Japan Information & Control Standards Committee Meeting Summary and Minutes

Japan Standards Summer Meetings 2012 June 5, 2012, 13:30-15:15 Japan Time Oshima Conference Room 3, SEMI Japan, Tokyo, Japan

Committee Announcements Next Committee Meeting Friday, September 7, 2012, 13:30-17:00 Japan Time Tokyo, Japan

Highlighted texts in this minutes are added after this meeting for your information.

Table 1 Meeting Attendees Italics indicate virtual participants Co-Chairs: Takayuki Nishimura (Dainippon Screen MFG.), Mitsuhiro Matsuda ( Kokusai Electric) SEMI Staff: Chie Yanagisawa Attendee: 16 + SEMI: 1 Company Last First Company Last First Algosystem Tanaka Yasuhiro Mashiro Supika Cannon Anelva Sato Mitsugu Tokyo Electron Murata Naoko Dainippon Screen MFG. Nishimura Takayuki Tokyo Electron Sakamoto Mitch Software Technologies Dainippon Screen MFG. Takasaki Yoshihisa Tokyo Electron Mochizuki Tadashi Software Technologies FB Consult Somei Tadashi Tokyo Seimitsu Sasaki Mie Hitachi High Toyoshima Yuko YOKOGAWA Nakagawa Takashi Technologies Sambu Ken YOKOGAWA Ohata Katsutoshi MKS Japan Ogihara Hideaki Tokyo Electron Asakawa Terry SEMI Japan Yanagisawa Chie

Table 2 Leadership Changes Group Previous Leader New Leader None

Table 3 Ballot Results (or move to Section 4, Ballot Review) Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review. Failed ballots and line items were returned to the originating task forces for re-work and re-balloting. Document # Document Title Committee Action None

Table 4 Authorized Ballots # When SC/TF/WG Details None

Table 5 Authorized Activities # Type SC/TF/WG Details None Note: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

Japan I&C Committee 1 June 5, 2012 Meeting Minutes SEMI Japan

AGENDA 1. Welcome, Self Introduction, Agenda Review and SEMI Standards Legal Reminders 2. SEMI Staff Report 3. Review and Approval of Previous Meeting Minutes (2012/4/19) 4. Previous Action Item Review 5. Liaison Reports 6. Task Force Reports 7. Old Business 8. New Business 9. Action Item Review 10. Next Meeting 11. Adjournment

1 Welcome, Reminders, and Introductions

Takayuki Nishimura (Dainippon Screen MFG.) called the meeting to order at 13:30.

1.1 Self-Introduction

Attendees introduced themselves.

1.2 Agenda Review

Agenda was reviewed by Takayuki Nishimura (Dainippon Screen MFG.). Agreed as it is.

1.3 SEMI Standards Legal Reminder

Chie Yanagisawa (SEMI Japan) reminded SEMI standards legal reminder as follows:  Program Membership Requirement  SEMI Antitrust Reminder  Intellectual Property Reminder  International Meeting Guidelines [Attachment: JICC_20120605-01]

2 SEMI Staff Report

Chie Yanagisawa (SEMI Japan) presented the SEMI Staff Report. Of note:  SEMI Global 2012 Calendar of Events  Meeting & Event Schedule during SEMICON West  SEMI Standards Publications -> SEMI E5 postponed to 0712  A&R Summary April 2012  2012 Critical Dates for SEMI Standards Ballots  Introduction of GoToMeeting  Contact Information [Attachment: JICC_20120605-02]

3 Review and Approval of Previous Meeting Minutes (2012/4/19)

The committee reviewed the minutes draft of the previous meeting.

Motion: To approve the previous meeting minutes as written. By / 2nd: Tadashi Mochizuki (Tokyo Electron Software Technologies) / Yoshihisa Takasaki (Dainippon Screen MFG.) Discussion: None.

Japan I&C Committee 2 June 5, 2012 Meeting Minutes SEMI Japan

Vote: 13-0 in favor. Motion passed. [Attachment: JICC_20120605-03]

4 Action Item Review Table 6 Previous Meeting Actions Items

Item # Action Item (AI holder) Details JICC120419-1 To confirm the fixed schedule of the North America Fall Done. Standards meetings. (Chie Yanagisawa / SEMI Japan) The NA Fall meetings will be held on October 29 - November 1 at SEMI Headquarters. JICC120419-2 To encourage SEMI HQ Standards to post tentative Standards Ongoing. Meetings Schedule, for example half a year in advance or as To check if this Action Item to be moved soon as the candidate week is fixed, in order that Standards to JRSC Action Item members could arrange TC schedules. (Chie Yanagisawa / SEMI Japan) JICC120419-3 To summarize issues about Data Quality Standards and then to Done. make a report. To be reported at 7.1 Old Business (Mitch Sakamoto / Tokyo Electron Software Technologies) JICC120419-4 To collect comments about SNARF pre-distribution rule from all Ongoing. members of Japan Information & Control Committee. (Mitsuhiro Matsuda / Hitachi Kokusai Electric and Chie Yanagisawa / SEMI Japan)

