Gas & Metal Compatibility Table Chemical Suggested Choosing a Mott High Purity Gas Filter: Gas Formula Filter Media Choosing the best metal filter is not always a simple Ammonia NH 3 SS/Ni matter, because in addition to easily identified variables Argon Ar SS/Ni Arsenic Pentafluoride AsF 5 SS/Ni (i.e., gas, pressure and flow), there are subjective Arsine AsH 3 SS/Ni(1) considerations. Some gases are compatible with more Boron Trichloride BCI 3 Ni/H than one type of metal which allows you a choice when Boron Trifluoride BF 3 Ni/H Carbon Dioxide CO 2 SS/Ni selecting the right filter for your application. Carbon Monoxide * CO SS * Carbon Tetrachloride CCl 4 SS/Ni The information contained in this table is a guideline for Carbon Tetraflouride CF 4 SS/Ni appropriate filter selection. Consultation with your gas Chlorine Cl 2 SS/Ni/H Diborane B2H6 SS/Ni(1) supplier is recommended to ensure Dichlorosilane SiH 2Cl 2 Ni/H gas compatibility. Because so many Diethyltelluride C4H10 Te SS/Ni Fluorine F2 Ni/H factors can affect the chemical Freon 13 CClF 3 SS/Ni resistance of a given product, you Freon 14 Tetrafluoromethane CF 4 SS/Ni should pretest under your own Freon 23 Trifluoromethane/Fluoro-form CHF 3 SS/Ni Freon 115 Chloropentafluoroethane C2ClF 5 SS/Ni operating conditions. Freon 116 Hexafluoroethane C2F6 SS/Ni As with any Germane GeH 4 SS/Ni Helium He SS/Ni chemical Hydrogen H2 SS/Ni application, Hydrogen Bromide HBr Ni/H Hydrogen Chloride HCl Ni/H safety precautions Hydrogen Fluoride HF Ni/H as noted on MSDS Hydrogen Selenide H2Se SS/Ni sheets should be Hydrogen Sulfide H2S SS/Ni Krypton Kr SS/Ni observed . Methane CH 4 SS/Ni Methyl Fluoride CH 3F SS/Ni Nitric Oxide NO SS/Ni Mott engineers are available to recommend which filter Nitrogen N2 SS/Ni best meets the criteria of your application. To expedite Nitrogen Trifluoride NF 3 SS/Ni/H Nitrous Oxide N2O SS/Ni that selection process, you should have the following Neon Ne SS/Ni information available: Oxygen O2 SS/Ni Ozone O3 H Perflouropropane C3F8 SS/Ni Phosphine PH 3 SS/Ni(1) Type of Gas: Phosphorus Trifluoride PF 3 Ni/H Phosphorous Pentachloride PCl 5 SS/Ni Gas Flow Rate: Phosphorous Pentaflouride PF 5 SS/Ni Silane SiH 4 SS/Ni Silicon Tetrachloride SiCl 4 Ni/H Inlet (or system) Pressure: PSIG Silicon Tetrafluoride SiF 4 Ni/H Stibine SbH 3 SS/Ni Maximum allowable P: PSID Sulfur Hexafluoride SF 6 SS/Ni ∆ Tetraethyl Orthosilicate TEOS SS/Ni Trichlorosilane SiHCl 3 Ni/H Inlet & Outlet Connections: Trimethyl Borane C3H9B SS/Ni Trimethyl Phosphate C3H9PO 4 SS/Ni Tungsten Hexafluoride WF 6 Ni/H Available Envelope/Footprint Dimensions (if known): Xenon Xe SS/Ni * NEVER use Nickel Filter Media with Carbon Monoxide Gas SS = 316L Stainless Steel Ni = Nickel Mott Corporation has High Purity Distributors worldwide. H = Hastelloy ® C-22 (1) -Compatible to 25 degrees C and concentrations to 1000 ppm Visit our website www.mottcorp.com and click on the Contact Us button to locate one in your area. 84 Spring Lane, Farmington, CT 06032-3159 | 860-747-6333 Fax 860-747-6739 www.mottcorp.com | email: [email protected] ISO 900 1:2008 CERTIFIED HP GasMetal 0315.