One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Table of Content

PROGRAM AT A GLANCE 2

WELCOME MESSAGE 5

ACKNOWLEDGEMENT OF FINANCIAL AND TECHNICAL SPONSORS 6

CONFERENCE ORGANIZERS 8

TECHNICAL PROGRAM COMMITTEE MEMBERS 9

CONFERENCE INFORMATION 12

MEETING VENUE 13

SOCIAL PROGRAM OVERVIEW 17

TECHNICAL PROGRAM OVERVIEW 18

GENERAL CONFERENCE INFORMATION 22

GENERAL TOURIST INFORMATION 24

AIRPORT INFORMATION 27

TECHNICAL PROGRAM INFORMATION 29

AUTHOR INDEX 223

ADVERTISEMENT 246

INDUSTRIAL SPONSOR GUIDE 247

IEEE NANO 2008 CALL FOR PAPER 249

1 IEEE-NANO 2007 Technical Digest IEEE-NANO 2007 Final Program Hong Kong Convention and Exhibition Centre, Wanchai, Hong Kong SAR

Meeting Venues Date Time 6/ F Foyer Meeting Room 601 Meeting Room 603 Meeting Room 604 Meeting Room 605 Meeting Room 606 Meeting Room 607 Meeting Room 608 1500-1900

Conference Reception Registration (Free to all paid conference 1730-1830 registered attendees)

1900-2130 Conference Comittees Dinner (China Club, The Old Bank of China Bldg, Central; Bus leaves the Harborview Renaissance Hotel at 1 8:45; BY INVITATION ONLY)

Meeting Venues Date Time 6/ F Foyer Meeting Room 601 Meeting Room 603 Meeting Room 604 Meeting Room 605 Meeting Room 606 Meeting Room 607 Meeting Room 608

0830-0900 Opening Ceremony

1A1 Plenary Lectures 0900-1030 Dr. CM Ho, UCLA Dr. M. Analoui, Pfizer 1030-1050 Tea Break 1A2 1B2 1C2 1D2 1E2 1F2 1G2 Invited Session: MEMS: Modelling, Biosensing Using Best Paper Award Modeling and Simulation AFM Based Nano Robotic Special Keynote Lectures Measurement, and Novel Nano-Materials Eabling Nano- Presentations (II) Manipulations Analysis Biotechnology Dr. YC Tai, CalTech Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: Dr. C. Hierold, ETHZ 117 41 229 181 58 23 Dr. Li-Jun Wan, IC, CAS 122 157 326 196 191 24 1050-1220 197 407 421 462 213 318 222 431 427 464 335 409 278 449 468 393 445 475 Session Chairs: Session Chairs: Session Chairs: Session Chairs: Session Chairs: Session Chairs: Gwo-bin Lee James K. Mills Fumihito Arai Hui Meng Cheng Muhammad Alam Guangyong Li Fangang Tseng Yu Sun Kwong-Chun Lo Chunhong Chen Hideki Hashimoto 1220-1330 Lunch Break (No Conference Lunch will be provided) 1A3 1C3 1D3 1E3 1F3 1G3

Invited Session: Nano- Best Student Paper Invited Session: MEMS and NEMS Carbon Nanotubes I Applications of Nano Robots Biomedicine Award Presentations Spintronics

Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: 3 Aug (Fri) Registration Exhibitions 134 32 80 42 151 162 137 99 178 43 314 238 1330-1530 306 107 317 61 109 325 327 171 337 66 133 343 458 182 374 68 190 366 115 294 97 246 382 428 429 235 248 452 476 352 Session Chairs: Session Chairs: Session Chairs: Session Chairs: Session Chairs: Session Chairs: Chih-Ming Ho Joseph Talgader Fumihito Arai Yehia Massoud S. Bandyopadhyay Yunhui Liu Ida Lee William P. King Ti Kaneko Johan Akerman Masahiro Nakajima 1530-1550 Tea Break 1A4 1B4 1C4 1D4 1E4 1F4 1G4 Characterization of Invited Session: Invited Session: Nano-Materials Nano-Medicine Nano Bio Sensors Electrical properties for Carbon Nanotubes II Spintronics and Nano- Nano Robotic Manipulation Nano-Materials Magneties Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: 37 28 240 150 108 73 10 425 69 307 159 124 241 11 430 78 358 199 149 323 65 1550-1750 51 164 453 211 173 324 135 226 198 457 233 273 355 261 232 206 256 321 371 353 280 329 391 383 402 330 472 432 Session Chairs : Session Chairs : Session Chairs : Session Chairs: Session Chairs: Session Chairs: Session Chairs: Yonhua Tzeng Vijay K. Varadan Steve Tung Cary Yang Matt Gordon Stephen M. Goodnic k Yu Sun Chi-Kuan Su n Sylvain Marte l Albert Pisan o M. Saif Islam J. C. Woo Massood Tabib-Aza r Yangmin Li IEEE NANO 2007 Technical Dige s t 2 IEEE-NANO 2007 Final Program Hong Kong Convention and Exhibition Centre, Wanchai, Hong Kong SAR

Meeting Venues Date Time 6/ F Foyer Meeting Room 601 Meeting Room 603 Meeting Room 604 Meeting Room 605 Meeting Room 606 Meeting Room 607 Meeting Room 608 0800-0830 2A1 Plenary Lectures 0830-1000 Dr. P. Bhattacharya, Univ. Michigan Dr. Y. Saito, Nagoya Univ. 1000-1030 Tea Break 2A2 2B2 2D2 2E2 2F2 2G2 Invited Session: Nano- Novel Nano-Fabrication Nanowires and Special Keynote Lectures Special Keynote Lectures Photonics, Nano-Optics Nano Robotics and Assembly Technology I Nanotubes and Opto-Electronics Dr. C. Jagadish, ANU Dr. CF Lin, NTU Paper IDs: Paper IDs: Paper IDs: Paper IDs: Dr. HM Cheng, IMR, CAS Dr. WC Tang, UCI 8 29 403 12 Dr. G. Chen, MIT Dr. Cary Y. Yang, SCU, USA 185 38 456 91 209 230 250 439 1030-1200 269 231 282 441 357 288 338 444 375 469

Session Chairs: Session Chairs: Session Chairs: Session Chairs: Gwo-Bin Lee S. J. Lee Diana Huffaker Sinan Haliyo Lyguat Lee Chennupati Jogadish Sanjay Krishna Amrinder Nain 1200-1300 Lunch Break (No Conference Lunch will be provided) 2A3 2B3 2C3 2D3 2E3 2F3 2G3 Nano System Invited Session: Invited Session: Modeling and Nanotubes and Nano- Nano-Photonics and Molecular Electronics: Modelling Nano-Biotechnology Architecture and Advanced Nano- Simulation Particles Nano-Optoelectronics and Simulation I Reliability Fabrication I 4 Aug (Sat) Registration Exhibitions Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: 389 20 56 419 67 31 70 423 129 59 454 120 220 146 110 142 131 92 165 223 152 1300-1500 200 172 136 114 176 243 316 202 174 247 322 239 265 354 203 180 277 388 390 309 437 219 212 392 339 217 Session Chairs: Session Chairs: Session Chairs: Session Chairs: Session Chairs: Session Chairs: Session Chairs: H. Tsuchiya Ari Requicha Detlev Grützmacher Stella Pang Pinaki Mazumder Ching-Fuh Lin Tse-Chuan Chou M.A. Alan Sun In Hong G. Ramanath Stepha Chou Sophie Tan Stefan Dimov Yehia Massoud 1500-1530 Tea Break 2A4 2B4 2C4 2D4 2E4 2F4 2G4

Invited Session: Nano Robots, Commercialization Nano-manufacturing and Advanced Nano- Nanowires and Nano-Optics and Nano- Molecular Electronics: Modelling Nanomanipulation, and Workshop Reliability Fabrication II Applications Photonics and Simulation Ⅱ Nanomanufacturing Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: 139 27 63 39 85 18 300 35 75 44 175 19 304 47 113 166 227 161 1530-1730 305 138 128 249 255 242 395 332 204 254 361 264 440 356 267 459 415 367 368 478 381 387 Session Chairs: Session Chairs: Session Chairs: Session Chairs: Session Chairs: Session Chairs: Metin Sitti Yonhua Tzeng Kevin J. Chen S.-H. Park Sanjay Krishna Yuichi Ochiai Sergej Fatikow Garrett S. Rose Toshinari Isono Shuo-Hung Chang Gong-Ron Liu Alessandro Pecchia

1830-2100 Conference Banquet (HKCEC Room 201; MUST be a paid registered attendee or have a Banquet Ticket to attend this event) - IEEE NANO 2007 Technical Dige s t 3 IEEE-NANO 2007 Final Program Hong Kong Convention and Exhibition Centre, Wanchai, Hong Kong SAR

Meeting Venues Date Time 6/ F Foyer Meeting Room 601 Meeting Room 603 Meeting Room 604 Meeting Room 605 Meeting Room 606 Meeting Room 607 Meeting Room 608 0800-0830 3A1 Plenary Lectures 0830-1000 Dr Robert S. Chau, Intel Corp. Dr. M. Reed, Yale University 1000-1030 Tea Break 3A2 3B2 3D2 3E2 3F2 3G2 Novel Nano-Fabrication Nano-Particles and Nano Energy Conversion and Special Keynote Lectures Special Keynote Lectures Nano-Photonics Technology II Applications Generation Dr. DT Wong, UCLA Dr. GB Lee, NCKU Paper IDs: Paper IDs: Paper IDs: Paper IDs: Dr. FG Tseng, NTHU Ms. BM Rolfe, MITRE Corp. 84 62 25 26 Dr. D. Grützmacher Dr. CW Zhou, USC 193 98 83 189 RWTHAU 252 167 144 192 1030-1200 281 275 263 201 360 410 422 225 376 446 400

Session Chairs: Session Chairs: Session Chairs: Session Chairs: Michelle Simmon S. Sabar D. Hutagalung Gong-Ru Lin Peng Xiao C. H. Chao Max Chung Roderick Melnik Won-Youl Choi 1200-1300 Lunch Break (No Conference Lunch will be provided) 3A3 3B3 3C3 3D3 3E3 3F3 3G3 Nano-Materials Analysis and Design of Invited Session: Nano-metrology Nano Thermal/Gas Nano-Materials and Nano-Biotechnology III Fabrication and Quantum and Molecular Nano/Molecular DevicesⅠ and Characterization Sensors Applications Characterization System Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: 40 103 111 36 9 6 57 5 Aug (Sun) Registration Exhibitions 187 118 188 102 177 13 208 396 215 236 342 195 100 218 1300-1500 401 221 257 373 216 147 271 479 377 284 477 262 153 351 292 380 365 315 194 370 474 369 406 260 386 420 473

Session Chairs: Session Chairs: Session Chairs: Session Chairs: Session Chairs: Session Chairs: Session Chairs: Shuo Hung Chang Guangyong Li M. Cahay Saif Islam Yu Sun Sy-Yen Kuo David Wong Kensei Ehara Masahiro Nakajima Zaili Dong C. T. Pan Anuvat Sirivat Colin Lambert Ning Xi 1500-1530 Tea Break 3A4 3B4 3C4 3D4 3E4 3F4 3G4

Invited Session: Nano Self and Field Assisted Invited Session: Nano- Thin Films of Nano- Molecular and Quantum Nano-fluidics Nano/Molecular Devices II Electronics and Biosensors Assembly Materials Applications Materials Computing

Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: Paper IDs: 169 16 81 71 14 86 30 424 34 105 46 21 183 207 1530-1730 455 132 123 251 52 214 224 426 228 154 259 54 279 245 463 258 320 460 447 268 404 311 379

Session Chairs: Session Chairs: Session Chairs: Session Chairs: Session Chairs: Session Chairs: Session Chairs: Chongwu Zhou Stella Pang Kevin J. Chen Yi-Kuen Lee Haixia Zhang Mircea R. Stan Lixin Dong Alessandro Pecchia Toshio Fukuda Fumihito Arai K. W. Wong Cary Yang R.K. Mittal M. Saif Islam

1745-1900 Farewell Party ( HKCEC 6/F Foyer; free to all paid registered conference attendees)

* Green Paper IDs denote Invited Session Speaker Papers. IEEE NANO 2007 Technical Dige s t 4

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Welcome Message

Dear Authors and Attendees,

Welcome to The 7th IEEE International Conference on Nanotechnology (IEEE-NANO 2007) in this exciting city of Hong Kong - Asia's World City. IEEE-NANO is the flagship conference of the IEEE Nanotechnology Council and this is the first time it is held in China. This conference features many invited speakers who are world leaders in Nano and Molecular technologies, and will also consist of workshop/tutorial, and oral presentations of advanced scientific and engineering results from worldwide researchers. More than 475 papers were submitted this year, which is a record for the IEEE-NANO conference series. We have planned an exciting technical program over 3 days with 20 Plenary / Keynote Speakers, and a total of 340 technical papers, including invited session papers. These technical papers represent research results from over 25 countries/regions globally. We hope you will enjoy the high-quality technical program that we have prepared for you during the conference. During your visit to Hong Kong, you will find some time before or after the conference to explore this dynamic city that is endowed with more than 10,000 Chinese and western restaurants, or to venture into some of the finest shopping malls in the world. We also encourage you to visit the Hong Kong Disneyland - the newest addition in the world to the Disney theme parks, and the Hong Kong Ocean Park - one of the world's biggest and most acclaimed educational theme parks. If you can afford more time, you can visit Macau - Las Vegas of the Orient, (or as some put it, in 5 years, Las Vegas will become the "Macau of the West"), which is only ~50min ride on a hydrofoil from Hong Kong, or fly from Hong Kong to visit other metropolitan and cultural Chinese cities such as Shanghai (~2 hours), Beijing (~3 hours), or Xi'an (~2 hours). Again, it is our great pleasure to have your presence at the IEEE-NANO 2007, the premier conference of the IEEE Nanotechnology Council. We hope you will participate in the great technical programs and cultural events that we have prepared for you during the conference! See you in HK!

Wen J. LI, Bradley J. Nelson, General Chair, IEEE-NANO 2007 Program Chair, IEEE-NANO 2007 The Chinese University of Hong Kong Swiss Federal Institute of Technology, Zurich (ETHZ)

5 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Acknowledgement of Financial and Technical Sponsors

IEEE-NANO 2007 is grateful for the financial and/or technical support of the following organizations:

Organizers/ Technical Sponsors

Institute of Electrical and Electronics Engineers, Inc. (IEEE) IEEE Nanotechnology Council (IEEE NTC) IEEE Electron Devices Society (IEEE EDS)

Centre for Micro and Nano Systems, The Chinese University of Hong Kong (CMNS, CUHK) Institute of Robotics and Intelligent Systems, ETH Zurich

6 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Institutional Sponsors (In alphabetical order)

Global Emerging Technology Institute, Japan/ USA (GETI) KC Wong Education Foundation, Hong Kong US Army International Technology Center – Pacific, Japan Industrial Sponsors (In alphabetical order) ACS Publication Intel Corporation Taylor & Francis Asia Pacific

Exhibitors (In alphabetical order)

Atomistix Asia Pacific Pte Ltd Raith Asia Ltd

7 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Conference Organizers Steering Committee Chair: T. J. Tarn, Washington University

Members: Toshio Fukuda, Nagoya University Meyya Meyyappan, NASA Ames Evelyn Hirt, Pacific Northwest National Laboratory

General Chair: Local Arrangements Co-Chair: Wen J. Li, Max Meng, The Chinese University of Hong Kong The Chinese University of Hong Kong

General Co-Chair: Awards Committee Chair: Ning Xi, Fumihito Arai, Michigan State University Tohoku University

Program Chair: Commercialization Chair: Brad J. Nelson, Louis J. Ross, Swiss Federal Institute of Technology, ETH, Zurich Global Emerging Technology Institute

Invited Sessions Chair: Workshops / Tutorials Chair: Yonhua Tzeng, Maggie Y. Chen, National Cheng Kung University Omega Optics

Local Arrangements Chair: Workshops / Tutorials Co-Chair: Yunhui Liu, Xuliang Han, The Chinese University of Hong Kong Brewer Science

IEEE-NANO 2007 Technical Digest 8

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Technical Program Committee Members

Ahn Chong ECECS Dept., University of Cincinnati USA Akkipeddi Ramam IMRE Singapore Arai Fumihito Nagoya University Japan Ayyub Pushan Tata Institute of Fundamental Research India Bell Dominik IRIS, ETH Zurich Switzerland Bellouard Yves Eindhoven University of Technology Netherlands Bergaud Christian LAAS CNRS France Bernstein Gary University of Notre Dame USA Bimberg Dieter Technical Unversity of Berlin Germany Boggild Peter Technical University of Denmark Denmark Chang Shuo Hung National Taiwan University Taiwan Chen Jia IBM Research USA Chennupati Jagadish Australian National Unviersity Australia Cho Kilwon Pohang Univ. of Science and Technology Korea Choi Hee Cheul Pohang Univ. of Science and Technology Korea Chung Andy Pohang Univ. of Science and Technology Korea Coleman James University of Illinois at Urbana-Champaign USA Dodabalpur Ananth University of Texas at Austin USA Dong Lixin IRIS, ETH Zurich Switzerland Elata David Technion - Israel Institute of Echnology Israel Enikov Eniko The University of Arizona USA Ferreira Antoine Ecole Nationale Supérieure de Bourges France Ferry David Arizona State University USA Frank David J. IBM Research Center, New York USA Fuhrer Michael S. University of Maryland, College Park USA Gal Michael University of New South Wales Australia Grützmacher Detlev Forschungszentrum Jülich Germany Haliyo Sinan ISIR France Hinds Bruce Unviersity of Lexington USA Hla Saw-Hai Ohio University USA Ho Dean Northwestern University USA

IEEE-NANO 2007 Technical Digest 9

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Huelsen Helge Unviersity of Oldenburg Germany Hwang Gilgueng IRIS, ETH Zurich / Unversity of Tokyo Japan Jo William Ewha Womans University Korea Julien Francois Unviersity of Paris-Sud France Jun Young-wook Yonsei University Korea Kallio Pasi Tampere University of Technology Finland Karna Shashi US Army Research Laboratory USA Kratochvil Bradley IRIS, ETH Zurich Switzerland Krishna Sanjay New Mexico USA Lambert Pierre UL Bruxelles Belgium Leburton Jean-Pierre UIUC Urbana-Champaign USA Lee Gwo-Bin National Cheng Kung University Taiwan Lee Jaejin Ajou University Korea Lee Yi-Kuen HKUST USA Lin Ching-Fuh National Taiwan University Taiwan Lin Feng-Huei Inst. Biomed. Eng., National Taiwan Univ. Taiwan Litvinov Dmitri University of Houston USA Liu Chang University of Illinois at Urbana-Champaign USA Liu Feng The University of Utah USA Lockwood David National Research Council, Ottawa Canada Lu Yunfeng Tulane Unviersity USA Lugli Paolo Technical Unviersity of Munich Germany Mazumder Pinaki University of Michigan USA Meyyappan Meyya NASA Ames Research Center USA Nayak Saroj Rensselaer Polytechnique Institute USA O'Brien John University of Southern California USA Ohno Hideo Tohoku University Japan Park Seong-Ju Gwangju Institute of Science and Technology Korea Pau Stanley University of Arizona USA Pettersson Hakan Halmstad University Sweden Pidaparti Ramana Virginia Commonwealth University USA Privman Vladimir Clarkson University USA Ramanath Ganapathiraman Rensselaer Polytechnique Institute USA

IEEE-NANO 2007 Technical Digest 10

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Requicha Ari University of Southern California USA Rogers John University of Illinois at Urbana-Champaign USA Shou Kaiyu IRIS, ETH Zurich Switzerland Sitti Metin Carnegie Mellon University USA Song Aimin University of Manchester UK Subramanian Arunkumar IRIS, ETH Zurich Switzerland Sun Yu University of Toronto, Canada Tan H. Hoe The Australian National University Australia Tepper Gary Virginia Commonwealth University USA Terry Fred University of Michigan USA Tormen Maurizio CSEM Switzerland Tseng Kevin F. G. National Tsinghua University Taiwan Turner James Wadsworth Center New York USA Tzung K. Hsiai USC USA Urey Hakan Koc University Turkey Wada Osamu Kobe University Japan Wang Kang UCLA USA Wang Tza-Huei (Jeff) Johns Hopkins University USA Wong H.-S. Philip Stanford University USA Wong Pak Kin Unviersity of Arizona USA Woo Jong-Chun Seoul National University Korea Woolard Dwight Army Research Office USA Xu Didi IRIS, ETH Zurich Switzerland Xu Jianan Harbin University China Yeh Chen-Sheng National Cheng Kung University Taiwan Yeow John University of Waterloo Canada Yi Gyu-Chul Pohang Univ. of Science and Technology Korea Yoon Euijoon Seoul National University Korea Zhang Li IRIS, ETH Zurich Switzerland Zhang Xin Boston University USA

IEEE-NANO 2007 Technical Digest 11

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Conference Information

Meeting Venue

Hong Kong Convention and Exhibition Centre 香港會議展覽中心 (HKCEC)

1 Expo Drive, Wanchai, Hong Kong 香港灣仔博覽道一號 Tel: +852 2582 8888 電話: +852 2582 8888 Fax : +852 2802 7284 傳真: +852 2802 7284

The conference technical program will be held on the Level 6 of the building.

Participants are advised to access the Convention Centre via the Harbor Road Entrances (港灣道入口).

The Conference Banquet will be held on the Level 2 of the building.

IEEE-NANO 2007 Technical Digest 13

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Conference Functions

Technical Program Date Time Venue Registration 2 Aug, 2007 15:00-19:00 Room 601 Foyer, HKCEC 3-5 Aug 2007 08:30 -17:30 Opening Ceremony 3 Aug 2007 08:30-09:00 Room 601 , HKCEC Technical Sessions 3 Aug 2007 08:30-17:50 Room 601, 603-608, HKCEC 4-5 Aug 2007 08:30-17:30 Tea Breaks 3 Aug 2007 10:30-10:50 15:30-1550 Room 601 Foyer, HKCEC 4-5 Aug 2007 10:00-10:30 15:00-1530 Exhibitions 3-5 Aug 2007 08:00-17:30 Room 601 Foyer, HKCEC

Social Program Date Time Venue

Welcome Reception 2 Aug, 2007 17:30-18:30 Room 601, HKCEC Conference Committees Dinner 2 Aug, 2007 19:00-21:30 China Club (By Invitation Only) 13-15/F, The Old Bank of China Building, Bank Street, Central Conference Banquet 4 Aug 2007 18:00-21:00 Room 201, HKCEC

Farewell Party 5 Aug 2007 17:45-19:00 Room 601 Foyer, HKCEC

IEEE-NANO 2007 Technical Digest 14 One Advanced Technology One Global Conference

H Conference Hotel H Other Hotel Major Building

Taxi Stand

H1 Bus Stop

MTR Station

Pedestrain Bridge Ferry Pier Entrance of Hong Kong Convention and Exhibition Centre

H H

H

H H H C A1 H H H

B1 A4 H

A5

IEEE-NANO 2007 Technical Digest 15 One Advanced Technology One Global Conference

GRAND HALL 3 FOYER GRAND HALL HALL 7 DINE MEETING ROOMS 601-608 HALL 2 ATRIUM 2 HALL 5 DINE MAIN HALL 1 ATRIUM 1 MEETING ROOM 201 ENTRANCE CONV. HALL-THEATRES VICTORIA (Harbour Road Entrance) HARBOUR ENTRANCE TO GOLDEN ENTRANCE TO BAUHINIA SCULPTURE ROAD MARSHALLING AREA EXPO DRIVE ROAD ROAD CAR PARK LOADING DOCK CAR PARK

ELEVATORS & STAIRS BANQUET VENUE 201 ELEVATOR

TO BANQUET VENUE L I F TO MEETING ROOMS 601-608 YOU ARE HERE T

PHASE 1 LEVEL 6

601 610

PHASE 2 609 YOU ARE HERE LEVEL 2 602 608 607 606 605 604 603 PHASE 1 601, 603-608 Meeting Rooms LEVEL 1 609 Secretariat Room 610 Speaker Lounge

GUEST LIFT TO PHASE 1 LEVEL 6 Meeting Room 601-608

IEEE-NANO 2007 Technical Digest 16

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Social Program Overview

The social events organized by the NANO 2007 include the Welcome Reception, the awards presentation Conference Banquet, and the Farewell Party

Welcome Reception Date: 2 Aug 2007 Time: 17:30 – 18:30 Venue: Room 601, Hong Kong Convention and Exhibition Centre All conference participants are welcome to join after registration on the Room 601Foyer outside Room 601.

Conference Committees Dinner (By Invitation ONLY) Date: 2 Aug 2007 Time: 19:00 – 21:30 Venue: China Club; The Old Bank of China Building, Central The dinner is by invitation only. Shuttle bus service is available to take the participants to the venue at the Renaissance Harbor View Hotel at 18:45.

Conference Banquet Date: 4 Aug 2007 Time: 18:00-21:00 Venue: Room 201, Hong Kong Convention and Exhibition Centre All conference participants are welcome to join. Extra conference banquet tickets (US $50 each) are available for accompanying persons. Please proceed to the registration and information desk for details.

Farewell Party Date: 5 Aug 2007 Time: 17:45 – 19:00 Venue: Room 601, Hong Kong Convention and Exhibition Centre All conference participants are welcome to join.

IEEE-NANO 2007 Technical Digest 17

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Technical Program Overview

The technical program of IEEE-NANO 2007 includes:

„ 6 Plenary Lectures

Prof. Chih-Ming Ho Session 1A1 Aug 3 09:00-10:30 Room 601 Dr. Mostafa Analoui Session 1A1 Aug 3 09:00-10:30 Room 601 Prof. Pallab Bhattacharya Session 2A1 Aug 4 08:30-10:00 Room 601 Prof. Yahachi Saito Session 2A1 Aug 4 08:30-10:00 Room 601 Dr. Robert S. Chau Session 3A1 Aug 5 08:30-10:00 Room 601 Prof. Mark Reed Session 3A1 Aug 5 08:30-10:00 Room 601

„ 15 Special Keynote Lectures

Prof. Yu-Chong Tai Session 1A2 Aug 3 10:50 – 12:20 Room 601 Prof. Christofer Hierold Session 1A2 Aug 3 10:50 – 12:20 Room 601 Prof. Li-Jun Wan Session 1A2 Aug 3 10:50 – 12:20 Room 601 Prof. Chennupati Jagadish Session 2A2 Aug 4 10:30 – 12:00 Room 601 Prof. Hui-Ming Cheng Session 2A2 Aug 4 10:30 – 12:00 Room 601 Prof. Gang Chen Session 2A2 Aug 4 10:30 – 12:00 Room 601 Prof. Ching-Fuh Lin Session 2B2 Aug 4 10:30 – 12:00 Room 603/ 604 Prof. William C. Ta ng Session 2B2 Aug 4 10:30 – 12:00 Room 603/ 604 Prof. Cary Y. Yang Session 2B2 Aug 4 10:30 – 12:00 Room 603/ 604 Prof. David T. Wong Session 3A2 Aug 5 10:30 – 12:00 Room 601 Prof. Fan-Gang Tseng Session 3A2 Aug 5 10:30 – 12:00 Room 601 Prof. Dr. Detlev Gruetzmacher Session 3A2 Aug 5 10:30 – 12:00 Room 601 Prof. Gwo-Bin Vincent Lee Session 3B2 Aug 5 10:30 – 12:00 Room 603/ 604 Ms. Brigitte M. Rolfe Session 3B2 Aug 5 10:30 – 12:00 Room 603/ 604 Prof. Chongwu Zhou Session 3B2 Aug 5 10:30 – 12:00 Room 603/ 604

IEEE-NANO 2007 Technical Digest 18

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 11 invited sessions 37 Invited Papers will be presented in 11 Invited Sessions:

Biosensing Using Enabling Nano-Biotechnology 1B2 Aug 3 10:50-12:20 Room 603 Nano-Biomedicine 1A3 Aug 3 13:30-15:30 Room 601 Spintronics 1F3 Aug 3 13:30-15:30 Room 607 Nano-Materials 1A4 Aug 3 15:50-17:50 Room 601 Spintronics and Nano-Magnetics 1F4 Aug 3 15:50-17:50 Room 607 Nano-Photonics, Nano-Optics and Opto-Electronics 2F2 Aug 4 10:30-12:00 Room 607 Modeling and Simulation 2A3 Aug 5 13:00-15:00 Room 601 Advanced Nano-Fabrication I 2D3 Aug 4 1300-1500 Room 605 Nano Robots, Nanomanipulation, and Nanomanufacturing 2A4 Aug 4 1530-1730 Room 601 Nano-metrology and Characterization 3A3 Aug 5 1300-1500 Room 601 Nano Electronics and Biosensors 3A4 Aug 5 1530-1730 Room 601 Nano-Materials Applications 3D4 Aug 5 1530-1730 Room 605

„ Commercialization Workshop

Session 2B4 Aug 4 15:30-17:30 Room 603

IEEE-NANO 2007 Technical Digest 19

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... „ Best Paper Contest A Best Conference Paper and a Best Student Paper will be awarded at this conference. The finalists are:

Best Paper Award Presentations Session 1D2 Aug 3 10:50—12:00

229 Synthesis and transistor performances of high quality single crystalline VLS grown Si1-xGex nanowire Sung Jin Whang, Sung Joo Lee, Wei Feng Yang, Byung Jin Cho, Yun Fook Liew, Dim Lee Kwong 326 Fabrication of lenses for AIGaInP LEDs using Step and Flash Imprint lithography Jeff Kettle, Georgi Lalev, Richard Perks, Stefan Dimov 421 Simulation of Electrically Tunable Semiconductor Nanopores for DNA Sequencing Maria Gracheva, Jean-Pierre Leburton 427 Directed assembly and novel responses of functional nanoparticles and nanolayers for future devices Ganapathiraman Ramanath 449 Functionalized Multi-Walled Carbon Nanotube Coating on Mainspring with Reinforced Mechanical Strength Jingming Gong, Florence, Ching Yeung Choi, Ka Wai Wong, Ruxu Du Best Student Paper Award Presentations Session 1D3 Aug 3 13:30—15:30

80 Design and Fabrication of DNA-based Nanostructures using Plasmid-Protein Complex for Bio Device Hideki Furukawa, Tatsuro Endo, Yasuko Yanagida, Takeshi Hatsuzawa 178 Single Semiconducting Zinc Oxide Nanowire Based Device for Thermal and Airflow Sensing Ding Wang, Rong Zhu, Zhaoying Zhou, Xiongying Ye 317 Solid-State Electrochemical Stamping of Functional Metallic Nanostructures Keng Hsu, Peter Schultz, Placid Ferreira, Nicholas Fang 337 MRI Controlled Magnetoelastic Nano Biosensor for in-vivo pH monitoring: A Preliminary Approach Arnaud Chanu, Sylvain Martel 374 Controllable Direct “Writing” of Gold Nanostructures for Integrated Nanobiosensor Applications Murat Yapici, Hyungoo Lee, Jun Zou, Hong Liang

IEEE-NANO 2007 Technical Digest 20

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... „ Technical Sessions

Around 340 papers will be presented orally.

** Note to Presenters in Technical Sessions: „ Presenters are expected to arrive at the session room at least 5 minutes before the session starts and report to your session chairs at the beginning of the session. „ The maximum duration of the presentation should keep in 15 minutes including the question and answer session. „ You are required to upload the presentation files in the speaker lounge (Room 610, HKCEC) at least 3 hours before your session.

IEEE-NANO 2007 Technical Digest 21

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... General Conference Information

Registration and Information Desk Registration and Information desk is located at located at the 6th Floor Foyer (outside Room 601) of the Hong Kong Convention & Exhibition Centre. The opening hours will be as follows

02 August 2007, Thursday 15:00 – 19:00

03 August 2007, Friday 08:30 – 17:30

04 August 2007, Saturday 08:30 – 17:30 05 August 2007, Sunday 08:30 – 17:30

Onsite registration Onsite registration is available in the registration desk during opening hours. Payment in cash (HK Dollars ONLY) or by credit card will be accepted.

Technical Digest and CD Proceedings One copy of the Technical Digest and CD-ROM set is included in your bag. Additional copies of CD Proceedings are available for purchase at the Registration Desk at US$35 each.

Extra Banquet Ticket The conference banquet will be held at Room 202 of the Hong Kong Convention & Exhibition Centre. Extra conference banquet tickets (US$50 each) can be purchased in the registration and Information desk.

Name Badges All attendees must wear their name badges at all times to gain admission to all conference social and technical functions.

IEEE-NANO 2007 Technical Digest 22

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

Restuarants NO conference lunches will be provided in this conference. Participants may enjoy lunches at restaurants inside the Hong Kong Convention and Exhibition Centre as well as those nearby in the Wan Chai district .

Internet Service Internet Service will NOT be provided in this conference.

About Hong Kong Convention and Exhibition Centre The award-winning multi purpose-built Hong Kong Convention and Exhibition Centre (HKCEC) opened in November 1988.

The HKCEC presently totals 248,000 sq m (2.67 million sq ft) with over 70,000 sq m (753,474 sq ft) of rentable function space. It includes five exhibition halls, two ballroom-style convention halls, two world-class theatres, 52 variously sized meeting rooms, two large foyers for pre-function gatherings plus various supporting amenities.

IEEE-NANO 2007 Technical Digest 23

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... General Tourist Information

Time Hong Kong time is 8 hours ahead of Greenwich Mean Time.

Dialing Codes Hong Kong’s International Country Code is +852.

Climate Hong Kong has a subtropical climate. In summer (late May to mid-September), Hong Kong is hot and humid. The temperature range from 25°C to 35°C, humidity near 86 per cent.

Electricity The standard electrical voltage in HK is 220 volts AC, 50HZ. Most electrical outlets take a three-rectangular pin plugs.

Currencies Legal tender is Hong Kong dollars (HK$). Since mid-1980s the value of the Hong Kong dollar has been pegged at HK$7.8 to the US dollar, and consequent rates of exchange to other currencies.

Most foreign currencies and traveler’s cheques can be easily exchanged in banks, hotels and money changers. Credit cards are widely accepted in Hong Kong.

There are no restrictions on currencies being brought in or taken out of Hong Kong.

IEEE-NANO 2007 Technical Digest 24

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Banking Office Hours Major banks are open from 9am to 4:30pm Monday to Friday, 9am to 12:30pm on Saturday and close on Sundays and public holidays.

Automated teller machines (ATMs) can be found almost everywhere and provide 24-hour cash withdrawal (HK$) facilities for credit card holders. ATMs and can withdraw local currency and travellers' cheques at the Express Cash ATMs in town.

Travel Visas for Hong Kong Visitors from most countries can enter Hong Kong without a visa for periods of seven days to six months, depending on nationality.

Visas may be applied at your nearest Chinese Consulate or Visa Office. It is recommendable to apply at least six weeks in advance.

Travel Visas for China Visit Visas are required for all foreigners entering mainland China. A standard tourist visa is valid for a 30-day visit. They can usually be obtained from Chinese embassies or consulates in your own country. Express visas for mainland China can sometimes be obtained through a travel agent within 24 hours.

Communications Using your mobile phone in Hong Kong is convenient as most of the telephone systems used around the globe, like GSM 900, PCS 1800, CDMA and WCDMA, operate in Hong Kong. Before leaving home check with your network provider to make sure they have a roaming service in Hong Kong. Store-value mobile phone card is also commonly available.

Public Transport Metered taxis, buses, trams, ferries, trains and light rail services provide effective transportations in the town.

IEEE-NANO 2007 Technical Digest 25

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Language Chinese and English are the official languages in Hong Kong. Most road signs, menus and tourist publications are bilingually written. Cantonese is the predominant Chinese dialect and Putonghua has become more popular.

Population The estimated population of Hong Kong is 6.8 million. Almost 98% is Chinese.

Safety & Security Hong Kong is a remarkably safe city day or night. Police officers patrol frequently and they are very helpful. However, you are reminded to keep your money, valuables and travel documents in a safe place, like the hotel room safe and pay attention to your belongings especially when you are in a crowded place.

Restaurants Hong Kong has more than 10,000 restaurants specializing in cuisine form many parts of the world. Most of them are opened until late night.

Shopping Most shops and department stores open seven days a week until 9:00 pm. Most street markets are in business every day until late at night. Hong Kong is renowned for bargains, speedily made tailored clothing, antiques, jewelry, and electronic equipment.

Tipping Standard Most restaurants will levy a 10 per cent service charge but waiters will expect to be given some loose change. Restaurants that don't add a service charge will expect a 10 per cent tip. However, tipping is left to your discretion. Bellboys, porters, restroom attendants and taxi drivers will happily accept loose change.

IEEE-NANO 2007 Technical Digest 26

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Airport Information

Hong Kong International Airport (香港國際機場) is the only international airport in Hong Kong.

It is located off the Lantau Island. Conference participants may get to Hong Kong Convention and Exhibition Centre from the Hong Kong International Airport by the following means:

(1) By Airport Express

Suggested Route:

Airport Station (機場站) - Hong Kong Station (香港站)

H1 Shuttle Bus Service (Hong Kong Station) (香港站 H1 穿梭巴士) – Hong Kong Convention and Exhibition

Centre Harbor Road Entrance (last stop) (香港會議展覽中心站)

The Mass Transit Railway (MTR) high-speed Airport Express is a fast way between the downtown areas and the airport. There are transport passes available for tourists. More information about the Airport Express: http://www.mtr.com.hk/eng/train/ae_intro.htm

The H1 shuttle bus service will takes passengers to the Hong Kong Convention and Exhibition Centre. It is also stopped by various hotels in the Admiralty and Wan Chai District. The service hours is between 06:20 and 23:10 (HK Time GMT +0800) and the frequency is approximately every 24 minutes. More information about shuttle bus service: http://www.mtr.com.hk/eng/train/ae_compli_e.htm

Please note that all intending bus passengers will be asked to provide proof of eligibility before boarding. Accepted documentation includes Airport Express ticket (Single Journey, Same Day Return, Round Trip, Airport Express Tourist Octopus Card), airline ticket / boarding pass.

IEEE-NANO 2007 Technical Digest 27

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... (2) By Taxis

Taxis are readily available from the taxi pick-up area in front of the Arrivals Hall. All taxis in Hong Kong are metered and fare details are available inside each cab.

All taxis can go to and from the airport. But taxis come in different colors to indicate their area of service: Most of Hong Kong, except for Tung Chung Road Red and the south side of Lantau Island; Green rural areas of the New Territories Blue Lantau Island ONLY

The approximate taxi fare top and from Hong Kong International Airport and Hong Kong Convention and Exhibition Centre is approximately HKD 350.

For other possible routes, please refer to the transport guide in: http://www.hongkongairport.com/eng/aguide/transport.html

IEEE-NANO 2007 Technical Digest 28

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Technical Program

August 3, Friday, 08.30 – 10.00

Room 601 Plenary Lectures (1A1)

Prof. Chih-Ming Ho Director, NIH Center for Cell Control University of California, Los Angeles, USA Topic: From Protein to Complex Biological System

Biography

Dr. Chih-Ming Ho received his Ph.D. from The Johns Hopkins University and holds the Ben Rich-Lockheed Martin Chair Professor in the UCLA School of Engineering. He is the Director of the Institute for Cell Mimetic Space Exploration (http://www.cmise.org) and the Director of Center for Cell Control (http://CenterForCellControl.org). He served as UCLA Associate Vice Chancellor for Research from 2001 to 2005.

Dr. Ho is known for his work in micro/nano fluidics, bio-nano technologies and turbulence. He was ranked by ISI as one of the top 250 most cited researchers worldwide in the entire engineering category. In 1997, Dr. Ho was inducted as a member of the National Academy of Engineering. In the next year, he was elected as an Academician of Academia Sinica. Dr. Ho holds five honorary professorships. He has published 260 papers and presented over 130 keynote Lectures in international conferences. Dr. Ho was elected Fellow of the American Physical Society as well as American Institute of Aeronautics and Astronautics for his contributions in a wide spectrum of technical areas.

IEEE-NANO 2007 Technical Digest 30

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Abstract

Primarily, the fields of nanoscience and nanotechnology aim to synthesize, characterize, apply, and control macro functional molecules and consist of three areas. bio-nanotechnologies nanoelectronics and nanomaterials. In this presentation, we will focus our discussions on bio-nanotechnologies.

A universal goal of technological development, including nanotechnology, is the enrichment of human life. A disparity of nine orders of magnitude separate the length scales of a human (a meter) and the nanometer, presenting significant technical challenges. This goal will ultimately be achieved through the development of a definitive pathway that uses existing and future technology to paint the new roadmap from the nanoscale to human life.

The human body is an extremely intelligent and complex adaptive system. The DNA/RNA and protein molecules, which drive its natural processes possess dimensions on the nanometer range. The challenges in exploring the governing mechanisms across a wide span of length scales is best stated by P. W. Anderson in his paper published in Science (1972) as “at each level of complexity entirely new properties appear, and the understanding of the new behaviors requires research which I think is as fundamental in its nature as any other.” For example, a cell fuses genetic informatics with nanoscale sensors and actuators to result in perhaps one of the most efficient and autonomous micron-scale “factories”. The richness in the science within the three orders of magnitude difference in length scale is far beyond our full understanding.

Nanotechnology has driven the production of molecular-scale devices towards the functionalizing of materials, production of electricity or other biocompatible energies, or a novel framework by which nanosystems can be assembled. These basic processes that occur at the molecular level have opened up a world where the integration of individual components can eventually derive higher-order functionalities. With these successes, we hope to achieve fundamental comprehension of how the interplay of the large number of building blocks at smaller scales can produce enhanced, emergent properties at larger scales. The question of how we can transcend the length scales which will eventually enable us to enrich human lives is a not obvious, but a key task.

IEEE-NANO 2007 Technical Digest 31

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... August 3, Friday, 08.30 – 10.00

Room 601 Plenary Lectures (1A1)

Dr. Mostafa Analoui Senior Director and Site Head, Groton/New London Global Clinical Technology Pfizer Global Research and Development, USA Topic: Nanotechnology and Life Sciences: Science and Business Perspectives

Biography

Mostafa Analoui, Ph.D., is the Senior Director at Pfizer Global Research and Development in Connecticut. He is also adjunct Professor of Radiology and Oral Pathology, Medicine at Indiana University Schools of Medicine and Dentistry. Dr. Analoui is actively involved in management and scientific/business development of emerging technologies. Dr. Analoui was previously the Director of Oral and Maxillofacial Imaging Research at Indiana University, and Associate professor of Biomedical Engineering and Electrical & Comp Engineering at Purdue University. He was also President and CEO of Therametric Technology Inc. In addition to industry leadership in biomedical filed, he lectures nationally and internationally. He has also served on various scientific and business advisory committees, as global business investment initiatives. Dr. Analoui has authored over 130 publications, including journal articles, book chapters, and technical reports.

IEEE-NANO 2007 Technical Digest 32

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Abstract

Recent technological advanes have provided a broad range of tools for Research and Development in Life Sciences, leading to significant progress in understanding of disease, drug discovery, as well as novel diagnostics. These technological contributions have led to innovation and introduction of a number of therapeutic solutions with notable improvement in public health. Nanobiotechnology, a basket of wide ranging technologies, is being positioned as one of critical class of technologies, with broad reaching impacts in Life Science R&D, including drug discovery, formulation, delivery, clinical assessment and monitoring.

In this presentation we focus on critical needs in clinical diagnostics and key challenges in drug discovery and development. Examples of current utility of nanotechnology, as well as ongoing research areas will be provided. Presentation also discusses some of the areas that nanobiotechnology could play role through enhancement in current paradigm, as well as new directions in drug development.

The second part of presentation will provide a snapshot of global business and investment environment around nanobiotechnology. It includes current and projected level of private and government investments, trends in IP ownership, as well as fundamental questions around assessment of investment strategies and risks.

IEEE-NANO 2007 Technical Digest 33

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... August 3, Friday, 10.30 – 12.00

Room 601 Special Keynote Lectures (1A2)

Prof. Yu-Chong Tai Professor of Electrical Engineering California Institute of Technology, Pasadena, USA Topic: Blood Count On-a-chip

Biography

Yu-Chong Tai is a Professor of Electrical Engineering, Mechanical Engineering and Bioengineering at the California Institute of Technology (Caltech). He is also currently the Executive Officer of Electrical Engoneering. He developed the first electrically-spun polysilicon micromotor at UC Berkeley and after his PhD he joined Electrical Engineering at Caltech. At Caltech, he built the Caltech MEMS Lab. His recent research focus is MEMS for biomedical applications including lab-on-a-chip and bioimplants. He has published more than 300 technical articles in the field of MEMS. He is the recipient of the IBM Fellowship, Ross Tucker Award, David Sakrison (Best Thesis Award), Presidential Young Investigator (PYI) Award, Packard Award, ALA Achievement Award, Caltech Teaching Award and several Paper Awards. He is a fellow of IEEE and IOP (Institute of Physics).

IEEE-NANO 2007 Technical Digest 34

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Abstract

Blood count is one of the most common medical laboratory tests performed today. It provides information on patient’s oxygen carrying capacity, immune system functionality, and the overall hemapoiesis process for disease diagnosis and drug side-effect monitoring. Traditionally blood count is performed either manually or by conventional automated blood analyzers. With the advance of microfabrication, on-chip blood count has become a target for miniaturization aiming at providing cost-effective, functional, capable point-of-care devices and systems that use less than 100 nL of blood sample and generate measurement results within minutes. The talk will cover our research on the use of microfluidics and nanotechnology for blood count on-a-chip.

Erythrocyte and leukocyte count is normally accomplished with electrical impedance sensing, which is one of the most accurate ways to measure particle volume. The well-known problem of small double-layer capacitance inherent to micro impedance sensors is solved using nano-structural platinum black on the electrode to increase effective surface (Fig.1). This method has successfully measured blood cells using both diluted blood samples and leukocyte-rich plasma. However, the disadvantage of the electrical impedance sensing is the requirement of blood dilution. We, then, further develop a method for two-part leukocyte differential using whole blood. Unlike methods used in conventional blood analyzers, undiluted blood samples are stained with nano molecular nucleic acid stain, acridine orange. Lymphocytes and granulocytes emit fluorescent light at different peak frequency after interaction with the dye due to the difference in cellular composition (Fig.2). Using the undiluted sample greatly minimizes sample preparation procedure, and reduces the overall measurement time, the reagent, and the waste volume. These benefits make it a practical method for implementation in microdevices. A throughput of one thousand leukocytes per second was demonstrated, which means the leukocyte differential could be accomplished in a couple of seconds.

Lymphocyte

Granulocyte

50 μm Fig.1 Pt black electroplated electrodes. Fig.2 AO stained human whole blood.

IEEE-NANO 2007 Technical Digest 35

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... August 3, Friday, 10.30 – 12.00

Room 601 Special Keynote Lectures (1A2)

Prof. Christofer Hierold Professor of Micro and Nanosystems ETH Zurich, Switzerland Topic: Carbon Nanotube Integration for NEMS

Biography Dr. Ing. Christofer Hierold, Professor Micro and Nanosystems Department of Mechanical and Process Engineering ETH Zurich Tannenstrasse 3 8092 Zurich Switzerland email: [email protected] web pages: www.micro.mavt.ethz.ch www.micronano.ethz.ch www.first.ethz.ch phone: +41 44 63 23143 fax: +41 44 63 21462

Christofer Hierold has been a Professor of Micro and Nanosystems at ETH Zurich since April 2002. Previously, he was with Siemens AG, Corporate Research, and Infineon Technologies AG in Germany. At Siemens his major areas of research and responsibility were microsystems, advanced CMOS processes and new materials. At Infineon's Wireless Products business group he was responsible for technology development, intellectual property, and competence management. At ETH Zurich he started his research on the evaluation of new materials for MEMS, on advanced microsystems, and on nanotransducers. Christofer Hierold is founding chairman of one of ETH Zurich’s inter- departmental competence centers, the Micro and Nano Science Platform, and he initiated the trans-disciplinary Master’s program in Micro and Nanosystems, which is jointly offered by two departments, namely the Department of Mechanical and Process Engineering and the Department of Information Technology and Electrical Engineering. He is also chairman of the management team of ETH Zurich’s cleanroom facility, the FIRST lab. In addition, he is a member of the international steering committees of major conferences in the field (MEMS, TRANSDUCERS, EUROSENSORS) and he is a member of the editorial boards of IEEE/ASME Journal of Microelectromechanical Systems and of IoP Journal of Micromechanics and Microengineering, and he is joint editor of the book series Advanced Micro and Nanosystems (Wiley-VCH).

36 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Abstract

Carbon Nanotubes (CNT) are intensively studied as a new functional material for sensors and for nanosystems (MEMS and NEMS). Also they have been identified for novel materials with potential for technology entry in mainstream technologies for nanoelectronics beyond CMOS. Single-walled carbon nanotubes (SWNTs) for example show unique mechanical, electromechanical (piezo-conductance), and thermal properties and they change electronic properties by interacting with the environment (e.g. for chemical and biochemical sensing). Therefore CNTs are very promising candidates for active elements in future nano scaled transducers. Physics, concepts, process engineering and results for carbon nanotube sensors for mechanical and chemical quantities are presented. We focus on single-walled carbon nanotubes as “simple” macro molecular functional structures with an option for integration in MEMS and NEMS, and topics of relevance for fabrication are discussed.

Integrated single walled or small bundles of single walled carbon nanotubes by (a) reverse assembly and by (b) CVD self-assembled growth.

37 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... August 3, Friday, 10.30 – 12.00

Room 601 Special Keynote Lectures (1A2)

Prof. Li-Jun Wan Director, Institute of Chemistry Chinese Academy of Sciences China Topic: Supramolecular Assembly on Solid Surface Studied by STM

Biography

Dr. Li-Jun Wan Professor of Chemistry CAS Key Laboratory of Molecular Nanostructure and Nanotechnology Institute of Chemistry The Chinese Academy of Sciences (CAS) Beijing 100080, China

E-Mail: [email protected]

Li-Jun Wan received his B. S. and M. S. in Materials Science from Dalian University of Technology in 1982 and 1987, respectively, obtained his Ph. D. in Materials Chemistry from Tohoku University of Japan in 1996. Then he worked in ERASTO/JST as a researcher and in Hokkaido University and Tohoku University of Japan as a visiting professor and an assistant professor. He jointed Institute of Chemistry, Chinese Academy of Sciences (CAS) in 1998. Now, he is a Professor, Director of CAS Key Laboratory of Molecule Nanostructure and Technology, and the Director of Institute of Chemistry of CAS. Dr. Wan’s research interests cover the areas of physical chemistry of single molecules, molecular self-assembling, surface/interface structure of semiconductor and metals, functional nanomaterials, nanodevices, and SPM techniques. He has been issued to or applied over 10 patents, and authored or co-authored of over 170 scientific publications in international journals such as Accounts of Chemical Research, Journal of the American Chemical Society, Angewandte Chemie, Advanced Materials, Journal of Physical Chemical B. He has invited to serve as Editorial Advisory Board Members of Accounts of Chemical Research, Chemistry of Materials, The Journal of Physical Chemistry (A, B, C) and Editorial Board Member of NANO.

38 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Abstract

The most exciting progress in nanoscience and nanotechnology is the development of molecular engineering. Organic molecules with different functions could be employed to fabricate supramolecular architectures and even molecular circuits. Among various techniques such as molecular beam epitaxy, molecular self-assembly/organization is a promising stratege for constructing molecular nanostructures. An important issue in self-assembly is the precise control of nanostructure and arrangement of molecules. In this presentation, the applications of molecular nanothchnology of supramolecular self-assembly are described. (a) Application of scanning tunneling microscopy (STM) in supramolecular study. (b) The self-assembly of complexes with ordered-defined molecular nanostructure is fabricated on various solid surfaces. For example, Complex with rectangular configuration can adsorb onto Au(111) surface and self-organize into two-dimensional (2D) adlayers shown in Figure 1. (c) Well-established molecular nanostructures could be controlled by external stimulation such as STM tip, electrode potential, magnetic and electronic fields, UV light irradiation and thermal annealing. By these procedures, individual molecule could be operated. Individual molecular assembly was polymerized into molecular nanowires and nanoworks. The structural variation was monitored by STM. The supramolecular nanoarchitectures should be important candidates for nanodevices and nanoelectronics.

References: (1) Wan, L.-J. Acc. Chem. Res. 2006, 39, 334. (2) Pan, G. B.; Liu, J. M.; Zhang, H. M.; Wan, L.J.; Zheng, Q.Y.; Bai, C. L. Angew. Chem., Int. Ed. 2003. 42. 2747. (3) Gong, J.-R.; Wan, L.-J.; Yuan, Q.-H.; Bai, C.-L.; Jude, H.; Stang, P. J. Proc. Natl. Acad. Sci. U.S.A. 2005, 102, 971- 974. (4) Yuan, Q. H.; Wan, L.-J.; Jude, H.; Stang P. J. J. Am. Chem. Soc. 2005, 127, 16279-16286.

Figure 1. (A) Large scale STM image of rectangular complex on Au. (B) High-resolution STM image of (A). The inset is Au(111)-(1 × 1).

39 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Technical Sessions on Friday, August 3, 2007

Invited Session: Biosensing Using Enabling Nano-Biotechnology (1B2)

Time: 10.50 – 12.20 Room: 603 Session Chairs: Gwo-bin Lee, Fangang Tseng

117 DEP-Based Fabrication and Characterization of Electronic-Grade CNTs for Nano-Sensing Applications Mengxing Ouyang, Mandy L.Y. Sin, Chun Tak Chow, Wen J Li, Xuliang Han

Sensing devices using electronic-grade carbon nanotubes (EG-CNTs) as resistive sensing element were fabricated by dielectrophoresis (DEP) manipulation. DEP-based fabrication of EG-CNTs is important as it allows some control of the nominal resistance of the fabricated sensors, which is essential to improve the SNR of CNT sensors. The devices were characterized and the potential of EG-CNTs to serve as a novel temperature and humidity sensing element has been demonstrated. Electrical characterization revealed that the EG-CNTs sensors, which exhibit large linear I-V range, have both positive and negative TCR at higher operational temperatures. In addition, its resistance-humidity linear dependency proves its humidity sensing capability. Moreover, the EG-CNTs device is capable of operating in nW range. On the foundation of these measurements, we aim to prove EG-CNTs as a promising material for future applications in nano-sensing.

122 Application of Nanobiotechnology to Construct a Piezoelectric Sensor Matrix Sensing the Flexibility Guewha Huang, Yu-Shiun Chen, Xin-Yau Lin

We have constructed a piezoelectric sensor matrix with the capability of measuring the flexibility of immunoglobulin. The matrix consisted of 6 independent quartz crystal microbalance (QCM) coated with gold nanoparticles (GNP) of 3.5, 5, 12, 17, and 37 nm, and BSA. The detection was performed simultaneously. Antiserum against GNP bound to QCMs coated with 3.5 nm GNP and maximized for 5 nm GNP-coated QCM. To our best knowledge, this is the first biosensor sensing the topological change and flexibility of biological macromolecule.

