High Precision Screw Driven Tables Contents (click on desired subject) B1 High Precision Systems B3 Linear Bearing Technologies B7 Square Rail Linear Tables B9 400XR Series B35 XRS Systems B43 XE Series B53 ZP200 Series B57 402LN Series B61 400ST Series B67 Linear Ball Bearing Tables B67 100BT Series B71 300AT Series B75 Cross Roller Linear Tables B75 800CT Series B79 Rotary Tables B79 200RT Series B83 Additional Capabilities www.parkermotion.com Parker Hannifin Corporation Electromechanical Automation Division Irwin, Pennsylvania High Precision Precise multi-axis positioning systems play an integral part in today’s semicon- ductor, computer peripheral, biomedical and electronics industries. The demands for tighter specifications, improved throughput and consistent quality have become increasingly stringent. Because of the complexity associated with these systems, many manufacturers insist on a single source supplier to eliminate multi- ple vendor design incompatibilities and delivery conflicts. With over thirty years experience as a global leader in the development of products and technology, Parker pro- vides the most advanced, easy to inte- grate high precision electromechanical systems. Parker High Precision Systems and Services include: Selectable Levels of Integration™ that let you pick the product or system which suits your need and fits your capability The most comprehensive array of products in the industry Advanced product development Seamless integration with other Parker components including servo motors, motor drives, controls, interfaces, actuators, pneumatics, and structural components Modular construction from standard catalog tables or custom systems designed and built to specification Global Parker support network (1-800-C-PARKER) High Precision System Features Easy, multi-axis connectivity Submicron precision Velocities up to 1.5 meters per second Cleanroom and vacuum compatible Thorough testing and certification www.parkermotion.com Parker Hannifin Corporation Electromechanical Automation Division B1 Irwin, Pennsylvania High Precision www.parkermotion.com Parker Hannifin Corporation Electromechanical Automation Division Irwin, Pennsylvania Catalog 8092/USA Introduction High Precision Overview The vast majority of precision tables in use today employ rolling element (ball or cross roller) linear bearings. These are grouped into two primary categories: recirculating bearings (square rail and round rail), which facilitate very long travel distances and nonrecirculating (ball and rod, and cross roller) which offer the smoothest translation. Here you will find a condensed description of each style. The pages which follow describe Parker’s screw driven, high precision table product offering. Square Rail Linear Tables Square rail bearings are bearing. This increases the Motor recirculating ball bearings contact surface between Carriage designed to move heavy the ball and the rail, thereby loads on a precise linear increasing the load capacity Precision Ground path. Linear guides which of the linear bearing. Travel Ballscrew house several rows of re- with this bearing type is circulating ball bearings ride only limited by the available on a square or rectangular base, rail length, and drive steel rail. The rail cross mechanism. These tables Stationary section enables bearing are driven by a precision Base ways to be ground into the ground ballscrew, which is Recirculating Bearing Housing sides of the rail. These performance matched to the (Linear Guide) bearing ways are shaped in linear bearings to optimize an arch which approximates load/life performance as well Square Rail Bearing Way the same radius as the ball as positioning precision. Round Rail Linear Tables Round rail bearings are a re- components. A rolled ball- Motor circulating type linear bearing screw is normally employed Carriage system consisting of two as the drive mechanism. large diameter ground steel With characteristics of low rods on which ball bushings friction, high-speed, long ride. These bushings, have travel and low cost, this drive Rolled Ballscrew several rows of recirculating is well suited for tables ball bearings, which support utilizing a dual round rail the moving carriage and bearing system. These tables permit very long travel are ideal for assembly and lengths. The ball bushings automation applications provide good load capacity where higher speed, long Recirculating with very low friction and its life and easy, low cost Round Rail Bearing Housing (Ball Bushing) modular design permits easy maintenance is important. Base Bearing Way replacement of bearing Linear Bearings Attribute Comparison of Linear Bearing Technologies The linear bearing supports the moving carriage and determines Attribute Square Rail Round Rail