Coating Systems for Glass Applications

COATING SYSTEMS FOR GLASS APPLICATIONS COATING SYSTEMS FOR GLASS APPLICATIONS GLASS FOR SYSTEMS COATING ARCHITECTURAL ISMART GLASS GLASS FLEXIBLE I AUTOMOTIVE GLASS GLASS Our History & Experience Equipment and Applications

VON ARDENNE has a long tradition in glass coating. In 1955, the Manfred von Ardenne Research Institute was established in Dresden. Functional Coatings on Flat Glass This institute achieved a leading position in electron beam and or Web for Architectural Glass plasma technologies and their application in vacuum coating. Many times, the institute paved the way for large-area coating and the With our GC330H and GC254H glass coating systems, we offer equip- development of highly productive production processes and systems ment suited for the production of a high-quality product portfolio of offered by VON ARDENNE today. architectural glass for all global markets. Whether it is Solar Control, Single, Double or Triple Low-E coatings, In 1974, we have started to establish our expertise in magnetron with VON ARDENNE equipment you will achieve your required visible sputtering. Since then, we have become a worldwide leading transmittance and infrared reflectance as well as the best optical per- company in magnetron sputtering. We owe this success to our more formance. than 40 years of expertise in mastering and further developing the We have delivered more than 70 of these coating systems to customers technology, the equipment and the components. all over the world.

Our expertise in magnetron sputtering continues to grow and is constantly being incorporated into the development of layer stacks and the corresponding deposition processes. This ensures excellent layer properties. It is vital that the coatings are impeccable, especially for modern architecture with large glass façades. ARCHITECTURAL GLASS FLAT GLASS & POLYMER FILMS Another important milestone was the first inline sputter system in 1983 for continuous coating of precious metal-free mirrors for the Functional Coatings on Flat Glass furniture industry. The success of the project mainly depended on the newly developed large-area planar magnetron. The system was or Web for Automotive Glass the predecessor of the equipment used for the production of heat- VON ARDENNE is the number one supplier of automotive glazing insulating architectural glass today. manufacturers when it comes to window coatings either on glass or web to create window film. A majority of the world’s thin-film coating In 1993, the planar dual magnetron was used for the first time for capacity relies on VON ARDENNE coating equipment. architectural glass coating in an upgrade project. The breakthrough Sunlight protection coatings prevent the interiors of cars from heating up, came in 1996 with the first inline coater for Jumbo formats (3.21 m x thereby reducing the energy consumption. This is extremely relevant for 6.00 m). electric vehicles: If the coating reduces the energy consumed by cooling, the battery lasts longer and the range of the vehicle is increased. In the field of process control, VON ARDENNE was among the For automotive applications on flat glass, the GC254H glass coating first to offer a plasma emission monitor that allows optical process system is a suitible platform. The FOSA MX, a web coating system with control in an industrial environment. Many of our customers have a modular design, is ideal for high-volume production of window film. first applied the first-generation PEM05, then the VAprocos and now the VAprocos2 process control system to enable transition mode VON ARDENNE has developed the FOSA LabX 330 Glass, a roll-to-roll sputtering from planar and rotatable targets. vacuum coating system that is optimized for the processing of flexible glass.. We have also established an alternative integrated solution for AUTOMOTIVE GLASS FLAT GLASS & POLYMER FILMS optical measurement: the ExSitu measuring system. Furthermore, we have successfully launched our “online trimming & shimming service”. It allows customers to adjust the coating uniformity of Switchable Coatings for Architectural single magnetrons based on the ExSitu measurement data of single and Automotive Glass layers and predict the best gas trim and magnet bar shimming. This For smart glass applications, such as electrochromic or other switchable calculation saves a lot of time compared to the previous trial and glass, we offer equipment solutions that match the process defined by error approach used for the optimization of magnetron uniformity. the customer. Among the applications are privacy glass, which can switch from transparent to opaque if necessary, electrochromic glass that offers In 2016, we developed and built the prototype of our roll-to-roll sun and heat protection or dimmable windows in buildings and vehicles. vacuum coating system that is optimized for the processing of With these coating systems, for example a customized version of the flexible glass. Flexible glass is a relatively new substrate material GC120VCR, our customers can deposit the transparent conductive oxide with a unique combination of properties. It is available in rolls and layers. An example for such coatings is ITO, which is necessary to func- is ideally suited for applications such as flexible electronics, flexible tionalize glass and turn it into smart glass. photovoltaics and flexible displays. Our customers can rely on our experience with coating systems and process technology for ITO thin-films for many different applications. Today, VON ARDENNE has established itself as a vital supplier for the vacuum coating industry for more than 40 years. We offer a portfolio of solutions covering many applications, especially for flat substrates and large coating areas and are a leading provider, not only of equipment, but also of process technology. SMART GLASS FLAT GLASS Core Technology Our Strengths Based on a Long Tradition