40 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 197 Rapid Production of Biocompatible Polymeric Nanoparticles for Functionalization via RF Atomization James Friend, Leslie Yeo, Dian Arifin, Adam Mechler

Surface acoustic wave fluid atomization was used for rapid and continuous production of spherical nanoscale polymeric particles of polycaprolactone. Monodisperse particles 150 nm in diameter were produced; each particle was composed of loosely bound 20 nm diameter nanoparticles. They were created by acoustically atomizing 1% w/w polycaprolactone dissolved in acetone at a resonance frequency of 8.611 MHz and an applied power of 30 W using a surface acoustic wave device. The size and morphology of the nanoparticles were determined using dynamic light scattering, atomic force microscopy, and transmission electron microscopy. The results indicate a means to rapidly produce polymer nanoparticles compatible with a wide range of large biomolecules for biosensing and drug delivery.

222 Nanocavity Protein Biosensor - Fabricated by Molecular Imprinting Chou Tse-Chuan, Yu-Ching Weng

The nanocavity protein biosensor fabricated by molecular imprinting technique has been developed. We combine the molecular imprinting and microcontact printing techniques to synthesize a nanocavity polymer thin film (NPTF) as an artificial antibody for protein determination. The proteins considered to be important biomarkers in clinical diagnosis are chosen as our templates including C-reactive protein, ribonuclease, lysozyme, myoglobin, albumin and ovalbumin. In order to obtain the best composition of the NPTF with specific recognition sites, isothermal titration calorimetry was used as an auxiliary tool to examine the enthalpy changes among the template, the functional monomers and cross-linker. Nanocavities related to the shape of aggregated template proteins were observed on the imprint surfaces from atomic force microscopy (AFM) images. We found that by optimizing the composition ratio between lowest affinity of cross- linker and highest affinity of functional monomer exhibit highly selective recognition for a variety of template proteins.

41 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 278 Electrokinetic Bio-Molecules Separation and Preconcentration by MWCNTs Filter in Nanofluidic Channel Fan gang Tseng, Ren Kuei Wu

This paper presents a study of electrokinetic transport in a nano-fluidic chip that allow for separation and pre- concentration of the molecular mixtures into a high density multi-wall carbon nano tubes (MWCNTs) array of nano- channels. The MWCNTs array was used as an induced-surface charge filter to attract the charged molecules on the wall surface by van der Waals and electrostatic force. The surface charge of MWCNTs is inversely proportional to the channel wall thickness and proportional the dielectric constant of itself and the applied external electric-field. A modified RuOx particles MWCNTs electrode was used as electrochemical sensor to increase the reactive surface area and reduce the redox potential. 0.5 μM FITC (fluorescein) and Rhodamine 6G dye mixtures during the electrokinetic trapping process, could be easily to separate by the electric property of dyes in a MCNTs filter nanochannel, the concentration capability of FITC as high as 5000 folds have been demonstrated. For electrochemical behavior, the RuOx/CNTs electrodes could be efficient to reduce 0.06V oxide potential compared with MWCNTs only electrodes.

MEMS: Modeling, Measurement, and Analysis (1C2)

Time: 10.50 – 12.20 Room: 604 Session Chairs: James K. Mills and Yu Sun

41 A Dual-Mass MEMS Vibratory Gyroscope with Adaptive Control Scheme Cunchao Wang, Shourong Wang

A micromachined vibratory gyroscope with two proof-masses to measure rotation rate is presented. The two proof- masses are driven electrostatically in opposite directions along drive axis. In order to improve the performance of the MEMS gyroscope, an adaptive control method is developed. This scheme tunes the drive natural frequencies of gyroscope to a given frequency, regulates the amplitudes of the drive axis to a required value, achieves mode matching, cancels out quadrature error due to stiffness coupling, and drives the sense axis vibration to zero for dynamic range and sensitivity improvement. Simulation results verify the theoretical analysis.

42 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 157 Design of a High Sensitivity Capacitive Force Sensor Henry Chu, James Mills, William Cleghorn

This paper focuses on the design and development of a MEMS based, capacitive sensor for micro-force measurement. This sensor has an overall dimension of 3600 μm x 1000 μm x 10 μm and it was fabricated using MicraGEM fabrication process. The sensor is capable of measuring a maximum force of 11 milli-Newton, resulting a 20 μm deformation on the sensor. A displacement reduction mechanism is incorporated in this sensor design to maximize the sensitivity. The sensor performance was simulated using Finite Element Analysis software, COMSOL, and the result was compared with the modeling equation. A 6-DOF manipulator and an evaluation board were used for the experiment. The experimental results show that a 100fF change in the capacitance value can be measured for 20 μm deformation.

407 Electrochemical Co-deposition of Nickel-Alumina Nanocomposite for Microsystem Applications Xueyong Wei, Phil Prewett, Kyle Jiang

We present some results from a study of electrochemical co-deposition of Nickel-Alumina (Ni-Al2O3) nanocomposite for microsystem applications. Extensive experiments have been conducted and teh results are analysed. The effects of surfactant additive, current density, and temperature on surface morphology, microhardness are characterized and explained. Using optimized conditions, we fabricated Ni-Al2O3 nanocomposite components of good quality for a micro combustion engine. Verified by the Vickers microhardness tester, the hardness of the nanocomposite is found dramatically improved in comparison with pure Ni components.

43 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 431 A Novel Design Methodology for MEMS Device Xin Zhao, Lei Wang, Yiyong Tan, Guangyi Sun, Guizhang Lu

Due to MEMS device needs highly accurate design, a novel design methodology for MEMS device is put forward in this paper. Firstly, top-down and bottom-up hybrid design process based on IP library is proposed. It facilitates and speeds up design cycle and reduces the expense of MEMS design. Secondly, Virtual Fabrication Process is proposed. It is used to establish stable, accurate and robust 3D geometry of device according to the fabrication process. Voxel-based visualization technique is applied to Virtual Fabrication Process to achieve better process simulation result. Thirdly, Virtual Operation is proposed. It is used to visualize and simulate the mechanical operation of MEMS device. This module could exhibit 3D realistic animation in Virtual Reality (VR) environment. An available prototyping MEMS CAD which implements both top-down and bottom-up design notion integrates with Virtual Fabrication Process and Virtual Operation. A bimetallic thermally-actuated micropump is studied through the paper using this novel design methodology.

Best Paper Award Presentations (1D2)

Time: 10.50 – 12.20 Room: 605 Session Chairs: Fumihito Arai

229 Synthesis and transistor performances of high quality single crystalline VLS grown Si1-xGex nanowire Sung Jin Whang, Sung Joo Lee, Wei Feng Yang, Byung Jin Cho, Yun Fook Liew, Dim Lee Kwong

We present a successful synthesis of single crystalline homogeneous Si1-xGex nanowires (diameter: 7 ~ 52nm) via vapor-liquid-solid mechanism. Results show that quality, density, growth rate of Si1-xGex nanowires are greatly affected by the growth temperature and the single crystalline Si1-xGex nanowires without amorphous sheath layer can be obtained at optimized growth temperature. Control of the amount of Ge in nanowire was obtained with different GeH4 gas flow rates. Using back-gated field effect transistor integrated with HfO2 gate dielectric, TaN/Ta metal gate and Pd source/drain electrode, Si1-xGex nanowire transistor exhibits p-MOS operation with Ion/Ioff=105, sub-threshold swing of 97mV/dec and hysteresis of 50mV.

44 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 326 Fabrication of lenses for LEDs using novel 3-D data preparation technique for FIB milling Georgi Lalev, Jeff Kettle, Richard Perks, Stefan Dimov

This paper describes a new data preparation technique, which allows for design of the optical lenses in a conventional CAD package and immediate transfer to a lithography systems commonly used in Electron Beam or Focused Ion Beam Lithography. Most importantly, we show that this approach could lead to an application for enhancing AlGaInP LED performance.

421 Simulation of Electrically Tunable Semiconductor Nanopores for DNA Sequencing Maria Gracheva, Jean-Pierre Leburton

In this talk, we present a new paradigm for DNA sequencing, which utilizes the capability of semiconductor MOS nanotechnology. The device is made of a MOS capacitor membrane containing a nanometer feature size nanopore immersed in an electrolytic solution. As a DNA molecule is forced to translocate through the nanopore by an externally applied bias voltage the electronic signature of the molecule is recorded in the form of a voltage trace on the capacitor plates/electrodes. We have developed a multi-scale technique to simulate this complex process. Our multi-scale approach is based on the incorporation of a molecular dynamics description of a translocating DNA molecule in the nanopore within a three-dimensional Poisson equation self-consistent scheme involving electrolytic and semiconductor charges for the electrostatic potential calculation. We show that the new device has the potential to identify DNA molecules by using the voltage induced on the electrodes without utilizing the signal of ionic current fluctuations. We also show that a nanopore in a silicon membrane connected to a voltage source can be used as an electrically tunable ion filter. In this context, the use of a semiconductor membrane which provides electrical tunability and materials versatility allows for double layer engineering.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 427 Directed assembly and novel responses of functional nanoparticles and nanolayers for future devices Ganapathiraman Ramanath

Harnessing nanostructures for future devices requires directed synthesis of nanostructures with atomic-level control over structure, surface chemistry, and assembly in controllable configurations. This talk will describe three examples of realizing novel magnetic, thermoelectric and mechanical properties by directing the growth and assembly of nanoparticles and nanowires of magnetic and thermoelectric materials, and molecular nanolayers. Our approaches open up completely new possibilities to integrate nanostructures with substrates and matrices for developing devices for data storage, power generation and refrigeration, and molecular engineering of thin film device interfaces. I will first describe the synthesis and assembly of nanoparticles of magnetic and thermoelectric materials with control over crystal structure, shape and surface chemistry. We have devised entirely new strategies to obtain high-coercivity FePt-silica core-shell nanomagnets with control over size, dispersity, composition and thermal stability, by using surfactant- stabilized water nanodroplets or by incorporation of high-activity, low-surface energy impurities. The nanomagnets can be assembled into chains of desired length, or ordered films by exploiting chemical interactions between molecular couplers, polyelectrolytes and, substrate and nanoparticle surfaces. An example of using surfactants to induce crystallographic branching in single-crystal bismuth telluride nanorods will also be discussed in the context of branching mechanism and thermoelectric properties. I will conclude with a remarkable example of the use of a sub-nm-thick layer of adsorbed organosilanes to enhance thin film interface toughness by more than a factor of seven, yielding unprecedented values exceeding 28 Jm-2. The toughening mechanism will be described based upon fracture surface spectroscopy and density functional theory calculations.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 449 Functionalized Multi-Walled Carbon Nanotube Coating on Mainspring with Reinforced Mechanical Strength Jingming Gong, Florence, Ching Yeung Choi, Ka Wai Wong, Ruxu Du

Here, we have successfully fabricated highperformance mainspring (MS) by co-electrodeposition of functionalized multi- walled carbon nanotubes coating in the presence of chitosan. The functionalized carbon nanotubes (f-CNTs) are easily electro-deposited onto the mainspring under a moderate condition, with controllable film thickness from a few hundred nanometers to tens of micrometers. The mechanical properties of the coated mainspring were evaluated by a cantilever loading mode test. Our results show that the Young’s modulus (E) of a mainspring coated with a f-CNT composite layer (5 µm thick) increases by more than 40%. To further improve the adhesion of f-CNT composite coating onto mainspring, we also developed a layer-by-layer (L-B-L) strategy to fabricate multi-layered f-CNT composite coatings. Preliminary tests showed an increase of ~ 20% for E modulus, with only a 2-layer coating (~1 µm f-CNT composite coating thickness). The co-electrodeposition technique provides a facile approach to form stable, reproducible, and rigid f-CNTs composite coating, realizing the fabrication of high-performance mainspring with reinforced mechanical strength.Here, we have successfully fabricated highperformance mainspring (MS) by co-electrodeposition of functionalized multi-walled carbon nanotubes coating in the presence of chitosan. The functionalized carbon nanotubes (f-CNTs) are easily electro- deposited onto the mainspring under a moderate condition, with controllable film thickness from a few hundred nanometers to tens of micrometers. The mechanical properties of the coated mainspring were evaluated by a cantilever loading mode test. Our results show that the Young’s modulus (E) of a mainspring coated with a f-CNT composite layer (5 µm thick) increases by more than 40%.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Novel Nano-Materials (1E2)

Time: 10.50 – 12.20 Room: 606 Session Chairs: Hui-Meng Cheng and Kwong-Chun Lo

181 Structural and Optical Properties of CuPc/ZnSe Multilayer Hybrid Thin Films prepared by Electron Beam Evaporator Thutiyaporn Thiwawong, Benchapol Tunhoo, Jiti Nukeaw

Multilayer hybrid thin films consisting of alternating layers of organic and inorganic materials were deposited with powder of copper-phthalocyanine (CuPc) and zinc selenide (ZnSe) by electron beam evaporator . The structural and optical characterization of multilayer hybrid thin film were carried out by using X-ray diffraction (XRD), atomic force microscope (AFM) and UV-Vis absorption spectroscopy. The influence of the pair number on the crystallinities, morphologies and optical properties of the multilayer hybrid thin films will be described.

196 Synthesis of Well Aligned Silicon Nanowire Arrays by Reflow of Photoresist Techniques Chien-Wei Liu, Cheng Yung Kuo, Chuan Po Wang, Chie Gau, Shiuan Hua Shiau, Bau Tong Dai

Well aligned Si nanowires (SiNWs) by Vapor-Liquid-Solid growth process are presented. Instead of using H2, the current work uses N2 as carrier gas. The growth conditions of SiNWs are controlled by the ratio of nitrogen versus silane gas. Tapering of nanowires was found at T=620OC and P=333 m torr, and the tapering parameter was reduced by increasing the N2 gas. However, stopping N2 gas flow into the chamber leads to occurance of relatively large diameter Si pillars. By adopting reflow of photoresist techniques, the size of metal catalyst for SiNWs growth can be significantly reduced, and the growth location of SiNWs can be defined. Well aligned Si nanowires can be obtained.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 462 Effect of Nitrided Silicate Buffer Layers for HfO2 Thin Films Grown by Remote Plasma Atomic Layer Deposition Hyeongtag Jeon, Seokhoon Kim, Sanghyun Woo, and Hyungchul Kim

Three different buffer layers on a Si substrate were grown to investigate the interfacial layer effect during HfO2 deposition and thermal annealing. The three different buffer layers were the very thin Al2O3, RPN-treated Al2O3, and RPN-treated HfO2 films. HfO2 films were then grown on these three different buffer layers by RPALD. The HfO2 films with RPN-treated buffer layers retarded silicate formation or growth of an interfacial layer more effectively than those without RPN treatment. The HfO2 films with a RPN-treated HfO2 buffer layer showed the lowest EOT and those with a RPN-treated Al2O3 buffer layer exhibited the lowest leakage current density. The effective fixed oxide charge density of the HfO2 film with nitrided Hf silicate buffer layer showed the lowest value compared to the other films. As the annealing temperature increased, the flat band voltage for the HfO2 films shifted towards and became close to the ideal VFB. The interface stability of HfO2 with a nitrided buffer layer formed by RPN treatments resulted in the improvement of the electrical properties of HfO2 films.

464 An Interesting Growth Mode of ZnO Nanocrystals in the Presence of Steam Faquan He, Ya-Pu Zhao

Using steam as oxidant, we deposited ZnO nanocrystals at very low temperature without any catalysis for the first time. We observed that many ZnO nanocrystals self-assembled into very regular cycle plate. X-ray diffractometer showed that the nanocrystals are good crystal with wurtzite structure. Photoluminescence spectra exhibit green emission which may be due to oxygen vacancy, while the near band gap emission is not observed. The as-made products may have potential applications in the fields of nanodevices and photocatalysis.

468 Tailor-Made Nano Structured Materials for Highly Qualified Spin Related Devices Migaku Takahashi, Masakiyo Tsunoda, Shin Saito, Tomoyuki Ogawa

Important roles of tailor-made nano structured materials in spin related devices, 1) Exchange coupled composite (ECC) media, 2) Read element in spin-valve (SV) head and 3) Extremely high frequency magnetic devices, are widely discussed based on the remarkable effect through the direct and/or indirect exchange coupling and spin dynamics.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 475 Synthesis of ZnO film on GaAs substrate by metal-organic chemical vapor deposition H.P. Ho, Hui Wang, Kwong-Chun Lo

ZnO has attracted considerable attention as a wide band gap semiconductor material for UV and blue light emitting applications. We report synthesis of ZnO on GaAs substrate using GaN as the buffer layer. The layer was prepared by nitrogen implantation and RTA on a GaAs substrate. Raman measurement was performed to study the quality of the synthesized ZnO.

Modeling and Simulation (II) (1F2)

Time: 10.50 – 12.20 Room: 607 Session Chairs: Muhammad Alam and Chunhong Chen

58 On the Behaviors of Multi-Island Structure for Single-Electron Threshold Logic Circuits Bharkhar Paresh, Chunhong Chen

We study the behaviors of multi-island structure as an alternative redundancy scheme for single-electron tunneling (SET) based digital logic circuits. In particular, we focus on a typical SET logic gate (2-input NAND gate) to explore the role of this new structure in improving the reliability of the gate due to random background charges. Also discussed are the impacts of multi-island structure on input noise margins, its parameter selection, and the difference between the structure and other existing redundant strategies such as modular redundancy. Experiments using SIMON simulator show the advantages of this structure for applications in SET-based logic circuits.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 191 Reducing Stray Currents in Molecular Memory Through Data Encoding Adam Cabe, Garrett Rose, Mircea Stan

Much progress is being made in the fabrication of molecular devices and nanoscale circuits. Such strides have led to studies and experimental tests using these devices in non-volatile memory arrays. However, the architecture of such arrays makes it difficult to accurately determine the value of each stored bit in the memory. When reading, each bit is effected by the rest of the memory through variable numbers of ’sneak-paths’. This paper presents the idea of data encoding to thwart the impacts of these sneak-paths. The results show that this encoding method makes each bit readable even in the face of device parameter variations. Details of the encoding scheme, the hardware design, and layouts are presented throughout this work.

213 Computation of Direct Tunneling Gate Leakage Currents in Nan-MOSFETs using Ensemble Full Band Monte Carlo with Quantum Correction R.S. Kajen, Ken Chang, Ping Bai, Er-Ping Li

We present the analysis of Direct Tunneling (DT) gate leakage current in a 25nm channel length n-channel metal oxide semiconductor field effect transistor MOSFET using an ensemble Full Band Monte Carlo (FBMC) simulation which incorporates quantum effects using Schrödinger solver. The DT current is simulated and compared with Quantum Drift Diffusion (DD) results using DESSIS. The FBMC simulations yield DT currents one order higher than DD currents. In addition a dual thickness gate oxide structure is simulated using FBMC and DD and found to be effective in reducing the DT current.

335 A Rectangular Metal-Insulator-Metal based Nanoscale Plasmonic Resonator Amir Hosseini, Yehia Massoud

We present a new optical range resonator based on single mode metal- insulator-metal plasmonic gap waveguides. Complete transmission at 90 degree bends enables us to design rectangular structures of cross-section area less than 0.5 micron squared, which also benefits the ease of fabrication. The resonator exhibits a free spectral range (FSR) of 270 nm. We show that a small bridge between the resonator and the main waveguide can be used to tune the resonance frequency. In addition, ultra-compact add/drop directional couplers are realizable based on the presented ring resonator structure.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 393 Clock-Free Nanowire Crossbar Architecture based on Null Convention Logic (NCL) Ravi Bonam, Shikha Chaudhary, Yadunandana Yellambalase, Minsu Choi

There have been numerous nanowire crossbar architectures proposed till date, although all of them are envisioned to be synchronous (i.e., clocked). The clock is an important part in a circuit and it needs to be connected to all the components to synchronize their operation. Considering non-deterministic nature of the nanoscale integration, realizing them on a nano wire crossbar system would be quite cumbersome. Unlike the conventional clocked counterparts, a new clock-free crossbar architecture is proposed to resolve the issues with clocked counterparts in this paper, where the use of clock is eliminated from the architecture. This has been done by implementing delay-insensitive logic encoding technique called Null Convention Logic (NCL). A delay-insensitive full adder has been implemented on the proposed architecture to demonstrate the feasibility in this paper.

AFM Based Nano Robotic Manipulations (1G2)

Time: 10.50 – 12.20 Room: 608 Session Chairs: Guangyong Li and Hideki Hashimoto

23 Image-Based Hysteresis Modeling and Compensation for Piezo-Scanner Utilized in AFM Yudong Zhang, Yongchun Fang, Xianwei Zhou, Xiaokun Dong

As an important component of Atomic Force Microscope (AFM), piezo-scanner exhibits some undesired nonlinear characteristics,among which the inherent hysteresis largely decreases the scanning rate and resolution of AFM. To alleviate this problem, an image-based approach is proposed in this paper to model and then compensate for the hysteresis behavior of the piezo-scanner. Specifically, some scanning image over calibration grating is utilized to identify the parameters of the classical Preisach model (CPM) of hysteresis. Based on the obtained model, an inversion-based technique is adopted to design a compensator for the hysteresis of piezo-scanner. The proposed algorithm presents such advantages of low cost and little complexity since no nano-sensor is required to collect data. Some simulation results are included to demonstrate the performance of the proposed strategy.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 24 System Modeling of an AFM System in Z-axis Xianwei Zhou, Yudong Zhang, Xiaokun Dong, Yongchun Fang

Motivated by increasing the scanning performance of the atomic force microscope (AFM), many efforts have been made to analyze the system behavior of an AFM system, mainly in Z-axis, and then to develop more advanced controllers. However, most of the previously derived models involve complex physical or mathematical analysis, and many parameters need to be identified for actual application. In this paper, an empirical model is obtained for the Z-axis dynamics of an AFM system by utilizing experimental data. Specifically, the model consists of a dynamical component and multiple static gains. As introduced in the paper, the N4SID algorithm is first employed to derive the dynamical part based on input-output data. Then the static gains of the piezo-actuator are calibrated experimentally. It can be seen from the experimental data that the main source of time delay in Z-axis is the finite retraction/protraction velocity of the piezo-actuator.

318 Real-time Position Error Detecting in Nano- manipulation Using a Kalman Filter Lianqing Liu, Ning Xi, Yilun Luo, Jiangbo Zhang, Guangyong Li

The main problem of AFM based nanomanipulation is lack of real time visual feedback. Although the model based visual feedback can partly solve this problem, due to the complication of nano environment, it is difficult to accurately describe the behavior of nano-objects with a model. The modeling error will lead to an inaccurate feedback and a failed manipulation. In this paper an intelligent strategy is developed to real-time detect and compensate the position error between the visual feedback and the real manipulation result. This intelligent strategy mainly includes two steps: Kalman filter based error detection and local scan based error compensation. The design of the Kalman filter and the mechanism of local scan will be presented and discussed in detail. With this strategy, the position error between the visual feedback and the real environment is real-time detected and compensated without interrupting manipulation. Experiments of manipulating nano-particles are performed to verify the effectiveness of this strategy, which also demonstrated the improved efficiency of the AFM based nano-assembly system.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 409 Vibration Control of AFM Tip for Nano-Manipulation Using Combined Sliding Mode Techniques Aidin Delnavaz, Nader Jalili and Hassan Zohoor Atomic force microscope (AFM) can be used as nano-robotic manipulation tool in a broad spectrum of applications such as electronics, manufacturing and biological analysis. It is crucial to control the vibration behavior of AFM and make the micro-cantilever tip track specified trajectory in order to appropriately manipulate nanoparticles. Dynamic model of AFM micro-cantilever is inherently nonlinear and spatially uncertain under the presence of interatomic forces between tip and sample. Consequently, nonlinear robust control approaches which in turn produce chattering control efforts are conventionally introduced to overcome these difficulties. As a matter of fact, almost all nonlinear robust control inputs vary between two different values in time with specific frequency which may eventually excite AFM higher order dynamic modes, and hence, contaminate or damage samples. To avoid chattering phenomenon, a novel combined sliding mode control approach has been investigated. First (classical) and second order (SOSM) sliding mode techniques have been developed and applied to nonlinear dynamical and uncertain model of AFM micro-cantilever. Classical and second order sliding mode abilities to track the desired trajectories have also been assessed. The simulation results show chattering in reaching phase of classical sliding mode and undesired trajectory twisting in sliding phase of SOSM. Therefore, combined first and second order sliding mode is proposed to achieve robust chattering-free vibration control of AFM tip. The simulation results show that the combined classical and second order sliding mode is able to not only track the desired trajectory under the heavy uncertainties, but also avoid chattering in sliding phase.

445 A Controller for Adaptable End Effector of the AFM Based Nano-robotic System Lina Hao, Jiangbo Zhang, Ning Xi Atomic Force Microscopy (AFM) was initially developed as an instrument mainly used for surface science research. Since the AFM tip is physically touching the sample during imaging, the AFM probe is equivalent to a robot arm with both sensing and manipulation functionalities. In this system, the AFM probe was called as an end effector of manipulator. The paper's objective is to develop an AFM based nano-robotic system itself which can work in a nano environment also be able to prevent the tip from missing the objects in nano-scale size. In order to keep end effector straight during manipulation and be adaptable to different sized objects, we have developed a controller of adaptable end effector based on an active probe in this paper. The active probe has been modeled as an infinite dimensional system based on Euler-Bernoulli theory. A Periodic-Output-Feedback (POF) controller has been designed and simulations have been carried out to optimize the parameters of the controller. The POF controller has been implemented in a real time Linux system. Simulations and experimental results of nano-lithography and nano- manipulation have demonstrated the validity of infinite dimensional model and POF controller for this adaptable end effector, and have also shown that the position accuracy has been improved.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Invited Session: Nano-Biomedicine (1A3)

Time: 13.30 – 15.30 Room: 601 Session Chairs: Chih-Ming Ho and Ida Lee

134 Functional nanoparticles for theranostic applications Dar-Bin Shieh, Chen-Sheng Yeh, Pai-Chi Li, Dong-Hwang Chen, Churn-Jen Chris Wang, Chi-Kuang Sun, Yonhua Tzeng

Nanotechnology manipulate materials at a compatible size scale as molecular biology. Theranostics – a concept to combine diagnosis and therapy in one platform is emerging to improved clinical management of diseases. We have synthesized iron oxide nanoparticles and iron–gold core/shell nanoparticles (Fe@Au) that exhibit MRI contrast effect while selectively deplete mitochondria membrane potential of the cancer cells but not normal cells and induced preferential cytotoxicity toward cancerous cells. In addition, modular designed targeting nanoparticles were employed for versatile recombination based on clinical demand and were successfully demonstrated for MRI based in vivo molecular imaging. Modification of iron oxide nanoparticles into hollow or porous structures further extend their capacity for packaging drug or genes to serve as in vivo traceable nanocarrier. Metallic nanorods with different aspect ratio presented a controllable SPR frequency for photoacoustic imaging, and hyperthermia therapy that restricted to nanorod targeted cancer cells upon increase in the laser intensity. In conclusion, nanobiotechnology will become an integral part of tomorrow's biological science and clinical practice in a wide spectrum of applications. Joint efforts from comprehensive integration of multiple disciplines will be a critical part toward a successful development.

137 Microcantilever Biosensors and Effect of Nanometer Surface Morphology Ida Lee

Microcantilever biosensor, capable of detecting bimolecular interactions, is a powerful biosensing design for nanobiomedicines. The microcantilevers undergo bending if the molecular adsorption is confined to a single surface of a microcantilever, and this process can be amplified by making the cantilever surfaces chemically different. By using the extremely selective biochemical reactions such as receptor–ligand, antibody–antigen, or enzyme–substrate reactions, sensing specificity can be achieved. We present here the development of microcantilever biosensors in our and our collaborators’ groups. The effect of nano-scale roughness on the sensor sensitivity is also investigated.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 306 Electrochemical Detection of Salivary RNA Fang Wei, Bernhard Zimmermann, Na Li, Chih-Ming Ho, David Wong

Electrochemical biosensor for salivary RNA detection with high sensitivity is presented in this work. The complexity of saliva and the low concentration of salivary RNA require both high sensitivity and specificity. Here enzyme amplification is applied to achieve high signal intensity. In order to increase the current signal, effective electron transfer and hybridization are both required. Electrochemical studies on the location of anchor label and report label have been carried out. Results indicate the hybridization efficiency and the surface hindrance to enzyme amplification are the two major factors contributed to the current signal. Human IL-8 RNA has been detected. For oligonucleotide target, the limitation of detection (LOD) is about 1 fM, while the LOD for IVT RNA is about 50 pM.

327 Nanoscale Photosynthesis, The Photophysics Of Neural Cells, And Artificial Sight Elias Greenbaum, M. S. Humayun, T. Kuritz, J. W. Lee, C. A. Sanders, B. Bruce, and I. Lee

Using the technique of Kelvin force microscopy, we have performed the first measurements of photovoltages from single photosynthetic reaction centers [1]. The measured values, typically 1 V or more, are sufficiently large to trigger a neural response. The goal of this project is insertion of purified Photo-system I (PSI) reaction centers or other photoactive agents into retinal cells where they will restore photoreceptor function to people who suffer from age- related macular degeneration (AMD) or retinitis pigmentosa (RP), diseases that are the lead-ing causes of blindness world-wide. Although the neural wiring from eye to brain is intact, these patients lack photoreceptor activity. It is the ultimate goal of this proposal to restore photo-receptor activity to these patients using PSI as the optical trig-ger. In principle, the approach should work. PSI is a robust integral membrane molecular photovoltaic device. Depending on orientation, it can depolarize or hyperpolarize the cell mem-brane with sufficient voltage to trigger an action potential.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 458 Working towards a Sample Preparation Device with Carbon Nanotubes James t. Lin, Weijie Wan, John T. W. Yeow

Advances in microfabrication have introduced new possibilities for automated, high-throughput biomedical investigations and analyses. Physical effects such as dielectrophoresis (DEP) and electroporation can be used to manipulate particles in solution to coordinate a sequence of bioanalytical processing steps. DEP is accomplished with nonuniform electric fields that can polarize particles such as cells and DNA in suspension causing translational or rotational movements. Electroporation is accomplished with high strength electric fields that can create pores on the plasma membranes of cells. Membrane breakdown under high voltage is associated with cell deaths and the dispersal of cell contents including nucleic acids and protein. This paper presents summaries of experiments in both dielectrophoresis and electroporation. In electroporation experiments, carbon nanotubes (CNTs) are used to reduce the voltage requirements for portable lab-on-a-chip devices with strict power limitations. The concept is to create a sample preparation device which is capable of separating cells into multiple chambers for cell lysis by CNTs and releasing their DNA for further analysis.

115 Room Temperature Microchannel Fabrication for Microfluidic System Da-Jeng Yao, Po-Yu Chen

This paper reports a novel method to fabricate micro structures under room temperature, which could be used in micro fluidic system. This designed micro fluidic system, used for particle separation, can be automatically transported by liquid evaporation at the outlet without any external driving force. The micro fluidic system chip was easy to be fabricated under room temperature environment. The whole system need not dynamic temperature control system and driving pump, the cost of whole system would be very cheap.

428 Manufacture of Nanoscale Structures through Integrated Top-down and Bottom-up Approaches Tak Sing Wong, Branden Brough, Karen Christman, Christopher M. Kolodziej, Adam Huang, Robert Lam, Jeffrey G. Forbes, Kuan Wang, Heather D. Maynard, Chih-Ming Ho

Manufacturing technology designed to interface natural molecular components with a solid surface is fundamental in building higher-order complex functional structures from the nanoscale domain. Here, we present top-down fabrication approaches that define and guide the growth of natural molecular components, such as inorganic ions and proteins, and investigate how external control parameters can influence the growth of the resultant structures. Specifically, electron beam lithography was used to create nanoscale hydrophilic patterns on a

57 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... hydrophobic substrate to entrap attoliter volumes of liquid containing inorganic ions. As these nanoscale droplets evaporated, they initiated the crystallization of the ions, resulting in the synthesis of nanoscale inorganic structures (~50 nm – 300 nm). Through the use of scanning electron and atomic force microscopy, the effects of external control parameters, such as humidity and size of the hydrophilic patterns, to the formation of the resulting structures were quantified. In a separate but related effort, self-assembling actin filaments were grown from nanoscale binding sites created by electron beam lithography. High-aspect-ratio (~ 1000:1) structures were demonstrated while maintaining the nanoscale surface geometries. These two technologies have laid down a foundation for the systematic study of these synthesized structures in artificial engineered environments.

476 Annealing Effects on Structural and Magnetic Properties of Cobalt-doped TiO2 thin film by Ion Implantation H.P. Ho, Wing Yan Luk, Joerg Lindner, Ning KE

In this work, TiO2 thin films were prepared by RF sputtering on thermally grown silicon dioxide layers on Si substrates. Cobalt implantation was performed at an extraction voltage of 65 kV using a metal vapor vacuum arc (MEVVA) ion source to various doses ranging from 4x1015 cm-2 to 4x1016 cm-2. Post-implantation annealing was performed in a vacuum chamber (2-7x10-6 Torr) at temperatures ranging from 400°C to 700oC for 2 and 4 hours. The implantation dose was determined by Rutherford backscattering spectrometry. The microstructures were studied by energy filtered and high-resolution transmission electron microscopy, and x-ray diffractometry. The magnetic properties were studied by vibrating sample magnetometry. The dependence of the magnetic properties on the implantation and annealing conditions were studied in detail. The saturation magnetic moment per implanted Co atom (MS) seems to increase with increasing dose within the implantation dose range in this study. At a fixed dose, the MS value also shows a generally increasing trend with increasing annealing temperature and annealing time. Quite a number of samples showed MS values exceeding the bulk Co value of 1.69 µB/Co significantly and the maximum MS value observed is about 3.16 µB/Co. Such high MS values indicate that the RTFM must not come from Co clusters alone. It was also found that the implantation temperature has significant effects on the magnetic properties. Possible origins of the room temperature ferromagnetic properties will be discussed in conjunction with the structural properties.

58 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

MEMS and NEMS (1C3)

Time: 13.30 – 15.30 Room: 604 Session Chairs: Joseph Talgader and William P. King

32 CMOS Digitalized Peak Detector for a MEMS-Based Electrostatic Field Sensor Guoping Cui, Haigang Yang, Shanhong Xia

This paper presents a new CMOS peak detector that directly converts the peak of a sine wave signal to its digital representation. This peak detector focus only on peak points which carry the information of the electrostatic field, implifying the sample-and-hold requirement. By making use of the voltage to time conversion (or voltage to duty cycle conversion), this method boasts the advantage of high resolution compared with the conventional way of using AD converters. The circuit is fabricated in Chartered 0.35um technology and is tested.

99 Array of Microcantilever Heaters with Integrated Piezoresistors Jungchul Lee, William King

This paper presents improved design, fabrication, and characterization of a small 1D array of silicon microcantilever heaters with integrated piezoresistors. The fabricated microcantilever arrays are made from single crystal, doped silicon such that parasitic bending and eletromigration are suppressed for high temperature operation. Detailed characterization confirmed minimal thermal and electrical coupling between the resistive heater and the piezoresistor. The devices will be used for high speed atomic force microscopy and parallel scanning probe lithography. In addition, successful array integration of the micro heater and the piezoresistive sensor is the first step towards massive multifunctional microcantilever arrays.

59 IEEE-NANO 2007 Technical Digest

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107 Nanowire Electromechanical Logic Switch Qiliang Li, Curt Richter, Hao Xiong, john Suehle

We present the integration and characterization of nanowire electromechanical switches consisting of chemical-vapor- deposition grown silicon nanowires suspended over metal electrodes. The devices operate with the suspended part of the nanowire bent to touch metal electrode via electromechanical force by applying voltage. The reversible switching, high on/off current ratio, small subthreshold slope and low switching energy compared to current Si CMOS make the switches very attractive for logic device application. In addition, we have developed a physical model to simulate the switching characteristics and extract the material properties.

171 Quantum Well Nanomechanical Actuators with Atomic Vertical Resolution Jan Makowski, Joseph Talghader

We present a novel actuator capable of controlling the gap spacing between two quantum wells with atomic resolution. The device consists of two InGaAs quantum wells: one on the underside of a cantilever collapsed across a nanogap and the other on the surface of the substrate. The operating principle of the actuator relies on the temperature dependency of the adhesion energy. The displacement ranges continuously from 17 nm downwards to 5 nm upwards. The high precision of ±0.7 nm makes the actuator especially suited for investigating quantum-coupling effects.

182 Piezoresistor Design for Deflection Angles Decoupling Measurement of Two-Dimensional MOEMS Scanning Chi Zhang, Gaofei Zhang, Zheng You

A novel two-dimensional MOEMS scanning mirror with small volume, large deflection angles and high frequency is presented. A reflected optical beam on the mirror can be scanned more than 20 deg two-dimensionally. For the deflection angles decoupling measurement, piezoresistors are fabricated on the flexible beam linked with mirror. The appropriate crystal directions and doping types of the piezoresistors are designed to obtain the larger piezoresistive coefficients for the high sensitivities. Full Wheatstone bridges are adopted and the deflection angles of both directions are obtained independently and precisely. The deflection angles measurement sensitivities for two directions are 396mV/deg and 348mV/deg respectively.

60 IEEE-NANO 2007 Technical Digest

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294 PECVD Silicon Carbonitride NEMS Resonators for Biological Detection Applications Lee Fischer, Wally Qiu, Ni Yang, Mark McDermott, Stephane Evoy

We present the surface functionalization and resonant assaying of nanomechanical beam resonators fabricated from stress-tunable silicon carbonitride. Doubly-clamped beams were nanomachined from silicon carbonitride deposited from a plasma discharge using diethylsilane and ammonia as precursors. The intrinsic stress within the film was tuned through the precursor gas ratio during deposition, as well as through a post-deposition annealing process. Beams fabricated out of this material showed resonant frequecines ranging from 6.1 to 16 MHz, and quality factors as high as Q=26000. Resonant nanobeams were then vapor-phase functionalized with 3-mercaptopropyl trimethoxysilane. This funcationalization led to a distinct shift of the resonant frequencies of 6.1 kHz to 41.1 kHz corresponding to the added mass of the monolayer and beam dimesions. We will also present preliminary results on the attachment of avidin molecules to the surface via immobilized biotin, and the resonant assaying of this added mass.

429 A Microfluidic System for Rapid Bacterial Pathogen Detection Mai John, Wu Angela, Gu Wei, Mach Kathy, Liao Joseph

Existing MEMS electrochemical biosensors allows us to detect various strains of pathogenic bacteria in urine in less than 45 minutes. However, the urine preparation protocol is still a labor intensive 7 to 10 step process. We are in the process of designing, testing, and integrating various microfluidic components in PDMS in order to build an integrated lab-on-a-chip for rapid, bacterial pathogen detection. This paper will outline our initial efforts to integrate PDMS-based pump, mixer, and concentrator designs with our existing electrochemical sensor. Our design goal is to achieve 2 orders of magnitude net concentration of bacteria present in urine with the biofilters, and a 50% reduction of overall sample processing time to less than 20 minutes with rapid, active mixing at the micro-scale.

61 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

Best Student Paper Award Presentations (ID3)

Time: 13.30 – 15.30 Room: 605 Session Chairs: Fumihito Arai

80 Design and Fabrication of DNA-based Nanostructures using Plasmid-Protein Complex for Bio Device Hideki Furukawa, Tatsuro Endo, Yasuko Yanagida, Takeshi Hatsuzawa

This report describes that the design and fabrication of a DNA nanostructures (“Plasmid glasses”, “Plasmid chain”) using plasmid-protein complex. An experiment has been performed to form the plasmid using two types of 200bp DNA (“vector DNA”) obtained by dissecting pBR322 using restriction enzyme and biotin conjugated 30bp DNA (“insert DNA”). After ligation and introduction of streptavidin modified gold nanoparticle, the “Plasmid glasses” and the “Plasmid chain” have been obtained. And then, observation of “Plasmid glasses” using the Atomic Force Microscope (AFM) was carried out.

178 Single Semiconducting Zinc Oxide Nanowire Based Device for Thermal and Airflow Sensing Ding Wang, Rong Zhu, Zhaoying Zhou, Xiongying Ye

This paper reports a technology for fabricating a novel nanostructure-based device comprised of a single semiconducting zinc oxide (ZnO) nanowire suspended between two micro Au electrodes for sensor applications. The electric characteristics of the device were comparatively studied before and after Pt deposition using a focused ion beam microscope. In the studies, the potential applications for thermal sensing and airflow measurement were investigated. The temperature coefficient of resistance was estimated to be about -0.00261 -1. Compared with conventional sensors, this device takes advantages of ultra-low power and ultra-fast response.

62 IEEE-NANO 2007 Technical Digest

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317 Solid-State Electrochemical Stamping of Functional Metallic Nanostructures Keng Hsu, Peter Schultz, Placid Ferreira, Nicholas Fang

A new approach to direct metal nanopatterning with excellent lateral dimensional resolution and flexibility is introduced for fabrication of functional nano-structures. This technique is based upon the solid-state electrochemical dissolution of a metallic substrate at its interface with a patterned solid electrolyte stamp, and the subsequent formation of the complimentary pattern on the metal substrate as the solid electrolyte etches through the metal layer. Our experimental results demonstrate repeatable and high-fidelity patterning of metal structures with a wide dimension range (20μm to 50nm). As this process is carried out in ambient environment without the use of wet chemicals, its potential for use as a simple and yet high-throughput metal patterning technique offers a highly competitive approach to fabricating functional structures and devices such as chemical sensors and photonic devices.

337 MRI Driven Nano Biosensor Based on Deformable Polymers Coated Magnetoelastic Device Arnaud Chanu, Sylvain Martel

Recent advances in Interventional Magnetic Resonance Imaging (IMRI) allowed the navigation of millimeter- sized unthetered ferromagnetic cores in an in-vivo environment for potential drug delivery carrier applications. This paper presents how such technique can be adapted in order to obtain a nano scale bio sensor consisting in a agglomeration of magnetoelastic particles capable of wireless data transmission through the magnetostrictive effect produced by some magnetoelastic materials. The magnetoelastic’s resonant frequency shift produced by a bonded polymer mechanical shrinking or swelling allows physiological data measurement. Resonant state could be obtained using a custom made UHF RF MRI antenna for both, transmission and reception.

374 Controllable Direct “Writing” of Gold Nanostructures for Integrated Nanobiosensor Applications Murat Yapici, Hyungoo Lee, Jun Zou, Hong Liang

We report a new scanning probe based method to achieve a controllable direct “writing” of metallic nanostructures. By scanning a gold-coated scanning probe tip on a single crystal silicon surface in ambient environment, nano-sized gold dots and wires were directly formed as a result of direct gold material transfer from scanning probe tip onto silicon surface. Such gold nanostructures could be readily interfaced with silicon microelectronics for the development of integrated nanobiosensor systems.

63 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Carbon Nanotubes I (1E3)

Time: 13.30 – 15.30 Room: 606 Session Chairs: Yehia Massoud and Ti Kaneko

42 Resonance Tunneling Transistors Based on C60 Encapsulated Double-Walled Carbon Nanotubes Yongfeng Li, Toshiro Kaneko, Rikizo Hatakeyama

We report electrical transport properties of resonance tunneling transistors fabricated using C60-filled metallic double- walled carbon nanotubes. All the examined devices exhibit a strong negative differential resistance (NDR) behavior, and the high peak-to-valley current ratio more than 103 is observed at room temperature. Applied gate voltages exercise a great influence on the peak voltage of NDR.

43 Transport Properties of p-n Junctions Created in Single-Walled Carbon Nanotubes by Fe Encapsulation Rikizo Hatakeyama, Yongfeng Li, Toshiro Kaneko

Electronic properties of single-walled carbon nanotubes (SWNTs) filled with Fe nanoparticles are studied by fabricating them as the channels of field-effect transistors (FETs) devices. Our results reveal that Fe-filled SWNTs at low filling levels can exhibit high-performance p-n junction diode behavior. The synthesis of Fe-filled SWNTs is confirmed by transmission electron microscopy (TEM) observation, and magnetic properties of Fe encapsulated SWNTs are characterized by means of SQUID measurements.

61 Characterization of Stackless Vertically Aligned Carbon Nanotube Synthesized by Thermal CVD with Gravity Effect and Water-assisted Etching Anurat Wisitsoraat, Adisorn Tuantranont, Viyapol Patthanasettakul

In this work, thermal chemical vapor deposition with gravity effect and water-assisted selective etching have been employed to synthesize vertically aligned carbon nanotubes (CNTs) with high aspect ratio and low defect density. CNTs were grown by placing the substrate upside down along gravitation field and the periodic introduction of acetylene and low concentration water vapor in argon. The water vapor concentration and its introduction time are optimized for stackless growth of catalyst-removed CNTs. The water vapor

64 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... concentration of 300 ppm and introduction time of 3 minutes was found to be an optimum condition. Vertically aligned CNT of 8-15 nm in diameter and nearly 90 µm long is achieved. Characterization of CNT by transmission electron microscope (TEM) confirms that the CNTs are of high quality with low defects and almost catalyst-free. Moreover, the fabricated CNTs have been characterized for electron field emission application. The high aspect ratio CNTs exhibits reproducible low field emission with turn-on electric field of ~3 V/µm.

66 Schottky Barrier Engineering in Carbon Nanotube with Various Metal Electrodes Minhee Yun, David Perello, Moon Kim, Gane Hee Han, Dong Jae Bae, Seung Yol Jeong, Young Hee Lee

We investigated a thorough and comprehensive study on carbon nanotube/metal contact properties. Multiple devices, each of different metal electrodes for source and drain contacts, were fabricated on a single long (< 50 m) single-wall carbon nanotube (SWCNT). Preliminary results have shown the different Schottky barrier heights with aluminum, platinum (two different electrode thicknesses), nickel, molybdenum, and titanium.

68 Experimental Investigation of the Crosstalk Phenomenon and Current Stability in CNT Array Niraj Sinha, John Yeow, D.A. Jaffray

Different studie have reported that the carbon nanotube (CNT) based x-ray sources, which use field emission mechanism, can generate diagnostic quality x-rays with temporal resolution up to nanoseconds. They are capable of generating pulsed x-ray in arbitrary waveforms. In addition, these x-ray sources have the potential of miniaturization. Although a prototype of CNT-based multi beam field emission x-ray (MBFEX) source has been proposed, the axial resolution of the prototype was found to be poor, mainly due to limited viewing angle and small number of x-ray sources. This paper reports on 3 studies: (i) investigate the effect of increasing the number of directions; (ii) investigate the crosstalk phenomenon that arises from the combination of using only one CNT source and multiple gates/anodes as oppose to the traditional multiple CNT sources with multiple gates/anodes; and (iii) studying the current stability of CNT course over an extended period of time. Furthermore, a study related to the optimal distance between two neighboring gates/anodes to avoid the crosstalk phenomenon is currently non-existent in literature. The goal of this work is to experimentally determine the optimal distance between gates/anodes to avoid crosstalk. Another objective of this paper is to study the effect of different shapes of CNT pixels on the field emission performance. Finally, this experimental investigation aims to compare the effect of varying the voltage in continuous and discrete mode.

65 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 97 Effective Torsional Properties of Carbon Nanotubes Usik Lee, Changho Lee, Jaesang Lee

This paper proposes a dynamic continuum modeling method which allows us to evaluate effective torsional structural properties of carbon nanotubes (CNTs) without any need to assume their fictitious wall thickness. The dynamic continuum modeling method has been developed based on energy equivalence principle as well as molecular mechanics. The proposed dynamic continuum modeling method is applied to armchair single-walled CNTs to evaluate their effective torsional rigidities, inertia properties, and natural frequencies.

235 Selective Growth of High Purity Single-walled Carbon Nanotubes Network from Alcohol Shiuan-Hua Shiau, Chien-Wei Liu, Chie Gau, Chin-Lung Cheng, Sung-Wei Huang, Bau Tong Dai

This study presents a novel selective growth method to pattern the high purity and single-walled carbon nanotubes (SWNTs) network by alcohol catalytic chemical vapor deposition (ACCVD). A hydrophilic surface with a contact angle of 44.22o or even lower can disperse the Co/Mo catalysts easily and uniformly. Thus, the SWNTs network can be only formed and grown on the surface of SiO2 layer after a highly hydrophilic surface treatment. This novel method can be applied in the process of SWNTs electronics devices such as nanosensors or transistors.

352 Diameter-Dependant Thermal Conductance/Conductivity Models of Carbon Nanotubes Jae-Sung Lee, Do Seung Woo, Yong-Hyun Lee

Single- /multi-wall carbon nanotubes (CNTs) provide superior thermal properties and show promises for electrothermal applications. However, previous models of the multi-wall CNTs did not consider the diameter-dependant effects that are important to estimate thermal conductance of CNTs. This paper introduces a uniform diameter-dependant model to analyze the thermal conductance of multi-wall CNTs, which can also treat single-wall CNTs as a special case. Our results demonstrate that our model can provide accurate estimation that is consistent with the recent experimental results. This work also clarifies the previous inconsistency of thermal conductivity derivation, providing important guidelines for CNT thermal analysis.

66 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

Invited Session: Spintronics (1F3)

Time: 13.30 – 15.30 Room: 607 Session Chairs: S. Bandyopadhyay and Johan Akerman

151 Organic nano-spintronics Sandipan Pramanik, Bhargava Kanchibotla, Kalyan Garre, Marc Cahay, Supriyo Bandyopadhyay

We study spin transport in organic nanowires and point out that the spin relaxation time in organics can be exceptionally long. This makes organics ideal for many applications in spintronics since the longevity of spin polarization is an important criterion for virtually all spintronic devices. We also discuss other important characteristics of spin transport in organics. Finally, we present results pertaining to the transverse spin relaxation time (T2 time) in organics since it is critical for quantum computing applications.

314 Evaluation of Quantum Noise for Solid-State Quantum Information Processing Leonid Fedichkin, Vladimir Privman

We outline results on evaluation of loss of information in quantum information processors subjected to various types of interactions with noisy environment. Our calculations show that the appropriate measure of quantum information distortion due to noise can be based on maximal absolute eigenvalue norm of deviation of the density matrix of quantum registers. For a semiconductor quantum dot charge quantum bits interacting with acoustic phonons, the explicit expressions of this measure are derived. For a broad class of noise sources this measure is shown to have a useful property: it is additive and scales linearly with the size of the quantum register.

109 A Spin-Polarized Interband-Current Source based upon Staggered-Bandgap Heterostructures Weidong Zhang, Dwight Woolard, Peiji Zhao

A detailed analysis is presented of the spin-splitting in an interband-resonant-tunneling diode (I-RTD). In the framework of a six-band Kane model, the escape process of the heavy-hole valence electrons through the interband channel of a staggered-bandgap heterostructure is described. Numerical simulation results demonstrate the interband current to be highly polarized and define a new I-RTD based spin-polarized source.

67 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

133 Spin-polarized Thermionic Emission at the Interface of Ferromagnetic Metal and Organic Semiconductor Lei Zhang, Hao Dong, Ning Deng, Min Ren, Jiuning Hu, Pei-Yi Chen

We present a model to explain the spin-polarized injection from ferromagnetic metal into organic semiconductor. Thermionic emission mechanism is considered as the dominant transport mechanism at the interface at low bias. Boundary condition is determined from the relationship of the spin-dependent quasi-electrochemical potentials across the interface. The dependences of the current spin polarization on the control parameters, which include the Schottky barrier height at the interface, the spontaneous spin polarization in ferromagnetic metal, and the bias, are demonstrated.

190 A Novel Boundary Approach for Spin Polarized Transport in Pseudo-Spin-Valve Structure Jiuning Hu, Min Ren, Lei Zhang, Ning Deng, Hao Dong, Pei-Yi Chen

The interfacial effect on spin polarization is studied in a pseudo-spin-valve structure consisting of two ferromagnetic layers (FM) separated by a nonmagnetic metallic layer (NM). We adopt the macroscopic two-current drift-diffusion model and boundary conditions taking spin flip at FM/NM interfaces into account. The two FM/NM interfaces with respect to the spacer NM layer are combined into a single interface under some appropriate assumptions and new formulae for spin transport boundary conditions are derived. The analytical solutions of spin polarization for both side interfaces of the free layer are calculated from those boundary conditions.

246 Tunable Intrinsic Phase Shift Between a Spin Torque Nano-Oscillator and an AC Current YAN ZHOU, Johan Persson, Johan Akerman

We report on a preferred phase shift between a spin torque oscillator (STO) and an ac current injected at the intrinsic frequency of the STO. In the in-plane precession mode (IP) the STO adjusts to a state where its resistance (or voltage) lags the AC current about a quarter of a wave length. In the IP mode the preferred phase shift increases somewhat with the dc current. As the precession changes into the Out-Of-Plane (OOP) mode, it jumps by about 180 degree, i.e. the STO resistance now precedes the AC current about a quarter of a wave length. In addition, the phase shift can furthermore be tuned by changing one or more of the anisotropy field, the emagnetizing field or the applied field. At the IP/OOP boundary, the ac current mixes the two oscillation modes. The intrinsic phase shift will impact any circuit

68 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... design based on STO technology and will e.g. have direct consequences for phase locking in networks of serially connected STOs.

248 Impact of Magnetoresistance and Anisotropy on Synchronized Spin Torque Oscillators YAN ZHOU, Johan Persson, Johan Akerman

We have carried out detailed LLG simulations of pairs of serially connected Spin Torque Oscillators (STO), in parallel with a resistive load. To study the impact of realistic process variations on STO synchronization we let the two STOs have different in-plane anisotropy field (H_k). The simulation also provides for a time delay. We construct a phase diagram of the STO synchronization as a function of H_k, dc current (I_dc), at different time delay . While the synchronized state is originally very sensitive to STO process variations and can only sustain up to 4% H_k variation, the addition of a small time delay dramatically improves its robustness and allow as much as 145% H_k variation in the entire out-of-plane precession regime.

Applications of Nano Robots (1G3)

Time: 13.30 – 15.30 Room: 608 Session Chairs: Yunhui Liu and Masahiro Nakajima

162 Hardware Architecture for Nanorobot Application in Cerebral Aneurysm Adriano Cavalcanti, Bijan Shirinzadeh, Toshio Fukuda, Seiichi Ikeda

This paper presents an innovative hardware architecture for medical use of nanorobots proposed as an advanced and precise tool for brain aneurysm instrumentation and diagnosis. The feasibility of the outlined architecture is supported by nanobioelectronics, clinical data, and wireless technologies, as embedded integrated system devices for molecular machine data transmission and control upload. The upcoming therapeutic possibility of using nanorobots for aneurysm treatments is the natural result from some recent developments and trends in nanoelectronics, wireless communication, remote power transmission, quantum dots, nanotubes, SOI, lithography, biomedical instrumentation, genome mapping, and photonics. To illustrate the proposed approach, we applied advanced 3D simulation techniques as a practical choice on methodology for medical nanorobotics architecture and integrated system prototyping.

69 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 238 Direct Assembly of ssDNA-SWCNT Hybrids for Hybridization Detection Seungwon Jung, Misun Cha, Jaekon Hwang, Junghon Lee

Biosensors using nano materials, especially carbon nanotubes (CNTs), have been spotlighted recently. In this paper, we propose a novel method to detect DNA hybridization by using single walled carbon nanotubes (SWCNTs). SWCNTs were dispersed by single strand DNA (ssDNA) and hybridization was carried out in solution phase. After reaction, we deposited CNT-DNA hybrid with Composite Electric-field Guided Assembly (CEGA) method on 300 nm gap electrodes fabricated by nano imprint lithography (NIL). Significant changes of electrical properties before and after hybridization were measured.

