KR0101223
KAERI/TR-1637/2000
D8 91S- £71 S! MSN as
Design and Construction of the Clean Room for Proton Accelerator Beam Assembly
32/ 48 2000. 9 Class 1,000^] 7) 200 m3/h 22°C±2,
1) o Cooling Capacity 13,500 Kcal/h o Heating Capacity 10,320 Kcal/h o Humidity Capacity 4 kg/h o Flow Rate 150 CMM o Fan Type Air Foil o Motor 3.75 Kw x 30 x 380V 2) Air Shower o Flow Rate 35 CMM o Size 1,500 x 1,000 x 2,200 o Material In-Steel, 0ut-SUS304 o Air Velocity 25 m/s o Filter PRE + HEPA(61O x 672 x 150) o Lighting 20 W o Motor 1.5 Kw x 3«2> x 380V 3) Relief Damper o Size : #250 o Material : Casing - SS41 Blade - AL Shaft - SUS304 Weight Ring - SS41
- ii - Grill - AL 4) HEPA Filter Box o Filter Box Size : 670 x 670 x 630 o Filter Size : 610 x 610 x 150 o Filter Efficiency : 0.3 pm, 99.97% o Frame : Poly Wood o Media : Glass Fiber o Separator : AL o Flow Rate : 17 CMM o Damper Size : <2>3OO
- in - 7flj5. 1 ^ ^I$ 4 4
6
6 18 23
40
40 40 51 51
56
References 57
Appendix
- iv - S. 1-1 1-^11-^ ^^7l# £fr- 1 S 2-1 ^Hjr^l ^ ^-7l^^JE #eH>i(7fl/m3) 6 S 3-1 *&%&. #efl^>fi rc^ ^H§
Fig. 2.1 ^J£ #efli^£(7fl/m3) 7 Fig. 2.2 Conventional wcH-^ ^1#3E. 8 Fig. 2.3 ^gf^f- «o^^ Tll^S 9
Fig. 2.4 ^Jf^f- «o^^1 Til^S 10 Fig. 2.5 HI^^^ TJl^S 11 Fig. 2.6 *i*g ^^aov^^ ^U) 13 Fig. 2.7 ^^ ^#ucH^ ^^(2) 14 Fig. 2.8 Conventional and clean room bench mixed type 15 Fig. 2.9 Central system diagram 16 Fig. 2.10 Unit system diagram 17 Fig. 3.1 tfi^OT 3.71 0.3 fim<>\] ^M #efl^ Ml-Ml, 00051 ***> -*3#ec! %X&£. 47 Fig. 3.2 Airborne particle count test results 50
- v - o_* of
BCR Biological Clean Room CCDTL Cooling Cavity Drift Tube Linac CMM Cubic Meter per Minute(m3/min) FCM Cubic Feet per Minute(ft3/min) HEPA High Efficiency Particulate Air-filter ICR Industry Clean Room KOMAC Korea Multipurpose Accelerator Complex LEBT Low Energy Beam Transportation RF Resonant Frequency RFQ Resonant Frequency Quadruple ULPA filter : Ultra Low Penetration Air-filter
- vi - n i s-
?!!" (ICR : Industry Clean RoomH- fe BCR2f BIO Hazard lE-fe Chemical Hazard
1-1 IlliiliiSiiilll ililii iliiiiiiililiiiii !il:-ilHllli ^§ 'S 7l ^1 "S" ^ •S ^]"7l 7^1 •§• *ti 43. *}7l, film^-a
#™ si«m^- «« RI A|A|I ^4^1-^A]A^ Chemical, Hazard A^-g^. A)A| DNA -g^ - 1 - 2. BIO Standard 209)2} 19951^ 71 51 (1) , NASA, DOE, FDA, NRC, GSA, NIH, ol# 7)5} JS.^-7} State, Country, Local , IES, ASME, SAE, ASHRAE , ASTM, NSF, UL GSA7} n>^ Federal Standard 2097} Sl-b^] ^] 7}^ ^E] A}-g-5}-b 7]^ ^^ «fv^o]tj-. 3 €• IES-RP-CCS >«-14^^ 20 - 2 - (2) «y£ JIS7V £UL Federal Standard 209E^}^ B 9920O] JIS 7l# ^<^1^ %%J£ i| A^^H^l ^^51^ 7] HTfl JIS# fl?I JIS-B-9920(1989) JACA No. 24(1989) JACA No.l4B(1989) (3) 31^ AS 1386.1—7(1989) : Clean Rooms and Clean Workstations AS 1807.0-25(1989) : Test Methods for Clean Rooms, Workstations and Safety Cabinets (4) BS 5295(1989) : Environmental Cleanliness in Enclosed Spaces (5) ^<£ 7]^& VDI 2O83«H1 77fi VDI 2083(1990) (6) S^>i 7201, 7202 . O _ AFNORofl S^*H ^-N^^S. Si^ $ic}. ZL ^ AFNORS] 3-3^1 NF-X-440101 Cavity^ ^ power ^-i- 511^-Al^^.S.*! Cavity Transmission Rate-1- ^ 1,000 - 4 - (1) (2) (2) §£ (3) ]71 (4) 4* 2. A|> 7\. H>. Air Shower n>. Relief Damper 3. 7\. Air Shower 4. - 5 - n\ 2 M- * 1. #efl^ M 1, #e)j^ M 10, #efl^ M 100, #£fl^ M 1,000, #efli M 10,000, ^ M 100,000, #e||^ M 1,000,000, #efl^ M 10,000,000^.^. S7|m. 4 £] 5i Aov?l^S.