Application Guide Semiconductor Ceramics Ultra-Pure Ceramics for Semiconductor Processing CoorsTek offers a broad spectrum of materials for key semiconductor applications. To ensure optimal product performance, CoorsTek engineers offer assistance through every phase of the design and manufacturing processes, including component design assistance, material selection, and production expertise. Al₂O₃ ALUMINA SiO₂ QUARTZ AD-995 Alumina T230 ADS II Alumina T240 Fine-grained Alumina PlasmaPure-UC™ Alumina RF Pure Alumina Si SILICON B₄C BORON CARBIDE SiC SILICON CARBIDE PureSiC® CVD SiC UltraSiC™ Sintered SiC Al ESD-SAFE CERAMICS CeraSiC-B Sintered SiC SC-SD Sintered SiC Statsafe™ ESD ADC-92 Ultraclean ™ Si:SiC TPSS Si:SiC CVD SiC Coating C GRAPHITE SiC Coated Graphite Y₂O₃ YTTRIA • Fine Grain • Clear Carbon Yttria Bulk Yttria Plasma Coating N NITRIDES ZrO₂ ZIRCONIA Aluminum Nitride (AlN) Silicon Nitride (Si₃N₄) Dura-Z™ Zirconia © 2017 COORSTEK, INC. Semiconductor Manufacturing Components With excellent material properties, CoorsTek ultra-pure ceramics are ideal for use throughout the entire semiconductor manufacturing cycle Etch Single Silicon Pulling • Domes • Crucibles • Focus Rings • Nozzles • Plates • Shields • Shower Heads Deposition Thermal Batch • Chamber Liners Diffusion & LPCVD • Cover Rings • Back Fill Injectors • Gas Distribution Plates • Baffles & Holders • CVD, EVD, ECP • Cantilever Paddles • Domes • Liners & Process Tubes • Heaters • Pedestals • Plating Insulators • Wafer Boats Wafer Inspection High Temperature & Lithography RTP & EPI • Ceramic Filters • Diffusers • Photomask Substrates • Insulators • Stage Components • Rf Shields • Vacuum Break Filters • Rings • Wafer Tables • Susceptors Implant General Applications • Air-Bearings • End Effectors • Air Bearing Guideways • Heaters • Interferometer • Insulators Reference Mirrors • Lift Pins • Scale Mounts • Multi-Layer Channeled Ceramic Substrates Planarization — CMP Back End / Packaging • Cmp Tables • Capillaries • Polishing Plates • Die Collets • Vacuum Pick-Up Tools • Wedges © 2017 COORSTEK, INC. About CoorsTek For over 100 years, industry leaders have relied on CoorsTek CoorsTek employs the world’s leading ceramics engineers and for solutions to the world’s most perplexing engineering is supported by the industry’s largest and most sophisticated and manufacturing challenges. Since the inception of the research and development infrastructure, with centers in North semiconductor and electronics industries, CoorsTek has served America, Europe, and Asia. the world’s most respected OEMs by producing exceptionally durable, reliable, and high-purity ceramic components. With over six thousand employees and nearly 500,000 square meters of manufacturing space, CoorsTek has unparalleled With the 2014 acquisition of Covalent Materials Corporation, manufacturing capacity. We offer a variety of forming processes CoorsTek became the world’s largest manufacturer of including injection molding, dry pressing, isostatic forming, and engineered ceramics. CoorsTek now offers an extensive portfolio extrusion to ensurehigh-quality, low-cost manufacturing. of over 300 materials, including silicon carbides, aluminas, zirconias, graphite,quartz, and custom blends adapted for As best-practice manufacturers, we take quality very seriously. specialized applications. All CoorsTek facilities comply with internationally recognized manufacturing and quality standards, such as ISO-9001. With over 500,000 square meters of manufacturing space across four continents, CoorsTek is the international partner of choice for high-performance semiconductor components. For more information, contact a CoorsTek materials expert today at +1 800 821 6110. Corporate Headquarters Manufacturing Facility Sales Oce Dura-Z, UltraSiC, and OpX are trademarks of CoorsTek, Inc. CoorsTek, PureSiC, and CeraSiC are registered trademarks of CoorsTek, Inc. Americas Europe Japan China Korea +1 303 271 7100 tel +49 160 530 3768 +1 81 3 5437 8411 +86 21 6232 1125 +82 31 613 2946 +1 855 929 7100 toll free in USA [email protected] [email protected] [email protected] [email protected] coorstek.com [email protected] © 2017 CoorsTek 01206 K .