325 Investigating the Motion of Molecular Machines on Surfaces by STM: The Nanocar and Beyond Jun Zhang, Andrew Osgood, Yasuhiro Shirai, Jean-Francüois Morin, Takashi Sasaki, James Tour, Kevin Kelly

To build up true molecular machines and understand the mechanics of nanoscale motion and manipulation in molecular system, we have created and investigated a family of molecules based around the concept of the Nanocar, which has the rolling wheels made of spherical fullerene or carborane molecules. Assisted by STM, we have successfully characterized and manipulated these molecules. In addition, we have observed the behavior of these systems when thermal energy is applied. These initial studies open a new realm of nano-sized mechanical, chemical, and electrical devices.

343 Acting on Nanoparticles Embedded in Magnetotactic Bacteria to Implement Propulsion and Steering for Microrobots Walder Andre, Sylvain Martel

A MEMS based micro-reservoir in standard CMOS process has been fabricated to embed Magnetotactic Bacteria (MTB) to form a bacterial propulsion system for a 550 µm × 650 µm autonomous untethered microrobot intended to operate in an aqueous medium. Each micro-reservoir embeds a 3-D CMOS micro-coil with a winding dimension of 6 µm × 6 µm with a depth of 10 µm, driven by a current of 65 µA collected from photovoltaic cells embedded onto the microrobot to generate magnetic field lines to control the swimming direction of the MTB being exploited for their motility. According to the form factor it is a complicated task to embody the MTB into the micro-reservoir. Here we will present some avenues susceptible to facilitate the integration of the bacteria into such micro-reservoirs. One of the methods for the encapsulation of the MTB in the bacterial micro-reservoir consists with the use of an external magnet placed iteratively at different locations with respect to the microrobot in order to direct the MTB toward the bacterial micro-reservoir aperture.

70 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 366 Measurement and Analysis of Interaction Forces between Carbon Nanotube Tip and Substrate Pou Liu, Masahiro Nakajima, Zhan Yang, Toshio Fukuda, Fumihito Arai

Carbon nanotubes have been used as building block for assembly of nanostructures and nanodevices. Therefore, the interaction between the carbon nanotube and the environment is important. Interaction forces between a single multi- walled carbon nanotube tip and a gold surface were investigated and measured with an AFM cantilever. We also found the electron beam irradiation can increase the interaction forces.

382 Multiple-Telescoping Multi-walled Carbon Nanotubes Fabricated inside a TEM Masahiro Nakajima, Pou Liu, Toshio Fukuda, Shigeo Arai

We present multiple-telescoping multi-walled carbon nanotubes (MWCNTs) fabricated inside a transmission electron microscope (TEM). A MWCNT was peeled off its outer layers by destructive fabrication process. The single MWCNT was picked up and positioned inside a scanning electron microscope (SEM) for in situ fabrication inside a TEM. The fabrication process is carried out by nanomanipulation system though hybrid nanorobotic manipulation system, which is integrated SEM and TEM manipulators. From TEM images, the raw MWCNT has some "gnarl" type defects and they are readily affected on the multiple-telescoping nanotube construction. The multiple-telescoping nanotube has a possibility of nano-scale low-friction bearing for the NEMS applications.

452 Fabrication and Characterization of Tree-like nanorod arrays for Bionic Gecko Foot-hairs Aiwu Zhao, Tao Mei, xinhua Lin, Lin Ni

A novel anodic aluminum oxide templates with hierarchically branched nanochannel were fabricated by a modified several steps anodic oxidation process. By using these templates, tree-like nanorod arrays have been fabricated. These tree-like arrays included polystyrene, polymethyl-methacrylat are obtained by a molding method in the branched nanochannel anodic aluminum oxide templates. The number of branching and dimensions can be controlled through branched nanochannel design and assembly. These tree-like nanorod arrays will be utilized as novel biomimetic dry adhesives in future space, microelectronics, MEMS devices and robot.

71 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Invited Session: Nano-Materials (1A4)

Time: 15.50 – 17.50 Room: 601 Session Chairs: Yonhua Tzeng and Chi-Kuan Sun

37 Optical Piezoelectric Transducer based Nanoultrasonics Chi-Kuang Sun, Kung-Hsuan Lin, Yu-Chieh Wen, Tzu-Ming Liu, Pai-Chi Li, Jen-Inn Chyi

In this work, we review our recent development on nanoultrasonics based on an optical piezoelectric transducer. By embedding strain patterns in piezoelectric nano-layers and by manipulating optical field intensity in temporal and spatial domains, THz nanoacoustic waves with an acoustic wavelength on the order of or shorter than 10 nm can be generated with a nanometer-scaled lateral spot size, much smaller than the excitation optical wavelength. Noninvasive subsurface ultrasonic imaging can thus be realized with a nanometer resolution.

425 Nano Carbons and Applications Yonhua Tzeng

Fabrication, characterization, and applications of carbon based nanostructures such as nanodiamond and carbon nanotubes will be presented. Excellent and unique properties of nanodiamond and carbon nanotube related materials will be reviewed. Innovative growth of Nanoscale diamond crystals on nanostructures such as nanotubes and the applications will be discussed. Processing and applications of carbon nanotube based transparent and conductive nano-sheets will be review with new applications presented.

430 Surface Effects on Metallic Nanowires and the Stability of Material Properties Carmen Lilley, Qiaojian Huang

Surface effects from contaminants and oxidation will be investigated for gold and copper metallic nanowires. The objectives are to investigate effects from adsorption and diffusion of C and/or O and their effects on resistance. Also, the possibility of using gold as a diffusion barrier will be investigated as part of this research.

72 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 51 Pattern Deposition of Electrosprayed Polymer Nanoparticles Dezhi Wu, Lingyun Wang, Daoheng Sun

Nanoparticles play an important role in applications, such as field emission display, drug delivery and antireflection coatings etc. Aided electrical field, which is generated by positive charges on the insulated photoresist, is introduced in this paper to deposit as-sprayed polymer nanoparticles to the patterned area of the substrate. The experiment results demonstrate that when the solution concentration of polyethylene oxide (PEO) is smaller than 6%, spherical nanoparticles can be electrosprayed from spinneret and the polymer nanoparticles which diameter is about 300nm are successfully deposited onto the patterned areas, such as bar, rectangle and circle, due to the electrostatic interactions between positive charges on the photoresist, induced negative charges from silicon and the as-sprayed PEO nanoparticles.

226 Charge Transfer of Alkanethiolate Adsorbed on Au(111) Surface : First-Principles Calculations Yu-Ching Shih, Sheng-Der Chao, Yeng-Tseng Wang, Heng-Chuan Kan, Kuang-Chong Wu

The electronic sturctures of the self-assembled monolayers (SAMs) of n-alkanethiolate [CH3(CH2)nS, n=1 - 5] on Au(111) surface have been investigated using the state-of-the-art first-principles calculations. The adsorption energy, the tile angle and the partial charge of n-alkanethiolate were presented. The charge transfer at the metal-molecule interface was calculated by the Mulliken population analysis. It was found that a net charge transfer of 0.11e ~ 0.15e from gold surface to n-alkanethiolate molecules. Most of the charge transfer is accumulated in the carbon atom which is nearest to sulfur atom. The result shows that the charge transfer is independent of chain length of n-alkanethiolate.

232 Influence of Catalytic Layer on the Growing Behavior of ZnO Nanostructures Seong Hun Jeong, Dong-Geun Yoo, Jin-Hyo Boo

Single crystalline ZnO nanorods have been grown on various catalytic layer deposited silicon substrates by thermal evaporation process with/without Au catalytic layer. The mean size and shapes of the nanostructures were controlled mixed gas ratio and catalyst species. In addition, X-ray diffraction measurements show that ZnO nanorods had single crystalline atomic structure and pure compositions with no any impurities. In addition, the shapes and the size of ZnO nanostructures were controlled source-to-substrate distance, oxygen partial pressure and catalytic layer species. We investigated the growth behavior of the ZnO nanostructures by variation of the growth conditions.

73 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 280 Extraordinary transmission through Aluminum metal with superperiodic micro-cell arranged in a long- range periodic structure Yi-Tsung Chang, Chia-Yi Chen, Ming-Wei Tsai, Si-Chen Lee

This investigation present the results of the enhanced transmission of the Al film with perforated super-periodic micro- cells arranged in a long-range periodic structure. The individual micro-cell comprises a N ×N square holes array (where is number of isolated hole; = 3, 4 and 5). The period between micro-cells is varied to study its effect on the extraordinary transmission spectra and dispersion relations of surface plasmon polariton (SPP), the thickness of the Al film thickness is about 200 nm. The zero-order transmission spectra and gray-scale dispersion relations of SPP of the Al film with super-periodic micro-cell arrays for samples are present. The transmission spectra of the hole array of periodic micro-cell display two peaks, they are called original SP mode and SP coupling mode. The transmission peak wavelength of surface plasmon is determined by the distance of adjacent micro-cells, suggesting a coupling resonance of surface plasmons in two adjacent micro-cells. The surface plasmon resonance of individual micro-cell can be seen when the distance between micro-cells increases.

Nano-Medicine (1B4)

Time: 15.50 – 17.50 Room: 603 Session Chairs: Vijay K. Varadan and Silvain Martel

28 Study on Space Morphology of Micromolecule Structure of Some Biologic Samples by AFM Yang Xueheng, Yang Hui, Han Xianwu, Chen Changshui, Liu Anping

In this paper, the space morphologies of micromolecule structure of some biologic samples were studied by AFM.IPC- 208B, which was successfully developed by Chongqing University. AFM.IPC-208B is a high-resolution AFM, and its lateral and vertical resolution can reach 0.1 nm and 0.01 nm, respectively. The space morphologies of molecular structures of glutathione adulterated with zinc ion, target gene and sheep anti huama immunoglobulin-G were observed by AFM.IPC-208B, and their structural parameters were also measured. The space morphology of molecular structures of the above materials have never been seen in home and abroad reports.

74 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 69 Pyramid-Shaped Tips Based Polymer Microneedles for Transdermal Drug or Nano-Particle Delivery Baojian Xu, Defeng Zhu, Dongfeng Yin, Qinghui Jin, Shen Gao, Jianlong Zhao

This paper reports on polymer solid microneedles with pyramid-shaped tips and nickel shields for transdermal transportation of drug molecules, bio-macromolecules, or nano-particles. Microelectromechanical system (MEMS) techniques, such as masking, etching, alignment, sputtering, electroplating, were adapted to produce polymer microneedles with sharp tips to reduce the force to pierce into skin. Polymer microneedle piecing testing and methylene blue dye experiment reveal that microneedles could destroy the corneums of mouse ventral skin. Finally, arrays of polymer microneedles were proven to increase permeability of mouse ventral skin to a macromolecular protein, human serum albumin (HSA) and DNA vaccine, by up to three orders of magnitude. The polymer microneedles can be successfully fabricated with an appropriate geometry and sufficient strength to dramatically increase transdermal drug delivery or nano-particle transportation.

78 Unraveling gene regulatory networks using an integrated microfluidic platform Pak Kin Wong, Fuqu Yu, Ren Sun, Chih-Ming Ho

Systematic investigation of complex cellular systems using micro and nano devices has distinctive advantages over traditional approaches. The capability of performing dynamic stimulation and real-time monitoring of cells provides powerful tools for investigating dynamical biological systems, such as gene regulatory networks. In this work, we report a generic microfluidic platform which is capable of long term cell cultivation, for investigating the complex dynamics of a transcription factor, nuclear factor kappa B (NF-κB). Transient dynamics of the NF-κB activated gene expression were measured at the single cell level and the results were compared to a computational model. The effects of using a reporter gene for measuring NF-κB activities were investigated. Several key parameters in the regulatory networks were identified and their roles in NF-κB autoregulation were studied.

164 Surface Energy Induced Patterning of Polymer Nanostructures for Cancer Diagnosis and Therapy Wenchuang (Walter) Hu, Fern Yoon, Adam Crouch, Li Tao, Heather Hillebrenner, Jagadeesh Setti Guthi, Moon Kim, Jinming Gao

We have developed a new simple method to pattern discrete polymer micro and nanostructures. A Si template is patterned by lithography and selective surface treatment to have spatially different surface energies that induce microfluidic self-patterning of polymer layer spincoated on it. Moreover, by combining this method with diblock polymer engineering, we expect to produce monodisperse, shape-specific polymer nanoparticles for ultra-sensitive MRI cancer detection.

75 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 198 The Electric Field Assisted Drug Release from Polyacrylamide Hydrogels Sumonman Naimlang, Anuvat Sirivat

The release mechanisms and the diffusion coefficients of salicylic acid -loaded polyacrylamide hydrogels were investigated experimentally by using a modified Franz-Diffusion cell at the temperature of 37 0C to determine the effects of crosslinking ratio and electric field strength. The fabricated hydrogels retain their physical shapes and sizes during the experiments along with data reproducibility. A significant amount of salicylic was released within 48 hours from the hydrogels of various crosslinking ratios, with and without electric field. The release profile was found to follow Q vs. t1/2 linear relationship. Diffusion coefficient, determined from the Higuchi equation, increases with electric field strength and reach maximum values at electric field strength of 0.1 V due to the electrophoresis of drug and it becomes saturated at electric field strengths between 0.5 – 10 V.

206 Micro Chip with Nanostructured Membranes for Cell Morphology Monitoring Jinjiang YU, Chao Chen, Ching-Hsiang Cheng, Qingjun Liu, Lidan Xiao, MO YANG

We present a novel nanostructured micro cell chip with impedance spectroscopy for monitoring cell morphology change non-invasively, in real time and independent of any fluorescent or radioactive probes. The key strategy is to integrate the nanoporous alumina membrane with silicon based microfluidic devices for the impedance monitoring. In this configuration, the impedance of even single cell can be measured at the low frequency range but not be affected by the electrode polarization. The KYSE30 human oesophageal cancer cells have been successfully cultured on nanoporous alumina membrane. Initial electrochemical experiments with lipid layers have been done to testify the functionality of this device. Further experiments for cancer cells will be explored in near future.

329 MR imaging of FeCo Nanoparticles, Magnetotactic Bacteria and Fe3O4 Microparticles for Future Drug Delivery Applications Ouajdi Felfoul, Pierre Pouponneau, Jean-Baptiste Mathieu, Sylvain Martel

MR imaging characteristics of novel potential drug delivery agents are investigated. Candidate carriers considered in this study are iron-cobalt (Fe-Co) nanoparticles, magnetotactic bacteria (MTB), and magnetite (Fe3O4) microparticles. The micro and nanoparticles are highly magnetic and can be steered using gradient coils. MTB, on the other hand, are microorganisms that naturally follow the magnetic field lines through a mechanism called magnetotaxis. These carriers share the capability to be controllable by magnetic field and to be detectable on MR images.

76 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 330 MRI-Based Magnetic Navigation of Nanomedical Devices for Drug Delivery and Hyperthermia in Deep Tissues Jean-Baptiste Mathieu, Sylvain Martel

MRI scanners can be used with minimum upgrades as integrated platforms for targeted delivery of micro/nanoparticles in the human body. In addition to being widespread in hospitals, they provide real-time tracking, control and propulsion of magnetic devices without penetration depth limitations. From these positive features, MRI appears as the perfect central element of a nanomedical navigation platform. Nevertheless, these assets are also coupled with constraints arising from the use of an already existing interventional platform. Potential carriers with magnetic nanoparticles are described. A simple magnetic suspension model taking magnetic dipole-dipole interactions into account is proposed.

Nano-Bio Sensors (1C4)

Time: 15.50 – 17.50 Room: 604 Session Chairs: Steve Tung and Albert Pisano

240 Quartz Crystal Microbalance Humidity Sensor using Electrospun PANI Micro/nano Dots Kata Jaruwongrungsee, Adisorn Tuantranont, Yongyuth Wanna, Anurat Wisitsoraat, Tanom Lomas

In this work, electrospun Polyaniline (PANI) micro/nano dots on Quartz Crystal Microbalance (QCM) sensor were used to sense the humidity at room temperature. A QCM humidity sensor is made by coating a low-cost commercial quartz crystal resonator with Polyaniline (PANI), which is one of the most promising polymers for sensing applications due to its relatively high stability. The electrospinning technique is used to coat the PANI nanometer-scale thin film to the electrode of quartz crystal. From experimental results, it was found that PANI coating on the QCM electrode is an effective way to improve humidity-sensing characteristic of QCM sensor. The PANI coated sensor has good response to the humidity with short response and recovery times. The humidity-sensitivity of PANI coated QCM sensor is increased by more than factor of 2 compared to uncoated QCM sensor.

77 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 307 THz Detection Cell for Sub-Wavelength Bio-Molecular Sensing Dwight Woolard, Peiji Zhao

A novel terahertz (THz) detection cell is presented for enabling a new type of sub-wavelength sensing. Here, this unique nanoscale sensor offers potential for the first-time development of a microscope-system capable of collecting terahertz (THz) frequency spectroscopic signatures directly from microscopic targets such as bio-molecules. This unique THz transmission microscopy concept is motivated by previous studies on bio-materials and bio-agents that have produced spectral features within the THz frequency regime (i.e., ~ 300 GHz to 1000 GHz) that appear to be representative of the internal structure and characteristics of the biological samples – e.g., DNA, RNA and bacterial spores. Hence, the new nanoelectronic device technology presented has important relevance for the defense against bio-threat agents and in future medical applications.

358 Micro/Nanoparticle Detection: An Impedimetric Microsensor Based on CMOS Technology Zhao Lu, Ryan Denomme, Sylvain Martel

This paper proposes a microsensor designed for the detection of single particle. The complete system, comprised of a sensing microelectrode array, a microelectronic circuit and a microfluidic device, is implemented on a conventional complementary metal oxide semiconductor (CMOS) chip. To establish a Lab-on-Chip system intended for detecting particles by impedance measurement, the microelectrode array is constructed with multiple metal and via layers by a standard 0.18μm CMOS process. The impedance variations caused by the presence of a particle are detected by a sensing circuit connected with microelectrodes on the same substrate. The system structure and post-processing of the CMOS chip are presented. The finite element analysis (FEA) simulation and preliminary experiments completed thus far have proved that identifying a single cell or particle is feasible with the system described here. Also presented are some potential micro and nanoscale applications of this chip that go beyond single particle detection that could be investigated in the future.

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453 Detection of E. coli O157:H7 DNA by a Novel QCM Biosensor coupled with Gold Nanoparticles Amplification Lijiang Wang, Qingshan Wei, Chunsheng Wu, Jian Ji, Ping Wang

In recent years, quartz crystal microbalance (QCM) plays an important role in many biological detections. In this paper, a QCM DNA sensor based on Au nanoparticle amplification for detection of E.coli O157:H7 DNA was described. The thioled surface of the Au electrode could immobilize many inner Au nanoparticles, then more thiolated single-stranded DNA (ssDNA) probes which was specific to E. coli O157:H7 eaeA gene could be fixed through Au-SH bonding. The hybridization was induced by exposing the ssDNA probe to the complementary target DNA, then resulted in the mass change and corresponding frequency shifts (Δf ) of the QCM. The outer avidin-coated Au nanoparticles could combine with the target DNA to increase the mass. The inner and outer Au nanoparticles with different diameters would play the “signal amplifier” role at different layer for improving the detection limit and sensitivity. The electrochemical techniques, cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS), are adopted to demonstrate and character each treatment. As low as 2.0×103 colony forming unit (CFU)/ml E. coli O157:H7 cells can be detected by this biosensor, so it is practical to develop a sensitive and effective QCM biosensor for pathogenic bacteria detection based on specific DNA detection.

457 Lithographic Patterning of Immobilized Enzymes in Chitosan Thin Films For Multi-Layer, Chemical/Biological Sensors Jim C. Cheng, Thomas H. Cauley, and Albert P. Pisano

Patterning of immobilized enzyme in spin-cast chitosan thin films will enable the creation of multi-layer biologically- active devices. Bulk immobilized enzymes used in multi-layer devices, in contrast to surface functionalized devices, enable the implementation and characterization of multi-stage assays. This paper demonstrates a procedure to immobilize enzymes into an aqueous chitosan solution, spin-cast that solution into a thin-film, and, finally, pattern that thin film using photolithography and oxygen plasma. Enzymes immobilized, deposited, and patterned using this process retain functionality, as shown with the example assay of β-D-galactosidase (β-Gal) and fluorescein di-β-D- galactopyranoside (FDG), a fluorogenic substrate for β-Gal. Hydrogel thicknesses of 200 nm to 1.5 µm (dry) were achieved and line widths down to 2 µm were observed.

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Characterization of Electrical properties for Nano-Materials (1D4)

Time: 15.50 – 17.50 Room: 605 Session Chairs: Cary Yang and M. Saif Islam

150 Monte Carlo Simulation of GaN n+nn+ Diode Including Intercarrier Interactions Dragica Vasileska, Ashwin Ashock, Olin Hartin, Stephen Goodnick

Here we consider both quantum-mechanical space quantization and electron-electron interactions effects, within a non- parabolic band scheme, as the first attempt at including such effects for nitride devices. Electron-electron scattering is treated using a real space molecular dynamics approach, which exactly models this interaction in a semi-classical framework. Results in particular focus on the strong effect of carrier-carrier scattering on the drain side of the doide, where rapid carrier relaxation occurs.

159 Current-induced Breakdown of Carbon Nanofibers for Interconnect Applications Hirohiko Kitsuki, Makoto Suzuki, Quoc Ngo, Alan M. Cassell, Kristofer Gleason, Jun Li, and Cary Y. Yang

Current-induced breakdown phenomena of carbon nanofibers (CNFs) for future on-chip interconnect applications are presented. Scanning transmission electron microscopy (STEM) techniques are developed to study the structural damage by current stress, including in situ electrical measurement in STEM, and sample-preparation-free STEM imaging. The analysis shows that the breakdown occurs along graphitic layers comprising the CNF and that the maximum current density has strong correlation with electrical resistivity. The effect of heat dissipation into the underlying substrate is also discussed using different experimental configurations.

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199 Contact Resistance of Epitaxially Interfaced Bridged Si Nanowires Anurag Chaudhry, M. Saif Islam

Single crystal Si nanowires are grown between highly doped prefabricated Si electrodes in the form of nano-bridges. Resistance values extracted from the current-voltage measurements for a large number of Si nano-bridges with varying lengths and diameters are used to propose a model which highlights the relative contribution of the contact resistance to the total resistance for nanowire based devices. We estimate the specific contact resistance based on our -cm2 for ourΩempirical model to be in the range 3.74×10-6 – 5.02×10-6 epitaxially interfaced Si nano-bridges. This value is almost two orders of magnitude lower than that of previously reported contact made to Si nanowires with an evaporated metal film.

211 The Effect of Substrates Temperature on Pentacene Thin Film prepared by Organic Thermal Evaporator Annop Chanhom, Jiti Nukeaw

The influences of substrate temperature on pentacene thin films have been investigated by using atomic force microscopy and UV- Visible spectroscopy. The pentacene thin films were prepared on glass substrates by organic source evaporation with various substrate temperatures from room temperature to 120°C. AFM images exhibit that the changing of substrate temperature (ambience temperature) has an effect on the increasing pentacene morphology grain size. Furthermore, the absorbance of thin films showed peaks at 1.98 eV, 2.14 eV and 2.30 eV are clearly diminished with increasing substrate temperatures. The effect of substrate temperature on pentacene thin films properties will be described in detail.

233 Effect of Process Variation on Emission Characteristic in Surface Conduction Electron-Emitters Hsiang-Yu Lo, Yiming Li, Hsueh-Yung Chao, Chih-Hao Tsai, Fu-Ming Pan, Mei-Chao Chiang, Mai Liu, Ting- Chen Kuo, Chi-Neng Mo

In this work, we explore the effect of process variation on emission characteristics in surface conduction electron- emitter. A novel structure of Pd thin-film emitter fabricated on the substrate with different nanogap is explored with the 3D Maxwell-particle-in-cell simulation. Four different deformation structures are examined, and it is found that the type

81 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 1 exhibits high emission efficiency due to a stronger electric field around the apex and larger the emission current among structures. The electron emission current is dependent upon the angle of inclination of surface.

256 Physical and Electrical Characteristics of HfO2/Hf Films Deposited on Silicon by Atomic Layer Deposition Do Seung Woo, Bae Kun Ho, Song Byung-Ho, Lee Jae Sung, Yong-Hyun Lee

The HfO2/Hf stacked film has been applied as the gate dielectric in MOS devices. The HfO2 thin film was deposited on p-type (100) silicon wafers by atomic layer deposition (ALD) using TEMAH and O3 as precursors, Prior to the deposition of HfO2 film, a thin Hf metal layer was deposited as an intermediate layer. The deposition temperature of HfO2 thin film was 350°C and its resulted thickness was 150 nm Round-type MOS capacitors have been fabricated on Si substrates with 200 nm-thick Pt top electrodes. We investigated and then compared the growth of inter layer between the HfO2/Hf/Si and the HfO2/Si structures during temperature annealing. The interfacial layer in our HfO2/Hf/Si structure was changed as the HfSiO film. The Hf metal layer sandwiched in the HfO2/Si structure was effectively suppressed to grow inter facial SiO2 layer. The MOS capacitance of the HfO2/Hf/Si structure was bigger than that of HfO2/Si structure. The dielectric constant in our structure is ~ 19.

Carbon Nanotubes II (1E4)

Time: 15.50 – 17.50 Room: 606 Session Chairs: Matt Gordon and J. C. Woo

108 Use of Numerical Simulations in Characterization of CNT Aggregation at the Electrodes during Dielectrophoresis Husein Rokadia, Steve Tung, Matt Gordon

We present a basis for establishing a direct correlation between numerical simulations and the experimentally observed aggregation of CNTs at the electrodes due to dielectrophoresis. Effects of a variety of governing parameters including electrode angles, frequency of applied potential, electrothermal fluid force and concentration of CNTs in the suspending medium are considered for the analysis.

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124 Field Emission from the Composite Structure of Silicon Tips and Vertical Carbon Nanotubes Li Junjie, Chen Shuxia, Gu Changzhi

The composite structure of silicon tips and vertical aligned carbon nanotubes (CNTs) was prepared using plasma enhanced hot filament chemical vapor deposition (PE-HFCVD) method on the silicon wafer, and Au/Ni film coated on the substrate was considered as a catalyst. High proportion hydrogen of 96% volume percentage and high total pressure are used during preparing process, and the pure CNTs, pure silicon tips, and the admixture of silicon tips and CNTs can be prepared by varying the total pressures, respectively. Scanning electron microscopy measurement shows that Si tips are formed in the vertical aligned CNTs, and the formation mechanism of this admixture was discussed. The results of field emission measurement show that this composite structure samples have very excellent electron field emission properties—low threshold field, high emission current density and stable emission current.

149 A High-Speed Thin-Film Transistor Printed on Flexible Substrate Using an Electronic-Grade Carbon Nantube Aqueous Solution Xuliang Han, Daniel Janzen, Jarrod Vaillancourt, Xuejun Lu

We report a high-speed thin-film transistor (TFT) printed on a regular transparency film. The carrier transport layer of this TFT is a high-density ultrapure carbon nanotube (CNT) thin film formed at room temperature by dispensing a tiny droplet of an electronic-grade CNT aqueous solution that does not contain any surfactant. This CNT-TFT exhibited a high modulation speed of 312 MHz. The unique printing compatible process demonstrated herein would enable mass production of large-area electronic circuits on virtually any desired flexible substrate at low cost and high throughput.

173 Flexible Strain Sensors Based On Pentacene-Carbon Nanotube Composite Thin Films Soyoun Jung, Taeksoo Ji, Jining Xie, Vijay Varadan

In this study, we present the first flexible strain sensors based on pentacene-carbon nanotubes (CNTs) composite thin films employing a Wheatstone bridge configuration. The sensors were characterized with bending at 0, 45, and 90 degrees with respect to the bridge bias direction, applying strains of 1, 1.25, 1.67, and 2.5 ‰, respectively. It was noted that the output signal of the sensors is substantially enhanced with the addition of CNTs, resulting from the improvement in conductivity of the sensing active layer. This strain sensor using the

83 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... CNTs-organic semiconductor matrix composite thin films as the active layer fabricated on flexible substrates is expected to possess better reliability as compared with conventional metallic foils and inorganic semiconductor strain sensors because of their low Young’s modulus (~5GPa).

273 High Efficiency Three-temperature Segment-CVD Synthesis of Multi-Wall Carbon Nanotube Forests. Tsung-Cho Wu, Shuo-Hung Chang

A high efficiency and well-controlled method to synthesize multi-wall carbon nanotube (MW-CNT) forests is reported. The three-temperature segment chemical vapor deposition (TTS CVD) system contains three individually operated heaters distributed along one quartz tube in CVD that provides controllable temperature gradient in quartz tube. The developed temperature gradient in TTS CVD significantly elongates lifetime of catalyst’s activity and further increase the growth efficiency using ethylene. By optimizing chemical compositions, catalyst film thickness, synthesis time, ethylene flow rate and temperature gradient, TTS CVD produced large scale and well-aligned MWNTs with height up to 2.3 millimeters in 45 minutes. The consumed ethylene was only one-fourth of regular dosages. The ultimate figure of merit is the specific CNT height that was defined as the grown CNT height divided by the product of the ethylene flow rate and the synthesis time. Our experimental results show the specific CNT growth height is 4 times of the published results. Most importantly, this technique sustained life time of catalyst’s activity and revealed the possible mechanism for growth of ultra-long CNTs.

321 Controlling The Orientation of Carbon Nanotubes in Nano Assembly Uchechukwu Wejinya, Yantao Shen, Ning Xi, King Wai Chiu Lai

This paper is aimed at developing new mathematical model describing precisely the rotation of carbon nanotubes in viscous medium. Simulation results are presented to for the developed model. Further studies such as parameter tuning and experiment will be conducted.

391 High Density Integrated Capacitors using Multi-Walled Carbon Nanotubes Arthur Nieuwoudt, Yehia Massoud

The development of high density integrated capacitors is crucial for the implementation of high performance mixed- signal integrated circuits. In this paper, we propose three possible high density

84 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... integrated capacitor configurations based on multi-walled carbon nanotubes (MWCNT). We develop an RLC model for the MWCNT-based capacitor configurations and examine the design trade-off between capacitance per area and losses due to parasitic resistance and inductance. The results indicate that the proposed MWCNT-based capacitor configurations can potentially offer orders of magnitude larger capacitance per area and comparable quality factors to traditional metal-based integrated capacitors.

472 Absorption Spectroscopic Study of DNA Hybridization using Single-walled Carbon Nanotubes Chengfan Cao, Jae-Boong Choi, Young-Jin Kim and Seunghyun Baik

Single walled carbon nanotubes show pronounced sharp UV-vis-NIR absorption peak distributions while they are individually dispersed in aqueous solution phase. In this paper, we present optical absorbance detection of DNA hybridization using developed ssDNA-SWNT conjugates. Hybridization of DNA oligonucleotides with their complementary sequences makes systematic red shifts of linked nanotubes in the near infrared region. Semiconducting tubes exhibit clear responses whereas metallic species do not. The results show that SWNTs may be used to selectively detect specific kinds of DNA oligonucleotides.

Spintronics and Nano-Magnetics (1F4)

Time: 15.50 – 17.50 Room: 607 Session Chairs: Stephen M. Goodnick and Massood Tabib-Azar

73 Nanoscale Bit-Patterned Media for Next Generation Magnetic Data Storage Applications Dmitri Litvinov, Vishal Parekh, Ch E, Darren Smith, James Rantschler, Paul Ruchhoeft, Dieter Weller, Sakhrat Khizroev

Design considerations and fabrication of bit-patterned magnetic recording media are presented. The application of ion- beam proximity printing, a high-throughput direct-write lithography, to media patterning is evaluated. Ultra-high magnetic anisotropy (Co/Pd) magnetic multilayers are analyzed as candidates for patterned recording layers. Following patterning, optimized multilayers are shown to exhibit coercivity values well in excess of 14kOe. It is found that the magnetization reversal in patterned bits takes place via domain wall nucleation and

85 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... propagation. The nucleation field and the location of the nucleation site strongly depend on the bit edge imperfections and contribute to finite switching field distribution. Playback off a bit-patterned media using various magnetic reader designs is analyzed using reciprocity theory.

241 Spin-MTJ based Non-Volatile Flip-Flop Zhao Weisheng, Eric Belhaire, Claude Chappert

Spin Transfer Torque (STT) writing approach based Magnetic Tunnel Junction (Spin-MTJ) is excellent candidate to be used as Spintronics device in Magnetic RAM (MRAM) and Magnetic Logic. We present the first Non-volatile Flip-Flop based on this device for Field Programmable Gate Array (FPGA) and System On Chip (SOC) circuits, which can make these circuits fully non-volatile by storing permanently all the data processed in the Spin-MTJ memory cells. The non- volatility enables to decrease significantly the start-up latency of these circuits down to some hundred pico seconds. By using STmicroelectronics 90nm CMOS technology and a behavior Spin-MTJ simulation Model, this non-volatile Flip- Flop has been demonstrated that it works not only in very high speed or low propagation delay, but also keeps low power dissipation and small cell surface.

323 Clocking Scheme for Nanomagnet QCA (NMQCA) Gary Bernstein, Mohmmad Alam, Wolfgang Porod, Sharon Hu, Michael Niemier, Michael Putney, Jarett DeAngelis

Quantum-dot Cellular Automata (QCA) is one candidate for beyond-the-roadmap computing, but has so-far been demonstrated only at low-temperatures. We are investigating the use of nanomagnets for building QCA architectures (NMQCA) that function at room temperatures. Our demonstrations so far have used external magnetic fields to accomplish clocking, but we are currently developing on-chip clocking schemes. We will discuss our on-chip clocking structures in the context of NMQCA circuit elements.

324 The Effects of Edge Defects on the Switching Characteristics of Bit Patterned Media Ch E, James Rantschler, Vishal Parekh, Paul Ruchhoeft, Dmitri Litvinov

We present the results of micromagnetic studies on realistic patterning defects in perpendicularly oriented magnetic thin films. Both undercut and line edge roughness are investigated systematically

86 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... with simulations using simple test structures to see the effect of the side wall angle, the roughness amplitude on a nanostructure’s switching field, and the roughness period on mathematically tractable figures. We then run simulations of hysteresis loops of actual 200 nm diameter nanostructures using AFM images to define the structure boundary and compare the results to MFM images of DC demagnetized dots.

355 Anomalous Hall effect in 2D semiconductors: the roles of impurity and phonon scatterings S.Y. Liu, Norman Horing, Xiao-Lin Lei, Makoto Sawamura

In the present paper, we employ a kinetic equation approach to investigate the side-jump and skew scattering AHE mechanisms in a two dimensional electron system considering extrinsic SO coupling induced by electron-impurity and electron-phonon scatterings, and also SO interaction induced directly by the external driving electric field. Note that AHE due to the SO coupling induced by electron-phonon scattering has not yet been examined in previous studies of AHE. We determine that in the case of the equilibrium-phonon approximation, the skew-scattering contribution from electron-phonon scattering to anomalous Hall current vanishes, while the side-jump contribution dominates the temperature dependence of AHC. Performing a numerical calculation, a quantitative comparison of contributions due to electron-impurity and electron-phonon scatterings is carried out.

371 Monte Carlo Simulation of Spin Polarized Transport in GaAs Nanostructures using an 8-Band k.p Model Brian Tierney, Stephen Goodnick

An ensemble Monte Carlo program, in conjunction with an 8-band k.p self-consistent solver, is used to simulate the temporal and spatial evolution of the spin polarization of current through a GaAs/AlGaAs heterostructure. The source and drain are modeled as two quantum point contacts that spin-polarize the current. Results relate the effect of an applied gate voltage on both the Dresselhaus and Rashba contributions to the D’yakanov-Perel spin scattering mechanism, the predominant spin scattering mechanism in AlGaAs/GaAs heterostructures.

383 Nanoscaled Ferromagnetic Single Electron Transistors Ruisheng Liu, Hakan Pettersson, Lukasz Michalak, Carlo Canali, Lars Samuelson

We report on recent results in fabricating nanoscaled ferromagnetic single electron transistors (F-SETs). One device design is assembled using the tip of an atomic force microscope. A single 30 nm Au disc, forming the central island of the transistor, is manipulated with Ångström precision into the gap between plasma

87 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... oxidized Ni source and drain electrodes. The tunnel resistances can be tuned in real-time during the device fabrication by re-positioning the Au disc. A second device design with Co electrodes and a central Au island is fabricated using a high-precision alignment procedure invoked during e-beam writing. As a result of reduced size, both devices exhibit clear single electron transistor characteristics at 4.2K. Magnetotransport measurements carried out in the Co/Au/Co device at 1.7K reveal a TMR of about 4%.

432 Electron Spin Resonance Imaging with AFM using Near Field Microwave Techniques Frank Li, Massood Tabib-Azar, J. Adin Mann

An unpaired electron possess two quantum states when external magnetic field presents. The energy gap between two quantum states increases linearly with the applied external magnetic field strength. The electron spin resonance (ESR) peaks at the moment that the microwave wave photo energy is exactly equal to the electron energy gap. Previous researches demonstrated spatially resolved electron spin resonances using evanescent microwave magnetic-dipole probe at 3.7 GHz on the ruby surface. The minimum number of detected electron spin centers was in the range of 20,000 to 30,000. This paper is to present a new ESR detection technique by integrating the atomic force microscopy (AFM) with near field microwave probe. With smaller probe tips, the spatially confined magnetic field is expected to increase the sensitivity of ESR detections. Both AFM and near field microwave probe techniques are non-destructive and non-invasive measurement techniques. Thus, the new technique will be a powerful instrument for many applications that include the detection of material defect pockets, detecting free radicals in biological tissues, and the analysis of structure and dynamics of bio-membranes. Our ultimate objective is to spatially detect single electron spin center and use the single electron as one quantum bit in future spintronic devices.

88 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Nano Robotic Manipulation (1G4)

Time: 15.50 – 17.50 Room: 608 Session Chairs: Yu Sun and Yangmin Li

10 Design Modification of a 3-PRC Compliant Parallel Micromanipulator for Micro/Nano Scale Manipulation Qingsong Xu, Yangmin Li

The requirements of micro/nano scale manipulation have stimulated the activities around the design and development of new micromanipulators with ultrahigh precision recently. A novel compliant parallel micromanipulator (CPM) with 3- PRC architecture has been proposed in previous works of the authors. However, it has been found that there exist some drawbacks in the preliminarily designed CPM in terms of stress stiffening, buckling phenomenon, large parasitic motions, and limited workspace, etc. For the sake of getting rid of these disadvantages, the original 3-PRC CPM is modified in the paper so as to make it possible to be applied in micro/nano scale manipulation fields. Not only the design modification precesses are presented in details, but also the performance validations of the modified CPM are conducted via simulations with ANSYS software.

11 Dynamics Analysis of a Modified 3-PRC Compliant Parallel Micromanipulator Shaorong Du, Yangmin Li

The dynamics of a 3-PRC (three-prismatic-revolute-cylindrical) compliant parallel micromanipulator (CPM) is investigated in this paper, which is quite necessary once the condition of the high frequency control is concerned. By expressing both potential and kinetic energies of the CPM in terms of the chosen generalized coordinates, the dynamic equation is established by resorting to the Lagrangian approach. And the dynamic model is validated by the finite element analysis performed in ANSYS software, where the modal analysis is carried out with the mode shapes and natural frequencies extracted. Furthermore, as a further utility of the derived model, the variation tendency of the natural frequency versus the design parameters are obtained as well. The generated results are valuable for both the design and control of a 3-PRC CPM for micro/nano scale manipulation.

89 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 65 Magnetic Field – based Position Detection Technique for Permanent Magnet Linear Synchronous Motors Huixing Zhou, Yiqiang Li, Gaili Gao, Yufei You

This paper addresses the problem of position detection for the permanent magnet linear synchronous motors (PMLSM). A novel scheme based on PMLSM’s magnetic field is proposed. The method detects the value of the magnetic field utilizing at least two analog Hall sensors which are arranged along the direction of the linear motor. The sensors are fixed on the mover and detect the real-time position of the mover through current magnetic field value. The experiment shows that the shape of the curve of the detected magnetic field is almost same as the shape of the curve of sinusoids. So a sinusoid fitting method is used to find a sinusoidal function which can fit the magnetic field data. A farther mathematical method is developed to interpolate the normalized sinusoidal curve and two quadrature signals are produced which can be used for standard driver. The expensive liner optical encoder could be replaced by a device with this method. Experiments on a U-shaped linear motor have shown the effectiveness of the proposed idea which can be used for micro or nano motion control.

135 A new freeze tweezer based on thermoelectric effect for manipulating micro objects Ru Changhai, Wan Xinliang, Ye Xiufen, Guo Shuxiang

Manipulating small or micro objects has been a big challenging task in many areas. As the most basic tool to manipulate, fabricate, characterize, assemble and test the micro scale devices and biological samples, micromanipulation keeps receiving attentions over the area of micro technology especially micro automation. Research along this direction is becoming a major stream in the world. In this paper, we present a new type of freeze tweezer using the freezing force of a volume of nucleotide to manipulate and assemble micro objects in an aqueous state. This new type device based on the thermoelectric effect have been fabricated and have been successfully used to complete picking micro objects.

90 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 261 Real-time Rigid Body Visual Tracking for Micro/Nanorobotic Manipulation Bradley Kratochvil, Lixin Dong, Bradley Nelson

As researchers continue to investigate the nano domain, robotic tools are increasingly called upon to perform more complex manipulation tasks. These operations are primarily open-loop, due to the limited number of feedback options with the required precision. By closing the loop for positioning control with the end effector, a variety of strategies such as bilateral telemanipulation or automated manipulations become possible. One source of this feedback is the image generated by an electron microscope. Real-time visual feedback from electron microscopes are typically noisy and pose significant challenges to an image processing system. This paper proposes a rigid model based algorithm for object tracking in a scanning electron microscope. The use of domain specific knowledge by the introduction of three- dimensional object models can be used to provide extra information to the tracking process and increase the system precision.

353 Adaptive backstepping Control of a Micro-needle Micro-pump Integrated Insulin Delivery System for Diabetes Care Ruoting Yang, Mingjun Zhang, Tzyh-Jong Tarn

This paper presents a dynamic model and corresponding control strategy for a micro-needle micro-pump integrated system proposed for subcutaneous insulin injection for diabetes care. The system consists of a piezoelectric micro- pump, multiple silicon micro-needles, insulin reservoir, wireless telemetry and remote control components. The piezoelectric micro-pump is remotely controlled through wireless telemetry. The dynamic model can be used to analyze dynamics of the integrated micro-device and develop feedback control strategy. An adaptive backstepping control with nonlinear observer is developed based on the dynamic model.

402 Millimeter-Sized Nanomanipulator with Sub-Angstrom Positioning Resolution and Large Force Output Xinyu Liu, Jianhua Tong, Yu Sun

Nanomanipulation in space-limited environments (e.g., inside SEM, and particularly in TEM) requires small-sized nanomanipulators that are capable of producing sub-nanometer positioning resolutions and large output forces. This paper presents a millimeter-sized MEMS-based nanomanipulator with a positioning resolution of 0.24Å and an output force capability of 100μN. To our best knowledge, this is the highest motion resolution ever reported. A novel mechanism is employed to convert micrometer input displacements, generated by conventional electrostatic comb- drive microactuator, into sub-angstrom output displacements. A capacitive displacement sensor is integrated and used for closed-loop positioning. The millimeter-sized nanomanipulator can be applied to characterizing and manipulating nano-materials.

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IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... August 4, Saturday, 08.30 – 10.00

Room 601 Plenary Lectures (2A1)

Prof. Pallab Bhattacharya Charles M. Vest Distinguished University Professor of Electrical Engineering and Computer Science, University of Michigan, USA Topic: High-Performance Long-Wavelength Quantum Dot Lasers Biography Pallab Bhattacharya is the Charles M. Vest Distinguished University Professor of Electrical Engineering and Computer Science and the James R. Mellor Professor of Engineering in the Department of Electrical Engineering and Computer Science at the University of Michigan, Ann Arbor. He received the M. Eng. and Ph.D. degrees from the University of Sheffield, UK, in 1976 and 1978, respectively. Professor Bhattacharya was an Editor of the IEEE Transactions on Electron Devices and is Editor-in-Chief of Journal of Physics D. He has edited Properties of Lattice-Matched and Strained InGaAs (UK: INSPEC, 1993) and Properties of III-V Quantum Wells and Superlattices (UK: INSPEC, 1996). He has also authored the textbook Semiconductor Optoelectronic Devices (Prentice Hall, 2nd edition). His teaching and research interests are in the areas of molecular beam epitaxy of compound semiconductor heterostructuress, low- dimensional quantum confined systems, nanophotonics and optoelectronic integrated circuits. His current research is in the areas of high-performance quantum dot lasers, quantum dot infrared photodetectors, photonic crystal quantum dot devices, spin-based heterostructure devices and nitride-based heterostructure devices. From 1978 to 1983, he was on the faculty of Oregon State University, Corvallis, and since 1984 he has been with the University of Michigan. He was an Invited Professor at the Ecole Polytechnic Federale de Lausanne, Switzerland, from 1981 to 1982. He has served on the Advisory Board of the Electrical and Communications Systems Division at the National Science Foundation. He has also served on several other committees and panels in academia, government, and industry and has chaired international conferences.

Professor Bhattacharya has received the John Simon Guggenheim Fellowship, the IEEE (EDS) Paul Rappaport Award, the IEEE (LEOS) Engineering Achievement Award, the Optical Society of America (OSA) Nick Holonyak Award, the SPIE Technical Achievement Award, and the Quantum Devices Award of the International Symposium on Compound Semiconductors. He has also received the S.S. Attwood Award, the Kennedy Family Research Excellence Award, and the Distinguished Faculty Achievement Award from the University of Michigan. He is a Fellow of the IEEE, the American Physical Society, the Institute of Physics (UK), and the Optical Society of America.

93 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Abstract

The desirable characteristics of a semiconductor laser required for optical interconnects include uncooled operation at wavelength λ ~ 1.3–1.55 μm, large modulation bandwidth, and small chirp and α-parameter. One of the materials of choice is self-organized InAs quantum dots grown on GaAs or InP substrates. Conventional quantum dot lasers, however, exhibit poor performance, such as large temperature dependence of the threshold current and small modulation bandwidth. It has been recognized that these non-ideal characteristics are directly related to the presence of wetting layer states, closely spaced hole energy levels, and large spectral broadening in quantum dots. Special techniques, such as p-doping and tunnel injection, have been demonstrated to be very effective in alleviating these problems to a large extent. In the scheme of tunnel injection, cold carriers are directly injected into the lasing ground states of quantum dots by phonon assisted tunneling from the injector well, leading to minimized hot carrier effects and greatly increased differential gain and modulation bandwidth. P-doping, on the hand, provides excess holes in the dots. Deleterious effects, such as carrier spreading and gain compression due to thermally broadened hole distributions, can be largely eliminated. The effectiveness of these special techniques, as well as the performance of InAs quantum dot lasers are, ultimately, strongly influenced by the quality and spectral broadening of the dots. In this context, we have investigated the growth kinetics and characteristics of long wavelength (1.3–1.65 μm) InAs pseudomorphic and metamorphic quantum dot/dash lasers grown on GaAs and InP substrates, wherein special techniques of p-doping and tunnel injection are incorporated.

The growth and characteristics of p-doped 1.3 μm tunnel injection quantum dot lasers are first described. The device active regions consist of five well-dot tunnel heterostructures. Electrons from the injector well are made to tunnel at an energy close to the dot first excited states and separated from them by the energy of a longitudinal optical phonon. We have determined, theoretically and experimentally by pump-probe differential transmission spectroscopy measurements, that the relaxation time from the dot excited states to the ground state is very small, ~1–2 ps, if the excited states are filled with electrons. This is due to very efficient electron-hole and electron-electron scattering in the dots under large injection (lasing) conditions. The lasers exhibit temperature invariant operation (T0 ≈ ∞) in the temperature range 5–70 ºC. Detailed analysis undertaken by us provides evidence that the temperature dependence of Auger recombination in the quantum dots explains this behavior. From small-signal modulation measurements, we measure a maximum -3dB bandwidth of 11 GHz. The devices also exhibit near-zero α-parameter and extremely small chirp (< 0.2 Å).

94 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... To extend the emission wavelength of InAs quantum dot lasers on GaAs to 1.55 μm, metamorphic heterostructures have to be used, due to the large strain. By detailed investigation of the growth kinetics, we have achieved nearly dislocation-free In0.15Ga0.85As/In0.15 Al0.35Ga0.50. As metamorphic quantum dot laser heterostructures that exhibit intense and narrow (linewidth ~ 30 meV) photoluminescence emission at 300 K, comparable to state-of-the-art pseudomorphic 1.3 μm InAs quantum dots. Utilizing the techniques of p-doping and tunnel injection, we have achieved high

2 performance 1.5 μm metamorphic InAs quantum dot lasers that exhibit ultra-low threshold current (Jth = 63 A/cm , a

reduction by a factor of more than 10, compared to previous reports), nearly temperature invariant operation (T0 = 620

K), large modulation bandwidth (f-3dB = 8 GHz), and near-zero chirp and α-parameter.

Additionally, we have performed detailed analysis of the DC and dynamic characteristics of the unique devices. The role of p-doping and tunnel injection in enhancing the performance of quantum dot lasers is also examined. These results, together with our recent achievement of high performance InAs quantum dot/dash lasers on InP and Si will also be presented. *Work supported by ARO and DARPA.

95 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

August 4, Saturday, 08.30 – 10.00

Room 601 Plenary Lectures (2A1)

Prof. Yahachi Saito Professor, Department of Quantum Engineering Nagoya University, Japan Topic: Carbon Nano-Emitters: Fundamental Properties and Applications

Biography

1) Date of Birth: February 28, 1953

2) Education: March, 1975 Bachelor Degree (Engineering), Nagoya University March, 1977 Master Degree (Engineering), Nagoya University March, 1980 Doctor of Engineering, Nagoya University

3) Professional Career April, 1980 Research Scholar of Japan Society for the Promotion of Science January, 1981 Assistant Professor of Toyohashi University of Technology (Technology Development Center) November, 1985 Assistant Professor of Nagoya University (Faculty of Engineering, Department of Applied Physics) February, 1990 Associate Professor of Mie University (Faculty of Engineering, Department of Electrical and Electronic Engineering) April, 2000 Professor of Mie University April, 2004 - present Professor of Nagoya University (School of Engineering, Department of Quantum Engineering)

4) Awards 2000 Award for best original paper, Japan Society of Applied Physics 2001 Vacuum Technology Award, Vacuum Society of Japan 2004 Yazaki Arts and Science Award, Meritorious Achievement Award, Yazaki Memorial Foundation for Science and Technology 2006 Prize for Science and Technology, Ministry of Education, Culture, Sports, Science and Technology (MEXT) 2007 Distinguished Paper Award, 2007 International Symposium of Society for Information Display

96 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Abstract Carbon nanotubes (CNTs) possess various unique properties such as a needle-like shape with nanometer-size diameter, high mechanical strength, chemical stability and high electrical conductivity, which are advantages as field electron emitters. In this talk, fundamental emission properties of CNTs revealed by field emission microscopy (FEM) and in-situ transmission electron microscopy (TEM) are presented, and applications of these nano-emitters to field emission displays (FEDs), X-ray sources and electron microscopes (EMs) are reviewed.

Field emission of electrons from CNTs capped by curved graphite layers containing pentagons is dominated by tunneling through pentagons, as revealed in Fig. 1 (a). When a gas molecule is adsorped on the surface of the CNT cap (preferentially on the pentagon), emission current is enhanced in a step-wise fashion by resonant tunneling as shown in Figs. 1 (b) and (c). Dynamic behaviour of nano-emitters and their degradation mechanism have been studied by TEM, and sublimation of CNTs from their tips was observed (Fig. 2) in addition to reversible standing and lying without serious structural damage.

CNT films produced by chemical vapor deposition techniques and screen printing methods have been applied to field emitters in display devices such as lighting elements, FED panels and backlight units. Single CNT emitters are expected suitable for obtaining a focused electron beam with sub-nanometer diameter because a virtual source size of electrons is presumably less than 1 nm and because the energy spread of emitted electrons is only one-third of 1 eV. Exploiting these properties of carbon nano-emitters, scanning EMs and micro-focused X-ray sources are being developed.

(a) (b) (a) (b)

(c) anode

Fig. 2 TEM pictures of bundles of double-wall CNTs at (a) 60 V, 2.5 µA, and (b) 100 V, 12 µA.

Fig. 1 FEM images of a CNT emitter and a time-trace of emission current.

97 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... August 4, Saturday, 10.30 – 12.00

Room 601 Special Keynote Lectures (2A2)

Prof. Chennupati Jagadish Federation Fellow and Professor, Semiconductor Optoelectronics and Nanotechnology Group, Dept. of Electronic Materials Eng., Ressearch School of Physical Sciences and Engineering The Australian National University, Australia Topic: Growth, Structural and Optical Properties of III-V Nanowires for Optoelectronic Applications

Biography

Professor C. Jagadish, FAA, FTSE ARC Federation Fellow Convenor, ARC Nanotechnology Network President-Elect, IEEE Nanotechnology Council Research School of Physical Sciences and Engineering Australian National University, Canberra

Professor Jagadish was born and educated in India and worked in India and Canada, prior to moving to Australia in 1990. He is currently an ARC Federation Fellow, Professor and Head of Semiconductor Optoelectronics and Nanotechnology Group in the Research School of Physical Sciences and Engineering, Australian National University. He is also Convenor of the Australian Research Council Nanotechnology Network and serving as President-Elect of the IEEE Nanotechnology Council (NTC). He is the Chair of the NTC Awards Committee and Vice-President, Asia- Pacific of the IEEE Lasers and Electro-Optics Society. Prof. Jagadish is serving on editorial boards of 9 international journals in addition to being a Founding Editor of Online Journal of Nanotechnology and an Associate Editor of the IEEE/OSA Journal of Lightwave Technology. He advises many high tech companies in Australia and overseas and collaborated with scientists from 20 countries. His research interests include quantum dots, nanowires, quantum dot lasers, quantum dot photodetectors, quantum dot photonic integrated circuits, photonic crystals, THz photonics, zinc oxide. He has published more than 500 research papers (330 journal papers), 5 US patents assigned, co-authored a book, co-edited a book and edited 8 conference proceedings and 2 special issues of journals.

98 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... He won the 2000 IEEE Millennium Medal and received Distinguished Lecturer awards from both IEEE Lasers and Electro-Optics Society and IEEE Electron Devices Society. He is a Fellow of the Australian Academy of Science, Australian Academy of Technological Sciences and Engineering, IEEE, American Physical Society, Optical Society of America, SPIE-the International Society for Optical Engineering, the Electrochemical Society, the Institute of Physics (UK), the Institute of Nanotechnology (UK) and the Australian Institute of Physics. In 2006, he received Peter Baume Award from the ANU.

Abstract

We investigate the growth of III-V nanowires by MOCVD and the structural and optical properties of these nanowires. Binary and ternary nanowires of GaAs, InAs, InP, AlGaAs and InGaAs are achieved. We discuss the nucleation and growth issues involved in fabricating high quality nanowires suitable for device applications. We have fabricated and characterised a variety of axial and radial heterostructures including GaAs/InGaAs superlattices, and GaAs/AlGaAs core-shell and core-multishell nanowires.

