IAB2021 INDUSTRIAL ADVISORY BOARD ANNUAL MEETING MICROSYSTEMS TECHNOLOGY LABORATORIES ANNUAL EXPO 2021 January 28, 2021 Virtual Annual Meeting MICROSYSTEMS TECHNOLOGY LABORATORIES • MASSACHUSETTS INSTITUTE OF TECHNOLOGY INDUSTRIAL ADVISORY BOARD ANNUAL MEETING IAB2021 JANUARY 28, 2021 AGENDA 6:00pm Prof. Harry Lee: “MTL Director’s Update” 6:45pm Prof. Vladimir Bulović: “MIT.nano Update” 7:15pm Prof. Marc Baldo: “MTL/RLE Integration” 7:45pm Break 8:00pm Prof. Dave Perreault: “Powering the Future: A Research Overview of the MIT Power Electronics Research Group” 8:30pm Prof. Polina Anikeeva: “Electrical, Optical, and Magnetic Approaches for Body-Machine Interfaces” 9:00pm Dr. Vicky Diadiuk, Dr. Jorg Scholvin, Nick Menounos, Prof. Duane Boning: “Facilities and Servies Update” 9:45pm Discussion 10:00pm Adjourn 1 MIG MEMBER BIOGRAPHIES Susan Feindt Chorng-Ping Chang Fellow & Advanced Process Development Director Senior Director Analog Devices Applied Materials Susan is an ADI fellow and Director of Analog’s Advanced Dr. Chorng-Ping Chang is Senior Director of Strategic Process Development Group in Wilmington, MA. She has External Research in the office of CTO, Applied Materials. been with Analog Devices for over 30 years. Susan has led Prior to joining Applied Materials in 2004, Dr. Chang process development efforts for integrated circuits used was a Distinguished Member of Technical Staff at Bell in various applications and markets including automotive, Laboratories, Murray Hill, New Jersey, where he had done communications, industrial and healthcare. She focuses extensive R&D on advanced plasma sources, processing on silicon based Bipolar and BiCMOS processes, Gallium technology, CMOS integration, and novel device architec- Nitride and Heterogeneous Integration. Before joining ture. He received his B.S. degree from National Tsing Hua Analog Device, Susan worked for Harris Semiconductor University and Ph.D. degree from University of California in Melbourne, Florida. Susan received her BS in Chemical at Berkeley. He has authored or co-authored over 120 con- Engineering from the Massachusetts Institute of Technology. ference and journal papers and has filed over 20 patents. Dr. Chang is a fellow of IEEE. He also served on the editorial board of IEEE. 2 Philip A. Kraus David Carter Appointed Vice President Laboratory Technical Staff Head of Core R&D Materials Science and Chemistry Group Leader Semiconductor Products Group Draper Applied Materials, Inc. Dr. Philip Kraus is appointed vice president of Engineering Dr. David Carter is Laboratory Technical Staff and the and the Head of Core R&D for the Semiconductor Products Materials Science and Chemistry Group Leader at Draper Group at Applied Materials, Inc. He oversees the develop- Laboratory. He has been at Draper for 18 years, where he ment of innovative technologies and prototype products for has led efforts to apply nanofabrication and nanotechnology the semiconductor wafer fab equipment market. in a variety of areas including RF MEMS, integrated optics, plasmonic devices, and carbon nanotube MEMS/NEMS An industry expert in both reactor design and materials integration. His work in molded nanoscale polymers led synthesis, Dr. Kraus has championed new processing capa- to the first-ever demonstration of human climbing using bility by working at the intersection of these two fields. biomimetic synthetic gecko adhesion. He has advised sev- He has led the development of new capabilities in plasma eral graduate Draper fellows and has initiated multiple treatments, large-area evaporation, reactive ion etch, atomic collaborations with university researchers while at Draper. layer deposition, chemical vapor deposition, and physical vapor deposition systems. Prior to Draper, he held a research staff position at MIT, where he led the development of zone-plate-array lithogra- Dr. Kraus rejoined Applied Materials in 2015 after 10 years phy (ZPAL). Before MIT, he held a staff position at Harvard working in start-up companies across various industries University, where he managed the cleanroom facility. Dr. that leverage solid-state physics. From 2012 to 2015, he Carter received his Ph.D. in Electrical Engineering from was CEO of Ultora, a manufacturer of carbon nanotube MIT and his A.B. and M.S. degrees in Engineering Sciences electrochemical energy storage devices. Prior to that he from Dartmouth College. He has co-authored 32 journal held leadership roles at materials synthesis, light emitting and conference papers and has 17 patents in micro/nano- diodes, and thin film photovoltaics companies. Previously at fabrication, nanotechnology, and materials. Applied Materials from 1999 to 2006, Dr. Kraus developed FEOL plasma nitridation systems—the first widespread use of plasma processing in transistor formation. Dr. Kraus is the inventor of more than 20 issued patents and the author of more than 40 publications. He earned a Ph.D. in Physics from the University of Minnesota and a B.S. in Engineering Science from the Pennsylvania State University. 