Conference Co-Chairs David P. Arnold, University of Florida, USA Luc G. Fréchette, Université de Sherbrooke, CANADA
Sponsored by:
PROGRAM AT A GLANCE
TUESDAY, 08:30 - 17:00 PowerMEMS School DECEMBER 4 17:00 - 19:00 Registration and Wine & Cheese Welcome Reception 07:00 - 18:00 Registration 08:00 - 08:20 Conference Welcome PLENARY PRESENTATION I Shashank Priya, Pennsylvania State University, USA 08:20 - 09:00 MULTIFERROIC MATERIALS, DEVICES AND SYSTEMS: P(VDF–TrFE) BASED SPIRAL THERMO-MAGNETO-ELECTRIC GENERATORS FOR HARVESTING LOW GRADE THERMAL ENERGY FOCUS SESSION I 09:00 - 10:00 WEARABLE ENERGY HARVESTERS 10:00 - 10:30 Refreshment Break SESSION W1A SESSION W1B TUNABLE, BROADBAND, AND 10:30 - 11:50 FUEL CELLS AND REACTORS NONLINEAR HARVESTERS 11:50 - 13:30 Lunch on Own SESSION W2A SESSION W2B POWER ELECTRONICS 13:30 - 14:30 THERMOELECTRIC ENERGY HARVESTERS AND ENERGY MANAGEMENT CIRCUITS 14:30 - 14:40 Transition Break SESSION W3A SESSION W3B WEDNESDAY, DECEMBER 5 DECEMBER WEDNESDAY, 14:40 - 15:40 ION SOURCES AND THERMOIONIC EMITTERS MICROFABRICATED HARVESTERS 15:40 - 15:50 Transition Break 15:50 - 17:50 PowerMEMS-in-Action and Poster Session A
08:00 - 08:10 Conference Announcements 08:10 - 08:20 Exhibitor Table-Top Industry Spotlight PLENARY PRESENTATION II Veena Misra, North Carolina State University, USA 08:20 - 09:00 OPTIMIZING THE ENERGY BALANCE TO ACHIEVE AUTONOMOUS SELF-POWERING FOR VIGILANT HEALTH AND IoT APPLICATIONS
FOCUS SESSION II 09:00 - 10:00 MULTIFERROIC DEVICES AND SYSTEMS 10:00 - 10:30 Refreshment Break SESSION T4A SESSION T4B BIOCHEMICAL AND BIO-INSPIRED 10:30 - 11:50 ELECTRET MATERIALS AND HARVESTERS POWER/ENERGY SYSTEMS 11:50 - 13:30 Lunch on Own SESSION T5A SESSION T5B 13:30 - 14:30 BATTERY TECHNOLOGIES PYROELECTRIC ENERGY HARVESTERS 14:30 - 14:40 Transition Break
SESSION T6A SESSION T6B THURSDAY, DECEMBER 6 14:40 - 15:20 WIRELESS POWER TRANSFER TECHNOLOGIES PUMPS AND HEAT ENGINES 15:20 - 15:30 Transition Break 15:30 - 17:30 PowerMEMS-in-Action and Poster Session B
17:30 - 23:00 Banquet at Kennedy Space Center 08:00 - 08:10 Conference Announcements 08:10 - 08:20 PowerMEMS 2019 Conference Announcement
PLENARY PRESENTATION III 08:20 - 09:00 Roy "Troy" H. Olsson III, Defense Advanced Research Projects Agency (DARPA), USA ZERO AND NEAR ZERO POWER INTELLIGENT MICROSYSTEMS
FOCUS SESSION III 09:00 - 10:00 ZERO-POWER DEVICES AND SYSTEMS 10:00 - 10:30 Refreshment Break SESSION F7A 10:30 - 11:50 LATE NEWS AND EMERGING TOPICS Award Ceremony FRIDAY, DECEMBER 7 11:50 - 12:10 12:10 Conference Adjourns TABLE OF CONTENTS
Welcome ...... 4
General Information ...... 5
Thursday Banquet ...... 6
Conference Officials ...... 7
Transducer Research Foundation ...... 9
Acknowledgements ...... 10
Table-Top Exhibits ...... 11
Hotel Floor Plan ...... 13
Technical Program Information ...... 14
Wednesday Presentations ...... 15
Thursday Presentations ...... 23
Friday Presentations ...... 30
PowerMEMS-in-Action Wednesday Presentations ...... 33
Poster Session A Presentations ...... 34
PowerMEMS-in-Action Thursday Presentations ...... 45
Poster Session B Presentations ...... 46
Poster and Table-Top Floor Plan ...... Back Inside Cover
PowerMEMS 2019 Announcement ...... Back Outside Cover
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WELCOME
Greetings, and welcome to Daytona Beach, FL and PowerMEMS 2018 – the 18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications!
The objective of PowerMEMS 2018 is to catalyze innovation in micro- and nano-scale technologies for the energy domain. The scope of the meeting ranges from basic principles, to materials and fabrication, to devices, systems and applications. The topics span the lifecycle of energy from power generation or harvesting to storage, conversion and conditioning, and integrated systems that manage these processes. The applications include micro power generation for wireless sensors and portable devices, as well as microsystems for actuation, pumping and propulsion. Our Conference aims to stimulate the exchange of insights and information, as well as the development of new ideas, in the power MEMS field. Our goal is to allow the attendees to interact and network within our multidisciplinary community that includes professionals from many branches of science and engineering, as well as energy and entrepreneurial specialists interested in the commercialization of power MEMS technologies.
Since the first PowerMEMS in Sendai, Japan in 2000, the Conference has grown in size, reputation, impact, and technical breadth. This year’s technical program is highlighted by three plenary talks from prominent experts on wearable energy harvesting systems, magneto-electric generators, and near-zero- power microsystems. Each plenary talk anchors a “Focus Session” in each of these themes. The contributed program received 162 abstract and late news submissions. After careful review by the 35- member Technical Program Committee, a total of 135 papers were selected for presentation, 51 for oral, and 84 posters. There oral presentations are divided into 16 sessions, and the posters divided into two afternoon poster sessions. Nine PowerMEMS-in-Action live demos will be featured during the poster sessions, showcasing mature technologies and novel approaches hands-on. The conference proceedings are made available to attendees via direct download. All authors have the option to “elevate” their conference paper into a fully peer-reviewed journal article in either J. Micromechanics and Microengineering or Smart Materials and Structures. All non-elevated conference papers will be archived online around May 2019 under IoP’s J. of Physics: Conference Series.
We hope to maximize interaction among participants and stimulate lively discussion through technical and social events. The PowerMEMS School provides opportunity to learn from leading experts in topics ranging from fundamentals of energy harvesting technologies to applications of PowerMEMS in selected domains. The PowerMEMS-in-Action live demos stimulates researchers to push their power MEMS technologies out of the laboratory and get feedback. Our tabletop exhibitors will help catalyze conversations between our industrial partners and the research community. On Thursday, the conference banquet will be held at the Kennedy Space Center, with dinner served directly below the retired Space Shuttle Atlantis orbiter. This will be a once-in-a-lifetime experience!
This meeting is made possible by many generous contributions of time, effort, and financial support. Thanks are due to our co-organizers Florian Herrault (TPC Chair), Shad Roundy (Sponsorship and industry Chair), and Alexandra Garraud (School Chair), Peter Woias (PMiA Chair), to the Technical Program Committee for their intensive efforts in reviewing abstract submissions, and to the International Steering Committee for their advice and support. We are grateful to Preferred Meeting Management Inc. for their many contributions to the management and organization of our Conference. Finally, we gratefully acknowledge the organizational and financial support provided for this meeting by the Transducers Research Foundation, Université de Sherbrooke, University of Florida, University of Utah, HRL Laboratories, and our exhibitors, publication partners, and other supporters.
We hope that you find PowerMEMS 2018 enjoyable and fruitful, while enjoying the beautiful scenery and unique attractions of Daytona Beach!
Sincerely,
David P. Arnold Luc G. Fréchette Conference Co-Chair Conference Co-Chair
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GENERAL INFORMATION
Wireless Internet Wireless Internet will be available in the meeting rooms.
• Select "PowerMEMS" from the list of available networks. • Once prompted, the password is: PMEMS (case sensitive)
We ask that you limit your usage to be considerate of other attendees and please logout once you are finished. There is a bandwidth limit of two (2) Mbps per device.
Meeting Room Locations All meeting rooms are located on the Lobby Level of the Hilton Daytona Beach. See floor plan on page 13. Plenary Presentations ...... Crystal/Tomoka Room Focus Sessions ...... Crystal/Tomoka Room Concurrent Session A ...... Crystal/Tomoka Room Concurrent Session B ...... Flagler Ballroom Poster Sessions ...... St. John’s/Halifax Room Table-Top Exhibits ...... St. John’s/Halifax Room PowerMEMS-in-Action ...... St. John’s/Halifax Foyer
Meeting Room Logistics Please contact the Conference Registration Desk if you find the temperature in the room uncomfortable or you are unable to hear or see because of equipment difficulties.
Breaks All scheduled breaks will be held in the Poster Room. Coffee will be served during scheduled breaks only.
Job Market Board Please visit the Job Market Board located in the Poster room to see current job opportunities or to place your resume on the board. See poster floor plan on the last page of this program.
Name Badges All attendees must wear their name badge at all times.
Chimes The chimes will ring five minutes before the end of each scheduled break. The sessions will begin on time, so please return to the sessions when you hear the chimes.
Cellular Phones and Alarms Out of courtesy to our speakers and other attendees, please turn off any cellular phones and alarms during sessions.
PowerMEMS on Twitter Tweet you way through the Conference by using @PowerMEMS. Please be courteous and don’t Tweet unauthorized photos, defamatory statements, et cetera.
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Thursday Banquet
Kennedy Space Center Thursday, December 6th 17:30 – 23:00
No Conference is complete without a banquet. Join us for a memorable evening at the Kennedy Space Center. See the 30 year history of NASA’s Space Shuttle Program come to life inside Space Shuttle Atlantis®, the permanent home of the real orbiter.
You will experience two shows, each detailing the Space Shuttle Program and Atlantis’ most significant achievements. You will then find yourself standing nose-to-nose with the spacecraft Atlantis, elevated at a 43.21° angle with payload bay doors open as previously viewed only by astronauts in space. You will have the opportunity to explore and experience over 60 interactive exhibits celebrating this groundbreaking era of space exploration!
Buses will board from the North Entrance of the Hilton Daytona Beach (near Hyde Park Restaurant) at 17:30 for a 75 minute drive to Cape Canaveral. We should return back to the hotel around 23:00.
Upon arrival at the Kennedy Space Center, all attendees will go through a security check, so please do not bring anything that may be mistaken for a weapon (i.e. pocket knife). There will be a two-minute walk from the entrance to the Atlantis Room.
The banquet is included in your registration fee. Additional tickets may be purchased for guests at the on-site Registration Desk for $150.
Photo Credit: NASA or National Aeronautics and Space Administration 6
CONFERENCE OFFICIALS
Conference Co-Chairs David P. Arnold ...... University of Florida, USA Luc G. Fréchette ...... Université de Sherbrooke, CANADA
Technical Program Chair Florian Herrault ...... HRL Laboratories, USA
PowerMEMS School Chair Alexandra Garraud ...... University of Florida, USA
Sponsorship Chair Shad Roundy ...... University of Utah, USA
PowerMEMS-in-Action Chair Peter Woias ...... University of Freiburg, IMTEK, GERMANY
Awards Chair Sindhu Preetham Burugupally ...... Wichita State University, USA
Technical Program Committee Ethem Erkan Aktakka ...... University of Michigan, Ann Arbor, USA Adrien Badel ...... Université Savoie Mont Blanc, FRANCE Skandar Basrour ...... Université Grenoble Alpes, FRANCE Philippe Basset ...... Université Paris-Est, FRANCE Sarah Bedair ...... U.S. Army Research Laboratory, USA Mustafa Beyaz ...... Antalya Bilim University, TURKEY Danick Briand ...... EPFL, SWITZERLAND Steve Burrow ...... University of Bristol, UK Francesco Cottone ...... University of Perugia, ITALY Galayko Dimitri ...... Sorbonne Université, FRANCE Alper Erturk ...... Georgia Institute of Technology, USA Luis Fonseca ...... IIMB-CNM (CSIC), SPAIN Takayuki Fujita ...... University of Hyogo, JAPAN Tzeno Galchev ...... Analog Devices Inc., USA Alexandra Garraud ...... University of Florida, USA Einar Halvorsen ...... University of Southeastern Norway, NORWAY Florian Herrault ...... HRL Laboratories, USA Andrew Holmes ...... Imperial College London, UK Isaku Kanno ...... Kobe University, JAPAN Hanseup Kim ...... University of Utah, USA Jeffrey Lang ...... Massachusetts Institute of Technology, USA Janet Ledesma-García ...... Universidad Autónoma de Querétaro, MEXICO Jianmin Miao ...... Nanyang Technological University, SINGAPORE Paul Mitcheson ...... Imperial College London, UK Koji Miyazaki ...... Kyushu Institute of Technology, JAPAN Masahiro Nomura ...... University of Tokyo, JAPAN Jaeyeong Park ...... Kwangwoon University, KOREA Michael Renaud ...... Arka Publishing, INDONESIA
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CONFERENCE OFFICIALS
Technical Program Committee, continued Paul Ronney ...... University of Southern California, USA Shad Roundy ...... University of Utah, USA Tomonori Seki ...... OMRON Corporation, JAPAN Yuji Suzuki ...... University of Tokyo, JAPAN Luis Fernando Velásquez-García ...... Massachusetts Institute of Technology, USA Xiaohong (Ellen) Wang ...... Tsinghua University, CHINA Peter Woias ...... University of Freiburg, IMTEK, GERMANY
International Steering Committee David P. Arnold ...... University of Florida, USA Skandar Basrour ...... Grenoble Alpes Université, FRANCE Philippe Basset ...... Université Paris-Est, FRANCE Steve Beeby ...... University of Southampton, UK Luc G. Fréchette ...... Université de Sherbrooke, CANADA Takayuki Fujita ...... University of Hyogo, JAPAN Reza Ghodssi ...... University of Maryland, USA Einar Halvorsen ...... University College Southeast Norway, NORWAY Florian Herrault ...... HRL Laboratories, USA Isaku Kanno ...... Kobe University, JAPAN Hiroki Kuwano ...... Tohoku University, JAPAN Jeff Lang ...... Massachusetts Institute of Technology, USA Carol Livermore ...... Northeastern University, USA Ryutaro Maeda National Institute of Advanced Industrial Science and Technology, JAPAN Paul Mitcheson ...... Imperial College London, UK Yuji Suzuki ...... University of Tokyo, JAPAN Shuji Tanaka ...... Tohoku University, JAPAN Luis F. Velásquez-García ...... Massachusetts Institute of Technology, USA Peter Woias ...... University of Freiburg, IMTEK, GERMANY Eric M. Yeatman ...... Imperial College London, UK
International Advisory Board Mark G. Allen ...... University of Pennsylvania, USA Young-Ho Cho ...... Korea Advanced Institute of Science and Technology, KOREA Alan Epstein ...... Massachusetts Institute of Technology, USA Masayoshi Esashi ...... Tohoku University, JAPAN Kazusuke Maenaka ...... University of Hyogo, JAPAN Albert Pisano ...... University of California, San Diego, USA Susumu Sugiyama ...... Ritsumeikan University, JAPAN Miwako Waga ...... University of California, San Diego, USA
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Transducer Research Foundation
The Transducer Research Foundation (TRF) is a nonprofit organization whose mission is to stimulate research within the United States in science and engineering, with emphasis on technologies related to transducers, microsystems, and nanosystems, and to foster the exchange of ideas and information between academic, industrial, and government researchers. If your organization would like to explore any of these options for TRF sponsorship or student travel grants, please contact a TRF Officer/Director, or visit the web-site at www.transducer-research-foundation.org for further information.