99 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... August 4, Saturday, 10.30 – 12.00

Room 601 Special Keynote Lectures (2A2)

Prof. Hui-Ming Cheng The First Deputy Dirctor, Institute of Metal Research Institute of Metal Research, Chinese Academy of Sciences, China Topic: Carbon Nanotubes: A Promising Material for Nanodevices

Biography

Dr. Hui-Ming Cheng is currently Professor and Deputy Director of the Institute of Metal Research, Chinese Academy of Sciences, and he is also the director of its Advanced Carbons Division, Shenyang National Laboratory for Materials Science. He leads several national projects in nano-materials, nanotechnology and new energy fields, in particular, in synthesis and applications of carbon nanotubes. He has published the first book on carbon Nanotubes in Chinese, entitled Carbon Nanotubes: Synthesis, Structure, Properties and Applications, and has co-authored over 200 peer- reviewed journal papers which have been cited for more than 2200 times. He has received several national awards such as National Prize for Natural Science (2nd class), China Science and Technology Award for Young Scientists, etc. He serves as a member of several national expert panels on advanced materials, and also serves as the Editor for Carbon, an international journal, and Editor-in-Chief for New Carbon Materials. And he is the Honorary Professor of University of Queensland, Australia since 2004, and honorary or adjunct professors at several domestic universities. Since 1990, he also worked at Kyushu National Industrial Research Institute (two years) and Nagasaki University (one and half year) in Japan, MIT in USA (6 months), Nanyang University of Technology in Singapore (one months), University of Queensland in Australia (many times and close collaboration since 2003), etc.

100 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Abstract

Carbon nanotubes (CNTs) have attracted much attention since 1991, because of their unique structure, outstanding physical and chemical properties, and various potential applications including nano-electronics, nanoscaled sensors, field emitters, battery electrode materials, and composite materials. In this talk, we will focus on the following topics:

1. The general image of CNTs

CNTs are self-assembled nanostructures constructed with sheets of hexagon-shaped carbon atoms rolled up into a cylinder, which can be clarified into single-walled CNTs (SWNTs) and multi-walled CNTs (MWNTs) based on sheet number. The construction and electronic structure of SWNTs, in particular, the possibility for SWNTs to be metallic or semiconducting depending on their diameter and chirality, will be discussed.

2. Controlled synthesis of CNTs

Currently, several methods have been developed for the controllable synthesis of CNTs, such as electric arc discharge, laser ablation and catalytic decomposition of hydrocarbons or CVD. Rapid progress is being made for controlled growth of CNTs, including the control of diameter, shell number, location, orientation, and organization.

3. Properties, in particular, electronic properties of CNTs

Due to the unique structure of CNTs, they possess excellent mechanical properties, unique electronic properties, extremely high thermal conductivity, optical polarizability, and selective absorption and sensing properties. In particular, the remarkable transport properties observed in SWNTs will be summarized.

4. Promise of CNTs in nanodevices

Several examples about the application of CNTs in nanodevices will be very briefly demonstrated.

101 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

August 4, Saturday, 10.30 – 12.00

Room 601 Special Keynote Lectures(2A2)

Prof. Gang Chen Warren and Townley Rohsenow Professor of Mechanical Engineering Massachusetts Institute of Technology, Cambridge, USA Topic: Radiative Heat Transfer in Nanostructures and Its Energy Applications

Biography

Dr. Gang Chen is currently the Warren and Towneley Rohsenow Professor at Massachusetts Institute of Technology. He obtained his Ph.D. degree from UC Berkeley in 1993. He was an faculty member at Duke University from 1993- 1997, at University of California at Los Angeles from 1997-2000, and at MIT since 2000. He is a recipient of the NSF Young Investigator Award, a Guggenheim Fellow, and an ASME Fellow. He has published extensively in the area of nanoscale energy transport and conversion and nanoscale heat transfer. He serves on the editorial boards for five journals in heat transfer and nanotechnology and chairs the advisory board of ASME Nanotechnology Institute.

Abstract

It has been long recognized that modeling radiation heat transfer in microstructures requires consideration of wave effects such as interference, tunneling, and diffraction. Many new interesting problems arise with the development in nanotechnology. In this paper, we will discuss a few examples associated with photon transport in nanostructures, and their implications to energy technology. Surface-wave mediated heat transfer, such as surface phonon-polaritons and surface plasmons, has unique characteristics in terms of energy density and wavelegnth. Modeling and experimental results on extraordinary transmission and enhanced radiative heat transfer due to surface phonon polaritons will be presented. Another topic to be discussed is the photon absorption by monolayers and nanowire arrays. Implications of nanoscale thermal radiation transport to solid-state energy conversion technology, such as photovoltaics, thermophotovoltaics, and thermoelectrics will be discussed.

102 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

August 4, Saturday, 10.30 – 12.00

Room 603/604 Invited Speakers (2B2)

Prof. Ching-Fuh Lin Professor, Department of Electrical Engineering National Taiwan University, Taiwan Topic: Electroluminescence from Nanoparticles/Organic Composites

Biography

Ching-Fuh Lin was born in I-Lan, Taiwan in 1961. He obtained B.S. degree from National Taiwan University in 1983, and M.S. and Ph.D. degrees from Cornell University, Ithaca, NY, in 1989 and 1993, respectively, all in electrical engineering.

He is now a professor in Graduate Institute of Electro-Optical Engineering, Graduate Institute of Electronics Engineering, and Department of Electrical Engineering at National Taiwan University. His research interests include physics in semiconductor lasers/amplifiers, Si-based optoelectronics, and optoelectronic devices using organic- inorganic nano-composites.

He is currently a senior member of IEEE and a member of OSA He has published over 90 journal papers and more than 200 conference papers in the area of optoelectronics since 1996 and hold over 25 patents. He is also the sole author of a book, Optical Components for Communications: Principles and Applications, published by Kluwer Academic Publishers (USA 2004). He had obtained the Distinguished Research Award from National Science Council of Taiwan, ROC (2003-2006).

103 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Abstract

We report the visible light emission of organic-inorganic light emitting devices by low cost spin-coating. Different nanoparticles, CdSe, ZnO and Eu2O3, are employed to form hybrid composite films and generate the R-G-B and white light emission, while N,N’–diphenyl-N,N’– bis(3-methylphenyl) -1, 1’-biphenyl-4,4’-diamine (TPD) and polymethyl methacrylate (PMMA) are adopted as the organic matrices. We further investigate the hybrid composite film by scanning near-field optical microscope and find that phase-segregation enhances the electroluminescence of ZnO hybrid composite film. On the other hand, the homogeneity of the Eu2O3 hybrid composite favors the white light emission. Keywords — cadmium selenide, electroluminescence, europium, dielectric, light emitting device, zinc oxide

Embedding semiconducting nanoparticles in organic matrices has created new electroluminescence (EL) materials. For instance, semiconducting CdSe nanoparticles have been successfully embedded in a flexible organic polymer for EL [1]. Recently, wide bandgap zinc oxide nanoparticles are introduced in organic polymer to produce sharp blue emission [2]. Here, we employ different nanoparticles and fabricate organic– inorganic hybrid composite films for electroluminescence. We further investigate the film structure by scanning near-field optical microscope (SNOM) to optimize the luminescence.

Different nanoparticles such as CdSe (7 nm), CdSe (3 nm), (b)(a) ZnO (90 nm), and Eu2O3 (50 nm) have been used in our experiments. Each type of inorganic nanoparticles combines 2 μm with an appropriate organic matrix to form an organic-inorganic hybrid light emitting layer by spin-coating. The composite film is further sandwiched between indium tin oxide and aluminum electrodes to form a light emitting device (LED). For example, a hybrid LED with the CdSe (7 nm) composite film can emit

red light at 640 nm, while the one with CdSe (3 nm) emits Fig. 1. (a) SNOM cross section profile of the ZnO green light at 530 nm. In addition, we have used the phase- hybrid devices with phase segregation and the segregation technique to fabricate the ZnO hybrid LED. With corresponding (b) schematic diagram of the ZnO nanoparticles/organic composite; (c) SNOM cross proper parameters for phase segregation, the ZnO section profile of the ZnO devices without phase nanoparticles and TPD:PMMA can be separated into two segregation and the corresponding (d) schematic diagram of the ZnO nanoparticles/organic layers upon spin-coating composite. process (Fig. 1). The method

104 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... promotes electron and hole recombination in the ZnO nanoparticles. Our ZnO hybrid device exhibits a very narrow spectrum at 392 nm and no defect-related emission. The emission peak well corresponds to the ZnO bandgap energy

[2]. White EL is also observed from dielectric Eu2O3 nanoparticles embedded in a TPD/PMMA composite film. The SNOM shows that the composite film prepared with toluene is inhomogeneous and contains pores, while the counterpart with chloroform is homogenous. We find that the homogeneity of the Eu2O3 composite film favors the white light emission.

In summary, we demonstrate that hybrid organic-inorganic composite films produce R-G-B and white light emission. SNOM analysis reveals that phase-segregation enhances the EL of hybrid ZnO composite and the homogeneity of the

Eu2O3 hybrid composite favors the white light emission.

References [1] S. Coe, W. -K. Woo, M. Bawendi, and V. Bulovic, “Electroluminescence from single monolyers of nanocrystals in molecular organic device,” Nature, vol. 42, pp. 800-804, Dec. 2002. [2] C. -Y. Lee, Y. -T. Haung, W. -F. Su, and C. -F. Lin, “Electroluminescence from ZnO nanoparticles/organic nanocomposites,” Appl. Phys. Lett., vol. 89, pp. 231116-1-231116-3, Dec. 2006.

This work was supported by the National Science Council, Taiwan, Republic of China, with Grant No.: NSC95-2120-M- 002-001 and NSC95-2112-M-002-004. *Contact author: C. -F. Lin (phone: 886 2 3366 3540; fax: (886) 2 2364 2603; e-mail: [email protected])

105 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... August 4, Saturday, 10.30 – 12.00

Room 603/604 Invited Speakers (2B2)

Prof. William C. Tang Professor, The Henry Samueli School of Engineering University of California, Irvine, USA Topic: Micro Strain Gauges for Biological Tissues

Biography

William C. Tang received his BS, MS, and Ph.D. in Electrical Engineering & Computer Sciences from the University of California at Berkeley in 1980, 1982, and 1990, respectively. His seminal thesis work and invention on the electrostatic comb drive has become a crucial building block for many microactuator and microsensor research in the field. Since his graduation, he continued his contribution to the MEMS field first in the automotive industry as a Research Senior at Ford Research Laboratory in Dearborn, Michigan, and as the Sensor Research Manager at Ford Microelectronics, Inc., in Colorado Springs, Colorado. In 1996, he joined the Jet Propulsion Laboratory, California Institute of Technology, where he was the Supervisor of the MEMS Technology Group, leading the pursuit of MEMS technology for space applications. In July 1999, he assumed the responsibilities as a Program Manager at the Defense Advanced Research Projects Agency (DARPA). He took over the MEMS and Micro Power Generation programs, and established new programs in Nano Mechanical Array Signal Processors and Chip-Scale Atomic Clock. Since July 2002, Dr. Tang has been on faculty as a professor with the Department of Biomedical Engineering at the University of California, Irvine, with a joint appointment with the Department of Electrical Engineering and Computer Science. He is the founding director of the Microbiomechanics Laboratory. From July 2005 to June 2006, he served as the Interim Chair for the Biomedical Engineering Department. His current research interests are in micro- and nano-scale technologies for wireless medical implants and micro biomechanics. Including the patent on electrostatic comb-drive actuator, Dr. Tang was awarded four U. S. patents, one provisional patent, and one patent pending on MEMS designs and technologies. He is the author and co-author for over fifty conference and refereed papers in the MEMS field, and is frequently invited to speak in seminars and workshops. Dr. Tang is a Senior Member of the Institute of Electrical and Electronics Engineers (IEEE), a Fellow and Chartered Physicist with the Institute of Physics (IOP), and a Fellow of the American Institute for Medical and Biological Engineering (AIMBE).

106 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Abstract Monitoring strain on the surface of bones in real time would allow better understanding of the biomechanical behavors of the mssculoskeletal system. Knowledge of bone strains would also facilitate advances in musculoskeletal diagnostics, rehabilitation monitoring and feedback, as well as improved data collection and clinical studies to develop advanced orthopedic implants. This paper presents a set of novel implantable strain gauges, which have been designed, modeled, fabricated, and characterized for use on biological tissues including bones. These implantable strain gauges are fabricated on biocompatible polymers that are flexible enough to accommodate conformal attachment on irregular surfaces such as the neck of a femur. A system-level implementation includes integrated wireless communication circuit with remote data transmission and power coupling with a hand-portable device, as illustrated in Fig. 1. Figure 2 shows one of the finished devices based on gold piezoresistor sandwiched between two layers of Chlorine-substituted poly-para-xylylene (Parylene-C), a known biocompatible polymer. The gauge factor has been demonstrated to be at least two times higher than commercial devices.

Figure 1. System concept illustrating a strain gauge array on flexible substrate grafted onto the neck of femur, integrated with wireless communication system.

Figure 2. One of the fabricated device. The matrix length and width of the device are 6.1 mm and 4.1 mm, respectively. The gauge length and grid width of the sensor were 350 μm and 390 μm, respectively. Inset shows the enlarged picture of the gauge region.

107 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... August 4, Saturday, 10.30 – 12.00

Room 603/604 Invited Speakers (2B2)

Prof. Cary Y. Yang Professor of Electrical Engineering Santa Clara University, USA Topic: Electrothermal Modeling of Transport in Carbon Nanostructures

Biography

CARY Y. YANG received the B.S., M.S., and Ph.D. degrees in electrical engineering from the University of Pennsylvania in 1970, 1971, and 1975, respectively. For his doctoral research, he studied the electronic and optical properties of IV-VI narrow-gap semiconductors. His postdoctoral work at M.I.T. introduced him to the field of surface science, where he examined the detailed electronic structure of chemisorbed molecules on heavy transition metal surfaces.

He joined NASA Ames Research Center in Moffett Field, California in 1976 and extended his chemisorption study to include surfaces of submicron metal particles. Working with theoretical chemists as well as electron microscopists at Ames, he was able to model and verify the five-fold (hence non-bulk) symmetry of these particles. After a brief stay at Stanford University in the Stanford-NASA Ames Joint Institute for Surface and Microstructure Research, he founded Surface Analytic Research, Inc. in Mountain View, California, and directed sponsored research in surface and nanostructure science. In 1983 he joined Santa Clara University and founded the Microelectronics Laboratory, for teaching and research on silicon-based devices and circuits. He served as Associate Dean of Engineering from 2003 to 2006. He currently holds the positions of Professor of Electrical Engineering and Director of Center for Nanostructures. His current research is on nanostructure interfaces and interconnects in electronic and biological systems.

Over the past two decades, Professor Yang has initiated innovative programs to educate and train technical professionals in various stages of their careers. In the eighties, he developed and organized short courses on timely topics in silicon technology to Silicon Valley professionals. In the mid-nineties, he offered short courses on semiconductor technology for SEMI as part of a retraining program for professionals

108 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... in other fields. Since the mid-eighties, he has provided opportunities for his students to spend extended periods in companies in Japan, where they collaborated with their hosts on their thesis research. More recently, he founded the Center for Nanostructures at Santa Clara, which offers interdisciplinary research and education opportunities in the field of nanoscience and nanotechnology for university students and faculty, high school students and teachers, as well as Silicon Valley technical professionals.

Dr. Yang has been a consultant to industry and government, and a visiting professor at Tokyo Institute of Technology, University of Tsukuba, National University of Singapore, University of Pennsylvania, University of California, San Diego, and University of California, Berkeley. He is a Fellow of IEEE and served as Santa Clara Valley Chapter Chair, Regions/Chapters Chair, Vice President, and President of the IEEE Electron Devices Society. In 2001, on behalf of People to People Ambassadors Program, he led an Electron Devices Delegation to visit universities, government institutes, and companies in the People’s Republic of China. From 2002 to 2003, he served as an elected member of the IEEE Board of Directors, representing Division I. He was an editor of the IEEE Transactions on Electron Devices, in the area of MOS devices. In 2004, he was named the recipient of the IEEE Educational Activities Board Meritorious Achievement Award in Continuing Education "for extensive and innovative contributions to the continuing education of working professionals in the field of micro/nanoelectronics". In 2005, he was honored with the IEEE Electron Devices Society Distinguished Service Award.

Abstract

I. Introduction Heat generation in one-dimensional structures such as carbon nanotubes and carbon nanofibers (CNF) has raised concerns regarding reliability in these structures under high-current conditions [1]. This work aims to model the effect of heat generation on the I-V characteristics of CNFs. Experimental studies of carbon nanostructures to date have primarily focused on electrical properties. For on-chip interconnect applications in integrated circuits, both electrical and thermal properties must be considered when evaluating the reliability of carbon-based devices under high-current stress. While modeling studies of thermal effects on electrical characteristics have been reported [2], correlation between these two properties has not been investigated in detail. Annealing effects due to joule heating are observed at the contact interface in our study, resulting in a significant contact resistance reduction. In this work, electrothermal modeling of carbon nanofiber-metal contact systems is presented, with specific focus on heat generation at the CNF- metal interface.

109 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... II. Results and Discussion A typical I-V set of annealing experiments is shown in Figure 1. For this CNF, the initial resistance is 46 kΩ, then reduced to 32 kΩ after one anneal, and finally reduced to 11 kΩ after the second annealing step. A third anneal is performed to ensure that the lowest resistance has been achieved in the structure, and confirms the final resistance of 11 kΩ. The reduction in resistance can be attributed to local heating due to higher electron temperature, resulting in re-arrangement of atoms at the contact-metal interface. This structural change at the interface causes a reduction in the tunneling barrier, hence a lower resistance junction that approaches ohmic behavior is observed.

The observed structural change can be modeled based on a tunneling model for single-junction CNT-metal systems [3]. Our structure is metal-CNF-metal, thus forming a double junction or a two-diode circuit. Comparison with measured data will eventually reveal the I-V characteristics of a single diode, and their effect upon annealing. We assume that the annealing changes only the barrier width at the metal contact junctions, which is consistent with experimental data. Figure 2 compares the model with the measured data for three different annealing stages. The increased current drive corresponding to a reduction in contact resistance can clearly be seen in this device as a direct consequence of Joule heating at the contacts. The modeling results match the measured data quite well. This work provides the foundation for further studies of heat distribution in CNF with different contact materials.

150 150 Anneal #1 -4 10 100 100

50 Anneal #2 50 A] A] μ μ 0 -5 -1 -0.5 0 0.5 1 10 0 Prior to Anneal

Current [ Current -50 Current [A] Successive Anneals -6 10 -100

-150 -1 -0.5 0 0.5 1 Voltage [V] -1 -0.5 0 0.5 1 Voltage [V] Figure 1. Experimental current-voltage character- istics Figure 2. Comparison of measured and modeled before and after current-induced annealing in the Au- current-voltage characteristics for all three annealing CNF-Au system. Inset: Corresponding differential conditions. The decrease in resistance from 46 kΩ to conductance plots. Scale for conductance and voltage 11 kΩ can clearly be seen for this sample. plots are μS and V, respectively.

[1] B. Bourlon et al, Phys. Rev. Lett. 92, 026804 (2004). [2] L. Dong et al, J. Appl. Phys.101, 024320 (2007). [3] T. Yamada, Appl. Phys. Lett. 78, 1739 (2001).

110 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Technical Sessions on Saturday, August 4, 2007

Novel Nano-Fabrication Technology I (2D2)

Time: 10.30 – 12.00 Room: 605 Session Chairs: Gwo-Bin Lee and Lyguat Lee

8 Integration of Highly Ordered Nanoporous Anodic Alumina Templates on Substrates for Nanofabrication Han Gao, Maria Chong, Lee Kheng Tan

Highly ordered porous anodic alumina (HOPAA) is directly fabricated on the different substrates over large areas (> 1.5 cm2) by using a “soft-imprinting” method. In this process, we employ Ar plasma etching to “soft imprint” an evaporated Al film through a free-standing HOPAA mask. The nanoindentation arrays replicated from the mask and created on the Al surface by soft imprinting will guide the subsequent Al anodization to form HOPAA templates on the substrate (HOPAA/substrate). By using this technique, the HOPAA template can be fabricated on the different substrates, such as Si, glass side, and even flexible polymer films. Compared with conventional techniques for HOPAA, such as two-step anodization and nanoimprinting, our technique is substrate-friendly and economical for fabricating HOPAA/substrate. The intimate contact between the template and the substrate enables solution-based fabrication. We demonstrate that the HOPAA/substrate can be used to create highly ordered Au nanowire arrays and sub-100 nm self-assembled monolayer features on Si.

185 Synthesis of Gold Nanoparticles Using Microfluidic Reaction Systems Chen-Hsun Weng, Chih-Chia Huang, Chen-Sheng Yeh, Gwo-Bin Lee

A new microfluidic reaction system capable of mixing, transportation and reaction is developed for synthesis of nanoparticles. It allows for rapid, cost-effective, and environmentally friendly approach to accelerate the synthesis of the nanoparticles. The system integrated a micromixer, micropumps, microvalves, microheaters, and micro temperature sensors to form a microfluidic reactor. Successful synthesis of gold nanoparticles with varying sizes has been demonstrated. The development of the microfluidic reaction system could be promising for synthesis of functional nanoparticles for biomedical applications.

111 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 209 Indium Phosphide Nanoneedle Photoconductors Nobuhiko Kobayashi, Xuema Li, Logeeswaran VJ, Joseph Straznicky, M. Saif Islam, Shih-Yuan Wang, Stanley Williams

Photoconductors that incorporated a group of indium phosphide nanoneedles as an active region were designed and fabricated on a silicon-based platform. DC electrical transport measurements were performed under the illumination of 633 nm laser light.

269 Fabrication and Evaluation of Metal-Oxide-Semiconductor Transistor Probe Sang Hoon Lee, Geunbae Lim, Wonkyu Moon

The metal-oxide-semiconductor (MOS) transistor probe with the focused-ion-beam (FIB) nano tip is fabricated and evaluated for the surface electric properties. The high working speed and the high sensitivity of the MOS transistor improve the scanning speed and the system minimization. The device is fabricated with the standard CMOS process and FIB nano deposition. The device is applied to the patterned sample plate, and the measuring result shows the well defined line patterns.

357 Automated Process for Manufacturing Single Carbon Nanotube Based Nano Devices King Wai Chiu Lai, Ning Xi, Uchechukwu Wejinya

Carbon nanotubes (CNTs) are found to be a promising material for nanoelectronics due to their sizes and unique properties. They provide the possibility of miniaturizing conventional electronic devices, and therefore, people have focused on making nano devices by them. Since the size of CNTs is in nano scale, traditional robotic manipulation cannot be applied. Building single CNT device is challenging and therefore, most people have concentrated on manipulating bundled CNTs. However, the electrical property of bundled CNTs is difficult to control, and resulting the device cannot benefit from quantum properties of single CNT. An automated process for manufacturing single CNT based nano devices is developed. A CNT deposition system is developed to manipulate single CNT across micro electrodes precisely and repeatedly by dielectrophoresis (DEP). This system can select different types of CNTs by using a micro chamber to filter specific electronic property of CNTs. The system can potentially be used to fabricate an array of CNT based devices, and a fast and feasible batch nano assembly of consistent nano devices can be made.

112 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 375 A Novel Nano-Photonic Quantum Dots Optical Fiber (NQDOF) for Future Photonic Communications Ly Guat Lee, Bo Jun Yang

The field of nonlinear optics is over forty years old, but is still fresh to our minds and currently producing novel research directives and applications. Indeed, with the advent of material engineering at the nano-scale, nonlinear optics is undergoing a new revolution. The study of high optical nonlinearity in nano material for quantum communication has generated interest in its potential use as material for photonic communication devices in future telecommunications. In this paper, we propose a novel Nano-Photonic Quantum Dots Optical Fiber (NQDOF) to investigate its nonlinear properties for future photonic communications. We employ both nano and photonic crystal fiber technologies in NQWOF where an InP is chosen as quantum dots in the core of optical fiber. In addition, we conduct a numerical study of nonlinear parameter for developed NQDOF using Femlab.

Nanowires and Nanotubes (2E2)

Time: 10.30 – 12.00 Room: 606 Session Chairs: S. J. Lee and Chennupati Jogadish

29 Dephasing Processes in Quantum Hall Wires Alessandro Cresti, Giuseppe Pastori Parravicini

We study the effects of phase-breaking scattering processes on the electron conductance of quantum wires in strong magnetic fields. Our treatment makes use of the nonequilibrium Keldysh formalism and the self-consistent Born approximation for the many-body interactions. The differential conductance is carried out numerically by means of continued fractions and renormalization techniques within a tight-binding framework. We provide a unified description of dissipative and dissipationless currents, with clear crossovers from one to the other regime.

113 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 38 The Mechanisms of PAN Electrospinning Nanofibers Based on the Effect of Surface Charges Xiaohong Qin, Shan-Yuan Wang

In electrospinning, the addition of salts results in a higher charge density on the surface of jet. The theoretical analysis shows that the relationship between radius r of jet and the axial distance z from nozzle follows an allometric law in the form in case of full surface charge, and the scaling exponent becomes larger when the jet has part surface charge. Theoretical analysis also showed that the electricity potential with high content of LiCl descends more sharply than low content LiCl during the charged fibers moving LiCl was chosen to confirm the theory. The experimental data agreed very well with our theoretical analysis by a series of experiments. Moreover, the structures of nanofibers with LiCl were investigated.

230 Anodized Titanium Oxide Nanotube for Photocatalytic Purifier Seong-Je Cho, Dae-Jin Yang, Hun Park, Jong-Oh Kim, Won-Youl Choi

We presented a photocatalytic purifier with anodized titanium oxide nanotube on micro-porous Ti membrane. The tubular specimen had diameter of 16 mm and length of 10 mm made by sintering titanium powders. Potassium phosphate monobasic (KH2PO4) 1M aqueous electrolytes containing fluorine 0.15M and citric acid 0.2M were prepared to make titanium oxide nanotubes. Titanium oxide nanotube arrays were fabricated at anodization potential 24 V. The pore diameter and length of titanium oxide nanotube were 150 nm and 1.0 μm, respectively. After anodization, annealing at 500 for 30min was followed and the anatase phase was appeared on the surface of the tubular filter.

231 Electromagnetic Waveguiding in Metallic Plasmonic Structures using FDTD Iftikhar Ahmed, Ching Eng PNG, Er-Ping Li, Heow Pueh Lee

This paper presents the investigations of wave propagation characteristics of silver (Ag) nanowire used for electromagnetic (EM) waveguiding. The wave propagation is simulated by the finite difference time domain (FDTD) method and incorporates the Drude model. A number of nano-scale structures are studied, and the simulation results illustrate that these structures guide the optical signal to the desired positions and hence may be used for future nanophotonics applications.

114 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 288 Micromechanical Resonance of Silicon Nanowires Measured by Optical Interferometry Miroslav Belov, Nathaniel Quitoriano, Shashank Sharma, Theodore Kamins, Stephane Evoy

We report experimental measurement of resonant properties of vibrating silicon nanowires. The highly oriented silicon structures were synthesized using chemical vapor deposition catalyzed by gold nanoparticles deposited on silicon substrates. Silicon nanowires grown laterally from vertical walls form singly or doubly clamped beams. These silicon cantilevers and bridges were mechanically actuated, and their resonant properties analyzed using optical interferometry. Resonant frequencies in the MHz range and quality factors of nanowires with diameters from 30nm to 400nm were investigated in range from 77 to 293 K.

Invited Session: Nano-Photonics, Nano-Optics and Opto-Electronics (2F2)

Time: 10.30 – 12.00 Room: 607 Session Chairs: Diana Huffacker and Sanjay Krishna

403 Silicon Nanocrystal Based MOSLED on Silicon Nanopillar Array Gong-Ru Lin, Chun-Jung Lin

A Si nanocrystal based metal-oxide-semiconductor light-emitting diode (MOSLED) on Si nano-pillar array is preliminarily demonstrated. Rapid self-aggregation of Ni nanodots on Si substrate covered with a thin SiO2 buffered layer is employed as the etching mask for obtaining Si nano-pillar array. Dense Ni nanodots with size and density of 30 nm and 2.8E10/cm^2, respectively, can be formatted after rapid thermal annealing at 850 °C for 22 s. Electroluminescence of Si nanocrystals grown on high-aspect-ratio Si nano-pillars is greatly enhanced. The optical intensity, turn-on current, power slope and external quantum efficiency of the MOSLED are 1.4E-4 W/cm^2,1.5 uA, 2 mW/A and 5E-5, respectively. Highest optical power of 0.7 uW is obtained at biased current of 375 uA, which is almost one order of magnitude larger than that of a same device made on smooth Si substrate.

115 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 456 Multicolor Spectrally Adaptive Infrared Sensors Based on Nanoscale Quantum Dots Sanjay Krishna

Infrared photodetectors based on intersubband transitions in nanoscale self assembled quantum dots continue to show potential due to their inherent sensitivity to normally incident light, broad spectral response range [1], potential for low dark current [2] and long carrier lifetimes due to reduced electronphonon scattering [3]. As a result of these promising attributes, coupled with the potential for high yield manufacturing processes based on a mature GaAs technology, QD based detectors continue to attract the interest of the infrared detection research community. In our research group, we have been investigating a novel dots-in-a-well (DWELL) design that is a derived hybrid of the QDIP. The DWELL detector consists of an active region composed of InAs quantum dots embedded in InGaAs quantum wells. By adjusting the InGaAs well thickness, this structure allows for the manipulation of the operating wavelength and the nature of the transitions (bound-to-bound, bound-to-quasibound and bound-to-continuum) of the detector [4]. The DWELL has also demonstrated multicolor operation (see Figure 1) encouraging further research into two color, co-located detectors [4]. The MWIR and LWIR peaks are thought to be from bound states in the dot to higher and lower lying states in the quantum well respectively.

250 Effect of Proton Implantation-Induced Intermixing on Luminescence of InAs/InP Quantum Dots Li Qing, Barik Satya, Jagadish Chennupati

Effect of proton implantation-induced intermixing of InAs quantum dots (QDs) capped with InP layers on luminescence is studied. The emission peak of proton implanted sample (sample B) shifts to higher energy side with a huge magnitude of 287 meV, compared to that of the as-grown sample (sample A). The temperature dependence of energetic luminescence peak position of sample A can be well reproduced by a recently developed model which describes the luminescence of localized states. While temperature dependence of energetic peak positions of sample B follows the Varshni formula which describes the shrinkage of semiconductor band-gap. Furthermore, the temperature dependence of the broadening of the luminescence peak of sample B is nearly monotonic while the broadening of luminescence peak of sample B shows non-monotonic temperature dependence, which is caused by the carriers' re-distribution within quantum dots. These indicate that the luminescence of sample B is dominated by emission from quantum wells while that of sample A is dominated by emission from quantum dots. The Arrhenius fitting to the temperature dependence of luminescence intensity gives activation energies of 20.1 meV for sample A and 79 meV for sample B, respectively.

116 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 282 Characterization of InGaN/GaN Multiple Quantum Wells with Surface Micro Hole Arrays Gwomei Wu, J. D. Yu, Y. L. Hsieh

In this paper, the surface micro hole array photonic crystal structures were fabricated on p-type GaN of InGaN/GaN through photolithography and ICP dry etching process. We designed three different patterns of circle hole arrays, including square lattice array, triangle lattice array, and honeycomb lattice array. The hole diameter was around 6 μm, and the period of the lattice array was about 15 μm. There were two different depths in the lattice arrays, 1.1 μm and 100 nm. The increase in photo-luminescence intensity of the InGaN/GaN multiple quantum wells with the square lattice array, triangle lattice array, and honeycomb lattice array structures have been 208%, 188%, and 90%, respectively. We found that the square lattice array structure induced the highest light extraction efficiency.

338 Subwavelength Three-Dimensional Bragg Filtering in Integrated Slot Plasmonic Waveguides Amir Hosseini, Hamid Nejati, Yehia Massoud

We present a compact 3-dimensional plasmonic Bragg reflector based on the metal-insulator-metal geometry. This structure benefits the ease of fabrication and provides subwavelength confinement that is crucial for the ultimate goal of miniaturized all-optical integrated circuits. We show that width modulation in a plasmon slot waveguide leads to an extraordinary wide photonic band-gaps with high reflectance efficiency. Finite-difference time-domain simulations reveal that with only 5 periods of the alternating layers, a transmission less than 1% at the desired frequency is realizable. The presented structure is promising for ultra compact mirrors in optical devices.

469 Monolithic, Bufferless III-Sb/Si Integration D.L. Huffaker, G. Balakrishnan, M. Mehta, M.N. Kutty, P. Rotella, S. Krishna, and L.R. Dawson

In this presentation, we will overview and discuss recent progress in III-V/CMOS integration based on monolithic and bufferless epitaxy.

117 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Nano-Robotics and Assembly (2G2)

Time: 10.30 – 12.00 Room: 608 Session Chairs: Sinan Haliyo and Amrinder Nain

12 Micromanipulation Based on AFM: Probe Tip Selection Shaorong Du, Yangmin Li

Micromanipulation based on AFM (atomic force microscope) has become popular in recent years. Since the AFM probe tip can have several shapes, how to select tip shape is discussed for micromanipulation in this paper. Based on the Hamaker hypotheses and the Lennard-Jones potential, interactions between probe and substrate surface are analyzed for three typical shape probe tips, namely, quadrilateral pyramid, cone, and paraboloid. Simulations are presented, and conclusion is obtained: a quadrilateral pyramid probe tip with small inclination between edge and axis is the best choice for micromanipulation based on AFM.

91 Fabrication of Carbon Nanotube Bridge in V-Groove Channel Using Dielectrophoresis Taechang AN, Pan Kyeom Kim, Hyobong Ryu, Geunbae Lim

Since their discovery in 1991, Carbon nanorubes (CNTs) are known to have unique electrical, mechanical and thermal properties so that have been used many applications such as field-effect transistors, chemical sensors, biosensors, ultrahigh frequency resonators and atomic force microscope (AFM) tips. For the real applications, the manipulation of the CNTs is very important. Several methods such as spin coating, direct growth and method using AFM tip have been demonstrated to place CNTs to desirable electrodes. These methods had the problem of low efficiency and contamination. Recently, Dielectrophoresis has attracted much interest for CNTs alignment and deposition on desirable location., but all the work have been done on plane electrodes. In this work, We propose novel fabrication method of carbon nanotube bridge in V-groove channel using dielectrophoresis. Compared to case using plane electrode, this method has several advantages. The electrodes in V-groove channel provide high and parallel electric field and remove nonspecific CNTs deposition so that efficiency of CNTs alignment increases. SWNTs bridges can be used in various sensors. Because sensor bridges were away from surface, effects of surface reduced and signal to noise ratio increased. High surface areas of SWNTs bridges can improve sensitivity of sensors, and embedded SWNTs bridges in microchannel can be easily used at various microfluidic applications without additional work.

118 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 439 A New Sensory Information Of Manipulation Based On Tapping Mode AFM Yongliang Yang, Liu Zhihua, Yan li Qu, Zaili Dong, Wen J Li

This paper is about new sensory information which may be useful to nanomanipulation based on AFM.

441 Vibration Reduction Control of a Voice Coil Motor(VCM) Actuators for AFM Systems WooSub Youm, Jongkyu Jung, Kyihwan Park

Among the AFM system components, nano scanners play a most important role of the system accuracy and bandwidth. An actuator driven by VCM with a flexure hinge can be a good candidate because of advantages, such as linear operation, wide travel length, and bi-directional actuation. However, small damping coefficient of the VCM actuator generates mechanical vibration. It decreases AFM imaging speed and system measurement accuracy. To reduce the vibration of the VCM actuator, a moving command filter is used and the experiment results are shown.

444 Assembly of Nano Optics by an Integrated Probe-based System Lo Ming Fok, Yun Hui Liu, Wen J Li

Repeatable manipulation and auto-assembly of nano-scale components is a critical capability for future developments in nano optics, opto-electronics, hybrid microelectromechanical (MEMS) systems, and nano-scale devices. The system is modified for research on probe-based manipulation. There is an AFM employed for high-resolution imaging, which processed the topographic data and generated scanning images. Motion of the sample base is controlled by piezoelectric actuators in three principle axes. Two piezoelectric actuators are in plane with the sample, which generate the movement in the x and y directions. The last one is perpendicular to the sample base, which is responsible for adjusting the separation between the probe tip and sample. The AFM was being modified and was capable for precision positioning of the sample in 10 mm range in the planar coordinates and 3 mm in the vertical direction. This report focuses on the manipulation and assembly of microspheres using a single probe with force feedback. A sharp probe combined with a high precision positioning system is used to manipulate microspheres into desired locations and configurations within a two-dimensional workspace. A description of the manipulation system is presented along with a discussion on the basic manipulation capabilities. Force feedback has been utilized; the vertical contact force was determined by a force control system during manipulation.

119 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Invited Session: Modeling and Simulation (2A3)

Time: 13.00 – 15.00 Room: 601 Session Chairs: H. Tsuchiya and M. A. Alan

389 On the Performance Limits of Emerging Nano-MOS Transistors: A Simulation Study Hideaki Tsuchiya, Kazuya Fujii, Takashi Mori, Yusuke Azuma, Tanroku Miyoshi

Scaling MOSFETs to their limits is a crucial challenge now faced by the semiconductor industry, which concurrently requires suppressing leakage current, minimizing the short channel effects, and maintaining a high drive current. To meet these requirements, the application of technology boosters such as new channel materials, multi-gate architectures and ballistic transport is expected. In this paper, we present a theoretical investigation on the device performance employing the emerging nano-MOS concepts based on a quantum-corrected Monte Carlo device simulation. It has been demonstrated that the quantum-corrected Monte Carlo method is powerful in the study of quasi- ballistic behaviors of MOSFETs. In addition, it has been found that a comprehensive study including the ballistic transport is important to design MOSFETs with the new channel materials. And finally, a “fractional particle method” for three-dimensional quantum-corrected Monte Carlo simulation has been proposed and demonstrated for actual three- dimensional MOSFETs.

423 Simulation of Nanobiosensors Muhammad Alam, Pradeep Nair

We present the first comprehensive analysis of three key elements that dictate the performance of nanobiosensors, i.e. response time, sensitivity, and selectivity. Our results -- based on a comprehensive numerical model and calibrated against a wide range of experimental data – show that design of a nanobio sensor is nontrivial and requires deep appreciation of many counterintuitive features. Our results should help interpret the diverse and sometime conflicting range of experimental data from the literature within a common theoretical framework and it should allow design of sensors with higher performance than previously possible.

120 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 110 Inhomogeneous 2D Polariton Radiation Excited by a Finite Electromagnetic Wave Train Norman Horing, T.Yu Bagaeva, V.V. Popov, S.Y. Liu, Makoto Sawamura

A non-stationary process of polariton-mode excitation in a 2D excitonic layer by a light-wave extinction front is analyzed here using the electromagnetic dyadic Green’s function formalism. The electromagnetic response of the 2D layer includes inhomogeneous radiative exciton-polariton modes corresponding to complex poles of the matrix Green’s function.

200 Analysis of Microchannel Heatsink Performance Using Spherical and Cylindrical Nanofluids Maryamalsadat Lajvardi, Jamshid Sabbaghzadeh, Sadollah Ebrahimi, Iraj Hadi

In this paper we show that the enhancement in the effective thermal conductivity of spherical nanoparticles and nanotubes (cylindrical shape particles) for use in nanotube-in-fluid suspensions in microchannels with increase nanolayer thicknesses. For laminar flow Nusselt number decreases with the increasment of nanolayer thickness, also the effect of nanolayer thicknesses with increasment of volume fraction is considerable. Also we present that the effective thermal conductivity is decreased with cylindrical nanoparticle diameter in microchannels and causes Nusselt number to be increased.

202 Theoretical Studies of Pentagon-Heptagon Pair Defects in Carbon Nanotube Junctions Udomvech Anurak, Teerakiat Kerdcharoen, Shafiqzzaman Md

The electronic and energetic properties of topological defect in single-walled carbon nanotube junctions (SWCNTJ) were studied theoretically. The interfacial junction geometries can be constructed by fusing two zigzag tubes having different helicities and diameters. One segment of the fused nanotube is kept constant by using the (5,0) nanotube, while varying another segment from (6,0) to (10,0). Practically, the junctions are composed of insertion of pentagon-heptagon pair as a defect into the perfect hexagonal lattice. The study shows that the electronic structures of SWCNTJ are dependent on the variation of diameter and length of carbon nanotubes. The HOMO and LUMO levels exhibited the contradiction of even-odd “quantum size” oscillation of nanotube chiralities, although tubule length is increased. The energy gap that indicates metallic or semi-conducting behavior depends on correlation between the tubes indices and tubule length. The energy of formation linearly changes with the variation in nanotubes diameter but not with the tubule length. The (5,0)//10,0) SWCNTJ have more stability than other SWCNTJ. The outcome of this study would be of help for collection of information in the field of molecular electronic devices made of carbon nanotubes.

121 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 203 On Transport Properties of CNT Metal/Semiconductor/Metal Heterostructures Using First Principles Methods Ping Bai, Kai-Tak Lam, Ken Chang, Er-Ping Li

The electron transport properties of carbon nanotube (CNT) metal/semiconductor/metal heterostructures are investigated using the first principles method based on density functional theory (DFT) and non-equilibrium Green's function (NEGF). The atomic heterostructures are constructed by sandwiching a zigzag semiconducting CNT between two zigzag metallic CNTs with different diameters. The density of states, transmission function, conductance and current-voltage characteristics of the constructed heterostructures are simulated using the DFT-NEGF method. Results show that the imperfect interface in the CNT heterostructures affects the high-bias conductance significantly. The reduction of high-bias conductance is proportional to diameter ratio of two CNTs connected. The diameter of metallic CNT decides the threshold voltage and low-bias conductance of the heterostructures. The larger the diameter is, the lower the threshold voltage is and the higher low-bias conductance is.

219 Electronic and Transport Properties of Graphene Nanoribbons Zhufeng Hou, Marcus Yee

We present the electronic structures and transport properties of hydrogen-saturated graphene ribbons and its dependence on its termination edge, the ribbon width, and the impurity. The band structures, transmission spectrum, and current-voltage (I-V) characteristics of graphene ribbons have been calculated by using first-principles electronic structure methods and non-equilibrium Green's functions technique. Our calculated results show that the graphene ribbons with zigzag shaped edges exhibit nonlinear behavior of current-voltage characteristics due to the overlapping of π* and π bands around Fermi level. As the width of zigzag chain of graphene ribbons increases, the overlapping of π* and π bands is enhanced and the applied bias voltage range for linear I-V response becomes narrower. The graphene ribbon with armchair shaped edges exhibits semiconducting properties and its band gap decreases with increasing ribbon width. The doping of B or N in graphene ribbons with armchair shaped edges slightly increases the current at lower bias voltage.

122 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Nano-Biotechnology (2B3)

Time: 13.00 – 15.00 Room: 603 Session Chairs: Ari Requicha and Sun In Hong

20 Modeling the Drug Release From 3D Multi-layer Microstructure with Micro-chambers Ruixia Yu, Hualing Chen, Tianning Chen, Xiangyang Zhou

This paper presents a mathematical model for three-dimensional biodegradable multi-layer drug delivery microstructure with large array of micro-chambers. The drug release from this type of drug delivery microstructure is modeled using cellular automata (CA) and discrete iterations. The model can describe the dynamic behavior of drug release. Furthermore, simulations about this type of drug delivery microstructure are carried out. The simulation results show that the introduced mathematical model can act as the basis of a new optimal design methodology for three-dimensional biodegradable multi-layer drug delivery microstructure.

129 Evaporative Pumping Of Liquid In Nanochannel For Electrical Measurement Of A Single Biomolecule In Nanofluidic Format Erwan Lennon, Takatoki Yamamoto, Sung Lee, Teruo Fujii

We present a solution to obtain planar micro-electrodes self-aligned around a nanochannel drilled using FIB micro- machining, The inter-electrode spacing is exactly that of the width of the nanochannel (20 to 400 nm). The system is sealed using a PDMS thin foil that includes microfluidic channels. We are aiming at manipulation and characterization of single biomolecules by taking advantages of nanochannels electrical properties. High speed motion of DNA molecules due to evaporation pumping of the carrying fluid has been observed. Electrical detection and measurements are currently being conducted.

123 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 142 Osteoblast-like Cells Response to Layer by Layer Self Assembled Biomimetic Coatings Federico Caneva Soumetz, Laura Pastorino, Carmelina Ruggiero

Nanometer-sized structures have been found to interact with cell function and development. In tissue engineering, the fabrication of bioactive devices which mimic physiologic conditions has a key role in eliciting specific cellular responses and in guaranteeing long term success of implants. To this regard the layer by layer (LBL) self assembly technique is an efficient method to develop nanostructured thin films. This technique was used to assemble biomimetic coatings containing fibronectin, an adhesive glycoprotein of the extracellular matrix (ECM). The deposited films were then tested for the response of a line of human osteoblast-like cells in order to evaluate their potential for bone tissue repair purposes. The assembled films resulted to be effective in improving cell adhesion and proliferation. Therefore, this technique shows a high potential for the optimization of the surface properties of biomaterials.

172 Nanodiamond Hydrogels as Efficient and Biocompatible Transmembrane Drug Carriers Houjin Huang, Erik Pierstorff, Eiji Osawa, Dean Ho

Recently, biological studies of nanocarbon materials have attracted much attention. While the scientific community has primarily focused on the potential biological applications of fullerenes and carbon nanotubes, another important form of nanocarbon materials, nanodiamonds (NDs), are beginning to emerge as alternative candidates for similar and other applications due to their high biocompatibility, as revealed in our recent study. In this work, we present the first utilization of nanodiamond hydrogels as efficient biocompatible drug carriers. Both anti-inflammatory and anti-cancer drugs have been successfully coated on nanodiamonds and integrated into their aggregates via electrostatic and physical interactions to form slow release drug systems. In addition, in vitro studies have indicated that the NDs can efficiently carry drugs into the cells.

124 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 174 Examination of Nanopolymeric Impact Upon Cyto-Regulatory Gene Programs Erik Pierstorff, Dean Ho

Block copolymers that possess nanoscale thicknesses represent an important class of biomimetic materials with potential applications in drug delivery, membrane/protein-based devices, as well as cellular interrogation platforms for basic science studies. A key element that serves as the foundation for the translational applicability of this material is the examination of its effects upon cyto-regulatory gene programs that govern processes such as cellular stress and inflammation. With a better understanding of the cellular response to these materials, improved design principles can be examined towards the utilization of these polymers for in vivo/biomedical applications. Here we present a comprehensive assessment of the basal levels of secretion for a spectrum of inflammatory cytokines/molecules including tumor necrosis factor-alpha (TNFα), interleukin-6 (IL-6), interleukin-12 (IL-12), as well as inducible Nitric Oxide Synthase (iNOS) in response to nanopolymer integration in vitro. In addition, we examine the effects of cellular incubation with triblock copolymer in solution upon morphology as well as growth capabilities. The foundational information gleaned from this study will provide an important glimpse into the internal cellular response to abiotic contact towards the forging of devices fabricated at the interface of biology and artificial materials.

180 Nano-Biosensor based on Protected Glucose Oxidase Nanoparticles Keum Ju Lee, Dong-Hwa Yun, Min Jung Song, Woo-Jin Lee, Suk-In Hong

Covalent modification of redox enzyme-glucose oxidase (GOx)-within porous composite organic/inorganic network was described. The polymerization of organic/inorganic network was synthesized via a three-step process, which consisted of a covalent modification of GOx followed by a polymerization between modified enzyme and methacryloxypropyltrimethoxysilane (MPS) and then hydrosis and crosslinking. The synthesized GOx nanoparticles were less than 20nm in size. They were observed by transmission electron microscope (TEM). The nano-biosensor based on protected GOx nanoparticles demonstrated extension of primarily lifetime and detection of extremely limited concentration (pM) in human serum. The hybrid organic/inorganic network was determined by application of protected glucose oxidase nanoparticles in electrochemical nano-biosensor. The hybrid enzyme nanostructures were expected as a method to stabilize enzyme for other biocatalytic application.

125 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 212 Electric Field-Induced Release of Sulfosalicylic Acid from Poly(vinyl alcohol) Hydrogel Kanokporn Juntanon, Anuvat Sirivat

This study evaluated and characterized the use of poly (vinyl alcohol) (PVA) hydrogels as matrix/carriers for a drug in the Electrically Controlled Drug Delivery System. The drug-loaded PVA hydrogels were prepared by solution casting using sulfosalicylic acid as the model drug and glutaraldehyde as the crosslinking agent. The mesh or pore size of the PVA hydrogels were determined using scanning electron microscopy (SEM). The mesh or pore size of PVA hydrogels increased with decreasing crosslinking ratio. The release mechanisms and the diffusion coefficients of hydrogels were studied using a modified Franz-Diffusion cell in acetate buffer at pH 5.5 and at the temperature of 37 0C for 48 hours, in order to determine the effects of crosslinking ratio and electric field strength. The diffusion coefficients of drug in PVA hydrogels increased with decreasing crosslink ratio. Moreover, the diffusion coefficients of drug in the PVA hydrogels depended critically on electric field strength between 0-5 V.

217 Polythiophene/Acrylonitrile-Butadiene Rubber as an Artificial Muscle Pacharavalee Thipdech, Anuvat Sirivat

Acrylonitrile-butadiene rubber (NBR) and blends of acrylonitrile-butadiene rubber/poly(3-thiopheneacetic acid), NBR/P3TAA, were prepared to investigate electrorheologiacl properties, dielectric properties, and electrical conductivities. Electrorheological properties were carried out under an oscillatory shear mode in range of frequency from 0.1 to 100 rad/s at various C to°electric field strengths from 0 to 2 kV/mm at fixed temperature of 27 observe the effect of acrylonitrile content (ACN) in pure rubbers and particle , increases′concentration in the blends. For pure NBR, the storage modulus, G with increasing electric field strength. However, G’ becomes saturated with increasing electric field strength beyond 1000 V/mm. The storage modulus respons ) to study the effect of′ε) were correlated with the dielectric constants (′GΔ( ACN content. With increasing ACN content, the modulus linearly increases with dielectric constants. With the conductive polymer particles added into the highest ACN content rubber matrix (NBR1), the modulus of blend film increases because of the electrostriction force between particles and the dielectric constant is also increased.

126 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Nano System Architecture and Reliability (2C3)

Time: 13.00 – 15.00 Room: 604 Session Chairs: Detlev Grützmacher and Ganapathiraman Ramanath

56 Automatic Design of Reliable Systems Consisting of Nano-Elements Irene Eusgeld, Klaus Echtle, Hans-Dieter Kochs, Philipp Limbourg

The design of nano structures is considered a challenge for design methods, which have to cope with much more elements than in the case of traditional VLSI. An appropriate technique for efficiently connecting large numbers of nano elements is still missing. As already known such elements will be unreliable due to unavoidable physical quantum effects. The possibility to combine and to modify the standard patterns of fault tolerance for an improved nano systems reliability leads to a drastic increase of the design space. An extremely high number of nano-devices can be used for various redundancy schemes and many combinations thereof, thus promising an efficient solution to the reliability problem of nano devices. This paper proposes a heuristic design method based on a specific type of genetic algorithms. Its representation of systems as well as its fitness function and the underlying fault model have been adapted for the design of fault-tolerant nano systems.

59 Towards Reliability Improvement for Nanoelectronic Circuits Using Gate Replication Chunhong Chen, Feng Zhou

We present gate replication architectures as a redundancy scheme toward increasing the reliability of individual logic gates. We focus on deriving the fundamental relationship between gate replication and reliability improvement, and report both theoretical analysis and simulation results. The proposed idea can be applied to any nanometer-scale digital logic.

127 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 131 Architecture of Neural Synaptic Array - Design and Simulation Michel He, Jacques-Olivier Klein, Eric Belhaire

In this paper, we present the design and electrical simulation of an artificial neural network architecture to implement the Look-Up Table of reconfigurable circuits. The various cells of schematic used only the carbon nanotubes semiconductors (CNTFET), and the non volatile multi-level resistance. The compatibility between CNTFET and non volatile multi-level resistance in the state of the art has been studied. Then the electrical circuit simulation results demonstrate successful learning of the linearly separable logical functions.

136 Fault Tolerant Structures for Nanoscale Gates Ferran Martorell, Sorin Cotofana, Antonio Rubio

Predicted device reliability for nanoelectronics indicates that redundant design will be necessary to build reliable nanosystems. Up to date, several fault tolerant techniques have been proposed and analyzed. However, the fabrication complexity of those circuits, which directly affects the final circuit reliability, is not usually considered. In this paper, we compare two fault tolerant techniques, NAND Multiplexing (NM) and Averaging Cells (AC), as possible solutions to improve the nanoscale gate reliability. First, we propose nanodevice specific layouts for the two techniques. Then, we introduce nanotechnology oriented models to evaluate the area cost and reliability of the gates. Our simulations indicate that NM based gates are more reliable than AC gates when the error probabilities of the circuit parts are lower than 0.003. However, when this value is exceeded (which is expected for electronic nanotechnologies) AC gates are more reliable at a lower area cost.

247 Holding Preserving in RTD-based Multiple-valued Quantizers Núñez Juan, Quintana José M., Maria Avedillo

Multiple-valued Logic (MVL) circuits are one of the most attractive applications of the Monostable-to-Multistable transition Logic (MML), and they are on the basis of advanced circuits for communications. The operation of a quantizer has two steps: sampling and holding. Once the quantizer samples the signal, it must maintain the sampled value even if the input changes. However, holding property is not inherent to MML circuit topologies. A procedure to obtain the relation between circuit parameters in order to achieve a correct operation is described.

128 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 277 Probabilistic Error Modeling for Sequential Logic Karthikeyan Lingasubramanian, Sanjukta Bhanja

Reliability is a crucial issue in nanoscale devices including both CMOS (beyond 22nm) and non-CMOS. Devices in this regime tend to be more prone to errors due to thermal effects creating uncertainty in device characteristics. The transient nature of these errors commands the need for a probabilistic model that can represent the inherent circuit logic and can measure the errors. In sequential logic the error occurred in a particular time frame will be propagated to consecutive time frames thereby making the device more volatile. Any model that can represent a sequential logic should handle both spatial dependencies between nodes in a single time slice and temporal dependencies between nodes of different time slices. While modeling error in sequential logic the complexity arises in handling the temporal dependencies due to the feedback. Essentially, the feedback makes the system non-causal where outputs depend not only on inputs but also its own previous values. Depending on the circuit structure and the nature of feedback, various circuits would offer different degree of temporal dependence. In this work we propose a probabilistic error model for sequential logic that can measure the average output error probability that account for the spatio-temporal nature of the inherent dependencies using an temporally evolving causal Bayesian Networks also called Dynamic Bayesian Networks.

392 Redundancy Optimization for Clock-Free Nanowire Crossbar Architecture Yadunandana Yellambalase, Ravi Bonam, Minsu Choi

In this paper a method is being proposed to find the optimal dimension of Programmable Gate Macro Block (PGMB) in clock-free nanowire crossbar architecture. A PGMB is a nanowire crossbar matrix with discrete number of rows and columns on which the NCL (Null Convention Logic) gates can be programmed. This method uses inherent redundancy to route through defective crosspoints. A 6 X 10 defect-free crossbar can be used to program any of the 27 threshold gates. Due to imperfections and variations in nanoscale manufacturing process, high defect densities are anticipated. Thus, such defects should be located when tested and the logic has to be rerouted around them to maintain proper functionality. This paper discusses this problem and tried to find an optimal solution through simulations. In the final submission, more effective logic mapping techniques will be proposed and validated.

