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Background Statement for SEMI Draft Document 4100 REVISION TO SEMI E85, SPECIFICATION FOR PHYSICAL AMHS STOCKER TO INTERBAY TRANSPORT SYSTEM INTEROPERABILITY

Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.

Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided. Note: Additions are indicated by underline and deletions are indicated by strikethrough.

Background: There are technical and editorial errors in E85. - Wrong datum plane is referenced for some dimension in Tables 1 and 2 - “Related Information 2” is referenced but it does not exist Description of Changes Related Sections Modified by Ballot  Correct referenced datum planes for A1, A6 and A8 Revise table 1 and 2 of table 1 and 2. Revise figure 3 and 4  Delete text related to “Related Information 2” from table 1-2 and figure 3-4.

The results of this ballot will be discussed at the next PIC committee meeting on March 1, 2005 in conjunction with the NA Spring Standards Meetings in Austin, Texas. Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 1 Table 1 1.1   1 SYSTEMTRANSPORT INTEROPERABILITY TO INTERBAY STOCKER AMHSFOR SEMIE85,SPECIFICATION PHYSICAL TO REVISION Draft Document SEMI 4100 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 

Dim Modify E62 asfollows:E62 Modify A1 A8 A6 A3 A2 (deg) C3 Delete text related to “Related Information 2”1 Information from “Related table to related text Delete 2. of A6 fortable and 1and A8 planes A1, datum referenced Correct Revise Dimensional Requirements for 300 mmAMHSInterbayLoadPorts(FOUPONLY)Dimensional Requirementsfor300 robotic flange.robotic zoneexclusion for of top use the the of carrier. creates This an transport the measuredtransfer from HDP the of abovethe obstacle during carrier of nearestheight the stocker transfer) fork-lift conveyor for or rail (end theplane of exclusion volume the from transfer rail mechanism measured for fork-lift conveyor volume the or width the minimum of exclusion transfer) for or rail volume fork-lift conveyor (start the transport of exclusion bilateral measuredtransport from the protrusion the of maximum interbay datumbilateral plane) pins aboutcoupling (symmetric the the using secondary kinematic the for pickupfrom FDP) center (starting zone at distance a D10 width the Minimum if exclusion the about bilateral plane) datum coupling pins kinematic (symmetric pickupcenter using secondary the of exclusion width the zone for obstruction the on stocker datum to plane the nearest measured thefrom cavity cut-out theor in stocker minimum of load width the port to load the port tilt the cassetteof open when placed Table 1 Table datum facial as indicated below aswith indicated  Definition

the maximum heightthe maximum bilateral plan facial

plane datum

bilateral the of facial

213 +2/-0 Option A Option strikethrough 150 mm 375 mm N/A N/A N/A mm 0 SEMI E15.1 SEMI E15.1SEMI E15.1SEMI Page Option B and and N/A N/A N/A N/A 2 - underline 2 and and (See NOTE 600 mm mm 600 Option C Option 213 +2/-0 213 225 mm225 HT only HT figure 3 figure N/A N/A N/A mm 1.) . 0 for - 4. Option D Option 213 +2/-0 225 mm N/A N/A N/A N/A mm 0 Option E (80 wide)(80 165 mm mm 165 245 mm245 Document Document Number: N/A N/A N/A Doc. 0 Date:

 SEMI 213 + 2/-0 213 + Option F DRAFT 4/5/2018 N/A N/A N/A N/A N/A N/A 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This D6 NOTE Dim D10 H4 H2 D5 D1 C5 T3 2.) H D S (See load port the load (inside stocker cut- the from facial plane the datum on load featureany port measured distance or of maximum protrusion load (A,B)stocker port the to facial plane the datum on from distance the boundary stocker boundary stocker of transportplane the to internal the from distance the datum facial height of carrier,height the clearancea transport the itself, the maximum exclusion This zone occupied is by enter stockerto the the transport. the allows interbay systemtransport of open height the volume that in it ports plane two datum of adjacent load betweendistance the bilateral datumfacial plane (FDP) at distancestarting a D10 the from interbay systemof transport (C,D) horizontal the datum (HDP) plane of exclusiondepth the zone below transport interbay system (C,D) stocker the load (A,B)OR port the datum horizontal plane of (HDP) of zonedepth exclusion below the supplier determinedsystem by and user or (stocker) interbay transport of interbayplane load the port of horizontalHeight the datum system transport (C,D) H2 H4 the from to in interbay the of center zone exclusion lowers plane where datum (FDP) the depth measureddistance from facial the the pins using secondary kinematic to forsystem allow stocker up pick of interbayplane transport the from backwards the datum facial transport interbay system measured exclusion center the volume of distance length or minimum of the to stockersystem the boundary of interbayplane transport the from distance the datum facial out) Definition adjustable NOTE 1.) Option A Option and must 450 mm 130 mm 150 mm 240 mm by ± 10 ±by TBD (See N/A N/A N/A N/A N/A N/A mm be SEMI E15.1SEMI E15.1SEMI E15.1SEMI E15.1SEMI E15.1SEMI SEMI E15.1SEMI E15.1SEMI 1.) must1.) and Page by ± by mm10 ± (See NOTE 200 +10/-4 250 +0/-10 adjustable Option B 505 mm505 TBD N/A N/A mm mm be 3 1.) must1.) and by ± by mm10 ± (See NOTE (See NOTE (See NOTE 800 or mm 150 or mm adjustable Option C Option 1150 mm 250 ± 50 ± 250 170 mm170 mm100 mm230 90 mm TBD N/A N/A N/A N/A mm 1.) 1.) be 250 ± 250 mm50 ± be adjustable 1.)and must (See NOTE (See NOTE (See 150 mm mm 150 or by 10 by mm Option D Option 170 mm 100 mm 230 mm 90 mm90 TBD N/A N/A N/A N/A N/A 1.) 1.) must1.) and (See NOTE (See NOTE 150 or mm by mm10 adjustable Option E 250 ± 50 ± 250 170 mm170 mm100 mm230 Document Document Number: TBD TBD N/A N/A N/A N/A N/A mm 1.) be Doc. Date:

 be adjustable 1.) must1.) and SEMI (See NOTE (See NOTE 150 mm mm 150 or by 10 by mm Option F DRAFT 250 ± 50 ± 250 230 mm 170 mm170 mm100 TBD TBD TBD 4/5/2018 N/A N/A N/A N/A mm 1.) 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and NOTE 2: See Related Information 2of See document.NOTE Related this 2: dimension6). UserSection to(see specify which NOTE 1: reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Dim below the below transport. carrier, above a and clearance Definition Option A Option Page Option B 4 Option C Option Option D Option Option E Document Document Number: Doc. Date:

 SEMI Option F DRAFT 4/5/2018 

primaryset of NOTE 3: Transport vehicleuses 5 (range) underline 250 ± 250 ± C5 50 50 C 5 Stocker kinematicpins. HDP D10 . 150 230 or 150 230 or NOTE 1.NOTE (See H (max) 2 (Drive Through) Option C ) Vehicle Side View (Overthe Rail) T HDP 3 NOTE (min) (See 112 112 D6 2.) Document Number: Document

NOTE 4: Transport vehicle uses primary setof D 10 T3 Doc. C NOTE 800 or 800 or 800 1150 1150 (See 5 1.) (min) Stocker Date: kinematicpins. 4100 H DRAFT

4   4/5/2018 (deg) SEMI H 2 0 2 4100 

kinematic pinswhile on transport.the NOTE 1:Carrier rests on the primary setof AMHS Interbay Load Option Port C (Horizontal Transfer) (min) H4 170 170 (min) 600 600 A1 213 +2/- 213 +2/- (range) strikethrough A2 0 0 Side View (Suspended Type) T Vehicle 3 Figure Page (min 225 225 A3 ) and NOTE 3: Transportvehicle uses

primaryset of 6 4 (range) underline 250 ± 250 ± 250 C5 50 50 C 5 Stocker kinematicpins. HDP . D10 NOTE 1.) 150 or 150 or H (See (HorizontalTransfer) Option C 230 230 (max) 2 Vehicle Side View (Over the Rail) T HDP 3 D6 NOTE (See 112 112 2.) Document Number: Document (min)

NOTE 4:Transport vehicle uses primary set of D 10 Doc. T3 C NOTE 800 or 800 or 5 1150 1150 (See 1. (min) Stocker ) Date: kinematicpins. 4100 H DRAFT

4  4/5/2018 (deg) SEMI  H 2 0 2 4100 

Dim D1 A8 A6 A3 A2 A1 (deg) C5 C3 D Revise Dimensional Requirements for 300 mm AMHS Interbay Load Ports (Open Cassette Only) mmAMHSInterbayLoadPorts(OpenCassette Dimensional Requirementsfor300 stocker the to nearest on obstruction the the from cut-out the or in stocker measured width the port minimum of load cavity the port to load of open tilt the cassette placedwhen (inside the (inside stocker cut-out) facialthe datum on load plane the port load featureany port measured from distance or of maximum protrusion port load (A,B) facialthe datum on stocker plane the from distance the boundary stocker to boundary the to internalof transport the stocker from distance the datum facial plane for of zone use the robotic top flange. carrier.the This an creates exclusion transport from themeasured the of HDP the above carrier transfer during of nearestHeight the stocker obstacle or rail lift conveyor transfer) of exclusion(end the volume fork-for the from transfer rail mechanism measured for fork-lift conveyor volume the or width the minimum of exclusion transfer) for or rail volume fork-lift conveyor (start the transport of exclusion bilateral measuredtransport from the protrusion the of maximum interbay plane) about (symmetric the datum bilateral kinematicsecondarycoupling pins for pickup the FDP) center using at distance(starting a D10 the from width the zoneMinimum if exclusion datumbilateral plane) pins aboutcoupling (symmetric the using secondarypickup the kinematic of exclusion width the zone center for Table 2 Table datum  facial facial as indicated below aswith indicated the maximum height the of maximum Definition