5 Liaison Reports

5.1 North America Information & Control Committee Liaison Report

Memo was reported by Takayuki Nishimura (Dainippon Screen MFG.).  There will only be 2 ballots issued for Cycle 4: 5177B (E145 rev) and 5274 (new E54 subordinate for ADDON Sensor).  The Energy Saving Equipment Communication TF was previously considering to submit their ballot (#5411) for Cycle 4, but since it is not yet ready, they will ballot for a later cycle. Probably review at the NA Fall 2012 meetings in Oct-Nov. Takayuki Nishimura (Dainippon Screen MFG.) added the information that the Energy Saving Equipment Communication TF was planning to hold a meeting on June 27 at SEMI Japan office, since the NA TF leader would come over to Japan.

5.2 European Equipment Automation Liaison Report

No update.

5.3 Information & Control Committee Liaison Report

No update.

5.4 Korea Liaison Report

Reported by Takayuki Nishimura (Dainippon Screen MFG.). Of note:  Leadership  Organization Chart  Meeting Information -> The schedule was changed to Aug. 29.  Subcommittee/TF/WG Updates  SEMICON Korea 2012

Japan I&C Committee 3 June 5, 2012 Meeting Minutes SEMI Japan

[Attachment: JICC_20120605-04]

6 Task Force Reports and other meeting reports (TF Leader)

6.1 AMHS TF (Hiroshi Kondo / Murata Machinery, Mitsumasa-Ago /Daifuku)

No update.

6.2 GEM300 TF (Tadashi Mochizuki / Tokyo Electron Software Technologies, Yoshihisa Takasaki / Dainippon Screen MFG.)

Tadashi Mochizuki (Tokyo Electron Software Technologies) presented the GEM300 TF report as attached. The key items were as follows:  Doc.#4946 (E87 Carrier Approaching )  Doc.#5386 (E94, Enhanced Material Redirection Mode)  Doc.#5367 (CMS’s Error), Doc.#5423 and Issues AMHS delivery problem [Attachment: JICC_20120605-05]

6.3 Equipment Information System Security (EISS) TF (Mitch Sakamoto / Tokyo Electron Software Technologies)

Mitch Sakamoto (Tokyo Electron Software Technologies) presented the Equipment Information System Security (EISS) TF report as attached. The key items were as follows:  Ballot got number 5422.  Will quote NIST EP-ITS for the baseline.  Placed preliminary version of “Document Structure”  Expect WW discussion at SEMICON/West, 2012  “Offline” will be in the scope; e.g. USB handling, or GUI privilege.  Will not address the “Certification”, so far. [Attachment: JICC_20120605-06a & JICC_20120605-06b]

6.4 Sensor Bus TF (Hideaki Ogihara / MKS Japan)

Hideaki Ogihara (MKS Japan) reported there was no update.

7 Old Business

7.1 Report for the previous Action Item JICC120419-3: To summarize issues about Data Quality Standards and then to make a report.

Mitch Sakamoto (Tokyo Electron Software Technologies) presented the report for Data Quality Standard discussion at the North America Standards meeting as attached. Mitch Sakamoto proposed to discontinue this discussion. Japan I&CC discussed on the quality of Data Quality Standards.

Motion: To discontinue the discussion of quality of DQ standards. By / 2nd: Yoshihisa Takasaki (Dainippon Screen MFG.) / Mitch Sakamoto (Tokyo Electron Software Technologies) Discussion: None. Vote: 14-0 in favor. Motion passed. [Attachment: JICC_20120605-07]

7.2 Report for the previous Action Item JICC120419-4: To collect comments about SNARF pre-distribution rule from all members of Japan Information & Control Committee.

Ongoing.

Japan I&C Committee 4 June 5, 2012 Meeting Minutes SEMI Japan

8 New Business

None.

9 Action Item Review Table 7 New Action Items

Item # Assigned to Details None

10 Next meeting

The next meeting of Japan Information & Control Committee is scheduled as follows:  Date & Time: Thursday, September 20, 2012 (Time:13:30-17:00) => The schedule was changed to Friday, September 7, 2012 (Time:13:30-17:00).  Venue: SEMI Japan Office, Tokyo, Japan

11 Adjournment

Having no further business, a motion was made by Takayuki Nishimura (Dainippon Screen MFG.) to adjourn the Japan Information & Control Committee meeting at Oshima Conference room #3, SEMI Japan office. The meeting unanimously adjourned at 15:15.

Respectfully submitted by: Chi Yanagisawa Senior Coordinator, Standards & EHS SEMI Japan Phone: +81.3.3222.6018 Email: [email protected]

Minutes approved by:

Takayuki Nishimura (Dainippon Screen MFG.), Co-Chair August 22 , 2012

Japan I&C Committee 5 June 5, 2012 Meeting Minutes SEMI Japan