129 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Invited Session: Advanced Nano-Fabrication I (2D3)

Time: 13.00 – 15.00 Room: 605 Session Chairs: Stella Pang and Stepha Chou

419 Nanotechnology for DNA Control in Fluidic System Stella Pang

Nanotechnology can be applied to fabricate fluidic channels and microsystems for biomedical applications such as DNA analysis. Reversal nanoimprint has the unique capability of building three dimensional (3D) nanochannels in integrated fluidic system. Combining UV exposure with reversal nanoimprint, low temperature and low pressure can be used to pattern arrays of nanochannel network over a large area. In this presentation, examples of reversal UV nanoimprint technology for 3D fluidic system will be demonstrated. In addition, control of DNA placement and stretching in the nanochannels will be shown.

454 Status of Nanoimprint Lithography: Technology, Applications and Commercialization Stephen Y. Chou

Since the proposal and demonstration of nanoimprint lithography (NIL) as a low-cost high-throughput sub-10-nm manufacturing method in 1995 [1], the field has been growing rapidly in development, applications and commercialization in the past 12 years. The talk will present the advances in NIL made at Princeton NanoStructure Lab as well as commercialization at Nanonex Corp. Particularly, the talk will address (a) NIL progresses in minimum feature size (6 nm half-pitch), printing areas (over 50 in-sq), alignment (sub-20 nm), pattern shapes (2D and 3D), imprinting areas, materials and masks; (b) NIL applications in different disciplines, such as nanoscale electronics (nano-MOSFETs and SRAMs), photonics, displays, data storage (optical and magnetic), biotech, chemical synthesis and advanced materials, and (c) commercialization of NIL technologies at Nanonex, which is a NIL solution company who has provided NIL tools, resists, masks, and processes to over hundred customers. The talk will conclude that even the success of NIL in its first 12 years has been spectacular, but it is just a beginning; we haven’t seen anything yet! NIL will serve as an enabling ubiquitous manufacturing engine to propel future research in nanotechnology, future manufacturing of micro/nanostructures, and hence future discoveries and commercialization in nanotechnology.

130 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 92 A ZEP520/LOR Bilayer Resist Lift-off Process by E-Beam Lithography for Nanometer Pattern Transfer Tu Deyu, Liu Ming, Liwei Shang, Changqing Xie, Xiaoli Zhu

In this work, a bilayer resist system with ZEP520 as the top layer and lift-off resist (LOR) as the bottom layer for lift-off process was investigated. The formation of undercut was studied as a critical step which makes lift-off process much more feasible in bilayer resist process. Using different dissolution rates of LOR layer, the length of undercut can be well controlled, providing reliable process. The top layer of ZEP520 is more efficient than other resists (PMMA etc.) for e- beam lithography, due to its high resolution and high sensitivity. Here, a set of process parameters have been optimized to fabricate Cr metal lines with a width of less than 70 nm. This bilayer lift-off resist system can be widely used in nano- fabrication for various nano-scale structures and devices.

114 Nanopores Fabricated by focused ion beam milling technology Gu Changzhi, Yue Shuanglin

A new approach to fabricating nanopore is presented. It is based on focused ion beam (FIB) sputtering to mill through a silicon nitride (Si3N4) membrane first, then followed by aluminum nitride (AlN) thin film deposition through the milled hole to narrow the pore size. FIB sputtering properties of Si3N4 membranes were investigated in order to achieve high aspect ratio holes through the membrane. The parameters of AlN deposition were optimized so that the final nanopore size can be finely controlled. A nanopore arrays with 70 nm pore-diameter was made in a Si3N4 membrane by FIB milling technology. The following AlN deposition was able to narrow the nanopores further down to 12 nm pore-diameter.

322 Fabrication of Patterned Magnetic Recording Medium using Ion Beam Proximity Lithography Vishal Parekh, Ariel Ruiz, Ch E, James Rantschler, Paul Ruchhoeft, Sakhrat Khizroev, Dmitri Litvinov

We describe the lithographic structuring of large-area patterned medium samples with sub-50nm features using ion beam proximity lithography. In this process, a silicon nitride stencil mask is fabricated with an array of circular openings. When this mask is irradiated with a broad energetic helium ion beam, ions passing through the openings damage the resist on a substrate to replicate the entire mask pattern with a single exposure. The quality of the patterns formed in this system is primarily limited by the quality of the stencil masks. Hence, the emphasis of this work has been to develop a reliable mask fabrication process that can achieve a size uniformity that is suitable for patterned media. We have developed a mask fabrication approach that incorporates palladium as a hard mask for transferring the lithography pattern through a silicon nitride membrane. A conformal gold coating allows for further reduction of the mask features without a significant increase in the feature size variation. We are currently measuring the size variation of the pattern at every step in the fabrication process and are developing patterned medium prototypes.

131 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 388 Application of Focused Ion Beam in 30 nm Nanoimprint Shen Shou Chung, Bohr Ran Huang, Yu-chun Chen, Yonhua Tzeng

Molds for hot-embossing nanoimprint made by FIB at 30 nm line width has been made, and the pattern has been successfully transferred onto a PMMA surface. We use 7 nm Ga+ beam to carve the pattern, and the resultant line width to beam diameter ratio is around 6 for an aspect ratio of 2. Higher aspect ratio results in re-deposition of milled out materials. For features smaller than 30 nm, re-deposition causes blurring of features. Re-deposition can be reduced by a shorter dwell time or gas-assisted etching. There is a trade off between dwell time and throughput. Best results can be achieved with high hardness materials; the lack of conductivity for some materials can be remedied by a thin layer of conductive Pt coating on the surface before doing FIB patterning. The Pt coating is removed before nanoimprinting.

Nanotubes and Nano-Particles (2E3)

Time: 13.00 – 15.00 Room: 606 Session Chairs: Pinaki Mazumder and Sophie Tan

67 Surface Plasmon Dynamics Of A Metallic Nanoparticle Pinaki Mazumder, Kyungjun Song

The paper presents a theoretical framework to explain the surface plasmon dynamics in a single metallic nano-particle (MNP). The plasmon physical mechanisms, i.e, internal oscillation energy, electromagnetic near-field energy, electrostatic potential energy, and power-flow are analyzed here in terms of electric dipole moment of a single metallic nano-particle. The resonant mode shift and hybridization of a metallic nano-shell with annular metallic region are also calculated on the basis of internal oscillation energy and electrostatic approximation. The paper also calculates the power-flow due to relaxation, radiation, plasmon-coupling in the surrounding matrix, and applied electromagnetic (EM) signal. The law of conservation of energy is used to compute the relaxation damping, radiation damping, and surrounding matrix coupling effect. Finally, the resonant behavior of a single metallic nano-particle is represented by a lumped resonant circuit model. The lumped circuit parameters are determined by deriving the equation of motion of electric dipole moment and the electromagnetic near-field energy outside the metallic nano-particle.

132 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 120 Electrical Transport Properties of Alkali-Metal/Halogen Encapsulated Single-Walled Carbon Nanotubes Jun Shishido, Toshiaki Kato, Wataru Oohara, Rikizo Hatakeyama, Kazuyuki Tohji

The encapsulation of alkali-metal or halogen inside single-walled carbon nanotubes (SWNTs) can be realized by a novel alkali-halogen plasma irradiation method. According to electronic transport measurements, it is found that a p-type semiconductor behavior can be strongly improved by encapsulating I atoms. Furthermore, a p-n junction diode-like feature is observed by selectively encapsulating both Cs and I atoms in one individual SWNT.

165 Environment Effect on Structure, Size Control and Stability of Zn and ZnO Nanoparticles Shima Fardad, Reza Massudi

Effects of liquid surrounding on formation, initial size, colloidal stability and optical properties of zinc and zinc oxide nanoparticles, synthesized by pulsed laser ablation method in different liquid environments are studied. In this work, Zn and ZnO nanoparticles were produced by 532nm harmonic of a Nd:YAG laser ablation of a pure zinc metal target in different aqueous solutions of deionized water, ethanol and sodium hydroxide with various concentrations and pH. For characterizing nanoparticle optical properties, structure, size and growth; UV-VIS absorbance and FTIR spectroscopy, XRD, AFM and TEM were employed.

176 On the Structural Stability of Dye-Doped Silica Nanoparticles Dongling Ma, Sophie Tan, Zygmunt Jakubek, Benoit Simard

Encapsulation of dye molecules into a silica framework promises to overcome some of the functional limitations of free organic dyes. In the present work, structural stability of tetramethyl rhodamine-dextran (TMR-dex) doped silica nanoparticles (NPs) prepared through a reverse microemulsion method is probed with respect to observable changes of NP morphology and dye leaching from the NPs during their storage and post-synthesis modification. It is found that NPs synthesized with the higher (of two samples) water concentration convert during processing into hollow-like spheres. For the NP prepared with the lower water concentration, which show no observable morphology variations, dye leaching under “torpid” and “dynamic” conditions is assessed. The “torpid” stability is determined by measuring the percentage of leached dye molecules after shelf-storing the NPs in water, ethanol or 2-(N-morpholine)-ethane sulphonic acid (MES) buffer for two weeks. The results demonstrate that dye leaching is most severe in MES while almost negligible in ethanol, suggesting ethanol to be the most suitable medium for NP storage. Dye-

133 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... doped NPs normally require surface modification prior to their use for biolabeling or bioimaging, with common modification procedures involving multiple centrifugation/sonication steps. The “dynamic” stability is, thus, evaluated by measuring the dye loss from NPs after the modification. It is found that over 70% of dye molecules are retained by the NPs after modification.

239 Applications of Magnetic Nanoparticles in Engineering and Biomedical Science Tien-Li Chang, Ya-Wei Lee, Hung-Yi Lin, Fuh-Yu Chang, Ping-Hei Chen

This study mainly employs magnetic nanoparticles (MNPs) for an amazing variety of engineering and biomedical applications. Herein MNPs are fabricated from fine ferromagnetic particles of iron ferrite by chemical co-precipitation technique, and their average size is about 27 nm via HR-TEM micrograph and XRD analysis. In this study, MNPs have been demonstrated its excellent properties of heat transfer, electric conductivity, magnetism within the applications for multi-loop pulsating heat pipe (MLPHP), switch-based nanodevice, microfluidic on-chip system and nanogap-based DNA sensor. Based on the effect of magnetic field for MNPs, MLPHP can enhance thermal performance itself at different heating power. Besides, the switch-based nanodevice with MNPs can efficiently add and remove an electrical function of electron charging with current shift. Furthermore, the microfluidic chip utilizing MNPs is demonstrated that can be suited for drug delivery. Finally, we use MNPs to develop an electrical approach to detect femto-molar DNA that MNPs can amplify the low target DNA concentration for a clinical gene diagnostic system.

390 RC Circuit Model for Multi-Walled Carbon Nanotubes Arthur Nieuwoudt, Yehia Massoud

To alleviate the problems associated with current copper interconnect technology, multi-walled carbon nanotubes (MWCNTs) have been proposed as a potential solution for on-chip communication in VLSI applications. In this paper, we develop an equivalent RC circuit model for MWCNT interconnect that captures both DC conductance and high frequency impedance due to capacitive effects. Based on the circuit model, we find that MWCNT-based interconnect can have substantially less delay than copper wires in global interconnect applications.

134 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Nano-Photonics and Nano-Optoelectronics (2F3)

Time: 13.00 – 15.00 Room: 607 Session Chairs: Ching-Fuh Lin and Stefan Dimov

31 Excitation-power-dependent Photoluminescence of the Selective-area-grown Hexagonal Nanopillars with Single InGaAs/GaAs Quantum Well on the GaAs (111)B Substrate Lin Yang, Junichi Motohisa, Takashi Fukui

We report on the excitation-power-dependent photoluminescence of the selective-area-grown hexagonal nanopillars with single InGaAs/GaAs quantum well on the GaAs (111)B substrate. With an increase in the excitation power density, the PL peak position shift to the higher energy, the PL peak width increases and the PL intensity increases. A model considering piezoelectric effect, photon-screen effect and band filling effect was used to calculate the PL peak position. The agreement between the experimental results and the calculation results is very good.

220 Electroluminescence from strained SiGe quantum dot light-emitting diodes C.W. Liu, Cheng T.-H., M. H. Liao

In order to get greater functionality, we integrate Si chip with the Si based electro-optics. Both light emitting diode and detector are essential to achieve this goal. The Si MOS light emitting diode [1,2] has been demonstrated to emit the 1.1 µm infrared at Si band edge and the SiGe quantum dot MOS detector [3] can detect 1.3 ~ 1.5 µm infrared. The ~1.5 µm infrared emission from the SiGe quantum dot p-type-intrinsic-n-type diode was also observed in previous study. However, this structure is not fully compatible with Si chip fabrication, because the building device is MOS structure. In this letter, we report that the SiGe quantum dot MOS tunneling diode can emit both the ~1.5 µm infrared from the SiGe quantum dot and ~1.1 µm infrared from Si band edge. The strain and intermixing effect of different SiGe quantum dot layer are also studied.

135 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 223 Blue Electroluminescence from Metal/Oxide/n-6H-SiC Tunneling Diodes C.W. Liu, S.R Jan, M. H. Liao, Cheng T.-H.

Luminescence in the deep green to blue spectral region requires materials with a wide bandgap. Silicon carbide (SiC) has a high potential for device applications because of the wide bandgap. The p-n junctions are required to fabricate conventional light emitters, and can be produced by ion-implantation, epitaxial growth methods, etc. However, the simple metal-oxide-semiconductor (MOS) type light emitting diode (LED) has been demonstrated in Si [1], SiGe, and Ge. It is of great interest to apply the MOS LED structure on SiC substrate. It is indeed observed the electroluminescence from the SiC MOS tunneling diode, but the radiative recombination is defect-related at inversion bias quite different from electron-hole plasma radiative recombination of Si, Ge, and SiGe MOS devices at accumulation bias.

243 Electroluminescence Response of plasmonic AlGaInP Light Emitting Diodes Jeff Kettle, Richard Perks, Georgi Lalev, Stefan Dimov

In this paper we present some electroluminescent characteristics of an AlGaInP visible Light Emitting Diode with a top surface resonant plasmonic hole-array grating. Light output saturation effects appear to be suppressed in the textured LED as compared with a non-textured device; leading to an improved spatial intensity distribution.

265 Improved Spectral Response of an InAs QDs RC-SACM APD with a Ta2O5/SiO2 DBR Dong Ho Kim, Hong Joo Song, Cheong Hyun Roh, Kyoung Chan Kim, Shi Jong Leem, Tae Geun Kim, Cheol- Koo Hahn

We report the improvement of spectral response in an InAs QDs resonant-cavity separate absorption, charge, and multiplication avalanche photodetector (RC-SACM APD) by using Ta2O5/SiO2 dielectric top distributed Bragg reflectors (DBRs). By using the top DBR enhanced the resonant-cavity effect (RCE) of the APD; and thereby, the wavelength selectivity in absorption spectrum and its tuning properties were remarkably increased. The absorption wavelength was 1092 nm, close to the target wavelength of 1100 nm, and its spectral linewidth was 19 nm.

136 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 309 Highly Sensitive Nano-Photonic Embedded Sensor Roxana Beiu, Constantin D. Stanescu, Valeriu Beiu

This paper will detail a novel enabling fiber optic sensor based on the use of a photonic crystal structure embedded in the core of a fiber. We will start by briefly introducing photonic crystals (PCs) and reviewing fiber optics (FOs) used as sensors for mechanical deformations. We will then show that embedding PC structures into standard monomode FOs allows for highly sensitive detection of mechanical deformations. Finally, we will detail the sensing mechanism principle and evaluate its sensitivity. Extensive simulation results have been performed. They support our claim that embedded PCs can be used to sense mechanical deformations down to tens of pico-meters range.

339 Analyzing Fundamental Propagation Modes in V-Groove Plasmonic Waveguides Amir Hosseini, Hamid Nejati, Yehia Massoud

In this paper, we analyze the fundamental subwavelength modes in V-groove channel plasmon polariton (CPP) waveguides and their propagation properties using an improved full-vectorial finite difference frequency-domain technique (FDFD). We show that CPP propagation properties mainly depends on the groove angle rather than its depth.

Molecular Electronics: Modeling and Simulation I (2G3)

Time: 13.00 – 15.00 Room: 608 Session Chairs: Tse-Chuan Chou and Yehia Massoud

70 Performing Fast Addition and Multiplication by Transferring Single Electrons Zhang Wancheng, Wu Nanjian

This paper proposes novel circuits to perform fast addition and multiplication by transferring single-electrons. The circuits consist of MOSFET-based single-electron (SE) turnstiles. We use non-binary arithmetic to implement fast PD2,3 adder in which the number of electrons is used to represent discrete multiple-valued logic states and which performs arithmetic operations by manipulating the single-electrons. The operating speed of the adder does not depend on its operand length and is as high as 1GHz with 2nW power dissipation. We construct a 12×12bit multiplier using the PD2,3 adder. The proposed circuits have much smaller transistors than conventional circuits.

137 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 146 Modeling FinFETs Using Non-Equilibrium Green's Function Formalism: Influence of Interface- Roughness on Device Characteristics Dragica Vasileska, Hasanur Khan, Denis Mamaluy

We use Contact Block Reduction (CBR) method to investigate the influence of interface roughness on quantum transport properties in nanoscale FinFET devices. We study the influence of interface roughness on device capacitance, drain current, and gate leakage for different device pa-rameters and operating conditions. Our simulation results show that gate leakage is significantly affected by surface roughness. On the other hand, on-current is comparatively less sensitive to the interface roughness for FinFET devices with narrow fin width. Furthermore, interface roughness significantly affects both the intrinsic switching speed and the cut-off frequency of FinFETs with narrow fin thickness.

152 A Novel Spin Injection Field Effect Transistor Jun Wan, Marc Cahay, Supriyo Bandyopadhyay

We describe a new Spin Injection Field Effect Transistor (SIFET) with a quasi one-dimensional semiconductor channel and ferromagnetic source/drain contacts. We show that even when the ferromagnetic contacts are non-ideal with less than 100% spin polarization, the spin injection efficiency from the source into the channel can be switched from nearly 100 % to nearly -100 % with a small swing in gate bias at a temperature of 0 K. This corresponds to switching from mostly majority spin injection to mostly minority spin injection at the source end. If the spin polarization in the drain has the same sign as that in the source, then the drain will preferentially transmit injected majority spins while blocking minority spins. Therefore, one can switch the drain current from a maximum value to nearly zero with the gate bias (if there is no spin relaxation in the channel), thereby realizing transistor action. The current modulation and transistor action deteriorate with increasing temperature.

316 Building Blocks for Delay-Insensitive Circuits using Single Electron Tunneling Devices Saleh Safiruddin, Sorin Cotofana

This paper presents a set of basic building blocks that corresponds to a universal set of primitives for delay insensitive circuits. We propose single electron tunneling circuit topologies and verify them by means of simulations. The simulations performed with SIMON 2.0 indicate that the circuits function as expected. Moreover the proposed circuits are input-output level compatible thus they can be potentially utilized in the implementation of larger asynchronous circuits.

138 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 354 The dependence of excitonic characteristics on the interface charge distribution with MQB Tzer-En Nee, Jen-Cheng Wang, Hui-Tang Shen, Ya-Fen Wu

Unique correlations between the excitonic characteristics and hetero-interface charge distribution of InGaN/(In)GaN multiple quantum-well light-emitting diodes (LEDs) were investigated over a broad range of temperatures. The dependence of non-unity ideality factors extracted from the current-voltage analysis on temperature determines the carrier-transport mechanisms in the heterodevices. The characteristic energy Eo for the LEDs with In composition InxGa1-xN/GaN multiquantum barriers were found to be 2.90, 3.06, and 3.41 eV for x = 0.005, 0.01, 0.02, respectively. Correspondingly, the temperature dependent electroluminescence observations suggest that the characteristic energy Eo anomaly caused the spectral intensity to deteriorate.

437 Carbon Nanotube Bundle-Based Low Loss Integrated Inductors Arthur Nieuwoudt, Yehia Massoud

In this paper, we propose low loss on-chip inductors leveraging low resistance single-walled carbon nanotube (SWCNT) bundles. We develop a model for the current redistribution in SWCNT bundles, which we find can have a large effect on the resistance of nanotube-based inductors. We then compare the performance of optimized inductors realized using SWCNT bundles and standard copper technology. The results indicate that SWCNT bundle-based inductors can provide up to a 144% increase in quality factor.

139 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

Invited Session: Nano-Robots, Nanomanipulation and Nanomanufacturing (2A4) Time: 15.30 – 17.30 Room: 601 Session Chairs: Mettin Sitti and Sergej Fatikow

139 Microrobot-based Nanoindentation of an Epoxy-based Electrically Conductive Adhesive Sergej Fatikow, Julian Mircea, Albert Sill Microrobot-based nanoindentation is a relatively new testing technique, which uses microrobot based methods for performing nanoindentation experiments. The use of the microrobot-based nanoindentation is a example how microrobotic technology can help the materials research. In this work, the hardness of an epoxy-based silver-filled electrically conductive adhesive (ECA) type PC 3002 has been determined using this method. Flat ECA specimens have been investigated after a first curing at 70°C for 120 minutes, respectively after a curing time of 150 minutes, 180 minutes, 240 minutes, 300 minutes, and finally after 325 minutes at the same temperature. The maximum indentation depth was 1 µm. The hardness of the ECA has shown an increase with the increase of the curing time at constant temperature. The set-up uses a Berkovich diamond tip for performing nanoindentation tests. The set-up requires calibrations with reference specimens (fused silica and sapphire) for calculating hardness and Young’s modulus of the tested material. Preliminary results are very promising: by comparing the slope of the loading stage of the nanoindentation tests on different specimens, the difference in hardness can be qualitatively evidenced.

300 Bacterial Flagella Assisted Propulsion of Patterned Latex Particles: Effect of Particle Size Bahareh Behkam, Metin Sitti Molecular motors are compact, efficient and sophisticated micro-/nanoscale actuators. However, the process of isolating molecular motors from microorganisms has a low yield; moreover, providing the isolated motors with energy as well as controlling them is very challenging. We have previously demonstrated that flagellar motors within the intact cells of Peritrichous bacteria can be used for controlled propulsion of 10 µm Polystyrene beads. In pervious experiments, bacteria were randomly attached over the entire surface of the microbeads. In this work, the microbeads are patterned in order to control the location of bacterial attachment and enhance the efficiency of the propulsion and the directionality of the motion. It is shown that patterned beads are significantly more efficient, yielding nearly the same speed as unpatterned beads for half the number of attached bacteria. More importantly the directionality of the motion is improved by 25%. Furthermore, the effect of microbead size on the attachment density and consequently the propulsion force is investigated.

140 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 304 Dry Spinning Polymeric Nano Fiber Arrays with Controlled Porosities and Fiber Diameters using Glass Micropipettes Amrinder Nain, Cristina Amon, Metin Sitti

We present a method for dry spinning polymeric nano fiber arrays. In this technique polymer solution is continuously ejected from a stationary glass micropipette and the fibers are deposited as continuous arrays in parallel and web configurations on a rotating substrate mounted on to a translation stage. As the polymer solution exits the glass micropipette, ambient air is used to evaporate the solvent, thus solidifying the fiber which is then deposited on the rotating substrate. For a given polymer solution, altering the processing parameters allows depositing fiber arrays with highly tunable porosities and uniform fiber diameters. The fiber array porosity and the fiber diameter are observed to decrease with increasing angular velocity of the rotating substrate at a constant translational stage velocity. Fiber array breaking strength experiments as a function of porosity show higher loads required to break low porosity arrays, which is critical in designing stronger materials. Additionally biological scaffolds built using this technique are investigate for adhesion of cells as a function of fiber array porosity and fiber diameter.

305 Electrostatic Micromanipulation of a Conductive/Dielectric Particle by a Single Probe Shigeki Saito, MIn Han, Kunio Takahashi

This study reports the possibility of electrostatic micromanipulation of a conductive/dielectric particle using a single probe. The manipulation system consists of three objects: a conductive probe as a manipulating tool, a conductive plate as a substrate, and a conductive/dielectric particle that dubs as a micro-particle. For a conductive particle, a micromanipulation technique by applying accelerating and decelerating voltage with high switching rate is developed. We theoretically determine the desired voltage as the function of time by boundary element method, and experimentally verify the voltage effectively works with a 30-micrometer-in-diameter solder particle. For a dielectric particle, we experimentally demonstrate the successful picking-up of a 60-micrometer-in-diameter dielectric particle (phenol, polystyrene) from the substrate by electrostatic force. Besides, especially for a polystyrene particle, we observe the phenomenon of a micro-particle going back and forth between the substrate and the probe-tip like a micro-dribble even when just the constant voltage is applied. We discuss the possible mechanism of this interesting phenomenon and the feasibility of electrostatic manipulation for a dielectric micro-particle.

141 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 395 Batch Fabrication of Nanotube Transducers Arunkumar Subramanian, Tae-Youl Choi, Lixin Dong, Dimos Poulikakos, Bradley Nelson

Relative displacements between the atomically smooth, nested shells in multi-walled carbon nanotubes (MWNTs) can be used as a robust nanoscale motion enabling mechanism for transduction applications such as bearings, switches, GHz-oscillators, shuttles, memories, syringes and actuators. Here we report on a batch fabrication paradigm suited for structuring large arrays of MWNTs into such devices in a parallel fashion. This effort is enabled by the synergistic integration of several key processes that include dielectrophoretic assembly of individual nanotubes onto nanoelectrodes, site selective shell engineering using electric breakdown with heat dissipation modulation using nanomachined heat sinks, and on-chip characterization. We anticipate this approach to enable the manufacturability of future nanoelectromechanical systems (NEMS) with sophisticated architectures.

440 A Method Research of Nanoscale Displacement Detection Based on AFM Zhikun Zhan, Yongliang Yang, Zaili Dong, Wen J Li

This paper proposes a method based on image processing to detect nanoscale displacements. First of all, we construct a relationship between the image space and the sample space. Let k represents the proportional coefficient of real length and pixel length. Then we detect the pixel displacement using the projection-matching method, which is based on image intensity distribution. Finally, we compute the real displacement by multiplying the pixel displacement by the proportional coefficient. After many experiments, it proves that this method is simple and can satisfy precision requirement.

142 IEEE-NANO 2007 Technical Digest

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Nano-manufacturing and Reliability (2C4) Time: 15.30 – 17.30 Room: 604 Session Chairs: Yonhua Tzeng and Garrett S. Rose

27 UV Enhanced Low Temperature Wafer Direct Bonding and Interface Quality Test Xiaohui Lin, Tielin Shi, Guanglan Liao, Zirong Tang, Lei Nie Ultraviolet (UV) exposure process, as an additional process following traditional wet chemical activation processes, was applied to low temperature hydrophilic silicon wafer direct bonding. The comparative trial was performed to investigate the effect of additional UV exposure. The process steps are described in detail. In order to test the interface quality of bonded pairs, infrared inspection, tensile strength test and SEM scan were performed and the results were given and discussed in detail. By infrared inspection system, the voids in the interface can be figured out and the bond rate can be calculated. It is found that bond rate of wafers treated with UV exposure for 5 minutes increased after annealing at 350oC while several voids would appear for exposure time of 10 minutes. Besides, it is found that as annealing temperature raised, the formed gases would be easy to accumulate in the voids thus the de-bond area and bond rate turn smaller. The relatively higher tensile strength up to 15.1MPa was obtained when exposed to UV for 5 minutes. Finally, typical SEM images were given with explanation of different thicknesses of intermediate layers due to UV exposure. It is conclude that as an additional cleaning and modification treatment, appropriate UV exposure is proven to be an effective technique to enhanced bond quality. High bond rate, tensile strength as well as thinner intermediate layer can be achieved by exposure to UV for 5 minutes. Prolonging the exposure time may cause decrease in bond- ability and affect the bond quality.

35 Hybrid Packaging of A Monolithic Multi-Sensor Xu Jingbo, Zhao Yulong, Jiang Zhuangde, Jing Weixuan

In order to satisfy the different packaging requirement of individual sensors in the monolithic multi-sensor chip, a hybrid packaging method is presented in the paper. The packaging method of multi-sensor makes use of high- resolutionstereolithography system of photopatternable resin constructing the main packaging structure in the way of batch production, low cost and good resolution. A monolithic multi-sensor which consists of three-axis accelerometer, absolute pressure sensor and temperature sensor is encapsulated by the hybrid packaging method. The hybrid packaging structure which is composed of the packaging ring, silicon cap, silicone sealant and soft silicone gel, can simultaneously provide direct interaction between pressure sensor and the pressure

143 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... variable to be measured as well as keep hermetic insulation for accelerometer and mechanical protection for the temperature sensor and all electrically components in the multi-sensor chip. The packaging ring which is the most important part in the hybrid packaging structure is fabricated by using high-resolution stereolithography system of photopatternable resin. At last the measure results show the hybrid packaging method is appropriate for the package of the monolithic multi-sensor chip. It has potential to be applied to a variety of multi-sensor.

47 Reliability Study on Poly-Si TFTs with Nanowire Channels under DC and AC Hot-Carrier Stress Yung-Chun Wu, Ting-Chang Chang, Po-Tsun Liu, Li-Wei Feng

This work studies reliability after dc and ac hot-carrier stress of polysilicon thin-film transistors (poly-Si TFTs) with single- channel and ten-nanowire channels, respectively. For single-channel (S1) poly-Si TFT, the device characteristics degradation under ac hot-carrier stress is severer than dc stress. In addition, the Vth and SS variation increases with the frequency increasing from 1 K Hz to 1 MHz. On the contrary, for ten-nanowire channels (M10) poly-Si TFT, the Vth and SS variation is much lower than the S1 TFT with different stressing frequency. These results indicate that the M10 TFT has less deep state generation after dc and ac stress. Because the M10 TFT has more effective NH3 plasma passivation than that of S1 TFT due to the ten split nanowire channels has wide NH3 plasma passivation area. Moreover, M10 TFT has robust tri-gate control can reduce the lateral electrical field and its penetration from the drain to reduce hot-carrier effect.

138 Measurement of Linewidth and Line Edge Roughness for 1D Nano CD Linewidth Standard Product Lines Guoqiang Han, Zhuangde Jiang, Weixuan Jing, Mingzhi Zhu

One-dimensional nano CD (NCD) linewidth standard product lines are prepared using multilayer thin films deposition technique. The Ti/SiO2 multilayer thin films are systematically deposited on silicon substrates in the conventional electron-beam evaporation system. Then a single nanometer scale line can be obtained on the cleaved cross-section of one multilayer thin films structure. The linewidth and line edge roughness (LER) have been evaluated by analyzing top- down scanning electron microscope (SEM) images off-line using image processing techniques. The average linewidth is less than 25 nm and LER is estimated.

144 IEEE-NANO 2007 Technical Digest

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332 Testing Molecular Devices in CMOS/Nano Integrated Circuits Peter Paliwoda, Deepak Maragal, Garrett Rose

Molecular electronics is a good candidate for a technology that may replace CMOS/Nano electronics. However, due to molecular complexity, it is expected to have a hybrid model initially, made of both molecular and CMOS/Nano components. The complexity of molecular devices introduces defects, yet due to its excellent density, which in memory applications is expected to reach 1011 b/cm2 [3], it is still an attractive technology. The goal of this paper is to investigate techniques of detecting defects on chip within the CMOS/Nano memory circuit, and eliminate them by reconfiguration. Essentially the proposed system will be self-healing with minimal loss of memory improving the reliability and the utility of the manufactured memory.

356 Packaging Carbon Nanotube Based Infrared Detector King Wai Chiu Lai, Ning Xi, Jiangbo Zhang, Guangyong Li, Hongzhi Chen

We present a fabrication and packaging method of infrared (IR) sensor chip using Carbon Nanotube (CNT) coated with parylene-c layer. CNT is found to be sensitive and can be operated near IR radiation. The method to package CNT sensing elements to avoid oxygen contamination is developed by combining dielectrophoretic (DEP) process to position the CNT with standard photolithography process. Parylene-c thin film is used as a conformal pin hole free insulating layer and oxygen barrier for protecting CNTs during the detection. The IR transmission properties of parylene-c layer and the influence on the response of the CNT sensor are studied. Our experimental results show that the CNT sensor exhibits current change when it is exposed to the IR laser. The sensing current percentage changes decrease when the parylene-c thin film substrate is placed between the CNT sensor and IR laser source. It implies the IR absorption behavior of parylene-c thin film and the thickness of the parylene layer that affects the least on the response of the sensor is estimated. Therefore, the packaging process can become possible to fabricate a CNT based IR sensor array which has more stable and reliable performance.

145 IEEE-NANO 2007 Technical Digest

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368 Reliability of Bi-stable Single Domain Nano Magnets for Cellular Automata Javier Pulecio, Sanjukta Bhanja

Quantum Cellular Automata, also known as QCA, has been touted as a pragmatic use of quantum phenomena which currently are detrimental in nano-transistor technology. Recently, QCA technologies has expanded into magnetism, an area referred to as Magnetic QCA, by exploiting the magnetic coupling interaction between neighboring cells (nano- magnets). The interactions of orderly fabricated nano-magnets and the viability of nano-magnetic structures as logical building blocks has yet to be explored in great detail. We have fabricated nano-scale Magnetic QCA cells and currently the scope entails determining how factors such as material, size, placement, and surface roughness affect the magnetic properties and coupling interactions between the nano-magnetic QCA cells.

387 Carbon Nanotubes on Flattened Tin Alloy Spheres in a Ball Grid Array (BGA) for Cold Cathode Applications Shen Shou Chung, Bohr Ran Huang, Chih-chia Chang, Yonhua Tzeng

Carbon Nanotube (CNT) is an excellent field emission source, and is widely explored in applications like Field Emission Display (FED), sensors, and cathodes for microwave device. In these applications, it is often necessary to attach CNT onto a metal surface, but it is not common to grow CNT directly on a metal with conventional CVD method and achieve good electrical conductivity, due to strong catalyst-surface interaction [1]. We devise a method to manufacture metal cathode by hot-bonding CVD grown CNT with Ball Grid Array (BGA) Tin alloy (Sn63/Pb37) 0.5 mm spheres on a pre- designated position on metal surface and form a suitable cathode for microwave device. The turn on field (defined as J= µA/cm2) is as low as 1.56 V/µm, the forming temperature is only 200 ºC, the field enhancement factor β reaches 2203, and the dynamic resistance is around 1.09 M.

146 IEEE-NANO 2007 Technical Digest

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Advanced Nano-Fabrication II (2D4) Time: 15.30 – 17.30 Room: 605 Session Chairs: Kevin J. Chen and Toshinari Isono

63 Direct-Write Micro/Nano-structure For Flexible Electronic Manufacturing Gaofeng Zheng, Lingyun Wang, Yinhong Dai, Daoheng Sun This work focuses on studying parameter optimization of electrospinning, and researching a new method of direct-write micro/nano-structure for flexible electronic manufacturing. A direct-write system base on Near-Field Electrospinning (NFES) is designed, in which both needle and probe can be used for electrospinning. Micro-structure with line width of several micrometers and nano-structure with diameter from 50nm to 500nm can be directed written respectively by needle and probe. When the electrospinning speed is compatible with spinneret or anode moving speed that is various from 3m/s to 7m/s, straight nanofibers or narrow thin film line without spiraled shape can be electrospun on the substrate. Continuous and smooth micro/nano-structure with accurate dimensions could be drawn on expected site and direction on substrate, which is suit for flexible electronic manufacturing.

75 Study of Nanopattern Forming with Chemical Coatings for Silicon-Based Stamp in Nanoimprint Process Tien-Li Chang, Hung-Yi Lin, Wen-Lang Lai, Fuh-Yu Chang, Jen-Hui Tsai, Shuo-Hung Chang

The purpose of this study is to present a silane molecule self-assembled monolayer (octadecyltrimethoxysilane: OTS- SAM) as anti-adhesive coatings to improve of silicon-based stamps for the developed nanoimprint lithography (NIL). In this work, the nanostructures of stamps are fabricated by electron-beam lithograph (BEL). The diameters of period pillar nanopatterns on the silicon-based stamps are 150 nm and 200 nm, receptively. The influence of silicon-based stamp substrate can be investigated by contact angle measurement after modifying the chemical coatings treatment for imprinted thin polymethyl methacrylate (PMMA) films. In addition, the study employs atomic force microscopy (AFM) to obtain a simultaneous observation for the morphologies of silicon-based and imprinted PMMA polymer nanostructures interface. The results indicate an over 95 % improvement for silicon-based nanopatterns with the anti-adhesive properties in NIL process.

147 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 113 Construction of Carbon Nanotube Networks Using Ferroin Solution Takahide Oya, Toshio Ogino

We investigate methods of fabricating a distinctive structure on a silicon substrate to grow a carbon nanotube network using a dried ferroin solution. A dried ferroin solution forms fissure structures on the substrates. The fissure structures have unique shapes and iron particles that act as catalysts for growing carbon nanotubes. Such structures should be suitable for fabricating 3D carbon nanotube networks. To confirm this, we use a thermal CVD of a hydrogen-methane gas system to grow carbon nanotubes on the structures. The density of carbon nanotube networks grown on the substrates seems to be higher when the concentration of the ferroin solution is stronger. Results indicate that the dried ferroin solution can not only produce distinctive structures for carbon nanotube growth as expected, but also control the growth.

128 Fabrication of Carbon Nanotube Thin Films by Wrapping with DNAs Toshinari Isono, Takahide Oya, Toshio Ogino

We have investigated uniform carbon nanotube (CNT) dispersion and fabricated CNT thin films on the solid surfaces. To prevent bundle formation, we have examined surface modification of both CNT surfaces and the substrate surfaces. To enhance the interaction between the substrate surfaces and the CNTs, the substrate surfaces were made hydrophobic, because CNTs are generally hydrophobic. When CNTs were dispersed on the hydrophobic surfaces, relatively uniform CNT thin films were formed, but the bundles were not dissociated. To weaken the interaction between the individual CNTs, CNT surfaces were coated with surfactants or biomolecules. High-density well-dispersed CNT thin films were fabricated by modifying CNT surfaces with single-stranded DNAs.

204 Fabrication of Vertical Position-controllable GaN Nanowires on (111) Si Substrate Congshun Wang, Zhenchuan Yang, Baoshun Zhang, Yong Wang, Hui Wang, Kei May Lau, and Kevin J. Chen

A technique for fabrication vertical position- controllable GaN nanowires is developed and discussed. The fabrication process combines selective area growth of GaN pyramids on substrate masked with hexagonal hole pattern and wet chemical etching of the grown GaN pyramids. GaN nanowires are fabricated to demonstrate this technique. The mechanisms for the formation of the vertical nanowires are also further discussed by using the contrastive experiments.

148 IEEE-NANO 2007 Technical Digest

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267 Soldering of Three-dimensional Helical Nanobelts for NEMS Using Gold Nanoink Gilgueng Hwang, Cedric Dockendorf, Dominik Bell, Lixin Dong, Hideki Hashimoto, Dimos Poulikakos, Bradley Nelson

In this paper, we report a nanosoldering technique to make electrically conductive interconnections between three- dimensional (3D) helical micro-/nanostructures and electrodes for the assembly of NEMS using gold nanoparticle ink. 3D nanosprings are placed onto pre-fabricated gold electrodes using nanorobotic manipulation inside a scanning electron microscope (SEM), and then deposited with gold nanoparticle ink with a fountain pen to improve the electrical conductivity. Characterization shows the reduction of contact resistance of the assembled structures, which is important to build 3D NEMS devices based on nanorobotic assembly.

Nanowires and Applications (2E4)

Time: 15.30 – 17.30 Room: 606 Session Chairs: S.-H. Park and Shuo-Hung Chang

39 Evanescent Wave Coupled Semiconductor Quantum Dots Fiber Amplifier Based on Reverse Micelle Method Tingyun Wang, Fufei Pang, Kexin Wang, Ru Zhang, Gang Liu

A novel optical fiber amplifier based on interacting between semiconductor quantum dots luminescence and fiber evanescent wave is proposed in this paper. This fiber amplifier, named here as semiconductor quantum dots fiber amplifier (SQDFA), is fabricated by depositing PbS quantum dots on a fused tapered fiber coupler. The simple reverse micelle method is applied here to synthesized the PbS quantum dots. By optimizing the synthesis procedure, the size of the PbS particles was controlled and their solution exhibited obvious photoluminescence blue shift effect which was observed by fluorescent spectrometer. The optical gain was characterized and more than 4dB was obtained at 1310nm with only 5cm interacting length. Simultaneously the saturation effect was also investigated theoretically and experimentally. This compact and highly efficient quantum dots fiber amplifier has potential applications in high-speed broadband CATV and access networks.

149 IEEE-NANO 2007 Technical Digest

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44 Needleless Electrospinning of Multiple Nanofibers Xiaoping Huang, Dezhi Wu, Yongyang Zhu, Daoheng Sun

To satisfy the increasing needs for the commercial nanofibers, a novel method for the electrospinning of multiple nanofibers is presented. Instead of using the conventional needle, in this work, we use a metal cylindrical rotator as the electrode, and the production rate of nanofibers can be changed by adjusting the length and diameter of cylindrical rotator. Results show that solid nanofibers with diameter of 100nm-800nm can be electrospun onto metal substrate with electrode-to-substrate distance of 10-20cm under bias of 60 kV. Compared with the conventional electrospinning method, the production rate is expected to increase by about 100 times.

166 Growth of Crooked Silicon Nanowires by Carbothermal Evaporation Sabar Hutagalung, Azma F. Abdul Aziz, Khatijah A. Yaacob

Silicon nanowires (SiNWs) were synthesized by carbothermal evaporation technique. A powder mixture of silicon and activated carbon was heated in an inert atmosphere at high temperature. The evaporated silicon powder was carried by flowing inert gas and deposited on the Si(111) substrate. By controlling the processing parameters namely growth temperature and time, substrate position and location; the SiNWs can be produced. The morphology and chemical composition of deposited products were evaluated by field-emission scanning electron microscopy (FESEM) equipped with energy dispersive x-ray analysis (EDX). The results show that SiNWs were grown vertically coexist with crooked SiNWs when the heating temperature is 1100°C for 6 hours. The estimated diameters of wires were in the range of 10- 90 nm.

249 Local structural properties and growth mechanism of ZnO nanorods S.-H. Park, S.-Y. Seo, C.-H. Kwak, S.-H. Kim, H.-J. Yu, E.-S. Jeong, Sang-Wook Han

We present the systematic study of the growth mechanism of ZnO nanorods grown on Al2O3 substrates with ZnO homo-buffer, n-GaN and p-GaN interlayers. Vertically aligned ZnO nanorods with diameter of 50 nm and lengths of range of 0.1 - 2 microns were synthesized at the substrate temperature of 350 - 500 oC by catalyst-free metal-organic chemical vapor deposition. A thin ZnO film was observed underneath the ZnO

150 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... nanorods grown on Al2O3, ZnO homo-buffer layers and p-GaN interlayers and the film thickness varied from 0.1 to 0.55 microns depending on the substrates while the film was negligible on a n-GaN interlayer. The residual strain of the ZnO nanorods grown on Al2O3 substrates was reduced to less than one fifth of the original value by employing a n-GaN interlayer. The n-GaN interlayer also enhanced the orientations among the nanorods in the ab-plane. The extended x- ray absorption fine structure measurements revealed that there were a substantial amount of disorders in the bonding lengths of the Zn-O pairs in the beginning of the ZnO nanorod growth on the Al2O3 substrates with and without the n- GaN interlayer. The disorders of the Zn-O pairs located near the ab-plane were decreased as the nanorod length was increased above 0.1 microns implying that the strain relaxation of the ZnO crystals in the ab-plane was critical in the formation of ZnO nanorods.

254 Size Effect of Indenter on Determining Modulus of Nanowires Using Nanoindentation Technique Neng-Kai Chang, Yong-Siang Lin, Chi-Yao Chen, Shuo-Hung Chang

This study demonstrates a finite element method for simulating the behavior of nanoindentation of copper nanowires and estimates their mechanical properties. The simulation results reveal that using well-known Oliver-Pharr theory, generally applied for materials with semi-infinite half-space, yields an underestimate of the elastic modulus of the wire materials. Moreover, the size of the indenter tip radius also influences the accuracy of the predicted elastic modulus. Such errors are mainly from the misestimate of contact area between an indenter and a specimen. They can be reduced directly from the observation of real contact area in the numerical modeling. The modified elastic modulus of the wires is very close to the bulk value.

459 Investigation on the nanometer chitin Fibers in Tumblebug Cuticle Bin Chen, X. Peng, and S. Sun

Insect cuticle has high strength, stiffness and fracture toughness. The superior material properties are closely related to the various particular microstructures in the cuticle, which has passed through natural optimization for thousands of years. In this work, a scanning electron microscope (SEM) was used for observing the microstructures in a Tumblebug cuticle. It was shown that the cuticle is a kind of biocomposite which consists of chitin-fiber plies and protein matrix. The chitin-fiber plies consist of many chitin-fiber sheets. These fiber sheets distribute along different orientations. The observation also showed that the chitin-fiber sheets consist of less microscopic chitin fibers. The microscopic chitin fibers are of nanometer scale, which improves the fracture toughness of the cuticle. It was illustrated through the computed rule of the fiber pullout energy in a fiber-reinforced composite.

151 IEEE-NANO 2007 Technical Digest

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478 Nanoscale Dipole Antennas Based on Long Carbon Nanotubes Maggie Chen

In this paper, we present the grow of mm-long, well aligned individual single wall carbon nanotubes (SWNTs) on flat substrates suitable for device fabrication. We also demonstrate the feasibility of using such long nanotubes as nanoscale antennas. To fabricate such antenna structure, well separated and well aligned individual nanotubes were grown by adopting a newly developed method to pattern catalyst islands with uniform size catalyst nanoparticles. The length of nanotubes can be precisely controlled by chemical etching using oxygen plasma treatment at desired locations. Dipoles were fabricated on individual long nanotubes using photolithography method.

Nano-Optics and Nano-Photonics (2F4)

Time: 15.30 – 17.30 Room: 607 Session Chairs: Sanjay Krishna and Gong-Ron Liu

85 Optical properties of a single-chain of elliptical-shaped metal nanowires Hong-Son Chu, Wei-Bin Ewe, Er-Ping Li

The optical responses in visible wavelengths of the single-chain, consisting of elliptical-shaped silver nanowires, are investigated for different separation distances and different illumination directions. The efficient and simple method, surface integral equation, will be used to characterize the interactions between the nanowires in the arrays. The results show that the number and magnitude of different plasmon resonances as well as the field intensity depend on the plane wave illumination direction and the gap distance between the nanowires.

175 Acoustic Surface Plasmons in a Magnetic Field Norman Horing, Makoto Sawamura

Acoustic surface plasmons have attracted a great deal of research interest in the past few years, as reflected in the current review article of Pitarke, et al; as well as in the physics research journals. Considering the important effects of an impressed magnetic field on the spectrum of bulk, semi-infinite and two-dimensional plasmas, we determine its role in acoustic plasmon dynamics in this paper for low wave number.

152 IEEE-NANO 2007 Technical Digest

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227 Synthesis of Novel Cyclometalated Iridium Complexes and Their Red Phosphorescence Properties Jeong Keun Park, Dong Eun Kim, Young Soo Kwon, Burm Jong Lee

A series of bis-cyclometalated iridium( ) complexes ((POB)2Ir(pic) and (POB)2Ir(acac)) based on 1,4-bis (5- phenyloxazol-2-yl)benzene ligand with monoanionic ancillary ligand (picolinic acid or acetylacetone) have been synthesized and characterized by 1H-NMR, 13C-NMR, FT-IR, UV-Vis, elemental analysis and XPS. In chloroform solution, the photoluminescence spectra of the iridium( ) complexes have the maximum peaks around 600 nm. Multilayerd organic light-emitting diodes (OLED) were fabricated by using the iridium( ) complexes as red-emitting dopant materials. The device structure was ITO/NPB/CBP:(POB)2Ir(pic) or (POB)2Ir(acac) /Alq3/LiF/Al. The OLED properties have been examined. 255 White Light Electroluminescence from Europium Oxide Nanocrystal/Organic Composites Yuen Hui, Chun Lee, Ching-Fuh Lin

We have presented the white light emission of hybrid europium oxide (Eu2O3) nanocrystals/organic compsosite by low- cost spin-coating. The hybrid composite film consists of Eu2O3 nanocrystals, N,N’–diphenyl-N,N’ – bis(3-methylphenyl)- 1,1’-biphenyl -4,4’ -diamine (TPD) and polymethyl methacrylate (PMMA). The peak wavelength of the electroluminescence can be tuned from 550 nm to 410 nm, when the forward biased voltage increases from 6 V to 8 V. The bandwidth of the emission spans as wide as 300 nm. We further investigate the hybrid composite film by confocal microscope and find that PMMA improves the film quality and enhances the luminescence.

361 Electrical and Optical Characteristics of ZnO Nano-rod Arrays for Optoelectronics Applications An-jen Cheng, Yi Zhou, Dake Wang, Tsung-hsueh Wu, Minseo Park, Curtis Shannon, Yonhua Tzeng

Zinc oxide (ZnO) is a semiconducting material with a direct and wide band-gap and a fairly large exciton binding energy, and, therefore, has promising applications in electrical and optoelectronic realms. We have grown arrays of ZnO nanorods on indium-tin-oxide (ITO) and p-type Si. Their structural, electrical and optical characteristics have been investigated. Applications of these ZnO nanorod arrays to dye-sensitized solar cells (DSSCs), photodetectors, and light- emitting diodes (LEDs) will be discussed.

153 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 415 Growth, Structural and Optical Properties of III-V Nanowires for Optoelectronic Applications Hannah Joyce, Qiang Gao, Yong Kim, H. Hoe Tan, Chennupati Jagadish

We investigate the growth of III-V nanowires by MOCVD and the structural and optical properties of these nanowires. Binary and ternary nanowires of GaAs, InAs, InP, AlGaAs and InGaAs are achieved. We discuss the nucleation and growth issues involved in fabricating high quality nanowires suitable for device applications. We have fabricated and characterised a variety of axial and radial heterostructures including GaAs/InGaAs superlattices, and GaAs/AlGaAs core-shell and core-multishell nanowires.

Molecular Electronics: Modeling and Simulation II (2G4)

Time: 15.30 – 17.30 Room: 608 Session Chairs: Yuichi Ochiai and Alessandro Pecchia

18 Mechanism of Electrical Rectification in a Unimolecular Donor-Bridge (π)-Acceptor Diode Haiying He, Govind Mallick, Ravi Pandey, Shashi Karna

We present here the results of theoretical calculations on the electron transport via a donor-bridge (π)-acceptor molecular system. A significant rectification effect is observed. A new transport mechanism involving the electronic structure of the molecular diode will be discussed.

19 Digital Filters Built of Locally Connected Nanoelectronic Devices Yoshinao Suzuki, Hisato Fujisaka, Takeshi Kamio, Kazuhisa Haeiwa

This paper presents digital filters with hierarchical structure. The hierarchy consists of layers of nanoelectronic devices, cells, modules, and blocks. All the modules in the filters are built of locally connected circuit cells. This cellular array architecture overcomes some difficulties in applying nanoelectronic devices. We built a bandpass filter block with quantum-dot cellular automata (QCA) and simulated its filtering operation with the QCA designer. The frequency response characteristics obtained by the simulation were the same as those obtained by analytical estimation.

154 IEEE-NANO 2007 Technical Digest

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161 3D CMOL Based On CMOS/Nanomaterial Hybrid Technology Tu Deyu, Liu Ming, Wei Wang, Sansiri Haruehanroengra

CMOS molecular (CMOL) circuits promise great opportunities for future hybrid nanoscale IC implementation. In this paper, a novel three dimension (3D) architecture of CMOL circuit is introduced. It eliminates the special pin requirement, enabling feasible fabrication. It also doubles the density of nanowires of the original CMOL circuit, while providing similar operation performance. This work significantly advances applications of 3D integration in hybrid nanosystems.

242 A Fresh Look at Majority Multiplexing -- When Devices Get into the Picture Valeriu Beiu, Walid Ibrahim, Sanja Lazarova-Molnar

This paper presents for the first time an exact analysis of the reliability enhancements of von Neumann multiplexing (vN- MUX) over that of majority (MAJ) gates, as well as over that of elementary (nano-) devices. For practical applications, only MAJ gates with small fan-ins (∆ = 3, 5, 7, 9, and 11) have been used in this analysis. The results are extremely important for a deeper understanding of vN-MUX, especially when considering the unreliable behavior of future (nano- )devices. The analysis confirms and enhances on well-known theoretical results, and is exact as being based on exhaustive counting. Finally, the extension to device level will allow us to closely characterize vN-MUX with respect (nano-) device failures. These results are also very timely as they are able to explain a non-linear behavior of vN-MUX that was first reported two years ago (based on extensive Monte Carlo simulations).

264 A Rigorous Surface-Potential-Based I V Model for Undoped Cylindrical Nanowire MOSFETs Shihuan Lin, Xing Zhou, Guan Huei See, Zhaomin Zhu, Guan Hui Lim, Chengqing Wei, Guojun Zhu, Zhenhua Yao, Xuefeng Wang, Lay Kee Ang

A non-charge-sheet surface-potential-based compact model for long-channel undoped gate-all-around (GAA) silicon- nanowire (SiNW) MOSFETs is developed. The surface-potential equation is derived from cylindrical Poisson equation without any approximations and solved iteratively with a very good initial guess to reach equation residue below 1e-16 V within a few iterations. The single-piece current equation is derived and validated with numerical simulations for all operation regions without any fitting parameters. The results show that the proposed model can be used for bench- marking long-channel SiNWs models, and demonstrate a first step towards a practical SiNW model for inclusion of various short-channel and quantum-mechanical effects.

155 IEEE-NANO 2007 Technical Digest

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367 Performance and Reliability Analysis of a Scaled Multi-Switch Junction Crossbar Nanomemory and Demux Ayodeji Coker, Valerie Taylor

This paper presents a scaled performance and reliability analysis of a crossbar molecular switch memory and demultiplexer. The multi switch junction fault tolerance scheme we developed is compared with a banking fault tolerance scheme. Results indicate that delay and power scale linearly with the implementation of the multi switch junction scheme. This scheme was also shown to achieve greater than 99% reliability for molec- ular switch junction failures rates of ≤20%, when a redundancy of k≥3 was implemented. In contrast, the banking scheme was only effective for molecular switch junction failure rates of ≤1%, which requires over three times the number of banking modules.

381 Three Dimensional Atomistic Quantum Simulation of Carbon Nanotube Field Effect Transistors Mincheol Shin

We have developed an in-house quantum mechanical device simulator for carbon nanotube field effect transistors (CNTFETs) by solving the Poisson equation and non-equilibrium Green’s function (NEGF) transport equation self- consistently. We have employed an atomistic tight-binding Hamiltonian, quantum ballistic transport model, and real- space and mode-space NEGF approach for efficient computation. Using the simulator, we have investigated the device characteristics of the CNTFETs, particularly focusing on the ambipolar behaviors and the effect of the inter-band tunneling on the device performance.