Ball and Rod Cross Roller the straightness of the linear Travel (Max.) unlimited* unlimited* 12 inches 18 inches travel path. It is the key element Friction Low Very Low Extremely Low Very Low in determining the load capacity. Smoothness Moderate Moderate Extremely Smooth Very Smooth Parker precision tables are Straightness (travel) Good Moderate Very Good Excellent offered in four bearing styles: Square Rail, Round Rail, Linear Flatness (travel) Good Moderate Very Good Excellent Ball, and Cross Roller. This table Load Capacity Very High Moderate Low Moderate/High shows the relative comparisons *Limited only by the available length of base and rails, travels of up to 3 meters are standard, and custom lengths are available. between each style. www.parkermotion.com Parker Hannifin Corporation Electromechanical Automation Division B3 Irwin, Pennsylvania Catalog 8092/USA Introduction High Precision Precision Linear Drive Assemblies Linear Ball Bearing and Cross Roller Linear Tables The drive assembly physi- The nonrecirculating linear side of the table. Each row ways. The result of this cally moves the positioner bearings found in both Linear is captured between two sets difference is an increased and is the principal element Ball and Rod, and the Cross of ground steel rods (two load capacity of two to three in determining positional Roller style tables provide stationary, two moving) and times the equivalent size accuracy, repeatability and the smoothest translation preloaded to provide ultra ball bearing table. The ball resolution. (least mechanical noise) smooth, very straight, bearing tables utilize either of any mechanical bearing extremely low friction motion. leadscrew or ballscrew table. The bearing system The cross roller style functions drive–depending on load Leadscrew in the linear ball bearing (ball in a similar manner except ratings. Both tables are and rod) style table consists the balls are replaced by limited in travel as a result of two rows of hardened cylindrical rollers and the of the nonrecirculating steel balls located on either rods by ground “V” groove nature of the bearings. Ballscrew Carriage Ground Leadscrew Drive Ground Linear Ball Bearing This drive mechanism is Leadscrew comprised of a precision ground steel leadscrew and Motor a preloaded nut of phospho- rus bronze. It offers the smoothest translation of all the drive assemblies and is recommended for applica- Linear Cross Roller tions with a duty cycle of Moving Bearing Way (Rods) 75% or less. As a result of the compliant preload Stationary Ball Bearing (the nut threads are loaded Bearing Way against the screw threads (2 Rods) to remove backlash) it offers repeatable self-locking positioning. Carriage Ballscrew Drive Ground Ballscrew Moveable Ballscrews are very similar Bearing Way in appearance and function Stationary to leadscrews except Bearing Way Cross Roller ballscrews incorporate recirculating ball bearings in the nut assembly. This Rotary Indexing Tables greatly reduces friction and wear resulting in Precision rotary tables, used improved efficiency of the for precise angular indexing, drive assembly (30% for employ an integral angular Motor Mount leadscrews vs. 90% for ball- contact ball bearing or cross Table Top screws) and a duty cycle roller bearing system. The rating of 100%. This increase bearing system is preloaded in efficiency enables the ball- to eliminate any eccentricity screw to deliver more thrust and provide smooth, flat with less input torque. And rotary motion. The drive since the load is applied to mechanism is a precision Preloaded rolling elements instead of worm gear assembly which is Worm Gear Drive sliding elements, wear is compliantly preloaded to greatly reduced. minimize backlash and assure positional accuracy For Belt drives, see page D1 Stationary Base and repeatability. For Linear Motor drives, see page A1. www.parkermotion.com Parker Hannifin Corporation Electromechanical Automation Division B4 Irwin, Pennsylvania Catalog 8092/USA Introduction High Precision Product Comparisons: Parker high precision screw driven tables are divided into five families (or groups) which are distin- guished by the primary bearing style. All tables are offered with several drive mechanism options and are designed for direct connection to standard frame size stepper or servo motors. Each family is shown here for a quick comparison based on key parameters. Square Rail Linear Tables / see pages B7 - B66 The key attributes of the Square Rail Tables are high strength, long travel range, and high precision. These tables can satisfy the vast majority of high precision positioning applications ranging from industrial automation to high-end scientific markets. 400XR Parameters: Travel Range: 2000 mm Load Capacity: 1470 kg