Program Key Conference Topics 2D 2D Materials Focus Topic AC Actinides and Rare Earths Focus Topic AM Extending Additive Manufacturing to the Atomic Scale Focus Topic AS Applied Surface Science Division BI Biomaterial Interfaces Division BP Biomaterials Plenary Session EL Spectroscopic Ellipsometry Focus Topic EM Electronic Materials and Photonics Division EW Exhibitor Technology Spotlight Workshops HC Fundamental Discoveries in Heterogeneous Catalysis Focus Topic HI Advanced Ion Microscopy Focus Topic IPF Industrial Physics Forum MI Magnetic Interfaces and Nanostructures Division MM In-situ Microscopy, Spectroscopy, and Microfluidics Focus Topic MN MEMS and NEMS Group MP Materials and Processes for Quantum Computing Focus Topic MS Manufacturing Science and Technology Group NS Nanometer-scale Science and Technology Division PB Plasma Biology, Agriculture, and Environment Focus Topic PC Processing and Characterization of Air-Liquid, Solid-Liquid and Air-Solid Interfaces Focus Topic PS Plasma Science and Technology Division RM Reconfigurable Materials and Devices for Neuromorphic Computing Focus Topic SA Novel Trends in Synchrotron and FEL-Based Analysis Focus Topic SE Advanced Surface Engineering Division SS Surface Science Division TF Thin Films Division TR Tribology Focus Topic VT Vacuum Technology Division Key to Session/Paper Numbers Sessions sponsored by multiple topics are labeled with all acronyms (e.g. AC+EM+SS), then a number to indicate simultaneous sessions sponsored by the same topic(s) (e.g. SS1, SS2), then a dash followed by the first two characters of the day of the week: Monday, Tuesday, Wednesday, Thursday, Friday, then a single letter for Morning, Afternoon, Evening, Poster, and finally a number indicating the starting time slot for the paper. Example: SS1-MoM9 (Surface Science, Monday morning, 11:00 am). Program Key 1 Program Overview Room 101A 101B 102A 102B 103C /Time SuA BP-SuA: AVS BIP & AIP IPF Forum Plenary Session MoM EM+MP+PS-MoM: IoT IPF+AS+BI+NS-MoM: TF1-MoM: Precursors NS+2D+AN+EM+MN+MP Session: CMOS, Beyond Biofabrication: From and Surface Reactions +PC+RM-MoM: IoT the Roadmap and Over Tissue to Organ Session: Nanostructured the Cliff Devices and Sensors MoA EM+AM+NS+PS-MoA: BI+AS+IPF+MN-MoA: TF+EM+MI+PS-MoA: Thin NS+2D+AS+PC-MoA: SPM Atomic Layer Processing: Advanced Imaging and Films for Advanced - New Imaging and Selective-Area Patterning Structure Determination Memory Applications and Spectroscopy (Assembly/Deposition/Et of Biomaterials Research Magnetics Methodologies TuM ching)TF-TuM: Emerging IPF+AS+BI+MN-TuM: TF+AS-TuM: Special NS+AN+EM+MN+MP+RM Applications for ALD Advanced Imaging and Session in Honor of Paul -TuM: Nanophotonics, Structure Determination Holloway: Luminescent Plasmonics, and of Biomaterials Materials Growth, Metamaterials TuB Synthesis and MS-TuB: Working with Characterization Government Labs and other User Facilities TuL TuA EM+2D+AN+MI+MP+NS- BI+AS+IPF+NS-TuA: IoT TF+SS-TuA: NS+AM+MI+MN+SS+TR- TuA: Solar/Energy Session: Biofabrication, Organic/Inorganic TuA: SPM – Probing and Harvesting and Quantum Bioanalytics, Biosensors Materials and Interfaces Manipulating Nanoscale Materials and