SEMI Draft Document 4729
Total Page：16
File Type：pdf, Size：1020Kb
Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Task Force Issues Force E125.0: Task for Notes: E125-03084729 Change Proposal Draft Document SEMI 4729 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Add required Severity NestedStateMachines EquipmentNode def. Paragraph renumberParagraph code enumerationcode E138 data types Logical->Logic Issues are associated with section, table, and figure numbers. figure section, with table, areassociated and Issues double strikethrough proposed All State MachineState Clarification clarification state->State E125.0-210 E125.0-196 E125.0-194 E125.0-190 E125.0-188 E125.0-187 E125.0-186 E125.0-185 E125.0-184 E125.0-008 eventMaps cardinality Issue additions to the standard are denoted in blue in underlineadditions aredenoted the standard to . eventMaps - Figure 21 in E125.0 says there are one -eventMaps FigureE125.0says areone 21in there is 10.3.1.2-Section defined equipmentnode not itfigure describes more match be to the cardinality to zeroor needs Comments: TheTable 58,NestedStateMachines of be10.8.5. seem to part they like need 10.8.6.8,10.8.6.9,10.8.6.10,andSections 10.8.6.11 be capitalized. “State” should refers theit class to >>When “state” capitalized "state" word Table be 54Comments:should The both impossiblebecause have it's to simultaneously "or" change"and/or" to 10.8.2 thirdsentence: implementing E87CarrierModel? State confusing. work that very How when does states.is havingThis non-concurrent machines as 10.8.2 First describe state not sentence should The issue alsoissue covers 004 solution this to an become enumerated should list. The severity alreadythe requiredschema).required is in (it to attribute needs be Table severity 49,exception if Logical morebe should Logic. than….” apply ANDbetweenconstraints “Logical semantics class 24,theIn commentsfor constraints Table has issues: 174,182,183, 199,218 TF or theDDA corrected eliminated following types has also E138 data Changes referenced to Components E138Common reference from E134and E125and Move DataValueTypes DataTypes from to in 0..* >>Changed cardinality E125.0 the same the schema) in more is (which Table zeroor the .1specifies 54in StateMachineInstance. eventMapsor more a in Description Page jn l jn 1 and and deletions are denoted with deletions aredenoted blue and 10.7.2.1 Table 50(new) 10.7.2.1 Table 49 10.4.5 Table 24 10.5 –10.6.2including Tables its10.4.8 (new) subsections, and 10.4.5 Table and 24(units 10.4.4 Table 23 10.4.2 Figure 9 9.1.2.2.1 Table 7 8.1.4.1 8.1.4 & 10.8.6.4 Table 58 10.8.6.1 Figure 21 8.1.2.1 10.8.6.4 Table 58 10.8.6.8-10.8.6.11 moved to 2) 10.8.3.4 Table 54(col. 3) 10.8.3.4 Table 54(col. 10.8.2 (3 10.8.2 (1 30–48 and Figures 11-17 Figure 10,Tables 29-30 typeInformation) (nowTables 57-58) 61-62 10.8.5.1-10.8.5.4 including Sections Affected rd st & 2 & sentence) Document Document Number: nd Doc. sentences) Date:
SEMI 5/29/2018 DRAFT
LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Style normalization andStyle normalization SEMIObject attributes SEMIObject Alarms->Exceptions Enhance Table 60 Enhance RevisionNotice Exception data and eventData ID restrictions E125.1-066 E125.1-047 E125.0-221 E125.0-220 E125.0-219 E125.0-217 E125.0-212 E125.0-211 Grammar clarity Issue >>The EquipmentElement has been removed from from hasremoved >>The EquipmentElement been CEM::EquipmentElement (Figure 7). MetadataRevision and a (revisionDate) a RevisionNotice. The RevisionNoticecontains containsMetadataRevised notification a metadata. inelsewhere the defined reusingexceptionData), parameters (called aexception) with setreferences of parameter for unique define parameters each (which clearData and setData byreplacing ExceptionImprove data class change). attribute (earlier objType required, isa since SEMIObjType now is one>>Note alsoonly that attribute (ObjID) haveParameters.note they that cannot duplicate plus how they aredifferent, >>Describe the twoand toadded that. address mustname sets. usedA both is restriction be in parameter if setthe willsame EventData conflict For SEMIObject,the the Attributeset and exceptions. asor mustrepresented other via lights means be or the reportedoperator to at thesituations) console are (unexpected requireany that to Need alarms information needed. the convey complex neededto arenot strings long convention>>Naming simplification –the Transition, et al. Event, conventionStateMachine, naming for format on field needs based Name requirements proposal) parameter/unit (Consider light in of of the datatheobject)describes only associated type Composition diamond>. 60,it In SEMI 5/29/2018 DRAFT LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Transient Parameters E134.0-823 Editorial Issue ballot creation. minorfound correctsduring Editorial of errors schema(s) E134,and to the also>>Changes made E125.1, be can includedexceptions. in transient parameters that text itunrestricted. Added make clear to refers of the“Non-transient” union to restrictedand and “non-transient unrestricted”.Unrestricted means and “non-transient restricted”. Restricted means enumeration: Restricted, Unrestricted. Transient, three-value >>Changed isTransient a to request. aParameters in trace and include to the allowsappropriate the user definition transient >>The solution of the clarifies trace request. in be can included a Clarify transient that parameters Description Page jn l jn 3 10.4.7.2 Table 26 9.1.1 Figure 3 10.8.6.7.1 10.7.3 Table 50 10.4.11.9.2 –10.4.11.9.3 10.4.11.8.2 –10.4.11.8.3 10.4.11.7 10.4.11.3.1.1 –10.4.11.3.1.3.2 10.4.11.3 Table 28 Sections Affected Document Document Number: Doc. Date: SEMI 5/29/2018 DRAFT LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 6 Conventions 5 Terminology Documents Standards and 4 Referenced 3 Limitations 2 Scope 1 Purpose table Note:ofis The contents will[Editor’s unchanged but beupdated beforepublication.] SEMI E125.1 NOTICE: (EqSD) DESCRIPTION EQUIPMENTSELF FOR SPECIFICATION E125- SEMI reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This INFORMATION 2 RELATED INFORMATION 1 RELATED for Compliance11 Requirements Metadata10 Equipment Metadata for Equipment Managing 9 Interfaces 8 Overview 7 Background 6.2 6.1 5.2 5.1 4.3 4.2 4.1 3.2 3.1 2.2 2.1 1.1 11.2 Table 67 provides a checklist for Equipment Self Description checklistEquipment 67provides for compliance. a 11.2 Table 11.1 10.10 10.9 10.8 10.7 10.6 10.5 10.4 10.3 10.2 10.1 9.2 9.1 8.2 8.1 7.1 Terms andNotationConventions Document Definitions Abbreviationsand Other ISO SEMI Other Abstract Scope Outof In Specification Metadata Metadata Manager Equipment Equipment Metadata Accessing Metadata Equipment Motivation Compliance to Equipment Self-Description to Equipment Compliance ObjTypes StateMachines Exceptions Units Parameter Parameters Equipment Equipment Equipment Metadata of Management ...... SimpleEvent - 2003; previously March2003; published 200 on Subcommittee in www.semi.org Reviews at available and Audits global the by publication was edition for This approved Committee. Control & Information global the by approved technically was standard This scope ...... The designation of SEMI SEMI of designation The Standards ...... ...... Standards Standards Limitations ...... ...... Model Client ...... ...... Types 0709 Nodes Structure ...... Purpose ...... ...... Acronyms 0308 Organization ...... October ...... E125 ...... was updated during the the during updated was 2007 and on CD-ROM in in CD-ROM on and 2007 7 ...... Table ofContents ...... Page jn l jn 4 November 0308 publishing cycle to reflect the the reflect to cycle publishing 2007. Originally published July published Originally 2007...... etme September Error! Bookmark notdefined.Error! Bookmark 5 , 2007 , Document Document Number: Doc. . It was It . Date: SEMI changes to changes 5/29/2018 DRAFT 49 49 49 48 47 38 37 36 27 19 18 18 18 18 17 12 12 12 11 11 10 10 10 8 8 8 8 8 8 8 7 7 7 7 7 7 7 7 7 7 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and RELATED INFORMATION 8 RELATED INFORMATION 7 RELATED INFORMATION 6 RELATED INFORMATION 5 RELATED INFORMATION 4 RELATED INFORMATION 3 RELATED reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This ...... Page jn l jn 5 Document Document Number: Doc. Date: SEMI 5/29/2018 DRAFT LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and easier forusers digest. end to easier is that form a in users human to information this present and organize to written be will applications that expected is 2.2.3 this produceis for datacan specification. scope and it in any implementation concepts. those to dedicated document a in specified andthis adiscover concept that client can such implemented a that describe thesupplier to fact has Only the ability separately be to are metadata by described be can this that etc.) keeping and data, 2.2.2 available and interfaces, configuration, equipment information current. describing information retrieving 2.2.1 2.2 Management. for the SEMI specification in Collection defined Data interface 2.1.2 that interface an specifies also this information. use access clients can to document This running). is equipment the while dynamically change not does information that (i.e., nature in static is that information describes only specification The equipment. their by provided 2.1.1 2.1 2 this With equipment. system. automation a factory’s equipment into their from integrating available of process the aid to tool a as used configuration be can it systems, software by consumption for equipment available information physical and exceptions, events, variables, 1.1.1 1.1 1 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Communications of Modeland for (GEM) Manufacturing Control Equipment SEMI E30—Generic 4.1 4 from originating requests distinguishing of capable is equipment clients. different the that and identified, uniquely be can clients 3.2.2 those to notifications send to necessary context any provided has clients. and requests, submit can that clients any with context communications a established has equipment the that assumes It specification. this by defined notifications 3.2.1 3.2 technology. an to implementation specification 3.1.1 3.1 3 the determine and practices health and safety appropriate other ofprior limitations use.applicability regulatoryor to establish to standard this of users the of responsibility NOTICE: Scope Purpose Referenced Standards Referenced Documents and Limitations Out of ScopeOut of In Specification SEMI Other Abstract This specification does not require that the metadata provided by the equipment be directly human readable. It readable. human directly be equipment the by provided metadata the that require not does specification This job, process/control management, carrier (e.g., models behavioral and concepts underlying any of details The for necessary that than other equipment the of required behavior new any define not does specification This acquisition data the supports that equipment manufacturing semiconductor all to applies specification This exceptions and events, data, essential describe to use to are suppliers that classes the specifies document This the of description a provide to suppliers equipment allowing for method a describes specification This This specification does not define the mechanism used for identifying or authenticating clients. It assumes that It assumes clients. authenticating identifying or for used mechanism the define not doesspecification This this to used determining howlocate receive for to theare doesmechanism clients that define specification not This bind to developed be must specifications Adjunct only. model abstract an is specification This - scope Standards the is It use. its with associated any, if issues, safety address to purport not does standard This Limitations Model Purpose Page jn l jn 6 Document Document Number: Doc. Date: SEMI 5/29/2018 DRAFT LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 5.1.3 5.1.2 in section. included this site, web SEMI the on available Terms, of Compilation 5.1.1 5.1 5 NOTICE: from available Syntax, (URN) 1997; ResourceName IETF RFC2141,May Uniform 01-09-67; Specification OMG 1.4, Version http://www.omg.org/technology/documents/modeling_spec_catalog.htm Specification, (UML) Language Modeling Unified Alvestrand. H. ed. 1995; Languages, of Identification the for Tags – 1776 RFC (IETF) Force Task Engineering Internet SQL; http://www.ansi.org – Language Database – Systems Information – X3.135-1992 (ANSI) Institute Standards National American 4.3 anddraft2000 Revision oftimes, dates —Representations revision, ISO 8601Draft dates and1988-06-15 of ISO times, 8601—Representations Country 1: Part – subdivisions their and codes countries of names of representation the for Codes — 3166-1:1997 ISO of languages names the representation of ISO —Codefor 639:1988 4.2 theModel Common(CEM) for Equipment SEMI E120―Specification and Services Standard: Concept, Behavior, Services SEMI E39―Object reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This http://www.ansi.org 42ndStreet, Office: 212.398.0023; NY202.293.9287. New New York 11West York, 212.642.4900; 10036,USA. Fax: Telephone: 2 41.22.733.34.30; 41.22.749.01.11; Fax: Telephone: 1 6 will condition what of anditself. variable, of the id the theevent type are of event,and each units what produce the description a provide would event that for metadata the conditions, certain under variables 5.2.3 refersection this as in these this to Please needed. documentto terms definitions. conform used 5.2.2 in section. included this SEMI the on available Terms, of Compilation 5.2.1 5.2 5.1.7 5.1.6 5.1.5 5.1.4 American National Standards Institute, Headquarters: 1819 L Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020; Fax: Washington, Street, 1819L DC Institute,Headquarters: 202.293.8020; National NW, 20036,USA. Fax: Telephone: Standards American Geneva 1rue Case56,CH-1211 Secretariat, de 20,Switzerland. for postale Varembé, Organization Central Standardization,ISO International Terminology Conventions Abbreviations and Other ISO Definitions OMG IDL SEMI the in found be may specification this in used acronyms and abbreviations the of many of Descriptions metadata UML standard. UML the from directly taken terms UML of definitions useful contains 8 Information Related SEMI the in found be may specification this in used terms the of many of descriptions or Definitions XML URN UML SQL http://www.ietf.org/rfc/rfc1766.txt Standards — Interface DefinitionLanguage —Interface — Standard Query Language Query —Standard theversions. latestpublished otherwise documents all cited be shall Unless indicated, Standards — eXtensible Markup Language Markup —eXtensible ResourceName —Uniform — Unified Modeling Language Modeling —Unified — Object Management Group Management —Object — data used to describe data. For example, if a tool can report an event with several associated several with event an report can tool a if example, For data. describe to used data — 1 2 Acronyms http://www.iso.ch W eb site, site, eb Page http://www.semi.org/ http://www.semi.org/ jn l jn 7 http://www.ietf.org/rfc/rfc2141.txt . In most cases, these terms are not are terms these cases, most In . . In most cases, these terms are not are terms these cases, most In . Document Document Number: Doc. Date: SEMI 5/29/2018 DRAFT LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and used for representing the UML fordocument. associations shownthis used representing in mechanism the of description a include must specification this of implementation an provides that standard adjunct Any mechanism. such any imply or specify not does and nature, in abstract is document This dependent. mentation 6.1.3 of themeanings.terms definition SEMItype for name of compilation the to Refer specification. the of part as included are or Terms, of Compilation SEMI the in defined 6.1.2.1 Attribute TableFormat Table 1 this in defined specification.classes 6.1.2 of UMLfordetailedthese to specification description conventions. diagrams. object, a the and Refer sequence state, 6.1.1 6.1 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This classes this in defined specification.between 6.1.4 association the of instance given a information. 