Unique Combination of Process, Industry-Proven, Reliable and Advanced Technology & Engineering Expertise Sputter and Magnetron Technology The main technology used for coating on VON ARDENNE equipment is magnetron sputtering. We develop and manufacture the necessary components such as magnetron NIQUE EXPERTIS sputtering sources in-house and have more than 45 years of U E experience with magnetron sputtering.

VON ARDENNE Magnetrons VON ARDENNE magnetrons are available for a wide range of applications. Thanks to many years of experience gained from designing and installing advanced sputtering equipment, we can offer a complete portfolio of solutions from RF and AC to DC processes, planar to rotatable applications and even magnetrons with integrated turbopumps such as the RDMT.

Process Components Sputter Components and Technology ĵ Planar or rotatable magnetrons with single or dual cathodes - designed and manufactured by VON ARDENNE ĵ T-series Magnetrons - the combination of sputtering Magnet Bars and pumping in one component All magnet bars and magnet systems are ĵ High-utilization WSM - excellent uniformity and target lifetime similar in mechanical design and therefore for very long coating campaigns interchangeable. ĵ In-house manufactured end blocks, magnet bars and magnet systems ĵ In-situ and ex-situ quality control equipment SSM MAGNETRONS RSM MAGNETRONS with exceptional performance and features ĵ Flash lamp annealing systems that feature the longest tubes X-Series End Blocks in the world With our state-of-the-art X-Series end blocks, ĵ All components are tested in our in-house vacuum test chambers we offer both drop-in and cantilever solutions for our coating systems.

Process Technology ĵ more than 45 years of experience in vacuum coating technologies ĵ Industry-leading application know-how for Low-E, TCO and many Process Control other coating products The VON ARDENNE process control system ĵ In-house developed sputtering hardware & customized solutions VAprocos2 controls the reactive magnetron ĵ Advanced process control systems based on optical measurement, sputtering of compound layers. process simulation and feedback control ĵ Ground-breaking anode solutions such as the Dual Anode System Dual Anode Sputtering (DAS) for minimum substrate heat load Dual Anode Sputtering (DAS) is an industrially ĵ Technology & Application Center with state-of-the-art sampling & proven coating technology. It can be applied testing facilities for highly-resistive target materials such as intrinsic tin oxide (i-ZnO). The DAS method Systems Engineering guarantees a good availability of the anode as it is cleaned periodically, even when dielec- ĵ proven machine platforms developed & improved during decades trics are sputtered. ĵ Innovative machine solutions for new applications and substrates such as flexible glass Trimming & Shimming ĵ Expertise in transport design for rigid and flexible substrates of A web-based trimming and shimming soft- different thicknesses ware is available. It enables the quick optimi- ĵ Substrate heating and cooling systems for optimized process control zation of the thickness uniformity of single layers. Upon request, an online adjustable ĵ Sophisticated upgrade and retrofit engineering for VON ARDENNE magnet bar can be offered. WSM MAGNETRONS RDM MAGNETRONS systems and legacy equipment Advantages & Benefits of VON ARDENNE Advanced Layer Systems for Low-E & Solar Control