bilateral bilateral plan

plane plane datum plane datum

of the of facial

strikethrough 213 +2/-0 Option A Option 375 mm 150 mm 270 mm 100 mm N/A N/A N/A N/A mm 2 Page SEMI E15.1SEMI E15.1SEMI SEMI E15.1SEMI E15.1SEMI E15.1SEMI E15.1SEMI and and 200 +10/-4 250 +0/-10 Option B N/A N/A N/A 7 mm mm underline 600 formm (See NOTE Option C Option 213 +2/-0 213 250 ± 50 ± 250 HT only 225 mm225 . N/A N/A N/A N/A N/A mm mm 1.) 2 Option D 213 +2/-0 213 225 mm225 N/A N/A N/A N/A N/A N/A N/A mm 2 Document Number: Document 213 +2/-0 Option E Option (80 wide) 203 mm 123 mm N/A N/A N/A N/A N/A N/A mm Doc. 2 Date: 4100 Option F 213+2/-0 250 ± 50 ± 250 DRAFT TBD

mm mm N/A N/A N/A N/A N/A N/A mm  4/5/2018 2 SEMI 4100 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Information 2of See document.NOTE Related this 2: dimension6). UserSection to (see specify which NOTE 1: H2 D6 NOTE NOTE Dim D10 H4 D5 T3 2.) 2.) (See H S (See of the transportof interbay system as of distance the cavity cut-out inner or to (vehicle) the boundary stocker the transportof interbay system from distance the datum facial plane (C,D)system to in interbay H2 H4 the transport centerthe exclusion lowers zone from plane where datum (FDP) the of depth measureddistance from facial the transport. transport. carrier, and clearancea below the the of carrier,a clearance above itself,the transport maximum height zoneexclusion is by occupied the the enter stocker transport. the This the allows interbay system transport to of open Height the volume that in it of adjacentplane two load ports betweendistance the bilateral datum datumfacial plane (FDP) at distancestarting a D10 the from transport interbay system (C,D) datum horizontal plane of (HDP) of exclusiondepth the zone the below transport interbay system (C,D) load (A,B)OR stocker port the datum horizontal plane of (HDP) the of zonedepth exclusion below the by determined user supplier and transport interbay system (vehicle) the loadof interbay port or (stocker) of horizontalHeight the datum plane kinematicsecondarypins for pickallow stocker up the using the transportof interbay system to from measured the datum facial plane Definition adjustable NOTE 1.) Option A Option and must 450 mm 140 mm by ± 10 ±by TBD (See N/A N/A N/A N/A N/A mm be Page SEMI E15.1SEMI E15.1SEMI E15.1SEMI SEMI E15.1SEMI E15.1SEMI 1.) must1.) and by ± by mm10 ± (See NOTE adjustable Option B TBD N/A N/A 8 be 1.) must1.) and by ± by mm10 ± (See NOTE (See NOTE (See NOTE (See NOTE 150 or mm 800 or mm adjustable Option C Option 1150 mm 230 mm mm 230 170 mm170 mm100 90 mm TBD N/A N/A 2.) 1.) 1.) be 1.) must1.) and by ± by mm10 ± (See NOTE (See NOTE 150 or mm adjustable Option D 250 ± 50 ± 250 230 mm230 180 mm180 mm110 TBD TBD N/A N/A mm 1.) be Document Number: Document 150 mm mm 150 or adjustable NOTE 1.) NOTE 1.) Option E Option and must 250 ± 250 50 ± 230 mm 180 mm by ± 10 ±by 50 mm50 TBD TBD (See (See N/A N/A mm mm Doc. be Date: 4100 150 or mm adjustable NOTE 1.)NOTE 1.)NOTE Option F and mustand 230 mm230 170 mm170 mm100 DRAFT by ± by 10 ± TBD TBD TBD

(See (See N/A N/A mm  4/5/2018 be SEMI 4100 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and the risk of infringement of such rights are entirely their own suchresponsibility. infringementareentirely rights their the of risk of this in mentioned items any and copyrights, or rights patent such any with of determination that advised expressly are standard this connection of Users standard. in asserted copyrights or rights position patent no any takes of (SEMI) validity the International respecting Materials and Equipment Semiconductor standard, this of publication By without change notice. to subject are standards These herein. mentioned equipment relevant or other materials and any sheets, respecting data literature, product labels, product user. instructions, manufacturer's the to of refer responsibility to the cautioned solely are is Users standard the of suitability the of determination The application. particular NOTICE: reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any for herein forth set standards the of suitability the to as representations or warranties no makes SEMI Page 9 Document Number: Document Doc. Date: 4100 DRAFT

 4/5/2018 SEMI 4100 

LETTER (YELLOW) BALLOT