^ S 2-1 5? Fig.2.12}- 2-1 37} Ml M1O Ml 00 Ml.000 Ml 0,000M100,000 Ml.000,000 M10,000.000 0.1 10 10" 10a 104 (10) (10) (10) (10) 0.2 2 23 234 2,340 23,400 - - - 0.3 1 10 100 1,000 10,000 100,000 1,000,000 10,000,000 0.5 (0.34) (3.4) 34 340 3,400 34,000 340,000 3,400,000 1.0 - - - 80 800 8,000 80,000 800,000 5.0 - - - - 27 270 2.700 27.000 0.1- 0.1- 0.2- 0.1-0.3 0.3-5.0 0.5 1.0 5.0 7\. l-efl^i M 100, #e)l^ M 1,000, #efl^ M 10,000, #efl^ M 100,000, #efl^ M 1,000,000 il #efl^ M 10,000,000^: 44 Federal Standard 209D2} #?fl^ 1, #efl^ 10, m^ 100, #eH>i 1,000, #2)1^ 10,000 ^ #efl^ 100,000 - 6 - 2- ^ <£*} 37] 0.3 2 10 Nc = N x ( ) - (1) D Nc : N : D : 10. ; M 10,000.000 10' I M 1,000,000 it- 0.01 0.5 1 S 10 (.mi Fig. 2.1 - 7 - 2. 7f. Conventional « Fig. 2.2 £ conventional ^r #^fl^ 1,000 I I Fig. 2.2 Conventional (1) 1,000-100,000 HEPA filter^ (2) (3) (4) 7171 - 8 - .0.13 HEPA filter^ (5) 100*3. HEPA filterS Piston flow HEPA filter^ bankS filter bank chamber^! Fig. 2.3 (1) Filter bank ^-7]$] (2) (3) - 9 - : 100*3. (4) ^ (5) ioo*a HEPA filter chamber^! HEPA filter^. «H^H rating) SE.^ punching slitS 715]7} 7]71 £}<*! 3.x]nV 7]7l# I SKrVWSftfl 1 I 1 1 1 1 1 It Fig. 2.4 (1) 0.3 n/s, ^^%*1« 2.5 432 ^ Slit:}. c>, HEPA filter^ 3L^2} 7] - 10 - (2) (3) (4) 91 o] . Filter (5) fan filter unit# '§*P conventional clean roomSj 7l^iLiiL class 1,000 S]tr}o} •^•S-?-<^S. class s}3. $X7] 4§6 Fan filter unit# J L W / E 5 / I I CLASS * CLASS 100 Ci$X)S 100 I M II \ Fig. 2.5 - 11 - (1) Fan filter unit , 0.1 filter class 10 ¥•££• class 1,000 fan filter unit^ class 100 3£*}x] 7fe€r}t:> (2) -R-^^(Flexibility) Fan filter unit^ >a^lfe (3) 70^ (5) Fan filter unit*} Roomu])# &>] HEPA filter^- ^-^1^ 4 HEPA filter!- -^S ^f flexibility^- - 12 - I |. I I I I 1 I I * * I I I Fig.2.6 (1) HEPA filter^ class 100-500 (2) HEPA filter*} (3) f 60x) (4) (5) filter type, ^3. ^f^fe - 13 - 71H»»ll/j(llWl» i it i n i i I I ° I II J Fig. 2.7 (1) HEPA filter7} |fe class 100 (2) - HEPA filter^ (3) J&.B|. 90-100^ (4) 4 (5) . Conventional^ Conventional #*?!•§- -f- (class 1,000-100,000) - 14 - TOE 11 II \sppts. I I ] 6 ' ' Fig.2.8 Conventional and clean bench mixed type (1) class 1,000-10,000 class 100 (2) (3) ^« (4) 4A (5) , 60% 3. aflo] WOVAIO] A]^^ a] 7}. Central system Fig.2.94} 2*1 |. filter sealing* unit systemiLt:} ?H - 15 - fan 5J ^S £ filter <=> O.I n 10 I 10 i 10 ' —~*1: I <0 <0 Fig. 2.9 Central system diagram . Unit system Fig. 2.10^8: unit system^ 3M3. Ml7} filter 7171 fan 51 - 16 - er O 1} *><3r>^\\\ 0 0 1 0,00 0.1/im 'o.l/im joi/im io i io ; i i i i Fig.2.10 Unit system diagram - 17 - 1. (1) * (2) JL^x (3) CCDTL (4) S (1) : Class 1,000(1,0007fl/ft3) 42.12 m2, 4 m 2 5.87 m , 4 m 11.4 m2 mmmmHillliiiM wmSmmiiiiBililiiiHiii ^S(DB) 22°C±2"C 22°C±2 o 300-700 Lux o 60 i;::H;;;::Sp§fe;;;::;;;;= ::i;;::::!;5i|^:;:;:::;;;; iiiiliiiilllii!!!!!!!!!!; ££(DB) 34 °C -12°C --^J£(RH) 70% 65.4* liiiPilMiiiii iiiiiiliiiiiiH!!!!;!;!!; iHiiiiiiiiiiiii ££ 30 °C 20*0 35 W/mz - 18 - 2. (1) WS class 100 200-600 1, 000 50-70 10, 000 30-40 100, 000 20-30 (2) *1](1) 3] (2) «HI(3) class 1,000 100 m*/h mz 280 m3/h mz 106 nfVh mz 200 m3/h m2 (3) ^ - 19 - QCR = 7,478 Kcal/h (2) $17]^*} 3 QCOA = 300 CMH x 1.2 kg/m x ( 22.7-8.5)Kcal/kg' = 5,112 Kcal/h x l.l(S.F) = 5,623 Kcal/h (3) £*HW*1- Qcr = QCR + QOOA = 7,478 + 5,623 = 13,101 Kcal/h % 13, 500 Kca/h (1) QHR = 3,894 Kcal/h (2) $7]^ QHOA = 300 CMH x 0.29 x (30-12.5)TC = 3,697 Kcal/h x l.l(S.F) = 4,066 Kcal/h (3) ^aflV+HH?-*} Our = QHR + QHOA = 3,894 + 4,066 = 7,960 Kcal/h % 10.320 Kcal/h = 300 CMH x 1.2 kg/m3 x (0.009-0.0009)kg/kg = 2.92 kg/h x l.l(S.F) = 3.21 kg/h = 4 kg/h ^-8-(Electrode) 3. 