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IEEE-NANO 2007 Technical Digest

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August 5, Sunday, 08.30 – 10.00

Room 601 Plenary Lectures (3A1)

Dr. Robert S. Chau Director, Transistor Research and Nanotechnology Intel Senior Fellow, Technology and Manufacturing Group Intel Corporation, USA Topic: Research and Advancement in Nanotechnologies in the Semiconductor Industry for High- Speed and Energy-Efficient VLSI Applications

Biography Dr. Robert Chau is an Intel Senior Fellow, the company’s highest and most prestigious technical position, and the Director of Transistor Research and Nanotechnology at Intel Corporation. He is responsible for directing research and development in advanced transistors and gate dielectrics, process modules and technologies, and integrated processes for microprocessor applications. He is also leading research efforts in electronic materials and emerging nanotechnologies for future nanoelectronics applications. Dr. Chau holds more than 120 issued United States patents on his inventions related to semiconductor nanodevices and nanostructures, integrated circuits technology and solid- state nanoelectronics. He has received six Intel Achievement Awards and 13 Intel Logic Technology Development Division Recognition Awards, was recognized by IndustryWeek in 2003 as one of the 16 "R&D Stars" in the United States who “continue to push the boundaries of technical and scientific achievement,” was the recipient of the 2003 Alumni Professional Achievement Award from The Ohio State University. Dr. Chau is currently a member of the Board of Directors of the Oregon Nanoscience and Microtechnologies Institute (ONAMI) in the U.S. and a member of the Scientific Advisory Board of the Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN) in Ireland. He received his B.S., M.S. and Ph.D. degrees, all in electrical engineering, from The Ohio State University, Columbus, Ohio, U.S.A. Dr. Chau has been elected a Fellow of the Institute of Electrical and Electronics Engineers (IEEE). He was born in Hong Kong.

158 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Abstract This presentation will first summarize some of the most recent silicon innovations made for advanced CMOS transistors in the nanotechnology era for high-speed and energy-efficient VLSI applications. Through these Si nanotechnologies, it is expected that CMOS scaling and performance trends will extend and continue well into the next decade. In addition, there has been good progress made and much interest generated in the research of novel electronic materials and non- silicon nanoelectronic devices, and their integration onto the silicon substrate to enhance chip performance, provide more functions and reduce power dissipation. Emerging nanotechnologies such as nanotubes, nanowires and nanoribbons are being researched for future low-power and high-speed digital applications, as well as for high density data storage applications. Meanwhile, III-V compound semiconductors and high-mobility quantum-well transistors are currently in research for future high-speed and ultra low-power digital CMOS applications. The R&D progress of these emerging nanotechnologies and nanoelectronic devices, and their integration onto the existing silicon platform, will be discussed. Furthermore, the challenges and opportunities of combining the conventional top-down and new bottom-up chemical synthesis approaches in fabricating future VLSI nanoelectronic circuits will also be discussed in this presentation.

159 IEEE-NANO 2007 Technical Digest

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Room 601 Plenary Lectures (3A1)

Prof. Mark Reed Yale University, USA Topic: The Next Frontier: Bioelectronic Interfaces

Biography Prof. Mark A. Reed received his Ph.D. in Physics from Syracuse University in 1983, after which he joined Texas Instruments. In 1990 Mark left TI to join the faculty at Yale University where he presently is a Professor in the Electrical Engineering and Applied Physics departments, the Harold Hodgkinson Chair of Engineering and Applied Science, and is the Associate Director of the Yale Institute for Nanoscience and Quantum Engineering. His research activities have included the investigation of electronic transport in nanoscale and mesoscopic systems, artificially structured materials and devices, molecular scale electronic transport, plasmonic transport in nanostructures, and chem/bio nanosensors and molecular compting. Mark is the author of more than 175 professional publications and 6 books, has given 17 plenary and over 265 invited Lectures, and holds 25 U.S. and foreign patents on quantum effect, heterojunction, and molecular devices. He has been elected to the Connecticut Academy of Science and Engineering and Who's Who in the World. His awards include; Fortune Magazine “Most Promising Young Scientist” (1990), the Kilby Young Innovator Award (1994), the Fujitsu ISCS Quantum Device Award (2001), the Yale Science and Engineering Association Award for Advancement of Basic and Applied Science (2002), Fellow of the American Physical Society (2003), and the IEEE Pioneer Award in Nanotechnology (2007).

Abstract High performance miceoelectronic systems and bioelectrochemical systems are both highly developed, complex systems capable of advanced signal processing and computing – yet are fundamentally different at nearly every level (mechanism, device, architecture, etc). A major step in understanding these differences will be the ability to effectively interface between these systems. Recent progress in nanoscale sensors have enabled the ability for integrated biochemical sensors that have demonstrated ultrasensitive (attoM) macromolecule detection, and real-time cell biochemical response. This talk will review the recent progress, the outstanding scientific challenges, and some exciting potential applications in this rapidly growing new field.

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August 5, Sunday, 10.30 – 12.00

Room 601 Special Keynote Lectures (3A2)

Prof. David T. Wong Associate Dean of Research and Professor, Division of Oral Biology and Medicine, School of Dentistry University of California, Los Angeles, USA Topic: Electrochemical Detection of Salivary RNA

Biography David T.W. Wong DMD, DMSc is Professor and Associate Dean of Research in the Division of Oral Biology & Medicine at the UCLA School of Dentistry. He is also the Director of the UCLA Dental Research Institute (DRI). Dr. Wong is a leading scientist in oral cancer and saliva diagnostics research. He has authored 140 peer reviewed scientific publications. His research is funded by the NIH since 1986. He directs the UCLA Collaborative Oral Fluid Diagnostic Research Center, the UCLA comprehensive T32 Clinical Research Training program as well as the Laboratory of Head & Neck Oncology Research. He chaired the NIDCR Special Grant Review Study Section from 2002-2005. Currently he is a member of the NIH CSR Cancer Genetics Study Section and a fellow of the American Association for the

Advancement of Sciences (AAAS).

Abstract

Electrochemical biosensor for salivary RNA detection with high sensitivity is presented in this work. The complexity of saliva and the low concentration of salivary RNA require both high sensitivity and specificity. Here enzyme amplification is applied to achieve high signal intensity. In order to increase the current signal, effective electron transfer and hybridization are both required. Electrochemical studies on the location of anchor label and report label have been carried out. Results indicate the hybridization efficiency and the surface hindrance to enzyme amplification are the two major factors contributed to the current signal. Human IL-8 IVT RNA has been detected. The sensitivity with optimized probe is about 10 pM RNA.

161 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... August 5, Sunday, 10.30 – 12.00

Room 601 Special Keynote Lectures (3A2)

Prof. Fan-Gang Tseng Professor, Department of Engineering and System Science National Tsing Hua University, Taiwan Topic: From High Efficient Protein Micro Chip Toward Ultra High Sensitive Single Protein Molecule Array

Biography

Fan-Gang Tseng received his Ph.D. degree in mechanical engineering from the University of California, Los Angeles, USA (UCLA), under the supervision of Prof. C.-M. Ho and C.-J. Kim in 1998. After one year with USC/Information Science Institute as a senior engineer working on a new microfabrication process, EFAB, he became an assistant professor with Engineering and System Science Department of National Tsing-Hua University, Taiwan from August, 1999, and advanced to associate professor in August, 2002, as well as full professor in August 2006. His research interests are in the fields of Bio- MEMS/Bio-Nano and Nano/Micro-Fluidic Systems. He received 19 patents, wrote 3 book chapters including “Micro Droplet Generators” in MEMS Handbook by CRC press and ”Technological Aspects of Protein Microarrays and Nanoarrays” in Protein Microarrays by Jones and Bartlett Publishers, published more than 60 SCI Journal papers, 30 EI papers, and 140 conference technical papers in MEMS, Bio-N/MEMS, and micro/nano fluidics related fields, and served as the technique committee member as well as co-chair in many international conferences including IEEE NANOMED07, IEEE NANO07, APCOT06, IEEE NEMS 06, ROBIO 2005, ISMNT 06, IS3M 00, and IEEE Transducers’01 and the reviewer for more than 15 SCI cited journals. He received several awards, including Mr. Wu, Da-Yo Memorial Award from National Science Council, Taiwan (2005), four best paper/poster awards (1991, 2003, 2004, and 2005), NTHU new faculty research award (2002), NTHU outstanding teaching award (2002), NTHU academic booster award (2001), and NSC research award (2000).

162 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Abstract

Protein microarrays have been employed to screen tens to thousands of proteins simultaneously for the observation of the biochemical activities in the protein-protein, protein-nucleic acid and small molecule interactions. This technology allows high throughput analysis and holds great potential for basic molecular biology research, disease marker identification, toxicological response profiling and pharmaceutical target screening. However, proteins easily malfunction in harsh environments so that they are hardly preserved before the application because of their complex and fragile structures. On the other hand, identify scarce amount of proteins less than fM range is very important and challenge for disease diagnosis at very early stage. As a result, the procedures for protein micro array formation are very important for preserving protein functionality to ensure useful protein assays, as well as the improvement of the detection sensitivity up to single molecule event but with high dynamic range for disease early detection. Therefore, this presentation provides a novel view from the preparation of high efficient protein micro chip toward ultra high sensitive single protein molecule array through the technology integration of BioMEMS and Bio-Nanotechnology.

In the high efficient and rapid preparation of protein micro array, micro contact printing system with batch-filling and parallel-printing capability was employed for rapid generation of protein micro arrays. This system provides a passive, gentle, and high throughput way to simultaneously filling and printing tens to thousands of bio-solutions in seconds into a dense array for disease diagnosis or drug screening. To further improve the detection sensitivity and protein recognition efficiency, gas type nano-bio blocking agent and nano patterned protein binding site were carried out, and two orders of magnitude signal enhancement has been successfully demonstrated.

On the other hand, to enhance the signal into single molecule level detection, a novel nano-cone single molecule detection site was proposed and implemented. This patented binding site can accommodate only one protein molecule at a time, and allow very low background noise for the detection of single molecule event. The excitation/detection volume can be reduced into less than sub-aL range (~20-50 nm in diameter), an extremely localized excitation to greatly reduce background noise. On the other hand, the dynamic range of the applicable substrate concentrations can be enlarged by localized sample concentration techniques combining the actions of surface tension gradient and AC electro-osmosis flow. As a result, the detection of substrate concentration from 1 fM (~1-10 molecules/10000 μm2) to 1 μM is feasible, allowing a 6-9 orders of magnitude of dynamic range.

163 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... August 5, Sunday, 10.30 – 12.00

Room 601 Special Keynote Lectures (3A2)

Prof. Dr. Detlev Gruetzmacher RWTH Aachen University, Germany Topic: SiGe Nanostructures: Building Blocks for Nano-Devices

Biography Dr. rer. nat. Detlev Grützmacher was appointed Professor for experimental Physics at the RWTH Aachen (Germany) in October 2006. He was nominated director of the Institute of Bio- and Nanosystems -1, Semiconductor Nano-electronics at the Science Centre in Jülich (Germany). His focus of research is directed to semiconductor physics and material science with special emphasis towards nanoelectronics and nanotechnology.

Date of birth 28. August 1960 in Hamburg (Germany) Education 1982 - 1988 Student in Physics at the Georgia Augusta University, Göttingen and the RWTH Aachen 1988 Diplom in Physics 1988 - 1991 Post graduate student at the faculty of Physics at the RWTH Aachen. 1991 Defends of the Thesis in Physics, the PhD in Physics was awarded with special honours 2001 Habilitation in Physics at the University of Konstanz

Profession 1991 - 1993 Postdoc at the T.J. Watson Research Center, IBM, Yorktown Heights, New York 1993 - 2006 Member of the scientific staff and project leader Silicon-Nanosystems at the Paul Scherrer Institute, Laboratory for Micro- and Nanotechnology, Villigen (Switzerland) 2001 bis 2006 Privatdozent at the University of Konstanz Since 2006 Director of the Institute of Bio- and Nanosystems-1, Semiconductor Nanoelectronics, at the Science Centre Jülich (Germany)

The research of Detlev Grützmacher was awarded with the Borchers medal of the RWTH Aachen in 1991, an IBM invention achievement award and a IBM research achievement award in 1992 and 1993, respectively. He authored and co-authored 200 scientific papers.

164 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Abstract

The introduction of Ge into Si technology permits the modification of the structural, mechanical and electrical properties. Thus the implementation of Ge into Si technology leads to the design of novel devices as well as to new routes for the fabrication of nanostructures. A central challenge for nanotechnology aiming towards nanoelectronics, nanomechanics, biochemical sensors and nanophotonics is to implement exact control in the positioning and size of semiconductor nanostructures. Here, we focus on the templated self-assembly of SiGe nanostructures and discuss two pathways for the fabrication of them.

Templated self-organization of Ge dots is achieved by patterning Si substrates by extreme ultra-violet interference lithography (EUV-IL) using diffractive optics. This method offers fast large area exposure of templates with close to perfect periodicity. Si substrates have been patterned with 2-dimensional hole arrays using EUV-IL and reactive ion etching. Subsequently, molecular beam epitaxy was employed to grow Si/Ge quantum dot stacks. This process allows the fabrication of 2- and 3-dimensional quantum dot crystals containing Ge dots in a Si host crystal of unmatched structural perfection as proven by X-ray diffractometry. The Ge dots exhibit a remarkably narrow size distribution and close to perfect ordering. 2-d ordered quantum dot arrays with lateral periodicities of 50-100 nm as well as stacking of those quantum dot arrays into 3-d quantum dot crytals with a vertical periodicity of < 10 nm have been investigated. The results were interpreted by comparison with model calculations using nextnano3.

In the second approach Si/SiGe as well as Si/SiGe/Cr hybrid layered structures are patterned by standard lithographic techniques into mesa structures. Underetching of the mesa structures leads to a scrolling of the layer stacks into nanotubes, nanospirals and other 3-d objects due to the strain. Thus, by this technique nanostructures are produced from templates in a self-assembled fashion. The mechanisms controlling the scrolling process were analysed in detail and their dependence on the shape, the orientation and the size of the mesa pattern was determined. Moreover, the mechanical properties of tubes, spirals and rings have been studied. Individual structures have been cut off from the substrate by micromanipulation and were subject to analysis.

Ultra flexible nano-sprirals were fabricated exhibiting a linear dependence between applied force and extention until the spring is extended to 91% of its original length, which is six times of that of carbon coils (15%) [X.Q. Chen et.al. Nano Letters 3, 1299 (2003)] and more than twice that of rolled-up InGaAs/GaAs microcoils (40%) [D.J. Bell et.al Nano Letters 6, 725 (2006)]. The springs could be reproducibly extended to more than 180% of their original length. The spring constant is determined to 0.003 N/m, which is only 1/40th of the spring constant of carbon coils (0.12 N/m) [X.Q. Chen et.al. Nano Letters 3, 1299 (2003)] and over three

165 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... orders of magnitude less than that of superlattice ZnO nanohelices (4.2 N/m) [P.M. Gao et.al. Science 309,1700 (2005)]. It is an order of magnitude smaller than that of the most flexible available AFM cantilever (~10-2 N/m). Thus, it is expected that these springs can be used as ultra sensitive force sensors. A simple estimation assuming that an FESEM with an imaging resolution of approximately 1 nm is adopted for displacement measurement reveals that using a nanospring fabricated from a 300 nm wide mesa as a visual based force sensor, a resolution of 3 pN/nm can be provided. Smaller structures will permit measurements in the aN/nm regime. Moreover, structures with metallic wires on top of the mesa structures were successfully employed to activate mechanical movements of the structures.

Possible applications for quantum dots and scrolled nanotubes for nanoelectronic devices and nano-electromechanical systems will be discussed.

166 IEEE-NANO 2007 Technical Digest

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August 5, Sunday, 10.30 – 12.00

Room 603/604 Special Keynote Lectures (3B2)

Prof. Gwo-Bin Vincent Lee Professor, Department of Engineering Science MEMS Design and Micro-fabrication Laboratory National Cheng Kung University, Taiwan Topic: Magnetic-bead-based micro/nano-fluidic system for fast diagnosis

Biography

Gwo-Bin Vincent Lee, Professor Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan 701 Tel: +886-6-2757575-63347, Fax: +886-6-2761687, E-mail: [email protected]

Gwo-Bin Lee received his B.S. and M.S. degrees in Department of Mechanical Engineering from National Taiwan University in 1989 and 1991, respectively. He received his Ph.D. in Mechanical & Aerospace Engineering from University of California, Los Angeles, USA in 1998. Dr. Gwo-Bin Lee is currently a Full Professor in the Department of Engineering Science at National Cheng Kung University. His research interests lie on nano-biotechnology, micro/nanofluidics and their biomedical applications. He is the director of “MEMS Design and Microfabrication Lab” and “Microfluidic Biochip Lab”. Dr. Lee has been active in the field of micro/nanofluidic systems, and is developing integrated micro/nano systems incorporated with nano/biotechnology for biomedical applications. He has developed several micro/nano-scale platforms for cell, protein, and DNA manipulation and detection. Dr. Lee has published over 90 SCI journal papers, 260 conference papers, and received 38 patents. He has served as a technical or organizing committee member in many international conferences, including IEEE MEMS 2008, IEEE NEMS 2007, AIM 2007, IEEE ICMA 2007, MNC 2007, IEEE NANO 2007, IEEE NANOMED 2007, IEEE TENCON 2007, OWLS9 2006, IEEE NEMS 2006, IMU2 2006, ROBIO 2005, ICM 2005, AIM 2005, IMμ2 2004, IS3M 2000 etc. He has received several academic awards, including Dragon Thesis Award (2002), Distinguished Research Award from Engineering School of National Cheng Kung University (2002), Distinguished Young Engineer Award from Chinese Engineering Society (2003), K. T. Lee Research Award from K. T. Lee Foundation (2004), Distinguished Mechanical Engineer Award from Chinese Mechanical Engineering Society (2004), Distinguished Young Electrical Engineer

167 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Award from Chinese Electrical Engineering Society (2005), Young People of the Year (2006), Distinguished Engineering Professor from Chinese Mechanical Engineering Society (2006), Engineering Professor Award from Southern Division of Chinese Engineering Society (2007), and Excellent Research Award from National Science Council in Taiwan (2007). Currently, he is Editor of IEE Proceedings of Bionanotechnology, member of advisory board for Recent Patents on Nanotechnology and serves as Chair for the Technical Committee on Nanosensors and Nanoactuators for the IEEE Nanotechnology Council.

Abstract

In the past decade, microfabrication of miniature fluidic devices has attracted considerable interests and made substantial impacts. One of the most promising applications is for biosensing. In this talk, several bio-sensing chips for fast diagnosis using the enabling micro/nano-fluidic technology and nano magnetic beads will be presented.

Polymerase chain reaction (PCR) and reverse transcription PCR (RT-PCR) are well-developed nucleic acid amplification techniques for genetic identification and diagnosis. Miniature PCR and RT-PCR devices have been demonstrated and realized in literatures. However, there remain some off-chip sample preparation processes (e.g. sample purification and enrichment) to be carried out manually before the on-chip PCR process. Recently, we developed a new RT-PCR system integrating a sample pretreatment mechanism for fast DNA amplification and diagnosis of viruses and bacteria. As shown in Fig. 1, a two-way serpentine-shape (S-shape) pneumatic micropump and a magnetic bio-separator were developed for purification and concentration of viruses/bacteria. The new bio-separator can also be used as the micro heaters that designed for nucleic acid amplification. Taking advantage of the specific interaction between the antibody on the surface of the magnetic breads and the surface antigen on the viruses or bacteria, the target viruses and bacteria can be recognized and further purified by a magnetic field. The purified virus and bacteria were then lysed to release RNA or DNA for the subsequent RT-PCR processes. Results show that the target viruses/bacteria can be purified and concentrated successfully by the high specificity and selectivity of antibody- conjugated magnetic beads, and the subsequent amplification of RNA/DNA can be completed automatically utilizing the on-chip micro heaters (As shown in Fig. 2). The high mixing efficiency of the two-way s-pump and the rapid heating/cooling rate of the micro heaters can make the pretreatment and diagnosis processes in a shorter period of time. The specificity of the detection was warranted by both the antibody and primer specificity. The targeted virus is purified and concentrated to increase the detection sensitivity. As a whole, the developed system may provide a powerful platform for sample pretreatment and fast diseases diagnosis.

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Bio-sample chamber

Microcoils/Microheaters Multiple microfluidic channels Two-way s-shape micropump

Micro temperature sensor

Microvalve L Pretreatment/RT-PCR 1 2 3 reaction chambers Waste chambers

Figure 2. Slab-gel electropherograms by using the developed system. Dengue virus was detected by using clinical serum Figure 1. Schematic illustration of the magnetic-bead-based samples (L: DNA ladders; lane 1: traditional method; lane 2: micro/nano-fluidic system for fast diagnosis developed microsystem; lane 3: without pretreatment).

169 IEEE-NANO 2007 Technical Digest

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August 5, Sunday, 10.30 – 12.00

Room 603/604 Special Keynote Lectures (3B2)

Ms. Brigitte M. Rolfe The MITRE Corporation, Virginia, USA Topic: Nanosensors for Ultra-Small Nose-Like Sensing Systems

Biography

Brigitte Rolfe is the Group Leader of the Nanosystems Group within the MITRE Corporation of McLean, Virginia. The MITRE Nanosystems Group supports the United States Government in seeking to apply advances in nanotechnology to critical national problems. The Nanosystems Group engages in research in molecular electronics, nanosensors, and nanomaterials, as well as investigations into fundamental molecular properties. Ms. Rolfe leads the Nanosensing Task, which seeks to further the integration of nanometer-scale sensors into artificial nose-like sensing systems. Ms. Rolfe has written a report on this topic, which will be included in the book “Advances in Computers: Nanotechnology,” to be published in Summer 2007. Plans for continued research include laboratory investigations into nanosensor sensitivities to various target agents, as well as pattern recognition for nose-like nanosensor systems.

Ms. Rolfe holds Bachelors and Masters Degrees in mathematics from the University of California at Los Angeles, as well as an M.B.A. from Johns Hopkins University. Over the years, she has been engaged in software systems engineering, strategic planning and portfolio management, and served as technical advisor to many government program managers. She has been with the MITRE Corporation since 1999 and Group Leader of the MITRE Nanosystems Group since 2002.

Ms. Rolfe has won numerous commendations and awards for her work. She is on the Technical Advisory Committee and a Session Co-Chair for the 18-21 June 2007 Nanoelectronics Devices for Defense and Security Conference, and she is Guest Editor for an upcoming IEEE Sensors Journal Special Issue on Nanosensor Technology.

170 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Abstract

The grave threats posed by chemical and biological weapons add urgency to the quest for sensor systems that are at once sensitive to minute quantities of individual toxic agents, while also highly reliable in discriminating among a broad range of agents. The only proven sensing system with these characteristics is the natural olfactory system [1]. Our goal is to combine lessons learned from natural and artificial olfaction with opportunities presented by advances in nanotechnology to further the development of nose-like sensing systems integrated on the nanometer scale.

The 1991 identification of the genes that encode the olfactory receptors [2] began a series of remarkable discoveries of the olfactory detection processes in the tissues and cells of the nose and brain. These discoveries have enhanced our knowledge of the important operating principles of the olfactory system. Development of artificial noses, which make use of these operating principles, began in the early 1980s and continues to be an active area of research [3]. A variety of fundamental physico-chemical approaches to sensing are used in artificial noses, including measurement of changes in conductivity, frequency, mass, and color.

The number of different sensor elements in artificial noses is now generally limited to two to three dozen. Those in natural noses number in the hundreds, and are then replicated many thousands of time. One way to more closely emulate olfaction is to develop artificial systems with many more sensing elements, and for this purpose, nanometer- scale sensors would be useful. Various nanometer-scale structures, including carbon nanotubes, nanowires and nanobelts, have been demonstrated by Dai [4], Lieber [5], Moskovits [6] and others to function as highly sensitive and selective sensors.

We make two proposals for nose-like nanowire sensing systems based upon the principles of olfaction and the operating characteristics of nanowire sensors [7]. The first concept uses core-shell nanowires: tin oxide cores and silicon dioxide shells. Nanowires with shells of varying thickness could be integrated into a “memory array,” as shown in Fig. 1. The second concept uses nanowires in a crossbar array, as shown in Fig. 2. Very recently, addressable nanowire crossbar arrays have been successfully fabricated [8], [9]. The junctions of the crossbars, the “memory bits,” could be functionalized as sensors. A simple memory read operation would then provide the information needed to identify the target agents encountered.

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Fig. 1. A proposed “nose-like” nanowire array sensing system. Fig. 2. A concept for a cross-bar nanomemory sensing system. References [1] D. E. Haines, Fundamental Neuroscience, 2nd ed. Philadelphia, PA: Churchill Livingstone, 2002, pp. 359-372. [2] L. B. Buck and R. Axel, “A novel multigene family may encode odorant receptors: a molecular basis for odor recognition,” Cell, vol. 65, pp. 175-187, 1991. [3] T. Pearce, et al., Handbook of Machine Olfaction. Weinheim, Germany: WILEY-VCH Verlag, 2003. [4] J. Kong, et al., “Nanotube molecular wires as chemical sensors,” Science, vol. 287, pp. 622-625, Jan. 2000. [5] Y. Cui, et al.,“Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species,” Science, vol. 293, pp. 1289-1292, Aug. 2001.

[6] A. Kolmakov, et al., “Detection of CO and O2 using tin oxide nanowire sensors,” Advanced Materials, vol. 15, no. 12, pp. 997-1000, June 2003. [7] B. M. Rolfe, “Toward nanometer-scale sensing systems,” in Advances in Computers: Nanotechnology, M. Zelkowitz, Ed. Amsterdam, The Netherlands: Elsevier, to be published. [8] Z. Zhong, et al., “Nanowire crossbar arrays as address decoders for integrated nanosystems,” Science, vol. 302, pp. 1377-1379, Nov. 2003. [9] G.-Y. Jung, et al., “Circuit fabrication at 17 nm half-pitch by nanoimprint lithography,,” Nano Letters, vol.6, no.3, pp. 351-354, Feb. 2006.

172 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... August 5, Sunday, 10.30 – 12.00

Room 603/604 Special Keynote Lectures(3B2)

Prof. Chongwu Zhou Nanotechnology Research Laboratory Department of Electrical Engineering University of Southern Califronia, USA Topic: Carbon Nanotubes Electronics Based on Massively Aligned Nanotubes

Biography

Dr. Zhou is currently an Associate Professor at the University of Southern California (USC). He received his Ph.D. degree in Electrical Engineering from Yale University in 1999. He worked as a postdoc at Stanford University from 1999 to 2000, and then joined USC as an assistant professor in 2000. He has won a number of awards, including the NSF CAREER Award, the NASA TGIR Award, the USC Junior Faculty Research Award, and the IEEE Nanotechnology Early Career Award. Dr. Zhou has authored over seventy journal publications, and his work has been reported by Science, Scientific American, Physics Today, MRS Bulletin, Materials Today, National Cancer Institute, and Royal Society of Chemistry. He is currently an Associate Editor for IEEE Transactions on Nanotechnology. His research interest covers semiconductive oxide nanowires, transition metal oxide nanowires, carbon nanotubes, and chemical and bio- sensing.

Abstract

Nanoscale materials rank among the most exciting new developments in modern science and engineering. This talk will focus on our recent work on the synthesis and application of massively aligned single-walled carbon nanotubes. We have pioneered the synthesis of massively aligned single-walled carbon nanotubes atop sapphire and quartz substrates, and developed a nanotube-on-insulator (NOI) technique to tackle the challenging issues of nanotube assembly and integration. These nanotubes have been further utilized to make high-performance transistors and wearable electronics. The last part of my talk will cover the biomedical applications of carbon nanotubes, including biosensing for cancer biomarkers such as prostate specific antigen (PSA).

173 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Technical Sessions on Sunday, August 5, 2007

Novel Nano-Fabrication Technology II (3D2)

Time: 10.30 – 12.00 Room: 605 Session Chairs: Michelle Simmons and C. H. Chao

84 Synthesis and Device Fabrication of Cu-Ni Nanocomposite for Low-Power Magnetic Microactuation Yu Wen Huang, Tzu-Yuan Chao, Yu-Ting Cheng

A Cu-Ni nanocomposite film and related CMOS compatible processes using alkaline noncyanide based copper plating solution have been successfully synthesized, characterized and proposed for low power magnetic microactuator fabrication in this paper. The SQUID measurement indicates that magnetic properties of Cu can be modified from diamagnetism to ferromagnetism via the incorporation of Ni superparamagnetic nanoparticles into a Cu matrix to form a Cu-Ni nanocomposite film. Without largely sacrificing the reduction of electrical conductivity of Cu, the nanocomposite material shows its potential for the fabrication of high performance magnetic microactuation due to the effective reductions of power consumption of magnetic microactuation. Experimental results also verify that about 9% power consumption reduction of magnetic microactuation could be realized using Cu-Ni nanocomposite.

193 Atomically Precise Device Fabrication in Silicon Michelle Simmons, Frank Ruess, Wilson Pok, Daniel Thompson, Martin Fuechsle, Giordano Scappucci, Thilo Reusch, Kuan Eng Goh, Steven Schofield, Bent Weber

An important driving force behind the microelectronics industry is the ability to pack ever more features onto a silicon chip, by continually miniaturising the individual components. However, after 2015 there is no known technological route to reduce devices below 10nm. We demonstrate a complete fabrication strategy towards atomic-scale device fabrication in silicon using phosphorus as a dopant in combination with scanning probe lithography and high purity crystal growth.

174 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 252 Deuterium Implantation at the Back-end of Line for the Improvement of Gate Oxide Reliability in nano- scale MOSFETs Jae-Sung Lee, Do Seung Woo, Yong-Hyun Lee

This paper is focused on the improvement of MOS device reliability related to deuterium incorporation in gate oxide. The injection of D+ ions into the gate oxide film was achieved through the low-energy implantation at the back-end of line (BEOL) for the purpose of the passivation of dangling bonds at SiO2/Si interface and the generation of deuterium bonds in SiO2 bulk. Device parameter variations as well as the gate leakage current depend on the degradation of gate oxide and are improved by deuterium incorporation, compared to corresponding hydrogen incorporation. However, when the concentration of deuterium is redundant in gate oxide, excess traps are generated and degrades the performance. Our result suggests the novel method to incorporate deuterium in the MOS structure for the reliability.

281 Oxygen Plasma Treatment of Sputtered TiO2 Thin Film for Surface Modification of PDMS Thitima Maturos, Tanom Lomas, Anurat Wisitsoraat, Adisorn Tuantranont

We present the modification of polydimethylsiloxane (PDMS) surface by titanium dioxide (TiO2) thin film coating and subsequent oxygen plasma treatment. TiO2 thin film was deposited on the prepared PDMS samples by reactive dc sputtering. Pure Ti target was sputtered under a mixture of argon and oxygen plasma, in which the argon to oxygen flow rate ratio is 1:4. Finally, TiO2 coated PDMS structures were treated by O2 plasma at a low plasma power of 6.8 Watt with different treatment times. The micro crack of TiO2 thin film observed by optical microscope was found to be uniformly distributed on the PDMS surface. The crystal structure of TiO2 investigated by X-ray diffraction (XRD) confirms that the structure TiO2 thin film on PDMS is amorphous. To characterize the hydrophilic property, the contact angle of PDMS and TiO2 coated PDMS were measured as a function of oxygen plasma treatment time. It was found that the contact angle of treated PDMS is dropped from 117 to 9 degrees after oxygen plasma treatment for 1 minute. While the contact angle of TiO2 coated PDMS is sharply dropped from 88 to 7.8 degrees after oxygen plasma treatment for 1 minute. Therefore, the improvement of hydrophilicity surface properties of PDMS is successfully obtained by TiO2 thin film coating and subsequent oxygen plasma treatment.

175 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 360 Cost-Effective Approach to Large-Scale Synthesis of Cobalt Ferrite Nanoparticles Long Chang, Karen Martirosyan, James Rantschler, Dan Luss, Sakhrat Khizroev, Dmitri Litvinov

Cobalt ferrite CoFe2O4 crystalline nanoparticles (60-100 nm) were produced using Carbon Combustion Synthesis of Oxides (CCSO). In this process the exothermic oxidation of carbon generates a thermal reaction wave that propagates at a velocity of 0.1-3 mm/s through the solid reactant mixture of CoO and Fe2O3 converting it to the cobalt ferrite without any external power consumption. The extensive emission of CO2 enhanced the porosity and friability of product. The quenching front method combined with XRD and VSM characterization confirmed the formation of crystalline CoFe2O4 particles in the early period of combustion, before the temperature reached its maximum. The coercivity of quenched product within the front region had the maximum value 940 Oe, while the magnetization was extremely low 1.2 emu/g. The as-synthesized ferrites had hard magnetic properties with coercivity 700 Oe and saturation magnetization up to 47 emu/g.

376 Optical fiber doped with the nano-film of the semiconductor as InP Guan Li Ming, Ru Zhang, Tingyun Wang

In this article, a fiber with a nano-film locating between the Si-core and the Si-cladding is fabricated and the improving technique which is one of the basic preparations of optical fiber that is called MCVD is adopted. We get a fiber with a film of the semiconductor, the thickness of which is only 69.7nm. Through the structure of the fiber, it is call as nano- semiconductor film fiber (NSFF). A light with the wavelength of 532nm inject in a section of 1cm of NSFF, a good gain from the wavelength of 906nm-1044nm; 1080nm-1491nm; 1624nm-1596nm is got. Above all, we confidently believe this NSFF has a good amplification between some ranges of the wavelength.

176 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Nano-Particles and Applications (3E2)

Time: 10.30 – 12.00 Room: 606 Session Chairs: Sabar D. Hutagalung and Max Chung

62 NanoGetters for MEMS Hermetic Packaging Songping Chen, Daoheng Sun, and Liwei Lin

A new getter, we called it nanogetter, based on carbon nanotubes (CNTs) coated Ti films has been developed with the purpose of providing a more efficient material, capable to get active at high vacuum environment (< 1.0E-03Torr, molecular state) and low temperature (<400°C). Because of the large surface area of CNTs and its native gas adsorption ability, dense CNTs growth on silicon substrate is considered to be an effective skeleton structure of the nanogetters. All the tests have demonstrated that nanogetters do have increased surface area and enhance the adsorption performance comparing to some traditional getters, such as St175 of SAES in Italy.

98 Synthesis, Size and Colloidal Stability of ZnO Nanoparticles in Ionic Solutions Shima Fardad, Reza Massudi, Atieh Manteghi, Mostafa Mohammadpour Amini

The formation and colloidal stability of zinc oxide nanoparticles, with a mean size smaller than 5 nm, produced under laser ablation of a zinc metal target in different liquid environments of NaOH and KOH solutions, is reported. The nanoparticle size, aggregation, optical properties and colloidal stability of zinc oxide suspensions (including K+ or Na+) has been examined to understand the mechanism of dispersion. KOH solution provided more effective degree of sustained nano-particle dispersion due to electrostatic stabilization. The nanoparticles are characterized by UV/VIS spectrophotometer, TEM and FTIR spectroscope.

177 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 167 Zinc Selenide (ZnSe) Nanoparticles Prepared by Sol-Gel Method Sabar Hutagalung, Siaw C. Loo

ZnSe nanoparticles in SiO2 thin films were prepared by sol-gel method. The sol of SiO2 was prepared from TEOS mixed with deionized water under ammonium hydroxide catalyst. The acetic acid was added into the solution to adjust its pH. Meanwhile, zinc acetate dihydrate and selenic acid were then added to the solution as zinc and selenium sources, respectively. The thin films were deposited on the glass substrate using dip coating method at room temperature, followed by annealed under Ar atmosphere at 500 oC for 1 hour to form ZnSe nanoparticles/SiO2 composite. The optical properties of thin films have been investigated via transmittance measurement in the visible wavelength range of 200 – 1100 nm. The results show that the transmittance of thin films was decrease with the increase of the molar ratio of ZnSe/SiO2. It was found that the maximum transmission was 54.58% for 6% ZnSe/SiO2 film and reduced to 36.71% for 14% ZnSe/SiO2 film, as the thickness increased from 125.92 nm to 135.51 nm. Further observation show that the optical transition in ZnSe/SiO2 thin film is direct transition with the band gap energy ranges of 2.64 - 3.59 eV.

275 Intersublevel Relaxation Properties of Self-Assembled InAs/GaAs Quantum Dot Heterostructures Jiunn-Chyi Lee, Ya-Fen Wu, Yeu-Jent Hu, Tzer-En Nee, Jen-Cheng Wang, Jia-Hui Fang

We investigate the phonon bottleneck effect on the temperature dependence of the photoluminescence spectra from InAs/GaAs quantum dot heterostructures with different dot size uniformity. Intersublevel relaxation lifetimes are simulated using a model based on carrier relaxation and thermal emission in the quantum dot system. Calculated relaxation lifetimes are decreasing with increasing temperatures. The smaller relaxation lifetimes are obtained for sample with higher dot size uniformity, indicating the partially suppressed phonon bottleneck of it. In addition, the thermal redistribution and relaxation process of carriers are also discussed quantitatively to illustrate the difference in temperature dependent changes of the samples.

178 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 410 Fe3O4 Nanoparticles on Nanofiber Produced by Electrospinning Shen Shou Chung, Bohr Ran Huang, Shin-fa Ho, Chih-chia Chang, Chun-ron Lin

We prepared PVA thin film with Electrospinning technique, and then disperse a Fe3O4 nanoparticles solution on it to simulate catalyst on membrane in energy device. We found the diameter of the nanofiber is more sensitive to the distance between the needle and the collector than the applied voltage. A ~9 cm2 of nanofiber with diameter from 0.38- 2 µm and thickness ranges from 20 µm to 189 µm can be produced within 30 minutes from a single capillary. We found the addition of Fe3C nanoparticles solution coagulate the nanofiber film, and changes the surface morphology substantially.

446 A Hybrid Method For Fabrication of Au Nanocrystals Nonvolatile Memory Qin Wang, Rui Jia, Weilong Li, Weihua Guan, Qi Liu, Baoqin Chen, Liu Ming, Tianchun Ye

This paper demonstrates the integration of Au NCs into nonvolatile metal-oxide-semiconductor (MOS) with a hybrid method operated at room temperature. The comparison of structural and electrical characteristics between the hybrid Au NCs and film deposition Au NCs was carried out. The size of the Au NCs formed by chemical method has been investigated more unique and small than the ones by the film deposition and RTA process. The electrical characteristics of MOS structure with two kinds of Au NCs has shown the larger memory window, lower P/E voltage and good retention time for the hybrid NCs due to its small diameter and low temperature process.

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Nano-Photonics (3F2)

Time: 10.30 – 12.00 Room: 607 Session Chairs: Gong-Ru Lin and Roderick Melnik

25 The Design of the Sub-Wavelength Wire-Grid Polarizer Fantao Meng, Jinkui Chu, Zhitao Han, Kaichun Zhao

According to the request of the sensitive wave band of 0.38µm-0.52µm of the bionic micro-nano navigation sensor, we designed a wire-grid polarizer which can be effectively used in this blue-violet light wave band based on rigorous coupled-wave theory. The difference between the designed wire-grid grating and conventional wire- grid grating is that the former adds the magnesium fluoride film between the substrate and the wire-grid, and etches a portion of the magnesium fluoride film. Numerical results and theoretical analysis present that the designed wire-grid grating is a broadband high TM polarization transmission efficiencies and high extinction ratios polarizer. The paper also discussed the performance of the designed grating affected by oxidation of aluminum and the relation between the number of orders retained and the convergence of the calculation numerical.

83 Photonic Crystal based Optical Chemical Sensor for Environmental Monitoring Tatsuro Endo, Yasuko Yanagida, Takeshi Hatsuzawa

The nanostructured materials such as nanoparticles have great possibilities as a sensing device. In this study, development of the photonic crystal based chemical sensor for environmental monitoring was aimed. The sensor consists of a glass substrate with a three-dimensional photonic crysral usning nanoprticles and poly(dimethylsiloxane) (PDMS) elastomer. Such a photnic crystal was generated by infiltrating the voids within an opaline lattice of nanoparticles with a liquid prepolymer to PDMS, followed by thermal curing. When a nonpolar organic solvents capable of swelling the elastomer matrix, was introduced to the surface of this sensor, the lattice constant and thus the wavelength of Bragg diffracted light was increased. On the basis of this mechanism, we demonstrated the detection of volatile organic compounds (VOCs). As a result, this photonic crystal based chemical sensor could be used to specifically determine the VOCs concentrations.

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144 Examining Amplification & Nonlinear Properties of Novel QWOF for Future Photonic Communications Ly Guat Lee, Bo Jun Yang

In this paper, we propose a novel structure of optical fiber to investigate its amplification and nonlinear properties. We employ both nano and optical fiber technologies in our proposed novel structure so-called Quantum Well Optical Fiber (QWOF) where an InP quantum well exists between the core and inner cladding of proposed QWOP. In the developed model, InP is chosen as a semiconductor dopant to examine its amplification and nonlinear properties. From our experimental results, the proposed QWOF shows its significant amplification properties for wavelength between 1080nm and 1491nm. Amplification properties also found in wavelength 906nm ~ 1044nm and 1524nm ~ 1596nm. Though the exact nonlinear parameter could not be determined, an upper bound of 1.73e17 W-1/m was calculated for where an effective core area has value 3.8844e-11 m2.

263 Development and Measurement of Two-Photon-Based Fluorescence Correlation Spectroscopy Po-Kai Wang, Da-Shin Wang, Hui-Hsin Lu, Chii-Wann Lin

Fluorescence correlation spectroscopy (FCS) is a powerful research tool for studying the chemical dynamics at the single molecule level due to the ultra-sensitive measurement of fluorescence fluctuation, so it has been generally applied to research of biology and biophysics for the extensive purposes. Compared to FCS based on confocal microscopy, FCS based on two photon microscopy has several outstanding advantages, such as lower photo-bleaching, less damage for biomolecular specimen, and can provide higher signal-noise ratio, and smaller focal volume. The fluorescence fluctuation signals correlated temporally in focal volume are the key observable in FCS at very dilute concentrations. Our instrument is equipped with a Ti:Sapphire laser operating 780nm. The microscope mounts a X60 water objective; the power at the exit of objective is about 12mW. We utilized the auto-correlation method to calibrate focal volume with different diluted concentration of FITC in this two-photon based system, and then determine the diffusion coefficient of molecules by adding different concentration of glycerol and the mole fraction of the dye labeled anti-rabbit IgG with rabbit IgG. In our preliminary results, the focal volume is about 0.8 fL and lateral dimension is 0.274um and axial dimension is 15.139um. We utilize a 10nM concentration solution of FITC with different concentration solution of glycerol ranging from 2.5% to 40%. The changes in diffusion coefficient are 256.129um^2/s to 51.795um^2/s. Moreover, after one hour of incubation at room temperature, the binding between anti-rabbit IgG and rabbit IgG is equilibrium and the binding mole fraction is 20%.

181 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 422 Multi-Mode Phonon-Controlled Field Emission from Carbon Nanotubes: Modeling and Experiments Niraj Sinha, Debiprosad Roy Mahapatra, John Yeow, Roderick Melnik

The main idea proposed in this paper is that in a vertically aligned array of short CNTs (grown over a substrate), we apply certain frequency dependent electric field, so that the mode-specific propagations of phonons (in correspondence with the strained band structure and dispersion curves) take place. We perform theoretical calculations and experiments to validate this idea with a view of optimizing the field emission behaviour of the CNT array. This is the first approach of its kind, and it is in contrast to the conventional approach where a DC bias voltage is applied in order to observe field emission.

Nano Energy Conversion and Generation (3G2) Time: 10.30 – 12.00 Room: 608 Session Chairs: Peng Xiao and Won-Youl Choi

26 Theoretical Study on the Selective Emitter Radioisotope Microbattery Xianggao Piao, Jinkui Chu, Peichao Wang

The structure characteristics of selective radioisotope microbattery were investigated. The selective emitter structure is proved to be one of the effective ways to improve the conversion efficiency of radioisotope microbattery in the course of deeply analyzing on its advantages.

189 Localized Heating of Tumor Cells Utilizing Superparamagnetic Nanoparticles Tseng Hao-Yu, Ying-Hsia Shih, Chen-Yi Lee, Xi-Zhang Lin, Gwo-Bin Lee

This paper presents an investigation of hyperthermia cancer therapy utilizing high-frequency magnetic field to induce a localized temperature increase on tumors by using superparamagnetic nanoparticles. In-vitro and in-vivo experiments showed the feasibility of hyperthermia cancer therapy. A temperature increase as high as 59.5oC can be successfully generated in rat livers. In-vitro tests showed that the survival rate of tumor cells was greatly reduced. In-vivo tests also indicated that hyperthermia therapy can significantly repress the growth of liver tumors by utilizing concentrated nanoparticles. Furthermore, a feedback control system was successfully developed to keep the nanoparticles at a constant temperature to prevent overheating in the tumors such that a safe and precise cancer therapy is feasible. The developed techniques may be promising for the cancer therapy.

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192 Cu2O Nanorods with Large Surface Area for Photodegradation of Organic Pollutant under Visible Light Lili Ma, Meng Peng, Jialin Li, Ying Yu, Zhenghua Chen

Cu2O nanorods with excellent large surface area was successfully synthesized by polyol method. Its photocatalytic property was evaluated by the photodegradation of brilliant red dye under visible light. For comparison, Cu2O nanocube was synthesized and evaluated with similar method. The result shows that the photocatalytic activity of the Cu2O naorods is more than twice higher than that for Cu2O nanocubes under visible light. It is also found that the structure of the Cu2O nanorods is stable and Cu2O nanorods can not been oxidized to CuO during the photocatalytic reaction. The Cu2O nanorods have remarkable large surface areas 47.6 m2/g, which is four times large than Cu2O nanocubes and reported Cu2O nanoparticles. The large surface area of Cu2O nanorods leads to its higher adsorption ability to the brilliant red dye and good photocatalytic activity under visible light. Since Cu2O nanorods are very stable and have high photocatalytic acitivity under visible light, they are expected to be used in photocatalytic oxidation technology practically in near future.

201 Synthesis of (AgIn)xCd2(1-x)S2 Photocatalysts for H2 Evolution under Visible Light by Using a Low- temperature Hydrothermal Method Lu Ren, Ying Yu

We present a new visible-light driven photocatalyst (AgIn)xCd2(1-x)S2 prepared by low-temperature hydrothermal method. Here, (AgIn)xCd2(1-x)S2 with nanostructure showed photocatalytic activities for H2 evolution from aqueous solutions containing sacrificial reagents, SO32- and S2- , under visible-light irradiation even without any cocatalysts. The morphology and the band gap of the photocatalysts different coming from different constituents, with x changing from 0.01 to 0.5, the band gap of (AgIn)xCd2(1-x)S2 can be easily tuned from 2.32-2.08 eV. Importantly, the Ag+ ion adding to CdS can improve the light sensitization of photocatalyst. Unloaded-(AgIn)0.5CdS2 with a 2.08 eV band gap showed higher activity for H2 evolution than (AgIn)0.01Cd1.98S2 and CdS.

183 IEEE-NANO 2007 Technical Digest

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225 Vertically-oriented TiO2-nanotube-based Dye-sensitized Solar Cells Dae-Jin Yang, Hun Park, Ho-Gi Kim, Seong-Je Cho, Won-Youl Choi

Nano-structured semiconducting metal-oxides and particularly 1-dimensional nanotube devices offer enhanced energy conversion efficiencies in dye-sensitized solar cell (DSC). Vertically oriented TiO2 nanotube arrays were fabricated on a transparent conducting oxide (TCO) coated glass substrate. After crystallization, the nanotube arrays were treated with TiCl4 to enhance the photogenerated current and then integrated into the DSC structure using a commercially available ruthenium-based dye. The DSC using TiCl4-treated TiO2 nanotube exhibited a conversion efficiency of 0.31% under 100 mV/cm2 (AM 1.5G) illumination.

400 Micro-Bubble Generation with Micro-Watt Power using Carbon Nanotubes Heating Elements Peng Xiao, Wen J Li

The generation of micro-bubbles using watt power localized heating of Carbon Nanotubes (CNTs) is presented in this summary. Dielectrophoretic force was used to form the CNTs between micro metal electrodes. The contact of the metal electrodes and the CNTs was fixed by a thin film of SiO2. The localized heat generation by CNTs is provided by a DC current which induces a temperature increase due to resistive heating. The bubble diameter will grow as the electrical energy transferring into Joule-heating occurs continuously across the CNT heater. With the boiling phenomenon, the micron scale bubbles were generated using the CNTs as the nucleation site. Our experiments show that the maximum energy required to generate bubbles was 112.5 w, only ~1 to 10% of the metal heaters. The data analysis also indicates that the energy consumption will have a large fluctuation when the liquid phase changed. As the maximum diameter of bubbles is around 100 microns and also the speed of the expansion of the diameter is controllable, the new CNTs heating elements can be used in various areas which require low energy applications such as ink-jet printing.

184 IEEE-NANO 2007 Technical Digest

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Invited Session: Nano-metrology and Characterization (3A3) Time: 13.00 – 15.00 Room: 601 Session Chairs: Shuo Hung Chang and Kensei Ehara

40 Probe Technologies for Micro/Nano Measurements Kuang-Chao Fan, Yejin Chen, Weili Wang

Conventional probes for dimensional measurement of parts in macro scale are no more capable for the meso- to micro- sized parts that require accuracy to the degree of 100nm to 10nm. This paper will discuss the needs of probe technologies for micro/nano measurements. Both of the non-contact and contact types of probes will be addressed. For the non-contact probe, the principles and applications of autofocus probe and confocal microscope will be particularly introduced. For the contact type, the fabrication of micro probe tip and some newly developed 3D touch probe mechanisms will be described.

187 Properties of CuPc/Se Organic-Inorganic Hybrid Thin Films Grown by Electron Beam Evaporation Technique Benchapol Tunhoo, Thutiyaporn Thiwawong, Jiti Nukeaw

Organic and inorganic materials have been deposited from copper-phthalocyanine (CuPc) and selenium (Se) by multi- pocket electron beam evaporation technique. The characterization of multilayer films was performed using X-ray diffraction (XRD), optical absorption spectra and atomic force microscope (AFM). The influence of the CuPc thickness on the crystalline structure, optical properties and morphologies of the multilayer films wil be presented in detail.

396 Overlay metrology for next generation lithography at CMS Yi-sha Ku, H.M. Tai, Calvin C Chang

The Center for Measurement Standards (CMS) has a research program in optical overlay metrology. There are two major threads being developed for next generation lithography of semiconductor manufacturing. The first is novel in-chip overlay target design which is small enough (2x2 µm) that it could be positioned within

185 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... the active area of integrated circuit devices to improve measurement accuracy. The second method is scatterometer- based technique which provides an alternative solution to improve overlay measurement precision and TIS. We implement in-chip overlay technology on product wafer which will simplified by using an image model to optimize the target design for specific process layers. If the target is small (“smallness” being relative to the resolution of the imaging tool) then only the symmetry of its image changes with overlay offset. We compare experimental results for the change of image asymmetry of these targets with overlay offset and with modeled simulations. Scatterometry offers a possible alternative to the current bright-field imaging method for overlay measurement. A grating is illuminated with a source (often a laser) and the change in reflected light level with incident angle or wavelength recorded as a signature. Rigorous solution of Maxwell’s equations is used to determine the average characteristics of the grating from the scatter signal. Our preliminary reports show that this is a promising technique, with very good precision and low TIS.

401 Measurement of Mass Distribution of Aerosol Particles - Applications to Nanoparticle Characterization Kensei Ehara

The principle and applications of the method of measuring mass distributions of aerosol particles are reviewed. An aerosol particle mass analyzer classifies aerosol particles according to their mass-to-charge ratio. It works by balancing centrifugal and electrostatic forces exerted on charged particles. Use of this device in combination of a differential mobility analyzer enables us to evaluate effective density, fractal dimension, and some other parameters of airborne particles. The particle systems investigated so far by this method include atmospheric aerosols, Diesel exhaust particles, and carbon nanotubes. This method can be applied also to determination of mass concentrations of dilute aerosol particles.

479 Nanometric Investigation of Photonic Materials J. B. Xu, H.C. Ong

We present our efforts on the understanding of photonic materials by scanning probe microscopy and other techniques on nanoscale and/or mesoscale in three aspects. Firstly, we report on a systematical in-situ study of degradation processes in organic electroluminescent materials namely, Alq3, and NPB, and their device stacks with CuPc and ITO [1]. The degradation pathways of Alq3 have been comprehensively scrutinized. Secondly, photoresponse of a single CdS nanoribbon device has been investigated by scanning probe microscopy, in conjunction with temporal optical spectra at different wavelengths [2]. A fast switching rate in the visible light region is

186 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... found. Furthermore, it is found that the device performance is closely related to the surrounding ambient, particularly, highly sensitive to the oxygen variations. Thirdly, a near-field technique – surface plasmon resonance (SPR) is applied for investigating heterostructures composed of metal and ZnO as well as their derivatives sandwiched with metallodielectrics. Various mechanisms responsible for the enhanced photoluminescence are explored. A strong surface plasmon mediated light emission from metal/ZnO heterostructures with good Ohmic contact is accomplished.

292 Atomic-Scale Analysis of Polydiacetylene Nanowires by Scanning Tunneling Microscopy Rajiv Giridharagopal, Kevin Kelly

Scanning tunneling microscopy (STM) has been used to study polydiacetylene nanowires, a candidate material for molecular electronic interconnects. STM analysis across a different voltages shows that the substrate material contributes to hole doping in the nanowires. Changing the substrate material causes a substantial change in the apparent height of the nanowires in STM images, revealing a previously-overlooked dependence of the electronic structure upon the substrate electrode material. Polydiacetylene nanowires are also shown to desorb due to interactions with the STM tip. These nanowires can either fully desorb or be cut into shorter segments depending on the strength of the tip-nanowire interaction. In both desorption cases the surrounding diacetylene-derivative monolayer order is fully restored within 100 ms. Desorption is a critical factor in evaluating the stability of these nanowires.

Nano-Biotechnology III (3B3)

Time: 13.00 – 15.00 Room: 603 Session Chairs: Guangyong Li and Masahiro Nakajima

103 Capillary Electrophoresis Microchip with New Micro-channel Structure for Miniaturization Ha Kon, Yi In-je, Grace Nisola, Chung Wook-Jin, Kim Jaewan, Choi Y. J., Kang C. J., Kim Yong-Sang

A modified capillary electrophoresis (CE) electrochemical detector (ECD) was developed and operated to separate and detect the target analytes. The concept of miniaturized twisted micro-channels was adapted for the new CE-ECD chip. In this manner, a smaller chip size can be developed given the same effective

187 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... capillary length of separation. Therefore, this work compared the performances of microchips using the new CE-ECD with twisted channel and the previously reported CE-ECD with straight capillary channel.