Flexible Process Compartment Concept Transport System For more than 50 years, the glass industry has been striving to increase Our expertise in magnetron sputtering continues to grow and is the comfort of buildings, to minimize the transmission of heat into the constantly being incorporated into the development of layer stacks and The process chambers can be configured individually based on the The compact tool design is fitted with a short roller-to-roller distance. interior and the heat loss through the windows by means of coated the corresponding deposition processes. This ensures excellent layer flexible VON ARDENNE compartment system. They have a scalable design This design enables the safe transport of glass sheets as thin as 2 mm glass. Every since the beginning of the oil crisis in 1973 and the resulting properties. It is vital that the coatings are impeccable, especially for and can be configured according to the requirements of our customers. without further changes and even 1.6 mm with minor transport system drastic price increase for fossil fuels, energy saving and efficiency have modern architecture with large glass façades. The configuration can be easily changed at any given time in the future, adjustments. become increasingly important. The development of the corresponding which enables an easy adjustment to changing end-customer needs over VON ARDENNE glass coaters are especially well suited to cover typical technologies has been accelerated by the growing awareness of the This is true no matter for what climate zones and requirements the the lifetime of the tool. substrates for architectural glass and thin automotive glass at the same climate change caused by greenhouse gas emissions. energy efficient glass coatings are needed. Whether it is Solar Control, All compartments are identical to provide a maximum of flexibility. time on the same tool. Single, Double or Triple Low-E coatings, with VON ARDENNE equipment After thermal coating methods such as thermal evaporation had initially you will achieve your required visible transmittance and infrared Measuring Systems, Quality Inspection Scalability dominated in the early years, magnetron sputtering became prevalent in reflectance as well as the best optical performance. and Trimming & Shimming Software VON ARDENNE provides advanced PVD coating equipment, key compo- the 1970ies. nents and technology expertise for all scales of production, from labora- Beyond that, a high uniformity is crucial for the quality of the layer In-Situ Measurement tory tasks to high-volume manufacturing. In 1974, we have started to establish our expertise in magnetron systems. VON ARDENNE coating systems easily achieve a thickness Combines the results from different coating steps within the coater and Our laboratory-scale coating systems and pilot production tools use the sputtering. Since then, we have become a worldwide leading company uniformity of ±0.8 percent for Triple Low-E layer systems at a maximum helps monitor the coating process for quality control same key components as our systems for industrial production, however in magnetron sputtering. We owe this success to our more than long-term stability for an efficient production process. On top of that, at a smaller scale. Thus, our customers can test their applications under 40 years of expertise in mastering and further developing the the mechanical stability of the layers is excellent, which is an ideal Trimming & Shimming Software laboratory conditions and save time when they scale their products up to technology, the equipment and the components. precondition for further processing. Web-based, enables the quick optimization of the thickness uniformity a larger productivity or for mass production. of single thin layers

Recording of Process Data Technology & Application Center Our PROCESS DB SQL data base records the process data of coating VON ARDENNE owns a wide range of in-house coating tools and offers systems 24/7 allowing for detailed data analysis and correlations. sampling, developing and testing of customized layer stack solutions.

Ex-Situ Measuring System Vertical Inline System Quality assurance and quality monitoring for coatings on glass ĵ Heated system ĵ Plasma pretreatment VAprocos2 Process Control System ĵ Planar and rotatable magnetrons Controls the reactive magnetron sputtering of compound layers ĵ Carrier based substrate transport

— Dielectric/protection Proven Layer Stack Competence Horizontal System for Sputter-Up Processes We have more than 45 years of experience with depositing functional ĵ Heated system — Buffer layers on large-area glass substrates. This experience is based on more ĵ Plasma pretreatment — Infrared reflection than 50 VON ARDENNE glass coating systems installed all over the world. ĵ Carrier based substrate transport Furthermore, we have excellent sampling facilities and simulation soft- — Seed ware to demonstrate, develop and improve layer properties. Horizontal Inline Coating System — Dielectric/interference Simulation-Driven Product Development ĵ Inline washing and coating system — Buffer ĵ Ex-situ measuring station Plasma process and magnetic field simulation for excellent film growth, — Infrared reflection optical simulation for outstanding film properties ĵ Planar and rotatable magnetrons — Seed ĵ Roller-based substrate transport — Dielectric/interference