7}. 1) TK* : 150 CMM 2) Fan type : Air Foil 3) Motor : 3.75 Kw x 30 x 380V - 20 - 4) :y:;^^ttmAs^yy liiiililliililllili V.D 4 0. A Damper 4 Pre-Filter 6 Cooling Coil 8 Heating Coil 6 Medium Filter 20 HEPA Filter 35 Duct 4 Casing 3 Total 90 Air Shower 35 CMM(lSl-g-) 2) ^-3 1500 x 1,000 x 2,200 3) Material In-Steel , Out-SUS304 4) Filter Pre + HEPA 5) Air Velocity : 25 m/sec over 6) Lighting 20 W 7) 1.5 Kw/380V/3#/60HZ Relief Damper 1) ^^ : (?250 2) Material - Casing : SS41 - Blade : AL - Shaft : SUS034 - Weight Ring : SS41 - Grill : AL 4. 7}. ^-71^7] i> Air Shower (1) o Fan Motor : 3. 75 Kw x 30 x 380V o Electric Heater : 3.75 Kw x 30 x 380V o Humidifier : 3 Kw x 30 x 380V (2) Air Shower o 1.5 Kw x 30 x 380V 91 (1) ^^ : 380 V/ 30 (2) ^^ o 40 U x 18 EA 5. Flow Diagram (1) Appendix : DWG NO Z-C-01 - 22 - (1) (2) (1) (2) 717) (3) * (4) fe 7]71, 5l (5) 51 ## 51 (6) 51 (7) - 23 - B>. 7171 5 (i) 7]7i § 7] 71 51 51 -M^-H 7171 7171 7171 51 4 71 oil (2) 7171 51 51 7]71 51 irfl (3) 717] (7\) ^Aj 7171. (4) - 24 - (1) (7}) i| (Cf) 7171 51 (H» 34 : ^-^ ^ -^71 4 -7} (1) (2) , < (3) 4 - 25 - 4. (l) # (2) (3) of. 7M (l) o] nfl, (2) 4 2. (1) ^S (7}-) Wf ^^5] ^^(mm) #26(0.5) 450 o]*\ #24(0.6) 450-750 #22(0.8) 750 OJA^ - 26 - K£- KSD3506£i ^lll^lHIPllHlllllliiiilii1111Illllliiiiiiililllliiiiii 0.5 0.6 0.8 1.0 1.2 244 305 305 305 381 : mm tf&^ylylylylylyyyy. iiii§ififiifliiiiii AU-^yyyyy.oyyyyyyy.-yy, iiiiiiii 11 1 iiliiil lilliil iililii illllilJjlllljlt Illll : Hill iiiiil yyy:y^^^yy^yyyyy: >^ 0.5 25x25x3 3,600 4.5 65 6.0 100 0.6 25x25x3 3,600 4.5 65 6.0 100 0.8 30x30x3 2,700 4.5 65 6.0 100 1.0 40x40x3 1,800 4.5 65 6.0 100 1.2 40x40x5 1,800 4.5 65 6.0 100 (1) f (2) elwflS : (3) #3= il MS : KSB1002 (4) - 27 - (1) Hfl71 1.0mm *] 5? (2) (3) B\. ^J (1) ^^. *M (2) (1) 7fl (3) (4) - 28 - (5) ^ (6) ^S^ ^&^. ufl^ «> (7) ^S (8) Plenum air chamber^ #4 S-^°fl ^*M *H4*K2.. (9) (1) HEPAM- ^^^ filter filter frame, chamber -§-^ (2) *£7] Chamber^- -^^ ^^9"fe ^-£^ 7]^^6fl ^^^H^ «c>. a >fl (3) ^M pin holeo] «l 5:^711 silicone sealing) (4) ^M£| ^7 (1) ^-Ml ^:3Ei| 5J 7l7H-agi ^Sfe clip, glass wool 24Kx25t, ^r^|(vapor barrier), PP bend# - 29 - 2. (1) Casing & Frame (7» Casing ztf^ ^^^^^j& (KSD 3512) 1.2t Casing 51 SL^ o}^-^-^:^ 2.3t o]^^ packing* (Hf) Framed *&&<&&%& 2.0t (2) i^r ( Insulation ) (7f) Ji^r^ master phone 25t# A}-g-^<^ 7)7] (14) Sheets (C» Sheet7f (3) 50um (4) fe Freon-221- > > ^fl strainer* (5) ^4S«y(Cooling Coil) - 30 - (KSD-5301) l/2B,^-7il 0.5mm (^> U-BEND J?«fc 0.6mm)# (U) Fin£ ^-f-nl-^- ^S-«t*t (KSD 6705) ^7)1 0.14mm (Multi-Pass Cross Fin-Type), Fin Pitchfe 8-12 FPL3. t>c}. (C» Fin2* •£# Afo)^ f^> (n» 3.<£2t 3|f1^ AHe|| distributor^ («}) 3. Framed 6>^H 7oVs>(KSD 3506) l.Ot (6) 4171 (Re-Heater) ^}^ 12mm ^Efl^efl^ ^-«.«H1 ^^^^^^I 0.4t# Fin-Type)S *><^ ^^•^ fc^:AS. *}^ heater Framed oj-^S. ^^(KSD 3506) l.Ot (7) 7}#7](Humidifier) (7}) 7>^-7l^ *i^~g- (tf) Casing^ Poly Propyrene^S ^l^Slolo]: i>}xi\, 7^7] t|^5] scale (8) ^^71 5? ^[-^7]( Fan & Motor ) > (Centrifugal)* Afg-*}^ ^3§5l (Impeller)^ Casing^ *1^2|^ ^e] cf tar epoxy - 31 - fe t> framed -g (a» ^^71-af casing^ canvas o]^-^. *H #^1 casing^! (H» Bearing^ ball bearing^ 4-g-^H radial £[ thrust (KSC 4202) (9) Pre-Filter Pre-filterfe Pre-filter^ flat ik unit type^- Framed aluminum^ fl r AFI 85% (a}) Pre-filter-fe $*& SE.^ ^^.o\)^ access (1) -g-1-!^ -S"^-7l (Air Cooled Remote Condenser) (7}) Casing^ *M£: AL <&£.