3‐3 3.2.6 Tanks ......................................................................................................................... 3‐3 3.2.7 TMXW Ammonia Treatment System ........................................................................ 3‐3 3.2.8 Bulk Specialty Solvent Waste System ....................................................................... 3‐3 3.2.9 Fabrication (Clean Rooms) Building Air Handling ..................................................... 3‐3 3.2.10 Bulk Chemical distribution ........................................................................................ 3‐4 3.2.11 Ultrapure Water ........................................................................................................ 3‐4 3.2.12 Rinsewater Reclaim Treatment ................................................................................ 3‐4 3.2.13 Chilled and Glycol Water .......................................................................................... 3‐4 3.2.14 Bulk Gas .................................................................................................................... 3‐4 3.2.15 Specialty Gas Systems ............................................................................................... 3‐4 3.2.16 Waste Collection and Treatment .............................................................................. 3‐4 3.2.17 Instrumentation and Control .................................................................................... 3‐4 3.2.18 Life Safety .................................................................................................................. 3‐4 3.2.19 Point of Use Abatement Systems ............................................................................. 3‐4 3.3 Emission Calculations and Methodology ............................................................................... 3‐5 3.3.1 Boiler Emissions ........................................................................................................ 3‐5 3.3.2 RCTO Natural Gas Combustion Emissions ................................................................ 3‐5 3.3.3 Emergency Generator and Fire Water Pumps .......................................................... 3‐6 3.3.4 Cooling Towers ......................................................................................................... 3‐6 3.3.5 Bulk Specialty Solvent Waste System ....................................................................... 3‐7 3.3.6 TMXW System ........................................................................................................... 3‐7 ES111914104811PDX III CONTENTS, CONTINUED Section Page 3.3.7 Semiconductor Manufacturing Operations .............................................................. 3‐8 3.3.8 Miscellaneous Sources ............................................................................................ 3‐13 3.3.9 Categorically Insignificant Activities ........................................................................ 3‐14 3.4 Emissions Summary .............................................................................................................. 3‐16 4 Regulatory Requirements ........................................................................................................... 4‐1 4.1 Major New Source Review (NSR) ........................................................................................... 4‐1 4.1.1 Prevention of Significant Deterioration NSR ............................................................. 4‐1 4.1.2 Maintenance Area NSR ............................................................................................. 4‐3 4.1.3 Nonattainment Area NSR .......................................................................................... 4‐4 4.1.4 Minor Source NSR ..................................................................................................... 4‐4 4.2 New Source Performance Standards (NSPS) .......................................................................... 4‐5 4.2.1 NSPS Subpart A – General Provisions ........................................................................ 4‐5 4.2.2 NSPS Subpart Dc – Standards of Performance for Industrial‐Commercial‐ Institutional Steam Generating Units ........................................................................ 4‐5 4.2.3 NSPS Subpart IIII – Standards of Performance for Stationary Compression Ignition Internal Combustion Engines ....................................................................... 4‐6 4.3 National Emissions Standards for Hazardous Air Pollutants (NESHAP) ................................. 4‐6 4.3.1 NESHAP Subpart ZZZZ ................................................................................................ 4‐6 4.3.2 NESHAP Subpart JJJJJJ ............................................................................................... 4‐6 4.4 Oregon Title V Operating Permit Program (Implementing Title V of the Clean Air Act) ........ 4‐7 4.5 Chemical Accident Prevention Program ................................................................................. 4‐7 5 Best Available Control Technology Analysis ................................................................................ 5‐1 5.1 Introduction ............................................................................................................................ 5‐1 5.2 BACT Applicability................................................................................................................... 5‐1 5.2.1 Applicable Pollutants ................................................................................................. 5‐1 5.2.2 Criteria for Emission Unit BACT Applicability ............................................................ 5‐1 5.2.3 Evaluation of Equipment Requiring BACT ................................................................. 5‐2 5.2.4 “New Project” Equipment ......................................................................................... 5‐2 5.2.5 Preproject Equipment (Retroactive ‐ BACT) .............................................................. 5‐3 5.3 BACT Analysis for New Project Equipment ............................................................................ 5‐4 5.3.1 Introduction ..............................................................................................................