TRF Officers President ...... Thomas W. Kenny, Stanford University, USA Vice-President ...... Antonio J. Ricco, NASA Ames Research Center, USA and Dublin City University, IRELAND Treasurer ...... Dave Monk, NXP Semiconductor, USA Secretary ...... Kimberly Foster, Tulane University, USA
TRF Directors Mark Allen ...... University of Pennsylvania, USA Alissa M. Fitzgerald ...... AMFitzgerald, USA Thomas W. Kenny ...... Stanford University, USA Tina Lamers ...... Uber ATG, USA Ellis Meng ...... University of Southern California, USA Dave Monk ...... NXP Semiconductor, USA Mina Rais-Zadeh ...... University of Michigan and NASA Jet Propulsion Laboratory, USA Antonio J. Ricco ...... NASA Ames Research Center, USA and Dublin City University, IRELAND Leland "Chip" Spangler ...... Aspen Microsystems, USA Kimberly Foster ...... Tulane University, USA James Walker ...... KBSO Patent Law, USA
Executive Director ...... Katharine K. Cline
Emeritus Trustees Luc Bousse Joseph Giachino G. Benjamin Hocker Roger Howe ...... Stanford University, USA Mehran Mehregany ...... Case Western Reserve University, USA Richard Muller ...... University of California, Berkeley, USA Kurt Petersen ...... Silicon Valley Band of Angels, USA Martin A. Schmidt ...... Massachusetts Institute of Technology, USA Stephen Senturia Kensall D. Wise
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ACKNOWLEDGEMENTS
The PowerMEMS 2018 Executive Committee and the Transducer Research Foundation would like to thank the following companies and organizations for their support, encouragement, and involvement in the 18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
Conference Sponsors
Welcome Reception Benefactor
Contributor
Break Benefactor
Media Sponsor
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TABLE-TOP EXHIBITORS See floor plan on last page of this program.
Table Number Nova Electronic Materials ...... T-1 1189 Porter Road Flower Mound, TX 75022 USA phone: 1-972-478-7002 [email protected] www.novawafers.com
NOVA is a leading supplier of wafers and processing services. While offering one-stop shopping, rely on NOVA for quality people, products and services at competitive prices.
OEM Group, LLC ...... T-2 2120 W. Guadalupe Road Gilbert, AZ 85233 USA phone: 480-609-8565 www.oemgroupinc.com
Magnificent AlN and ScAlN films from OEM Group. Modern cluster sputter tools. Superior crystal orientation. Smooth surface morphology. Reduced stress range. Full-face deposition. Foundry capabilities.
Plasma-Therm, LLC ...... T-3 10050 16th Street, North St. Petersburg, FL 33716 USA phone: 1-727-577-4999 [email protected] www.plasmatherm.com
Plasma-Therm is a U.S. manufacturer of advanced plasma-processing equipment, providing etch and deposition technologies used in semiconductor, power, MEMS, nanotechnology, photonics, and wireless communication markets.
Rave N.P...... T-4 430 S. Congress Avenue, #7 Delray Beach, FL 33445 USA phone: 1-512-751-5996 [email protected] www.ravenano.com
Advanced Micro Patterning, a Division of Rave N.P. provides Researchers and Developers the ability to pattern down to 0.6 um on planer and non-planer substrates. Avoid costly Masks and Time delays to get your patterning results immediately at a low cost. Optical Direct Patterning can be used on all common Optical Photo-resists making Advanced Patterning Quick Easy, Simple and Low cost.
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TABLE-TOP EXHIBITORS, continued
SUSS MicroTec, Inc...... T-5 2200 Klug Circle Corona, CA 9288- USA phone: 1-951-817-3700 [email protected] www.suss.com
SUSS MicroTec is a leading supplier to the semiconductor and related markets of a comprehensive range of equipment for lithography, wafer bonding and photomask processing.
Technic ...... T-6 47 Molter Street Cronston, RI 02910 USA phone: 1-401-781-6100 [email protected] www.technic.com
Technic is a global supplier of specialty chemicals, custom finishing equipment, engineered powders, and analytical control systems to the semiconductor, electronic component, PCB, industrial finishing, and decorative industries.
ULVAC, Inc...... T-7 401 Griffin Brook Drive Methuen, MA 01844 USA phone: 1-978-686-7550 [email protected] www.ulvac.com
ULVAC is an international corporation that designs and manufactures systems and equipment, for the MEMS Industry: DRIE equipment, and Sputtering systems for PZT and AlN.
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HOTEL FLOOR PLAN
Registration
Crystal/Tomoka Room ...... Plenary Presentations ...... Focus Sessions ...... Concurrent Session A
Flagler Ballroom ...... Concurrent Session B
St. John’s/Halifax Room ...... Poster Sessions ...... Table-Top Exhibits
St. John’s/Halifax Foyer ...... PowerMEMS-in-Action
North Entrance ...... Banquet Bus Loading 13
TECHNICAL PROGRAM INFORMATION
Guide to Understanding Paper Numbering Each paper in the technical program is assigned a unique number which indicates when the paper is presented. The number of each paper is shown before the paper title.
Typical Paper Number: W1A.04
The first letter (i.e. W) indicates the day of the Conference:
W = Wednesday T = Thursday F = Friday
The second number (i.e., 1) indicates the session
The third letter (i.e., A) indicates which room the session is held in:
A = Crystal/Tomoka Room B = Flagler Room
The fourth number (i.e. 04) indicates the number of the paper in the session.
Guide to Understanding Poster Numbering Each poster is also assigned a unique number which clearly indicates when and where the poster is presented. The number of each poster is shown before the title.
Poster Number: PW-01a
The second character (i.e., W) indicates the day of the Conference that the poster will be on display.
W = Wednesday T = Thursday
The third character (i.e., 01) is the poster board position on the floor plan.
The last character (i.e., a) shows the classification of the poster. a – Applications and Innovations in Micro Energy Systems b – Biochemical and Bio-Inspired Power/Energy Systems c – Direct Thermal Energy-Harvesting d – Electrical Energy Harvesting, Management, Storage and Transfer e – Electron, Ion, Photon and Radiation Energy Conversion f – General g – Materials for Energy Conversion h – Mechanical Energy Harvesting and Actuation j – Thermal and Chemical Science and Technologies for Power, Propulsion, and Cooling k – Late News l – Commercial Posters – Table-Top Exhibitors
PowerMEMS-in-Action Papers with this icon are PowerMEMS-in-Action demonstrations. Please refer to page 33 for Wednesday presentations and 45 for Thursday presentations.
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Wednesday, December 5
08:00 Conference Welcome
David P. Arnold, University of Florida, USA Luc G. Fréchette, Université de Sherbrooke, CANADA
08:20 Plenary Presentation I Session Chair: Florian Herrault, HRL Laboratories, USA
WPA-01 MULTIFERROIC MATERIALS, DEVICES AND SYSTEMS: P(VDF–TrFE) BASED SPIRAL THERMO-MAGNETO-ELECTRIC GENERATORS FOR HARVESTING LOW GRADE THERMAL ENERGY R.A. Kishore1, D. Singh1, P. Kumar1, R. Sriramdas1, M. Sanghadasa2, and Shashank Priya3 1Virginia Polytechnic Institute and State University, USA, 2U.S. Aviation & Missile Research Development and Engineering Center, USA and 3Pennsylvania State University, USA
This study proposes a novel P(VDF–TrFE) based spiral-shaped cantilever beam for thermo-magneto- electric generator (TMEG). Using numerical simulations, it was found that the spiral beam experiences higher stresses, and consequently exhibits higher voltage output, as compared to the rectangular cantilever beam. Experiments revealed that 2.5 mm x 2.5 mm spiral structure generates peak voltage of ~ 4.0 mV, when oscillation displacement is 0.5 mm and frequency is 1 Hz. The peak voltage increases to ~25 mV at oscillation frequency of 10 Hz.
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09:00 Focus Session I - Wearable Energy Harvesters Session Chairs: Luc G. Fréchette, Université de Sherbrooke, CANADA and Eric M. Yeatman, Imperial College London, UK
09:00 - 09:20 WFA-01 FLEXIBLE TEXTILE POWER MODULE S. Yong, J. Shi, and S.P. Beeby University of Southampton, UK
This paper presents for the first time an energy textile that enables both biomechanical energy harvesting and simultaneously energy storing by ferroelectret and a solid-state supercapacitor fabricated into the same piece of woven cotton layer. This work shows a promising combination of devices for achieving a self sustained integrated energy module that can power up e-textile applications.
09:20 - 09:40 WFA-02 FABRICATION AND CHARACTERIZATION OF A WRIST-DRIVEN ROTATIONAL ENERGY HARVESTER USING MULTIPLE PLUCKED PIEZOELECTRIC UNIMORPHS M.A. Halim1, T. Xue1, R. Rantz1, Q. Zhang2, L. Gu2, K. Yang2, and S. Roundy1 1University of Utah, USA and 2Analog Devices Inc., USA
We present fabrication and characterization of a wrist-worn rotational energy harvester for wearable applications. It consists of an eccentric rotor with multiple magnets and unimorph beams with a magnet at the tip of each beam, in an in-plane plucking configuration. An electromechanical model has been developed to predict the system performance for different plucking magnet configurations and verified experimentally. Experimental results are in good agreement with the simulation.
09:40 - 10:00 WFA-03 A FULLY-ENCLOSED WRIST-WEARABLE HYBRID NANOGENERATOR FOR SELF-POWERED SENSORS P. Maharjan and, J.Y. Park Kwangwoon University, KOREA
Smart body-worn electronic devices and sensors are trending in wearable fitness and healthcare applications but has dependency on batteries. We designed, developed and demonstrated a fully-enclosed wrist-wearable hybrid nanogenerator for harvesting diverse human wrist motions and sustainably power those wearable electronic devices and sensors. A commercial electronic wrist-watch is successfully powered continuously for more than 23 mins for just 5 s of wrist motion.
10:00 Refreshment Break
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SESSION W1A: SESSION W1B: FUEL CELLS AND REACTORS TUNABLE, BROADBAND, AND Session Chairs: NONLINEAR HARVESTERS Reza Ghodssi, University of Maryland, USA and Session Chairs: Yuji Suzuki, University of Tokyo, JAPAN Francesco Cottone, University of Perugia, ITALY Alper Erturk, Georgia Institute of Technology, USA Crystal – Tomoka Room Flagler Room 10:30 – 10:50 W1A-01 W1B-01 TESTING OF A 3D-PRINTED SOLAR MICRO- MODELING AND DESIGN OF HIGHLY REACTOR FOR HYDROGEN PRODUCTION COUPLED PIEZOELECTRIC ENERGY VIA NATURAL GAS REFORMING HARVESTERS FOR BROADBAND P. Camus, J.-F. Dufault, D. Mehanovic, APPLICATIONS N. Braidy, L.G. Fréchette, and M. Picard D. Gibus1,2, P. Gasnier1, A. Morel1,2, Université de Sherbrooke, CANADA S. Boisseau1, and A. Badel2 1Université Grenoble Alpes, CEA-Leti, FRANCE We developped and tested a solar micro-reactor for and 2Université Savoie Mont Blanc, FRANCE hydrogen production via natural gas reforming. The 3D-printed prototype of the micro-reactor has been We model, design, and build highly coupled successfully tested and a complete methane piezoelectric energy harvesters for frequency tuning conversion has been observed during tests in real capabilities using nonlinear electrical techniques. conditions. The geometrical parameters of a cantilever with proof mass and single crystal patches are optimized to maximize the global electromechanical coupling coefficient and increase the frequency bandwidth. 10:50 – 11:10 W1A-02 W1B-02 MICRO ALKALINE FUEL CELL SUPPORTED CO-OPTIMIZATION OF A PIEZOELECTRIC BY MEMS-BASED BACKBONE ENERGY HARVESTING SYSTEM FOR M. Pilaski1, S.-H. Sun2, G. Dura1, J. Wartmann1, BROADBAND OPERATION F. Letzkus2, and A. Heinzel1 S. Zhao1, U. Radhakrishna2, S. Hanly3, 1Hydrogen and Fuel Cell Center, GERMANY and J. Ma4, J.H. Lang2, and D. Buss5 2Institut für Mikroelektronik Stuttgart, GERMANY 1Tianjin University, CHINA, 2Massachusetts Institute of Technology, USA, 3Mide Technology, This work presents the application of Si3N4- USA, 4Guangdong University of Technology, membranes produced with Si-MEMS-technology as CHINA, and 5Texas Instruments, USA a platform to build up new membrane-electrode assemblies (MEA) for alkaline fuel cells (AFC). This work presents the co-design of a piezoelectric Active AFC-MEAs were combined by integrating energy harvester (PEH) and bias-flip (BF) OH--permeable electrolyte into micro-channels of electronics to increase the power extraction MEMS-based membranes. A Pt/C catalyst was bandwidth. The PEH is designed for high sprayed onto the surface and after an electric electromechanical coupling resulting in the conductive layer was applied these systems could separation of the open-circuit and short-circuit be used to power small devices with low energy resonance frequencies. The BF-circuit is switched at demand. universal phase to approximate impedance matching over a wide bandwidth. The system achieves higher power over a wider bandwidth compared to prior work.
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SESSION W1A: - continued SESSION W1B: - continued FUEL CELLS AND REACTORS TUNABLE, BROADBAND, AND NONLINEAR HARVESTERS Crystal – Tomoka Room Flagler Room 11:10 – 11:30 W1A-03 W1B-03 THERMALLY SELF-SUSTAINING TUBULAR TOWARD SELF-POWERED NONLINEAR SOFC POWER GENERATOR WITH NO WIDEBAND VIBRATION ENERGY MOVING PARTS HARVESTING WITH HIGH-ENERGY J. Wongwiwat1, P. Bhuripanyo1, RESPONSE STABILIZATION T.S. Welles2, V.P. DeBiase2, J. Ahn2, S. Ushiki and A. Masuda and P.D. Ronney1 Kyoto Institute of Technology, JAPAN 1University of Southern California, USA and 2Syracuse University, USA This paper describes an effort to develop a nonlinear wideband vibration energy harvester with We develop a self-sustaining, self-pressurizing self-powered stabilization control of its high-energy power generator with no moving parts using thermal response. The power balance of the harvester under transpiration membrane to pump air from the intermittent disturbances is first experimentally outside, catalytic combustion to generate heat and studied, and a harvesting circuit that can power the SOFC to generate electricity from hydrocarbon negative impedance converter (NIC) in the control fuels. To improve the efficiency, we also study and circuit is then developed. It is concluded that the do modeling of each component as well as using energy consumed by the NIC can be recovered by simulation model to optimize the design of the the harvested energy in several tens of seconds. power generator. 11:30 – 11:50 W1A-04 W1B-04 MINIATURE FUEL CELL WITH SELF-TUNABLE VIBRATION ENERGY MONOLITHICALLY FABRICATED SI HARVESTER ELECTRODE -FIRST PROTOTYPE WITH AU- J. Esch1, D. Hoffmann1, D. Stojakov1, PD-PT MULTILAYER CATALYST and Y. Manoli2 T. Kurose1, R. Shirai1, N. Vasiljevic2, 1Hahn-Schickard, GERMANY and and M. Hayase1 2University of Freiburg, GERMANY 1Tokyo University of Science, JAPAN and 2University of Bristol, UK We present a small frequency tunable vibration energy harvester with an integrated electronic circuit Our first miniature fuel cell with a novel Au-Pd-Pt board. The designed board includes a catalyst successfully demonstrated power microcontroller for autonomous tuning and a power generation. Electrochemical atomic layer management for energy storage and for powering depositions of Pd and Pt were applied on the porous the system components. A movable anchor is used Au. 5 ML Pd and sub-ML Pt deposition was to vary the effective length of a cantilever beam. The attempted and amounts of Pd and Pt were expected tuning bandwidth is 16 to 58 Hz. estimated to be125 µg/cm2 and 6 µg/cm2, respectively. No catalyst poisoning to 100 ppm CO was observed during the power generation. Though the peak power was poor around 100 mW/cm2, results were satisfying for the first prototype.
