Krosaki Harima’s Advanced Ceramics for Ultra Precision Field Jun Sugawara General manager & Chief engineer Precision ceramics technology group Krosaki Harima Corporation Ceramics Division Krosaki Harima Corporation Table of Contents Krosaki Harima’s Advanced Ceramics for Ultra Precision Field 1. Background Company & Division 2. Low thermal expansion Ceramics ➢ NEXCERATM ( Cordierite Ceramics) 3. Application for a Calibration tool 4. Application for a Mirror and Scale Ceramics Division Krosaki Harima Corporation Background The largest Refractory company in Japan • Shareholders ：Nippon Steel Co. Ltd. 42.9% • Established ： 1918 (has been in existence for 94 years) • Employees ： around 4,200 （Consolidated） • Capital ： Around $71 Mill. • Turnover ： Around $1.3 Bill. (2011) Advanced Ceramics as Precision Components Refractory Ceramics Products 3 Ceramics Division Krosaki Harima Corporation Global Production and Service Network Krosaki USA Inc. (Crown Point, IN ) KHC Europe Office (Düsseldorf, Amsterdam) Krosaki Magnesita Refractories Krosaki Harima YKR SDKT QSK DHC AMR Refractarios, S.A. WKS Refractories IFGL Krosaki Shanghai SRIC Magnesita S.A. TRL Krosaki Partner Refractories KCICA Production Base Sales Company & Office Agencies Consolidated subsidiaries 13 Licensee ( Over see 8, Japan 5) 4 Ceramics Division Krosaki Harima Corporation Our advanced ceramics N117B C201 Boron carbide ① Standard High stiffness & hardness BC101 → High regidity Low density The ceramics are used properly to meet the needs of the customer according to the characteristics such as low cost and high stiffness. Special emphasis of our material development and business are placed on the low thermal expansion ceramics and the high stiffness ceramics. Ceramics Division Krosaki Harima Corporation Thermal expansion and Young’s modulus 450 400 B4C,SiC 350 300 Al2O3 Sialon 250 Stainless steel 200 NEXCERA® 150 Super invar alloy Cast Iron Young's modulus(Gpa) 100 Invar alloy 50 Zerodur Aluminum alloy 0 0.01 0.1 1 10 100 Thermal expansion coefficient α (10-6/K) Most of advanced ceramics have lower thermal expansion coefficient and higher stiffness compared to metal materials. Especially, Sialon has a lowest value in advanced ceramics equal to invar alloy. NEXCERA has an extremely low thermal expansion coefficient equal to Zerodur, but the young’s modulus are excellent compared to Zerodur. Ceramics Division Krosaki Harima Corporation Table of Contents Krosaki Harima’s Advanced Ceramics for Ultra Precision Field 1. Background Company & Division 2. Low thermal expansion Ceramics > NEXCERATM ( Cordierite Ceramics) 3. Application for Calibration tools 4. Application for Mirrors and Scales Ceramics Division Krosaki Harima Corporation NEXCERATM Charasteristics NEXCERA has been developed as a cutting-edge material having both an extremely low thermal expansion coefficient and superior mechanical properties. 