Watlow’s Adaptive Thermal Systems Watlow’s State-of-the-Art Solutions (ATS™) Technology Help Our Customers Improve Thermal Uniformity, Find out more about Watlow and how we can Connects All the Systems in a Tool For a Full-System View of Tuneability, Speed and Diagnostics provide thermal solutions for your company: All Processes From the Chamber to the Abatement System Phone: 1-800-WATLOW2 (1-800-928-5692) E-mail: [email protected] Watlow capabilities include: Website: www.watlow.com Design Verification and validation SEMICONDUCTOR • Finite element analysis (FEA) and • Infrared thermography computational fluid dynamics (CFD) • Acoustic microscopy • Rapid prototyping • Interferometry • Lean product development • Vacuum and plasma test chambers Manufacturing • Over 12,000 square feet of cleanrooms Powered by Possibility from Class 10k to 100 • Global manufacturing • Statistical process control ™ With Yarbrough, Watlow now services the entire semiconductor fabrication process, from the tool to the scrubber, to ensure Watlow Products and Technical Support Delivered Worldwide Thermal North American Technical Support Asian Technical Support & European Technical Support & thermal optimization of the complete system. & Sales Offices Sales Offices Sales Offices United States & Canada 1-800-WATLOW2 China +86 21 3532 8532 Austria +43 6244 20129 0 Solutions Watlow® provides semiconductor development teams (1-800-928-5692) India +91 40 6661 2700 France +33 1 41 32 79 70 Benefits of ATS include: with innovative thermal systems that give equipment Japan +81 3 3518 6630 Germany +49 7253 9400 0 manufacturers a competitive advantage. With the Korea +82 2 2169 2600 Italy +39 02 458 8841 • Reduce system complexity acquisition of Yarbrough Solutions Worldwide, Watlow Singapore +65 6773 9488 Spain +34 91 675 1292 For the Semiconductor • Improve thermal performance now services end-user customers as well, offering: Taiwan +886 7 288 5168 United Kingdom +44 115 964 0777 • Obtain real-time system data • Superior thermal system performance Latin American Technical Support Equipment Industry • Create high-zone configurations • Energy savings & Sales Office previously unavailable Mexico +52 442 256 2200 • Maintenance cost reductions Watlow® is a registered trademark of Watlow Electric Manufacturing Company. ATS™ is a trademark of Watlow Electric Manufacturing Company. ©2018 Watlow Electric Manufacturing Company SEMI-CAP-1218 (WP_500) Watlow’s Innovative Thermal Solutions Watlow’s Smart Technologies Enhance the Thermal Performance of Our Customer’s Connect the Entire Thermal System Ensuring System Simplification, Critical Tools and Processes to Improve Wafer Performance Optimization and Real-Time Diagnostics and Chip Throughput We offer: • Adaptive Thermal Systems (ATS™) • Engineering collaboration at your pace • Deep domain knowledge • Computational engineering • Rapid prototyping • Technology-leading products • High-performance solutions • Global support • Onsite commissioning Watlow’s Innovative Thermal Solutions Watlow’s Smart Technologies Enhance the Thermal Performance of Our Customer’s Connect the Entire Thermal System Ensuring System Simplification, Critical Tools and Processes to Improve Wafer Performance Optimization and Real-Time Diagnostics and Chip Throughput We offer: • Adaptive Thermal Systems (ATS™) • Engineering collaboration at your pace • Deep domain knowledge • Computational engineering • Rapid prototyping • Technology-leading products • High-performance solutions • Global support • Onsite commissioning Watlow’s Adaptive Thermal Systems Watlow’s State-of-the-Art Solutions (ATS™) Technology Help Our Customers Improve Thermal Uniformity, Find out more about Watlow and how we can Connects All the Systems in a Tool For a Full-System View of Tuneability, Speed and Diagnostics provide thermal solutions for your company: All Processes From the Chamber to the Abatement System Phone: 1-800-WATLOW2 (1-800-928-5692) E-mail: [email protected] Watlow capabilities include: Website: www.watlow.com Design Verification and validation SEMICONDUCTOR • Finite element analysis (FEA) and • Infrared thermography computational fluid dynamics (CFD) • Acoustic microscopy • Rapid prototyping • Interferometry • Lean product development • Vacuum and plasma test chambers Manufacturing • Over 12,000 square feet of cleanrooms Powered by Possibility from Class 10k to 100 • Global manufacturing • Statistical process control ™ With Yarbrough, Watlow now services the entire semiconductor fabrication process, from the tool to the scrubber, to ensure Watlow Products and Technical Support Delivered Worldwide Thermal North American Technical Support Asian Technical Support & European Technical Support & thermal optimization of the complete system. & Sales Offices