118 Effective Thermal Conductivities and Viscosities of Water-based Nanofluids Containing Al2O3 with Low Seok Jang, Kyo Sik Hwang, Ji-Hwan Lee, Jun Kim, Byeong Lee, Stephen Choi

We experimentally investigated effective thermal conductivities and viscosities of water-based nanofluids containing Al2O3 (Al2O3-nanofluids) with low concentration from vol. 0.01% to 0.3%. Without surfactant, water-based nanofluids containing Al2O3 are manufactured by two step method which is widely used. To examine suspension and dispersion characteristics of Al2O3-nanofluids, zeta potential as well as transmission electron micrograph of Al2O3 nanoparticles are observed. The effective viscosities of Al2O3-nanofluids according to the temperature are measured by a viscometer of oscillation type. The transient hot wire method is used in this study to measure the effective thermal conductivity of Al2O3-nanofluids. Based the results the maximum increase of effective viscosities of Al2O3-nanofluids is up to 4.5% while the maximum enhancement of effective thermal conductivities is up to 1.34%.

215 Investigation of Effects Attributed to Spherical Carbon Nanomaterials in Proteomic MALDI-TOF-MS Hsiang-Sheng Wen, Lai-Fu Tsai, Chien-Wei Liu, Yu-Chang Tyan, Shyi-Long Shy, Bau Tong Dai, Pao-Chi Liao

The study presents the mass spectrometric application of carbon nanomaterials in proteomic research. We utilized two spherical carbon nanomaterials, C60 buckyballs and iron-cored carbonballs (Fe-C), in sequence identification of a serum protein using matrix-assisted laser desorption ionization-time of flight mass spectrometer (MALDI-TOF-MS). The biological samples used in the experiments were enzymatically trypsinized bovine serum albumins (BSA) peptides instead of synthesized small peptide fragments. Noticeable improvements in mass spectrometric spectrum were obtained and quantified. Besides, we also utilized EDS and TEM to determine the composition and nanostructure of iron-cored carbonball.

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221 Study of DNA Properties under Controlled Conditions Using AFM Based Nano-Robotics Guangyong Li, Ning Xi, Lianqing Liu, Jiangbo Zhang, King Wai Chiu Lai

DNA electronics circuits require an efficient way to accurately position and individually manipulate DNA molecules. The recent development of Atomic Force Microscopy (AFM) seems to be a promising solution. In this research, the DNA molecules are positioned onto a pair of electrodes by a nano-robotic tool. The electrical properties of DNA are studied under controlled conditions.

377 In-situ Single Cell Mechanical Characterization of Saccharomyces cerevisiae inside an ESEM Mohd Ridzuan Ahmad, Masahiro Nakajima, Seiji Kojima, Michio Homma, Toshio Fukuda

We present the Environmental-SEM (ESEM)-Nanomanipulator system for in-situ measurement of mechanical properties of the Saccharomyces cerevisiae (baker’s yeast cells). This enhanced ESEM system comprises of a standard ESEM instrument as a nano imaging tool, a cooling stage as a cellular biology’s humidity controller and a 7 D.O.F. linear actuator as a nanomanipulator/effector. Two types of end-effectors, AFM sharp/flat pyramidal cantilever’s tips, have been used in the experiment. From the analysis, the average compressed force needed to penetrate the cell wall of the yeast cells using sharp and flat tips are 210.342 nN and 324.782 nN respectively. In addition, an average of 1107.243 nN tensile force is required to release a cell from the surface adhesion that binds the cells to the surface.

380 Normal and Cancer Human Cells Endocytosis Study of Nanoparticles by Combined AFM and NSOM Microscopy Yu Zhang, Vahid Yazdanpanah, MO YANG, Mihrimah Ozkan, Cengiz Ozkan

A substantial understanding of nanoparticles recognition and uptake by biological cells and tissues is very important for reaching their fullest potential in biomedical research. In this work, we investigated the cell endocytosis of iron oxide nanoparticles by both normal breast epithelial cells (MCF10A) and cancer breast epithelial cells (MCF7) using a combination of Atomic Force Microscope (AFM) and Nearfield Scanning Optical Microscopy (NSOM) without the need of fluorescent labeling. This hybrid AFM/NSOM imaging method is capable of simultaneous recording topographic and near-field optical images, which provide complementary information in both morphology and optical analyses on the cellular exterior and interior. The resolution of images was observed to be very close

189 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... to the size of tip. For both cell types, the iron oxide nanoparticles without targeting agents were found to be actively uptaken by a vesicle-mediated transport via a two-step process: a first step of binding at the cell membrane, followed by a subsequent internalization step.

474 Planar Hall Effect in Spin Valve Structure for DNA Detection Immobilized with Single Magnetic Bead Bharat Bajaj, CheolGi Kim

There is a considerable effort directed towards understanding and negating the proliferation of infectious diseases by improving the sensitivity of biosensors. We describe the investigation of nucleic acid interactions based on immobilization of thiolated probe DNA followed by the coupling of biotinylated DNA and streptavidin coated Dyna beads on the bare gold substrate for the further application with the Planar Hall effect in spin valve structure of Ta/NiFe/Cu/NiFe/IrMn/Ta which has been applied to single magnetic bead detection sensor with the size of 3×3µm². These, therefore, can be used well for biomolecule recognition, biotechnology and biosensor application.

Nano Thermal / Gas Sensors (3C3)

Time: 13.00 – 15.00 Room: 604 Session Chairs: M. Cahay and Zaili Dong

111 Fabrication of Optical Gas Sensors Using Porphyrin-Based Nano-Assembled Thin Films: a Comparison with Bulk Materials Serhiy Korposh, Naoki Takahara, Seung-Woo Lee, Toyoki Kunitake

In this study, sensor films of two biological origins, porphyrin deposited by the alternative adsorption method and bacteriorhodopsin embedded into inorganic sol-gel matrix were employed as active elements for optical gas sensors. The performance and sensor parameters of the nano-scale thickness porphyrin-based film and bacteriorhodopsin thick film were compared. The sensing principle is based on monitoring the optical changes at 700 nm (Q-band) for the porphyrin film and at 570 nm for the bacteriorhodopsin film. This work was a first step in the development of a fibre-optic gas sensor which employs thin films as sensitive elements for the detection of different gases.

190 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

188 Two-dimensional Electron Gas (2DEG) IDT SAW Devices on AlGaN/GaN Heterostructure King Yuen Wong, Wilson Tang, Kei May Lau, Kevin J. Chen

Surface acoustic wave (SAW) filters using two-dimensional electron gas (2DEG) as interdigital transducers (IDT) on AlGaN/GaN heterostructure has been demonstrated for the first time using a fluoride-based (CF4) plasma treatment technique. The CF4 plasma treatment is used to pattern 2DEG IDT on a planar surface without removing the top AlGaN layer. The RF characteristics of the SAW filters with planar 2DEG IDTs are compared with metal IDT SAW filters. It is shown that the massloading effects and the triple-transit-interference are suppressed in the 2DEG IDT SAW devices owing to the removal of the metal IDTs. It is capable of reducing not only the passband ripple, but also the size of devices because 2DEG IDTs can be placed closer. In addition, the detection part of the SAW sensor can be performed on the top of the planar 2DEG IDTs rather than in the SAW propagation path. This novel SAW device can be integrated with high-electron mobility transistors on AlGaN/GaN heterostructure to deliver a viable approach for single chip GaN wireless sensors.

236 Nano Thermal Sensors for Sensing Temperature in Water Environment Haitham Elshimy, Masahiro Nakajima, Fumihito Arai, Toshio Fukuda

Previously we illustrated the fabrication of nano temperature sensors using focused ion beam chemical vapor deposition (FIB-CVD) of tungsten over atomic force microscope cantilever, for sensing temperature distribution in local area. In this work, we present a new fabrication approach as well as new modifications for making these sensors capable of sensing temperature distributions in water environment. The nano sensor was calibrated in water using the hot stage of the environmental scanning electron microscope (ESEM) Quanta600. The experimental results show the positive characteristics of the temperature coefficient of resistance (TCR). It also illustrates the response of the sensor to sudden changes in the surrounding media. The characteristics of this sensor were compared to previously reported temperature sensing devices. The comparison verifies the easy, fast, mass productive and reliable fabrication of our sensor. The capability of sensing temperature in water will allow our sensor to be used in wide range of bio-applications.

191 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

257 Fabrication of Micro Temperature Sensor on the Flexible Substrate Chi-Yuan Lee, Shuo-Jen Lee, Guan-Wei Wu

In this study, micro flexible temperature sensor arrays were designed and fabricated on parylene thin film. The flexible parylene thin film was inserted into the micro temperature sensors using the micro-electro-mechanical-systems (MEMS) fabrication process. The flexible micro sensor array was covered with two pieces of parylene thin film that was etched by reactive ion etching (RIE) to uncover the contact pad. Finally, the silicon wafer was segmented and then soaked in acetone to remove the flexible temperature sensor from the silicon substrate. In fabricating the thin films, Au and Cr resistive temperature sensor arrays with Al conducting lines, the Cr was formed the adhesion layer between parylene and Au. The thickness of parylene and the micro temperature sensor was 2µm. They could therefore be easily attached to curved surfaces. The thin film sensors were highly sensitive (4.44×10-3/°C) to temperature and were effective at temperatures of up to 100°C. This study verified the feasibility of thin film sensor array applications with flexible parylene-base.

284 Laterally Grown SnO2 Nanowires and their NO2 Gas Sensing Characteristics Jae-Hwan Park, Dong-Gun Lim, Young-Jin Choi, Dong-Wan Kim, Kyoung-Jin Choi, Jae-Gwan Park

A simple and efficient way of preparing highly sensitive SnO2 nanowire-based gas sensors without an arduous lithography process was studied. The SnO2 nanowires could be grown laterally upon the Si substrate by separating the Au catalyst layer from the substrate. As the electric current is transported along the networks of the nanowires, not along the bottom layer on the substrate, the sensitivity to gases was maximized in this lateral-type structures.

192 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

365 Responses of Nanostructured Sensing Array to Mixed VOCs: Feature Extraction and Pattern Recognition Xiajing Shi, Susan Lu, Lingyan Wang, Chuan-Jian Zhong

This paper investigates the dynamic response characteristics of a sensing array constructed from nanostructured thin films on interdigitated microelectrodes (IMEs). It also demonstrates the array’s capability to identify and quantify gas mixtures. The films were prepared from dithiol (PRDT, PDT, ODT, NDT, and DDT) and mercaptoundecanoic acid (MUA) linked assemblies of 2-nm sized gold nanoparticles. These films exhibit sensitive responses to volatile organic compounds (VOCs). The characteristics of both the transient and stationary response signals are studied. The peak response and the peak gradient of the response are extracted as the features for identifying VOCs by pattern recognition. The Principal Component Analysis (PCA) shows the patterns of binary mixture presented by both of the two features are linear combinations of the individual analytes’ patterns. Pattern classification based on the selected features is performed with Artificial Neural Network (ANN), which shows satisfied detection and quantification performance.

369 A Three Dimensional Multi-Walled Carbon Nanotube based Thermal Sensor on a Flexible Parylene Substrate Selvapraba Selvarasah, Mehmet Dokmeci

We present the first design, fabrication and testing results from a three dimensional Multi-Walled Carbon Nanotube based thermal sensor on a flexible Parylene-C substrate. Parylene-C membranes with their excellent properties are rarely used yet are very promising candidates as flexible substrates. By combining optical lithography and dielectrophoretic assembly, we demonstrate a MWNT based thermal sensor that uses parylene-C as the substrate, device dielectric and the encapsulation layer. This is the first instance of CNT based thermal sensor made on a flexible Parylene-C substrate.

193 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

Nano-Materials Fabrication and Characterization (3D3)

Time: 13.00 – 15.00 Room: 605 Session Chairs: Saif Islam and C. T. Pan

36 Young’s Modulus of High Aspect Ratio Si3N4 Ping-Hei Chen, Cheng-Hao Yang, Chien-Ying Tsai, Tien-li Chang

The physical properties of nano-thickness membrane are known to be different from those of bulk material. However, it requires a novel approach to measure the physical properties of nano-thickness membrane due to its nano-scale dimension. Currently, many potential applications for the nanoscale structures are not really practical because their mechanical properties have not been established. In this study, a suspended high aspect ratio silicon nitride nano- thickness membrane is fabricated by using silicon micro-machining. The membrane has a thickness of 30 nm and an area of 4 mm by 7 mm, as shown in Fig.1. Young’s modulus of the silicon nitride nano-thickness membrane is determined from the deflection of the suspended membrane, which is resulted from the weight of membrane itself. The calculated results show that the Young’s Modulus of the nano-thickness membrane, 331 GPa, is lower than its bulk value of 385 GPa.

102 Comparison of Mesoporous and Normal Titania-P3HT Hybrid Photovoltaic Cell Hyun-Jung Her, Jung-Min Kim, Kang C. J., Choi Y. J., Kim Yong-Sang

Hybrid photovoltaic cells based on poly(3-hexylthiophene) (P3HT) were fabricated with mesoporous titania (TiO2) or normal titania films. Mesoporous titania photovoltaic cell showed comparable device parameters to normal cell. Current- voltage measurements of normal titania-P3HT photovoltaic cell show a short circuit current of 1.01 mA/cm2, an open circuit voltage of 460 mV and a fill factor of 42.24 %, resulting in a calculated AM 1.5 (100mW/cm2) power conversion efficiency of 0.15 %. The potential of the fabricated composite mesoporous titania-P3HT structure on photovoltaic cell synthesis is currently under investigation.

194 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 342 Self-Assembly of Low-Dimensional Phase-Change Nanomaterials for Information Storage Xuhui Sun, BIn Yu

Low-dimensional phase-change nanomaterials offer advantages over their bulk counterpart in data storage due to reduced energies for phase transition. These features contribute to low power, scalability, and fast write/erase. We reported synthesis approach and material studies of 1-D chalcogenide nanomaterials including GeTe, In2Se3, and Ge2Sb2Te5 nanowires targeted for nonvolatile memories. The phase-change nanowires have been synthesized via thermal evaporation under VLS mechanism. The crystal structure, morphology, and composition of the synthesized nanowires were investigated by SEM, EDX, HR-TEM and XPS. Chalcogenide nanowires exhibit significantly reduced melting points, low activation energy and excellent morphology, making them promising nanomedia for data storage with low energy consumption and excellent scalability.

373 Smooth Silver Thin Film Deposited Using Ge as a Wetting Layer for Nanoscale Electronics and Photonic Logeeswaran VJ, NOBUHIKO KOBAYASHI, M. Saif Islam, W. Wu, Pratik Chaturvedi, Nicholas Fang, Shih- Yuan Wang, Stanley Williams

In this paper, we highlight a new method to obtain smoother silver (Ag) film characterized by much smaller RMS surface roughness of ~0.6-0.8nm, peak-to-valley separation of ~4nm and grain-size distribution ~15nm as compared to conventionally obtainable Ag film characterized by RMS surface roughness of ~6-8nm, peak-to-valley separation of ~20nm and grain-size distribution of ~100nm. Thin Ag films of ~150Ǻ (optically thin) were deposited on double-polished borosilicate glass and silicon (100) substrates with 5Ǻ, 10Ǻ, 20Ǻ, 50Ǻ, 75Ǻ and 150Ǻ Germanium (Ge) intermediate layers. An optically thick Ag film of 600Ǻ was also prepared with 20Ǻ Ge. The surface morphology improvements are observable on all the samples. The Ag and Ge were deposited by e-beam evaporation at a base pressure of ~1µTorr and without annealing. AFM image analysis shows that having the evaporated Ge intermediate layer drastically changes the Ag surface morphology, namely, the surface roughness, peak-to-valley and grain size distribution. It is postulated that the Ge acts as a wetting layer for the evaporated Ag film thus directly minimizing the commonly seen 3D-island (Volmer-Weber growth) cluster formation of Ag. Our smooth Ag results are very promising for applications in molecular electronics interconnect, optical metamaterials, plasmonic superlens and nanophotonics.

195 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 477 Effect of Growth Conditions on the Surface Morphology of ZnO Prepared by Metal-organic Vapor Phase Epitaxy H.P. Ho, Hui Wang, Kwong-Chun Lo

This paper reports the growth of zinc oxide (ZnO) films on Si (100) substrate by metal-organic vapor phase epitaxy (MOVPE), using a reaction of diethylzinc (DEZn) and N2O gas. The effect of growth conditions on the surface morphology of ZnO has been investigated. We revealed that the structure of the deposited ZnO changed from quasi- aligned nanorods at low growth temperature to columnar-shaped grains with temperature increases, and finally to continuous films at temperatures above 500oC. An interesting phenomenon is observed that the morphology of ZnO grown on Si substrate goes through a transition from columnar-shaped grains to randomly aligned nanowires with increasing DEZn flow rates at certain growth temperatures.

Nano-Materials and Applications (3E3)

Time: 13.00 – 15.00 Room: 606 Session Chairs: Yu Sun and Anuvat Sirivat

9 Electronic States and Half-Integer Quantum Hall Effect in Graphene Ribbons Alessandro Cresti, Giuseppe Grosso, Giuseppe Pastori Parravicini

We present a tight-binding description of the energy spectrum of zigzag and armchair graphene ribbons threaded by a uniform magnetic field and in the presence of top gates. Stationary currents distribution is obtained by the nonequilibrium Keldysh-Green's function method. A pictorial description of conductive channels in the quantum Hall regime is provided. The analysis of the currents under applied gates shows that the Dirac-like nature of the states at the corners of the graphene Brillouin zone can be exploited to realize current manipulation.

196 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 177 Material and Electrochemical Studies of Platinum Nanoparticle-coated Carbon Nanotubes for Biosensing Jining Xie, Shouyan Wang, Lavanya Aryasomayajula, Vijay Varadan

In this work, we present our study on platinum nanoparticle-coated carbon nanotubes for amperometric glucose sensing. Transmission electron microscopy and X-ray diffraction were used to characterize the nanomaterial. To investigate its potential biosensing application, platinum and carbon nanomaterial-based electrodes were fabricated and characterized electrochemically. Our experimental results indicated that this nanomaterial possessed a high electrochemical activity and the fabricated nanomaterial-based amperometric sensor exhibited a high sensitivity and a good selectivity towards glucose.

195 Effects of Temperature and Dielectric Permittivity on Electrorheological Properties of Elastomers Ruksapong Kunanuruksapong, Anuvat Sirivat

Acrylic elastomers, SAR, SBR and SIS thin sheets were fabricated through solvent casting and electrorheological properties were measured and tested towards electroactive applications such as artificial muscle and/or MEMS devices. Experiments were carried under the oscillatory shear mode with applied electric field strength varying from 0 to 2 kV/mm. The effect of temperature on the storage and loss modulus (G' and G"), storage modulus sensitivity (ΔG′/G′0), and dielectric permittivity of acrylic elastomers (AR70, AR71, and AR72), SAR, SBR and SIS D1112P were studied between 300-370 K. AR71 has the highest dielectric permittivity (ε′) of 55.98 pF/m, whereas SIS D1112P has the lowest dielectric permittivity of about 24.28 pF/m. From our data, we can classify the elastomers into two types. Acrylic group has positive storage modulus sensitivity with increasing temperature and dielectric constant, and the styrene copolymer group has negative storage modulus sensitivity.

216 Electrical Conductivity Response of Poly(p-phenylene)/ZSM-5 Composite Pimchanok Phumman, Anuvat Sirivat

Poly(p-phenylene) (PPP) is a one type of conductive polymers that can be used as a gas sensing material because its optical and electrical property responses when exposed to particular gases. PPP was chemically synthesized via the oxidative polymerization of benzene and doped with FeCl3. Electrical conductivity response of doped PPP (dPPP) towards CO, H2 and NH3 was investigated. dPPP showed no response towards CO and H2, but it showed a definite negative response to NH3. The electricacl conductivity sensitivity of dPPP increased with increasing NH3 concentration. In order to improve sensitivity of the sensor, ZSM-5 zeolite was added into the conductive polymer matrix. The sensitivity of the sensor increased with increasing zeolite content up to 30%.

197 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 262 Investigation of PECVD SiC Nano Film Zhe Chen, Dayu Tian, Guobing Zhang, Haixia Zhang

PECVD SiC nano films were fabricated. The processing was stable that the deviation of measured membrane thickness from the designed does not exceed 3%. The as-deposited SiC nano films had constant atom concentration distributed along depth and the Si/C atom ratio was controlled by SiH4 flux. The residual stress was controlled by furnace annealing. As-deposited SiC nano film could obtain nano crystalline structures with post laser annealing, which improved its mechanical and electrical performance.

315 Silicon-Based 2D Slab Nano Photonic Crystal TM Polarizer in Telecommunication Wavelength Yonghao Cui, Qi Wu, Ethan Schonbrun, Mark Tinker, J-B. Lee, Won Park

We report an extremely compact (15.4 μm x 8 μm) silicon-based 2D slab nano photonic crystal transverse magnetic (TM) polarizer which blocks propagation of the transverse electric (TE) polarized light but passes TM polarized light around telecommunication wavelength (1,550 nm). TM polarization occurs in a length of mere 4.9 μm and it has a great potential to be integrated in a complex photonic integrated circuits. To our knowledge, this is the first ever demonstration of silicon-based TM polarizer in telecommunication wavelength. 2D and 3D finite difference time domain (FDTD) simulation was utilized to design a triangular array of air holes in silicon with diameter of 170 nm and pitch distance of 347 nm for the TM polarizer and 371 nm for the input and output waveguide. Such photonic crystal TM polarizer was fabricated in silicon-on-insulator wafer using focused ion beam and reactive ion etch. The device was fully characterized using tunable lasers in the wavelength range of 1,528 nm ~ 1,604 nm. Transmitted light intensities of the TE and TM polarized lights were measured which clearly showed the TE polarized light is filtered out around 1.55 μm wavelength.

406 Sensitivity Modulation of Carbon-Nanotube Chemical Sensors via Quantum Dot Heterostructures Cosmin Laslau, Benjamin Mahar, Yu Sun

Carbon nanotube–quantum dot heterostructures were formed using multiwalled carbon nanotubes and CdSe quantum dots, which were trapped as networks between electrodes via dielectrophoresis. Chemical exposure to 10ppm CuSO4 displayed a size-dependent modulation of chemical sensitivity, with the heterostructures using 2.32nm quantum dots displaying a 12% resistance change, while those using 4.57nm quantum dots displayed a 20% change. Both represent a decrease in sensitivity from amine-functionalized carbon nanotubes without quantum dots, which show a 47% resistance change. This drop is partly attributed to charge transfer between the nanotubes and the CdSe quantum dots. The demonstrated modulation of nanotube properties has potential applications in multiplexed chemical sensors.

198 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 420 The Unique Dielectric Behaviour of Nanosilica Epoxy Composite Kyle Jiang, Lihong Cheng, Guorong Li

Epoxy composites with microsilica fillers are popularly used in electronic packaging industry and their mechanical and dielectric properties are largely known. Nonetheless, the incorporation of nanofillers in epoxy composites may affect the electric properties of the composites quite differently from microfillers. This paper presents a study on the dielectric properties of E-51 epoxy resin incorporated with surface modified silica particles of 20 nm and 100nm in diameters respectively. The nanoparticles and composites were examined under infrared spectroscopy and XRD and it was found that the surface modification of the nanoparticles lead to a good hydrophobic property and made particles easier to form bonds with the resin. The dielectric properties of the composites were measured afterwards, showing that by adding low dielectric constant nanosilica particles, the dielectric constants of the composite were notably increased as opposed to a drop as one might expect, while the dielectric losses were lowered. The increase in dielectric constant phenomenon is explained in terms of long chemical chains created in forming the composites. It is also found that the high dielectric constant phenomenon is relevant to higher surface area of the nanofillers.

Analysis and Design of Quantum and Molecular System (3F3)

Time: 13.00 – 15.00 Room: 607 Session Chairs: Sy-Yen Kuo and Colin Lambert

6 Frequency Domain Analysis of Open Two--State Quantum Systems Pier Paolo Civalleri, Marco Gilli, Michele Bonnin

A two-state open quantum system composed of identical noninteracting particles excited by a sinusoidal TEM electromagnetic wave is considered as a model for a typical nanocircuit component. Its steady state performance is analyzed to any degree of accuracy by the Harmonic Balance Technique. It is shown that the power delivered to the bath, which in turn influences the small signal active performance, only depends on the even harmonics. This is the basis for implementing improved equivalent circuits.

199 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 13 A New Atomic-Scale Finite Element Simulation Method for Nanomechanics of SWNTs Jianning Ding, Biao Kan, Guanggui Chen, Quan Wang

A new atomic-scale finite element method based on the nonlinear spring model is developed for single-walled carbon nanotubes. Atoms are chosen as nodes in the finite element model, and they are supposed to be connected with each other by line-springs and torsion springs whose mechanical parameters are determined by Tersoff-Brenner potential. The process of establishing global stiffness matrix is given in detail. Some of the application examples are shown, and the results are compared with those obtained by other methods. It is found that this method costs much less time than many of other simulation methods without losing accuracy.

100 Molecular Electronics Device Modeling for System Design Ci Lei, Dinesh Pamunuwa, Steven Bailey, Colin Lambert

We have used the Breit-Wigner resonance formula to model a class of molecular electronics devices with the aim to establish an abstract model for a molecular electronic device that can be used in a general cross bar architecture of future nanoelectronic systems. We show that the molecular I-V curves can be characterized by a very small number of variables including the couplings between the contact and leads.

147 Schrodinger Equation Monte Carlo-3D for Simulation of Nanoscale MOSFETs KENG-MING LIU, Wanqiang Chen, Leonard Register, Sanjay Banerjee

A new quantum transport simulator, Schrodinger Equation Monte Carlo in Three Dimensions (SEMC-3D) for simulating carrier quantum transport subject to scattering in 3D nanoscale MOSFETs, is presented. SEMC-3D self-consistently solves (1) the 2D-confined structure as a function of position along the channel, (2) the 1D quantum transport equations for injected carriers propagating through the simulation region within each subband subject to a rigorous treatment of various intra- and inter- subband and valley scattering processes, and (3) the 3D Poisson equation. The technique, an extension of prior 1D and 2D versions but subject to some significantly different computational considerations, is briefly described. SEMC-3D simulations of a Si surround-gate nano-scale nMOSFET are provided to illustrate the modeling capabilities and computational efficiency of SEMC-3D.

200 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 153 Improving the Network Flow Problem using Quantum Search Chia-Mu Yu, I-Ming Tsai, Yao-Hsin Chou, Sy-Yen Kuo

Maximum flow problem has many applications in the engineering community. In this paper, we propose a quantum algorithm to solve the maximum flow problem in $O(n^{2.5})$ time, which, to the best of our knowledge, is faster than all other classical and quantum algorithms.

194 First Principles and MD Simulation Study of the Interaction of Functionalized Carbon Nanotubes Chatchawal Wongchoosuk, Sriprajak Krongsuk, Teerakiat Kerdcharoen

The interactions between various single-walled carbon nanotubes (SWNTs) and water molecules have been studied using first principles calculations and molecular dynamics (MD) simulations. The SWNTs were modeled by varying the diameter ranging from the chiral vector (6,0) to (9,0), and by modifying the terminal ends with hydroxyl (-OH) and carboxyl (-COOH) functional groups for the nanotubes having chiral vector (9,0). Based on the potential energy surface study, it was found that movement of a water molecule into the tip-modified tubes is easier than that of the pristine tube. It was also found that the tubule diameter play an important role for solvation. The results from MD simulations indicate that the orientation of waters interacting with all of model tubes is rather similar. Water molecules prefer to occupy around the tip of carbon nanotubes than other parts. The hydrophilic behavior of functionalized SWNT is improved over the pristine tube as described by the first principles results.

260 Modeling and Simulation of Footing Effect in Drie Process Yisong Wang, Yunxia Guo, Haixia Zhang

The footing effect happens when reactive ion etching reaches the insulator layer (oxide or glass). Theoretically, the footing effect in DRIE is caused by charging effect on the insulator layer, which is induced by the directionality difference between ions and electrons. These accumulated charges form a local electric field, which deflects direction of ions. The deflected ions remove the protective polymer at the bottom corner of the side wall, and cause the silicon at corner to be etched, which depth and height increase with the development of the over-etching, named as octal owing to its shape. When the newly created cavity at bottom reaches certain depth, the following passivation layer couldn’t cover it completely; therefore, the impact damage would be exasperated in over-etching steps. Define Based on the above modeling, the numerical simulation results were present, including potential contour,

201 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... electric field, and deflexion ion distribution during the simulation. The simulation results and SEM of 3mins and 6mins over-etching of a 10um width trench with 80um depth of silicon were compared. From these results, it can be observed clearly this modeling and its numerical simulation descript the mechanism and evolution of DRIE process, and the results of simulation and experiment are agreed quite well.

Nano/Molecular Devices I (3G3)

Time: 13.00 – 15.00 Room: 608 Session Chairs: David Wong and Ning Xi

57 Random Telegraph Signals and 1/f Noise in ZnO Nanowire Field Effect Transistors Hao Xiong, Wenyong Wang, Qiliang Li, Curt Richter, john Suehle, Woong-Ki Hong, Takhee Lee, Daniel Fleetwood

The characteristics of low frequency noise in the drain current of n-type ZnO Field Effect Transistors (FETs) have been investigated at room temperature and at 4.2 K. At room temperature, the noise power spectra have classic 1/f dependence. The devices show three-level switching events with amplitude as high as 40% at 4.2 K, from which two individual defects with energies close to the Fermi level in the ZnO channel can be distinguished.

208 Comprehensive Ballistic Saturation Current Study of Strained Germanium NMOSFETs Y.-J. Yang, S. T. Chang, and C. W. Liu

The ballistic saturation drain current in strained germanium NMOSFET is assessed using an analytical model. The angular dependence of ballistic saturation drain current in Ge NMOSFET for all substrate orientation under different strain conditions is investigated. Applying biaxial tensile stress on (111) wafer with [-110] channel direction can reach the highest ballistic saturation drain current. For both tensile and compressive strain, ballistic saturation drain current enhancement can be found for all wafer orientation if strain condition and channel direction are optimized.

202 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 218 Single Grain Boundary Effect on Surrounding-Gate Polysilicon TFT's Device and Circuit Characteristic Yiming Li, Jung Y. Huang, Bo-Shian Lee, Chih-Hong Hwang

In this paper, single-grain-boundary-position induced electrical characteristic variations in the surrounding- gate (i.e, gate-all-around, GAA) polysilicon thin film transistors (TFTs) are numerically investigated. For a 2T1C active-matrix circuit, a three-dimensional device-circuit coupled mixed-mode simulation shows that the switching speed of GAA TFTs can be improved by nine times, compared with the result of the circuit using single-gate (SG) polysilicon TFTs. The position of single grain boundary near the drain side has an ill effect on device performance, but the influence can be suppressed in the GAA devices. We found that under the same threshold voltage (Vth), the variation of threshold voltage can be reduced from 15 % to 5 %, with varying of gate structures of the GAA device.

271 Novel Sloped Etch Process for 15nm InAlAs/InGaAs Metamorphic HEMTs Seong-Jin Yeon, Myunghwan Park, Kwangseok Seo

We developed a new technology with modified sloped etch process to fabricate nanometer scale high-electron mobility transistors (HEMTs). This technology made us overcome the limit of E-Beam lithography and metal evaporation. Through this technology, we fabricated 15nm InAlAs/InGaAs metamorphic HEMTs (MHEMTs) with optimized epitaxial layers. We obtained a cutoff frequency fT of 580 GHz and a maximum transconductance (gm) of 1.6 S/mm.

351 Single Carbon Nanotube based Infrared Detectors using Photovoltaic Effect Jiangbo Zhang, Ning Xi, King Wai Chiu Lai, Guangyong Li, Yilun Luo

The photobehavior of carbon nanotubes has attracted great attention because of their unique structure and outstanding electrical properties. Much experimental progress toward nanotubes based photodetector has been reported. But it is still unclear whether the photoinduced conductivity change is caused by heating effect or quantum effect for the reported results. In this paper, a single carbon nanotube (CNT) based photodiode for infrared (IR) detection is constructed by assembling a single CNT to form connections with a pair of electrodes. By forming Schottky contact with an electrode, a semiconductive CNT is assembled into a Schottky diode. The photogenerated electron-hole pairs within the Schottky barrier are seperated by an external electric field or the built-in field, producing a photocurrent. Since a semiconductive CNT normally forms Schottky contacts with both electrodes, the photocurrents

203 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... generated by the two reversely connected Schottky diodes will cancel each other. Experimental results show that, at zero bias, the photocurrent varied from positive to negative as the IR spot center moved from one electrode to another one. This proved that the photocurrent is caused by the photovoltaic effect in stead of the heating effect.

370 Color Extraction and Shift with Quantum Dot Array Woo Hyung Lee, Pinaki Mazumder

Quantum dot (QD) nanostructure provides a pathway to build nanoscale tera operations per second (TOPS) ultra-fast signal processing architectures. This paper demonstrates that quantum dots with multi-peak tunneling I-V characteristics can be configured into a two-dimensional array of regular computing elements, being locally connected by programmable passive and active elements with a view to realizing a wide gamut of color image processing functions such as quantization, color extraction, image smoothing, edge detection, line detection, and so on. The multi-peak quantum dots can be fabricated by patterning nanoscale metallic islands on the surface of multi-barrier resonant tunneling diodes. In order to process color information of the input images, we have employed two different methods for color representation schemes: one using color mapping, and the other using direct RGB representation. With these color representation methods on the proposed quantum dot array architecture, we have demonstrated some of the above imaging functions through HSPICE simulation.

386 Random Dopant Induced Thermal Fluctuation in Nanoscale SOI FinFET Yiming Li, Chih-Hong Hwang, Shao-Ming Yu, Hsuan-Ming Huang

In this paper, the random dopant induced thermal fluctuation of 16nm SOI FinFETs is for the first time explored. A 3D full scale atomistic device simulation is advanced and performed for electrical characteristics of the random dopant fluctuated SOI-FinFET. Effect of the random dopant number and position induced fluctuations on device characteristics including variations of the lattice and electron temperatures are estimated. The discrete dopant fluctuated maximum electron temperature depends upon the dopant number and position. This large scale computational statistics study provides us an insight into the fluctuation of heat dissipation in SOI FinFET.

473 Semiconducting Graphene Films for Large Scale Carbon Based Electronic Song Han, Scott Gilje, Richard B. Kaner, and Kang L. Wang

204 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

Single sheet graphite oxide films are synthesized by intercalation and exfoliation routes of graphite. Those insulating graphite oxide films were deposited on SiO2/Si substrates and reduced to semiconducting graphene. Field effect transistors of these graphite oxide and graphene films were fabricated. The transport properties of the devices were studied before and after the reduction reaction. Such method opens up the possibility of preparing high quality, large area and manufacturable graphene films with low cost.

Invited Session: Nano Electronics and Biosensors (3A4)

Time: 15.30 – 17.30 Room: 601 Session Chairs: Chongwu Zhou and Alessandro Pecchia

169 High Performance Electron and Hole Current Switching in Double-Hetero Tunnel-Junction n-i-p Quantum Dot Transistor Chugo Fujihashi

A double-hetero tunnel-junction structure is introduced to an electron and hole current switching n-i-p type quantum dot transistor to improve its switching clearness. Previously the n-i-p type semiconductor quantum dot transistor was suggested on a basis of an idea of electron and hole current switching without consideration about effects of recombination current generated in a quantum dot, and simply based on a homo tunnel-junction structure. This paper show that the newly introduced double-hetero tunnel-junction structure suppresses the recombination current and it improves the switching clearness, although a considerable recombination current is calculated in the homo tunnel- junction type and clearness of switching performance is degraded.

424 C60 nanowhisker for electronics Yuichi Ochiai, Kenichi Ogawa, Nobuyuki Aoki, Jonathan Paul Bird

As is well known, there has recently been a huge effort devoted to the development of carbon-based nanoelectronics. While much of this interest has focused on the operation of devices that utilize carbon nanotubes as their functional elements, a new type of C60 needle, or nanowhisker (NW) has recently been obtained by the method of liquid-liquid interfacial precipitation (LLIP). C60 NWs offer potential as smart materials for field effect transistors (FETs), although their electrical properties are currently much less well understood than those of carbon nanotubes. The C60 NWs that we obtain by LLIP are typically less than 0.3 μm in

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... diameter, but may be more than 50 μm in length. Nanofabrication of C60 NWs has been developed for device manufacturing, based on the simple synthesis of C60. Several difficulties, including carrier suspension were overcome by controlling the structure of the devices. FET structures were formed using a Si/SiO2 wafer as the substrate, with Ti/Au metallization primarily used to form the source and drain electrodes. When using the Si substrate as a gate, these devices were found to exhibit basic transistor operation, allowing us to determine that the C60 NWs form n-channel enhancement-type FETs. A standard analysis allows the carrier mobility in these structures to be roughly estimated as 0.03 cm2/Vs under vacuum conditions at room temperature, although this value represents a lower bound due to the contact resistance between the NW and the electrodes.

455 Advances in Nanoimprint Lithography Paolo Lugli, Stefan Harrer, Sebastian Strobel, Francesca Brunetti, Giuseppe Scarpa, Marc Tornow, Gerhard Abstreiter

Challenges and issues of Nanoimprint Lithography (NIL) are addressed and discussed. In particular, imprinting properties of an innovative epoxy-based polymer have been investigated, which can be used for combined thermal and ultraviolet nanoimprinting (TUV-NIL) processes aiming at high-throughput nanoimprint lithography. Our recent progress in developing a new room-temperature nanoimprint (RTNIL) tool for the sub-10-nm region is shown.

426 Modeling Dissipative Transport in Molecular Systems Alessandro Pecchia, Giuseppe Romano, Aldo Di Carlo,

First-principle calculations based on density functional and non-equilibrium Green’s functions are used to compute the power emitted in conducting molecular systems due to scattering with localized vibrations. The balance between the rate of phonons emitted and dissipated into the contacts allows the computation of the steady-state distribution of phonon quanta localized in the junction, from which we extract the local temperature reached by the molecule. The model includes two critical quantities; i) the rate of phonon emitted in the junction due to electron-phonon scattering and ii) a microscopic approach for the computation of the phonon decay rate, accounting for the dynamical coupling between the vibrational modes localized on the molecule and the contact phonons. The method is applied to the discussion of several limiting conditions and trends, depending on electron-phonon coupling, incoherent transmission and phonon dissipation rates, using both analytical results and numerical calculations. The results are applied to interpret recent experimental findings of thermal instability of C60 on Cu and Au.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 463 Characterization of Biomolecular Configurational Entropy via Nanomechanical Cantilever Motion Liya Guo, and Ya-Pu Zhao

Generation of nanomechanical cantilever motion appeals for a wide range of applications such as high-throughput biomolecular detection and bioactuation. Several biological sensors, such as DNA chips, are based on the detection of nanomechanical cantilever motion. It has been suggested that such motion is induced by changes in surface stress of the cantilever which is induced by the DNA self-assembly. The thickness changes of the DNA adsorption, which can be the direct characterization of DNA molecular configurational entropy, were measured in situ with spectroscopic ellipsometry. In this paper, we show that cantilever motion is created because of the changes in configurational entropy. The DNA chain deformation reduces configurational entropy, and this phenomenon leads to an entropy driving force which acts on the cantilever surface and produces the surface stress.

Nano-fluidics (3B4)

Time: 15.30 – 17.30 Room: 603 Session Chairs: Stella Pang and Toshio Fukuda

16 A novel nanoliter liquid dispensing technology for Protein crystallization Yaxin Liu, Liguo Chen, Lining Sun

Recently, high-throughput protein crystallization requires the ability to transfer submicroliter volumes of fluid with a large range of viscosities. In this paper, a solenoid-based non-contact liquid handling instrument with high-speed flow sensor was developed to meet this requirement. Also, the non-contact liquid dispensing process was investigated with computational fluid dynamics (CFD) models, which make us understand the droplet breakup process in more detail and make dispensing nanoliter droplet fall off successfully without attach to the nozzle. Experiments were carried out to dispense 30% glycerol, Coefficient of variances has been shown to be below 3% at 1 µl and approach 8% at 50 nl.

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34 Nanolayer Effects in Thermal Conductivity of Nanofluids Containing Cylindrical Nanoparticles Sadollah Ebrahimi, Jamshid Sabbaghzadeh, Maryamalsadat Lajvardi, Iraj Hadi

We present a theoretical model for explaining the enhancement in the effective thermal conductivity of nanotubes (cylindrical shape particles) for use in nanotube-in-fluid suspensions. Our theoretical model shows that with the decrease of nanotube diameter, the thermal conductivity increases if the thickness of nanolayers increases. We also show that the effective thermal conductivity is decreased with cylindrical nanoparticle diameter, which agrees with experimental results. We provide a good estimation for the nanolayer’s thickness which plays an important role in increasing the thermal conductivity.

132 A Strain Gauge that Uses Carbon Black and Carbon Nanotube Doped Silicone Oil in a PDMS Microchannel Ching-Hsiang Cheng, Lidan Xiao, Yin-Nee Cheung, Chao Chen, Mo Yang, King-Lun Kwok, Po-Fat Chong, Wallace Leung

We present a piezoresistive strain gauge fabricated using electrically conductive silicone oil encapsulated in a close volume polydimethylsiloxane (PDMS) microchannel. The conductive silicone oil is made using carbon black and carbon nanotube to dope the silicone oil to become conductive. A characteristic of the electrical resistance versus the applied pulling force was measured. The non-linear behavior was due to the large deformation of the strain gauge, which makes the second order term of the increasing gauge length can not be ignored. An exponentially decrease of the resistance was found when applying a biasing voltage without exerting a force. It is caused by the reorganization of the carbon black particles in the silicone oil with applying electrical field. Temperature change also gave effect on the strain gauge with positive and negative temperature coefficients (PTC and NTC) with turning point at 55°C.

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228 A Three-stage Thermopneumatic Peristaltic Micropump for PDMS-based Micro/nanofluidic Systems Adisorn Tuantranont, Wasinee Mamanee, Tanom Lomas, Nisaporn Porntheerapat, Nitin Afzulpurkar, Anurat Wisitsoraat

A three-stage thermopnuematic peristaltic micropump for controlling micro to nano litters of fluid was simply designed and fabricated from PDMS on glass slide. Pump structure consists of inlet and outlet, microchannel, three thermopneumatic actuations, and three heaters. In microchannel, fluid is controlled and pumped by peristaltic motion of actuation diaphragm. Actuation diaphragm can bend up and down by exploiting expanded air that induced by increasing heater temperature. The motion of fluid in Nanoport was captured by digital camera every 5 minutes, and then the flow rate was monitored from height difference of fluid in Nanoport by consecutive records. The optimum flow rate is l/min with applying driving voltage at frequency 0.033 Hz, 14 Voltsμ0.82 three-phase input voltages.

258 Nanopipette with a Lipid Nanotube as Nanochannel Kousuke Nogawa, Yusuke Tagawa, Masahiro Nakajima, Fumihito Arai, Toshimi Shimizu, Shoko Kamiya, Toshio Fukuda

Single cell analysis gets a lot of attentions to reveal the unknown biological aspects of individual cells. To analyze properties of a single cell, local environmental control is desired. We propose a novel type of nanopipette where a lipid nanotube (LNT) as a nanochannel is attached to apply the minimal changes to the environment. LNTs have hollow cylindrical nanostructures consisting of lipid bilayer membranes and their outer and inner surfaces are hydrophilic. Fabrication process of the LNT nanopipette includes two main parts; to pick up a LNT and to seal the interspace between it and glass micropipette. The fluorescent solution was spouted from the fabricated LNT nanopipette. The nanopipette is effective to local environmental control as an end-effecter for biological applications.

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Self and Field Assisted Assembly (3C4)

Time: 15.30 – 17.30 Room: 604 Session Chairs: Kevin J. Chen and Fumihito Arai

81 Separation of Mixed SWNTs and MWNTs by Centrifugal Force -- an Experimental Study Haibo Yu, Yanli Qu, Zaili Dong, Wen J. Li, Yuechao Wang and Wencai Ren

We have developed a new method to separate the mixture of single-walled carbon nanotubes (SWNTs) and multi- walled carbon nanotubes (MWNTs) in aqueous solution by centrifugal force. In the application of carbon nanotubes (CNTs), it is very important to realize separation of mixed SWNTs and MWNTs. This method proposed in this paper for separation of mixed SWNTs and MWNTs takes advantage of the difference of the density and the diameter of the SWNTs and the MWNTs, resulting in a difference of sedimentation velocity along the direction of spinning radius when centrifugal force is exerted. The experiment shows that the SWNTs and MWNTs deposit at different speeds in the procedure of centrifugation and suspend different levels in the centrifugal tube, based on difference in their buoyant densities, at the end of centrifugation. The results indicate that the centrifugal technique can provide a rapid and precise separation of mixed of SWNTs and MWNTs.

105 Theoretical Analysis Based on Particle Electro-Mechanics for Au Pearl Chain Formation Minglin Li, Fei Fei, Yanli Qu, Zaili Dong, Wen J Li, Yuechao Wang

This paper analyzes the fundamental mechanisms in driving Au Pearl Chain Formation (PCF) based on dielectrophoresis (DEP) force. From experimental results, the PCF process strongly depends on the voltage and the frequency applied on electrodes, but weakly on the sizes of particles, which appears to be contrary to theoretical expectations. To explain the above phenomenon, we estimated the DEP force and the Brownian motion imposed on the Au nanoparticles, and then investigated the AC electro-osmosis force and the electro-thermal force which may possibly affect the PCF rate. Numerical modeling to compare the forces is presented. By matching experimental and numerical results, we validate the scaling laws of the DEP force and electro-mechanics in the PCF of Au nano-particles.

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123 3-Mercaptopropionic Acid modified Porous Silicon Substrate used in Hyperammonemia Dong-Hwa Yun, Joon-Hyung Jang, Keum Ju Lee, Woo-Jin Lee, Suk-In Hong

Amperometric urea sensor is more suitable than optical and potentiometric urea sensor to diagnose hyperammonemia. However, because sensitivity in low concentration decreases remarkably, despite amperometric urea sensor has been studied for a long time it has not been applied for clinical diagnosis. In this paper, a new structure for an amperometric urea sensor was fabricated by MEMS, electrochemical etching, and electrostatic covalent binding techniques. Until now most amperometric urea sensors have had a membrane fixed on top of the transducer. That method often leads to malfunction of the sensor, arising from problems such as inadequate membrane adhesion, insufficient mechanical stability, and low sensitivity. To solve these kinds of problems, urease (Urs) was immobilized by electrostatic covalent binding method on the porous silicon (PSi) substrate coated self-assembled monolayer (SAM). Electrostatic covalent binding method was used to keep anisotropic orientation of urease on SAM.

154 Self-assembly on flexible alumina and nanoporous silicon templates Kalyan Garre, Marc Cahay, P Kosel, J Fraser, David Lockwood, Vincent Semet, Vu Thien Binh, Bhargava Kanchibotla, Supriyo Bandyopadhyay, Biswajit Das

Several nanoscale arrays of metallic, semiconductor, and organic compounds, displaying different morphologies and moieties, have been self assembled on nanoporous flexible alumina and silicon templates using a new growth mode. They were obtained using pulsed laser deposition, thermal evaporation, electron beam evaporation, or RF magnetron sputtering of different materials on the templates. The observed morphologies include carbon nanopearl necklaces and gold “nanopinetrees”. Futhermore, nickel “nanoneedle” arrays were formed by electron beam evaporation of nickel on porous silicon substrates in which a regimented array of pores was produced using porous alumina films. These nanostructures were characterized by atomic force microscopy (AFM), X-ray diffraction (XRD) analysis, Raman spectroscopy and field emission scanning electron microscopy (FE-SEM). Some of the arrays have been tested as potential candidates for cold cathode arrays and as efficient electron injectors in organic light emitting diodes.

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320 Route to Batch-Compatible Fabrication of Nanotweezers by Guided Self-Assembly Ozlem Sardan, Burhanettin Alaca, Arda Yalcinkaya, Peter Boggild, Peter Tang, Ole Hansen

Fabrication of integrated micro and nanoscale components in a single batch is one of the biggest challenges for nanosystems developement. A self-assembly technique that enables “batch-compatible” integration of micro electro mechanical systems with nanoribbons is presented by demonstrating electrostatically actuated combdrive microgrippers with nanoribbon end-effectors. Preliminary fabrication results demonstrate the possibility of obtaining well defined spatial density and orientation of nanoribbons matching the precision of top-down techniques and at the same time allowing complete alignment and registry with subsequent lithography steps.

404 Patterned Microfluidic Channels using Self-assembled Hydroxy-phenyl Porphyrin Monolayer Kaushik Nayak, Prasanna Kulkarni, Deepu A., V. Sitaraman, S. Punidha, A. Saha, M. Ravikanth, Sushanta Mitra, S. Mukherji, V. Ramgopal Rao

Understanding flow in patterned surfaces is important for microfluidic applications. To achieve such surfaces, we show for the first time use of self assembled monolayer (SAM) of Hydroxy-phenyl porphyrins on SiO2 surface following a chemical procedure. The SAM was characterized using ground state UV absorption and contact angle measurements. The UV-absorption spectra of the porphyrin monolayer exhibited a ~8 nm red shift in the Soret band compared to the porphyrin in toluene solution. This indicated the side-by-side orientation of the self assembled porphyrin molecules on the SiO2 substrate. A water drop of 50 µL on SAM exhibits a contact angle of 75±3° which is significantly higher compared to the contact angle (33±2°) measured for the bare SiO2 substrate. Further simulations are conducted to understand the flow characteristics in patterned microfluidic channels.

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Invited Session: Nano-Materials Applications (3D4)

Time: 15.30 – 17.30 Room: 605 Session Chairs: Yi-Kuen Lee and K.W. Wong

71 Study of Piezoresistance Effect of Carbon Nanotube-PDMS Composite Materials for Nanosensors Junyong Lu, Miao Lu, Amine Bermak, Yi-Kuen Lee

Samples of novel nanocomposites of multiwalled (MW) CNT and poly (dimethylsiloxane), i.e., CNT-PDMS, at different CNT concentrations are prepared. The mechanical/electrical and piezoresistance properties of these nanomaterials are studied in detail. The Gauge Factor (GF) of this nanocomposite, dependent on the content of CNT, ranges from 1.38 to 12.4. Since the CNT-PDMS can be easily used as a novel piezoresistor using low-cost MEMS technology, this nanomaterial has decent potential in nanosensors and PDMS-based microfluidic systems.

46 Electrospun Nanofibrous Membrane for Air Filtration Han Wang, Gaofeng Zheng, Daoheng Sun

Nanofibers have a large potential in air filtration applications, so this paper explores the performance of electrospun nanofiber membrane compared to traditional filtration fabrics. Poly (ethylene oxide) (PEO) and Polyvinyl Alcohol (PVA) were electrospun into nanofibrous membranes and analyzed their filtration attributes. Experimentation revealed that the efficiencies of PEO membrane and PVA membrane are 92.8% and 97.6% respectively. They all have higher filtration efficiency than traditional filtration fabrics, such as the distribution of filtration efficiency of meltblown and needle filtration material which is 20%~80%. In addition, Nanofibrous membranes under the same electrospinning process but with different materials had similar high filtration efficiency, while their permeability had obvious difference. It’s suggested that different structure in the nanofiber membrane should cause this difference. Our work proves that there is a large potential for nanofiber membranes to utilize in air filtration area.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 251 Carbon Nanotube Cathodes as electron Sources for Microwave Amplifier E. Minoux, L. Hudanski, K.B. K. Teo, O. Groening, F. Peauger, D. Dieumegard, J.-P. Schnell, L. Gangloff, G.A.J. Amaratunga, W.I. Milne, and P. Legagneux

Cold cathodes based on carbon nanotubes allow to produce a pulsed modulated electron beam. Using an array of vertically aligned CNs that exhibit an aspect ratio of about 200, we demonstrated the modulation of a high current density beam (~ 1 A/cm2) at 1.5 and 32 GHz frequencies. Such CN cathodes are very promising for their use in a new generation of compact, highly efficient and low cost amplifiers that operate between 10 and 100 GHz.

259 Integration of the Micro Thermal Sensor and Porous Silicon as the GDL for Micro Fuel Cell Chi-Yuan Lee, Shuo-Jen Lee, Ren-De Huang, Chih-Wei Chuang

This work employs porous silicon as a gas diffusion layer (GDL) in a micro proton exchange membrane fuel cell (µPEMFC) and a micro direct methanol fuel cell (µDMFC). Pt catalyst is deposited on the surface of, and inside, the porous silicon to improve its conductivity. Porous silicon with Pt catalyst replaces traditional GDL, and the Pt metal that remains on the rib is used to form a micro thermal sensor in a single lithographic process. The GDL was replaced by porous silicon and used in a µPEMFC and µDMFC. Wet etching is applied to a 500µm-thick layer of silicon to yield fuel channels with a depth of 450µm and a width of 200µm. The pores in the fabricated structure had a diameter of µm; the thickness of the structure was 50µm. Therefore, the GDLs of the fuel cell were fabricated using macro-porous silicon technology. Porous silicon was fabricated by photoelectrochemical porous silicon etching. The top-side of the fuel channel was exposed to light from a halogen lamp. The porous structure was fabricated at the bottom of the fuel channel and patterned by anodization; and the micro thermal sensors were integrated on the rib. The experimental results demonstrated that the maximums power density of µDMFC and µPEMFC were 1.784mW/cm2 and 9.37mW/cm2. 30SCCM and 2M methanol were used with 10µm holes, various humidities and heating temperatures.

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Thin Films of Nano-Materials (3E4)

Time: 15.30 – 17.30 Room: 606 Session Chairs: Haixia Zhang and Cary Yang

14 Research on Nanotribological Behavior of Nano-composite Elastomer Films Liu Haixia, Jianning Ding, Shi Chaoyan

The nanotribological behavior of multilayer nano-composite elastomer films was tested by Universal Micro- Tribometer(UMT). The results show that the nanotribological behavior of DLC(F)/SEBS/187/Si film is the best and the worst nanotribological behavior appears in DLC(C)/SEBS/187/Si film. With higher load and sliding velocity, the friction coefficient of nano-composite elastomer films coated by DLC increases firstly and then decreases. That trend becomes more obvious along with further enhancement of load and sliding velocity. The DLC(F)/SEBS/187/Si film is the best one in all of the nano-composite elastomer films and possesses self-lubricating property with the DLC.

21 Evaluation of Mechanical Properties of Polycrystalline Al Thin Films on 7059 Glass Substrates Xiangyang Zhou, Zhuangde Jiang, Hairong Wang, Ruixia Yu

To determine the hardness and elastic modulus of a 560 nm polycrystalline Al thin film deposited on 7059 glass substrate from nanoindentation tests, we design a method to avoid the severe influences of both substrate and pile-up behavior on evaluated results. Firstly, the hardness is calculated by measuring the total projected contact area of residual impression with help of atomic force microscope (AFM). Then, since the Al film and its substrate have very similar elastic properties, the true elastic modulus of thin film is determined from the known hardness by the constant modulus assumption analysis. The results show that compared with the Oliver-Pharr method the present method can obtain more reliable results.

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52 Modeling of Hysteresis in Nanocrystalline VO2 Thin Films with Random Resistor Networks Jun Dai, Xingzhi Wang, Shaowei He, Hong Ma, Jianjun Lai, Xinjian Yi

Considering a nanopolycrystalline thin films structure of vanadium dioxide (VO2) as a composite medium, the random resistor network (RRN) model is employed to simulate the thermal hysteretic behavior in this material. The system is modeled as a binary composite medium consisting of random distribution for semiconducting and metallic regions in nano-VO2 crystals. In our simulation, we initially proposed a distribution function to represent the volume fraction of the crystals that are in semiconducting state. The hysteresis model has been checked against the experimental measurements. There is satisfactory agreement between the calculated resistance-temperature trajectories with the measured major hysteresis loops for temperature covering the whole range from the low-temperature semiconductor behavior to the high-temperature metallic state, indicating a strong support to the present approach. On the discussion of physical mechanical in our simulation, the phase transition in nano-VO2 thin films is due to the competition of these two components in VO2 nanocrystalline thin films with the temperature changing, and the hysteretic phenomenon of this material is argued to be originated mainly from the difference of distribution function in cooling and heating branches.