1. Cordierite (2MgO-2Al2O3-5SiO2) based polycrystalline ceramics 2. Ultra low thermal expansion coefficient at 23℃ -6 α <= 0.03 (x 10 /K) at RT Equal to LTEG’ 3. Light in weight 2.5 g/cm3 Lighter than Aluminum’ Equal to LTEG’ 4. High Stiffness 130-140 GPa High Strength 210Mpa 1.5-2 times of LTEG’ 5. Pore- Less can be finished for Optical-Mirror surfaces Ceramics Division Krosaki Harima Corporation 2a . NEXCERATTM Characteristics Table Code N113B N117B LTEG New Low Thermal Materials NEXCERA NEXCERA expansion glass Color Black Black Brown Density g/cm3 2.5 2.55 2.53 Young’s Modulus GPa 130 140 60 - 90 Bending Strength MPa 210 230 ( 100～50 ) Fracture Toughness MPaｍ1/2 1.2 1.2 ( 0.8 ) Hardness HV GPa 88 6.6 Thermal Conductivity W/mK 3.7 4.2 1.46 Thermal Expansion ppm < 0.03 < 0.03 0 ±0.02 Coefficient (at 23℃) Ceramics Division Krosaki Harima Corporation Thermal Expansion Property of NEXCERATM Measuring Method : Laser Interferometer Thermal Expansion Curve 0.010 0.009 L/L (%) 0.008 ⊿ ΔＬ／Ｌ ％ 0.007 Thermal Expansion Coefficient S /K) 0.006 h 6 ri d － nk an 0.005 p 10 Ex × N113B 0.004 0.003 0.002 Thermal Expansion Ratio Thermal Expansion 0.001 α＝0.01×10-6/Ｋ（at 23℃） 0.000 Thermal Expansion Ratio -60 -40 -20 0 20 40 60 80 100 TemperatureTemparature ℃ (℃) Thermal Expansion Coeff. ( Coeff. Expansion Thermal Temperature (℃) The thermal expansion curve indicates NEXCERA once shrinks with the temperature rising, but it expands further rise of the temperature, drawing a minimum thermal expansion coefficient at around room temperature region. Ceramics Division Krosaki Harima Corporation Comparison of CTE measurement ×10-6/K at 20℃ NEXCERA KH NMIJ (Japan) PTB (Germany) Samples Krosaki Harima National Metrology Institute Physikalisch-Technische Corporation of Japan / AIST Bundesanstalt (Braunschweig) Sample A -0.001 -0.0035 ------ U（α）＝0.0017（K=2） Sample B 0.021 0.0256 ------ U（α）＝0.0025（K=2） Sample C -0.007 ------ -0.0063 U（α）＝0.0026(K=2) Sample D 0.023 ------ 0.0255 U（α）＝0.0039(K=2) The table indicates that CTE data measured in KH are in good agreement with the results of national metrology Institutes. Ceramics Division Krosaki Harima Corporation Advantages of NEXCERATM Long-term dimensional stability of NEXCERATM Akira Takahashi Meas. Sci. Technology 23(2012) 035001 NEXCERATM 13 months Standard Scale (550mm) 6 months Position deviation ±4.6nm(2σ) per 550mm in length during 13 months less than uncertainty of measuring system Zerodur Standard Scale (300mm) 4 months 8 months Shrink 90nm 13 months per 300mm in length 16 months during 13 months Ceramics Division Krosaki Harima Corporation Dimensional Stability Measurement by NMIJ National Metrology Institute of Japan (NMIJ) We have been measuring the length change of NEXCERATM gauge blocks with linking optical flats by an interferometric method cooperating with NMIJ. 観測部Measuring Laser安定化レーザ of 3 wave lengths ブロックゲージ面Block gauge surface Reference 参照ミラー ブロックゲージGauge Block Mirror b レーザ光導入部 a 干渉縞の ズレFringe shift Length長さ L Fringe干渉縞画像 image Laser beam entrance entrance beam Laser ベースプレート にリンギング Optical Flat Air空気屈折率、熱膨張補正等 refractive index Length measurement system Linking & thermal expansion correction of NMIJ < Measuring Principle > ◆Cooperation with NMIJ of AIST Ceramics Division Krosaki Harima Corporation Result of Dimensional Stability NEXCERATM Gauge Block (200mm) 100 80 Data of NMIJ (Japan) 60 40 20 0 -20 -40 Length change (nm) Data of PTB -60 (Germany) -80 -100 0 6 12 18 24 30 Time (month) NEXCERATM has a higher dimensional stability compare to Zero expansion glasses. Ceramics Division Krosaki Harima Corporation Table of Contents Krosaki Harima’s Advanced Ceramics for Ultra Precision Field 1. Background Company & Division 2. Low thermal expansion Ceramics > NEXCERATM ( Cordierite Ceramics) 3. Application for Calibration tools 4. Application for