1.4specification, 3.42.5.1forfor See the¶ further UML class. time one any at instantiated be can associations possible many of one only 6.1.3.1.2 1.4 UML the See specification. this 3.43.2.5and ¶further information. ¶ 3.48for specification, in significant not is symbol aggregation/composition the of semantics whole part- The class. composite one most at to belong instances target that indicate adornments diamond Closed classes. 6.1.3.1.1 default; by public are names role All details. symbols the visibility therefore used. arenot for 3.43 ¶ specification, 1.4 UML the See notation. of used, economy not for are associations Unadorned associations. specifying diagrams class all in navigability and multiplicities, 6.1.3.1 Document andNotationConventions Document Attribute Name UML Associations UML Tables Attribute ModelingUnified Language Association Tables Association Association Notation Association Form Some diagrams use the UML “XOR” constraint where applicable. An “XOR” constraint indicates that indicates constraint “XOR” An applicable. where constraint “XOR” UML the use diagrams Some aggregate among shared be may class target the of instances that indicate adornments diamond Open — Defines the data type of the attribute. The terms used to describe data types in this column are column this in types data describe to used terms The attribute. the of type data the Defines — — The table below provides an example of the tables used to list and describe attributes of attributes describe and list to used tables the of example an provides below table The — — The mechanism used for representing UML associations between classes is imple is classes between associations UML representing for used mechanism The — — The table below provides an example of the tables used to list and describe associations describe and list to used tables the of example an provides below table The — — This document uses the UML aggregation diamond adornment, role names, end names, role adornment, diamond aggregation UML the uses document This — roleName3 (UML) Class1 — This specification uses the UML conventions for representing conventions class, all for uses specification the —This UML 1 1 Association Notation Definition 1 1..* Figure 1 Figure Page Class3 {XOR} jn l jn roleName2 8 roleName4 1 1 0..* Class2 1 roleName1 Required Y N or Document Document Number: See below list Doc. Date: Form SEMI 5/29/2018 DRAFT - LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 4 OperationArgumentDefinitions Table 4 operations this arguments in interface defined for specification.describe 6.1.6 response. noassociated with the a receiver, to exchange, singlemessage the sender sends Fire-and-Forget a In receiver. a and sender a involve that messages are messages Fire-and-Forget initiator. the to back request that to message reply single a sends receiver the and receiver, the to message request single a sends initiator the exchange, Request-Reply a In receiver. a and initiator an involve that messages are messages Request-Reply specification. this 6.1.5.2 6.1.5.1 OperationDefinition Table 3 in defined specification. operations this interface 6.1.5 6.1.4.3 6.1.4.2 6.1.4.1 AssociationTableFormat Table 2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This an for 1 Information Related See uses. use some example cases.overview of of variety wide describing a for for provide mechanism can equipment standard the a that provide data and to information and environment, factory automated an into suppliers of variety 7.1.1 7.1 7 6.2.1 6.2 of themeanings.terms definition SEMItype for name of compilation the to Refer specification. the of part as included are or Terms, of Compilation SEMI the in defined 6.1.6.3 operation functionarguments,complete as not always successfully. indicatedid ‘out’ but arguments the that 6.1.6.2 6.1.6.1 Association Role Association Name Background Argument Motivation Terms Operation Argument Definition Table Definition Argument Operation TablesOperation Definition This specification is designed to help address the problem of integrating semiconductor equipment from a from equipment semiconductor integrating of problem the address help to designed is specification This type Class, Operation Form Kind Argument Type Operation Comments Definition Role Name Association — Specifies whether the argument is an ‘in’, ‘out’, or ‘error’ argument for the operation. ‘Error’ operation. the for argument ‘error’ or ‘out’, ‘in’, an is argument the whether Specifies — (RR)semantics messaging operation. areused semantics —Specifies in of OnlyRequest-Reply the the — Defines the data type of the argument. The terms used to describe data types in this column are column this in types data describe to used terms The argument. the of type data the Defines — — This specification uses the terms “class” and “type”, interchangeably to refer to a UML refer class. to a “class” andto uses“type”,interchangeably specification the —This terms — Specifies the name of the argument. name —Specifiesof the the — Describes the function orof purpose the —Describesassociation. the function — Specifies the name of the theoperation. name —Specifies — Any additional comments or notes regarding the association. —Anycommentsor additional notes regarding — The name of the association role being thespecified. association name role of —The Description — The table below provides an example of the tablesdescribe the providesused list ofto tableanand below the example —The — The table below provides an example of the tables used to list and list to used tables the of example an provides below table The — Description Page Definition See list See below jn l jn 9 Kind See below list See list See below Form Document Document Number: Doc. Type Date: Comments SEMI 5/29/2018 DRAFT LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and only as an overview. For the detailed specification of the corresponding classes, refer to specification therefer corresponding classes, §10. overview.Forthe detailed of asonly an section this in provided is concept metadata each of purpose the of description brief A Model. Equipment Common 8.1.1 equipment-specific 8.1 common use and discover also 8 can example, for types, equipment requiring without manual and assistance.configuration data the understand specific that applications of supplier-provided other details or requiring without monitoring, automated, health be can Diagnostics, information this intervention. of human usage and discovery that so data other and models state 7.1.4 objectives (diagnostics, control,of process troubleshooting, etc.). variety a for collection data perform can they so metadata equipment to referring be will users these cases, many In etc. exceptions, events, items, data available configuration, equipment browsing and understanding of purposes the 7.1.3 equipmentor bea may that not in specified SEMIstandard.their to unique information communicate to suppliers allow to features extensibility provides and applications, software 7.1.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This E120 SEMI link that classes the ¶ node in they produce. Equipment descriptionaredefined that classes ObjTypes defines specification this structure; nodes equipment equipment physical are the that classes describe the defines to E120 SEMI used structure. equipment physical the in node any with ObjTypes E39 SEMI 8.1.2.1 8.1.2 Overview Equipment Metadata Equipment Figure 2 shows the concepts that are included in this specification and their relationship to the SEMI E120 SEMI the to relationship their and specification this in included are that concepts the shows 2 Figure standardized of advantage take to written applications to useful be to designed also is metadata Equipment for users end human to interface an provide that applications to useful be to designed is metadata Equipment the equipmentto features communicate of neededto the informationis that essential defines specification This Equipment NodeDescription Equipment hsseiiaindfnscassta rvd a oascaeeet,ecpin,prmtr,adand parameters, exceptions, events, associate to way a provide that classes defines specification This (that is, any derivative of the E120 Nameable class) Nameable E120 the of derivative any is, (that Organization Organization MetadataConcept of Figure 2 Figure Page jn l jn 10 with the events, exceptions, parameters, and parameters, exceptions, events, the with 10.3 . Document Document Number: Doc. Date: SEMI 5/29/2018 DRAFT LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and ¶ in defined is description ObjType SEMI supported. not is services ObjType of Description types. and Parameters sameareused usingthat describe to classes ObjType describe state to the machines. attributes aredescribed are used that classes same the using described are events and machines state ObjType SEMI equipment. the by implemented 8.1.6.1 8.1.6 ¶ in defined is description machine State occurs. event specific a when reporting for available are that Parameters the describe to SEMI- any describe used be can that to classes defines also specification used This machine. state supplier-defined be any or machine state can defined classes These equipment. the by implemented are that events) and transitions 8.1.5.1 8.1.5 ¶ ¶ in defined is description type Parameter microfarads. of units in is value parameter’s the that indicate to how as well as itself, unit microfarad the describe to used be can specification this microfarads, in capacitance a represents Parameter some if example, For has. type data that of value a that units the describe to the describe used to used be be can that classes can defines specification this that types, data numeric For classes type. data that provides of structure specification this Booleans, of array an and string, a integer, an of consisting type data structured a have that Parameters several defines equipment the if example, For Parameters. 8.1.4.1 8.1.4 (e.g., produce can equipment the definedthat ¶ Parameter E39ObjType,in SEMI description exception. defined equipmentnode,is or an an by an be only data can Parameters of Parameter. a type by represented be Any can equipment) parameter. metrology on a results measurement and by variables, represented data be constants, equipment all of can concepts E30 variables SEMI status the example, For type. data a as represented be can that concept any model to used be can Parameters “Parameters”. as variables such all to refers and equipment, 8.1.3.1 8.1.3 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 9.1.1 9.1 9 in ¶ described is interface This installation. equipment specific a from available operations of collection a by provided is metadata 8.2.1 8.2 equipment- or alarm E30 SEMI any represent can clients.Exception ¶ reported to in description defined exception is be can supplier-defined that An exceptions. as report and detect can equipment 8.1.7.1 8.1.7 10.8 10.5.5 Interfaces EquipmentInterfaces Metadata for Managing Equipment Metadata Manager Equipment Equipment MetadataAccessing . SEMI and Machine State andUnitsType Parameters Figure 3 shows the interface used to access equipment metadata descriptions. access to equipmentmetadata interfaceFigure used 3shows the to Access factory. a within installation equipment unique each with associated directly is metadata Equipment Exceptions . This specification defines classes that can be used to describe the existence of error conditions that the that conditions error of existence the describe to used be can that classes defines specification This are that ObjTypes E39 SEMI any describe to used be can that classes defines specification This corresponding the (and machines state the describe to used be can that classes defines specification This represent to equipment the on used units and types data the describe to way a provides specification This the by provided are that variables any describe to used be can that classes defines specification This 10.8 Objects 9.1 . . Events Page jn l jn 11 10.4.11 , and units description is defined in in defined is description units and , Document Document Number: 10.7 Doc. . Date: 10.4 SEMI . 5/29/2018 DRAFT LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 5 EquipmentMetadataManagerOperationDefinition Table 5 9.1.2 Note: Figure correction.] 3waseditorial [Editor’s modifiedwithan reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 9.1.2.2.1 by the equipment. provided 9.1.2.2 GetUnitsArgumentDefinitions Table 6 9.1.2.1.1 equipment. 9.1.2.1 GetEquipmentStructure GetExceptions GetSEMIObjTypes GetStateMachines GetTypeDefinitions GetUnits units NotifyOnRevisions GetLatestRevision GetEquipmentNodeDescriptions Argument EquipmentMetadataManager OperationsEquipmentMetadataManager GetTypeDefinitions GetUnits GetUnits Operation GetTypeDefinitions Operation Operation — Upon receiving this request, the equipment shall return all units metadata provided by the by provided metadata units all return shall equipment the request, this receiving Upon — All defined the units for equipment. NotifyOnRevisions (in: enable) GetLatestRevision () Revision: GetEquipmentNodeDescription (in EquipmentNodeId) : NodeDescription : ] [ GetEquipmentStructure () : Equipment[ ] GetExceptions( ) : Exception ] [ GetSEMIObjTypes( ObjType ): ] [ GetStateMachines( StateMachine ) : ] [ GetTypeDefinitions( ): TypeDefinition[ ] GetUnits() Unit[ : ] — Upon receiving this request, the equipment shall return all type definition metadata definition type all return shall equipment the request, this receiving Upon — Arguments made. that Request the notify requestor equipment the when to metadatachanges the are the Retrieve last atand whichdate time equipment the metadata revised.was allRetrieves requestednode equipment description metadata. allRetrieves equipment metadata structuralprovided the by equipment. allRetrieves exception metadata by equipment.provided the allObjTypesRetrieves SEMI metadata by provided the equipment. allRetrievesmetadata state provided machine the by equipment. allRetrieves type provided the definitions by equipment. allRetrievesprovided unit the metadata by equipment. Description Interface for Accessing Equipment Accessing for Interface Metadata Arguments EquipmentMetadataManager < Doc. Date: SEMI 5/29/2018 Type DRAFT RR RR RR RR RR RR RR RR RR LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and the equipment. 