11:50 Lunch on Own
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SESSION W2A: SESSION W2B: THERMOELECTRIC ENERGY POWER ELECTRONICS AND ENERGY HARVESTERS MANAGEMENT CIRCUITS Session Chairs: Session Chairs: Luis Fonseca, IIMB-CNM (CSIC), SPAIN and Armin Andrew Holmes, Imperial College London, UK and Feldhoff, Universität Hannover, GERMANY Stephen Burrow, University of Bristol, UK Crystal – Tomoka Room Flagler Room 13:30 – 13:50 W2A-01 W2B-01 POWER ENHANCEMENT OF SILICON A SELF-SUSTAINED ENERGY STORAGE MEMBRANE-BASED THERMOELECTRIC SYSTEM WITH AN ELECTROSTATIC ENERGY HARVESTER WITH TAILORED AUTOMATIC SWITCH AND A BUCK HOLEY NANOSTRUCTURES CONVERTER FOR TRIBOELECTRIC R. Yanagisawa1 and M. Nomura1,2 NANOGENERATORS 1University of Tokyo, JAPAN and 2Japan Science H. Zhang1, D. Galayko2, and P. Basset1 and Technology Agency (JST), JAPAN 1Université Paris-Est, FRANCE and 2Sorbone Universités, FRANCE We develop SOI-based silicon membrane thermoelectric power generator with phononic We present a complete energy harvesting system crystal nanostructures. Phononic crystal for triboelectric nanogenerators (TENGs) that nanostructures reduce thermal conductivity of silicon includes as a first stage a half-wave rectifier, and as membranes and improve their thermoelectric figure a second stage an electrostatic automatic switch of merit twice. By using nanoimprint lithography combined with a buck converter. The output of this method, we pattern this phononic crystal simple two-stage system allows to deal with the very nanostructures in 3 x 2 mm area of silicon membrane high output voltages of TENGs and to power a thermoelectric devices. We demonstrate power commercial low-voltage output regulator, which enhancement of thermoelectric generator with cannot be realized by directly charging the storage nanostructure patterning. capacitor only with diode rectifiers. 13:50 – 14:10 W2A-02 W2B-02 VERTICAL SELF-DEFINED THIN-FILM DUAL-STAGE ELECTRODE DESIGN OF THERMOELECTRIC THERMOCOUPLES BY ROTATIONAL ELECTRET ENERGY ANGLED CO-EVAPORATION FOR USE IN HARVESTER FOR EFFICIENT SELF- µTEGS POWERED SSHI Y. Yuan and K. Najafi Y. Liu1, A. Badel2, and Y. Suzuki1 University of Michigan, USA 1University of Tokyo, JAPAN and 2Université Savoie Mont Blanc, FRANCE We report the design, fabrication and characterization of novel thermocouple structure We present a dual-stage electrode design for and associated TE films for use in micro- electret-based rotational energy harvester (EH) for thermoelectric generators. The structure consists of efficient synchronized switch harvesting on inductor Bi2Te3 and Sb2Te3 films co-evaporated onto (SSHI) technique. With the aid of the present sidewall surfaces of high-aspect columns. This parallel SSHI circuit, output power of the rotational structure allows fabrication of tall vertical electret EH developed in our group becomes 4.2 thermocouples using thin films with high fill factor. times higher if compared with the conventional full- bridge rectifier.
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SESSION W2A: - continued SESSION W2B: - continued THERMOELECTRIC ENERGY POWER ELECTRONICS AND ENERGY HARVESTERS MANAGEMENT CIRCUITS Crystal – Tomoka Room Flagler Room 14:10 – 14:30 W2A-03 W2B-03 DESIGN AND IMPLEMENTATION OF A SOIL A SIMPLE PASSIVE 390 mV AC/DC PROFILE PROBE POWERED BY AIR AND RECTIFIER FOR ENERGY HARVESTING SOIL TEMPERATURE DIFFERENCES APPLICATIONS N. Ikeda, R. Shigeta, J. Shiomi, A. Santiago Rodriquez, N. Garraud, and Y. Kawahara D. Alabi, A. Garraud, and D.P. Arnold University of Tokyo, JAPAN University of Florida, USA
This paper will also be presented in Wednesday’s This paper will also be presented in Thursday’s PowerMEMS-in-Action Session WPMIA-02 PowerMEMS-in-Action Session TPMIA-01
We present a novel approach to the realization of a This presentation reports a simple ac/dc rectifier battery-free soil profile probe that uses the architecture intended for magnetic energy temperature difference between the near-surface air harvesters that offers the lowest reported passively and underground soil as a power source. The rectified ac input voltage of 400 mVpk. This rectifier temperature change in underground soil is slower satisfies a critical technology need, since today than that in the near-surface air, and thus a large there exist many commercial dc energy harvesting temperature difference occurs between the near- power management chips but few (none?) that can surface air and underground soil for most of the day. accommodate low-amplitude ac inputs. Hence, we developed a sensor prototype driven by a TEG and simulated this performance.
14:30 Transition Break
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SESSION W3A: SESSION W3B: ION SOURCES AND MICROFABRICATED HARVESTERS THERMOIONIC EMITTERS Session Chairs: Session Chairs: Philippe Basset, Université Paris-Est, FRANCE Jan Dziuban, Wrocław University of Science and and Steve Beeby, University of Southampton, UK Technology, POLAND and Luis Velásquez-García, Massachusetts Institute of Technology, USA Crystal – Tomoka Room Flagler Room 14:40 – 15:00 W3A-01 W3B-01 COMPACT, 3D-PRINTED ELECTRON IMPACT PUSH-BUTTON KINETIC ENERGY ION SOURCE WITH MICROFABRICATED, HARVESTER WITH SOFT-X-RAY-CHARGED NANOSHARP SI FIELD EMITTER ARRAY FOLDED MULTILAYER PIEZOELECTRET CATHODE J. Lu and Y. Suzuki C. Yang and L.F. Velásquez-García University of Tokyo, JAPAN Massachusetts Institute of Technology, USA This paper will also be presented in Wednesday’s We report the design, fabrication, and PowerMEMS-in-Action Session WPMIA-04 characterization of a novel electron impact gas In this study, we propose a push-button energy ionizer for compact mass spectrometry harvester based on soft-X-ray charged folded manufactured via CMOS silicon micromachining and multilayer piezoelectret. With an early prototype, high-resolution 3D printing. Our ionizer utilizes an 15.5 µJ has been obtained with the max pushing array of 2,500 nano-sharp silicon field emitters (20 force of only 1 N at 2.7 mm max structure µm pitch) with proximal gate as electron source, and deformation. Its record-high quasi-static a finely featured, three-dimensional ion-generating piezoelectric coefficient d33 is 30000 pC/N. LED structure made of dielectric and conductive parts light-up is also demonstrated upon finger press. manufactured via high-resolution 3D-printing technology. The ionizer reaches up to ~0.4% ionization efficiency while operating at 5×10-4 Torr. 15:00 – 15:20 W3A-02 W3B-02 GLOW-DISCHARGE ION SOURCE FOR ON- A SILICON MEMS EM VIBRATION ENERGY CHIP INTEGRATED MINIATURE MEMS MASS HARVESTER SPECTROMETER Y. Yang, U. Radhakrishna, D. Ward, T. Grzebyk, P. Szyszka, A.P. Chandrakasan, and J.H. Lang A. Górecka-Drzazga, and J.A. Dziuban Massachusetts Institute of Technology, USA Wrocław University of Science and Technology, POLAND We model, design, and optimize MEMS electromagnetic vibration-energy harvesters This work describes a construction, technology, comprising DRIEetched silicon suspensions, pick- working principle and properties of an ion source and-place N42-NdBFe magnets and copper coils. dedicated for a miniature MEMS mass The harvesters will power autonomous devices from spectrometer. The influence of such parameters as near- 50-Hz and sub-g vibrations. A four-bar linkage shapes, dimensions and distances between the silicon suspension is used to bear a large stroke (2 electrodes, as well as applied magnetic and electric mm), enabling record output power (2.2 mW), power field and pressure level on the operation of the density (1.23 mW/cm3) and normalized power instrument has been investigated. density (1.02 mW/g2cm3) among Si-based MEMS harvesters reported to date.
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15:20 – 15:40 SESSION W3A: - continued SESSION W3B: - continued ION SOURCES AND MICROFABRICATED HARVESTERS THERMOIONIC EMITTERS Crystal – Tomoka Room Flagler Room W3A-03 W3B-03 THERMIONIC ENERGY CONVERTER BASED A POWER-DENSITY-ENHANCED MEMS ON MICRON-GAP NANOSTRUCTURED ELECTROSTATIC ENERGY HARVESTER SPACERS: ACHIEVING RECORD-HIGH WITH SYMMETRIZED HIGH-ASPECT RATIO SHORT-CIRCUIT CURRENT COMB ELECTRODES S.M. Nicaise1, C. Lin1, M. Azadi1, H. Honma1, H. Mitsuya2, G. Hashiguchi3, T. Bozorg-Grayeli2, P. Adebayo-Ige1, H. Fujita4, and H. Toshiyoshi1 K. Van Houten3, F. Schmitt3, D.E. Lilley1, 1University of Tokyo, JAPAN, Y. Pfitzer1, W. Cha1, N. Melosh2, R.T. Howe2, 2Saginomiya Seisakusho, Inc., JAPAN, J.W. Schwede1, and I. Bargatin1 3Shizuoka University, JAPAN, and 1University of Pennsylvania, USA, 4Tokyo City University, JAPAN 2Stanford University, USA, and 3Spark Thermionics, USA We develop an electret-type MEMS vibrational energy-harvester with highly symmetric structures to This paper will also be presented in Wednesday’s overcome a dilemma between small footprint and PowerMEMS-in-Action Session WPMIA-05 large output. Power density is 4.3-fold enhanced to
3 Micron-gap spacers can increase the current and 270 µW/cm after increasing the aspect ratio of the efficiency in thermionic energy convertors by comb-electrodes from 7.1 to 33.3. mitigating space charge effects. We designed, fabricated and characterized thin alumina spacers that provided insulating 3-8 µm gaps between planar substrates. In large-scale testing, the spacers sustained compressive stresses of over 10 atm without fracture and showed thermal conductances of 10-30 mW/(cm2 K), suggesting a conductivity lower than aerogels.
15:40 Transition Break
15:50 PowerMEMS - in - Action and Poster Session A
See page 33 for the listing of PowerMEMS-in-Action presentations
See page 34 for the listing of poster presentations
17:50 End of Day
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Thursday, December 6
08:00 Conference Announcements
08:10 Exhibitor Table-Top Industry Spotlight Nova Electronic Materials Rave N.P. OEM Group, LLC SUSS MicroTec, Inc. Plasma-Therm, LLC ULVAC, Inc.
08:20 Plenary Presentation II Session Chair: Luc G. Fréchette, Université de Sherbrooke, CANADA
TPA-01 OPTIMIZING THE ENERGY BALANCE TO ACHIEVE AUTONOMOUS SELF-POWERING FOR VIGILANT HEALTH AND IoT APPLICATIONS Veena Misra1, A. Bozkurt1, B.H. Calhoun2, S. Datta3, M. Dickey1, M. Kiani4, J. Lach2, B. Lee1, J. Jur1, O. Oralkan1, M. Ozturk1, R. Rajagopalan4, S. Roundy5, J. Strohmaier1, S. Trolier-McKinstry4, D. Vashaee1, D. Wentzloff6 and D. Werner4 1North Carolina State University, USA, 2University of Virginia, USA, 3Notre Dame University, USA, 4Pennsylvania State University, USA, and 5University of Utah, USA, 6University of Michigan, USA
With the right combination of disruptive features, such as battery free self-powered operation, multimodal sensing capability, comfort, wearability, and continuous data gathering leading to actionable information, the potential of autonomously powered smart sensing nodes can be realized to provide long-term monitoring for health and IoT applications. This paper reports on recent breakthroughs in technologies essential for achieving self-powered operation and shows how engineering both sides of the power equation, namely generation and consumption, can lead to always on operation. This work is being conducted in the NSF funded ERC Center on Advanced Self-Powered Systems of Integrated Sensors and Technologies (ASSIST).
09:00 Focus Session II - Multiferroic Devices and Systems Session Chairs: Florian Herrault, HRL Laboratories, USA and Carol Livermore, Northeastern University, USA
09:00 - 09:20 TFA-01 ELECTRIC-FIELD CONTROLLED MAGNETIC REORIENTATION IN EXCHANGE COUPLED COFEB/NI BILAYER MICROSTRUCTURES Z. Xiao1, R. Lo Conte2, M. Goiriena2,3, R.V. Chopdekar2, X. Li1, S. Tiwari1, C.-H. Lambert2, S. Salahuddin2, G.P. Carman1, K. Wang1, J. Bokor2, and R.N. Candler1,4 1University of California, Los Angeles, USA, 2University of California, Berkeley, USA, 3University of the Basque Country, SPAIN, and 4California Nano Systems Institute, USA
We investigate the electric-field-controlled behavior of bilayer magnetostrictive microstructures on ferroelectrics. To study the coupling behavior in the system, x-ray magnetic circular dichroism- photoemission electron microscopy and micromagnetic simulation are used to reveal the interplay between the two layers with opposite signs in saturation magnetostriction. The result of this work paves a way to developing more sophisticated energy-efficient composite multiferroic devices.
09:20 - 09:40 TFA-02 BAR-SHAPED MAGNETOELECTRIC GYRATOR C.M. Leung, X. Zhuang, J. Li, and D. Viehland Virginia Polytechnic Institute and State University, USA
A dual-resonance bar-shaped magnetoelectric (ME) gyrator has been developed based on Terfenol-D and PZT bars. It features a dual-resonance power transfer and a dual I-V conversion effect. In addition, this gyrator provides several advantages such as dual resonance frequency along the length direction, as well as half-wave and full-wave vibration mode; reduced laminate bonding avoiding adhesive breakdown, and ease of fabrication. 23
09:40 - 10:00 TFA-03 WIDE-BAND MULTIFERROIC QUARTZ MEMS ANTENNAE R.L. Kubena1, X. Pang2, K.G. Lee1, Y.K. Yong2, and W.S. Wall1 1HRL Laboratories, LLC., USA and 2Rutgers University, USA
MEMS-based multiferroic antennae are currently being studied for high sensitivity, extreme sub-wavelength RF receivers. The sensitivity of high-Q resonant-mode piezoelectric RF sensors can approach values typical of much larger dipole antennae (e.g., << 1 pT√Hz), but with very limited bandwidth. In this paper, we propose to use UHF quartz MEMS oscillators within a high frequency phase lock loop to provide wide BW operation at HF bands and with sensitivities approaching 5 pT√Hz.
10:00 Refreshment Break
SESSION T4A: SESSION T4B: BIOCHEMICAL AND BIO-INSPIRED ELECTRET MATERIALS AND POWER/ENERGY SYSTEMS HARVESTERS Session Chairs: Session Chairs: Hanseup Kim, University of Utah, USA and Skandar Basrour, Shad Roundy, University of Utah, USA Université Grenoble Alpes, FRANCE Arata Masuda, Kyoto Institute of Technology, JAPAN Crystal – Tomoka Room Flagler Room 10:30 – 10:50 T4A-01 T4B-01 SUPERCAPACITIVE MICRO-BIO- DEVELOPMENT OF A HIGH-PERFORMANCE PHOTOVOLTAICS AMORPHOUS FLUORINATED POLYMER L. Liu, M. Mohammadifar, and S. Choi ELECTRET BASED ON QUANTUM State University of New York-Binghamton, USA CHEMICAL ANALYSIS S. Kim, K. Suzuki, and Y. Suzuki We develop innovative supercapacitive micro-bio- University of Tokyo, JAPAN photovoltaic systems (or micro-BPVs) with maximized bacterial photoelectrochemical activities I In the present study, for the first time, we propose in a well-controlled, tightly enclosed micro- a new high-performance amorphous fluorinated chamber. The technique is based on a 3-D double- polymer electret based on quantum chemical functional bio-anode concurrently exhibiting bio- analysis. We found that the specific chemical bonds electrocatalytic and charge-storage features so that connected to the end group of CYTOP attract it offers the high-energy harvesting function of electron and lead CYTOP to have high electron BPVs and the high-power operation of an internal affinity. A new material based on this concept has supercapacitor for charging and discharging. been developed, and extremely-high thermal stability of charges and higher surface charge density than CYTOP EGG, the best fluorinated polymer electret, have been obtained.