— Buffer

— Dielectric/protection — Infrared reflection

— Reflectance — Seed

— Dielectric/interference — Dielectric/interference SOLAR SINGLE DOUBLE TRIPLE CONTROL Low-E Low-E Low-E

for for for façade glazings of reduced radiation of residential energy-efficient incoming sunlight heat insulation commercial buildings Our in-house horizontal inline coating system “Adele” GC330H & GC254H Modular Coating Systems For Architectural Glass Applications Including 100“, Jumbo & Super Jumbo

With our GC330H and GC254H glass coating systems, we offer equipment to produce a high-quality product portfolio of architectural glass for all global markets. We have delivered more than 50 of these Planar Magnetrons with Exceptional Target coating systems to customers all over the world. We provide our inline systems in customized configurations suitable for all Utilization and Uniformity common glass sizes including 100“, Jumbo and Super Jumbo format. VON ARDENNE has developed the PLANAR XT magnetron which features more than 6000 kWh target up-time of a 30 mm silver target (in Jumbo size) and still delivers best-in-class uniformity at the beginning   VON ARDENNE Process Chambers TECHNICAL DATA GC330H TECHNICAL DATA GC254H (< +/- 1.0 %) and the end (< +/- 1.5 %) of target life. The main benefits of Subject to change without notice due to technical improvement. Subject to change without notice due to technical improvement. The sputtering chamber consists of a customized number of universal this component are longer campaign times without being forced to vent compartments with a standard width of 780 mm. All compartments are the system due to a lack of silver target stock and the ability to produce SUBSTRATE SUBSTRATE identical to provide for maximum flexibility. complex layers throughout the whole production campaign. Material flat glass Material flat glass Size Jumbo (W × L), other options possible 3300 x 6000 mm Size (W × L), other options possible 2540 mm x 3810 mm Proven Sputtering Technology Size Super Jumbo (W × L), other opt. poss. 3300 x 7800 mm Thickness (including uneveness) 2 mm to 19 mm Measuring Systems & Quality Inspection Thickness (including uneveness) 1.6 mm to 19 mm The technology used for glass coating on VON ARDENNE equipment is In-situ measurement: Combines the results from different coating magnetron sputtering: steps within the coater and helps monitor the coating process for DEPOSITION SYSTEM DEPOSITION SYSTEM -6 -6 High rates, excellent uniformity: By magnetron sputtering, all quality control Base pressure in sputtering chamber ≤ 5 x 10 mbar Base pressure in sputtering chamber ≤ 5 x 10 mbar required layers can be manufactured at high rates and a coating Recording of process data: Our PROCESSDB SQL data base records Cycle time ≥ 20 s Cycle time < 18 s uniformity of ±0.8 %. the process data of coating systems 24/7 allowing for detailed data UTILITY & SUPPLY UTILITY & SUPPLY Over 40 years of experience: We develop and manufacture the analysis and correlations. Utility requirements between 0.5 and 5 MVA, Utility requirements between 0.5 and 5 MVA, necessary components such as magnetron sputtering sources in-house Ex-Situ measuring system: Quality assurance and quality monitoring depending on application and throughput depending on application and throughput and have more than 40 years of experience with magnetron sputtering. for coatings on glass Mains connection 400 VAC, 50 Hz or 480 VAC, 60 Hz Mains connection 400 VAC, 50 Hz or 480 VAC, 60 Hz GC120VCR Vertical Glass Coating System Industry-Proven Production Tool with a Small Footprint

TRANSPORT Type of transport inline, carrier-based Orientation of substrate -7 °/ 0°/+7° vertical, LEL, SEL Transport speed ≤ 3.5 m/min Cycle time 30 s

CLEANING OF MAGNETRON CHAMBERS Cleaning principle mechanical exchange of shields Cleaning cycle 7 to 35 days, depending on configuration