9.1.2.5 GetSEMIObjTypes ArgumentDefinitions Table 9 9.1.2.4.1 bythe equipment. provided 9.1.2.4 GetStateMachinesArgument Definitions Table 8 9.1.2.3.1 bythe equipment. provided 9.1.2.3 GetTypeDefinitions Argument Definitions Table 7 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This equipment. the for defined metadata description node equipment 9.1.2.7 GetEquipmentStructureArgument Definitions Table 11 9.1.2.6.1 bythe equipment. provided metadata 9.1.2.6 GetExceptionsArgument Definitions Table 10 9.1.2.5.1 stateMachines typeDefinitions equipmentStructure exceptions objTypes Argument Argument Argument Argument Argument GetEquipmentStructure GetExceptions GetSEMIObjTypes GetStateMachines GetEquipmentNodeDescriptions GetEquipmentStructure Operation ArgumentsGetEquipmentStructure OperationGetExceptions Operation GetSEMIObjTypes OperationGetStateMachines the equipment. All machine state metadata provided by equipment. All definitions by type provided the the equipment.the SEMI metadataAll ObjType provided by — Upon receiving this request, the equipment shall return all exception metadata provided metadata exception all return shall equipment the request, this receiving Upon — provided by equipment.provided the equipment All structural metadata equipment.the exception All metadata by provided — Upon receiving this request, the equipment shall return all state machine metadata machine state all return shall equipment the request, this receiving Upon — — Upon receiving this request, the equipment shall return all OSS ObjType metadata ObjType OSS all return shall equipment the request, this receiving Upon — — Upon receiving this request, the equipment shall return all equipment structural equipment all return shall equipment the request, this receiving Upon — Description Description Description Description Description Arguments Arguments Arguments — Upon receiving this request, the equipment shall return all requested all return shall equipment the request, this receiving Upon — Page jn l jn Kind Kind Kind Kind Kind 13 out out out out out Parameter list elementsUnordered of type described in described ¶ list elementsUnordered of Exception, type described ¶in Unordered of list elements type of StateMachine, represents the as whole. equipment a SEMI type or that E120 Link EquipmentElement, Structured adata, of type from derived the If the request includes unrecognized equipment unrecognized includes request the If provided,this shall empty. list be described ¶in Unordered of list elements type of SEMIObjType, TypeDefinition, TypeDefinition, described SEMI in E138. 10.7 10.8 10.8 . . . no ObjTypes. If SEMI are Form Form Form Form Form Document Document Number: Doc. Date: SEMI 5/29/2018 DRAFT LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 13 NodeDescriptionResultAttribute Definition Table 13 9.1.2.8.1 request. with provided equipmentnode anythe been id’smay unrecognized that have and 9.1.2.8 GetEquipmentNodeDescriptions Table 12 9.1.2.7.1 unrecognized All identifiers. recognized for descriptions node be shall the returnedresponse. with identifiers only return shall equipment the identifiers, node reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This the in change no is the changed. latestrevisionthere but is date/time metadata, available which in dates, revision false generate not shall equipment The memory. non-volatile in change recent most the of time and date the store shall equipment The changed. were contents metadata the which at 9.1.2.9 NodeDescriptionResultAssociationDefinition Table 14 9.1.2.8.2 equipmentNodeDescriptions equipmentNodeIds nodeDescriptions unrecognizedIds Association Role Association Name Attribute Name Attribute GetLatestRevision NodeDescriptionResult Argument NodeDescriptionResult Association DefinitionNodeDescriptionResult Association Table DefinitionNodeDescriptionResult Attribute Operation ArgumentsGetEquipmentNodeDescriptions unrecognizedIds NodeDescriptionResult provided in original provided the request. unrecognizedAny equipment identifiers node The requested node metadata. equipment description — Upon receiving this request, the equipment shall return the most recent date and time and date recent most the return shall equipment the request, this receiving Upon — metadata. equipment descriptionAll node node equipment descriptions. id’s the The of requested — This class provides the list of requested EquipmentNodeDescription elements EquipmentNodeDescription requested of list the provides class This — Interface for Accessing Equipment Accessing for Interface Metadata Description Definition 1 nodeDescriptions Definition Argument Definitions Figure 4 Figure Table Page 0..* jn l jn 14 Kind out in EquipmentNodeDescription GetEquipmentNodeDescriptionsrequest. equipment identifiernode provided the in List text,eachof entry to unrecognized equal an Structured data typeStructured of NodeDescriptionResult. node return descriptions all nodes.for equipment an list provided,the2). If empty is equipment shall valueLocator (see E120,Related SEMI Information of List text, each equal a SEMI entry to valid E120 one corresponding one node description. the in request, the shall only equipment return node identifier same more than appears once recognized node the equipment identifiers. If return descriptionshall node metadata allfor EquipmentNodeDescription.The equipment elementsor of Zero more type Form Form Comments Document Document Number: Doc. Date: SEMI 5/29/2018 DRAFT LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and invoke this operation in notifications. operation re-enable invoke orderto this communications must enabled client the case, an this In notifications. such in receive to accessible is The longer no is client equipment the disabled. that determines the and state is if client client given a for a notification for disable notifications automatically revision shall equipment for behavior default The notifications. receive to order 9.1.2.10.2 NotifyOnRevisions Argument Definitions Table 16 9.1.2.10.1 equipment The client. the by non-volatile thememory. client’sin preference store shall provided arguments operation the on based client, requesting the to notices revision 9.1.2.10 GetLatestRevisionArgument Definitions Table 15 9.1.2.9.1 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 9.1.2.11.1 9.1.2.11 Note: Figure 5was[Editor’s deleted.] duplicate ignore shall equipment The so. doing currently is it if client, same fromclient(seeLimitations, § requests the enable/disable the to notifications revision sending 9.1.2.10.4 its when opportunity first the at clients a interested permits. status communication in the is notify equipment shall the equipment while detected the is state, change communications the disabled If operation. the invokes client the the with after starting detected, change is detected metadata the first in change a whenever so) doing already not is it (if client the notifying 9.1.2.10.3 ion enable revision Argument Argument notificat MetadataRevision NotifyOnRevisions GetLatestRevision Operation fte‘nbe ‘enable’ the If ‘enable’ the If ‘enable’ the with operation this invoke must Clients Operation ArgumentsNotifyOnRevisions MetadataRevision Attribute Definition MetadataRevision Specifies client’sthe notification preference. metadatawas changed. The recent datewhichmost time at and the — This class describes the most recent metadata revision date and revisiontime. class date recentmetadata —This describesthe most trbt ftentfcto notification the of attribute trbt ftentfcto notification the of attribute — Upon receiving this request, the equipment shall either enable or disable metadata disable or enable either shall equipment the request, this receiving Upon — Description Description Arguments revisionDate MetadataRevision Metadata Revision Table Figure 5 Figure Page argument provided is ‘false’, the equipment shall cease shall equipment the ‘false’, is provided argument argument provided is ‘true’, the equipment shall begin shall equipment the ‘true’, is provided argument jn l jn Kind Kind 15 out in 3 attribute of the notification the of attribute ). Structured data typeStructured of NotificationRequest,described preference preference to be of is not notified metadata revisions. to notified metadatais be of revisions.If false, the ¶ in MetadataRevision, in described ¶ specification restrictions the 8601 within ISO Implementations additional may specify formatting Text,formatted according ISO to 8601. 9.1.2.12 . . Boolean.If true, the preferenceclient’s Structured d Document Number: Document Form Form ata of ata type argument set to ‘true’ in ‘true’ to set argument Doc. 9.1.2.11 Date: 4729 . 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and notifications. 9.2.1 9.2 Table 18 9.1.2.12.1 9.1.2.12 Note:figures.] FigureRenumber 6was[Editor’s deleted. succeeding Table 17 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This the interface. EquipmentMetadataManager of operation “NotifyOnRevisions” the of invocation prior a through notified be to requested has client the if metadata, 9.2.2.1 MetadataClientOperationDefinition Table 19 9.2.2 Note: Figure 7was[Editor’s MetadataRevised.] modifiedtothe definition match revise of enable revisionDate MetadataRevised Attribute Name Attribute Name Attribute Metadata 7 MetadataClient MetadataRevised shows the interface and argument data types that clients must support in order to receive metadata revision metadata receive to order in support must clients that types data argument and interface the shows NotificationRequest MetadataRevision Attribute Definition NotificationRequest Attribute Definition NotificationRequest Attribute DefinitionNotificationRequest Attribute Table Operation Client notification. client’s The preference revision for metadata has equipment changed. most The recentat and date whichtime the Operations h qimn hl ed ti oiiain weee t dtcs a cag n the in change a detects it whenever notification this send shall equipment The — — This class describes the notification preferences of client. the metadata thepreferences notification class —This describes Notifies the Notifies client the that recently metadata has changed. Definition Definition MetadataRevised( revision)in : Metadata Client Interface enable NotificationRequest Notification Request MetadataClient < Form Form Document Number: Document Doc. Date: 4729 5/29/2018 FF Type DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 10.1 10 determine to clients for means a as provided strictly is equipmenthas undergone the change.which It changed. has metadata node’s equipment root the that 9.2.2.2.2 Table 21 9.2.2.2.1 changed. was metadata 9.2.2.2 MetadataRevisedArgument Definitions Table 20 9.2.2.1.1 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Events, the of independent are node equipment given a with associated other with associated ObjTypes, equipmentnodes. andExceptions, Parameters Events and ObjTypes, Exceptions, Parameters, All description. the in included are that Parameters and ObjTypes, Exceptions, Events, all of source the as acts node specified the that indicates descriptions these Providing hierarchy. equipment the of node) (or element 10.3.1.1 10.3.1 10.3 to practical and necessary is it which for equipment their of support objectives. least)technical control, utilizationprocess (at and tracking, facilitate elements those of model a provide shall Suppliers 10.2.1 10.2 maintaining of equipmentmetadata.aspect critical a is factory the to available and up-to-date kept are metadata equipment of aspects all that Ensuring factory. opportunity first the at or change, the of the into introduction its after time equipment the of reconfiguration includes This permits. status communication its when the at client interested each notify shall equipment the 9.1.2.10), ¶ and 9.1.2.9 ¶ (see notification revision requested metadata have clients the If update change. the shall of time equipment the the at accordingly Model, description Equipment Common SEMI the by or document this of 9.1.2.9 ¶ 10.1.1 newRevision Equipment revision Association Name Role Argument EquipmentMetadata Management of Equipment Metadata of Management Equipment Equipment Equipment NodeDescription Equipment Model. Equipment Common SEMI the to according described be shall structure equipment physical The in classes the using described information any to change a in result changes configuration equipment When RevisionNotice Figure 8 shows how to describe the parameters, events, objTypes, and exceptions available from an from available exceptions and objTypes, events, parameters, the describe to how shows 8 Figure RevisionNotice Association Definition RevisionNotice Association Equipment Association Table Definition RevisionNotice Operation Arguments MetadataRevised Nodes Structure change was change detected the by equipment. date The at and the which time metadata — Providing the root equipment node with a RevisionNotice should not be interpreted to mean to interpreted be not should RevisionNotice a with node equipment root the Providing — — This class provides the date and time of any metadata revision, and the equipment whose equipment the and revision, metadata any of time and date the provides class This — The and whichdate time metadataat the was revised. a whole. The equipment root node represents equipmentthat as the Description Definition Page in jn l jn Kind 17 described in described ¶ specification within ISO restrictions the 8601 mayImplementations specify formatting additional accordingText, formatted to 8601. ISO . Structured data typeStructured of RevisionNotice, 9.2.2.2 derived from SEMI type derived the E120 and one One only element a of type MetadataRevision. data,of Structured type EquipmentElement. . . Document Number: Document Form Comments Doc. Date: 4729 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 22 EquipmentNodeDescriptionAssociationDefinition Table 22 from derived class concrete 10.3.1.3 any be may elements Equipment node. equipment given Model. Common the asSEMIE120specification, Equipment in defined Nameable, (¶ a SEMIObjType for 10.8.6), provided (¶ be StateMachineInstance shall the through achieved is (¶ Exception This source. this which the for SimpleEvents is and node ObjTypes, Exceptions, Parameters, StateMachineInstances, the describe to and 10.3.1.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This settings, configuration equipment variables, control process are Examples value. information other or utility ¶ in described 10.4.1 10.4 stateMachineInstances simpleEvents node parameters exceptions objTypes Association Role Association Name Parameters Parameters can represent any concept that can be described by any of the primitive or composite types composite or primitive the of any by described be can that concept any represent can Parameters EquipmentNodeDescription AssociationEquipmentNodeDescription Definition EquipmentNodeDescription StateMachineInstance 10.7 10.5 SEMIObjType 0..* ,Prmtr( (¶ Parameter ), 0..* . A parameter can generally be thought of as a named, typed field that has a specific meaning, specific a has that field typed named, a as of thought be generally can parameter A . by equipment this node. An list typed unordered of parameters provided reported this by equipment node. An list exceptionsunordered of that be can are associated this node.with equipment An list the unordered thatof SEMIObjTypes that supportedare by equipment this node. An list state unordered of machine instances equipment equipment node. statemachines)that be can reported the by An list simpleEventsunordered of (without The node equipment being described. stateMachineInstances objTypes 10.4 — This class is used to identify a specific element of the equipment hierarchy,equipment the of element specific a identify to used is class This — 1..* ) and SimpleEvent (¶ 10.10) classes. Only one EquipmentNodeDescription one Only classes. 10.10) (¶ SimpleEvent and ) Definition Exception Describing Equipment Nodes 0..* EquipmentNodeDescription 1 exceptions Figure 8 Figure Page 1..* jn l jn 18 Table 1 SimpleEvent 0..