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SESSION T4A: - continued SESSION T4B: - continued BIOCHEMICAL AND BIO-INSPIRED ELECTRET MATERIALS AND POWER/ENERGY SYSTEMS HARVESTERS Crystal – Tomoka Room Flagler Room 10:50 – 11:10 T4A-02 T4B-02 A COMPLETE TATTOO-BASED WIRELESS DEMONSTRATION OF AN ELECTRET BIOFUEL CELL USING LACTATE DIRECTLY GENERATOR FOR ENERGY HARVESTING FROM SWEAT AS FUEL WITHOUT ANY CHARGING PROCESS: R.A. Escalona-Villalpando1, UTILIZATION OF SPONTANEOUS E. Ortiz-Ortega1, J.P. Bocanegra-Ugalde2, ORIENTATION OF POLAR MOLECULES S.D. Minteer3, L.G. Arriaga1, Y. Tanaka1,2, N. Matsuura1, and H. Ishii1 and J. Ledesma-García2 Chiba University, JAPAN and 2Japan Science 1Centro de Investigación y Desarrollo and Technology Agency (JST), JAPAN Tecnológico, MEXICO, 2Universidad Autónomous de Queretaro, MEXICO, and In order to improve productivity of electret 3University of Utah, USA generators (EGs) for energy harvesting, simplification of fabrication process of the electret is A tattoo-type enzymatic biofuel cell (p-EBFC) was highly desired. In this study, we found that a giant developed using bilirubin oxidase- and lactate oxidase- surface potential of 46.5 V at 739 nm appeared in based electrodes as biocathode and bioanode, TPBi vacuum evaporated film due to spontaneous respectively, these was immobilized on flexible Toray orientation polarization of the molecule. By utilizing carbon paper. The wireless p-EBFC on the skin monitor this film as electret, we developed a novel EG via a cell phone delivered an open circuit voltage of 0.56 without the need for any charging process. ± 0.02 V and a current and power of 93 ± 4 µA and 14 ± 2 µW, respectively. Also, the BFC maintains its performance for 30 minutes in a sweat delivery from the arm during workouts. 11:10 – 11:30 T4A-03 T4B-03 VIRUS-ASSEMBLED TECHNOLOGY FOR STOCHASTIC MODELING OF HUMAN ARM NEXT GENERATION BIOENERGY SWING TOWARD STANDARD TESTING FOR HARVESTING DEVICES ROTATIONAL ENERGY HARVESTER S. Chu, A.D. Brown, J.N. Culver, Y. Tanaka, T. Miyoshi, and Y. Suzuki and R. Ghodssi University of Tokyo, JAPAN University of Maryland, USA We propose a stochastic model of arm swing for We report Tobacco mosaic virus (TMV)-templated rotational energy harvester (EH) during human glucose oxidase (GOx) electrodes for the walking. Using the mean value and standard development of advanced enzymatic-biofuel-cells deviation of arm swing motion, the effect of (EBCs). Leveraging the robust and high density self- nonlinear characteristics of the rotational EH are assembly of TMV1cys on Au surface, enhanced properly taken into account for estimating mean enzymatic reaction density is achieved resulting in a output power during human walking. A multi-axis higher electrochemical current response, compared robot is also introduced to mimic the arm motion to previous work using a similar strategy, and a precisely. promising EBC performance characteristics in combination with Pt cathodes.
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SESSION T4A: - continued SESSION T4B: - continued BIOCHEMICAL AND BIO-INSPIRED ELECTRET MATERIALS AND POWER/ENERGY SYSTEMS HARVESTERS Crystal – Tomoka Room Flagler Room 11:30 – 11:50 T4A-04 T4B-04 A NOVEL FLEXIBLE CONDUCTIVE SPONGE- SELF-RECHARGEABLE ELECTRET BASED LIKE ELECTRODE CAPABLE OF ON VIBRATION ENERGY HARVESTER GENERATING ELECTRICAL ENERGY FROM Y. Zhang1, Y. Hu1,2, M. Wang1, and F. Wang1,2,3 THE DIRECT OXIDATION OF AQUEOUS 1Southern University of Science and Technology, GLUCOSE CHINA, D. Desmaële1, F. La Malfa1,2, F. Rizzi1, 2Hong Kong University of Science and A. Qualtieri1, M. Di Lorenzo3, Technology, CHINA, and and M. De Vittorio1,2 3Chinese Academy of Sciences, CHINA 1Istituto Italiano di Tenologia, (IIT), ITALY, 2Università del Salento, ITALY, and In this paper, we propose an e-VEH with the out-of- 3University of Bath, UK the-plane gap closing scheme, which could release the energy to recharge the electret surface. A few This paper presents a new sponge-like electrode corona needles are embedded in the device. If the (SLE) material structured with porous gold (PG). surface potential of the electret decays after the The fabrication process is simple and no specific device has been working for a long time, we can use equipment is required: the use of liquid metal the corona charging setup to recharge the device particles enables the direct growth of PG into the directly. Also, we have developed a portable corona pores of a flexible conductive support matrix. With a charging system which can be powered by our e- SLE sample 13 mm long, 6 mm wide and 1.5 mm VEH directly. thick immersed in a 10 mM glucose solution, we demonstrate that a power density of 2.4 mW/cm3 at 0.5V can be reached without using any enzymes.
11:50 Lunch on Own
SESSION T5A: SESSION T5B: BATTERY TECHNOLOGIES PYROELECTRIC ENERGY HARVESTERS Session Chairs: Session Chairs: Jeffrey Lang, MIT, USA and Alexandra Garraud, University of Florida, USA and Paul Ronney, University of Southern California, USA Isaku Kanno, Kobe Univ, JAPAN Crystal – Tomoka Room Flagler Room 13:30 – 13:50 T5A-01 T5B-01 A LONG-LASTING MICROLITER-SCALE HYBRIDIZED THERMAL ENERGY MICROBIAL BIOBATTERY USING SOLID- HARVESTING MECHANISM STATE IONICS M. Kang and E.M. Yeatman M. Mohammadifar and S. Choi Imperial College London, UK State University of New York-Binghamton, USA We present a hybridized thermal energy harvesting We report a microliter-scale bacteria-powered mechanism using bimetallic and PZT beams for use biobattery providing a long-term operational adjacent to a heat source with modest temperature capability for potentially powering unattended variation at low frequency (below 0.1 Hz). To wireless sensor networks. In a 20µL-chamber, the improve the output power, the coupling effect is biobattery contains a horizontally arranged investigated between the piezo- and pyro-electric anode/salt-bridge/cathode configuration with solid- effects. A theoretical model has been established state agar electrolytes. A slow release of bacterial and experimentally verified. nutrients from a synthetic solid anolyte enables a continuous current generation over 8 days while a liquid-based anolyte is completely depleted within 4 hours. 26
SESSION T5A: - continued SESSION T5B: - continued BATTERY TECHNOLOGIES PYROELECTRIC ENERGY HARVESTERS Crystal – Tomoka Room Flagler Room 13:50 – 14:10 T5A-02 T5B-02 DESIGN, MICROFABRICATION AND A PYROELECTRIC THIN FILM OF ORIENTED CHARACTERIZATION OF FREE FORM TRIGLYCINE SULFATE NANO-CRYSTALS FACTOR, LIGHTWEIGHT THIN FILM FOR THERMAL ENERGY HARVESTING BATTERY FOR POWERING BIOINSPIRED R. Ghane-Motlagh and P. Woias NANO-DRONES BASED ON MEMS University of Freiburg, GERMANY ACTUATION S. Oukassi1, S. Poncet1, J.R. Frutos2, Inspired by nature we develop highly efficient and R. Salot1 technological microsystems which can produce their 1University Grenoble Alpes, FRANCE and own energy and work with sophisticated materials 2Silmach SA, FRANCE and concepts for sensors and actuators.
This paper presents the realization and characterization of biomimetic shaped thin film batteries with power and energy densities among the highest values reported in the literature for such miniaturized energy devices, which will contribute to bring new solutions for powering MEMS actuation- based micro/nanorobotics. 14:10 – 14:30 T5A-03 T5B-03 DEVELOPMENT OF ALL-SOLID-STATE THIN- PIEZOELECTRIC AND PYROELECTRIC FILM SECONDARY BATTERY FOR MEMS ENERGY HARVESTING FROM LITHIUM AND IOT DEVICE NIOBATE FILMS A. Suzuki, S. Sasaki, and T. Jimbo G. Clementi, S. Margueron, M.A. Suarez, ULVAC, Inc., JAPAN T. Baron, B. Dulmet, and A. Bartasyte Université de Bourgogne Franche-Comté, All-solid-state thin-film batteries (TFB) have come to FRANCE be recognized as one of the key enabling technologies for stand-alone MEMS/sensor devices In this paper we present the first implementation of which are indispensable for internet-of-things (IoT) lead-free Lithium Niobate as piezoelectric solution. We have developed reliable hardware and transducer for energy harvesting applications. The processes for the mass-production using vacuum fabrication process of cantilever beams and square technology. Our manufacturing process, battery chips is explained. The two different types of performance and recent development will be samples have been characterized with different introduced. techniques in order to investigate vibrational harvesting and pyroelectric effect. The first tests show promising results for the application of Lithium Niobate in hybrid energy harvesting field.
14:30 Transition Break
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SESSION T6A: SESSION T6B: WIRELESS POWER PUMPS AND HEAT ENGINES TRANSFER TECHNOLOGIES Session Chair: Session Chair: Koji Miyazaki, Steve Burrow, University of Bristol, UK Kyushu Institute of Technology, JAPAN Crystal – Tomoka Room Flagler Room 14:40 – 15:00 T6A-01 T6B-01 FLEXIBLE SCREEN-PRINTED COILS FOR LOW-COST, MONOLITHICALLY 3D-PRINTED, WIRELESS POWER TRANSFER USING LOW- MINIATURE HIGH-FLOW RATE LIQUID PUMP FREQUENCY MAGNETIC FIELDS A.P. Taylor1 and L.F. Velásquez–García2 K. Sondhi, N. Garraud, D. Alabi, 1Edwards Vacuum LLC, USA and D.P. Arnold, A. Garraud, Z.H. Fan, 2Massachusetts Institute of Technology, USA and T. Nishida University of Florida, USA We report the design, fabrication, and characterization of monolithically 3D-printed, high- This paper will also be presented in Thursday’s flow rate miniature liquid pumps. Our leak-tight, PowerMEMS-in-Action Session TPMIA-01 miniature pumps are microfabricated using 150 to
We report the fabrication and the testing of a 3D 300 µm layers in Nylon 12 via fused filament flexible screen-printed transmitter antenna geometry fabrication with a multi-step printing process. Each that can be used for low-frequency magnetic field pump has a rigid frame, a 21 mm-diameter, 150 µm- applications, such as electrodynamic wireless power thick membrane connected at its center to a piston transmission (EWPT) at <100 Hz. We demonstrate with an embedded magnet, a chamber, passive ball the capability of flexing the coils to a high bending valves, and two barbed connectors. Pump maximum radii. These characteristics of such a 3D flexible water flow rate is 1.37 ml/min @ 15.1 Hz – transmitter coil are necessary to develop a technical comparable to literature but at 200X slower roadmap for incorporation into flexible products. actuation frequency. 15:00 – 15:20 T6A-02 T6B-02 EXPERIMENTAL STUDY OF THE EFFECT OF MISTIC - MICRO STIRLING HEAT ENGINES DEPTH, ORIENTATION, AND ALIGNMENT FOR THERMAL ENERGY HARVESTING FOR A MEMS DIAPHRAGM RECEIVER IN T. Avetissian1, É. Léveillé1, M.-A. Hachey1, ACOUSTIC POWER TRANSFER SYSTEMS F. Formosa2, and L.G. Fréchette1 H. Basaeri, Y. Yu, D. Young, 1Université de Sherbrooke, CANADA and and S. Roundy 2Université Savoie Mont Banc, FRANCE University of Utah, USA We develop and fabricate a new concept of micro- We present a pMUT (Piezoelectric Micromachined engine, which works with a Stirling cycle. Named the Ultrasonic Transducer) receiver suitable for MISTIC, its purpose is heat energy harvesting for wirelessly powering implantable medical devices temperatures less than 200° C. We designed and (IMDs). In an acoustic power transfer system, the fabricated an external electromagnetic actuator in power that the receiver generates can be a function order to help the MISTIC during his start-up phase. of its position (depth, orientation, and alignment The actuator could also be converted to a relative to the transmitter). We numerically and harvesting system during the micro-engine experimentally study the sensitivity of the generated operation. power of a pMUT to any change in its location, which is not well studied in the literature.
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15:20 Transition Break
15:30 PowerMEMS - in - Action and Poster Session B
See page 45 for the listing of PowerMEMS-in-Action presentations
See page 46 for the listing of poster presentations
17:30 End of Day
17:30 Depart for Banquet at Kennedy Space Center
23:00 Arrive back at the Hilton Daytona Beach
Photo Credit: NASA or National Aeronautics and Space Administration 29
Friday, December 7
08:00 Conference Announcements
08:10 PowerMEMS 2019 Announcement
J.A. Dziuban, Wrocław University of Science and Technology, POLAND Rafal D. Walczak, Wrocław University of Science and Technology, POLAND
08:20 Plenary Presentation III Session Chair: David Arnold, University of Florida, USA
FPA-01 ZERO AND NEAR ZERO POWER INTELLIGENT MICROSYSTEMS Roy (Troy) H. Olsson III1, C. Gordon2, and R. Bogoslovov3 1Defense Advanced Research Projects Agency (DARPA), USA, 2Booze Allen Hamilton, USA, and 3Bogoslovov Consulting Ltd., USA
The Near Zero Power RF and Sensor Operations (N-ZERO) program from DARPA has created a new, nanowatt class of intelligent sensors and RF receivers enabling systems that are passive or nearly passive while operating in an intelligent standby mode. Such systems can be persistently powered by small batteries for many years or perpetually via miniature energy harvesters. The program sought wake-up receivers with a sensitivity of -100dBm and physical sensors that could classify vehicles at a range of 10 m, with power consumption on order of the self-discharge rate of a small battery. Furthermore, researchers with designs that fit other applications, such as chemical and IR sensors, were open to participate as well. From the program multiple approaches have emerged featuring passive and active MEMS devices and subthreshold CMOS circuits. The overall goals of the program have helped to redefine the state-of-the art in ultra-low power receivers, machine learning processors, and passive physical sensors.
09:00 Focus Session III – Zero-Power Devices and Systems Session Chairs: David Arnold, University of Florida, USA and Paul Mitcheson, Imperial College London, UK
09:00 - 09:20 FFA-01 AN AUTONOMOUS INTERFACE CIRCUIT BASED ON SELF-INVESTING SYNCHRONOUS ENERGY EXTRACTION FOR LOW POWER PIEZOELECTRIC ENERGY HARVESTERS B. Çiftci, S. Chamanian, H. Ulușan, and H. Külah Middle East Technical University, TURKEY
This work presents a self-powered interface circuit fabricated in 180nm standard CMOS technology to improve, rectify, and manage AC output of the piezoelectric energy harvesters (PEH) by utilizing Self- Investing Synchronous Electric Charge Extraction technique. It invests charges from the battery to PEH to improve the electromechanical coupling factor and consequently the energy extraction by utilizing only one external component.
