James Nanofabrication Centre

Prof Douglas Paul Director

Douglas.Paul@.ac.uk The

Established in 1451

7 Nobel Laureates

16,500 undergraduates, 5,000 graduates and 5,000 adult students

£130M research income pa

400 years in High Street

Moved to Gilmorehill in 1870

Neo-gothic buildings by Scott Famous Glasgow Scholars

William Thomson James Watt William John Rev Robert (Lord )

Rev John Kerr John Logie Baird Nanoscale Technology @ Glasgow

£70M research grant portfolio in nanoscale technology

demonstrate Glasgow University capability examples of present industrial engagement look for overlaps in interest networking to investigate possible future collaborations

Major Funded Research Centres at Glasgow James Watt Nanofabrication Centre Kelvin Nanocharacterisation Centre Electronics Design Centre for Heterogeneous Systems Bioelectronics Research Centre Scottish Electronics & Electric Drives (SPEED) Consortium Kelvin Nanotechnology Limited (KNT) is a bridge to industry

Provides commercial assess to University facilities >30 Years Nanofabrication at Glasgow

1978 – EBL on converted 1989 – our first dedicated 1990 – Leica EBPG5 SEM in basement SEM for metrology First UK Uni lab to run professional installation

2005 – New James Watt 2006 – New EBL tool 2007 – Nanoforum formed Nanofabrication Centre built State-of-the-art Cross-disciplinary group of researchers James Watt Nanofabrication Centre @Glasgow

In School of Engineering, multidisciplinary with many others including Physics, Chemistry, CS, Biology £53M active research grant portfolio (£14M pa, industry ~£1M)

2nd highest cited Electronics School in UK after Cambridge

World Bests: Smallest electron-beam lithography pattern – 3 nm

Best layer-to-layer alignment accuracy = 0.46 nm

Smallest diamond transistor (50 nm gate length)

Lowest loss silicon optical waveguide (< 0.9 dB/cm)

Fastest mode locked laser (2.1 THz)

Highest Q silicon nanowire cavity (now beaten 2010) James Watt Nanofabrication Centre @Glasgow

Vistec VB6 & EBPG5 750m2 cleanroom - pseudo-industrial operation

18 technicians + 5 research technologists

Large number of process modules E-beam lithography

Processes include: MMICs, III-V, Si/SiGe/Ge, integrated photonics, metamaterials, MEMS (microfluidics)

Commercial access through KNT

Süss MA6 optical lith http://www.jwnc.gla.ac.uk

9 RIE / PECVD 4 Metal dep tools 4 SEMs: Hitachi S4700 Veeco: AFMs Electron Beam Lithography Capability

Measured linewidth vs dose 9 30 years Sub-5 nm single-line HSQ experience lithography for research 8 of e-beam 7 lithography 6 5

4

3 16000 20000 24000 28000 Dose (µC cm-2) 10nm 50 nm Penrose tile: layer-to-layer alignment 0.46 nm rms Vistec VB6

Alignment allows 1 nm gaps Vistec EBPG5 between different layers Manufacturing: Nanoimprint Lithography

Electron beam lithography: serial process, appropriate for small area, high value products

Nanoimprint: 1 stamp, many reproductions

Cheap, large area, manufacturing technique

500 nm

E. Martines et al., Nano Lett. 5, 2097 (2005)

–> EC project: development to rolling process James Watt Nanofabrication Centre Technology

III-V CMOS Resonant tunnelling 22 nm T-gate Hydrophobic diodes InGaAs HEMT patterns

Optoelectronics

Sensing: Si nanowires MEMS: THz optics MEMS: Microfluidics

SiO2 drain

source Al gates Scaling T-gate Process to 10 nm

50 nm 22 nm 10 nm

I. Thayne et al., S. Bentley et al., Thin Solid Films Microelect. Eng. 515, 4373 (2007) 85, 1375 (2008)

S. Bentley et al., Microelect. Eng. 86, 1067 (2009) Healthcare & Medical Applications

Proton camera: pH sensors THz medical imaging Medical scaffolds

Picture from TeraView

Directed STEM cell growth Lab-on-a-pill Plasmon sensors Compton cameras: medical imaging Energy Applications

Thermoelectrics: SiGe on-chip energy harvesting III-V Photovoltaics: Bi2Te3 nanostructured alloys intermediate bandgap