* ¶ ¶ 10.10. List elements typeof of SimpleEvent,described in Nameableclass. Element a of type from SEMI derived the E120 unique equipmentnodes.across node be shall unique.Parameter need names not be 10.5.4 standards beshall typed named and according ¶ to Any parameters represent that variables SEMI from List elements typeof of Parameter,described in ¶ List elements typeof of Exception in described ¶ ¶ List elements typeof of SEMIObjType,describe in events which Parametersfor no are available. for eventeach that node the can generate, including described ¶10.8.6.in There be shall one provided map List elements typeof of StateMachineInstance, 10.8.5 1 ¶and simpleEvents . 1 10.4.10 .Each forparameter name this Comments CEM:Nameable 0..* Parameter Document Number: Document node parameters Doc. 1 Date: 4729 5/29/2018 10.8.5 DRAFT SEMI 10.7 10.4 4729 . ), . LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and aaees ye ad uis ifrain i rvdd truh te Prmtryeeiiin rfre o b the by to referred ParameterTypeDefinition the through provided is ¶ described class.in is ParameterTypeDefinition DefinedType information units and Type parameters. 10.4.2 (¶ node equipment an by defined be only can 10.3 Parameters etc. variables, data maps, wafer results, measurement reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This technical control, process utilizationand support objectives. tracking, least) 10.4.3 the by replaced was ParameterTypeDefinition to association attribute; the to association UnitswastypeName added.] The modified. was 9 Figure Note: [Editor’s ), a SEMIObjType ), (¶ Suppliers shall provide a model of those Parameters for which it is necessary and practical to facilitate (at facilitate to practical and necessary is it which for Parameters those of model a provide shall Suppliers 9 shows how to describe named, typed parameters with units, constraints, and associations with other with associations and constraints, units, with parameters typed named, describe to how shows description typeName parameterName 1 Parameter 10.9 classification ), or an exception (¶ or (¶ an), exception associatedParameters constraints units Describing Typed Parameters 10.7 Figure 9 Figure Page ). jn l jn 19 10.5.1 0..* . 1 0..* 0..* description parameter description ParameterClassification AssociatedParameter definition description name Constraint Units Document Number: Document 0..* Doc. Date: 4729 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 24 ParameterAssociation Definition Table 24 10.4.5 ParameterAttribute Definition Table 23 10.4.4 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This AssociatedParameter Attribute Definition Table 25 10.4.7.1 is relationship the of meaning The class. this Parametertypes associated ¶ viadescribed the in classification an by referenced parameter being Parameter the the to that canattributed to More thebe theAssociatedParameterclass. meaning description specific in attribute of documented way indicates some this created, in is related association is an defined such If hierarchy. equipment the in anywhere 10.4.7 relationship. the meaning ofof the 10.4.6 units classification typeInformation associatedParameters constraints description typeName parameterName Description Association Role Association Name Attribute Name Attribute Attribute Name AssociatedParameter description human-readable a and parameters, associated more or zero of list a provide can parameter Each Definition Association Parameter AttributeParameter Definition AssociatedParameter Attribute Definition Attribute TableAssociatedParameter name of the of Parameter. human-readableA description the or of purpose usage E138.SEMI for Parameter.used this TypeDefinition defined is in to typeNameRefers the attribute the of TypeDefinition thename of The parameter. parameter the and parameter by association.identified this of relationshipDescription the between defined the Specifies units thethe for parameter. Describes the of Parameter.nature the type units this and of parameter. Refers a to type that thedefinition describes are related this to parameter. List other of parameters the that in system with parameter.this A of restrictionsdescription any associated — This class can be used to describe a generic association with another parameter another with association generic a describe to used be can class This — Table Definition Table Definition Definition Page jn l jn 20 constraints if more thanif constraints one more described. is 26.Table of data, List structured type in of Constraint, described is selectedis (see definition the class the of Units below). a of or set available from the units which reported units will eitherThis contain a fixed specification single units ParameterClassification,described ¶ in and one One only element any derivedof type from ParameterTypeDefinition. and one One only element type of in described ¶ of data, List structured type of AssociatedParameter, 10.4.11 . Logic Logic Required 10.4.7 Logical Required Y Y Y . Y Comments AND apply semantics between Document Number: Document Text. Text Text. Text. Doc. Form 10.4.11.2 Date: Form 4729 5/29/2018 . DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and specifies either a single Unit or a set of available units with a means27. Figure set select.10and ofunits ato orTable available a singleUnit See either a with specifies reported. aunitsThe class have selectionmayUnits which be of in the value parameters Other specification. a have singlefixed parameter. classunits for —This usedparameters describe10.4.8 Units is theSome to units the Definition AssociatedParameter Association Table 26 10.4.7.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This using configuration this in defined the section. classes their and units available the describe shall it units, configurable support does equipment the if howeverE125; SEMI with comply order to inunits configurable support to required not is equipment The 1: NOTE different a when used are units Parameter which control to The Parameter Parameters. such the of configuration values available, the communicating unit units of non-transient set configurable one independently support each For shall equipment units. of set one than more in values Parameter have which Parameters for Units the available specifies class – This UnitConfigArray 10.4.8.1 UnitsAssociationDefinition Table 27 Note: beenadded. Figure Figure published 10has may The in[Editor’s berenumbered the specification.] parameter associatedParameters availableUnits unitSymbol Association Role Association Name Association Name Role AssociatedParameter Association Definition Association Table AssociatedParameter s unit configurationunit shall be a string-based enumeration enumeration string-based a be shall Units 0..* UnitConfigArray element. UnitConfigArray composition A association a of single are allowed They not to together. exist availableUnits shall provided.association be specification. unitSymbol the Either or which Aggregation refers a Unit to single that are that associated this with parameter. AssociatedParameter class. parameterThe that the of is subject the unitSymbol OR UnitConfig availableUnits 1 . Figure Definition Definition 1 (see ¶ 10.5.4.1.3) ¶ (see Unit 13 A of list parameters UnitConfigArray 10 Units Class ParameterType Figure 10 Figure Page shows the classes used to describe configurable classes tounits. shows used the describe jn l jn 21 0..* unitSymbol configParameter . Each value in the enumeration shall correspond to correspond shall enumeration the in value Each . type definition definition type SEMI E138. Referencesone of element type as in Unit defined Parameter. Unordered of list structured type data, of Exactly instanceone of Parameter type 1 unitConfig Parameter of of 1..* each each Comments Comments Document Number: Document such unit configuration unit such setting the ability to provide to the ability UnitConfig Doc. Date: 4729 0..* . . 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 29 UnitConfigAttribute Definition Table 29 type support the that shall thedescribedParameter configurablein be units to of are declared Parameter a If 10.5.2.11 its changedbythedescribing Configuration classification. Parameter when units the Parameters to whose are refer to 10.4.11.5.1) ¶ (see attribute “affectedParameters” the use a to required not is it in class, UnitConfig the by described appearing units enumeration possible configurable the to unit 3 available an from mapping with the Because 10.5.2.10 the type of numeric each for every instances—one Parameter. from configuration available the unit settings case, UnitConfig that 3 provide In would units. ParameterTypeDefinition English and centimeter-gram- (cgs), (mks), meter-kilogram-seconds seconds between select to Parameter configuration unit single a provide the Figure in forParameter. class of –This units representsthea available 10.4.8.2 UnitConfig one UnitConfigArray AssociationDefinition Table 28 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This ConstraintAttribute Definition Table 27 10.4.8.1 similar usage anyonthe the valueparameter. other restriction or or of reporting, off-tool for collected be can parameter the which at rate the parameter, a of values valid the on limitations 10.4.8 publication.] following Note: The figures sections,[Editor’s will tables, and asappropriate for berenumbered UnitConfigAssociationDefinition Table 30 setting configParameter unitConfig definition description name unitSymbol Association Role Association Name Role Association Name Attribute Name nmrto enumeration Attribute Name Constraint Constraint Attribute Definition 13 10 ) is used to provide a mapping from each possible unit choice for a given numeric Parameter numeric given a for choice unit possible each from mapping a provide to used is ) config — Represents a constraint associated with this parameter. A constraint can be used to describe to used be can constraint A parameter. this with associated constraint a Represents — The definition the The of constraint. constraint. description the A of purpose meaning the or of thename of The constraint. See configParameterSee in 28. Table strings a shallsetting within UnitConfigArray be unique. the of associated (via association). Unit unitSymbol The attribute This contains string represents a that the selection aaee Parameter specification. which Aggregation refers a Unit to single selectedUnit for reporting. of “setting” the that the UnitConfig represents type.Parameter The value Parameter selects the which Aggregation refers a elementto of single composition elementsA of type. UnitConfig TypeD d efinition includes numeric types with configurable units, then all Parameters that Parameters all then units, configurable with types numeric includes efinition nmrto enumeration Definition Table Definition Definition Definition setting that selects that unit. For example, the equipment may equipment the example, For unit. that selects that setting Page jn l jn 22 Configuration UnitConfigArray. the of elementsset UnitConfig for this values equal the attributesto of “setting” of each enumeration type with definition enumeration The referenced shallParameter have string-based a association Figure in 9). availablefor Parameter the the (via units Each representsUnitConfig one the of Units shall reported.be configParameterabove),then referenced the Unit When UnitConfig selectedthe is via setting its (see Required Y Y Y config Required Text,formatted according ¶ 10.4.9.to Text. Text. Parameter setting that selects it is it selects that setting Parameter Y The UnitConfig class (shown UnitConfig class The Comments Comments Document Number: Document TypeD Text. Form Doc. d Date: efinition. Form 4729 5/29/2018 Type DRAFT SEMI 4729 to LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and shall be used represent to the be multiplier.shall ‘n’ variable the period, reporting reporting fundamental a of multiple valid integer an express to on used is definition constraint constraint the If the describe seconds. in be shall period to reporting the to refer that necessary constants any for division constants time The Parameter. the or for periods operators, terms, of the combination legal of any definition The 10.4.9.3.2 “ReportingPeriod”. named provided be must constraint a consideration, shall theform: following ReportingPeriod constraint take a is this SQL the of subset the using convention 10.4.9.3.1 10.4.9.3 using than 200may 100orbe theSQL following greater described benot less than 10.4.9.2 in definitions.in supported are not constraint discussed is syntax operators IS complete and BETWEEN, IN, (the the Specifically, constraints. syntax define to used WHERE be shall R2-1) SQL § Information, Related the of subset a specification, this of purposes the For constants. with It orhas of ofmoretheform. consists following that values one comparisons The values. Parameter on constraints Specifically, application. this to suited well algebra relational of application commercial well-documented a is (SQL) Language for a 10.4.9.1 10.4.9 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This ¶ in described mapping type The standard. corresponding the in found as convention case same the using spelled, is itas exactly attribute or variable the of name the to equal be shall class Parameter the of attribute name the standard, 10.4.10.1 10.4.10 Information,Related §R4-1. in provided are examples Additional seconds. 