^ l.Ot^l^-i- \ n±z}. & lHP-g-31- 15HP-g- (KSD 3512) 1.2t°l-tfj»3. ^14^]-. (U) -S-^-S^^r ^£ 99.8»o]^^ ol^-ufl ^fe. oJ^AV ^^ (KSD 5301) 3/8B, -^^1 0.4mm (^ U-BEND^-fe 0.45mm)S 4^-t>^}. («SD 6705)^- A]~§.*}^, fin3 Sfe ball %^} (ef) 3.^51 header^ ol-g-nj &-^ ^1^-il:^^ (KSD 5301 )<§• propeller type# A^g.*}^ VcV. F# - 32 - (2) ^ (Refrigerant Piping) (7f) (KSD 5301 )# brazing ^ sleeve* l/40(H -#•§- g^ 71 ( Automatic Control ) (1) step (2) (3) fan controlol (4) water regulating valve# (5) Micro-prosser# o]-g-, 7)7}$] , display panel (6) ( <^^i^(liquid hammer) ^^-i- U*1*M Jfl*B pump down cycled H. (thermostatic expansion valve) 7p#7l level controller), ^(solenoid valve)*!! - 33 - 6\) oil forming crank case heater* ^*H oiiaj- (Safety Devices) (1) High, Low Pressure Switch (2) High, Low Pressure Gauge (3) Over-Load Protector (4) Crank-Case Heater (5) Over-Heating Protector (6) Fusible Plug (7) Fuse (8) Buzzer (9) Solenoid Valve 3. Air Shower y\. 9- $ (1) Casing & Frame (2) (3) Door (4) Nozzle (5) Filter (6) Fan (7) Floor (8) - 34 - (1) Casing & Frame (7» Casing ^M^: SS41 1. B| nozzle plated ^H^^r SCP 1.2tol#g- •(n» Frame & base-b (2) 3) DOOR 7\) AQ£: SCP 1. M-) Auto door(Sliding type)^ ^-f^flfe push button , manual door-cr door handle ^ door closer^- 4) NOZZLE 7» ii#^l 5) FILTER 7» Pre-filter boxfe Jfl^o] 7>^*>3. $&*] ^^*>JE-^ ^l^M filter }^1 filterl- ^^-n|^ nflxls 3.^?Vt:>. (type - 35 - none-woven) i+) HEPA filter boxfe filter^ frame*! 3U¥^ Q&Q 7J1M- >frx\ •FILTER EFFICIENCY: DOP TEST 99.97*(0. 6) FAN 7}) Fan£ turbo £-fe sirocco fanJ^-S ^Vc>. Balancing^: ^ balancing ^ dynamic balancing.£Jc. ^r 0.8t~1.2t *g#*K!#*> shaft K. S#o.S 7) FLOOR 7}) STS304# 8) 4. HEPA Filter Box 1) Casing & Frame 2) Ji^r(Insulation) 3) £.Wa 4) Pre-Filter 5) HEPA Filter - 36 - 1) Casing & Frame 7\) Casing A^ CasingS] S^- o|-§-¥-^:^ 2.3t«>l>y-^ packing Framed ^^^^^^ 2.0t 2) i^(Insulation) £: ^>S.€- 20t# 4-§"*H 7]7] Sheets Cf) Sheet7} 3) 4) Door 7» ^H^^: SCP 5) Pre Filter 7» Pre filter^ ^H 7fe?> type^S. 3^ ^^^^0] 3}^. ^^- A>-g- - 37 - Pre filter^ flat & unit type±S. nf-g- w~g.o} Framed aluminum-i- B» Pre filter^] «^fl-fe AF1 n» Pre filterfe ^^ SEfe A'SN'M access^ 5) HEPA Filter 7}) Filter framed plywood<>l^, °]-§r -¥-«flfe nr'tiol sealing ^5}?];c:>. Sealing *y^£r gasket seal Filter medial glass fiber separator Filter^ JL#^ DOP 99.97%(0.3^m)-ir 5. Relief Damper y\. •?• ^ 1) Casing & Frame 2) JE^SKPainting) 3) Blade 4) Grill 1) Casing & Frame 7\) Casing *f|;g - 38 - 2) .£#( Paint ing) 3) Blade 7\) Bladefe <^^nl% 1.2t# tj-) Bladefe 0.5-4 nnnAqoflXj t:» Blade^ casing^j-fe air Ieak7\ <&£.^ silicon*f|2] packing-^- B}) 0.5-4 mmAqdJI-M 4^^ 41 Slfe balance weight 4) ^^ *H -^^> automatic adjustable type^S 4) Balancer^-^ bearing^ 4) Grill - 39 - 7I- 7] 7}. 95 5ieof|A| ^-tl 4 - 40 - A 95 fi^ M l.OOOJicf 2. (1) (2) (3) (4) o o o o o o o o 3. - 41 - DT (1) 3*1 (2) (3) 3 m 1A^ (4) 20~30 (5) 1 tl (6) itfl (1) ^ S 3- ., 4 300 x 103 m (2) 71 - 42 - 3-1 : x lOV) ;5H pd ni /"IAQ^ Ml M10 M100 Ml, 000 Ml 0,000 M100,000 Ml,000,000 M10,000,000 0.1 2,000 200 20 3 - - - - 0.2 9,000 900 90 9 3 - - - 0.3 20,000 2,000 200 20 3 3 3 3 0.5 (6,000) (6,000) 600 60 6 3 3 3 1.0 - - 300 30 3 3 3 5.0 - - - 800 80 8 3 7W7| 37H c 4. 7\. MN alfe ^^ ^>-§-*}^-. ^71 ^-S-^4^ 3.71 (1) ^-«}- (1) 371 - 43 - 3.7]» (2) 0.1 (3) 5. 