and Diagnostics Structures TuAB Applications TuP WeM EM+AN+MI+SS-WeM: IPF+AS+BI+NS-WeM: IoT TF+EM+MI-WeM: Thin AM+NS+SS-WeM: Surface and Interface Session: Bioanalytics, Film Processes for Nanofabrication with Challenges in Electronics Biosensors and Electronics and Optics I Focused Electron Beams and Photonics Diagnostics (8:00-10:00 am)/Atomic WeB Scale Manipulation with Focused Electron Beams (11:00 am-12:20 pm) WeL WeA EM+2D+SS-WeA: Wide BI-WeA: Microbes and TF+EM+MI-WeA: Thin AM+MP+NS-WeA: and Ultra-Wide Bandgap Fouling at Surfaces Film Processes for Atomic Scale Materials for Electronic Electronics and Optics II Manipulation with SPM Devices: Growth, ThM ModelingEM+MI+MN+NS and Properties-ThM: BI-ThM: Biomolecules TF+AS+EL+PS-ThM: In- NS+AN+EM+MI+MN+MP Nanostructures for and Biophysics at situ Characterization and +PS+RM-ThM: Electronic and Photonic Interfaces Modeling of Thin Film Nanopatterning and Devices Processes Nanofabrication ThA EM+2D+NS+PS+RM+TF- BI-ThA: Biolubrication SS+EM+PS+TF-ThA: NS+2D+AS+MN+PC-ThA: ThA: IoT Session: Flexible and Wear / Women in Deposition, Etching and SPM – Probing Electronic Electronics & Flash Bio-surface Science Growth at Surfaces and Transport Properties Networking Session ThP FrM BI+AS+NS-FrM: NS+AM+AS+MN+PC+PS+ Characterization of SS+TR-FrM: SPM – Biological and Probing Chemical Biomaterial Surfaces Reactions at the Nanoscale Program Overview 2 Program Overview Room 104A 104B 104C 201A 201B /Time SuA MoM PS+AS+EM+SS-MoM: TF2-MoM: IoT Session: PS+TF-MoM: Plasma TR+AS+NS+SS-MoM: 2D+EM+MI+NS+TF-MoM: Plasma-Surface Thin Film Processes for Deposition and Plasma- Tribology Focus Session 2D Materials Growth and Interactions Energy Storage Enhanced ALD Fabrication MoA PS+PB-MoA: Plasma and TF-MoA: IoT Session: Thin MI+2D+EM+NS-MoA: IoT 2D+MI+NS-MoA: 2D Polymers: 'The Legacy of Films for Photovoltaics Session: Symposium on Materials Riccardo d’Agostino and new Magnetic Materials, Characterization Beyond’ Devices and Concepts for including Microscopy and TuM PS+EM+SE-TuM: Plasma TF+AM+EM+PS-TuM: PS+PB-TuM: Plasma theHC+SS Information-TuM: Society Spectroscopy2D+EM+MI+NS -TuM: Processing of Challenging Atomic Layer Processing: Medicine Nanochemistry in Properties of 2D Materials - I Area Selective Deposition Heterogeneous Catalysis Materials including Electronic, Magnetic, TuB Mechanical, Optical, and Thermal Properties TuL TuA PS+EM+NS+SS-TuA: TF+PS-TuA: Atomic Layer PS+PB+SE-TuA: HC+SS-TuA: A Tale of Two 2D+EM+MI+MN+NS-TuA: Plasma Processing of Processing: Chemistry & Atmospheric Pressure Scales: Catalytic 2D Device Physics and Challenging Materials - II Surface Reactions for Plasmas Processes and Surface Applications Atomic Layer Processing Science TuAB TuP WeM PS+EM-WeM: Advanced PS+AS+EL+EM+SE-WeM: PS+MN-WeM: IoT HC+SS-WeM: 2D+AM+EM+NS-WeM: Patterning Current and Future Stars Session: Enabling IoT Era Mechanisms and Dopants, Defects, and of the AVS Symposium I Reaction Pathways of Interfaces in 2D Materials Heterogeneously WeB Catalyzed Reactions WeL WeA PB+BI+PC+PS-WeA: BI+AC+AS+HC+NS+SS+TF- PS+EM-WeA: Advanced HC+SS-WeA: Theory and 2D+MN+NS+SS-WeA: IoT Plasma Agriculture & WeA: Current and Future