09:20 - 09:40 FFA-02 ENERGY HARVESTING PIEZOELECTRIC WIND SPEED SENSOR M. Shi, E.M. Yeatman, and A.S. Holmes Imperial College London, UK
In this paper, we demonstrate a miniature wind speed sensor consisting of a triangle-shaped bluff body and a cantilever incorporating a commercial PVDF film. The bluff body causes regular vibration of the cantilever based on galloping, and the PVDF film converts vibration energy into electrical energy. Because the vibration frequency is linearly dependent on the wind speed, the vibration frequency is used to detect the wind speed directly with a high accuracy. 30
09:40 - 10:00 FFA-03 EVENT DRIVEN TIME-LOGGING SYSTEM BASED ON CONTINUOUS OPERATION OF REAL TIME CLOCK TOWARDS PERPETUAL ELECTRONICS S. Yamada and H. Toshiyoshi University of Tokyo, JAPAN
Real time clock or RTC is an inevitable component in the IoT (Internet-of-Things) wireless sensor nodes because the collected digital data need to be correlated with the time stamp information for the subsequent big data analysis. In this paper, we report on a circuit architecture to imprint the time stamp of an RTC into the memory by using a vibrational energy harvester as an event driven switch.
10:00 Refreshment Break
10:30 SESSION F7A - LATE NEWS AND EMERGING TOPICS Session Chairs: Shad Roundy, University of Utah, USA and Peter Woias, University of Freiburg, GERMANY
10:30 - 10:50 F7A-01 SYNCHRONOUS CIRCUITS WITH SELF-ADAPTIVE MECHANICAL SWITCHES OF VISCOUS MATERIAL: A PARAMETER STUDY Z. Yuan, W. Liu, W. Tian, Y. Huang, and Z. Zhao Southwest Jiaotong University, CHINA
Dedicated switching units are generally needed in synchronous extraction circuits with additional power consumption. This paper presents a novel self-adaptive mechanical switch using viscous materials. Due to slow restoring time, this switch can trace displacement peaks and perform switching operations synchronously with higher performance, less electronic components and lower voltage threshold. A parameter study shows the power increases with the relaxation constant in the harmonic case and an optimal relaxation constant exists for bandlimited noise excitations.
10:50 - 11:10 F7A-02 WEARABLE TRIBOELECTRIC GENERATOR BASED ON A HYBRID MIX OF CARBON NANOTUBE AND POLYMER LAYERS M. Su1, J. Brugger2, and B.J. Kim1 1Universtiy of Tokyo, JAPAN and 2École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND
This paper reports the design and fabrication of a novel triboelectric generator (TEG) based on hybrid layers of carbon nanotube and silk. The mixing of two materials in liquid phase for proven effective power generation is shown, which differs from previous studies using electrodes and friction materials that are independent, and then combined in a coating manner. The proposed TEG shows great potential in simplifying TEGs' structure and manufacturing process.
11:10 - 11:30
F7A-03 A PD/AL2O3-BASED MICRO-REFORMER UNIT FULLY INTEGRATED IN SILICON TECHNOLOGY FOR H-RICH GAS PRODUCTION M. Bianchini1, N. Alayo1, L. Soler3, M. Salleras2, L. Fonseca2, J. Llorca3, and A. Tarancon1,4 1Catalonia Institute for Energy Research (IREC), SPAIN, 2IMB-CNM (CSIC), SPAIN, 3Universitat Politècnica de Catalunya, SPAIN, and 4ICREA, SPAIN
We report the design, manufacturing and characterization of a micro-reformer unit for on-board hydrogen generation for portable-solid oxide fuel cells (µ-SOFCs). The reformer has been designed as a silicon micro monolithic substrate compatible with the mainstream microelectronics fabrication technologies. The selected fuel is dimethyl ether (DME) and the chosen catalyst consists of Pd nanoparticles deposited on an alumina active support deposited by ALD into vertical micro-channels. 31
11:30 - 11:50 F7A-04 MAGNETIC PENDULUM ARRAYS FOR EFFICIENT WIRELESS POWER TRANSMISSION S.P. Mysore Nagaraja1, R.U. Tok1, R. Zhu2, S. Bland3, A. Propst3, and Y.E. Wang1 1University of California, Los Angeles, USA, 2Axend Inc, USA, and 3Nextgen Aeronautics, USA
We propose an innovative electromechanical transmitter called Magnetic Pendulum Array, for efficient wireless power transmission at Ultra Low Frequencies (ULF). A proof of concept demonstration of the system at 447 Hz is presented. The theory and experimental results demonstrate that such a system can achieve high quality factors and can be easily scaled to the ULF range of frequencies.
11:50 Award Ceremony
David P. Arnold, University of Florida, USA Sindhu Preetham Burugupally, Wichita State University, USA Luc G. Fréchette, Université de Sherbrooke, CANADA Florian Herrault, HRL Laboratories, USA
12:10 Conference Adjourns
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PowerMEMS-in-Action Session A Wednesday, December 5 15:50 - 17:50 St. John’s – Halifax Foyer
WPMIA-01 AGING ASSESSMENT OF PIEZOELECTRIC ENERGY HARVESTER USING ELECTRICAL LOADS (PW-30h) T. Hoang, G. Ferin, C. Bantignies, B. Rosinski, P. Vince, and A. Nguyen-Dinh Vermon S.A., FRANCE
We will show a wireless sensor integrated with a vibration energy harvester. The sensor is attached on a small loudspeaker who is simulated the vibration of a HVAC system. The vibration induced will be measured by sensor and the measured data will be displayed on a tablet via a custom application.
WPMIA-02 DESIGN AND IMPLEMENTATION OF A SOIL PROFILE PROBE POWERED BY AIR AND SOIL TEMPERATURE DIFFERENCES (W2A-03) N. Ikeda, R. Shigeta, J. Shiomi, and Y. Kawahara University of Tokyo, JAPAN
In our demo, we will show a novel battery-free soil-profile probe which is powered by temperature differences between the near-surface air and the underground soil. We will prepare an environment that simulates typical situations in farm fields where the temperature gradient occurs in the vertical direction of the soil. We will have visitors confirm that the soil-profile probe is sufficiently driven under such environment. Through the demo, we will be able to present that temperature differences between the air and soil can be an attractive power source for battery-free environmental monitoring sensor.
WPMIA-03 INDUSTRY 4.0-TYPE WIRELESS SENSOR APPLICATION POWERED BY A SEMI-AUTOMATICALLY DESIGNED MINI-SCALE ELECTROMAGNETIC ENERGY HARVESTER (PW-24h) B. Leistritz, F. Senf, E. Chervakova, S. Engelhardt, and W. Kattanek IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, GERMANY
The demonstration shows an energy-autonomous and adaptive wireless sensor system. The power supply of the system is done by an electromagnetic energy harvester. Despite a hardly visible low-frequency excitation of approximately 1 m/s² at the housing, enough energy is collected to supply an active radio system. Depending on the harvested energy, the measurement and transmission frequency is determined adaptively. In addition, the system also reacts to various operating states. This is demonstrated by the example of an increased measurement frequency when a critical temperature is exceeded.
WPMIA-04 PUSH-BUTTON KINETIC ENERGY HARVESTER WITH SOFT-X-RAY-CHARGED FOLDED MULTILAYER PIEZOELECTRET (W3B-01) J. Lu and Y. Suzuki University of Tokyo, JAPAN
The demo will be to light up a LED bulb by gently pushing once the piezoelectret-based button. The electric circuit contains a folded piezoelectret, a circuit board (including rectifier, storage capacitor and DC/DC converter) and a LED bulb. The audience can easily feel the softness of button.
WPMIA-05 THERMIONIC ENERGY CONVERTER BASED ON MICRON-GAP NANOSTRUCTURED SPACERS: ACHIEVING RECORD-HIGH SHORT-CIRCUIT CURRENT (W3A-03) S.M. Nicaise1, C. Lin1, M. Azadi1, T. Bozorg-Grayeli2, P. Adebayo-Ige1, K. Van Houten3, F. Schmitt3, D.E. Lilley1, Y. Pfitzer1, W. Cha1, N. Melosh2, R.T. Howe2, J.W. Schwede1, and I. Bargatin1 1University of Pennsylvania, USA, 2Stanford University, USA, and 3Spark Thermionics, USA
We will show fully encapsulated and prototype thermionic devices, along with detailed videos of them in operation. The audience will be able to view and handle demo devices. Our devices convert heat from fuel into electricity, and though in-person demonstration requires us to have an open flame. 33
Poster Session A Wednesday, December 5 15:50 - 17:50 St. John’s – Halifax Room See poster floor plan on the last page of this program.
a - APPLICATIONS AND INNOVATIONS IN MICRO ENERGY SYSTEMS Energy-Autonomous Wireless Sensors for IoT
PW-01a ROBUST SELF-POWERED WIRELESS PLANT-MONITORING SENSOR SYSTEM WITH SAP-ACTIVATED BATTERY S. Okamoto1, R. Furumori1, A. Tanaka1, F. Utsunomiya2, and T. Douseki1 1Ritsumeikan University, JAPAN and 2ABLIC Inc., JAPAN
A sap-activated battery to extend the operating margin of a self-powered wireless plant-monitoring sensor is proposed. The battery is composed of a galvanized iron nail inserted into the stem of a plant and multiple stainless-steel rods planted in the soil make operation possible without damage to the plant. The effectiveness of the battery was evaluated using our sensor system for a tomato grown in a commercial greenhouse.
Zero-Power Devices and Systems
PW-02a A MECHANICALLY TUNABLE GHZ PASSIVE VOLTAGE ELEMENT USING MICROSTRIP RESONATOR D. Ni, A. Ravi, K.B. VinayaKumar, and A. Lal Cornell University, USA
The ability to detect RF signals at low power can be used to turn on sensor nodes only when needed to sense or transmit data, reducing the sensor node power consumption. In such a system, passive gain elements and filters are required to increase detectable RF voltage while rejecting out-of-band signals. Here, we developed a GHz passive voltage amplifier, using a mechanically tunable strip-line resonator, achieving gains over 19dB with load capacitances of 0.8-2.4pF.
b - BIOCHEMICAL AND BIO-INSPIRED POWER/ENERGY SYSTEMS Biochemical and Bio-Inspired Power/Energy Systems
PW-03b A DIATOM INSPIRED NEAR INFRARED METAMATERIAL ABSORBER WITH HIERARCHICAL NANODISK ARRAYS A. Li1, X. Zhao1, S. Anderson2, and X. Zhang1 1Boston University, USA and 2Boston University Medical Center, USA
Electromagnetic metamaterial absorbers use subwavelength resonators to achieve engineered absorptions. Inspired by diatoms, a photosynthetic micro algae that live in water systems, we fabricated and analyzed a hierarchical nano-resonator array based near infrared (IR) metamaterial absorber. With simulation and experimental results, the absorber demonstrated strong absorption in the near IR range. The proposed structures have the potential to be used in IR sensor and thermal emitter applications.
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PW-04b ANODE BASED ON ALCOHOL DEHYDROGENASE ENZYME AND TITANIUM DIOXIDE NANOTUBES FOR PHOTOCATALYTIC MICROFLUIDIC DEVICE J. Galindo-de-la-Rosa1, G. González-Solano2, J.A. Díaz-Real3, J. Ledesma-García2, and L.G. Arriaga1 1Centro de Investigación y Desarrollo Tecnológico en Electroquímica, MEXICO, 2Universidad Autónoma de Quéretaro, MEXICO, and 3University of British Columbia, CANADA
In this work we carried out the immobilization of the alcohol dehydrogenase enzyme on titanium dioxide nanotubes for the development of bioanodes for ethanol oxidation in a microfluidic fuel cell. The evaluation of the bioanodes was accomplish in a microfluidic fuel cell using different concentrations of ethanol in the presence or absence of ultraviolet light increasing the power of the fuel cell, achieving promising results for photocatalytic devices.
PW-05b IMMOBILIZATION OF GLUCOSE OXIDASE ENZYME ON NIAL-LDHS FOR APPLICATION IN MICROFLUIDIC FUEL CELL AND SEROTONIN DETECTION J. Galindo-de-la-Rosa1, M.G. Araiza-Ramírez2, A. Hernández-Torres2, J. Ledesma-García2, and L.G. Arriaga1 1Centro de Investigación y Desarrollo Tecnológico en Electroquímica, MEXICO and 2Universidad Autónoma de Quéretaro, MEXICO
In this work NiAl- Layered double hydroxides (NiAl-LDHs) were used as support for the immobilization of glucose oxidase enzyme for the development of an electrode for application in a microfluidic fuel cell and sensing of serotonin. The electrode was used for the detection of serotonin and evaluated in the microfluidic cell using different concentrations of glucose in solution buffered phosphate and 0.3M of KOH saturated with O2 as oxidant resulting in a maximum power density of 1.35mWcm2.
c - DIRECT THERMAL ENERGY-HARVESTING Thermoelectric Energy-Harvesting
PW-06c DEVELOPMENT OF THERMOELECTRIC THIN FILMS AND CHARACTERIZATION METHODS T. Mori1,2, T. Aizawa1, S. Mitani1,2, N. Tsujii1, I. Ohkubo1, T. Tynell1, Y. Kakefuda1, T. Baba1, M. Mitome1, N. Kawamoto1, and D. Golberg1 1National Institute for Materials Science (NIMS), JAPAN and 2University of Tsukuba, JAPAN
This work reports on the fabrication of thin films of inorganic thermoelectric materials like borides, germanides, manganese compounds, and characterization of their thermoelectric properties. We have utilized a unique high temperature molecular beam epitaxy (MBE) apparatus to grow hexaboride thin films. Magnetic manganese compound thin films were also grown, also using sputtering, since we are interested in the possibilities of utilizing magnetism to develop thermoelectric materials.
PW-07c METAL-METAL THERMOELECTRIC HARVESTER E. Köhler and P. Enoksson Chalmers University of Technology, SWEDEN
Thermoelectric couples are generally short, to reach high power output. With metal couples the Seebeck coefficients are substantially lower and maintaining the temperature gradient is difficult because of the high thermal conductivity. However, in applications where heat and cooling are abundant a metal-metal thermoelectric harvester could be beneficial, due to its simplicity. A 3-couple proof-of-concept harvester was assembled from Mo and Ni and gave 450 µW with a temperature gradient of 172°C.
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PW-08c PRINTED THERMOELECTRIC DEVICE K. Miyazaki, K. Kuriyama, and T. Yabuki Kyushu Institute of Technology, JAPAN
We have developed a printable thermoelectric material of a composite with Bismuth telluride and conductive polymer. High thermoelectric property is relatively high due to the low thermal conductivity. The measured thermal conductivity is much lower than the effective thermal conductivity calculated by a conventional model. We discuss the measured thermal conductivity from the view point of interfacial thermal resistance between organic and inorganic materials.
Other Energy-Harvesting
PW-09c ELECTRICAL MODELING AND CHARACTERIZATION OF A THERMO- MAGNETICALLY ACTIVATED PIEZOELECTRIC GENERATOR (TMAPG) A.A. Rendon-Hernandez1, M. Ferrari2, S. Basrour1, and V. Ferrari2 Université Grenoble Alpes, FRANCE and 2University of Brescia, ITALY
We develop, model and characterize a thermo-magnetically activated piezoelectric generator which is able to use small and slow temperature variations to generate mechanical movement of a piezoelectric transducer, this mechanical energy is then converted into electricity. The model presented here is implemented through LTspice
d - ELECTRICAL ENERGY HARVESTING, MANAGEMENT, STORAGE AND TRANSFER Batteries, Super-Capacitors, and Chemical Energy Storage
PW-10d OPTIMIZATION OF CARBON ELECTRODES FOR SOLID-STATE E-TEXTILE SUPERCAPACITORS N. Hillier, S. Yong, and S. Beeby University of Southampton, UK
Flexible supercapacitors (FSCs) offer a solution to powering electronic textiles, with high power densities, long cycle-life and fast charge/discharge rates. This paper presents the optimisation of porous carbon electrodes for FSCs through investigation of differing activated carbons, carbon loading and ratios of activated carbon to Carbon Black. Low cost materials and a scalable production methodology have been chosen to enable a transition from laboratory prototype to a real-world device.