Sales Offices Sales Offices United States & Canada 1-800-WATLOW2 China +86 21 3532 8532 Austria +43 6244 20129 0 Solutions Watlow® provides semiconductor development teams (1-800-928-5692) India +91 40 6661 2700 France +33 1 41 32 79 70 Benefits of ATS include: with innovative thermal systems that give equipment Japan +81 3 3518 6630 Germany +49 7253 9400 0 manufacturers a competitive advantage. With the Korea +82 2 2169 2600 Italy +39 02 458 8841 • Reduce system complexity acquisition of Yarbrough Solutions Worldwide, Watlow Singapore +65 6773 9488 Spain +34 91 675 1292 For the Semiconductor • Improve thermal performance now services end-user customers as well, offering: Taiwan +886 7 288 5168 United Kingdom +44 115 964 0777 • Obtain real-time system data • Superior thermal system performance Latin American Technical Support Equipment Industry • Create high-zone configurations • Energy savings & Sales Office previously unavailable Mexico +52 442 256 2200 • Maintenance cost reductions Watlow® is a registered trademark of Watlow Electric Manufacturing Company. ATS™ is a trademark of Watlow Electric Manufacturing Company. ©2018 Watlow Electric Manufacturing Company SEMI-CAP-1218 (WP_500) Watlow’s Adaptive Thermal Systems Watlow’s State-of-the-Art Solutions (ATS™) Technology Help Our Customers Improve Thermal Uniformity, Find out more about Watlow and how we can Connects All the Systems in a Tool For a Full-System View of Tuneability, Speed and Diagnostics provide thermal solutions for your company: All Processes From the Chamber to the Abatement System Phone: 1-800-WATLOW2 (1-800-928-5692) E-mail: [email protected] Watlow capabilities include: Website: www.watlow.com Design Verification and validation SEMICONDUCTOR • Finite element analysis (FEA) and • Infrared thermography computational fluid dynamics (CFD) • Acoustic microscopy • Rapid prototyping • Interferometry • Lean product development • Vacuum and plasma test chambers Manufacturing • Over 12,000 square feet of cleanrooms Powered by Possibility from Class 10k to 100 • Global manufacturing • Statistical process control ™ With Yarbrough, Watlow now services the entire semiconductor fabrication process, from the tool to the scrubber, to ensure Watlow Products and Technical Support Delivered Worldwide Thermal North American Technical Support Asian Technical Support & European Technical Support & thermal optimization of the complete system. & Sales Offices Sales Offices Sales Offices United States & Canada 1-800-WATLOW2 China +86 21 3532 8532 Austria +43 6244 20129 0 Solutions Watlow® provides semiconductor development teams (1-800-928-5692) India +91 40 6661 2700 France +33 1 41 32 79 70 Benefits of ATS include: with innovative thermal systems that give equipment Japan +81 3 3518 6630 Germany +49 7253 9400 0 manufacturers a competitive advantage. With the Korea +82 2 2169 2600 Italy +39 02 458 8841 • Reduce system complexity acquisition of Yarbrough Solutions Worldwide, Watlow Singapore +65 6773 9488 Spain +34 91 675 1292 For the Semiconductor • Improve thermal performance now services end-user customers as well, offering: Taiwan +886 7 288 5168 United Kingdom +44 115 964 0777 • Obtain real-time system data • Superior thermal system performance Latin American Technical Support Equipment Industry • Create high-zone configurations • Energy savings & Sales Office previously unavailable Mexico +52 442 256 2200 • Maintenance cost reductions Watlow® is a registered trademark of Watlow Electric Manufacturing Company. ATS™ is a trademark of Watlow Electric Manufacturing Company. ©2018 Watlow Electric Manufacturing Company SEMI-CAP-1218 (WP_500) Watlow’s Adaptive Thermal Systems Watlow’s State-of-the-Art Solutions (ATS™) Technology Help Our Customers Improve Thermal Uniformity, Find out more about Watlow and how we can Connects All the Systems in a Tool For a Full-System View of Tuneability, Speed and Diagnostics provide thermal solutions for your company: All Processes From the Chamber to the Abatement System Phone: 1-800-WATLOW2 (1-800-928-5692) Email: [email protected] Watlow capabilities include: Website: www.watlow.com Design Verification and validation SEMICONDUCTOR • Finite element analysis (FEA) and • Infrared thermography computational fluid dynamics (CFD) • Acoustic microscopy • Rapid prototyping • Interferometry • Lean product development • Vacuum and plasma test chambers Manufacturing • Over 12,000 square feet of cleanrooms Powered by Possibility from Class 10k to 100 • Global manufacturing • Statistical process control ™ With Yarbrough, Watlow now services the entire semiconductor fabrication process, from the tool to the scrubber, to ensure Watlow Products and Technical Support Delivered Worldwide Thermal North American Technical Support Asian Technical