51 7}. (1) 51 fe 3S| 6]AOVO. (2) C = ( Ni + N2 + N3 Nn (2) - 44 - N : n : (3) £• 4 M = ( d + C2 +C3 CL (3) C : L : (4) 4 2 2 2 (Ci - M) + (C2 - M) + —- (CL - M) SD = L-l \, SD : (5) SE = SB/ (L)1/z (5) ), SE : S# (6) : Upper Confidence Limit) - 45 - 95% UCL = M + (SE x (6) 3-2 95% 6 7-9 10-16 17-29 >29 (L) t(F.2a) 2.0 1.9 1.8 1.7 1.65 (7) o o 4 44 95% (1) 1H 2 K = ( D/0.3)21 (7) D : - 46 - 10 1 1 1 I/I 1 I 1 | PS-¥-3« «g3s/ i *•* 9 1 1 i/l l 1 11 1 8 Vi i /! MM 1 ^ Fig. 3.1 0.3 ^ Ml -Ml, 0002} 3.7)7} t: V = Vo x K (8) , V : 0.3 (2) - 47 - C = (9) 3 x Qm (3) C ^ 0.6 x (10) 6. 1) Maker : MET-ONE 2) Description : Laser Particle Count 3) Sampling Flow : 0.1 CFM 4) Particle Diameter : 0.3 /zm, 0.5 ^m, 0.7 jiva, 1.0 Floor table )o\)M sampling - 48 - .2fe airborne particle count test ^-S-*>Sft^.^, 3. ^2f 0.5 Mm <&*} 71^*3. 440 7fl/CFM, 470 7fl/CFM 3! 433 7B/CFM^ ^-^^^ <^ai^^, ol#^ ^^1 71^ 1,000 - 49 - 4g. r -in -t— £ •MMI : point i : point 2 : point 3 COlOQUJ 6 sul t a. CO \ CO •Hf CO co u 0 i O o sJ ca ^^ o. L CM CO ^T CL c o XI Ai r CO .ML ^_ 00 r 1 —*-. •—• •- _• _.—- •.—' -o o o o o o o o o o o o o o o o o o o o in o o in CO CM CM JOOJ oiqno jed jo ^ HEPA Filter Box# 1. 3-3 Fan Motor %7l%> %7]% WtmmAq) ^g^^^-(A) &% -tiTfl ^^1 ^^ -a^i ^ 8424 7284 8124 6804 300 480 90 90 11.9 10.9 7\. 3-321- #o.n|, 84*. 7K A 0511 - 51 - (l) "A A) 3 m x 3 m 1 1D5. (2) (3) 3-4 fHJSJfc 22^±2°C 23.61C 2. 7\. A 0078 - 52 - (1) (2) (3) ^S) A]-%V 3-5 55% ±5* 52% 3 -y T— -^r -jrj 7f. 2£^](Portable Photoelectric Photometers) (1) - 53 - (2) cf. .fe 928 Lux~1040 S. ^^ 300 Lux -700 LuxJit:} <^= 3~1.5«HS 3-6 a) 3. 300-700 Lux 928-1040 Lux 4. (1) Ks fl-21 C 1502 (2) KS fl-3 A 0701 (1) (2) (3) - 54 - 3-7 0 dB 40 dB 60 dB 3-7^ Q* 0 dB, 40 60 dBiit:} 5. (1) 10-250 HZ^A-J 0.05-0.5 mm/s (r.m.s) (1) (2) (3) - 55 - n 4 g- 51 1) 0 o o ^H o Air Shower o Relief Damper 2) A] ••ii lililllbiillill inn H i m i 100O7H/CFM 22t:±2 55^±5 300 Lux~700 Lux 60 dB ^•^^^ 4477j|/CFM 23.6^0 52% 928 Lux~1040 Lux 40 dB 5.. 51 717] - 56 - 5 8" References 1. Philip R.Austin, Design and operation of Clean Rooms," Business News Publishing Company, Birmingham, Michigan. 2. Norman E. Brown, " Clean Room Design," Semiconductor Diagnostics and Projects Division Sandia National Laboratories Albuquerque, New Mexico 87185, 1990. 3. R.F.Meeks, " Clean Room History and Training Program," American Vacuum Society Southern California Chapters 16th Annual Symposium, 1983. 4. "^-S 71^-7) 5. M^3tft 6. "TAB 1^M. ? 7. "HVAC system and Application," Chapter57, American Society of Heating, Refrigerating and air Conditioning Engineer, 1987. 8. "National Standards for Total System Balance, " 4th Edition, Associated air Balance Council, 1982. 9. "Procedural Standards for testing, Adjusting, Balancing of Environmental Balancing Burean,1977. 10. "HVAC System Testing, Adjusting & Balancing," Sheet Metal and air-Conditioning Contractors National Associating, Inc.,1977. 11. "^^ *5H^-," 1974. - 57 - Appendix 1. ^l^-ti ^^S) 71- 2. - 58 - 2000. 04. - 59 - l. 2. 3. 4. 5. ^ 6. - 60 - 1. class* 2. 7}. classl- (1) (2) (3) 3. - 61 - (l) (2) (3) (4) (5) (6) (7) (l) classl- o ^H# J£fe ^#5^ 7]^ ^1^ (2) o ^a, ^^, S.^ 7}-^?V ^^gs. class^ VA o ^^EB ^]^V^I ^^^ class-t %H 1€ 1^7} Si# tffl *J|.g.*||o) - 62 - (3) (4) - 63 - 71^)51 $;gsft ^.ESJ 34 (5) o o (6) 7] IS? - 64 - - 71 Ef : 33, 34* *K2. 71 ^ 33, 33 33 #551 33 (l) safe o 371, - 65 - (2) (3) 9ii 41-& class^l o Air Shower - 66 - (2) o ^^^ofl^ Sl^J^ 4TT Air Shower O Air Shower-1- (3) o o #^ J# O ^^1%^ #O]7] o 4. (2) o ^^S. class Ml~M10,000^ o class M100,000~M10,000,000^ o (3) Af-g- - 67 - -§• (4) o 4l# 5i 4 A17H] - 68 - }^ g ^ classif class* W ^W class o]^-^.