OPERATING MANUAL XTC/C XTC/2 XTC/C XTC/2 Thin Film Deposition Controller IPN 074-183 OPERATING MANUAL XTC/C XTC/2 Thin Film Deposition Controller IPN 074-183X TWO TECHNOLOGY PLACE ALTE LANDSTRASSE 6 BONNER STRASSE 498 EAST SYRACUSE, NY 13057-9714 USA LI-9496 BALZERS, LIECHTENSTEIN D-50968 COLOGNE, GERMANY Phone: +315.434.1100 Phone: +423.388.3111 Phone: +49.221.347.40 Fax: +315.437.3803 Fax: +423.388.3700 Fax: +49.221.347.41429 Email: [email protected] Email: [email protected] Email: [email protected] VISIT US ON THE WEB AT www.inficon.com ©2001 INFICON 092304 Trademarks The trademarks of the products mentioned in this manual are held by the companies that produce them. INFICON®, CrystalSix® are trademarks of INFICON Inc. All other brand and product names are trademarks or registered trademarks of their respective companies. The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product. ©2001 All rights reserved. Reproduction or adaptation of any part of this document without permission is unlawful. DECLARATION OF CONFORMITY This is to certify that this equipment, designed and manufactured by: INFICON Inc. 2 Technology Place East Syracuse, NY 13057 USA meets the essential safety requirements of the European Union and is placed on the market accordingly. It has been constructed in accordance with good engineering practice in safety matters in force in the Community and does not endanger the safety of persons, domestic animals or property when properly installed and maintained and used in applications for which it was made. Equipment Description: XTC/2 and XTC/C Deposition Controllers, including _ the Oscillator Package and Crystal Sensor as properly installed. ________ Applicable Directives: 73/23/EEC as amended by 93/68/EEC 89/336/EEC as amended by 93/68/EEC Applicable Standards: EN 61010-1 : 1993, Fixed Equipment EN 55011, Group 1, Class A : 1991 EN 50082-2 : 1995 ____ ______ CE Implementation Date: January 3, 1995 Revised to include EMC Directive: January 2, 1997 Authorized Representative: Gary W. Lewis Vice President – Quality Assurance INFICON Inc. ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF LEYBOLD INFICON'S PRODUCTS SHOULD BE DIRECTED, IN WRITING, TO THE QUALITY ASSURANCE DEPARTMENT AT THE ABOVE ADDRESS. 04/15/97 Registration Card Thank you for selecting INFICON ® instrumentation. Please fill out and return this postage paid card as soon as possible. Model Serial # Name Title Company Bldg./MS Address Phone # City State Zip Country Fax# Email Your help is very important in our continuing efforts to improve our manuals. Using the table below, please circle the appropriate rank for each aspect. In the Importance column, please indicate the importance of each aspect. Manual Title Part # (see Title Page) 074- Importance Very No Very (ranked from Aspect Dissatisfied Satisfied 1 to 5, where Dissatisfied Opinion Satisfied 1 is low and 5 is high) Found everything VD D NO S VS I needed Easy to read VD D NO S VS Easy to use VD D NO S VS Relevant to VD D NO S VS my work Accurate VD D NO S VS information Well-written VD D NO S VS Well-organized VD D NO S VS Technical Enough VD D NO S VS Helped me VD D NO S VS solve problems If you have additional comments, please contact INFICON.® TWO TECHNOLOGY PLACE ALTE LANDSTRASSE 6 BONNER STRASSE 498 EAST SYRACUSE, NY 13057-9714 USA LI-9496 BALZERS, LIECHTENSTEIN D-50968 COLOGNE, GERMANY Phone: +315.434.1100 Phone: +423.388.3111 Phone: +49.221.347.40 Fax: +315.437.3803 Fax: +423.388.3700 Fax: +49.221.347.41429 Email: [email protected] Email: [email protected] Email: [email protected] VISIT US ON THE WEB AT www.inficon.com BUSINESS REPLY MAIL FIRST CLASS PERMIT NO. 49 EAST SYRACUSE, NEW YORK POSTAGE WILL BE PAID BY ADDRESSEE INFICON INC. Two Technology Place East Syracuse, New York 13057-9714 Warranty WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the reverse hereof, to be, for the period of warranty coverage specified below, free from defects of materials or workmanship under normal proper use and service. The period of warranty coverage is specified for the respective products in the respective Seller instruction manuals for those products but shall in no event exceed one (1) year from the date of shipment thereof