60 and seconds 0.01 between value continuous any is “Temperature” 10.4.9.3.3 propositional formula 10.5.4 propositional formulas; however, this syntax is not commonly used for commercial applications. Standard Query Standard applications. commercial for used commonly not is syntax this however, formulas; propositional Constraint shall determine the type determineassigned shall the Parameter. to the Describing SEMI Attributes and/or Variables Describing Standard Describing Reporting Frequency Reporting Constraints Describing may that point set temperature a represents that “TemperatureSetpoint” named Parameter a example, For as A onthevalues valid constraint constraints documented ofis describe restrictions Parameters. Parameter If the supplier is using a Parameter to represent variables or attributes that have been defined in a SEMI a in defined been have that attributes or variables represent to Parameter a using is supplier the If o xml, te cntan eiiin blw seiis ta h upre eotn eid for period reporting supported the that specifies below definition constraint the example, For Here, specific a acquisition, data for reported be can Parameter given a which at rates the describe To h ytx o h the of syntax the WHERE parameterName Definition WHERE , which evaluates TRUE with valid parameter values. Relational algebra defines a rich syntax a algebra parameterRelational defines rich valid with TRUE values. evaluates , which WHERE Temperature.ReportingPeriod >.01 AND Temperature.ReportingPeriod <60; >.01 Temperature.ReportingPeriod AND Temperature.ReportingPeriod WHERE TemperatureSetpoint >100 TemperatureSetpoint propositional-expression[nested-propositional-expression]; is the name of the Parameter to which the constraint applies, and and applies, constraint the which to Parameter the of name the is WHERE WHERE parameterName.ReportingPeriod WHERE lue (f te SL SQL the (of clause clause of the SQL SQL the of clause clause described in ¶ 10.4.9.1 shall be used. For Parameters where Parameters For used. be shall 10.4.9.1 ¶ in described clause Page jn l jn 23 AND TemperatureSetpoint <200; TemperatureSetpoint SELECT SELECT comparison statement is a propositional-expression a is statement ttmn) i utbe fr describing for suitable is statement) WHERE ; Document Number: Document clause. Doc. Date: comparison 4729 5/29/2018 DRAFT SEMI 4729 is LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and primary classifications, read-only and read-write, that specify whether or not the parameter’s value can be set by an by set be can value parameter’s the not or whether specify that read-write, and read-only classifications, primary 10.4.11.1 10.4.11 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to two is page this on material No program. Standards International SEMI the of document draft a is into This divided are under valid parameters not are Non-transient which Restricted, and time, collection. any at data values valid hoc provide will ad which Unrestricted, for categories: or for trace) specified be (data can parameters reporting non-transient Only periodic time. any at collection for available are Parameters Non-transient valid. be always will value its Each events/exceptions, those for collected When value. exceptions. or valid events certain for a contain always only collected be will can Parameter transient A value “Non-transient”. or collected “Transient” either as designated be that can parameter whether and collection for available is Parameter 10.4.11.3.1.1 10.4.11.3.1 ParameterClassificationAttribute Definition Table 28 10.4.11.3 10.4.11.2 the refineParameter’s the todescription function. of used further be can that subclasses several are there read-write, If data. as classified is Parameter the read-only, If entity. external isTransient Attribute Name Attribute Classifying ParameterClassification Attribute DefinitionParameterClassification Attribute Table ParameterClassification 10 isTransient h srnin trbt f te Prmtrlsiiain cnes ifrain aot we the when about information conveys ParameterClassification the of attribute isTransient The AssociatedParameter shows the classification scheme used to describe the characteristics of a Parameter. There are two are There Parameter. a of characteristics the describe to used scheme classification the shows affectedParameters 0..* Parameters Specifies whetherSpecifies the value Parameter’s is for available under certainunder conditions. valueParameter’s is accessible only or meaningful always will contain valid a value. atcollection all and the times whether collected value 0..* associatedParameters Control 1 — This class is the abstract base class for all Parameter classifications. classParameter all classclassifications. base —This thefor abstract is ed rite ReadW Definition Parameter Classifications Figure 10 Figure Configuration Page Whether not or the 1 isTransient ParameterClassification jn l jn 24 Parameter 1 1 classification values. ¶ See “Transient”,“Restricted”,and “Unrestricted”. consist the values:shall of following Boolean. 10.4.11.3.1 further of for definition these Enumerated string.TheEnumerated enumeration ReadOnly Data Document Number: Document Form Doc. Date: 4729 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and settings for such Parameters may influence the values or dynamics of other Parameters. For example, Parameters example, For Parameters. other of dynamics or values the influence may Parameters such for settings 10.4.11.4 of cases equipmentcommunication is equipmentmalfunction. for time valueexcept valid available, atthe any that a can that non-transient report a Parameter –Aas is Parameter “Unrestricted” designated 10.4.11.3.1.3.2 Unrestricted provided in descriptionthe inuser. to field be(preferred)or shall documentation definition included the the suppliertherestrictedParametervalid/invalid. conditions define is shall This which The enabled. under configuration only valid Parameters is might thechamber.a process Other setting in be is when a wafer when wouldbe only valid temperature a the measuredchamber substrate for process Forexample, conditions. certain is that is non-transient under valid –Aasa Parameter Parameter “Restricted” designated 10.4.11.3.1.3.1 Restricted data reporting.Parameter means for collection atavailable anyvia befor any shall time non-transientavailable Parameter A “Non-Transient”. be “Restricted”orconsidered as to is “Unrestricted” either designated –A10.4.11.3.1.3 Non-transient Parameter of cases equipmentmalfunction.for value, valid Parameterexcept contain shall reported,a Sectiona When metadatatransient in 10.7). (see included the in set designated arefixed the Exception Exception and parameters 10.8.6). (seeSection StateMachineInstances the various with associated Eventsby arespecified the EventToParameterMaps Exceptions. The Events and in with only “Transient” designatedbeassociation shall certain reportable –Aas Parameter 10.4.11.3.1.2 Transient event the this specification.of time the at meaningful be only may scope the beyond is metadata using Parameters value transient for lifecycle the describe to mechanism a Providing Parameter’s occurs. the Or, reported. was event the which for state target the in is equipment the while meaningful be only may value its event, specific a with reporting for available is Parameter transient a If states. or state specific a in is ObjType) E39 SEMI (or equipment the when available only is that data provide may Parameter The ObjType. the of lifecycle the by determined is accessibility its case which in ObjType, E39 SEMI transient a of attribute an represent may Parameter a Additionally, transient. are values” “data E30 SEMI to correspond that Parameters example, For conditions. certain under except meaningful or accessible be 10.4.11.3.1.2 Parameters entities. external with communicate and to for variables, status arenon-transient. example, correspond SEMIE30equipmentconstants that to possible is it which in state a in and available is equipment the circumstances. certain reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This example, For associations. or attributes no has class and entity, external This an by set be cannot entities. values” “data or variables” “status external E30 SEMI to corresponding to Parameters accessible is however, value, 10.4.11.6 association affectedParameters the through accessible be must value Parameter’s by this classthisprovided in base specified unless otherwise document. the of the settings for the relationship from such that arise associations each specific the but for Parameter, the for described exist may associations and generic Other defined. provided being Parameter be must instance AssociatedParameter an metadata, 10.4.11.5.1.1 10.4.11.5.1 ReadWriteAssociationDefinition Table 29 10.4.11.5 external by set be cannot values” be as sowouldnot classified ReadWrite. entities, “data or variables” “status E30 SEMI to corresponding Parameters ReadWrite. as classified be would so and entity, external an by set be may constants” “equipment E30 SEMI to corresponding affectedParameters Association Name Role ReadWrite Association Definition Association TableReadWrite ReadWrite ReadOnly affectedParameters If true, the Parameter is said to be “transient”. The value of a transient Parameter is not guaranteed to guaranteed not is Parameter transient a of value The “transient”. be to said is Parameter the true, If If the Parameter’s settings directly affect the values or dynamics of other Parameters elsewhere in the in elsewhere Parameters other of dynamics or values the affect directly settings Parameter’s the If — This abstract class identifies a Parameter as being un-settable by an external entity. Its entity. external an by un-settable being as Parameter a identifies class abstract This — — This abstract class identifies a Parameter as being settable by an external entity. The entity. external an by settable being as Parameter a identifies class abstract This — If false, the Parameter’s value is guaranteed to be accessible and meaningful at all times that times all at meaningful and accessible be to guaranteed is value Parameter’s the false, If A list associatedA of Parameters are that affected by the settings this the of Parameter. Definition Page jn l jn 25 AssociatedParameter. Unordered of list structured type data, of Comments Document Number: Document Doc. Date: 4729 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and AssociatedParameter instance shall be accessible via the “affectedParameters” association of this class (inherited class this of association “affectedParameters” the such via Each accessible be definition. shall Parameter’s instance equipment Configuration AssociatedParameter the configuring with provided instance for AssociatedParameter corresponding used constants” “equipment 10.4.11.9.1 E30 SEMI (e.g., Parameter noattributesor This etc.). defines associations. timeouts, communication class control a not is but considered Parameters, other of values the and/or behavior equipment influencing way some in and entity, external the when settable 10.4.11.9 be only will Parameter the ObjType, E39 SEMI instance.an one active hascorresponding at ObjType least of attribute an represents Parameter the 10.4.11.8.3 bythe equipment. entitydetermined external conditions by under an such 10.4.11.8.2 Each definition. Parameter’s (inherited Control class this of ReadWrite).from the association “affectedParameters” the via with accessible be shall provided instance AssociatedParameter instance AssociatedParameter corresponding 10.4.11.8.1 Parameters. other of values associations. class noattributesThis or defines the affect may and material tests or measures, processes, the equipment the affect which Parameter in Control way a of values the in Changes settings). recipe to corresponding Parameters (e.g., entity 10.4.11.8 active one least at has ObjType corresponding the when ObjType, class noattributes This or defines associations.instance. E39 SEMI an of attributes represent they if or, events specific of occurrence the with provided explicitly are they when except meaningful be to guaranteed not ( transient, If times. all at meaningful (e transient, 10.4.11.7 by set beas socould not entities, classified ReadOnly.external be can constants” “equipment E30 SEMI to corresponding Parameters ReadOnly. as classified be would so reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Note: deleted] Figurealso 11aboveis [Editor’s Related See declared. be can type Parameter’s a wherever ParameterTypeDefinition using ¶ some examples Information R5-1for the class. metadata the in elsewhere re-used be can definitions 10.5.1.1 10.5.1 the when settable 10.5 be only will Parameter the ObjType, E39 SEMI an noattributesor This defines associations. instance. one class active hascorresponding at ObjType least of attribute an represents Parameter the 10.4.11.9.3 bythe equipment. entitydetermined external conditions by under an 10.4.11.9.2 ReadWrite).from Parameter Parameter Type Parameter Figure 11 shows a class that can be used to describe re-usable Parameter data types. Parameter type Parameter types. data Parameter re-usable describe to used be can that class a shows 11 Figure Configuration Control Data If transient, the values of this Parameter are not guaranteed to be meaningful or settable at all times. If times. all at settable or meaningful be to guaranteed not are Parameter this of values the transient, If set be can and times, all at meaningful and accessible are Parameter this of values the non-transient, If a have shall Parameters affected such all settings, Parameter’s this by affected are Parameters other If If times. all at settable or meaningful be to guaranteed not are Parameter this of values the transient, If set be can and times, all at meaningful and accessible are Parameter this of values the non-transient, If a have shall Parameters affected such all settings, Parameter’s this by affected are Parameters other If .g. aaees crepnig t EI E0 “tts vle”, te dt aus ae acsil and accessible are values data the values”), “status E30 SEMI to corresponding Parameters , — This class is derived from ReadOnly, and identifies a Parameter as providing data values. values. data providing as Parameter a identifies and ReadOnly, from derived is class This — Types — This is derived from ReadWrite, and identifies a Parameter as being settable by an external an by settable being as Parameter a identifies and ReadWrite, from derived is This — description name ParameterTypeDefinition Definitions — This class is derived from ReadWrite, and identifies a Parameter as being settable by an by settable being as Parameter a identifies and ReadWrite, from derived is class This — e.g. , Parameters corresponding to SEMI E30 “data values”), the data values are values data the values”), “data E30 SEMI to corresponding Parameters , Describing Type Definitions Describing Type Figure 11 Figure 1 typeInformation Page jn l jn 26 1 ParameterType Document Number: Document Doc. Date: 4729 5/29/2018 If non- If DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and has noattributes or associations.has 10.5.1.5 Table 31 10.5.1.4 Table 30 10.5.1.3.1 ¶ in are defined 10.5.1.3 the in and ParameterTypeDefinition, same the the (see¶ ofdefinition Parameters in within re-used be recursively can ParameterTypeDefinitions, ParameterTypeDefinition other document. of this definition of sections subsequent in fully described is type Parameter composite and primitive of kind Each Structure. or Enumeration, Array, named a be typecan TypeDefinition Parameter re-usable parameter a composite A precision. of define digits 4 and could units Kelvin with RealType, TypeDefinition type of “KelvinTemperature” Parameter named a example, For type. composite or primitive 10.5.1.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This additionalhere. shallthose defined typetype description beyond any system, and primitive specify classes fully technology-specific the into types primitive these mapped has it how define shall system type specific a into types these translates that specification Any use. in system type the with best work to extended and refined be could that setminimum a considered be should here described types primitive The etc.). IDL, OMG XML, SECS-II, (e.g., type declared the of values communicate to used be will that technology implementation the by determined typically are provided be should that types primitive or simple specific The used. being system type the in strings and integers as 10.5.2.1 10.5.2 typeInformation description name Association Role Association Name Attribute Name Attribute Primitive Parameter Type Descriptions Type Primitive Parameter Metadata describing types must include a mechanism for describing primitive or single-valued, types such types single-valued, or primitive describing for mechanism a include must types describing Metadata ParameterType Association TableParameterTypeDefinition Definition ¶ typein descriptionaredefined primitive classes Parameter The TypeDefinition Parameter ParameterTypeDefinition Association Definition ParameterTypeDefinition Association ParameterTypeDefinition Attribute Definition ParameterTypeDefinition Attribute Definition Table Attribute Definition ParameterTypeDefinition 10.5.3 definition. description the A of meaning purpose the or of type name theforThe re-usable definition. type . The type type The description. — An abstract base class from which all type description classes are derived. This class This derived. are classes description type all which from class base abstract An — 10.4 ). — Serves as a class for naming and providing a re-usable description of a of description re-usable a providing and naming for class a as Serves — Definition Definition Page jn l jn 27 class derived ParameterType.from One only elementand of one type any description Required 10.5.2 Y Y ; compositetype; description classes Text. ParameterTypeDefinitions. Text, must unique be across all Comments Document Number: Document Form Doc. Date: 4729 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 32 10.5.2.4 of number maximum a and language 10.5.2.3 associated the describe can Strings precision. if applicable. characters, of digits of number the specify can types number real and units, associated their specify can numbers real and integer representing classes 10.5.2.2 Note:deleted] Figure also 12aboveis [Editor’s reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Table 33 10.5.2.6 10.5.2.5 units digitsOfPrecision Association Role Association Name Attribute Name IntegerType RealType Attribute Definition Table Attribute Definition RealType RealType Association Definition IntegerType IntegerType numeric The types. Parameter primitive describe to used be can that classes of set basic a shows 12 Figure 1 RealType Attribute Definition IntegerType AssociationDefinition units — Represents a real (e.g., floatingpoint)number units. associated a(e.g., type, —Represents real and 0..