Bi2Te3 nanowire Si/SiGe superlattice Security and Defence Applications

mm-wave & THz security imaging 1.56 THz

Explosives identification 94 GHz QinetiQ Counter measures SPIE 6212, 62120Q (2006)

Semtex PE4 MMICs: Design, fab, test RDX

PETN HMX Peltier Coolers TNT A b s o r p t i n ( U a d f e ) HOSDB & TeraView 0 1 2 3 4 140 GHz LNA Frequency (THz) Terahertz and mm-wave

Sources: Gunn diodes (~0.1 mW 120 GHz), quantum cascade lasers (50 mW at 2 to 4 THz) room temperature and tunable THz sources in research

Optics: metamaterial – lenses, tunable filters, beam steerers, beamsplitters, polarisers, antireflective coatings

Detectors: modulators, microbolometer arrays, liquid He Si bolometers (NEP ~ 10–13 W/√Hz at 4K)

Systems: heterodyne detection, time domain systems, vacuum FTIR (60 GHz to visible detectors) ICT Applications

µLED comms. Photonics – Integrated Fibre-to-the-home, optoelectronics chip-to-chip interconnects lab-on-a-chip

!"#$%#!&'#()*(+%,+- Si photonics

16x16 GaN LED array Amplitude & phase High frequency Efficient LEDs modulation measurements 2.0

1 CRT 1.8 2.1 THz

1.6

Signal, A.U. 1.4

1.2

1.0 0 5 10 15 Delay, ps Kelvin Nanocharacterisation Centre (KNC)

KNC is a state-of-the-art electron microscopy research facility

KNC facilities: • Electron Microscopy Sample preparation

• Dualbeam FIB/SEM instrument – provides a very wide range of capabilities

• 3 x Transmission electron microscopes (TEMs) optimised for specialist imaging and characterisation of materials at the nanoscale

http://www.knc.gla.ac.uk/

Specialise in structural/chemical characterisation of materials from micrometres to < 1 nm 6 Structure and composition at the nanoscale

FEI T20 TEM & TF20 TEM/STEM • HR-TEM - atomic resolution imaging • Electron probe formation down to 0.3 nm • X-ray analysis for elemental composition and mapping • Electron energy loss spectroscopy (EELS) for elemental composition and bonding • EELS spectrum imaging • Our research: III-V heterostructures & MOSFETs, high-K stacks, ferroelectrics, magnetic tunnel junctions, steels, nanoparticles…. Some collaborators recent past & present: Electronics Design Centre http://www.gla.ac.uk/glasgowedc/ l CAD and CAD support l HSS, Cadence, Synopsys, Avant! l Secure private HPC

On-wafer probing l DC to 325 GHz

Microwave/Millimetre Wave Test & Measurement l VNA suite from MHz to 325 GHz l 20 GHz nearfield test range - anechoic chamber

THz Test & Measurement l Very long wavelength FTIR - 60 GHz to visible l Cooled detectors for mm-wave, THz, MIR Industrial Partners and Customers

!"#$%& &'&()"*+&(#(,- !"#$%%$&$#'()* !"#$"%$ Kymata

BAE SYSTEMS

!!"#$%&' QinetiQ

! " !"#$%&'()*+"(,- !""#$% !""#$%&'$()")* Commercial Engagement & Exploitation

Most nanoscale research applied and / or industrially relevant

Research collaborations with over 50 companies, provide nanofabrication services to over 175 companies

Large portfolio of background IP, know-how, experience

Mechanisms: cash!, III-V Facility, PhD student sponsorship, collaborative projects (EPSRC, EC, TSB), consultancy, KNT

Kelvin Nanotechnology Ltd.: provides commercial access to facilities to industry

Cash to help companies work with the University: Knowledge Transfer Account (KTA), First Step Summary

Formidable track record in Nanoscience and Nanoscale Technology stretching over 30 Years University-wide nanofabrication activity embracing many disciplines Global research ambition

Close partnerships with universities and industry Knowledge transfer drive with cash available to work with industry Present collaborative programmes in UK, Europe, US, Canada, etc....

Research capabilities overlap many research sectors Welcome extending partnership with universities, research institutes and especially companies

[email protected] Tel:- +44 141 330 5219