Mirrors and Scales 5. Sialon Ceramics Ceramics Division Krosaki Harima Corporation Applications of NEXCERATM High dimensional stability for long-term passage ==> Used as calibration tools and primary standards. Hole Plate for calibration of CMM (Coordination Measuring Machine) CMM is calibrated by measuring holes which positions are accurately defined in advance by a public institute of Metrology. Cooperated with AIST ( AIST : National Institute of Advanced Industrial Science and Technology) Ceramics Division Krosaki Harima Corporation NEXCERA Calibration Tools Expert model of Hole Plate Normal model of Hole Plate 410 x 410mm 610 x 610mm 410 x 410mm 610 x 610mm Custom-made model of Hole Plate 410 x 410 Ceramics Division Krosaki Harima Corporation NEXCERA Calibration Tools Daily Checkup Master of CMM NEXCERA + TiN-Coated Ball 200 x 200 350 x 350 x 200mm NEXCERA + CFRP 300 x 300 Ceramics Division Krosaki Harima Corporation NEXCERATM Step Gauge Step Gauge 350mm Step Gauge 500mm & 1000mm Step Gauge 550mm Ceramics Division Krosaki Harima Corporation NEXCERATM Ball Bars New ESCALON HA 1 m beam with 51 balls by Trapet Precision Engineering Ball Bar for CMM 980mm φ１inch Dimension Master KIT by TRESA Co. Ball Bar 500mm φ15/16 inch 350 x 350 mm Ceramics Division Krosaki Harima Corporation Gauges for non-contact CMM Sphere Standards Ball bars 500, 250, 125mm with matte surface φ1 inch φ 1＆φ4 inch made of NEXCERATM made of NEXCERATM Step cylinder φ30 x 27 Gauge for X-ray CT Ceramics Division Krosaki Harima Corporation Ball Bars of other materials Ball bars (CFRP) φ1 & φ2 inch x 600mm Target bar 1000mm made of Ball bar NEXCERATM (CFRP) 1500mm Ball bar (Sialon) 300mm Cubic bar (CFRP+ Al2O3) Ceramics Division Krosaki Harima Corporation Gauges Plate Step Gauge 600mm ＮＥＸＣＥＲＡ Gear Pitch Master made of NEXCERATM Hole Bar 600 & 800mm ＮＥＸＣＥＲＡ Ceramics Division Krosaki Harima Corporation NEXCERATM Gauge Block NEXCERA Gauge Block NEXCERA gauge blocks have already come onto the market. Ceramics Division Krosaki Harima Corporation NEXCERA Hole Plate Hole Plate for calibration of CMM mirror surface < Specifications > diameter : φ20 mm roundness : <1 µm roughness Ra : <0.05 µm cylindricity : <2 µm 410 X 410mm 610 X 610mm ・The high-precision machinability of NEXCERA can lead to the achievement of the specifications • Hole Positions have been defined by NMIJ with uncertainty (k=2) of 0.35µm Ceramics Division Krosaki Harima Corporation Hole Accuracies of a Hole Plate Roundness 0.77～1.07μm Cylindricity 1.89μm Straightness 0.88μm Ceramics Division Krosaki Harima Corporation Uncertainty of Hole Positions Calibration Certificate by NMIJ NEXCERA Hole Plate Uncertainty (k=2 , 95%) = 0.35μm Ceramics Division Krosaki Harima Corporation Example of Measurement Result [Krosaki Harima] XY-Plane YZ-Plane XZ-Plane Zeiss PRISMO 800 700 700 700 600 600 600 500 500 500 400 400 400 300 Y [mm] Y 300 Z [mm] Z 300 [mm]Z 200 200 200 100 100 100 0 0 0 0 100 200 300 400 500 600 700 800 0 100 200 300 400 500 600 700 0 100 200 300 400 500 600 700 -100 -100 -100 X [mm] X [mm] Y [mm] 校正値 ZX面内誤差20000倍拡大 校正値 XY面内誤差20000倍拡大 校正値 YZ面内誤差20000倍拡大 Ｘ-axis Error 2.48μm／m Ｙ-axis Error 7.99μm／m Ｘ-axis Error 2.3μm／m Ｙ-axis Error 8.84μm／m Ｚ-axis Error 3.32μm／m Ｚ-axis Error 3.3μm／m Squareness 5.74μrad Squareness 0.16μrad Squareness 12.25μrad The error tendency of CMM can be recognized easily.