3 George Courville Anthony Taylor Business Development Manager, Technology Applications Technologist Partnerships Edwards Vacuum Edwards Vacuum Mr. Courville has over 25 years of experience as a Anthony has over 30 years’ experience working in the marketing and business development professional. His semiconductor industry and conducting research in career has included senior management positions with thin film technology and microsystems. He has been both large, multi-national corporations as well as small, with Edwards, Sanborn, New York, as an Applications nanotechnology startups. He has led global business Engineer and Applications Technologist for the past development teams offering high performance materials 27 years and a visiting scientist at MIT since 2014. His and equipment for many uses in semiconductor, display, work at MIT has focused on novel fabrication methods solar and other high technology markets. He was of micro and nano-systems, specifically graphene- responsible for managing a marketing and applications based gas sensors for vacuum and exhaust management team that introduced and supported the first dry vacuum applications, and 3D-printed miniature vacuum and pumps for the semiconductor market. liquid pumps. Anthony received the Bachelors of Science in Physics (cum laude) from Saint Lawrence University, Canton, New York in 1985, the M.S. degree in Physics Mr. Courville received his Bachelor of Science degree in from the University of Arizona, Tucson, Arizona in Chemical Engineering from Tufts University, and an 1988, and the Doctorate of Philosophy in Physics from MBA from Boston University. Rensselaer Polytechnic Institute (RPI), Troy, New York in 1993. 4 Vivek Dave Takanobu Haga Director of Technology Development Manager, Innovation Promotion Group HARTING, Inc. of North America Hitachi High-Tech Corporation Vivek Earned his Bachelor’s degree in Engineering his Dr. Takanobu Haga is a member of Innovation Promotion Applied Science with Honor from the California Institute Group of Hitachi High-Tech America. He is based in Boston of Technology, and his Master’s and Doctorate degrees in to scout innovative technologies and startups in life science. Materials Engineering from the Massachusetts Institute of Technology. He has worked at Fortune 50 aerospace He started his career as a research scientist and an optical companies, National Labs, various startups in three states, engineer at Central Research Laboratory, Hitachi, in 2005. and presently serves as the Director of Technology for North During his nine-year of professional experience at Hitachi, America for HARTING Inc., family-owned private company he achieved various advancements in DNA sequencing based in Espelkamp, Germany with North American head- technologies: he published a number of research findings quarters in Elgin, IL. and patents related to sequencing instruments and methods; as the optical engineer of Hitachi High-Technologies, he His current focus is on the Industrial Internet of Things also joined collaboration projects with Life Technologies (IIoT) and specifically how to provide Edge-level hardware (now Thermo Fisher Scientific) in commercialization of and software solutions that will truly enable IIoT to reach Next Generation DNA Sequencer. After his experience at its full potential. He is additionally a technical expert in Hitachi, he worked at a venture capital firm in Tokyo for problems pertaining to sensing, control, data analytics, two years and joined Hitachi High-Technologies in 2018. manufacturing, quality control, understanding and elimi- nating sources of process variance, and the impact of man- He graduated from Tokyo University of Agriculture and ufacturing problems or defects on downstream product Technology with PhD in optical engineering during his place- performance and process reliability. Sgnificant experience ment at Hitachi in 2013; he received his master of science in as an Entrepreneur working with early-stage advanced biophysics from Osaka University in 2005 and his bachelor technologies encompassing manufacturing, materials, and of science in chemistry from Tohoku University in 2003. algorithms. He earned MBA from IE Business School, Spain, in 2015. 5 Dirk Pfeiffer Hiroshi Suzuki Sr. Manager, Microelectronics Research Laboratory General Manager, Technology Innovation Division IBM Hitachi High-Tech Corporation Dr. Hiroshi Suzuki is the General Manager of the Technology Dr. Dirk Pfeiffer currently manages the Microelectronics Innovation