MKS Series 937B High Vacuum Multi-Sensor System Operation and Maintenance Manual Part #: 100016467 RevD Table of Contents Package Contents .................................................................................................................................. 7 1 Safety Information ..................................................................................................................... 8 1.1 Symbols Used in this Manual and their definitions ......................................................... 8 1.2 Safety Precautions .......................................................................................................... 8 1.2.1 Safety Procedures and Precautions ............................................................................ 8 2 Specifications .......................................................................................................................... 10 2.1 Controller ....................................................................................................................... 10 2.2 Sensors ......................................................................................................................... 12 2.3 Controller Display .......................................................................................................... 16 2.3.1 Display message ........................................................................................................ 16 2.3.2 Display resolutions ..................................................................................................... 17 2.3.3 Serial communication response format...................................................................... 18 3 Feature, Control Locations and Dimensions ........................................................................... 19 4 Typical Applications for the Series 937B Controller ................................................................ 21 5 HPS Products Series 937B Multi-Sensor High Vacuum System .......................................... 22 6 Operating the Series 937B Controller ..................................................................................... 24 6.1 Power ............................................................................................................................ 24 6.2 Front Panel Control Lock............................................................................................... 24 6.3 Front Panel Display ....................................................................................................... 24 6.3.1 Standard front panel display ...................................................................................... 24 6.3.2 Large font displays ..................................................................................................... 25 6.4 System Setup ................................................................................................................ 26 6.4.1 Overview of 937B System setup ................................................................................ 26 6.4.2 Display system setup parameters .............................................................................. 27 6.4.3 Change and save a parameter value ......................................................................... 27 6.4.4 Description of the system setup parameters ............................................................. 28 6.5 Channel Setup for Pressure Measurement ................................................................... 33 6.5.1 Overview of 937B Channel setup .............................................................................. 33 6.5.2 Setup for a Capacitance Manometer ......................................................................... 35 6.5.3 Setup for a PR (Pirani)/CP (convection Pirani) sensor .............................................. 37 6.5.4 Setup a Cold Cathode Sensor ................................................................................... 40 6.5.5 Setup a Hot Cathode Sensor ..................................................................................... 43 6.6 Power Control of a Pressure Sensor ............................................................................. 46 6.6.1 Power (including degas) control of a sensor using front panel control button ........... 46 6.6.2 Power (including degas) control of a sensor via 37 pin AIO Dsub connector ........... 47 6.6.3 Power (including degas) control of a sensor using Serial communication commands.48 6.7 Leak Test Using the 937B Controller ............................................................................ 49 6.7.1 Leak test principle applied for the 937B ..................................................................... 49 6.7.2 Procedures for a leak test with the 937B ................................................................... 49 7 Installing Vacuum Sensors ..................................................................................................... 51 7.1 Installing cold cathode sensors ..................................................................................... 51 7.1.1 Locating a Cold Cathode Sensor ............................................................................... 51 7.1.2 Orienting a Cold Cathode Sensor .............................................................................. 51 MKS 937B Operation Manual 2 7.1.3 Managing Contamination in a Cold Cathode Sensor ................................................. 51 7.1.4 Connecting the Series 421/422 Sensor ..................................................................... 51 7.1.5 Connecting the 423 I-MAG Sensor ............................................................................ 52 7.2 Installing hot cathode sensors ....................................................................................... 52 7.2.1 Locating a Hot Cathode Sensor ................................................................................. 52 7.2.2 Preventing Contamination in a Hot Cathode Sensor ................................................. 52 7.2.3 Orienting a hot cathode sensor .................................................................................. 52 7.2.4 Connecting a Hot Cathode Sensor to the vacuum system ........................................ 52 7.2.5 Connecting a Hot Cathode Sensor to the 937B Controller ........................................ 53 7.3 Installing Pirani Sensors ................................................................................................ 55 7.3.1 Locating a Pirani Sensor ............................................................................................ 55 7.3.2 Preventing Contamination in a Pirani Sensor ............................................................ 55 7.3.3 Orienting the Series 317 Pirani Sensor...................................................................... 55 7.3.4 Orienting the Series 345 Pirani Sensor...................................................................... 55 7.3.5 Connecting the Series 317/345 Sensors ................................................................... 55 7.3.6 Preparing the 317 Sensor for Bakeout....................................................................... 57 7.4 Capacitance Manometers - MKS Baratron ................................................................... 57 7.4.1 Installing a Baratron Capacitance Manometer ........................................................... 57 7.4.2 Connecting a Baratron™ Capacitance Manometer ................................................... 57 8 Connecting Relay and Analog Outputs ................................................................................... 59 8.1 Connecting 937B relay outputs ..................................................................................... 59 8.1.1 Pin out for the 937B relay output ............................................................................... 59 8.1.2 Proper setting of a relay ............................................................................................. 60 8.1.3 Relay Inductive Loads and Arc Suppression ............................................................. 61 8.2 Connecting the 937B Analog Output ............................................................................. 61 8.3 Buffered analog output .................................................................................................. 62 8.4 Logarithmic/Linear and combination analog output ...................................................... 72 8.4.1 Logarithmic/Linear analog output ............................................................................... 73 8.4.2 Combination analog output ........................................................................................ 73 8.4.3 Logarithmic/Linear analog output when the gauge power is turned off ..................... 75 9 937B RS232/485 Serial Communication Commands ............................................................. 76 9.1 Communication protocols .............................................................................................. 76 9.2 Pressure reading commands ........................................................................................ 77 9.3 Relay and control setting commands ............................................................................ 78 9.4 Capacitance manometer control commands ................................................................ 79 9.5 Pirani and convection Pirani control commands ..........................................................