Power Electronics and Energy Management Circuits
PW-11d A TUNABLE HYBRID SSHI STRATEGY FOR PIEZOELECTRIC ENERGY HARVESTING WITH ENHANCED OFF-RESONANCE PERFORMANCES A. Morel1,2, G. Pillonnet1, and A. Badel2 1University Grenoble Alpes, FRANCE and 2Université Savoie Mont Blanc, FRANCE
We propose an electrical strategy that greatly enhances the off-resonance scavenged power of highly coupled piezoelectric harvesters. This tunable strategy is based on a hybrid Synchronized Switch Harvesting on Inductor (hybrid SSHI) concept, combining features of the series SSHI and the parallel SSHI. We present a thorough model of this strategy and analyze its performances in enlarging the harvesting bandwidth of highly coupled harvesters.
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PW-12d AN UP-CONVERSION MANAGEMENT CIRCUIT FOR ELECTRICAL FIELD ENERGY HARVESTER Y.M. Wen, P. Li, T. Han, and X.J. Ji Shanghai Jiao Tong University, CHINA
This paper presents a high-efficiency management circuit using a maximum power point tracking (MPPT) matching circuit for power-line electrical energy harvesting. In order to achieve maximum output power during whole charging process, an up-conversion MPPT matching circuit is developed. Higher charging power, and larger ultimate charging voltage in a power-line voltage of 4000V can be obtained by using the MPPT up-conversion matching circuit.
PW-13d POWER MANAGEMENT WITH DYNAMIC POWER ADAPTION FOR A ROTATIONAL ENERGY HARVESTER IN A MARITIME GEARBOX J. Esch1, D. Schillinger2, D. Stojakov1, D. Hoffmann1, and Y. Manoli1,2 1Hahn-Schickard, GERMANY and 2University of Freiburg, GERMANY
We develop an energy harvesting system for rotational motion with a new power management concept to generate energy for a wireless condition monitoring system. The challenge is to generate enough energy with a high efficiency factor at the minimum revolution speed but also to avoid problems with energy excess and high voltages at the maximum revolution speed. The power management concept avoids the generation of excess energy that would lead to increased temperature.
RF, Inductive and Acoustic Power Transfer
PW-14d EXPERIMENTS ON A WIRELESS POWER TRANSFER SYSTEM FOR WEARABLE DEVICE WITH SOL-GEL THIN-FILM PZT B.D. Truong1, D. Wang2, T. Xue1, S. Trolier-McKinstry2, and S. Roundy1 1University of Utah, USA and 2Pennsylvania State University, USA
This paper presents experiments on a low-frequency wireless power transfer system (WPTS) using a piezoelectric transducer with magnet tip mass as a receiver. This method allows much higher external magnetic flux densities that can be applied to humans due to safety standards. This motivates us to investigate the performance of a WPTS based on PZT thin-film beam fabricated by sol-gel processing, with the aim to miniaturize the system for wearable devices.
PW-15d REDUCING HUMAN BODY HEATING AND TEMPERATURE RISES DUE TO INDUCTIVELY-POWERED IMPLANTABLE MEDICAL DEVICES C.H. Kwan, D.C. Yates, and P.D. Mitcheson Imperial College London, UK
Maximizing link efficiency is normally the design aim of inductive power transfer (IPT) systems in air. However, if a receiver coil is implanted in a patient, more suitable objectives are required to meet safety standards and regulations (e.g. ICNIRP and EN 45502-1). This paper investigates methods of reducing heating and temperature rises in human tissue due to an IPT system for medical implants and presents experimental results conducted in salt water to validate the theory and simulations.
37 e - ELECTRON, ION, PHOTON AND RADIATION ENERGY CONVERSION Electron, Ion and Photon Sources
PW-16e MINIATURE, 3D-PRINTED, MONOLITHIC ARRAYS OF CORONA IONIZERS Z. Sun and L.F. Velásquez-García Massachusetts Institute of Technology, USA
We report the design, fabrication, and characterization of the first 3D-printed, monolithic corona ionizer arrays in the literature. The devices are binder inkjet-printed in stainless steel 316L and have 5, 9, or 32 emitters (emitter pitch equal to 6 mm, 4 mm, or 2 mm, respectively); each emitter is 5 mm tall, with 1.7 mm diameter at the base and 300 μm diameter at the tip. Finite element simulations predict inter-tip field shadowing and a corona region ~400 µm thick. Current-voltage data in air in the negative polarity (tips negative, collector grounded) follow Townsend current-voltage law. f - GENERAL Energy Conversion Physics
PW-17f GENERATION OF ASYMMETRIC INCOMMENSURABLE TORQUE SIGNALS L. Kurmann1, and J.L. Duarte2 1University of Freiburg, GERMANY and 2Eindhoven University of Technology, THE NETHERLANDS
We develop, model and optimize kinetic energy harvester systems and focus in this research on permanent magnet (PM) 2D/3D spring systems. The mayor findings are (1) the confirmation that asymmetric incommensurable torque signals are feasible (2) using non-conservative rotor PM-field trajectories and (3) that magnetic fields can do work if a 2D/3D charge-ring/cylinder (with geometrical extension) is considered. These claims are in full agreement with the classical Electromagnetic Theory.
g - MATERIALS FOR ENERGY CONVERSION Fabrication Technology for Power/Energy Systems
PW-18g HIGH-RATE ETCHING OF SINGLE ORIENTED ALN FILMS BY CHLORINE-BASED INDUCTIVE COUPLED PLASMA FOR VIBRATIONAL ENERGY HARVESTERS H.H. Nguyen, L.V. Minh, and H. Kuwano Tohoku University, JAPAN
Here we report our development of a high-rate etching process of (0002)-oriented AlN films for the fabrication of vibrational energy harvesters by using Cl2-based ICP and Ni thin film as a hard mask. We have achieved etching-rate of 723 nm/min, the highest value developed for single-oriented AlN films. In this paper, etching selectivity was optimized at 11. XPS measurements offered a look inside the etching processes and revealed the etching mechanism of AlN by chlorine for the first time.
PW-19g USING GALISTAN TO FABRICATE POROUS GOLD ELECTRODES: TOWARD NON- ENZYMATIC GLUCOSE FUEL CELLS WITH ENHANCED PERFORMANCE FOR DRIVING WEARABLE/BIOELECTRONIC DEVICES D. Desmaële1, F. La Malfa1,2, F. Rizzi1, A. Qualtieri1, M. Di Lorenzo3, and M. De Vittorio1,2 1Istituto Italiano de Tecnologies (IIT), ITALY, 2Università del Salento, ITALY, and 3University of Bath, UK
We present a new facile route for the fabrication of enzyme-free porous gold electrodes (PGEs) which can directly convert the chemical energy of glucose into electricity. The method is low-cost and does not require any special equipment: porous gold is simply grown on carbon paper containing liquid metal particles. The process is also versatile and scalable: PGEs of various sizes/shapes can be straightforwardly fabricated in order to meet the power budget of wearables/implantables.
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Materials for Energy Conversion and Storage
PW-20g GRAPHENE-POROUS SEMICONDUCTOR NANOCOMPOSITES SCALABLE SYNTHESIS FOR ENERGY APPLICATIONS A. Dupuy, S. Sauze, M. Jellite, R. Arvinte, R. Arés, and A. Boucherif Université de Sherbrooke, CANADA
The aim of this work is to develop a cost effective and scalable synthesis process of producing graphene- based composite nanomaterials, called graphene-coated porous semiconductor nanocomposite (GCPS-nC), The idea is to harness and combine the remarkable properties of graphene and porous semiconductors namely silicon (Si) and germanium (Ge) to create systems with entirely new and unexplored characteristics, and to tune these properties for use in real-world applications.
PW-21g HYDROGEN EVOLUTION CATALYTIC PERFORMANCE OF METAL DOPED MOS2 X. Leng1, Y. Wang1, and F. Wang1,2 1Southern University of Science and Technology, CHINA and 2Chinese Academy of Sciences, CHINA
This paper reports the synthesis of metal element doped Molybdenum disulfide (MoS2) and their application in hydrogen evolution reaction (HER). MoS2has been demonstrated as an efficient HER catalyst at lower price than noble metal. The phase control and defect rich structure of MoS2 has recently attracted a lot of researchers' interest. In this work, we have introduced Co, Cu, Ni, Fe into MoS2 and study the influence of these element on the HER activity.
h - MECHANICAL ENERGY HARVESTING AND ACTUATION Mechanical Energy-Harvesting – Electromagnetic
PW-22h A CM-SCALE, LOW WIND VELOCITY AND 250° C-COMPLIANT AIRFLOW-DRIVEN HARVESTER FOR AERONAUTIC APPLICATIONS P. Gasnier, J. Willemin, S. Boisseau, B. Goubault De Brugière, G. Pillonnet, B. Gomez, and I. Neyret University Grenoble Alpes, CEA-Leti, FRANCE
This paper reports the design, fabrication, and testing of a centimeter-scale (Ø=35mm), 250°C-compliant microturbine for aeronautic applications. Dedicated to low air flows ≈3 m/s), this device is the first flow-driven harvester withstanding such high temperatures and high vibration levels (10e7 cycles at 20G). The harvester has been designed to supply a wireless sensor system interfacing with aeronautic-grade transducers.
PW-23h A MAGNETICALLY-SPRUNG NONLINEAR RESONATOR FOR WIDEBAND VIBRATION ENERGY HARVESTING CONSISTING OF MAGNETIC COMPOSITE AND RING MAGNETS Y. Miyata, A. Masuda, F. Zhao, and S. Ushiki Kyoto Institute of Technology, JAPAN
This paper presents a novel design of a magnetically-sprung mechanical resonator for wideband vibration energy harvesting. In this design, a magnet composite consisting of two cylindrical magnets composed in a repelling arrangement is used as a moving mass, which is magnetically suspended between two ring magnets. This configuration yields more significant variation of stiffness in a shorter stroke compared with the previous design, resulting in wider operation band even under small excitation.
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PW-24h INDUSTRY 4.0-TYPE WIRELESS SENSOR APPLICATION POWERED BY A SEMI- AUTOMATICALLY DESIGNED MINI-SCALE ELECTROMAGNETIC ENERGY HARVESTER B. Leistritz, F. Senf, E. Chervakova, S. Engelhardt, and W. Kattanek IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, GERMANY
This paper will also be presented in Wednesday’s PowerMEMS-in-Action Session WPMIA-03
We developed an energy-autonomous and adaptive wireless sensor system for a wide range of Industry 4.0- type applications. By taking a holistic view of the overall system and of the specific interactions of these components, technological barriers of individual system elements can be overcome. As a result it can be shown that increasing power requirements resulting from Industry 4.0-type communication paradigms and required intelligence can be met by even small electromagnetic energy harvesters.
PW-25h MEMS POWER GENERATOR OPERATED BY FLUOROCARBON GAS M. Kaneko, K. Kudo, K. Ebisawa, K. Tanaka, and F. Uchikoba Nihon University, JAPAN
We developed a MEMS magnetic induction type air turbine generator. The miniature components of the MEMS air turbine was fabricated by a silicon material. And a miniature magnetic circuit that had a magnetic core and a coil pattern like a winding wire was fabricated by a ceramic material and a silver conductor. By combining these technologies, the fabricated generator realized the millimeter size generator. It demonstrated the rotational motion by a fluorocarbon gas, and it showed output power.
PW-26h PERFORMANCES OF A CM-SCALE WATER FLOW ENERGY HARVESTER IN REAL ENVIRONMENT FOR AUTONOMOUS FLOWMETERS E. Saoutieff1, P. Gasnier1, S. Boisseau1, J. Ojer-Aranguren2, and I. Rodot3 1University Grenoble Alpes, FRANCE, 2NAITEC, SPAIN, and 3SERM, FRANCE
We reports the optimization and the measurement results of a 4 cm diameter water flow energy harvester inserted in pipes. In this work, a test-bench has been implemented to measure the harvester's electrical output powers, rotation frequencies and pressure losses. Furthermore, long-term tests have been carried out in a district heating and cooling system in order to validate its operation in a real environment.
PW-27h WEARABLE GENERATOR WITH ROTATING OSCILLATING MASS M. Ortiz1, E. Fenollal2, B. Restrepo2, A. Espinoza2, and E. Romero2,3 1University of Puerto Rico, USA, 2Universidad del Turabo, USA, and 3Florida Polytechnic University, USA
This work reports the design, fabrication, and testing of a rotating, oscillating mass electromagnetic generator for wearable applications. A custom design architecture was done to assess the differences in generation for swinging motion at different conditions. The proposed study evaluates a rotational generator mounted on a swing arm driven by a sinusoidal input motion to determine the parameters that lead to constant rotations.
Mechanical Energy-Harvesting - Electrostatic
PW-28h DYNAMIC ANALYSIS OF ELECTROSTATIC ENERGY HARVESTING DEVICE WITH MULTI-STEP STRUCTURE X. Guo1, Y. Zhang1, and F. Wang1,2 1Southern University of Science and Technology, CHINA and 2Chinese Academy of Sciences, CHINA
We have studied the dynamic features of an out-of-the-plane gap closing electrostatic energy harvester with different steps. The displacement and output power of pull-in effect and harvesters with various stopper heights have been simulated, measured and analyzed. The pull-in effect is observed, which limits the output power for device with high surface potential, and a decrease of output power for device with higher stoppers is also noticed. 40
PW-29h NEMS ELECTROSTATIC RF WAKEUP SWITCH WITH PT FIB CONTACT A. Ruyack, L. Pancoast, N. Shalabi, A. Molnar, and A. Lal Cornell University, USA
Advances in the development of a near-zero power NEMS RF energy detector are presented. We develop a process for achieving below 3V operation of a NEMS RF wakeup switch utilizing focused ion beam to pattern sub-100 nm Pt contacts. Switch design and the potential benefit of FIB patterning are discussed along with the testing setup and a custom control loop for the contact-based switch. Preliminary results are reported with a focus on probability of detection and false alarm rate as metrics.
Mechanical Energy-Harvesting – Piezoelectric
PW-30h AGING ASSESSMENT OF PIEZOELECTRIC ENERGY HARVESTER USING ELECTRICAL LOADS T. Hoang, G. Ferin, C. Bantignies, B. Rosinski, P. Vince, and A. Nguyen-Dinh Vermon S.A., FRANCE
This paper will also be presented in Wednesday’s PowerMEMS-in-Action Session WPMIA-01
The aging of bending piezoelectric structures is assessed using an electrical stress induced approach. Using FE modeling the equivalence of the stress distribution of a clamped-free cantilever when mechanically operated and electrically operated at its first eigen frequency. The electrical solicitation technique allows to get similar stress distribution profile compared to mechanical induced approaches but for a higher resonating frequency (X20), thus considerably accelerating the aging process.
PW-31h EQUIVALENT CIRCUIT MODEL OF PIEZOELECTRIC VIBRATION ENERGY HARVESTERS COMPOSED OF TRAPEZOIDAL UNIMORPH CANTILEVERS T. Umegaki, T. Ito, G. Tan, and I. Kanno Kobe University, JAPAN
We have constructed a time-resolved equivalent circuit model of the piezoelectric vibration energy harvesters (PVEHs) with the trapezoidal unimorph structure not only to optimize the dimensional parameter of trapezoidal PVEHs but also to anticipate the output power by a variety of external vibrations. To calculate the output responses by arbitrary mechanical input accelerations such as impulses or sinusoidal, we have formulated simultaneous first order differential equations based on this model.