* units after decimalthe point variables this by of type. number The digits of maximum that be can provided — Represents an integer type, an and —Represents integer units. associated {XOR} 2..* The availableThe units for type. specified this 1 UnitConfig Unit Describing Primitive ParameterTypesDescribing Primitive Definition 1 Definition 2..* {XOR} ParameterType Table units 0..* Figure 12 Figure digitsOfPrecision Page RealType 1 jn l jn 28 units type type configurablesupports units. Two more elements or type the of UnitConfig, if or: One only elementand of one Unit type Either maxCharacters language Required StringType N : on the of of on number digits precision. ≥0. 0,thereInteger If is restriction no BooleanType Comments Document Number: Document Form Doc. BinaryType Date: 4729 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 10.5.2.8 Note:deleted] Figure also 13aboveis [Editor’s Table 34 10.5.2.7 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This non-transient to unit, Parameter betweenthe mapping available configuration used change providesthe UnitConfig a 10.5.2.12 ParameterTypeDefinition. that in shall configurable be units to of the type supportdescribed declared the 10.5.2.11 its changed bythedescribing Configurationclassification. Parameter when units the Parameters to whose are refer to 10.4.11.5.1) ¶ (see attribute “affectedParameters” the use to required not is it class, UnitConfig the by described 10.5.2.10 enumeration possible Parameter. from configuration available the unit settings 3 the of each for instances—one UnitConfig 3 provide would ParameterTypeDefinition a the in (mks), example, meter-kilogram-seconds For between select unit. to that Parameter selects Englishtypeconfigurable with units case,everynumeric that (cgs),and units. appearing centimeter-gram-seconds In configuration that unit single setting a Parameter provide enumeration may the equipment to ParameterType numeric given a 10.5.2.9 section.this equipment 1: NOTE ParameterTypeDefinition, Parameter, Unit, the to of shown for classes EnumerationType clarity. are and ParameterType, used attributes classes and the associations shows all 13 Not Figure units. configuration. configurable unit different describe unit a to non-transient correspond shall one enumeration the Each in support 10.5.4.1.3). value ¶ (see enumeration shall string-based a be shall equipment Parameters configuration unit The such the Parameters. of such ParameterType of values available, the communicating when used units are units which control of to Parameter configuration set configurable independently each units Association Role Association Name Unit The UnitConfig class (shown in Figure 13) is used to provide a mapping from each possible unit choice for choice possibleunit each from mapping a provide to usedis 13) Figure in (shown class UnitConfig The For units. of set one than more in values Parameter provide to ability the support may equipment Some Definition Association TableRealType RealType AssociationDefinition does If a ParameterTypeDefinition includes numeric types with configurable units, then all Parameters that are that Parameters all then units, configurable with types numeric includes ParameterTypeDefinition a If is it selects that setting Parameter Configuration the to unit available an from mapping the Because UnitConfig The equipment is not required to support configurable units in order to comply with SEMI E125; however if the if however E125; SEMI with comply to order in units configurable support to required not is equipment The configurable shallsupport units, it describe available the units their and configuration the definedusing classes in 1 configParameter — This class describes a configurable unit setting available for a numeric ParameterType. numeric a for available setting unit configurable a describes class This — unit 0. The availableThe units for type. specified this .1 0..1 UnitConfig setting 0..1 Definition Describing Units Configurable 1 1 value description EnumeratedString Figure 13 Figure Parameter Page jn l jn 29 0..* typeInformation 1..* type type configurablesupports units. Two more elements or type the of UnitConfig, if or: One only elementand of one Unit type Either: values 1 1 ParameterTypeDefinition EnumerationType Comments ParameterType Document Number: Document 1 1 Doc. typeInformation Date: 4729 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 10.5.2.16 Table 36 10.5.2.15 10.5.2.14 Table 35 10.5.2.13 noattributes. classThis has unit. the of selection the in results that Parameter configuration that of value enumeration the and unit, selected the reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This a (e.g., structure the in fields different as appear required. concepts is elements array the of different meaning the of description human-readable A the field). uncertainty an and field measurement where representation, correct is the elements StructureType of array an cases, such In elements. even-numbered in measurement the for uncertainty the and elements odd-numbered in value measured a of sequence repeating a represent to used be not must numbers 10.5.3.1.2 or primitive ( numbers the real of nolimitation it or contain. of double) can values has onthe that number float array of an represents one type primitive RealType only the to to refers and refer 0 of value can maxElements a array has An array. given that description array a an example, For elements. of number in maximum a has it that declare elements can and types, composite the of type the describe to how 10.5.3.1.1 10.5.3.1 10.5.3 10.5.2.17 maxCharacters language setting configParameter unit Association Name Role Attribute Name Attribute Composite TypeComposite Description Describing UnitConfig AssociationDefinition StringType Attribute Definition BinaryType BooleanType DefinitionStringType Attribute Table StringType DefinitionUnitConfig Association Table Each element of an array must represent the same physical concept. For example, an array of real of array an example, For concept. physical same the represent must array an of element Each shows 14 Figure type. same the of are that values more or one hold can that types container are Arrays can contain. number The characters of that maximum string this Identifies languageused representthe to the string. Arrays — Represents a string a type. —Represents — Represents a binary type. a —Represents binary — Represents a— Represents Boolean type. available available being unit selected. configParameter, corresponding in results the enumeration The value set the which, when on theselects unit. unit ParameterThe configuration whose value availableAn unit by type. supported this Definition Definition Page jn l jn 30 Required EnumeratedString. One only elementand of one type ParameterTypeDefinition. Parameter have a must enumeration string-based One only elementand of one Parameter. type The One only elementand of one Unit. type N Y on number characters.the of If Integer ≥0. 0, there no is restriction ISO languages.to 639 name name countries subdivisions,and and tag,1766 3166 ISOlanguage to using Text, must equal be to IETF an RFC Comments Document Number: Document Form Doc. Date: 4729 5/29/2018 DRAFT SEMI e.g. 4729 , LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 37 10.5.3.1.3 Note:deleted] Figurealso 14aboveis [Editor’s reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This typed orfields. how collection ofmore adescribedcomposite types. as is one structure Figure a 15shows 10.5.3.2.1 10.5.3.2 Table 38 10.5.3.1.4 maxElements minElements typeInformation elementDescription Association Role Association Name Attribute Name Describing ArrayType AssociationDefinition ArrayType Attribute Definition Structures are composite types that can hold one or more fields that are of differing primitive or primitive differing of are that fields more or one hold can that types composite are Structures Definition Association ArrayType AttributeArrayType Definition elementDescription maxElements minElements ArrayType Structures contained in contained the array. theDescribes data of type each element elements in elements the array. human-readableA description the of of purpose the the in array. maximum of The number elements can that be held the in array. minimum of The number elements can heldthat be 0..* 1 {XOR} Table Definition Table Definition typeInformation typeInformation Describing Arrays Figure 14 Figure Page jn l jn 31 1 1 ParameterType ParameterTypeDefinition same ParameterTypeDefinition). same be (can a reference recursive from the within ParameterType,or ParameterTypeDefinition a any derivedfollowing: type from data,must Structured be and one the one only of Text. greater than minElements. zero,the value this must of attribute be attribute minElementsand are non- both unlimited of number elements.If this Positive 0 integer, with representing an must less maxElements.be than are non-zero,both value this the of attribute elements.If attribute this and maxElements restriction numberthe of on minimum Positive 0 integer, with representing no Document Number: Document Comments Form Doc. Date: 4729 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 41 10.5.3.2.4.1 forstructures. fields ¶ within used describing See 10.5.3.2.4 Table 40 10.5.3.2.3 Table 39 10.5.3.2.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Note:deleted] Figurealso 15aboveis [Editor’s canBeNull description name fields description Attribute Name Association Role Association Name Attribute Name description StructureType StructureType AssociationDefinition StructureType Attribute Definition Field Attribute Definition Field Association TableStructureType Definition AttributeStructureType Definition Field Attribute Definition Attribute TableField — Represents a named field that has one and only one type, primitive or composite. This class is class This composite. or primitive type, one only and one has that field named a Represents — Whether or theWhether not field’somitted. may be value description the A of meaning purpose the or of field. thename of The field. 1 fields A human-readableA description the of meaning purpose the or of structure. The fields compriseThe this structure.that data 1..* canBeNull description name Field Definition Definition Table Describing aStructure 0..* 1 Figure 15 Figure 10.5.1.2 Definition Page {XOR} for a description of class. athe ParameterTypeDefinition for description jn l jn 32 typeInformation typeInformation Required elements of elements type Field. list one moreOrdered of or structured data 1 1 Y Y ParameterTypeDefinition ParameterType structure. provided allalways for values the of if Boolean. True the value not field’s is Text. Text. Document Number: Document Comments Text. Form Doc. Date: Form 4729 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and string values. For both integer and string enumerations, each value in the enumeration represents a legal value for value legal being described.the type a represents enumeration the in value each enumerations, string and integer both For values. string or integer of collection ordered an as enumeration an for settings valid the describe to how shows 16 Figure values. 10.5.3.3.1 10.5.3.3 Table 42 10.5.3.2.4.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Table 43 10.5.3.3.3 class, set of class. described or bystrings,described theby EnumeratedInteger a theintegers, EnumeratedString 10.5.3.3.2 Note:deleted] Figure also 16aboveis [Editor’s typeInformation description Attribute Name Attribute Association Role Association Name Describing Field Association Definition EnumerationType Attribute Definition EnumerationType Attribute Definition Table Attribute Definition EnumerationType EnumerationType pre-defined of set a of one to restricted are values possible whose types single-valued are Enumerations Field Association Definition Association Field Table ParameterType enumeration as whole.a A of meaningdescription the or of purpose the Enumerations Describes the type this data of field. ersns a nmrto. Eueainye my cnit o ihr a st of set a either of consist may EnumerationType enumeration. an Represents — Definition Definition description EnumerationType values Describing an Enumeration 1 Figure 16 Figure 1 values Page jn l jn 33 {XOR} from within same from ParameterTypeDefinition).the ParameterTypeDefinition be recursive(can a reference any derivedfollowing: type from a ParameterType, or data,must Structured be and one the one only of 1..* 1..