 TECHNICAL DATA UTILITIES & SUPPLY Subject to change without notice due to technical improvement. Automated substrate loading and unloading on request Carrier storage racks on request TARGET Phase 3 phases Materials metals, ceramics Voltage 230 V, 400 V, 480 V Utilization planar > 30 %, rotatable > 80 % Frequency 50 Hz to 60 Hz Power consumption depending on configuration SUBSTRATE Cooling system separate cooling circuit with heat exchanger The is a vertical inline coating system for the deposition of Material glass GC120VCR High Yield at Low Defect Rate Cooling supply primary cooling water supply by customer metal and oxide thin-film multilayer systems on flat glass substrates or Dimensions (W x L), max. 1280 mm x 1650 mm (others on request) It is also thanks to the vertical orientation that low film defect rates can Venting medium ambient air, compressed dry air or N other materials. Thickness 0.5 mm to 4 mm (others on request) 2 be achieved during production campaigns. In-situ and Ex-situ optical Process gases central supply by customer or local by gas cabinet As a leading developer and manufacturer of vacuum coating equipment Pre-treatment linear ion source or plasma glow discharge measurement equipment can be integrated in order to measure film for large-area applications, VON ARDENNE has incorporated its broad SYSTEM CONTROL & SOFTWARE properties in a continuous manner. DEPOSITION SYSTEM knowledge and expertise in PVD technologies into the GC120VCR Computer hardware PLC, Siemens S7, AB Rockwell Deposition type DC, pulsed DC, AC platform. The reliability of this system is well proven in the industry. User interface VON ARDENNE user interface Magnetron type planar, single or dual rotatable Good Maintainability MES link according to specifications Sputter arrangement vertical The optimized machine design enables easy access to the magnetron Substrate temperature range RT / 200 °C / 400 °C SYSTEM DIMENSIONS Small Footprint environment for target exchange and maintenance. Due to its vertical Substrate potential floating Total system size (L x W x H) customized × 15 m × 3.7 m The GC120VCR does not need much floor space and requires fewer door opening concept, no overhead crane is required to maintain the Number of independent process gases up to 4 (Ar, O , N , X) Total system weight depending on configuration maintenance intervals due to its vertical design. system. 2 2 Reference Buildings with Glazings Coated on VON ARDENNE Equipment

PRODUCT PRODUCT TOPICS INDEX COMPONENTS www.vonardenne.biz WHO WE ARE & WHAT WE DO VON ARDENNE develops and manufactures industrial equipment for vacuum We supply our customers with technologically sophisticated vacuum coating coatings on materials such as glass, wafers, metal strip and polymer fi lms. These systems, extensive expertise and global service. The key components are developed coatings give the surfaces new functional properties and can be between one and manufactured by VON ARDENNE itself. nanometer and a few micrometers thin, depending on the application. Systems and components made by VON ARDENNE make a valuable contribution to Our customers use these materials to make high-quality products such as protecting the environment. They are vital for manufacturing products which help to architectural glass, displays for smartphones and touchscreens, solar modules and use less energy or to generate energy from renewable resources. heat protection window fi lm for automotive glass.

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VON ARDENNE GmbH (headquarters) I Am Hahnweg 8 I 01328 DRESDEN I GERMANY Sales: +49 (0) 351 2637 189 I [email protected] Service: +49 (0) 351 2637 9400 I [email protected] VON ARDENNE Vacuum Equipment (Shanghai) Co., Ltd. I +86 21 6173 0210 I +86 21 6173 0200 I [email protected]; [email protected] VON ARDENNE Malaysia Sdn. Bhd. I +60 4408 0080 I +60 4403 7363 I [email protected]; [email protected] VON ARDENNE Japan Co., Ltd. I Tokyo office I +81 3 6435 1700 I +81 3 6435 1699 I [email protected]; [email protected] VON ARDENNE North America, Inc. I Ohio office I +1 419 386 2789 I +1 419 873 6661 I [email protected]; [email protected] VON ARDENNE Vietnam Co., Ltd. I +60 124 23 7353 I [email protected]; [email protected] Pictures: VON ARDENNE Corporate Archive, VON ARDENNE Family Archive, shutterstock.com. © All rights reserved. ENGLISH 07/2021