by Seller. Seller's liability under this warranty is limited to such of the above products or parts thereof as are returned, transportation prepaid, to Seller's plant, not later than thirty (30) days after the expiration of the period of warranty coverage in respect thereof and are found by Seller's examination to have failed to function properly because of defective workmanship or materials and not because of improper installation or misuse and is limited to, at Seller's election, either (a) repairing and returning the product or part thereof, or (b) furnishing a replacement product or part thereof, transportation prepaid by Seller in either case. In the event Buyer discovers or learns that a product does not conform to warranty, Buyer shall immediately notify Seller in writing of such non-conformity, specifying in reasonable detail the nature of such non-conformity. If Seller is not provided with such written notification, Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification. THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD HEREUNDER. All other obligations and liabilities of Seller, whether in contract or tort (including negligence) or otherwise, are expressly EXCLUDED. In no event shall Seller be liable for any costs, expenses or damages, whether direct or indirect, special, incidental, consequential, or other, on any claim of any defective product, in excess of the price paid by Buyer for the product plus return transportation charges prepaid. No warranty is made by Seller of any Seller product which has been installed, used or operated contrary to Seller's written instruction manual or which has been subjected to misuse, negligence or accident or has been repaired or altered by anyone other than Seller or which has been used in a manner or for a purpose for which the Seller product was not designed nor against any defects due to plans or instructions supplied to Seller by or for Buyer. This manual is intended for private use by INFICON® Inc. and its customers. Contact INFICON before reproducing its contents. NOTE: These instructions do not provide for every contingency that may arise in connection with the installation, operation or maintenance of this equipment. Should you require further assistance, please contact INFICON. TWO TECHNOLOGY PLACE ALTE LANDSTRASSE 6 BONNER STRASSE 498 EAST SYRACUSE, NY 13057-9714 USA LI-9496 BALZERS, LIECHTENSTEIN D-50968 COLOGNE, GERMANY Phone: +315.434.1100 Phone: +423.388.3111 Phone: +49.221.347.40 Fax: +315.437.3803 Fax: +423.388.3700 Fax: +49.221.347.41429 Email: [email protected] Email: [email protected] Email: [email protected] VISIT US ON THE WEB AT www.inficon.com XTC/C - XTC/2 Operating Manual Table Of Contents Chapter 1 Introduction and Specifications 1.1 Instrument Safety . .1-1 1.1.1 Notes, Cautions, Warnings . .1-1 1.1.2 General Safety Information . .1-2 1.1.3 Earth Ground. .1-3 1.1.4 Main Power Connection . .1-4 1.2 Introduction to the Instrument . .1-5 1.3 Specifications . .1-6 1.3.1 Specifications XTC/2 and XTC/C. .1-6 1.3.1.1 General . .1-6 1.3.1.2 Measurement . .1-6 1.3.1.3 Source Controls . .1-6 1.3.1.4 Input/Output . .1-7 1.3.1.5 Recorder Output . .1-7 1.3.1.6 Display . .1-7 1.3.1.7 Process Recipe Storage . .1-7 1.3.1.8 Hardware interface . .1-8 1.3.1.9 Operation . .1-8 1.3.2 Transducer Specifications (optional) . .1-9 1.3.3 XIU (Crystal Interface Unit) Specifications. .1-9 1.4 Guide to the Use of the Manual . 1-10 1.5 XTC/C Users and Installers Note. 1-10 1.6 Related Manuals . 1-11 1.7 How To Contact Customer Support . .1-11 IPN 074-183X 1.7.1 Application Support . 1-11 1.7.2 Field Service and Repair Support . 1-12 1.7.3 Returning Your Instrument . 1-12 Chapter 2 Quick Use Guide 2.1 Unpacking, Initial Inspection and Inventory . .2-1 2.1.1 Unpacking and Inspection Procedures . .2-1 2.1.2 Inventory . .2-1 2.1.2.1 XTC/2 System Configuration . .2-2 2.1.2.2 XTC/C System Configuration. .2-2 TOC - 1 XTC/C - XTC/2 Operating Manual 2.1.2.3 Ship Kit - XTC/2 XTC/C . 2-3 2.2 Voltage Selection . 2-4 2.3 Installation Guide and Schematic . 2-8 2.4 XTC/2 Front Panel Description . 2-10 2.4.1 XTC/2 Front Control Panel Description. 2-10 2.4.2 XTC/2 Display Description . 2-12 2.5 XTC/C Front Panel Description .