* Text. value description EnumeratedInteger value description EnumeratedString Comments Form Document Number: Document Doc. Date: 4729 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 46 10.5.3.3.8 10.5.3.3.7 Table 45 10.5.3.3.6 10.5.3.3.5 Table 44 10.5.3.3.4 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Table 47 types represent that types describing when followed be shall convention described bymetadata. ais that in SEMIstandard defined This document. this in defined types 10.5.4.1 10.5.4 description value values boolean string,bytebinary, bit point,realfloat, floating integer positive integer, negative non- integer, negative non- integer,integer, positive description value Association Name Role Attribute Name Attribute Attribute Name SEMI Name Type SEMI Standard Type Standard Mapping SEMI The following table describes how to map SEMI type terminology to the various primitive and composite and primitive various the to terminology type SEMI map to how describes table following The EnumerationType AssociationDefinition SEMI Type Mapping EnumeratedString Attribute Definition EnumeratedInteger Attribute Definition EnumeratedString Attribute DefinitionEnumeratedString Table EnumeratedString Attribute Definition EnumeratedInteger EnumeratedInteger AssociationEnumerationType Definition enumeration value. A of meaningdescription the or of purpose this A valuelegal for enumeration. the enumeration value. A of meaningdescription the or of purpose this A valuelegal for enumeration. the The set valuesThe of this that enumeration.comprise BooleanType BinaryType RealType IntegerType Type Description Type to — Represents a legal value for a enumeration. afor string —Represents legal value — Represents a legal value for an integer enumeration. an afor integer —Represents legal value Definition Definition Definition U se Table Table Page jn l jn 34 Required Y Y Required EnumeratedString. Ordered of or list one of more elements type EnumeratedInteger. O One the of following: rdered of or list one of more elements type Y Y this enumeration. Integer,must unique be across values all for Text. Comments Text. for enumeration.this Text, must unique be across values all Comments Document Number: Document Form Form Doc. Date: 4729 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and suppliers shall describe at least one unit that represents pure numbers (a “unit-less” unit). leastrepresentsnumbers that “unit-less” one pure (a unit suppliers describe shall at though units, of system a define not does specification This class. this with described be can data numeric for used 10.6.1 10.6 their of representation the and specification this by corresponding values. supported descriptions shall type systems the such between for mapping specifications a technology-specific provide the used, technology the on depend will representation this Since section. this in described definitions type composite and primitive the to corresponding values Parameter 10.5.5.1 10.5.5 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This publication] following Note: The figures sections, toasappropriate[Editor’s before are berenumbered tables, and Table 48 10.6.2 Note:deleted] Figure also 17aboveis [Editor’s list structure enumerated text symbol description name id Attribute Name Attribute SEMI Name Type Units Unit Attribute Definition Table AttributeUnit Definition be can that unit Any equipment. the by used unit specific a describes that class Unit the shows 17 Figure Parameter Any equipment interface used in conjunction with this specification must provide a means to communicate to means a provide must specification this with conjunction in used interface equipment Any Unit Attribute Definition The abbreviation to the used represent unit. conversion factors,etc. A of unit,its description the dimensionality and/or The forhuman-readable unit. name this The for unit.identifier this Values ArrayType StructureType EnumeratedInteger StringType Type Description Type to Definition U se Figure 17 Figure Describing Units as of arrays the primitives composite corresponding types.or Lists integers,floats,binaries,of structuresenumerateds, or are described conventions described this in table. corresponding standard.The of field type each shall mapped the be using Each within field the shall namedstructure be exactly written the as in corresponding standard. shall equalbe to providedtext the the name for enumerated value the in corresponding standard.The field each description for enumerated value 1 to according the in the order which enumerated are values listed the in Each enumeration start valueshall at 0,and sequenced increments is in of charactersthat supported the is by supplier. attribute the classof shall StringType set be equal the of to number If limitation the a on number characters specified,of is maxCharactersthe Page jn l jn 35 Required N Y Y Y Comments Text. Text. Text. this equipment. Text,unique across units forall defined Document Number: Document Form Doc. Date: 4729 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 10.7.2.1 using as communicationprotocols a reported (such SECS-II to alarms). software other situation client eachunexpected corresponding anto include listfor equipmentshall entries of exceptions 10.7.2.2 The defined system aware.equipment control is user flashingsoon)which (via thelights, reportedoperator andthe to atinterface, the console and of situation eachunexpected corresponding anto include listfor equipmentshall entries of exceptions 10.7.2.1 The defined is provided. set/clearstatestracked, noclearData arenot whose whose ( are that conditions those as abnormal well as equipment, represent the by can tracked not are class states set/clear Exception the that Note equipment. the by communicated be can 10.7.2 association.] withthe exceptionParameters replaced Note: beenmodified. Figure clearData 18has havebeenremovedand[Editor’s associations setData and The clarity shown of arenot for (see¶ the Parameter class associations 10.7.1 10.7 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This ExceptionAttribute Definition Table 49 severity description exceptionName exceptionId Attribute Name Attribute Exceptions Exception Exception 18 Figure Exception Attribute Definition Attribute TableException id Identifies severitythe of exception it this if occurs. it occurs. A of meaningdescription the of exception the when Human readable name of descriptive exception this Unique for exception.identifier this — This class can be used to represent a warning, alarm, error, or other abnormal condition that condition abnormal other or error, alarm, warning, a represent to used be can class This — shows how to describe implemented exceptions and their associated data. The attributes and attributes The data. associated their and exceptions implemented describe to how shows severity description exceptionName exceptionId Exception Definition Describing Exceptions Figure 18 Figure exceptionParameters Page jn l jn 36 10.4 0..* Required for more information about Parameters). more for information Y Y Y Y N e.g. Parameter , SEMI E30 alarms). alarms). E30 SEMI , be empty an string. severity defined,is attribute this shall “Warning”, “Fatal”.If “Error”, or no examples are: “Informational”, charactersonly,no Some spaces. values defined Table in 50. Enumerated text one the containing of Text. Text described metadata.by Text,unique across exceptions all Document Number: Document Form Doc. Date: For Exceptions For 4729 Text,alpha 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 50 ExceptionAssociation Definition Table 50 10.7.3 tables following Note: toasappropriate The before are berenumbered publication][Editor’s ExceptionSeverityEnumerationSpecification Table 50 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This and behavior same StateMachine one only events, of set same the generate and StateMachine, underlying same the have behavior, same the exhibit each that components events. same the generate multiple accommodate to StateMachines multiple define to necessary not is It 10.8.6). ¶ (see class StateMachineInstance the of use the through defines it events the to refer then can StateMachine that by described behavior the implements that component Each once. defined be only need 10.8.1.2 machine state these classes. of adescribed by thethese literalimplementation state provide machines to of context supplier the require the not does specification this Further, supplier. within the by implemented literally been not defined has machine be either state described the if must even 10.10), ¶ (see node equipment an with associated equipment NodeEvent a as defined or descriptions the by generated or Events Harel as to such UML. intended formalisms machine not state are standard by They defined semantics events. all of of modeling generation comprehensive the provide in results that behavior equipment of understanding end-user 10.8.1.1.1 Related ¶ machinesin Information, R7-1. are provided state as such machines, of Examples machines. state equipment-specific non-standardized state well as as SEMIstandards, from originating those standardized describe to used be can classes These equipment. the by implemented is that 10.8.1.1 10.8.1 10.8 clearData setData exceptionParameters Informational Enumeration String Value String Association Role Association Name Warning Error Fatal StateMachines State Machine Descriptions Machine State Definition Association Exception A StateMachine that defines behavior that is implemented by many equipment components (for example) (for components equipment many by implemented is that behavior defines that StateMachine A transitions) and states associated its (and StateMachine a of definition the describe to how shows 19 Figure The state machine description classes specified here are intended for descriptive purposes in facilitating in purposes descriptive for intended are here specified classes description machine state The affectedand action required. no is An unexpected has condition occurred. Normal of equipment not operation the is actions,if applicable,were successful. equipment may lead serious but aif addressed. to condition more not Recovery An condition abnormal that not affectdoes immediately normal of operation the Recovery,repair, maintenancebe or actions required.may equipment not components fully-functional processing be stopped.may or be pose serious to a risk people,the material equipment, or being processed. Some An condition abnormal that normal affects operation the but not of equipment does shutdown, component aborted shutdown, or processing. being processed.Affected activities equipment are inhibited, whichinclude tool may An condition abnormal that a risk people,theposes serious to equipment,or material For example, if the equipment being described has four pump components that exhibit the exhibit that components pump four has described being equipment the if example, For when the when exception been has cleared. ordered of An list data communicated items exceptionthe when is it detected. ordered of An list data communicated items with the with exception it reported when is ordered of An list data to communicateditems be Table Definition Description Page jn l jn 37 Parameter (see Parameter ¶ list zeroOrdered elements of ortype of more (see Parameter ¶ list zeroOrdered elements of ortype of more exceptionParameters. ParametersTransient can included be in the 10.4 10.4 Document Number: Document Comments ). ). Doc. Date: 4729 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and can be used to describe 2 or more concurrent state machines belonging to that State instance. For example, the example, For and CarrierStatus, AccessingStatus. instance. State that to belonging machines state concurrent SEMI more or 2 describe to used class be StateMachine the can class, State the of association ‘stateMachines’ the of member a as appearing When whole. 10.8.2.1 can concurrent 10.8.2 the other independently thepumps. StateMachine of forexecuting defined eachpump StateMachine, that events ¶ (see source different a as act then can component pump Each necessary. is description reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This and characters alphanumeric upper-case spaces, no “E87-1101”), only.hyphens (e.g., document standard a of version specific 10.8.2.3.1.1 id>: E87 Carrier state model defines three such concurrent state machines: Carrier ID Status, Carrier Slot Map Slot Carrier Status, ID Carrier machines: state concurrent such three defines model state Carrier E87 ttMcieStateMachine SEMI Standard StateMachines Standard SEMI Definition Attribute StateMachine a as model state the represents description model state complete a in instance StateMachine top-level The finite state machine. All StateMachines StateMachines All machine. state finite name either one either one 1 1 Table Describing State MachinesDescribing State State and/ substates 1 1 top Figure 19 Figure or contain contain one or more or more one Page 1 1 1 transitions jn l jn refer to refer 38 source 0..* StateMachines. a single top-level state. The top-level state state top-level The state. top-level single a Required description id name 0..* description id name 0..* 1..* Transition Event Y Y Y target Text. acrossText, unique all machines. state Text. 0..1 transitions 1..* Document Number: Document 10.3.1 Form ) of the same set of set same the of ) Doc. Date: 4729 5/29/2018 DRAFT SEMI shall non- 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 53 StateAttribute Definition Table 53 10.8.3.1 a as represented the containingstate. stateMachine within be would machine state concurrent each machines, state executing concurrently 2 contained state given a if substate example, For A state-machine-within-a-state. a StateMachines. represents StateMachine and A state-within-a-state. substates a represents both contain cannot but StateMachines, more or zero or substates, more 10.8.3 StateMachineAssociationDefinition Table 52 10.8.2.4 the for name machine state the example, For capitalized). is wouldbe TRANSFER state “LoadPortTransfer”. machine PORT SEMI E87LOAD name machine state the thein only word (i.e., each convention of capitalization letter case first camel the use shall name machine state The concatenated. name the 10.8.2.3.1.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This description id name Events transitions Top Association Role Association Name Attribute Name Attribute State State State Attribute Definition Attribute State Definition Association TableStateMachine Table Definition Definition Page jn l jn 39 Required List of elementsor of List zero Event.more type of elementsor of List one Transition.more type and one One only element type of State. Y Y Y Text. level StateMachine. Text,unique across states the all in Top Text. Document Number: Document Comments Form Doc. Date: 4729 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 10.8.3.3.4 implementpseudo-states. is implementersformallythese or machine.to for define norequirement There state are They definitions. transition the in only are uponexitfrom be the descriptioncan communicated inordertodescriptionthat in of events included the support the states Final and Initial between distinction the since “NoState” to equal also attribute name a have shall and class, State the using This description the in represented be machine. shall pseudo-states state a from exit final a these section, define this in classes the using statechart a to describing When State. Final a as used notation this to refers document is notation This circle. concentric a within dot black solid 10.8.3.3.3 states. pseudo- these be implement or define formally to shall implementers for requirement no is transition pseudo-states There upon sub-state. default communicated the be into these can that events of section, description are the They support this “NoState”. to order to in equal in description attribute the name in included a classes have shall and the class, State using the using description statechart the in represented supported a describing When Initial in as State. notation statechart in used dot solid the to refers document to This sub-state super-state. default the the entering indicates upon occupy notation This sub-states. formal the of one into transition single a with dot black 10.8.3.3.2 cannot They machine. state described sub-states state ormachines.contain nested the within states actual represent not do they machine, state a in transitions 10.8.3.3.1 10.8.3.3 equal name> “Carrier.CarrierSlotMapStatus.SlotMapNotRead”. to of the of DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 55 Transition Attribute Transition Definition Table 55 10.8.4.1 be can transitions history Harel place. description which oftakes under the transition the condition human-readable True outcomes. history-based or a provide to used be can attribute ‘description’ The event. single conditional a to transitions such all mapping by accommodated possible are there as transitions uniquely states transition target for and defined Transition one source be must The There machine. states. state level ending Top the within and states identify originating the representing state, “to” or “target”, one and state, “from” or “source”, one references transition Each allowed. not are path containment