PW-32h INTEGRATION AND CHARACTERISATION OF PIEZOELECTRIC MACRO-FIBRE COMPOSITE ON CARBON FIBRE COMPOSITE FOR VIBRATION ENERGY HARVESTING Y. Shi, C. Piao, D. El Fadlaoui, A. Al-Saadi, and Y. Jia University of Chester, UK
Carbon fibre composite is a strong and a lightweight structural material. The integration of piezoelectric films add vibration energy harvesting capabilities to an otherwise purely mechanical structure. A PZT macro-fibre composite is co-cured with a carbon/epoxy pre-preg in order to manufacture the multi-functional composite plate. Without noticeably increasing profile, adding weight or compromising mechanical integrity, the resultant mechanical plate can recover power from vibration.
PW-33h MEMS ENERGY HARVESTING BASED ON UNIFORM-STRESS CANTILEVER WITH MULTILAYER PZT THIN FILMS S. Hirai, K. Kanda, T. Fujita, and K. Maenaka University of Hyogo, JAPAN
Multilayered piezoelectric MEMS energy harvesters based on sputtering depositions are designed and fabricated. To obtain high endurance and output power, the unimorph cantilever structure with totally 10 µm- thick multilayered PZT thin films and 80 µm-thick Si elastic layer is designed. In addition, the cantilever is designed to undergo a uniform stress on the PZT. The output power and voltage was 90 µW and 1.0 Vrms under the input acceleration of 1.2 G (=11.76 m/s2) and optimum load resistance.
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PW-34h OUTPUT POWER OF PIEZOELECTRIC MEMS VIBRATION ENERGY HARVESTERS UNDER RANDOM OSCILLATION S. Murakami1, T. Yoshimura2, M. Aramaki2, Y. Kanaoka1, K. Tsuda1, K. Satoh1, K. Kanda3, and N. Fujimura2 1Osaka Research Institute of Industrial Science and Technology, JAPAN, 2Osaka Prefecture University, JAPAN, and 3University of Hyogo, JAPAN
We fabricated piezoelectric cantilever-type vibration energy harvesters based on silicon MEMS fabrication technology. The characteristics were investigated under random oscillation. We made it clear that the power generation under random oscillation is proportional to the square of the vibrational acceleration. We also observed the nonlinearity in the power spectral density and considered the mechanism by using the mass- spring-damper system model.
PW-35h REACTIVE ION BEAM ETCHING OF PIEZOELECTRIC SCALN FOR BULK ACOUSTIC WAVE DEVICE APPLICATIONS R. James, Y. Pilloux, and H. Hegde Plasma Therm, USA
We have developed Reactive Ion Beam Etching (RIBE) processes for the facile etching of ScAlN with high concentration of Sc. A combination of wafer tilt, Reactive Gas/Ar ratio, beam voltage and current were used to achieve very smooth etched surface, high etch rate and selectivity to photoresist, and desired profile angle. This research has huge implications in fabricating ScAlN based BAW RF filters for next generation mobile and wireless applications.
Mechanical Energy-Harvesting - Triboelectric
PW-36h TRIBOELECTRIC EFFECT TO HARNESS FLUID FLOW ENERGY R.I. Haque, A. Arafat, and D. Briand École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND
We are reporting energy scavenging from fluid flows inside tube structures using triboelectric effects. Two separate designs of triboelectric nanogenerators (TENGs) were proposed. A tubular design that uses liquid- solid interaction mechanism for water, and freestanding flapping films design utilizing contact-separation mechanism for wind flow energies conversions. Under optimum operational conditions, both TENGs generated average output powers of tens of microwatts.
Mechanical Energy-Harvesting - Other
PW-37h UPPER BOUND FOR THE POWER OUTPUTS OF LINEAR VIBRATIONAL POWER HARVESTERS: TRANSLATIONAL VS. ROTATIONAL GEOMETRIES A. Ananthakrishnan and I. Bargatin University of Pennsylvania, USA
We present a method to estimate the maximum power of both translational and rotational harvesters when excited by a vibration source with an arbitrary power spectral density. We show how the height and widths of the peaks in the vibration power spectral density determine the maximum power output as well as the minimum harvester size that is needed to reach this maximum power. To provide an example, we considered the case human walking vibrations for both vibrational and rotational harvesters.
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Motors/Generators, Pumps and Actuators
PW-38h DETERMINATION OF MECHANICAL FORCE GENERATED BY GROWING SEED IN INKJET 3D PRINTED MICRODEVICE K. Adamski, B. Kawa, J. Dziuban, and R. Walczak Wrocław University of Science and Technology, POLAND
In this paper we present an inkjet 3D printed microdevice for determination of growing seed actuation force. The device consists of two cantilever-type sensors for the forces monitoring. Deflection of the cantilevers is determined by optical analysis of the captured microdevice images and then deflection is converted to force value. Successful monitoring of the mechanical force generated by the root and stalk in different cultivation mediums was obtained.
PW-39h STABILITY OF SYMMETRICAL COMB-DRIVE ACTUATOR A. Galisultanov1, G. Pillonnet1, Y. Perrin1, L. Hutin1, P. Basset2, and H. Fanet1 1Université Grenoble Alpes, FRANCE and 2Université Paris-Est, FRANCE
This paper studies the potential energy wells of symmetrical comb-drive actuators by taking in account the fringing effect. Depending on the actuation voltage and geometry, the actuator has as a one, two, and three stable states. These equilibriums have been calculated from FEM simulations and the overlap between the fingers affects the well depths. Based on this study, a optimal design of the symmetrical actuator for the recently proposed capacitive adiabatic logic has been proposed.
j - THERMAL AND CHEMICAL SCIENCE AND TECHNOLOGIES FOR POWER, PROPULSION, AND COOLING Fuel Cells, Reactors, and Combustors
PW-40j DYNAMICS OF DIRECT HYDROCARBON POLYMER ELECTROLYTE MEMBRANE FUEL CELLS E.H. Kong, P.D. Ronney, and G.K. Surya Prakash University of Southern California, USA
Hydrocarbons have 50-100 times higher energy per unit weight compared to commercially available batteries, thus operating at only 10% overall efficiency could provide far lighter and less expensive energy sources for portable electronic devices. With this motivation, the feasibility of using Polymer Electrolyte Membrane (PEM) fuel cells with propane fuel, operating at low temperatures (< 100℃), was explored.
PW-41j IMPROVED SENSITIVITY OF THIN FILM SENSOR FOR HUMIDITY MEASUREMENT INSIDE A OPERATING PEMFC N. Hasegawa, Y. Otsuki, M. Kurosu, and T. Araki Yokohama National University, JAPAN
In this study, we improved sensitivity of capacitive humidity sensor suitable for humidity measurement inside an operating proton exchange membrane fuel cell (PEMFC). Specifically, we designed and manufactured the sensor, evaluated the characteristics of the sensor. Finally, we inserted the sensor in a PEMFC during operation, and measured the humidity.
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k – Late News
PW-42k A RESONANCE-MAINTAINING CIRCUIT FOR HIGH-EFFICIENCY ELECTRET-BASED MEMS VIBRATIONAL ENERGY HARVESTERS H. Mitsuya1, H. Ashizawa1, M. Morita1, H. Homma2, G. Hashiguchi3, and H. Toshiyoshi2 1Saginomiya Seisakusho, Inc., JAPAN, 2University of Tokyo, JAPAN, and 3Shizuoka University, JAPAN
We have developed a high-efficiency MEMS vibrational energy harvester with a resonance-maintaining circuit. Of particular note, the circuit is capable of both (1) rectifying the output to compensate for the electret bias voltage in the harvester and (2) avoiding electromechanical feedback by maintaining a relatively stable apparent load and resonance state. These improvements to the control circuitry allow the energy harvester to achieve useable energy outputs of over 500µW with highly efficient energy conversion ratios (79%).
PW-43k MICROFABRICATION OF A SILICON TURBOPUMP WITH EMBEDDED THERMAL ISOLATION FOR A RANKINE MEMS HEAT ENGINE A. Amnache and L.G. Fréchette Universite de Sherbrooke, CANADA
This paper presents the fabrication of a silicon MEMS microturbopump with embedded thick thermal isolation. To prevent heat from conducting through the silicon rotor, thick glass insulation was embedded into the rotor structure using glass molding and planarization. This composite rotor approach allows us to leverage the capabilities of silicon DRIE, while creating over 100 micron thick glass insulation between the turbine and the pump. Also, in-plane thermal insulation was accomplished by etching deep trenches in silicon to form an array of thin walls, followed by a thermal oxidation step that consumes the silicon walls and closes the trenches to form a deep monolithic oxide zone. These techniques were successfully implemented for the fabrication of a complete MEMS turbopump, which consists of a stack of 4 silicon wafers and one glass wafer, and a total of 18 lithography/etch steps.
l – Commercial Posters Table-Top Exhibitors
PW-44l DIRECT WRITE LITHOGRAPHY FOR THE INTERNET OF THINGS J. Sasserath and J. Drakeford Rave N.P., USA
Advanced Micro Patterning, a Division of Rave N.P. provides Researchers and Developers the ability to pattern down to 0.6 um on planer and non-planer substrates. Avoid costly Masks and Time delays to get your patterning results immediately at a low cost. Optical Direct Patterning can be used on all common Optical Photo-resists making Advanced Patterning Quick Easy, Simple and Low cost.
PW-45l REACTIVE ION BEAM ETCHING OF PIEZOELECTRIC SCALN FOR BULK ACOUSTIC WAVE DEVICE APPLICATIONS R. James, Y. Pilloux, and H. Hegde Plasma-Therm, LLC, USA
This paper reports the facile etching of ScAlN with Scandium concentration of up to 15% using Reactive Ion Beam Etching (RIBE) technology with a very smooth surface less than 5nm average roughness and profile angle between 60 to 80 degrees. ScAlN etch rate and selectivity can be controlled by playing with reactive chemistry, to vary from 15 to 40nm/min, with selectivity variation from 0.5:1 to 0.75:1
PW-46l SUSS MicroTec E. Edwards SUSS MicroTec, USA
With almost 70 years of engineering experience SUSS MicroTec is a leading supplier of process equipment for microstructuring in the semiconductor industry and related markets. Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding and photomask processing, complemented by micro-optical components. 44
PowerMEMS-in-Action Session B Thursday, December 6 15:30 - 17:30 St. John’s – Halifax Foyer
TPMIA-01 A SIMPLE PASSIVE 390 mV AC/DC RECTIFIER FOR ENERGY HARVESTING APPLICATIONS (W2B-03) A. Santiago Rodriquez, N. Garraud, D. Alabi, A. Garraud, and D.P. Arnold University of Florida, USA
FLEXIBLE SCREEN-PRINTED COILS FOR WIRELESS POWER TRANSFER USING LOW-FREQUENCY MAGNETIC FIELDS (T6A-01) K. Sondhi, N. Garraud, D. Alabi, D.P. Arnold, A. Garraud, Z.H. Fan, and T. Nishida University of Florida, USA
We will demonstrate the wireless transmission of power from transmitter coils (rigid & flexible) to multiple compact receivers connected to loads (LEDs & microcontroller) via an ac-to-dc electronics. Audience will see flashing LEDs, move the receivers around, and flex the flexible transmitter.
TPMIA-02 MILLIWATT POWER SUPPLY BY DYNAMIC THERMOELECTRIC HARVESTING (PT-07c) M.E. Kiziroglou1,2, S.W. Wright1, M. Shi1, D.E. Boyle1, Th. Becker3, J.W. Evans4, and E.M. Yeatman1 1Imperial College London, UK, 2ATEI Thessaloniki, GREECE, 3Natural Science and Technical Academy Isny, GERMANY, and 4University of California, Berkeley, USA
We demonstrate a power supply that collects thermal energy from temperature fluctuations in time, to provide regulated power in the milliwatt range. The demonstration includes harvesting while powering a 10 kΩ analogue voltmeter directly from the supercapacitor, including during cold-starting.
TPMIA-03 SIMULATION AND MODELLING OF A SPATIALLY-EFFICIENT 3D WIRELESS POWER TRANSFER SYSTEM FOR MULTI-USER CHARGING (PT-14d) H.-W. Wang1, N.X. Wang2, and J.H. Lang2 1Tsinghua University, CHINA and 2Massachusetts Institute of Technology, USA
A position-free WPT system with multiple LED loads will be demonstrated. Different driven modes will be adapted and compared. The demonstration will show how phase-shift driven current can create a rotational field, and therefore increase the uniformity of power distribution among users.
TPMIA-04 TEXTILE-BASED FREESTANDING TRIBOELECTRIC-LAYER NANOGENERATOR WITH ALTERNATE POSITIVE AND NEGATIVE GRATING STRUCTURE (PT-35h) W. Paosangthong, R. Torah, and S. Beeby University of Southampton, UK
We will demonstrate the capability of triboelectric generators (TENGs) as a power source. The power generation of the TENGs will be performed using a belt-driven linear actuator to generate a periodic sliding motion between two TENG substrates. The voltage outputs of the TENGs with different grating numbers (N=1 to 10) will be measured using an oscilloscope and compared. The output of the TENG with 10 grating number will be used to light 100 LEDs connected in series or charge up a capacitor. The audience will have chance to try to light up the LEDs themselves using their hand motion.
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Poster Session B Thursday, December 6 15:30 - 17:30 St. John’s – Halifax Room See poster floor plan on the last page of this program.
a - APPLICATIONS AND INNOVATIONS IN MICRO ENERGY SYSTEMS Energy-Autonomous Wireless Sensors for IoT
PT-01a MINIMIZING POWER CONSUMPTION OF LORA® AND LORAWAN FOR LOW-POWER WIRELESS SENSOR NODES E. Bäumker, A. Miguel Garcia, and P. Woias University of Freiburg, GERMANY
In this paper we show that RF transmissions using the physical layer of the LoRa® interface, and with some limitations also the link layer LoRaWAN, is suitable even for extremely power-restricted devices, like energy- autonomous wireless sensor nodes (WSNs), if configured well. We reveal the impact on the power consumption of different outer circuitry and ICs for a wireless transmission and derive a design strategy for a maximal power efficiency.
Zero-Power Devices and Systems
PT-02a A NARROW-BAND AND ULTRA-LOW-POWER 433 MHZ WAKE-UP RECEIVER S. Koeble, S. Heller, and P. Woias University of Freiburg, GERMANY
We present an ultra-low-power wake-up receiver to be integrated into wireless sensor nodes (WSNs). for enabling a power-saving asynchronous communication between the WSN and a host. The receiver is based on an optimized modulation/demodulation concept to achieve high RF sensitivity and narrow-band operation at the same time. The device works in the 433 MHz ISM band, with a high RF sensitivity (-63.4 dBm), an ultra-low power consumption (8.7 µW), and with a low supply voltage (2 V).
b - BIOCHEMICAL AND BIO-INSPIRED POWER/ENERGY SYSTEMS Biochemical and Bio-Inspired Power/Energy Systems
PT-03b A PAPERTRONIC SENSING SYSTEM FOR RAPID VISUAL SCREENING OF BACTERIAL ELECTROGENICITY M. Tahernia, M. Mohammadifar, and S. Choi State University of New York-Binghamton, USA
We create the ability to achieve easy, rapid, and sensitive characterization of bacterial electrogenicity from a single drop of culture. We use paper as a device substrate that inherently produces favorable conditions for easy, rapid, and sensitive controlling of a microbial liquid sample. Through an innovative microscale device structure and a simple transistor amplifier circuit directly integrated into a single sheet of paper substrate, a powerful sensing array is constructed.