^. gflo): 6010-6713 50"C~55t: 100% oflsq ^^«H ^^ 0.2/im °}%}$) J ]^ ^^]^] (1) (2) (3) - 69 - 17} €• - 70 - o & Class Ml~Ml,000^ (2) ^8-fc-g n} (3) (4) ^§dL£^ 51 5. - 71 - (1) (2) (3) (1) (2) (3) (4) (1) (2) (3) MS. (4) (5) 6. - 72 - (1) (2) (3) (4) (1) (2) 4 (3) (2) (3) (4) - 73 - (2) 71 -fe <^ 7^ (3) (4) (5) a}. (2) (3) (4) - 74 - ? I) Flow Diagram Z-C-01 2) Z-C-02 3) Z-C-03 4) Z-C-04 5) Z-C-05 6) "iHSHl Panel Z-C-06 7) Panel Plan Z-C-07 8) :§-7]^^^ Panel Z-C-08 9) Panel Detail Z-C-09 10) Duct Plan Z-C-10 II) Duct Detail-1 Z-C-ll 12) Condensing Unit Z-C-12 13) GCA-5AT Z-C-13 14) HEPA Box Z-C-14 15) Relief Damper Z-C-15 16) Air Shower Z-C-16 17) ^^afi^E. Z-C-18 18) Hand Rail ^ A]-I Z-C-19 19) 1 Step Micom Controller Z-E-001 /II J **d? UH y^\"-5^ Sr* Z-G-051 - 75 - CONOENSIWg UNIT SCfl-5HPxlEA 8,424 CMM LEGEND 8,124 CMH 0 FRESH AIR INTAKE lOUVER a cooutia COIL tax TYPE) HEAT1NQCOIL 0 PRE-FLTER (KPS SOOONAFI85X) 0 UEDWU-HLTCR 1 HUMIDIFIER <# SUPPLY Aid FAN x x x x x x x 5? HEPAFILTEAaOX ft RQJEF DAMPER (SCRO025O) COMPRESSOR cuss 1,000 SA(CMH) 8.424 2» PROPELLER FAN AHU S.A(CMH) 8,424 -SA — SUPPLY AIR DUCT -RA- AHUR.A(CMH) 8,124 RETURN AIR DUCT -OA- PASS Alfl(CMM) 5,424 OUTSIDE AIR OUCT O.A(CMH) 300 — PA- PASS AIR DUCT E.A(CMH) 300 RS : REFRIGERANT SUCTION PIPE 22C±2C SEsacc) Rl: REFRIGERANT UOUID PIPE 6E£3( %) 55 % ± 5% e3IS4>(M*/HH*) AIR FLOW DIAGRAM SCALEWONE FLOW DIAGRAM SCALE N/S CT A. fitaas^ aaa CLEAN ROOM A DATE Z-C-01 REASONABLE DATE SING CHECK APPR IK •B 3 KT eg- FIO o 3K 3» «r O HO m nl N so EM r> TO iilO mo nr 000'I OOO'V 311 S3" no —l 0 I 1 L 098 I 093 I OOO'Z QQ0'9 OOS'I OOO'E 0MECTOfl£YNO SUtASSY NO 7.500 II II '•• II II II II II II II II 2C-100x50x20x3.2t II II II II II II II— -T— 2 3-1OC 3x3.2t II HANGER BOLT x$Dx2 ~@1000 II II II II II I 3,30 0 8 •TT" II II SCALE S(BEJSOf Wail CLEAN ROOM UHIT Z-C-03 SIBKSf NO 7.500 JVL I 0-100x50x20X3.21- 0-100x50x20x3.51 200 200X8X12 • H-BEAM 200X200X8X12^ 670X87 IX610HXSSET 250x250x9x14 01W BUI .EL H-1O0x10Ox6x8 / H-BEAM S450 C/RSFCTION 6-2) SCALE LOW) 2,500 PBOJECT SCALE N/S 1 siaas* tf aa CLEAN ROOM UNIT DATE Z-C-04 REASONABLE DATE SING CHECK OftECTOKCYNO SUB ASSY NO 8,650 SCALE ataagut 41S41 CLEAN ROOM UNIT REASONAB16 m Z-C-05 APPfl 6.600 8,650 1.000x6e600 1,000x8a650 s 5.00 0 "A" a ;H "8" ait PANEL PKUECI SCALE ataaBSt 41S6I CLEAN ROOM A. A U Z-C-06 SING WPR i O _) O LU Nl s iO S XT K mo nr ooo's OOS'l OOl'Z 006': OOl'Z ooo> § ft LH SU8ASW »0 6,650 2,850 3,800 »a/mr HO INSUDOOR DfiTAIL PANEL CEUING+WA11 OETAIL PANEL T-BAR DETAIL PANEL CORNER DETAIL BASE PART DETAIL PANEL DETAIL SCALE HiS "ISEiaet UttU CLEAN BOOM UNfT DATE REASONABLE DATE SING CHECK APPR Z-C-09 PMETOBCY HO SUB ASSY NO 6.650 'GRILL o 0 in O 1.5 0 DUCT PLAN SCALE N/S FROJECT mj: a(gejgst 41 a41 CLEAN ROOM JJATE SYU REASONABLE SING APPR Z-C-10 I < I Q O «r m N § in 3 HJO -M 5 3 % K 1I Si V ill T» »1 5 9 mo V $ nr I 3 • n it "II M r Ii 1i I 3I I 3 •- '- - - * I i s V 8 B g 3 a « 8 H s s S %B • E ir 5 5 g •t ft S s 8 £ » 5 s. 4- : Ig! S8! S 3 >r •1 13 n= 3 : V JT w 8 IP X i if iIiIi £ S ss 2 8 iI »1 9 X i i e i o & CM X m CrMr OS S T o CL OJ CO CM 75k w S IME N 1 T CO o a •Q. o CO *- co tn CM -O°Z ^^ UJ N 8 E Q N i CO CO ( cc UJ w a ?n +A I In _J 8 Ql 2 3 % a. CO CO 150 5 QT Y u. O 3 o _J z CE z o V WO oli d rr P u. ocr cr CC in T A £0555 nr < O U. LL O. N G PRO T DEN S ESC R PELL E PELL E ElVE R ESS D III ^ 04 co ^ ui O o *r o O O < 8 UJ CD < u. rar. rar. o u cr u CO CO ao O> JDDDDDDDDDDDDDDDa iDDDDDDDDDDDDDDDDD ""IDDDDDDDDDDDDDD DDDDDDDDDDDDDDD IDDDDDODODDODDD 03DDDDDDDDDDDOD. "0DDDDDDDDDDDDD1 DOaODDDOOODODa DDDDDDDDDDDDDD 'DDDDDDDDDDDDDDffl OtfKCKMEYNO NO TITLE QTY MAT! DIMENSION 1 MANO METER 1 ASSY 0-50mmAq 2 MEOIUM FILTER 2 GLOSS FIBER 610x610x65t 3 CASING 10 SCP ti.2 4 CONTROL PANEL 1 AL 20SLx120H 5 FAN (AIR FOIL) 1 ASSY DS#2w 6 CONTROL BOX 1 S8HG ti.2 7 FAN MOTOR 1 ASSY 3.75kwx4P 8 COOLING COIL 1 AL+CU 1/2" 9 ELECTRIC HEATER 1 STS 3.76kwx4S 10 HUMIDIFIER 1 ASSY 3kw 11 INSULATION 1 PU-FOAM t25 12 DAMPER 1 SCP ti.6 13 PRE FILTER 2 POLYESTER t25 *COMPRESSOR:OUT DOOR UNIT* (SRC-5HPx1SET) 1.410 GCA-5AT /• SCALE 0€SION OflAWN ^sas^ uaa CLEAN ROOM A Z-C-13 REASONABLE OAT6 SING CH6CK sia/ssr no CASING ss*t 1.2T FILTER SET BOLT SS41 3/8" x t75L FILTER CLAMP SS41 PUNCHING COVER SS41 1.2T P/COVER SET BOLT SUS304 6MM HANGER SS41 50 X 50 x 50 SSHI TOILON 20T(M¥SS) GLASS HEPA FILTER (C|g«) FIBER 610 x 610 x 150 V-DAMPER SS41 0300 /^rrnrtrftTTnn \ to / 1. HEPA FILTER 1) TYPE : 25«. 2) 3=3 (SIS) : 610 X 610 X isor 3) 22 g§ : 0.30135 x 99.97% (OOP). 4) FILTER FRAME : POLY WOOD. 5) §S : 17CMM. 610 2. K£ : TOILON 2OT (UAH£). 3. CASING £» : £¥£«. 670 670 4. PANEL 613 5!« : 680 x680. 0300 5. *m «a : 6SET. r i o o O 00 if) 1 O' m HEPA BOXf PRCMECT SCALE N/S «iaaSt» 41S41 CLEAN ROOM UNIT DATE Z-C-14 SYM REASONABLE DATE SING CHECK APPR g g a i CASING SS41 1.2T 2 BLADE 1.2T 3 BLADE SUPPORT BOLT SS41 M24 SHAFT SUS 304 10MM WEIGHT RING SS41 GRILL AL SUCON AIR TIGHT SEAL RUBBER TYPE WALL OPEN SIZE WALL THICKNESS #190 240 280 250W x 250H 50-75T ea 0250 300 340 310W x 310H O CM • ^; i. \; 1 \ 1 \\ S J ^-^ J \ // \\ \ \ s\ /; \ 1^ .—* O CN ,20, A 20, B RELIEF DAMPER (0250) SCALE N/S DBKH DRUM UNrr «?Bag^ «S6( CLEAN ROOM A 1**% SYW REASONABLE DATE SING CHECK APPR Z-C-15 S i a a F.L LAMP 20Wx1 DOOR HINGE SUS3O4 JET NOZZLE SUS304 030 HEPA FILTER GLASS FIBER 610x762x1S0(Dgg|) CANVAS TAPOLIN POOR OPEN BOOY FRAME SS41 1.2T FAN / MOTOR 3«x2HPx2P VIBRATION RUBBER «40x25H DOOR GLASS CLASS 5T DOOR HANDLE SUS3O4 KEY FLOOR SUS304 1.2T DOOR CLOSER CONTROL PLATE AL JET NOZZLE COVER SUS3O4 1500 PRE FILTER NON-WOVEN 2OT 800 500 1000 -< SPECIFICATION >- POWER : 3«i x 380V x 60Hz HEPA FILTER : OOP 99.978 (0.3 OBff) Dm© PRE FILTER : AFI 80!! U \ / J ! ' N kfe>_ -T 00000 00000 AIR SHOWERtONE PERSON) N/S DESKN HUM FKUGCT rm£ «?BHJ5«» UtSU CLEAN ROOM SYM REASONABLE DATE SING CHECK Z-C-16 EPOXY GRAUTING Wii \ ••*.» *•• •'? '. •«* r'•::•.•<• •v''* >• V- 1 • '% • •. * i. *,* _ >*.••' •' *•* : 1 : •i •* .-.-< ..•••..-. ..M • ."^":. ::.i'vV :-/••;• E 3,00 0 1 I 7" [jSJLJ laoo /I •(,000 I5E SCALE N/S C4BEJS4 ftiail CLEAN ROOM UNIT OATE SYM REASONABLE DATE SING CHECK APPR Z-C-18 Fa T o SO w N m CM T- QJIUJI oJoJ 5 K UiO nr 000'9 1.220 . o o II II II II II II II II II II II II II II II u \ 00£ 1 o r*. x' o ? o OOFT !?-r_^:~=i __ _. 00V9 OOt-009 JUB «SOT to OUTPUT I ALARM PART~1 RST R/S:AC 220V POWER C1A:COMP1 AtARU FAN:FAN(8LOWEH) 220V OUTPUT C2A:COMP2AIARM CS1 :COMP1 SOLENOIOE 220V OUTPUT RHA:REHEATEH OTC ALARM 01 :COMP1 MQ HOLO 220V OUTPUT HHA:HUMI-HEATEn OTC ALARM RH1:H£-HEATEB1 220V OUTPUT FAN :FAN ALARM RH2:RE-HEATCR2 220V OUTPUT WLAWATER LIQUID ALARM RH3:RE-HEATER3 220V OUTPUT H -.WATER HIQH LEVEL RH4:RE-HEATEfl4 220V OUTPUT L WATER LOW LEVEL RH5:RE-HEATER5 220V OUTPUT CMA:ALARM COMMON AC24V SIGNAL HHUHUMI-HEATEBI 220V OUTPUT SH/RE:REMOTE SHUTDOWN HH2:HUMI-HEATER2 220VOUTPUT | DIP