same the in not are once that defined machines state be to or only machines state sibling need to Transitions transitions state. source Such the containing only. machine state the machines within state enveloping its of any and machine state nested StateMachine, 10.8.4 StateAssociationDefinition Table 54 10.8.3.4 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Table Definition Page State jn l jn state 41 . Required or more is more substates or included. StateMachine. of elementsor of List zero more type stateMachines included.is include Shall zero if or elements one more of elementsor of List zero State.more type Y N Y identifier Text. Text. this StateMachine. Text,unique across transitions all in include Shall zero if elements one Id >: Document Number: Document as it appears in the state the in appears it as Comments DRAFT SEMI 4729 a LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 10.8.6.9 bymultiple sources. thearegenerated asame of for situation kind which events StateMachines in to for defined necessary or not multiple It NodeEvent them. is define StateMachine must a generate have the equipmentcan that with associated equipment node. events All NodeEvent an or by a StateMachine defined 10.8.6.8 by underlined struck-outindicated blue or text.] as bystruck-outnumbers.Howeverthedocument textwas indicated the section notmodifiedexceptas following Note: The sub-sectionsand moved[Editor’s in tablesfromlater (through10.8.5.4) the were transition. events the same possibleforbe for not to defined twodifferent make typically implementations Such transitions. different communicate distinguishing different for transitions. it event that with available occurrence betweenthe is Note the data additional to id event same the use that standards by defined level top same the within contained states 10.8.5 AssociationDefinition Transition Table 56 10.8.4.3 transition history transfer port load the initialSERVICE” OF wouldbe state“OUT “NoState-OutOfService”.from to E87 SEMI the for name event the example, For capitalization. case camel use reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This “LoadPortTransfer”. machine wouldbe TRANSFER state name PORT the stateSEMIE87LOAD capitalized). For example, machine for machineis name state word (thatonlyfirst the is, letter in casecapitalization of shall convention the each camel name use machine The state concatenated. the standard, name in it eachword name with the stateappears to machine as equal be shall the aname state is thisequaldefined machine, there defined, the “None”. text is to If field be shall machine is nosuch in theIf state stateevent namedefined. machine ofwhich be shall machine> the the 10.8.6.10.1.2 10.8.5.1 10.8.5.2 DefinitionTransition Association Table 57 10.8.5.3 10.8.5.3.1 NodeEvent Event Attribute Definition EventAttribute — This class defines an event that the equipment generates as a result of a transition between any two any between transition a of result a as generates equipment the that event an defines class This — within twoStates a of onlywithin defined a theTransitionbetween context Events may be purpose of event.purpose the human-readableA description the of meaning or unique for A identifier the event. human-readable A name the for event. SEMI Standard Events Standard SEMI Table Attribute Definition Event urn:semi-org:event: class. Each Event can reference one or more transitions. This is in support of systems or systems of support in is This transitions. more or one reference can Event Each class. name The transitioned-to The state. state origin this The of for transition. — If the Event represents a SEMI standard event, the value of this attribute event,ofbe shall standard this SEMI the value Event —Ifrepresents a the Definition StateMachine Definition Page . Events defined outside the context of state machine are machine state of context the outside defined Events . jn l jn 42 Text. acrossText, unique all in StateMachines. events all Text. level StateMachine.level References and one one only state the within Top StateMachine.level References and one one only state the within Top Id >: DRAFT SEMI 4729 a a LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and entity. that given a by entity supported machine state each given a from events However, the with reporting machine. for available Parameters state the describe to that by defined used are that classes the events shows 21 Figure events. those of for data different report may set machine state given a supports same the generate can that entity other 10.8.6.1 10.8.6 Table 62 10.8.6.11 “NoState-OutOfService”. wouldbe OF theE87load state“OUT SEMI port transferto for from transition history SERVICE” thename initial capitalization.the event Forexample, camel and alphanumericcharactersonly, case use have shall nospaces, names The bya state thehyphen. states StateMachineInstance or component equipment an is there wherever re-used and once defined be to intended are machines State Table 58 10.8.5.4 nestedStateMachines 10.8.5.3.1.4 Event Association Definition EventAssociation Event Association Definition Table Event The to this transitions which event mapped.is Id > shall be a string representation of the transition representation string > of be shall the a DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 58 StateMachineInstance Association Definition StateMachineInstanceAssociation Table 58 10.8.6.4 StateMachineInstanceAttribute Definition Table 57 10.8.6.3 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Definition Association EventToParameterMap Table 60 10.8.6.7 Attribute EventToParameterMap Definition Table 59 10.8.6.6 given fromStateMachine. a event 10.8.6.5 nestedStateMachines eventMaps previousStateName currentStateName stateMachineId availableParameters description eventId Association Name Role Association Name Role Attribute Name Attribute Attribute Name Attribute EventToParameterMap Association Table Definition EventToParameterMap Attribute DefinitionEventToParameterMap EventToParameterMap Definition Association TableStateMachineInstance Table Attribute Definition StateMachineInstance the parametersthe that available are for with event. reporting the any necessaryProvides description for to humans understand StateMachineThe Event which for Parameters available.are a levelIdentifies top or state nested machine. event. The Parameters are that available reporting this for with StateMachine. Any statenested machines within defined the identified events. Parameters that availableare for with reporting those The definedevents by StateMachine,and this the the stateprevious within identified the StateMachine. The Parameter,if can accessed any, that be to determine the statecurrent within identified the StateMachine. The Parameter,if can accessed any, that be to determine — This class is used to provide a list of the Parameters available for a specific a for available Parameters the of list a provide to used is class This — Definition Definition Definition Definition Table Page jn l jn 44 ¶ ¶ There10.8.6.5. shall be EventToParameterMap, in described One described ¶10.4.in Zero one or element type of Parameter, described ¶10.4.in Zero one or element type of Parameter, described ¶10.4.in S Aggregation zeroof or more referencedtop-level StateMachine. levels nesting of described the by class requiredis to arbitrary describe of of StateMachineInstancenesting the possible createto more,only level one StateMachineInstance. it Although is Zero the StateMachine.identified one map eachsuch for event defined in the StateMachinethe class. to Text, equal a ‘id’ of valid attribute Text. StateMachine. of Eventattribute the class a within be Text, must equal a ‘id’ to valid structured Zero One or more elementsor of more type or more elementsor of more type Document Number: Document of Parameter,data type Comments Comments Form Form Doc. Date: 4729 no more than no more 5/29/2018 DRAFT SEMI as 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and machine name shall use the camel case capitalization convention (that is, only the first letter of each word in the in word each of letter first the only is, (that convention capitalization case camel the use state shall The name concatenated. name machine the in word each with standard, the in appears it as name machine state the to equal be shall name the machine, state defined a is there If “None”. text the to equal be shall field this defined, is machine 10.8.6.10.1.2 and characters alphanumeric upper-case spaces, no “E87-1101”), only.hyphens (e.g., document standard a of version specific 10.8.6.10.1.1 id>: Event Attribute Definition Table Attribute Definition Event StateMachine a within States two between Transition a of context the within defined be only may Events Event Association Definition Event Attribute Definition Event Association Definition Association Event Events Standard SEMI availableParameters name eet nm> sal b h ae o h vn s i per n te sadr ih n spaces, no with standard the in appears it as event the of name the be shall name> Table Definition identifier Page jn l jn 45 is defined in the standard, this field shall be equal to equal be shall field this standard, the in defined is Text. acrossText, unique all in StateMachines. events all Text. Id One or more elementsor of One Transition.more type >: DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 10.9.1.1 Note:cardinality beenreplaced, Figure attributes 22has changing[Editor’s the of the to association 1..*] Information SEMIObjType using class. examples Related 6for the See ObjType. same the of instances other all of independently events simple and instances, machine state attributes, its maintains instance ObjType Each ObjType. the of instances all to common are that events simple and attributes instances, describes it that in class a to similar is ObjType An equipment. the by implemented been 10.9.1 10.9 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This SEMIObjType Attribute Definition Table 63 10.9.1.2 in ObjID standard. least that at in specified includes ObjType ObjType the Each of name the and defined, was it which within standard SEMI the of name the by identified is it then ObjType standard SEMI a is it If equipment. the by implemented been has that ObjType objType standardVersion Attribute Name ObjTypes Figure 22 shows how to describe SEMI ObjTypes ( ObjTypes SEMI describe to how shows 22 Figure SEMIObjType Attribute DefinitionSEMIObjType Attribute SEMIObjType see SEMI E39). SEMI objType standardVersion The name thename objType.of The SEMI applicable.if the wherefor the document is ObjType defined, completestandardThe SEMIversion number SEMIObjType — This class describes the attributes, state machine instances, and simple events for a SEMI a for events simple and instances, machine state attributes, the describes class This — two Describing Implemented SEMI ObjTypes SEMI Describing Implemented Definition one one attribute Table Figure 22 Figure s , corresponding to to corresponding , stateMachineInstance Page eventData attributes simpleEvents jn l jn 46 e.g. , the “Carrier” ObjType from SEMI E87) that have that E87) SEMI from ObjType “Carrier” the , Required Y Y 0..* its type name and and name type its 0..* 1..* 0..* corresponding standard.corresponding the as documented in objType the using Text. Named identical and spelling case this ObjType, then attribute be shall empty. only.If hyphensa standard not SEMI charactersupper-case and alphanumeric ( document a representing specific of standard version a the standard Text, forusing SEMI form StateMachineInstance SimpleEvent parameter e.g. ,“E87-1101”),no spaces, Document Number: Document its instance id ( id instance its Form Doc. Date: , , state machine state 4729 known as known 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 10.10.1 10.10 SEMIObjType AssociationDefinition Table 64 10.9.1.3 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Table 65 10.10.2 simpleEvents stateMachineInstances eventData attributes name description id Association Role Association Name Attribute Name Attribute SimpleEvent SimpleEvent Attribute Definition Attribute TableSimpleEvent bythe equipment. be without can generated that an state associated event machine Figure 23describes SEMIObjType Association DefinitionSEMIObjType Association SimpleEvent Attribute Definition A human-readable A name this for event. event.the human-readableA description the of meaning purpose or of identifier this A for event. associated this with ObjType machineNon-state events by ObjType.supported this state The any) machine (if generated events. ObjType with this provides are formalthat not attributes that to related the object. additionalDefines Parameters defined this Attributes for ObjType. attributes the defined the for object. the Defines Parameters representing description name id SimpleEvent Definition Describing SimpleEvent Parameters Definition Table Figure 23 Figure 1..* Page jn l jn example this example of event type. CarrierApproachingCompleteEventin Any not event associated a statewith formal machine. described ¶10.8.6.in Zero more elements or type of StateMachineInstance, parameterName. duplicate the Parameters aattribute for SEMIObjType in for reporting. event The Parameters shall eventData not 10.4. List zero more of elements or type of Parameter,described ¶ in reporting. Parameters defined attributes beas shall available event for are maintained in independently each instance.ObjType ¶ ¶ Unordered of list elements type of Parameter, described in 47 10.5.4 10.4 The Parameters as defined eventData be shall available availableParameters .Each Parameter be and shall typed named to according and ¶ Parameter 10.4.10 . attributes to . All belonging an ObjType Text. Text. for equipmentdefined this node. acrossText, unique all events the 0..* Comments Document Number: Document SEMI Form Doc. Date: E87 an is 4729 5/29/2018 DRAFT The SEMI 4729 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 67 EquipmentSelf-DescriptionComplianceStatement Table 67 11.2 11.1 11 Table 66 10.10.2.1 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This size onlydocument.] off ofbeen left tothe the reduce by Related Note:sections notaffected The for are the Information [Editor’s ballot. proposals this have They Exceptions Units Types Parameters Node Equipment Description Physical Equipment Structure Equipment Management of Metadata Metadata Access availableParameters ObjTypes MachinesState Association Name Role Requirements for Compliance Fundamental Requirements Table 6 Table Self-Description to Equipment Compliance SimpleEvent AssociationDefinition SimpleEvent Association Definition Association TableSimpleEvent 7 provides a checklist for Equipment Self Description checklistEquipment provides for compliance. a Self event. The Parameters are that available reporting this for with Section 10.9 10.8 10.7 10.6 10.5 10.4 10.3 10.2 10.1 9.1 Implemented using SEMI technology Definition Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes mapping Page No No No No No No No No No No jn l jn 48 technology mapping complies with complies ESD specification and specification Implementation Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes No No No No No No No No No No described ¶10.4.in Structured of data type Parameter, Document Number: Document ESD data with ESD associated all N/A N/A acquisition describedare items accessibleitems via data information and sources Comments Yes Yes Yes Yes Yes Yes Yes Yes Doc. No No No No No No No No Date: 4729 5/29/2018 DRAFT SEMI 4729 LETTER (YELLOW) BALLOT