BEOL/Interconnect Dynamics of Session: Surface Environmental Stars of the AVS Etching Heterogeneously Chemistry, Applications Symposium II Catalyzed Reactions Functionalization, Bio ThM PS-ThM: Plasma Sources TF+PS-ThM: Deposition PS+EM+TF-ThM: Atomic HC+SS-ThM: In-situ and2D+EM+MI Sensor +MN+NS+SSApplications- Processes for 3D and Layer Processing: Atomic Analysis of ThM: Novel 2D Materials Extreme Geometries Layer Etching Heterogeneously Catalyzed Reactions ThA PS-ThA: Plasma TF+AS+EL+EM+NS+PS+SS PS+EM+TF-ThA: Atomic HC+SS-ThA: Bridging 2D+EM+MN+NS-ThA: Diagnostics, Sensors and -ThA: IoT Session: Thin Layer Processing: Gaps in Heterogeneously Novel Quantum Controls Films for Flexible Integration of ALD and Catalyzed Reactions Phenomena in 2D Electronics and IoT ALE Materials ThP FrM PS-FrM: Plasma Modeling 2D+EM+MN+NS-FrM: Nanostructures including Heterostructures and Patterning of 2D Materials Program Overview 3 Program Overview Room 202A 202B 202C 203A 203B /Time SuA MoM EL+AS+EM-MoM: MM+AS+NS+PC-MoM: SE+NS+TF-MoM: MP+EM+MN+NS-MoM: VT-MoM: Vacuum Application of SE for the Mechanical, Electrical, Nanostructured Thin Systems and Devices for Measurement Characterization of Thin Thermal and Optical Films and Coatings Quantum Computing I Films and Nanostructures Systems for In situ TEM MoA EL+EM-MoA: (9:00MM+AS+NS+PC+SS-10:100 am)/Beam-MoA: SE-MoA: New Challenges MP+AM+EM+NS-MoA: VT-MoA: Pumping and Spectroscopic InducedX-ray and Effects Electron and and Opportunities in Systems and Devices for Outgassing Ellipsometry: Novel ProcessingSpectromicroscopy in Liquid/Gas in Surface Engineering Quantum Computing II Applications and CellsLiquids for and TEM/SEM Gases & Flash TuM PC+AS+BI+NS+PB+SS- MS+MI+RM-TuM: IoT SE+PS-TuM: Plasma- MP+EM+NS-TuM: High VT-TuM: Large Vacuum Theoretical Approaches (10:40Networking-11:40 Session am) TuM: Solid-Liquid and Session: Challenges of assisted Surface Coherence Qubits for Systems and Accelerator Gas-Liquid Interfacial Neuromorphic Modification and Quantum Computing Vacuum Technology Processes and Computing and Deposition Processes TuB Characterization Memristor Manufacturing (8:00- 10:00 am)/Federal Funding Opportunities TuL (11:40 am-12:20 pm) TuA PC+AS+BI+EM+NS+PB+SS MS+MN-TuA: IoT Session: SE-TuA: Wear, Oxidation RM+EM+NS-TuA: IoT VT-TuA: IoT Session: -TuA: Progress in Challenges of Sensor and Corrosion Protective Session: Reconfigurable Vacuum System Design Industrial Processes and Manufacturing for the Coatings Materials and Devices for and Automation & Flash Characterization of IoT Neuromorphic Networking Session TuAB Interfaces and Gas-Solid Computing Interfacial Processes and Characterization TuP WeM PC+AS+BI+EM+PB+SS- MN+NS+PS-WeM: IoT AC+MI+SA-WeM: NS+2D+AN+MN+MP+SE- VT-WeM: Vacuum WeM: Novel Approaches Session: Multiscale Magnetism, Complexity, WeM: Micro, Nano and Technology and Challenges of Manufacturing: Enabling and Superconductivity in Opto Mechanics Developments Interfaces Materials and Processes the Actinides and Rare WeB Earths WeL WeA SA+AS+MI-WeA: Hard X- MN+2D+AN+NS-WeA: IoT AC+AS+SA-WeA: NS+MN+PC+SS-WeA: IoT HI-WeA: Novel Beam Ray Photoemission for Session: MEMS for IoT: Chemistry and Physics