Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH) as amended Material Name: Antimony pentafluoride SDS ID: 0595 (EU) SECTION 1: Identification of the substance/mixture and of the company/undertaking 1.1 Product identifier Material Name Antimony pentafluoride Substance name: Antimony pentafluoride CAS Number: 7783-70-2 EC Number: 232-021-8 Registration status This product and its components are not subject to registration under REACH. 1.2 Relevant identified uses of the substance or mixture and uses advised against Identified uses semiconductor manufacture Uses advised against None known. 1.3 Details of the supplier of the safety data sheet Entegris GmbH Hugo-Junkers-Ring 5, Gebäude 107/W, 01109 Dresden, Germany Telephone Number: +49 (0) 351 795 97 0 Fax Number: +49 (0) 351 795 97 499 Only Representative Tetra Tech International, Inc. Fuchsstrasse 1, 67688 Rodenbach, Germany [email protected] Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America) E-mail: [email protected] 1.4 Emergency telephone number +1-703-527-3887 (24 hours) - CHEMTREC – International SECTION 2: Hazards identification 2.1 Classification of the substance or mixture Classification according to Regulation (EC) No 1272/2008 [CLP] Corrosive to Metals - Category 1 Acute Toxicity - Oral - Category 4 Acute Toxicity - Inhalation - Vapor - Category 1 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 ____________________________________________________________ Page 1 of 13 Issue date: 2019-01-03 Revision 1.0 Print date: 2019-01-03 Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH) as amended Material Name: Antimony pentafluoride SDS ID: 0595 (EU) Carcinogenicity - Category 2 Specific Target Organ Toxicity - Single Exposure - Category 1 ( respiratory system , cardiovascular system , liver , kidneys ) Hazardous to the Aquatic Environment - Chronic - Category 2 2.2 Label elements Labeling according to Regulation (EC) No. 1272/2008 [CLP] Hazard symbols Signal word Danger Hazard statements H290 May be corrosive to metals. H330 Fatal if inhaled. H302 Harmful if swallowed. H314 Causes severe skin burns and eye damage. H351 Suspected of causing cancer. H370 Causes damage to organs. (respiratory system , cardiovascular system , liver , kidneys ) H411 Toxic to aquatic life with long lasting effects. Precautionary statements Prevention P234 Keep only in original packaging. P260 Do not breathe vapor or mist. P264 Wash thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P284 Wear respiratory protection. P270 Do not eat, drink or smoke when using this product. P271 Use only outdoors or in a well-ventilated area. P201 Obtain special instructions before use. P202 Do not handle until all safety precautions have been read and understood. P273 Avoid release to the environment. Response P390 Absorb spillage to prevent material damage. P308+P311 If exposed or concerned: Call a POISON CENTER or doctor/physician. P310 Immediately call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P320 Specific treatment is urgent (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. P391 Collect spillage. Storage P403+P233 Store in a well-ventilated place. Keep container tightly closed. P405 Store locked up. P406 Store in corrosive resistant container with a resistant inner liner. ____________________________________________________________ Page 2 of 13 Issue date: 2019-01-03 Revision 1.0 Print date: 2019-01-03 Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH) as amended Material Name: Antimony pentafluoride SDS ID: 0595 (EU) Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations. 2.3 Other hazards Contact with water or moist air may form hydrogen fluoride. SECTION 3: Composition / information on ingredients 3.1 SUBSTANCES CAS Component Name 1272/2008 (CLP) Percent EC No Synonyms Registration No Note(s): A, 1 Self-Classified: Met. Corr. 1 - H290 Acute Tox. (Oral) 4 - H302 7783-70-2 Acute Tox. (Vapour) 1 - H330 232-021-8 Antimony pentafluoride 100 Skin Corr. 1 - H314 -- Eye Dam. 1 - H318 Carc. 2 - H351 STOT SE 1 - H370 Aquatic Chronic 2 - H411 Full text of H- and EUH-statements: see section 16. SECTION 4: First aid measures 4.1 Description of first aid measures Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing before reuse. Destroy contaminated shoes. Eyes Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion If swallowed, do NOT induce vomiting. Rinse mouth. Get immediate medical attention. 4.2 Most Important Symptoms/Effects Acute Fatal if inhaled, Harmful if swallowed, respiratory tract burns, skin burns, eye burns, mucous membrane burns, respiratory system damage, cardiovascular system damage, liver damage, kidney damage Delayed cancer 4.3 Indication of Immediate Medical Attention and Special Treatment For inhalation, consider oxygen. Avoid gastric lavage or emesis. ____________________________________________________________ Page 3 of 13 Issue date: 2019-01-03 Revision 1.0 Print date: 2019-01-03 Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH) as amended Material Name: Antimony pentafluoride SDS ID: 0595 (EU) SECTION 5: Firefighting measures 5.1 Extinguishing media Suitable extinguishing media carbon dioxide, dry chemical, dry sand, alcohol-resistant foam. Large fires: water spray or fog, alcohol- resistant foam. Unsuitable Extinguishing Media high-pressure water streams 5.2 Special hazards arising from the substance or mixture Negligible fire hazard. May ignite or explode on contact with combustible materials. Combustion Material is non-flammable, however, it may increase fire severity upon contact with combustible materials; oxides of antimony, hydrogen fluoride 5.3 Advice for firefighters Negligible fire hazard. May ignite or explode on contact with combustible materials. Fire Fighting Measures Move container from fire area if it can be done without risk. Do not scatter spilled material with high- pressure water streams. Fight fire from maximum distance or use unmanned hose holders or monitor nozzles. Do not get water inside container. Cool containers with water spray until well after the fire is out. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. ALWAYS stay away from tanks engulfed in fire. Avoid inhalation of material or combustion by-products. Dike for later disposal. Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. SECTION 6: Accidental release measures 6.1 Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. 6.2 Environmental precautions Avoid release to the environment. Collect spillage. 6.3 Methods and Materials for Containment and Cleaning Up Eliminate all ignition sources if safe to do so. All equipment used when handling the product must be grounded. Stop leak if possible without personal risk. Do not touch spilled material. A vapor suppressing foam may be used to reduce vapors. Prevent entry into waterways, sewers, basements, or confined areas. Do not get water inside container. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. Absorb spill with sand or other non-combustible material. Collect spilled material in appropriate container for disposal. Keep unnecessary people away, isolate hazard area and deny entry. 6.4 Reference to other sections Safe handling: see section 7. Personal protection equipment (PPE): see section 8. Disposal: see section 13. SECTION 7: Handling and storage 7.1 Precautions for safe handling Keep only in original container. Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Wear respiratory protection. Use only outdoors or in a well-ventilated area. Do not eat, drink or smoke when using this product. Obtain special instructions before use. Do not handle until all safety precautions have been read and understood. 7.2 Conditions for safe storage, including any incompatibilities ____________________________________________________________ Page 4 of 13 Issue date: 2019-01-03 Revision 1.0 Print date: 2019-01-03 Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH) as amended Material Name: Antimony