54 Characterization of Microbolometer Based on Nanopolycrystal VO2 Thin Film Shaowei He, Xingzhi Wang, Jun Dai, Ying Huang, Jianjun Lai, Xinjian Yi

A new nanopolycrystalline vanadium dioxide (VO2) thin film has been prepared. The thin film is fabricated by reaction- ion sputtering and post-annealing process .The average grain size is 8-10nm, the phase transition temperature drops down to 35°C and the temperature coefficiency of resistance (TCR) is -6~7%/K in semiconductor zone. However, the average grain size of conventional microstructure VO2 is 1~2µm and TCR is about -2%/K. 64×2 linear uncooled microbolometers with pixel size 50µm×50µm have been fabricated based on the nanopolycrystalline VO2 thin films and conventional microstructure VO2 thin films. The characteristics of the micrbolometer arrays are investigated in the spectral region of 8-12µm. The test indicates that the performance of the sensor based on nanopolycrystalline VO2 is nearly 3 times higher than that based on conventional microstructure VO2 thin film.

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460 Research on the Nanometer Aragonite Sheets of Mactridae Shell B. Chen, X. Peng, and S. Sun A scanning electronic microscope (SEM) was used for observing the microstructures of a Mactridae shell. The observed result showed that the shell is a kind of natural bioceramic composite, which consists of aragonite sheets and organic matrix with laminated structure. The aragonite sheets are composed of aragonite fibers which are of nanometer scale. The reason that the aragonite fibers in Mactridae shell take on nanometer scale is analyzed based on the Griffith criterion. The result indicated that the nanometer size of aragonite fibers in biocomposites may be the result of fracture strength optimization.

Molecular and Quantum Computing (3F4)

Time: 15.30 – 17.30 Room: 607 Session Chairs: Mircea R. Stan and R.K. Mittal

86 A Unified Framework for Quantum Random Walk Algorithms on General Graphs Yu-Han Yang, Tzu-Sheng Chang, Hsu-Chun Yen We propose a unified framework for quantum walk algorithms on general graphs, which introduces the concept of unitary labeling into the quantum walk algorithm. In our framework, by assigning the incoming or outgoing arcs of the vertices with distinct labels, unitary properties of the quantum walks can be reserved. For a non-regular graph, auxiliary arcs are added to satisfy the constraint of unitary labeling. For non-unitary quantum walks, under the same framework, we provide a solution by intermediate measurement. This solution performs the Hadamard operator on auxiliary qubits and makes measurement after each step of the walk. Though the unitary constraint can be dissatisfied by applying such a solution, we show that the properties of the quantum walks are still reserved. With this intermediate measurement, the labeling constraint can be alleviated, and the walks on unitary graphs can exhibit the same probability distribution as the unitary quantum walks. Some simulation results over general graphs are given to justify our design.

183 Quantum bit controller (write) and observer (read) circuits in RF-CMOS technology for low-temperature operation S. Ramesh Ekanayake, Torsten Lehmann, Andrew Dzurak, Robert G. Clark

Quantum bit (qubit) control and readout requires controller-qubit-observer (CQO) systems for rapid control signal generation and injection to the qubit gates, and

217 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... observation of their final state projections. Conventionally, for solid-state qubits, this is achieved by generating the control signal at 300 K and transmitting it along very long coaxial cables that span from 300 K to sub-K (typically  500 mK), and reading out the response from proximity sensors such as single-electron transistors (SETs) along similar lengths of cable. Our approach is to position the classical controller and observer circuits fabricated using a commercial foundry processed silicon-on-sapphire (SOS) RF-CMOS technology that operates at low temperature (either at 4.2 K, 1 K, or sub-K). We show that RF-CMOS NFET and PFET devices operate at 300 K, 4.2 K, and sub-K with negligible deviation from their 300 K MOSFET characteristics, and have fabricated and demonstrated a RF-CMOS controller (monostable 100 ps voltage-pulse generator) that operates at sub-K temperatures in a dilution refrigerator. We briefly describe experimental schemes with which we can develop such a system for low temperatures. Our experiments are also a demonstration that RF-CMOS is viable for other low temperature and low power applications.

214 New NRZ-mode Resonant Tunneling Bistable-Monostable-Bistable Transition Logic Element Operating up to 36 Gbps Hyungtae Kim, Seong-Jin Yeon, Kwangseok Seo

We present the resonant tunneling bistable-monostable-bistable transition logic element. The proposed circuit is composed of resonant tunneling diode (RTD)/high electron mobility transistor (HEMT) series connection (RHS) and RTD/HEMT parallel connection (RHP). Novel high-speed and low-power non-return-to-zero (NRZ) delayed flip-flop (D- F/F) operation has been successfully achieved using RTD/HEMT integration technology on an InP substrate. The operation of the fabricated circuit was confirmed up to 36 Gbps with a very low power dissipation of about 3 mW at a power supply voltage of 0.9 V.

279 Quantum Boolean Circuit is 1-Testable Yao-Hsin Chou, I-Ming Tsai, Sy-Yen Kuo

Recently, a systematic procedure is proposed to derive a minimum space quantum circuit for a given classical logic with the generalized quantum Toffoli gate which is universal in classical boolean logic. Since all quantum computing is reversible, we can use this property to build Quantum Iterative Logic Array (QILA). QILA can be easily tested in constant time (C-testable) if most commonly used stuck-at fault model is assumed. In this paper, we apply Hadamard and general CCN gates on QILA circuits to make them 1-testable. As a result, for quantum boolean circuits, the number of test patterns is independent of both the size of the array and the length of the inputs.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 447 Quantum Cryptography: State-Of-Art and Future Perspectives Vishnu Chundi, Payel Banerjee, N. N. Sharma, R. K. Mittal

With quantum computing, we are witnessing an exciting and very promising merging of three of the deepest and most successful scientific and technological developments of modern era: quantum physics, computer science, and nanotechnology. Quantum computers have the potential to perform certain calculations billions of times faster than any silicon-based computer. If functional quantum computers can be built, they will be invaluable in factoring large numbers, and therefore extremely useful for decoding and encoding secret information. In this paper we have discussed contemporary cryptographic systems and their strengths and drawbacks. Two of the most common quantum key distribution protocols have been explained. This is followed by a note on the experimental realizations of quantum key distribution and the associated technological challenges. A few novel extensions of this concept in the future have also been dealt with. This paper aims at familiarizing the reader with the field of quantum cryptography and gives an insight about the latest developments.

Nano/Molecular Devices II (3G4)

Time: 15.30 – 17.30 Room: 608 Session Chairs: Lixin Dong and M. Saif Islam

30 A Combined SERS and MCBJ Study on Molecular Junction on a Silicon Chip JIng-Hua Tian, Zhong-Qun Tian

We have developed a combined Surface-Enhanced Raman Spectroscopy (SERS) and mechanically controllable break junction method to detect and characterize molecular junctions formed by two electrochemically nanofabricated electrodes on silicon chips. The method allows us to obtain vibrational spectra of the molecular junction and perform electron transport measurement on the molecule simultaneously. The preliminary I/V characterization and SERS measurement on an asymmetric molecule, OPE-NO2, were conducted. This approach may provide new insights into not only electron transport in molecules, but also the enhancement mechanism in single-molecule SERS.

219 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 207 Nanoscale Switching Junctions Based on an Organic Monolayer of Molecules and Solid Electrolytes Chad Johns, Doug a. A. Ohlberg, Shih-Yuan Wang, R. Stanley Williams, and M. Saif Islam

We report an innovative method of fabricating atomic switching junctions using an LB film of cadmium stearate in the gap between an inert electrode and a chalcogenide solid electrolyte. The thickness of the monolayer is about 2.8nm and it helps ensure a constant gap size maintaining identical electrical characteristics in a large number of switching junctions. We used a new energetic plasma process to create the chalcogenide solid electrolyte using a sulfur containing plasma for converting thin films of copper into a mix of covelite phase CuS and chalcocite phase Cu2S.

224 Novel Transport mechanism of SiGe dot MOS tunneling diodes C. W. Liu, P. S Kuo, C.H Lin

The metal oxide Si tunneling diodes have been used as light emitters [1] and photodetectors [2]. The incorporation of SiGe layers into Si can tune the emission wavelength of LEDs, and to extend the cut-off wavelength of photodetectors. The current transport of a MIS diode is strongly influenced by these SiGe layers as well. Therefore, MIS diodes with the Pt gate and SiGe dots are studied, and the repulsive barrier originated from SiGe dots reduces the hole current significantly.

245 Room-temperature Observation of Large Coulomb-blockade Oscillations from Germanium Quantum- dot Single-hole Transistors with Self-aligned Electrodes Gwong-Liang Chen, Wai-Ting Lai, Pei-Wen Li

A single Ge quantum-dot (~10 nm) forms and is self-aligned with source/drain electrodes via SiO2 tunneling barriers using thermal oxidation of a SiGe-on-insulator nanowire. Thereby, a Ge single-hole transistor with self-aligned electrodes is experimentally realized based on FinFET technology and features with clear Coulomb staircase and large Coulomb-blockade oscillation behaviors at room temperature. This work provides a simple approach to alleviate this nanofabrication bottleneck and thereby reduce series resistances and increase design freedom for SETs.

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One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 268 Contact Effects in Carbon Nanoribbon Transistors Gengchiau Liang, Neophytos Neophytou, Dmitri E. Nikonov, Mark S. Lundstrom

We examine the performance of armchair carbon nano-ribbon field-effect-transistors with different type of source/drain contacts using a simple pi-orbital model for the device Hamiltonian and a full real-space quantum transport simulator (Non-equilibrium Green’s Function (NEGF) approach) for electron transport. The two-dimensional semi-infinite graphene sheet contact indicates localized states near the interface as well as inside the channel. The former will enhance tunneling currents, and the latter will increase the quantum capacitance of the device. These effects can degrade the performance of such a transistor. The one-dimensional semi-infinite nano-ribbon contacts, however, indicate perfect coupling to the channel and will be the ideal contact for a nano-ribbon field-effect-transistor type of application.

311 Current-driven domain-wall motion in a magnetic wire with multiple constrictions Lili Ji, Alexei Orlov, Gary Bernstein, Wolfgang Porod

A novel concept for silicon-technology-compatible data storage involves the representation of information by domain walls trapped at constrictions in a magnetic wire. In this magnetic racetrack memory, individual bits (i.e., pinned domain walls) need to be moved by current pulses for read/write operations. This proposed new data-storage concept has spurred recent research activity on current-driven domain-wall motion. In this paper, we show that domain walls can be moved from one constriction to another by means of an applied current pulse, and we study this effect as a function of constriction geometry. In our design, there is a submicron permalloy wire with three constrictions and attached voltage probes, which are used to electrically detect the presence of a domain wall. We first use an external magnetic field to nucleate a domain wall at the diamond-shaped top of the wire, and to then trap this domain wall at the top constriction. We confirm the presence of a domain wall by both Magnetic Force Microscopy (MFM), and by electrical measurements which can detect the presence of a domain wall through a change in wire resistance due to the Anisotropic Magneto- Resistance (AMR) effect. Without another constriction, this de-trapped domain wall will travel down the wire a certain distance which depends on the duration of the current pulse. In the presence of a second constriction, we observe that this domain wall will get trapped again. A current pulse in the opposite direction can move the domain wall back to the top constriction.

221 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... 379 A Performance Analysis for Single-Walled Metallic Carbon Nanotubes as Global and Intermediate On- Chip Interconnects? Hamidreza Hashempour, Fabrizio Lombardi

This paper analyzes the estimates for metallic Carbon Nanotubes (CNT) as interconnects of very large scale integrated (VLSI) chips. A study of the 2005 edition of the International Technology Roadmap (ITRS) for global or intermediate interconnects is presented to highlight the significant issues encountered with the projected performance of copper/aluminum interconnects till 2020. A worst case performance analysis of metallic CNTs is presented and compared versus copper interconnects. It is evaluated that the RC delay of CNTs does not meet the future RC delay requirements for on-chip intermediate and global wires.

222 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Author Index Abdul Aziz, Azma F. 2E4 Abstreiter, Gerhard 3A4 Afzulpurkar, Nitin 3B4 Ahmad, Mohd Ridzuan 3B3 Ahmed, Iftikhar 2E2 Akerman, Johan 1F3 Alaca, Burhanettin 3C4 Alam, Mohmmad 1F4 Alam; Muhammad 2A3 Amaratunga, G.A.J. 3D4 Amini, Mostafa Mohammadpour 3E2 Amon, Cristina 2A4 An, Taechang 2G2 Ang, Lay Kee 2G4 Anurak, Udomvech 2A3 Aoki, Nobuyuki 3A4 Arai, Fumihito 1G3 3B4 3C3 Arai, Shigeo 1G3 Arifin, Dian 1B2 Aryasomayajula, Lavanya 3E3 Ashock, Ashwin 1D4 Avedillo, Maria 2C3 Azuma, Yusuke 2A3 Bae, Dong Jae 1E3 Bae, Kun Ho 1D4 Bagaeva, T.Yu 2A3 Bai, Ping 1F2 2A3 Baik, Seunghyun 1E4 Bailey, Steven 3F3 Bajaj, Bharat 3B3 Balakrishnan, G. 2F2 Bandyopadhyay, Supriyo 1F3 2G3 3C4 Banerjee, Payel 3F4 Banerjee, Sanjay 3F3 Behkam, Bahareh 2A4 Beiu, Roxana 1F2 Beiu, Valeriu 1F2 2G4 Belhaire, Eric 1F4 2C3 Bell, Dominik 2D4 Belov, Miroslav 2E2 Bermak, Amine 3D4 Bernstein, Gary 1F4 3G4 Bhanja, Sanjukta 2C3 2C4 Binh, Vu Thien 3C4 Bird, Jonathan Paul 3A4

Boggild, Peter 3C4

224 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Bonam, Ravi 1F2 2C3 Bonnin, Michele 3F3 Boo, Jin-Hyo 1A4 Brough, Branden 1A3 Bruce, B. 1A3 Brunetti, Francesca 3A4 Cabe, Adam 1F2 Cahay, Marc 1F3 2G3 3C4 Canali, Carlo 1F4 Caneva Soumetz. Federico 2B3 Cao, Chengfan 1E4 Cassell, Alan M. 1D4 Cauley, Thomas H. 1C4 Cavalcanti, Adriano 1G3 Cha, Misun 1G3 Chang, Calvin C 3A3 Chang, Chih-Chia 2C4 3E2 Chang, Fuh-Yu 2D4 2E3 Chang, Ken 1F2 2A3 Chang, Long 3D2 Chang, Neng-Kai 2E4 Chang, Shuo-Hung 1E4 2D4 2E4 Chang, Shu-Tong 3G3 Chang, Tien-li 2D4 2E3 3D3 Chang, Ting-Chang 2C4 Chang, Tzu-Sheng 3F4 Chang, Yi-Tsung 1A4 Changhai, Ru 1G4 Chanhom, Annop 1D4 Chanu, Arnaud 1C4 Chao, Hsueh-Yung 1D4 Chao, Sheng-Der 1A4 Chao, Tzu-Yuan 3D2 Chappert, Claude 1F4 Chaturvedi, Pratik 3D2 Chaudhary, Shikha 1F2 Chaudhry, Anurag 1D4 Chen, Baoqin 3E2 Chen, Bin 2E4 3E4 Chen, Changshui 1B4 Chen, Chao 1B4 3B4 Chen, Chia-Yi 1A4 Chen, Chi-Yao 2E4 Chen, Chunhong 1F2 2C3 Chen, Dong-Hwang 1A3 Chen, Guanggui 3F3 Chen, Gwong-Liang 3G4

Chen, Hongzhi 2C4

225 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Chen, Hualing 2B3 Chen, Kevin J. 2D4 3C3 Chen, Liguo 3B4 Chen, Maggie 2E4 Chen, Pei-Yi 1F3 Chen, Ping-Hei 2E3 3D3 Chen, Po-Yu 1A3 Chen, Shuxia 1E4 Chen, Songping 3E2 Chen, Tianning 2B3 Chen, Wanqiang 3F3 Chen, Yejin 3A3 Chen, Yu-Chun 2D3 Chen, Yu-Shiun 1B2 Chen, Zhe 3E3 Chen, Zhenghua 3G2 Cheng, An-jen 2F4 Cheng, Ching-Hsiang 1B4 3B4 Cheng, Chin-Lung 1E3 Cheng, Jim 1C4 Cheng, Lihong 3E3 Cheng, T.-H. 2F3 Cheng, Yu-Ting 3D2 Chennupati, Jagadish 2F2 Cheung, Yin-Nee 3B4 Chiang, Mei-Chao 1D4 Cho, Byung Jin 2E2 Cho, Seong-Je 2E2 3G2 Choi, Florence, Ching Yeung 3D4 Choi, Jae-Boong 1E4 Choi, Kyoung-Jin 3C3 Choi, Minsu 1F2 2C3 Choi, Stephen 3B3 Choi, Tae-Youl 2A4 Choi, Won-Youl 2E2 3G2 Choi, Y.J. 3B3 3D3 Choi, Young-Jin 3C3 Chong, Maria 2D2 Chong, Po-Fat 3B4 Chou, Stephen 2D3 Chou, Tse-Chuan 1B2 Chou, Yao-Hsin 3F3 3F4 Chow, Chun Tak 1B2 Christman, Karen 1A3 Chu, Henry 1C2 Chu, Hong-Son 2F4 Chu, Jinkui 3F2 3G2

Chuang, Chih-Wei 3D4

226 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Chundi, Vishnu 3F4 Chung, Shen Shou 2C4 2D3 3E2 Chung, Wook-Jin 3B3 Chyi, Jen-Inn 1A4 Civalleri, Pier Paolo 3F3 Clark, Robert G. 3F4 Cleghorn, William 1C2 Coker, Ayodeji 2G4 Cotofana, Sorin 2C3 2G3 Cresti, Alessandro 2E2 3E3 Crouch, Adam 1B4 Cui, Guoping 1C3 Cui, Yonghao 3E3 Dai, Bau Tong 1D2 1E3 3B3 Dai, Jun 3E4 Dai, Yinhong 2D4 Das, Biswajit 3C4 Dawson, L.R. 2F2 DeAngelis, Jarett 1F4 Deepu, A. 3C4 Delnavaz, A. 1G2 Deng, Ning 1F3 Denomme, Ryan 1C4 Di Carlo, Aldo 3A4 Dieumegard, D. 3D4 Dimov, Stefan 2D3 2F3 Ding, Jianning 3E4 3F3 Do, Seung Woo 1D4 3D2 Dockendorf, Cedric 2D4 Dokmeci, Mehmet 3C3 Dong, Hao 1F3 Dong, Lixin 1G4 2A4 2D4 Dong, Xiaokun 1G2 Dong, Zaili 2A4 2G2 3C4 Du, Ruxu 3D4 Du, Shaorong 2G2 Dzurak, Andrew 3F4 E, Ch 1F4 2D3 Ebrahimi, Sadollah 2A3 3B4 Echtle, Klaus 2C3 Ehara, Kensei 3A3 Ekanayake, S. Ramesh 3F4 Elshimy, Haitham 3C3 Endo, Tatsuro 3D2 3F2 Eusgeld, Irene 2C3 Evoy, Stephane 1C3 2E2

Ewe, Wei-Bin 2F4

227 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Fan, Kuang-Chao 3A3 Fang, Jia-Hui 3E2 Fang, Nicholas 3D2 3D3 Fang, Yongchun 1G2 Fardad, Shima 2E3 3E2 Fatikow, Sergej 2A4 Fedichkin, Leonid 1F3 Fei, Fei 3C4 Felfoul, Ouajdi 1B4 Feng, Li-Wei 2C4 Ferreira, Placid 3D3 Fischer, Lee 1C3 Fleetwood, Daniel 3G3 Fok, Lo Ming 2G2 Forbes, Jeffrey G. 1A3 Fraser, J 3C4 Friend, James 1B2 Fuechsle, Martin 3D2 Fujihashi, Chugo 3A4 Fujii, Kazuya 2A3 Fujii, Teruo 2B3 Fujisaka, isato 2G4 Fukuda, Toshio 1G3 3B3 3B4 3C3 Fukui, Takashi 2F3 Furukawa, Hideki 3D2 Gangloff, L. 3D4 Gao, Gaili 1G4 Gao, Han 2D2 Gao, Jinming 1B4 Gao, Qiang 2F4 Gao, Shen 1B4 Garre, Kalyan 1F3 3C4 Gau, Chie 1D2 1E3 Gilje, Scott 3G3 Gilli, Marco 3F3 Giridharagopal, Rajiv 3A3 Gleason, Kristofer 1D4 Goh, Kuan Eng 3D2 Gong, Jingming 3D4 Goodnick, Stephen 1D4 1F4 Gordon, Matt 1E4 Gracheva, Maria 2A3 Greenbaum, Elias 1A3 Groening, O. 3D4 Grosso, Giuseppe 3E3 Gu, Changzhi 1E4 2D3 Guan, Liming 3D2

Guan, Weihua 3E2

228 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Guo, Liya 3A4 Guo, Shuxiang 1G4 Guo, Yunxia 3F3 Hadi, Iraj 2A3 3B4 Haeiwa, Kazuhisa 2G4 Hahn, Cheol-Koo 2F3 Han, Gane Hee 1E3 Han, Guoqiang 2C4 Han, MIn 2A4 Han, Sang-Wook 2E4 Han, Song 3G3 Han, Xianwu 1B4 Han, Xuliang 1B2 1E4 Han, Zhitao 3F2 Hansen, Ole 3C4 Hao, Lina 1G2 Harrer, Stefan 3A4 Hartin, Olin 1D4 Haruehanroengra, Sansiri 2G4 Hashempour, Hamidreza 3G4 Hashimoto, Hideki 2D4 Hatakeyama, Rikizo 1E3 2E3 Hatsuzawa, Takeshi 3D2 3F2 He, Faquan 1D2 He, Haiying 2G4 He, Michel 2C3 He, Shaowei 3E4 Her, Hyun-Jung 3D3 Hillebrenner, Heather 1B4 Ho, Chih-Ming 1A3 1B4 Ho, Dean 2B3 Ho, Ho-Pui 1A3 1D2 3D3 Ho, Shin-fa 3E2 Homma, Michio 3B3 Hong, Suk-In 2B3 3C4 Hong, Woong-Ki 3G3 Horing, Norman 1F4 2A3 2F4 Hosseini, Amir 1F2 2F2 2F3 Hou, Zhufeng 2A3 Hsieh, Y. L. 2F2 Hsu, Keng 3D3 Hu, Jiuning 1F3 Hu, Sharon 1F4 Hu, Wenchuang (Walter) 1B4 Hu, Yeu-Jent 3E2 Huang, Adam 1A3 Huang, Bohr Ran 2C4 2D3 3E2

Huang, Chih-Chia 2D2

229 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Huang, Guewha 1B2 Huang, Houjin 2B3 Huang, Hsuan-Ming 3G3 Huang, Jung Y. 3G3 Huang, Qiaojian 1A4 Huang, Ren-De 3D4 Huang, Sung-Wei 1E3 Huang, Xiaoping 2E4 Huang, Ying 3E4 Huang, Yu Wen 3D2 Hudanski, L. 3D4 Huffaker, D. L. 2F2 Hui, Yuen 2F4 Humayun, M.S. 1A3 Hutagalung, Sabar 2E4 3E2 Hwang, Chih-Hong 3G3 Hwang, Gilgueng 2D4 Hwang, Jaekon 1G3 Hwang, Kyo Sik 3B3 Ibrahim, Walid 2G4 Ikeda, Seiichi 1G3 Islam, M. Saif 1D4 2D2 3D2 3G4 Isono, Toshinari 2D4 Jaffray, D.A. 1E3 Jagadish, Chennupati 2F4 Jakubek, Zygmunt 2E3 Jalili, N. 1G2 Jan, S.R 2F3 Jang, Joon-Hyung 3C4 Jang, Seok 3B3 Janzen, Daniel 1E4 Jaruwongrungsee, Kata 1C4 Jeon, Hyeongtag 1D2 Jeong, E.-S. 2E4 Jeong, Seong Hun 1A4 Jeong, Seung Yol 1E3 Ji, Lili 3G4 Ji, Taeksoo 1E4 Jia, Rui 3E2 Jiang, Kyle 1C2 3E3 Jiang, Zhuangde 2C4 3E4 Jin, Qinghui 1B4 Jing, Weixuan 2C4 Johns, Chad 3G4 Joyce, Hannah 2F4 Juan, Núñez 2C3 Jung, Jongkyu 2G2

Jung, Seungwon 1G3

230 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Jung, Soyoun 1E4 Juntanon, Kanokporn 2B3 Kajen, R.S. 1F2 Kamins, Theodore 2E2 Kamio, Takeshi 2G4 Kamiya, Shoko 3B4 Kan, Biao 3F3 Kan, Heng-Chuan 1A4 Kanchibotla, Bhargava 1F3 3C4 Kaneko, Toshiro 1E3 Kaner, Richard B. 3G3 Kang, C. J. 3B3 3D3 Karna, Shashi 2G4 Kathy, Mach 1C3 Kato, Toshiaki 2E3 Ke, Ning 1A3 Kelly, Kevin 1G3 3A3 Kerdcharoen, Teerakiat 2A3 3F3 Kettle, Jeff 2D3 2F3 Khan, Hasanur 2G3 Khizroev, Sakhrat 1F4 2D3 3D2 Kim, CheolGi 3B3 Kim, Dong Eun 2F4 Kim, Dong Ho 2F3 Kim, Dong-Wan 3C3 Kim, Ho-Gi 3G2 Kim, Hyungchul 1D2 Kim, Hyungtae 3F4 Kim, Jaewan 3B3 Kim, Jong-Oh 2E2 Kim, Jun 3B3 Kim, Jung-Min 3D3 Kim, Kyoung Chan 2F3 Kim, Moon 1B4 1E3 Kim, Pan Kyeom 2G2 Kim, S.-H. 2E4 Kim, Seokhoon 1D2 Kim, Tae Geun 2F3 Kim, Yong 2F4 Kim, Yong-Sang 3B3 3D3 Kim, Young-Jin 1E4 King, William 1C3 Kitsuki, Hirohiko 1D4 Klein, Jacques-Olivier 2C3 Kobayashi, Nobuhiko 2D2 3D2 Kochs, Hans-Dieter 2C3 Kojima, Seiji 3B3

Kolodziej, Christopher M. 1A3

231 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Kon, Ha 3B3 Korposh, Serhiy 3C3 Kosel, P 3C4 Kratochvil, Bradley 1G4 Krishna, Sanjay 2F2 Krongsuk, Sriprajak 3F3 Ku, Yi-sha 3A3 Kulkarni, Prasanna 3C4 Kunanuruksapong, Ruksapong 3E3 Kunitake, Toyoki 3C3 Kuo, Cheng Yung 1D2 Kuo, P. S 3G4 Kuo, Sy-Yen 3F3 3F4 Kuo, Ting-Chen 1D4 Kuritz, T. 1A3 Kutty, M.N. 2F2 Kwak, C.-H. 2E4 Kwok, King-Lun 3B4 Kwon, Young Soo 2F4 Kwong, Dim Lee 2E2 Lai, Jianjun 3E4 Lai, Jianjun 3E4 Lai, King Wai Chiu 1E4 2C4 2D2 3B3 3G3 Lai, Wai-Ting 3G4 Lai, Wen-Lang 2D4 lajvardi, Maryamalsadat 2A3 3B4 Lalev, Georgi 2D3 2F3 Lam, Kai-Tak 2A3 Lam, Robert 1A3 Lambert, Colin 3F3 Laslau, Cosmin 3E3 Lau, Kei May 2D4 3C3 Lazarova-Molnar, Sanja 2G4 Leburton, Jean-Pierre 2A3 Lee, Bo-Shian 3G3 Lee, Burm Jong 2F4 Lee, Byeong 3B3 Lee, Changho 1E3 Lee, Chen-Yi 3G2 Lee, Chi-Yuan 3C3 3D4 Lee, Chun 2F4 Lee, Gwo-Bin 2D2 3G2 Lee, Heow Pueh 2E2 Lee, Hyungoo 3D4 Lee, Ida 1A3 Lee, J.W. 1A3 Lee, Jae Sung 1D4

Lee, Jaesang 1E3

232 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Lee, Jae-Sung 3D2 Lee, J-B. 3E3 Lee, Ji-Hwan 3B3 Lee, Jiunn-Chyi 3E2 Lee, Jungchul 1C3 Lee, Junghon 1G3 Lee, Keum Ju 2B3 3C4 Lee, Ly Guat 2D2 3F2 Lee, Sang Hoon 2D2 Lee, Seung-Woo 3C3 Lee, Shuo-Jen 3C3 3D4 Lee, Si-Chen 1A4 Lee Sung 2B3 Lee, Sung Joo 2E2 Lee, Takhee 3G3 Lee, Usik 1E3 Lee, Woo Hyung 3G3 Lee, Woo-Jin 2B3 3C4 Lee, Ya-Wei 2E3 Lee, Yi-Kuen 3D4 Lee, Yong-Hyun 1D4 3D2 Lee, Young Hee 1E3 Leem, Shi Jong 2F3 Legagneux, P. 3D4 Lehmann, Torsten 3F4 Lei, Ci 3F3 Lei, Xiao-Lin 1F4 Lennon, Erwan 2B3 Leung, Wallace 3B4 Li, Er-Ping 1F2 2A3 2E2 2F4 Li, Frank 1F4 Li, Guangyong 1G2 2C4 3B3 3G3 Li, Guorong 3E3 Li, Jialin 3G2 Li, Jun 1D4 Li, Junjie 1E4 Li, Minglin 3C4 Li, Na 1A3 Li, Pai-Chi 1A3 1A4 Li, Pei-Wen 3G4 Li, Qiliang 1C3 3G3 Li, Weilong 3E2 Li, Wen J. 1B2 2A4 2G2 3C4 3G2 Li, Xuema 2D2 Li, Yangmin 1G4 2G2 Li, Yiming 1D4 3G3 Li, Yiqiang 1G4

Li, Yongfeng 1E3

233 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Liang, Gengchiau 3G4 Liang, Hong 3D4 Liao, Guanglan 2C4 Liao, Joseph 1C3 Liao, M. H. 2F3 Liao, Pao-Chi 3B3 Liew, Yun Fook 2E2 Lilley, Carmen 1A4 Lim, Dong-Gun 3C3 Lim, Geunbae 2D2 2G2 Lim, Guan Hui 2G4 Limbourg, Philipp 2C3 Lin, C.H 3G4 Lin, Chii-Wann 3F2 Lin, Ching-Fuh 2F4 Lin, Chun-Jung 2F2 Lin, Chun-Ron 3E2 Lin, Gong-Ru 2F2 Lin, Hung-Yi 2D4 2E3 Lin, James T. 1A3 Lin, Kung-Hsuan 1A4 Lin, Liwei 3E2 Lin, Shihuan 2G4 Lin, Xiaohui 2C4 Lin, Xinhua 1G3 Lin, Xin-Yau 1B2 Lin, Xi-Zhang 3G2 Lin, Yong-Siang 2E4 Lindner, Joerg 1A3 Lingasubramanian, Karthikeyan 2C3 Litvinov. Dmitri 1F4 2D3 3D2 Liu, Anping 1B4 Liu, C.W. 2F3 3G3 3G4 Liu, Chien-Wei 1D2 1E3 3B3 Liu, Gang 2E4 Liu, Haixia 3E4 Liu, Keng-Ming 3F3 Liu, Lianqing 1G2 3B3 Liu, Mai 1D4 Liu, Ming 1E3 2D3 2G4 Liu, Po-Tsun 2C4 Liu, Pou 1G3 Liu, Qi 3E2 Liu, Qingjun 1B4 Liu, Ruisheng 1F4 Liu, S.Y. 1F4 2A3 Liu, Tzu-Ming 1A4

Liu, Xinyu 1G4

234 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Liu, Yaxin 3B4 Liu, Yun Hui 2G2 Liu, Zhihua 2G2 Lo, Hsiang-Yu 1D4 Lo, Kwong-Chun 1D2 3D3 Lockwood, David 3C4 Logeeswaran, VJ 2D2 Lomas, Tanom 1C4 3B4 3D2 Lombardi, Fabrizio 3G4 Loo, Siaw C. 3E2 Lu, Guizhang 1C2 Lu, Hui-Hsin 3F2 Lu, Junyong 3D4 Lu, Miao 3D4 Lu, Na 3E2 Lu, Susan 3C3 Lu, Wei-Bo 2F4 Lu, Xuejun 1E4 Lu, Zhao 1C4 Lugli, Paolo 3A4 Luk, Wing Yan 1A3 Lundstrom, Mark S. 3G4 Luo, Yilun 1G2 3G3 Luss, Dan 3D2 Ma, Dongling 2E3 Ma, Hong 3E4 Ma, Lili 3G2 Mahar, Benjamin 3E3 Mai, John D.H. 1C3 Makowski, Jan 1C3 Mallick, Govind 2G4 Mamaluy, Denis 2G3 Mamanee, Wasinee 3B4 Mann, J. Adin 1F4 Manteghi, Atieh 3E2 Maragal, Deepak 2C4 Martel, Sylvain 1B4 1C4 1G3 Martirosyan, Karen 3D2 Martorell, Ferran 2C3 Massoud, Yehia 1E4 1F2 2F2 2F3 2E3 2G3 Massudi, Reza 2E3 3E2 Mathieu, Jean-Baptiste 1B4 Maturos, Thitima 3D2 Maynard, Heather D. 1A3 Mazumder, Pinaki 2E3 3G3 McDermott, Mark 1C3 Md, Shafiqzzaman 2A3

Mechler, Adam 1B2

235 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Mei, Tao 1G3 Melnik, Roderick 3F2 Meng, Fantao 3F2 Metha, M. 2F2 Michalak, Lukasz 1F4 Mills, James 1C2 Milne, W.I. 3D4 Ming, Liu 3E2 Minoux, Eric 3D4 Mircea, Julian 2A4 Mitra, Sushanta 3C4 Mittal, R. K. 3F4 Miyoshi, Tanroku 2A3 Mo, Chi-Neng 1D4 Moon, Wonkyu 2D2 Mori, Takashi 2A3 Morin, Jean-Francois 1G3 Motohisa, Junichi 2F3 Mukherji, S. 3C4 Naimlang, Sumonman 1B4 Nain, Amrinder 2A4 Nair, Pradeep 2A3 Nakajima, Masahiro 1G3 3B3 3B4 3C3 Nayak, Kaushik 3C4 Nee, Tzer-En 2G3 3E2 Nejati, Hamid 2F2 2F3 Nelson, Bradley 1G4 2A4 2D4 Neophytou, Neophytos 3G4 Ngo, Quoc 1D4 Ni, Lin 1G3 Nie, Lei 2C4 Niemier, Michael 1F4 Nieuwoudt, Arthur 1E4 2E3 2G3 Nikonov, Dmitri E. 3G4 Nisola, Grace 3B3 Nogawa, Kousuke 3B4 Nukeaw, Jiti 1D2 1D4 3A3 Ochiai, Yuichi 3A4 Ogawa, Kenichi 3A4 Ogawa, Tomoyuki 1D2 Ogino, Toshio 1E4 2D4 Ohlberg, Doug a.A. 3G4 Ong, H.C. 3A3 Oohara, Wataru 2E3 Orlov, Alexei 3G4 Osawa, Eiji 2B3 Osgood, Andrew 1G3

Ouyang, Mengxing 1B2

236 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Oya, Takahide 1E4 2D4 Ozkan, Cengiz 3B3 Ozkan, Mihrimah 3B3 Paliwoda, Peter 2C4 Pamunuwa, Dinesh 3F3 Pan, Fu-Ming 1D4 Pandey, Ravi 2G4 Pang, Fufei 2E4 Parekh, Vishal 1F4 2D3 Paresh, Bharkhar 1F2 Park, Hun 2E2 3G2 Park, Jae-Gwan 3C3 Park, Jae-Hwan 3C3 Park, Jeong Keun 2F4 Park, Kyihwan 2G2 Park, Minseo 2F4 Park, Myunghwan 3G3 Park, S.-H. 2E4 Park, Won 3E3 Pastori Parravicini, Giuseppe 2E2 3E3 Pastorino, Laura 2B3 Patthanasettakul, Viyapol 1E3 Peauger, F. 3D4 Pecchia, Alessandro 3A4 Peng, Meng 3G2 Peng, X. 2E4 3E4 Perello, David 1E3 Perks, Richard 2D3 2F3 Persson, Johan 1F3 Pettersson, Hakan 1F4 Phumman, Pimchanok 3E3 Piao, Xianggao 3G2 Pierstorff, Erik 2B3 Pisano, Albert P. 1C4 Png, Ching Eng 2E2 Pok, Wilson 3D2 Popov, V.V. 2A3 Porntheerapat, Nisaporn 3B4 Porod, Wolfgang 1F4 3G4 Poulikakos, Dimos 2A4 2D4 Pouponneau, Pierre 1B4 Pramanik, Sandipan 1F3 Prewett, Phil 1C2 Privman, Vladimir 1F3 Pulecio, Javier 2C4 Punidha, S. 3C4 Putney, Michael 1F4

Qin, Xiaohong 2E2

237 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Qing, Li 2F2 Qiu, Wally 1C3 Qu, Yan li 2G2 Qu, Yanli 3C4 Quan, Xie 3E2 Quintana, José M. 2C3 Quitoriano, Nathaniel 2E2 Ramanath, Ganapathiraman 3C4 Rantschler, James 1F4 2D3 3D2 Rao, V. Ramgopal 3C4 Ravikanth, M. 3C4 Register, Leonard 3F3 Ren, Lu 3G2 Ren, Min 1F3 Ren, Wencai 3C4 Reusch, Thilo 3D2 Richter, Curt 1C3 3G3 Roh, Cheong Hyun 2F3 Rokadia, Husein 1E4 Romano, Giuseppe 3A4 Rose, Garrett 1F2 2C4 Roy Mahapatra, Debiprosad 3F2 Rubio, Antonio 2C3 Ruchhoeft, Paul 1F4 2D3 Ruess, Frank 3D2 Ruggiero, Carmelina 2B3 Ruiz, Ariel 2D3 Ryu, Hyobong 2G2 Sabbaghzadeh, Jamshid 2A3 3B4 Safiruddin, Saleh 2G3 Saha, A. 3C4 Saito, Shigeki 2A4 Saito, Shin 1D2 Samuelson, Lars 1F4 Sanders, C.A. 1A3 Sardan, Ozlem 3C4 Sasaki, Takashi 1G3 Satya, Barik 2F2 Sawamura, Makoto 1F4 2A3 2F4 Scappucci, Giordano 3D2 Scarpa, Giuseppe 3A4 Schnell, J.-P. 3D4 Schofield, Steven 3D2 Schonbrun, Ethan 3E3 Schultz, Peter 3D3 See, Guan Huei 2G4 Selvarasah, Selvapraba 3C3

Semet, Vincent 3C4

238 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Seo, Kwangseok 3F4 3G3 Seo, S.-Y. 2E4 Setti Guthi, Jagadeesh 1B4 Shang, Liwei 1E3 2D3 Shannon, Curtis 2F4 Sharma, N. N. 3F4 Sharma, Shashank 2E2 Shen, Hui-Tang 2G3 Shen, Yantao 1E4 Shi, Chaoyan 3E4 Shi, Tielin 2C4 Shi, Xiajing 3C3 Shiau, Shiuan Hua 1D2 1E3 Shieh, Dar-Bin 1A3 Shih, Ying-Hsia 3G2 Shih, Yu-Ching 1A4 Shimizu, Toshimi 3B4 Shin, Mincheol 2G4 Shirai, Yasuhiro 1G3 Shirinzadeh, Bijan 1G3 Shishido, Jun 2E3 Shy, Shyi-Long 3B3 Sill, Albert 2A4 Simard, Benoit 2E3 Simmons, Michelle 3D2 Sin, Mandy L.Y. 1B2 Sinha, Niraj 1E3 3F2 Sirivat, Anuvat 1B4 2B3 3E3 Sitaraman, V. 3C4 Sitti, Metin 2A4 Smith, Darren 1F4 Song, Byung-Ho 1D4 Song, Hong Joo 2F3 Song, Kyungjun 2E3 Song, Min Jung 2B3 Stan, Mircea 1F2 Stanescu, Constantin D. 1F2 Stella, Pang 2D3 Straznicky, Joseph 2D2 Strobel, Sebastian 3A4 Su, Wei-Fang 2F4 Subramanian, Arunkumar 2A4 Suehle, John 1C3 3G3 Sun, Chi-Kuang 1A3 1A4 Sun, Daoheng 1A4 2D4 2E4 3D4 3E2 Sun, Guangyi 1C2 Sun, Lining 3B4

Sun, Ren 1B4

239 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Sun, S. 2E4 3E4 Sun, Xuhui 3D3 Sun, Yu 1G4 3E3 Suzuki, Makoto 1D4 Suzuki, Yoshinao 2G4 Tabib-Azar, Massood 1F4 Tagawa, Yusuke 3B4 Tai, H.M. 3A3 Takahara, Naoki 3C3 Takahashi, Kunio 2A4 Takahashi, Migaku 1D2 Talghader, Joseph 1C3 Tan, H. Hoe 2F4 Tan, Lee Kheng 2D2 Tan, Sophie 2E3 Tan, Yiyong 1C2 Tang, Peter 3C4 Tang, Wilson 3C3 Tang, Zirong 2C4 Tao, Li 1B4 Tarn, Tzyh-Jong 1G4 Taylor, Valerie 2G4 Teo, K.B.K. 3D4 Thipdech, Pacharavalee 2B3 Thiwawong, Thutiyaporn 1D2 3A3 Thompson, Daniel 3D2 Tian, Dayu 3E3 Tian, JIng-Hua 3G4 Tian, Zhong-Qun 3G4 Tierney, Brian 1F4 Tinker, Mark 3E3 Tohji, Kazuyuki 2E3 Tong, Jianhua 1G4 Tornow, Marc 3A4 Tour, James 1G3 Tsai, Chien-Ying 3D3 Tsai, Chih-Hao 1D4 Tsai, I-Ming 3F3 3F4 Tsai, Jen-Hui 2D4 Tsai, Lai-Fu 3B3 Tsai, Ming-Wei 1A4 Tseng, Fan gang 1B2 Tseng, Hao-Yu 3G2 Tsuchiya, Hideaki 2A3 Tsunoda, Masakiyo 1D2 Tu, Deyu 2D3 2G4 Tuantranont, Adisorn 1C4 1E3 3B4 3D2

Tung, Steve 1E4

240 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Tunhoo, Benchapol 1D2 3A3 Tyan, Yu-Chang 3B3 Tzeng, Yonhua 1A3 1A4 2C4 2D3 2F4 Vaillancourt, Jarrod 1E4 Varadan, Vijay 1E4 3E3 Vasileska, Dragica 1D4 2G3 Vj, Logeeswaran 3D2 Walder, Andre 1G3 Wan, Jun 2G3 Wan, Weijie 1A3 Wang, Chuan Po 1D2 Wang, Churn-Jen Chris 1A3 Wang, Congshun 2D4 Wang, Cunchao 1C2 Wang, Dake 2F4 Wang, Da-Shin 3F2 Wang, Ding 3C3 Wang, Hairong 3E4 Wang, Han 3D4 Wang, Hui 1D2 2D4 3D3 Wang, Jen-Cheng 2G3 3E2 Wang, Kang L. 3G3 Wang, Kexin 2E4 Wang, Kuan 1A3 Wang, Lei 1C2 Wang, Lijiang 1C4 Wang, Lingyan 1A4 2D4 3C3 Wang, Peichao 3G2 Wang, Ping 1C4 Wang, Po-Kai 3F2 Wang, Qin 3E2 Wang, Quan 3F3 Wang, Shan-Yuan 2E2 Wang, Shih-Yuan 2D2 3D2 3G4 Wang, Shourong 1C2 Wang, Shouyan 3E3 Wang, Tingyun 2E4 3D2 Wang, Wei 1E3 2G4 Wang, Weili 3A3 Wang, Wenyong 3G3 Wang, Xingzhi 3E4 Wang, Xuefeng 2G4 Wang, Yeng-Tseng 1A4 Wang, Yisong 3F3 Wang, Yong 2D4 Wang, Yuechao 3C4 Wanna, Yongyuth 1C4

Weber, Bent 3D2

241 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Wie, Chengqing 2G4 Wie, Fang 1A3 Wie, Gu 1C3 Wie, Qingshan 1C4 Wie, Xueyong 1C2 Wejinya, Uchechukwu 1E4 2D2 Weller, Dieter 1F4 Wen, Hsiang-Sheng 3B3 Wen, Yu-Chieh 1A4 Weng, Chen-Hsun 2D2 Weng, Yu-Ching 1B2 Whang, Sung Jin 2E2 Williams, Stanley 2D2 3D2 3G4 Wisitsoraat, Anurat 1C4 1E3 3B4 3D2 Wong, David 1A3 Wong, Ka Wai 3D4 Wong, King Yuen 3C3 Wong, Pak Kin 1B4 Wong, Tak Sing 1A3 Wongchoosuk, Chatchawal 3F3 Woo, Sanghyun 1D2 Woolard, Dwight 1C4 1F3 Wu, Angela 1C3 Wu, Chunsheng 1C4 Wu, Dezhi 1A4 2E4 Wu, Guan-Wei 3C3 Wu, Gwomei 2F2 Wu, Kuang-Chong 1A4 Wu, Nanjian 2G3 Wu, Qi 3E3 Wu, Ren Kuei 1B2 Wu, Tsung-Cho 1E4 Wu, Tsung-hsueh 2F4 Wu, W. 3D2 Wu, Ya-Fen 2G3 3E2 Wu, Yung-Chun 2C4 Xi, Ning 1E4 1G2 2C4 2D2 3B3 3G3 Xia, Shanhong 1C3 Xiao, Lidan 1B4 3B4 Xiao, Peng 3G2 Xie, Changqing 2D3 Xie, Jining 1E4 3E3 Xinliang, Wan 1G4 Xiong, Hao 1C3 3G3 Xiufen, Ye 1G4 Xu, Baojian 1B4 Xu, J. B. 3A3

Xu, Jingbo 2C4

242 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Xu, Qingsong 1G4 Yaacob, Khatijah A. 2E4 Yalcinkaya, Arda 3C4 Yamamoto, Takatoki 2B3 Yanagida, Yasuko 3D2 3F2 Yang, Bo Jun 2D2 3F2 Yang, Cary Y. 1D4 Yang, Cheng-Hao 3D3 Yang, Dae-Jin 2E2 3G2 Yang, Haigang 1C3 Yang, Hui 1B4 Yang, Lin 2F3 Yang, Mo 1B4 3B3 3B4 Yang, Ni 1C3 Yang, Ruoting 1G4 Yang, Shaogui 3E2 Yang, Wei Feng 2E2 Yang, Xueheng 1B4 Yang, Y.-J. 3G3 Yang, Yongliang 2A4 2G2 Yang, Yu-Han 3F4 Yang, Zhan 1G3 Yang, Zhenchuan 2D4 Yao, Da-Jeng 1A3 Yao, Zhenhua 2G4 Yapici, Murat 3D4 Yazdanpanah, Vahid 3B3 Ye, Tianchun 3E2 Ye, Xiongying 3C3 Yee, Marcus 2A3 Yeh, Chen-Sheng 1A3 2D2 Yellambalase,Yadunandana 1F2 2C3 Yen, Hsu-Chun 3F4 Yeo, Leslie 1B2 Yeon, Seong-Jin 3F4 3G3 Yeow, John 1A3 1E3 3F2 Yi, In-je 3B3 Yi, Xinjian 3E4 Yin, Dongfeng 1B4 Yoo, Dong-Geun 1A4 Yoon, Fern 1B4 You, Yufei 1G4 You, Zheng 1C3 Youm, WooSub 2G2 Yu, Bin 3D3 Yu, Chia-Mu 3F3 Yu, Fuqu 1B4

Yu, H.-J. 2E4

243 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Yu, Hiabo 3C4 Yu, Hongtao 3E2 Yu, J. D. 2F2 Yu, Jinjiang 1B4 Yu, Ruixia 2B3 3E4 Yu, Shao-Ming 3G3 Yu, Ying 3G2 Yue, Shuanglin 2D3 Yulong, Zhao 2C4 Yun, Dong-Hwa 2B3 3C4 Yun, Minhee 1E3 Zhan, Zhikun 2A4 Zhang, Baoshun 2D4 Zhang, Chi 1C3 Zhang, Gaofei 1C3 Zhang, Guobing 3E3 Zhang, Haimin 3E2 Zhang, Haixa 3E3 3F3 Zhang, Jiangbo 1G2 2C4 3B3 3G3 Zhang, Jun 1G3 Zhang, Lei 1F3 Zhang, Mingjun 1G4 Zhang, Ru 2E4 3D2 Zhang, Wancheng 2G3 Zhang, Weidong 1F3 Zhang, Yu 3B3 Zhang, Yudong 1G2 Zhao, Aiwu 1G3 Zhao, Jianlong 1B4 Zhao, Kaichun 3F2 Zhao, Peiji 1C4 1F3 Zhao, Weisheng 1F4 Zhao, Xin 1C2 Zhao, Ya-Pu 1D2 3A4 Zheng, Gaofeng 2D4 3D4 Zhong, Chuan-Jian 3C3 Zhou, Feng 2C3 Zhou, Huixing 1G4 Zhou, Xiangyang 2B3 3E4 Zhou, Xianwei 1G2 Zhou, Xing 2G4 Zhou, Yan 1F3 Zhou, Yi 2F4 Zhou, Zhaoying 3C3 Zhu, Defeng 1B4 Zhu, Guojun 2G4 Zhu, Mingzhi 2C4

Zhu, Rong 3C3

244 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Zhu, Xiaoli 2D3 Zhu, Yongyang 2E4 Zhu, Zhaomin 2G4 Zimmermann, Bernhard 1A3 Zohoor, H. 1G2 Zou, Jun 3D4 1D2

245 IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………......

IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Sponsor Guide ACS

Company Website: http://www.acsnano.org Email: [email protected]

Company Description: ACS Nano is an international forum for the disseminational of multidisciplinary research that embraces the fields of chemistry, physics materials science, biology, and engineering. The journal publishes comprehensive articles that define the interface between NANOSCIENCE and NANOTECHNOLOGY. In addition, the journal features invited perspectives and commentates by leading experts that help define the current state of the science. Published by the American Chemical Society, ACS Nano Complements Nano Letters, the established leader for rapid communication of Nanoscale research.

*************************************************************************************************************************** ATOMISTIX

Phone: 65 6795 3090 Fax: 65 6773 8276 Company Website: www.atomistix.com Email: [email protected]

Company Description: Atomistix is the technology leader in advanced simulation and product design software for materials and devices requiring nanometer precision. Atomistix' advanced software tools take into account the quantum nature of electrons, offering precise modeling of electron distribution and transport across nanoscale interfaces and junctions. The software is based on “first principles”, which means that it is grounded in highly accurate quantum theory with no experimental input required.

Atomistix' modeling platforms, Virtual NanoLab® and Atomistix Toolkit®, simulate physical experiments and analyze the behavior of nanoscale systems. Its user-friendly design allows scientists and engineers to take advantage of state-of- the-art atomic-scale modeling.

***************************************************************************************************************************

IEEE-NANO 2007 Technical Digest

One Advanced Technology One Global Conference ……………………………………………………………………………………………………………………………...... Raith GmbH

Phone: +49 (0)231 975000 0 Fax: +49 (0)231 975000 5 Company Website: www.raith.com Email: [email protected]

Company Description: Raith GmbH, formed in 1980, is an independent high technology enterprise, which, develops, sells, delivers and supports products to an international client base.

Raith offers innovative solutions for nanolithography and nanofabrication using electron or ion beam systems, with an emphasis on research and development applications and small batch production to meet the needs of researchers, designers, and engineers in both university and industrial settings. Raith is a partner to the semiconductor industry and original equipment manufacturers, for which Raith develops ultrahigh precision stages and proprietary solution navigation packages for failure analysis inspection, and semiconductor CAD navigation.

*************************************************************************************************************************** Taylor & Francis Asia Pacific / CRC Press

Phone: (65) 6741 5166 Fax: (65) 6742 9356 Company Website: www.crcpress.co.uk Email: [email protected]

Company Description: With a distinguished tradition of publishing excellence, Taylor & Francis (T&F) celebrates over two centuries of successful partnership with the international scientific research community. T&F has published the original work of leading figures in science such as Faraday, Maxwell, Langley and Joule, and today, it continues to produce 800 new books in the sciences each year.

Many of these books bear the imprint of CRC Press, best known as the publisher of the Handbook of Chemistry and Physics and one of the world’s leading publishers of scientific and technical books, journals and online products.

IEEE-NANO 2007 Technical Digest IEEE Nano 2008 8th IEEE Conference on Nanotechnology August 18-21, 2008 Sheraton Hotel and Arlington Convention Center, Arlington, TX, USA Sponsored by the IEEE Nanotechnology Council

http://www.ewh.ieee.org/r5/fort_worth/nano2008.html

This conference is the sequel to meetings held in Maui (2001), Washington (2002), San Francisco (2003), Munich (2004), Nagoya (2005), Cincinnati (2006), and Hong Kong (2007). Emphasis will be on fusions of several different fields and applications of nanoscience and nanotechnology. The conference focus will be on engineering and business issues related to nanoelectronics, circuits, architectures, sensor systems, integration, reliability and manufacturing in addition to fundamental issues such as modeling, growth/synthesis, characterization, etc. The conference will feature plenary, invited, and contributed papers (oral and poster sessions) thematically arranged according to the following topics. Contributed papers are welcome in the following and related topics: Molecular Electronics, Inorganic • Nanoelectronics and Nanodevices • Nanowires, Nanocrystals, Quantum Dots Nano-optics, Nano-Photonics Spintronics, Nanomagnetics, • • Nano-optoelectronics Quantum computing Nanofabrication, Nanolithography, Nano-bio Fusion, Nano-Biology, • • Nano Manipulation, Nano imaging Nano-Bio-Medical Science

• Nano-sensors and Nano Membranes • Nano-Circuits and Architectures

Nanocarbon, Nanodiamond and • • Nanomaterials and nanostructures Carbon Nanotube Based Technologies

• Modeling and Simulation • Nano- robotics

System Integration (Nano/Micro/ • • Business/Economics of Nano Macro), NEMS, and Actuators

• Industrial/commercial Applications • Societal Impacts of Nano

Abstract Submission Due Date: November 16, 2007 (500 words or less) Authors will be notified of paper selection by December 14, 2007

Paper submission Due Date: February 29, 2008, up to 4 pages (Format will be announced at WEB page)

Final camera ready (accepted paper) Due Date: May 1, 2008, up to 4 pages Point of Contact: Kyle Bunch, [email protected] (Publications Chair)