
W&M ScholarWorks Dissertations, Theses, and Masters Projects Theses, Dissertations, & Master Projects 2004 Ultraviolet sources for advanced applications in the vacuum UV and near UV Sheng Peng College of William & Mary - Arts & Sciences Follow this and additional works at: https://scholarworks.wm.edu/etd Part of the Atomic, Molecular and Optical Physics Commons, Nuclear Commons, and the Plasma and Beam Physics Commons Recommended Citation Peng, Sheng, "Ultraviolet sources for advanced applications in the vacuum UV and near UV" (2004). Dissertations, Theses, and Masters Projects. Paper 1539623467. https://dx.doi.org/doi:10.21220/s2-fgzj-e515 This Dissertation is brought to you for free and open access by the Theses, Dissertations, & Master Projects at W&M ScholarWorks. It has been accepted for inclusion in Dissertations, Theses, and Masters Projects by an authorized administrator of W&M ScholarWorks. For more information, please contact [email protected]. NOTE TO USERS This reproduction is the best copy available. UMI Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. Reproduced with with permission permission of the of copyright the copyright owner. Furtherowner. reproduction Further reproduction prohibited without prohibited permission. without permission. ULTRAVIOLET SOURCES FOR ADVANCED APPLICATIONS IN THE VACUUM UV AND NEAR UV A Dissertation Presented to The Faculty of the Department of Physics The College of William & Mary in Virginia In Partial Fulfillment Of the Requirements for the Degree of Doctor of Philosophy by Sheng Peng 2004 Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. APPROVAL SHEET This dissertation is submitted in partial fulfillment of the requirements for the degree of Doctor of Philosophy Sheng Peng Approved, December 2004 'ennis M. Manos {Thesis Advisor t C. Eugene 'k.'htMy Robert E. Welsh Mark K. H inders^ Department of Applied Science u Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. To my parents... I ll Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. Table of Contents Acknowledgements viii List of Tables ix List of Figures x Abstract xv Chapter 1 Introduction 2 1.1 Outline ......................................................................................................... 2 1.2 History ......................................................................................................... 5 1.3 Background ................................................................................................ 7 1.4 Applications ................................................................................................ 8 1.5 KrI as an Excimer .................................................................................... 12 2 Plasma Fundamenteds 15 2.1 Plasm a......................................................................................................... 15 iv Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. 2.2 Sheaths ...................................................................................................... 18 2.3 Diffusion and M obility ............................................................................. 22 2.4 Plasmas Parameters in Capacitive Discharges ..................................... 24 2.5 Exciting Laboratory Plasmas ................................................................. 27 2.6 Optical Emission in P la s m a .................................................................... 29 2.7 Excimer L am p s ......................................................................................... 33 2.8 Commercially Available La m p s ............................................................... 41 3 Experiment Setup 43 3.1 Capacitively Coupled RF Lam p ............................................................. 43 3.1.1 Coupling M eans ............................................................................. 44 3.1.2 Matching Network ....................................................................... 45 3.2 Microwave L a m p ...................................................................................... 46 3.2.1 Microwave Lamp with an Overmoded Cavity ............................. 47 3.2.2 Magnetron and Step-Up Configuration ..................................... 48 3.3 Ultraviolet Transmitting Glasses (B u lb s) ............................................. 49 3.4 Vacuum System ........................................................................................ 52 3.5 Optical Characterization System ............................................................. 54 3.5.1 McPherson M218 System .............................................................. 54 3.5.2 OceanOptics S1024DW S y s te m ................................................. 56 3.6 Calibration .............................................................................................. 60 3.7 Data A cquisition ..................................................................................... 62 V Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. 4 Spectroscopic Analysis 64 4.1 Emission Spectra of Xenon E xcim ers ...................................................... 65 4.1.1 Homonuclear Diatomic Molecule ................................................. 65 4.1.2 Kinetic Reactions for X en on ........................................................ 68 4.1.3 Xenon Spectra and Lamp Efficiency ........................................... 71 4.1.4 Plasma Temperature Estim ate .................................................... 78 4.2 Emission Spectra of KrI Excim ers ............................................................ 84 4.2.1 Rare Gas H alides.......................................................................... 85 4.2.2 Background for K r I ....................................................................... 88 4.2.3 Emission Spectra for KrI* and Ig .............................................. 89 4.2.4 K r/l 2 Mixture Reaction Kinetics .............................................. 97 4.3 Emission Spectra of Xel Excimers ........................................................... 104 5 MAGIC Simulation 111 5.1 Introduction of PIC Simulation .............................................................. I ll 5.2 Impact Ionization Test by Electron Beam (EB) Injection .................. 112 5.3 Ionization in the RF Capacitively-Coupled Lamp ............................... 120 5.4 Electromagnetic Simulation of the Microwave L am p ............................ 128 5.5 Conclusions ............................................................................................... 134 6 Gaussian Simulation 136 6.1 An Overview of Gaussian .......................................................................... 136 6.2 Interaction Potentials ................................................................................ 137 vi Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. 6.3 Molecular Orbitals and Electron D e n sity ............................................. 146 6.4 Summary .................................................................................................. 149 7 Semiclassical Line Shape Simulation 151 7.1 Derivation .................................................................................................. 152 7.2 A Compact Form of the F o rm u la .......................................................... 163 7.3 KrI* Spectrum Simulation ...................................................................... 167 8 Summary and Future Work 172 8.1 Summary .................................................................................................. 172 8.2 Future Work ................................................................................................ 174 8.2.1 Plasma Diagnostic ....................................................................... 174 8.2.2 Biology A pplications .................................................................... 175 8.2.3 Spectral M o d e l .............................................................................. 177 Appendices 179 Appendix A Franck-Condon Principle ..................................... 179 Appendix B Hund’s Coupling Cases ................................................................. 181 Appendix C Intensity Calibration .................................................................... 186 Bibliography 189 Vita 197 vn Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. ACKNOWLEDGEMENTS I would like to thank my parents, whom I am indebted for. They have given me everything I need for living, learning, and working. I dedicate this work to my mother, Yuluan Li, and my father, Feng Peng. If I should be honored for any piece of this work, I want to pass this honor to them. My most special thanks go to Professor Dennis M. Manos. As my advisor, he led me all the way through my PhD study. He provides me the opportunity to learn, to ask and to prospect. What I have learned from him are not only the experimental skills and keen sensitivity for new ideas, but more valuable are the attitudes to my life. It is my honor to work with him. Professor John B. Delos served as an unofficial co-mentor on this work; his advice and efforts
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