S/W Jltetf 8 HEATER STEP N0.2 COMP STEP NO.3 HH HEATER NO.4 2STEP 1STEP 8STEP HEATERAISSHNO.8ON B^» 3HS3I AI8MNO.5ON »« A189XI NO.7 ON FAN TWS UBU NO.S OFF iMQ&CONTACf] RH2) (RH3) (HH4 BO :8LOWEfl OVERLOAD RH1 : RE-HEATER 1 MG. LP :IOW PRESSURE SWITCH RH2 : RE-HEATER 2 MG. HP :HIQH PRESSURE SWITCH RH3 : RE-HEATER3 MG. CFO-'CONOENSOR FAN OVERLOAO RH4 : RE-HEATER 4 MG. CO :COMP OVERLOAO RH5: RE-HEATER 5 MG. DF :DIFFERENT1AL SWITCH HH1 : HUMI-HEATER1 MG. E.C.U MICROPROCESSOR CONTROLLER FAN :FAN MG. (SLOWER MG.) HH2: HUMI-HEATER2 MG. CCH1 :CRANK CASE HEATER * ALARM HAWte CONTROLLER JJHM CSI : COMP SOLENOIOE ALARM JlfeO! £101 BE HtiS 8X1 818. Ct :COMP1 MG. CF1 : CONDENSOR FAN 1 M3. NOTE INPUT POWER :360V INPUT POWER :440V 3I£ 3I£ 380V/220V 440V/220V NO SYMBOL THERMAL OVERLOAO RELAY 1 MS1-12 MAGNETIC SWITCH 2 EOCR 1-2 ELEC.OVERCURfl.RELAY 3 NFBt-3 NO FUSE BREAKER 4 TR TRANS FORMER S TH1-3 THERMAL OVERLOAD RELAY 1 STEP MICOM CONTROLLER aiHaSSAlHAI CLEAN ROOM NU DESCRIPTION MAIbHIAL U'lT SIZE 1 EVAPORATOR OJTUBS+ALflN 1 2 DISTRIBITTOH BRASS 1 3 EXPANSION VALVE NA 1 4 SOLENOID VALVE NA 1 5 FILTER DRIER SILICAQEL 1 6 SIGHT GLASS NA 1 7 HIGH PRESSURE GAUGE NA 1 8 LOW PRESSURE GAUGE NA 1 9 SUCTION STRAINER SUS 1 10 COMPRESSOR NA 1 11 SERVICE VALVE NA 1 12 AIR COOLED CONDENSER CU1UBE+ALFIN 1 13 RECEIVER TANK NA 1 ) SUPPLY ii FAN I SA SA (SUPPLY AIR) ESS ROOM RA RA T T (RETURN AIR) AIR FILTER (PRE + MED.) [DRAIN a on w, SCALE N/S KSCN Dium PROJECT «IBEIS6t USU CLEAN ROOM A. uNrr A. _Aj DATE iwa.02.0' SYM REASONABLE DATE SING CHECK APPR Z-G-051 INIS KAERI/TR-1637/2000 (TR, tn 2000.09. 51] 95p. 9tI-g-( V 21x30Cm. V ). ), ^r class 1,000(1,0007fl/CFM), 200 m3/h m2, 22'C ±2, Performing Org. Sponsoring Org. Standard Report No. INIS Subject Code Report No. Report No. KAERI/TR-1637/2000 Title/ Design and Construction of Clean Room for Proton Beam Subtitle Accelerator Assembly Project Manager J.S.Park(Engineering & Construction Department) and Department Researcher and I.T.Song Department ( Engineering & Construction Department) Publicatio Publicatio Publisher KAERI 2000.09. n Place Taejon n Date Page 95p. 111. & Tab. Yes( V ), No ( ) Size 12x30 Cm. Note 0pen( V ), Restricted( Report Type Technical Report Classified Class Document Sponsoring Org. Contract No. Abstract (15-20 Lines) The objective of this report is to design, construction and evaluation of clean room for proton beam accelerator assembly. The design conditions o Class : 1,000(1,000 7fl/ft3), o Flow Rate : 200 m3/h m2, o Temperature : 22*C ±2, o Humidity : 55%±5. The main design results are summarized as follows: o Air-handling unit : Cooling Capacity : 13,500 kcal/h, Heating Capacity : 10,300 kcal/h, Humidity Capacity : 4 kg/h. Flow Rate : 150 CMM o Air Shower : Flow Rate : 35 CMM, Size : 1500 x 1000 x 2200, Material : In-steel, 0ut-SUS304, Filter : PRE + HEPA, AIR Velocity : 25 m/s o Relief Damper : Size : 0250, Casing : SS41, Blade : AL, Shaft : SUS304, Weight Ring : SS41, Grill : AL o HEPA Filter Box : Filter Box Size : 670 x 670 x 630, Filter Size : 610 x610x 150, Frame: Poly Wood, Media : Glass Fiber, Filter Efficiency : 0.3^m, 99.97%, Separator : AL, Flow Rate : 17 CMM, Damper Size :0300 Following this report will be used important data for the design, construction, operation and maintenance of the clean room, for high precision apparatus assembly laboratory. Subject Keywords Clean Room, Air-shower, Air Filter, AHU, Relief Damper (About 10 words)