PT-04b GLUCOSE OXIDASE BIOELECTRODES IN DEVICES IMPLANTED IN LIVING PLANTS FOR ENERGY APPLICATIONS J. Galindo-de-la-Rosa1, A. Hernández-Torres2, M.G. Araiza-González2, L.G. Arriaga1, and J. Ledesma-García2 1Centro de Investigación y Desarrollo Tecnológico en Electroquímica, MEXICO and 2Universidad Autónoma de Quéretaro, MEXICO
The use of a living plant as a fuel cell comes from the idea of taking advantage of more efficiently the conversion of chemical energy, which comes from the plant's photosynthesis until it is converted into electrical energy. Glucose oxidase was immobilized on graphite rods for the development of the anodes and as a Pt/C cathode. When the enzyme is immobilized on the surface of the graphite electrode as the anode implanted in plants (cacti) was evaluated for fuel cell. 46
PT-05b MICROFLUIDIC BIOFUEL CELL BASED ON CHOLESTEROL OXIDASE/LACCASE ENZYMES J. Galindo-de-la-Rosa1, E. Ortiz-Ortega1, B. López-González1, L.G. Arriaga1, and J. Ledesma-García2 1Centro de Investigación y Desarrollo Tecnológico en Electroquímica, MEXICO and 2Universidad Autónoma de Querétaro, MEXICO
In this research two electrodes were developed, a bioanode where the enzyme oxidase was immobilized in Sigracet GDL 39 and a biocathode with laccase enzyme, for their evaluation in a cell of microfluidic. The microfluidic fuel cell was constructed by PMMA for the fuel and oxidant channels. The evaluation of the microfluidic cell was carried out using different solutions of cholesterol, obtaining a maximum power density of 1.38 mW /cm2 with and 0.75V using 500mg/dL cholesterol.
c - DIRECT THERMAL ENERGY-HARVESTING Thermoelectric Energy-Harvesting
PT-06c IMPROVED MICRONANOGENERATORS BASED ON SILICON COMPATIBLE MATERIALS AND PROCESSING I. Donmez1, M. Dolcet1, A. Stranz1, M. Salleras1, L. Fonseca1, G. Gadea2, M. Pacios2, A. Morata2, and A. Tarancon2,3 1IMB-CNM (CSIC), SPAIN, 2IREC, SPAIN, and 3ICREA, SPAIN
An all-silicon microthermocouple fabricated by means of top-down silicon technologies and bottom-up deposition techniques has been optimized by using dense arrays of SiGe nanowires as thermoelectric material, and outperforms the one previously attempted with Si nanowires. Performance boosted even more after assembling a small size heat exchanger reaching power densities in the range of 40µW/cm2 when resting on a hotplate at 100 ºC, which are adequate for powering IoT nodes.
PT-07c MILLIWATT POWER SUPPLY BY DYNAMIC THERMOELECTRIC HARVESTING M.E. Kiziroglou1,2, S.W. Wright1, M. Shi1, D.E. Boyle1, Th. Becker3, J.W. Evans4, and E.M. Yeatman1 1Imperial College London, UK, 2ATEI Thessaloniki, GREECE, 3Natural Science and Technical Academy Isny, GERMANY, and 4University of California, Berkeley, USA
This paper will also be presented in Thursday’s PowerMEMS-in-Action Session TPMIA-02
In this work we will demonstrate a power supply that collects thermal energy from temperature fluctuations in time, to provide regulated power in the mW range. It employs the dynamic thermoelectric energy harvesting concept and comprises an insulated heat-storage unit, a thermoelectric generator, a bipolar power management circuit based on the LTC3109 commercial microchip and a 0.5 F super capacitor. It demonstrates harvesting and storing over 2.5 J per cycle, and regulated 2.2/3.3 V outputs.
PT-08c THIN-FILM π-TYPE MICRO TEG USING VACUUM/INSULATOR-HYBRID ISOLATION WITH CONVEX-SHAPE HOT-PLATE MODULE STRUCTURE FOR WEARABLE DEVICE APPLICATIONS Y. Shiotsu, T. Seino, N. Chiwaki, and S. Sugahara Tokyo Institute of Technology, JAPAN
Design optimization and performance of a micro thermoelectric generator (µTEG) using human body heat are investigated. A thin-film πtype µTEG module using vacuum/insulator-hybrid isolation with the convex- shape hot-plate is useful to achieve a high thermal resistance of the module and to suppress the heat flow passing through the supportive wall for the vacuum isolation. The optimum design of this module exhibits sufficiently high output power suitable for self-powered wearable devices.
47 d - ELECTRICAL ENERGY HARVESTING, MANAGEMENT, STORAGE AND TRANSFER Batteries, Super-Capacitors, and Chemical Energy Storage
PT-09d DEVELOPMENT OF A FLEXIBLE POLY(ETHER ETHER KETONE) SUPERCAPACITOR AS ELECTROLYTE AND SEPARATOR R. López Mayo1, A. Rico1, L.G. Arriaga1, M.P. Gurrola1,2, and J. Ledesma-García2 1Centro de Investigación y Desarrollo Tecnológico en Electroquímica, MEXICO and 2Universidad Autónoma de Quéretaro, MEXICO
We have developed a SPEEK supercapacitor, which is also utilized as solid-state electrolyte, binder, and ion-conducting surfactant with good stability and easy fabrication. Considering the easy processability of SPEEK, that can be deposited in various forms without further processing, the proposed process represents a new step towards the fabrication of advanced functional and smart materials for flexible and wearable electronic devices.
Power Electronics and Energy Management Circuits
PT-10d A HIGH-EFFICIENCY MANAGEMENT CIRCUIT FOR PIEZOELECTRIC ENERGY HARVESTER P. Li, Y.M. Wen, T. Han, and X.J. Ji Shanghai Jiao Tong University, CHINA
This paper proposes a maximum power point tracking circuit that can automatically match piezoelectric energy harvesters with different internal capacitances. The proposed double-resonance up-conversion matching circuit has a lower loss and higher resonant response. The matching circuit can automatically adjust the turn-on time of the up-conversion switch and the input impedance by tracking the input maximum power.
PT-11d A VOLTAGE-BOOST RECTIFIER CIRCUIT FOR ENERGY HARVESTING FROM ENVIRONMENTAL VIBRATIONS Y. Tohyama1, H. Honma1, N. Ishihara2, H. Sekiya3, H. Toshiyoshi1, and D. Yamane2,4 1University of Tokyo, JAPAN, 2Tokyo Institute of Technology, JAPAN, 3Tokyo City University, JAPAN, and 4Japan Science and Technology Agency (JST), JAPAN
We propose a VBR (voltage-boost rectifier) circuit based on the 0.18-µm Si CMOS technology, which is designed for vibrational energy harvesters utilizing environmental vibrations. The VBR employs a single-end Dickson type charge pomp topology, and the circuit would be realized as a monolithic chip. The evaluation results obtained by multi-physics simulations on a circuit simulator revealed that the proposed circuit was able to deliver boosted DC voltage at the input of sub-threshold AC voltage.
PT-12d DESIGN OF A MEMS RELAY BASED ON SOI FABRICATION TECHNOLOGY M. Schwarz1, F. Lambrecht1, A. Bauer1, and H. Seidel2 1Siemens AG, GERMANY and 2Saarland University, GERMANY
To use MEMS for high power switching applications the single MEMS relay units have to be arranged in a matrix. For consistent performance the sameness of the individual switches representing the array is crucial. We present the design, simulation and fabrication of a MEMS relay based on silicon-on-insulator (SOI) technology. The measurement results show high accordance with simulations hence confirming the predictability and thereby the homogeneity of SOI-based MEMS relays.
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PT-13d SECONDARY SIDE DE-TUNING TO ENABLE WIDE-RANGE INDUCTIVE POWER TRANSFER FOR A WRIST WORN SENSOR S. Burrow and L. Clare University of Bristol, UK
In this paper we consider IPT systems with a very wide range of coupling and address one of the core challenges of such systems, namely excessive voltage/power induction during periods of close coupling by implementing a circuit which is able to de-tune the secondary tuned circuit during periods of excess.
RF, Inductive and Acoustic Power Transfer
PT-14d SIMULATION AND MODELLING OF A SPATIALLY-EFFICIENT 3D WIRELESS POWER TRANSFER SYSTEM FOR MULTI-USER CHARGING H.-W. Wang1, N.X. Wang2, and J.H. Lang2 1Tsinghua University, CHINA and 2Massachusetts Institute of Technology, USA
This paper will also be presented in Thursday’s PowerMEMS-in-Action Session TPMIA-03
We develop an innovative method to achieve effective wireless power transfer to multi-user application in the 3-D space. A rotating magnetic field using two types of coil structures respectively is used to produce a nearly uniform power efficiency around the 3-D space.
f - GENERAL Energy Conversion Physics
PT-15f FEASIBILITY OF A V-SHAPED MAGNET ROTOR TO CONVERT VIBRATION INTO ROTATION D.J. Clarkson1, L. Kurmann2, G.N. Moubarak1, and Y. Jia1 1University of Chester, UK and 2University of Freiburg, GERMANY
Majority of the reported kinetic energy harvesting mechanisms involve translatory transduction mechanisms. A rotary design can offer greater electromagnetic efficiency. This research investigates the feasibility of implementing a V-shaped magnet rotor for the purpose of coupling base point excitation into rotation, which can then be coupled to a generator motor. The resultant device aims to enhance the overall power conversion efficiency and bandwidth of the captured vibration energy.
g - MATERIALS FOR ENERGY CONVERSION Fabrication Technology for Power/Energy Systems
PT-16g FACILE FABRICATION OF SILICON MICRO/NANOSTRUCTURES FOR MICROELECTRODES BY SILVER-ASSISTED ETCHING USING NANO-SPONGE AS A TEMPLATE Y. Chen, J. Ruan, J. Huang, L. Qian, and S. Jiang Southwest Jiaotong University, CHINA
This paper reports a facile and cost-effective method for the fabrication of silicon micro/nanostructures by silver-assisted etching using nano-sponge as a template. The silicon micro/nanostructures show uniform and erective morphology. The silicon micro/nanostructures show good electrochemical performances which can be attributed to the good stability and large effective surface area.
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PT-17g LASER-BONDING OF FEP/FEP INTERFACES FOR A FLEXIBLE MANUFACTURING PROCESS OF FERROELECTRETS D. Flachs, F. Emmerich, G.-L. Roth, R. Hellmann, and C. Thielemann University of Applied Sciences Aschaffenburg, GERMANY
This paper presents an optimized laser-bonding process for ferroelectrets based on thin fluorinated- ethylene-propylene (FEP) foils, using an ultra-short-pulse (USP) laser. Due to the minimized thermal stress in the material during bonding, achieved by pulse durations of few picoseconds, we created seams down to 40 µm. Using a galvanometer scanning system allowed for fast bonding speeds up to several centimeters per second, making the process also suitable for large structures and areas.
Materials for Energy Conversion and Storage
PT-18g ETHANOL TOLERANT CATALYST BASED IN PLATINUM AND SILVER IN GRAPHENE M.J. Estrada-Solís1, B. López-González1, M. Guerra-Balcázar2, and F.M. Cuevas-Muñiz1 1Centro de Investigación y Desarrollo Tecnológico en Electroquímica, MEXICO and 2Universidad Autónoma de Quéretaro, MEXICO
In this work, the use of the electrochemical deposit PtAg on the glassy carbon modified with graphene (AgPt/G) is proposed. The electrochemical test (RDE) showed a better performance to reduce oxygen for AgPt/G compared to a similar material obtained in vulcan carbon (PtAg/V). The reduction potential is around 0.82 V versus RHE in PtAg/G compared to 0.77 V versus RHE in PtAg/V. Th PtAg/G has a smaller particle size, this was attributable to the better distribution of active graphene sites.
PT-19g HIGHLY ORIENTED AND STRESS MODIFIED THICK ALN FILMS DEPOSITED ON LOW THERMAL EXPANSION ALLOY SUBSTRATES FOR FLEXIBLE ELECTRONICS IN HARSH ENVIRONMENT N. Moriwaki1,2, L.V. Minh1, and H. Kuwano1 1Tohoku University, JAPAN and 2Dai Nippon Printing Co., Ltd., JAPAN
Highly oriented and stress modified thick aluminium nitride (AlN) films were deposited by reactive AC magnetron sputtering on 4-inch substrates and foils made of the low thermal expansion alloy ''42Alloy'' for flexible electronics in harsh environment. A flat three micrometer thick AlN film was deposited successfully on the 50 µm thick 42Alloy foil, and its full width at half maximum of AlN(002) was 5.00 degree.
PT-20g PLD ELECTRODES IN A COUPLED MICROFLUIDIC FUEL CELL TO A LAB ON A CHIP SYSTEM FOR ENERGY GENERATION B. López-González1, J.C. Abrego-Martínez2, B.S. Hernández-Sarmiento3, A. Moreno-Zuria1,2, Y. Wang2, M. Mohamedi2, L.G. Arriaga1, and F.M. Cuevas-Muñiz1 1Centro de Investigación y Desarrollo Tecnológico en Electroquímica, MEXICO, 2Institut National de la Recherche Scientifique (INRS), CANADA, and 3Instituto Tecnológico de Oaxaca, MEXICO
An inorganic microfluidic fuel cell (i-µFFC) was integrated in a glucose sensor LOC device. This device was constructed by using a mini CNC and evaluated for energy harvesting from glucose. The i-µFFC with PLD electrodes exhibits the highest performance compared to the i-µFFC with spray electrodes microfluidic fuel cell for the three conditions, obtained the best performance in alkaline conditions (3.53 µW), which is enough energy to power low-consumption microelectronic chips or microsensors.
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h - MECHANICAL ENERGY HARVESTING AND ACTUATION Mechanical Energy-Harvesting - Electromagnetic
PT-21h A COMPACT ELECTROMAGNETIC VIBRATION ENERGY HARVESTER WITH HIGH OUTPUT VOLTAGE X. Wang, X. He, K. Li, and S. Jiang Chongqing University, CHINA
The performance of a non-resonant electromagnetic vibration energy harvester was improved by adding mild steel sheets to enlarge magnetic flux density. The wire diameter of coils, thicknesses of magnets and coils, and thickness of mild steel plates were optimized by simulations. For the fabricated prototype under 0.3 g at 8.3 Hz, the experimental RMS voltage across a 10.4 kω resistor was 15.53V, with the normalized power density of 304 µW cm-3, about 18.75% higher than the previous device.
PT-22h HEATING PERFORMANCE BY AN INSOLE ENERGY HARVESTER M.M. Rahman, S. Noh, K.H. Kim, and H. Kim University of Utah, USA
This paper reports the heating performance of the 4th generation shoe-insole-based hydraulic electromagnetic energy harvester (HEEH) in connection with a micromachined polysilicon heater & a commercial copper shoe insole heater. The HEEH was integrated with two heaters to produce temperature rises of 2 & 3.2℃ and the heating rates of 12 & 1.6℃/min, respectively, from polysilicon (0.15x0.1mm2, 6.05e-6s of thermal time constant) and copper heaters (78x28mm2, 8.31s of thermal time constant).
PT-23h INFLUENCES OF FE-GA ALLOY CRYSTALLINITY FOR THE APPLICATION TO A MAGNETOSTRICTIVE VIBRATION ENERGY HARVESTER M. Ito1, T. Minamitani2, and T. Ueno2 1Central Research Institute of Electric Power Industry, JAPAN and 2Kanazawa University, JAPAN
We have fabricated a magnetostrictive vibration energy harvester using a poly-crystalline Fe-Ga alloy omitting the high-cost single crystallization process and compared its performance with a device using a single crystal. It was estimated that the manufacturing cost of poly-crystal can be reduced to 1/6 of single crystal. The poly-crystal device could generate power of 1.1 mW, which is about 28% of a single crystal.
PT-24h PENDULUM BASE 3D PRINTED ELECTROMAGNETIC ENERGY HARVESTER K. Adamski and R. Walczak Wrocław University of Science and Technology, POLAND
In this paper we are present 3D printed energy harvester with pendulum for electric power generation from motion. Pendulum for spring tension is widely use in watches from centuries. Also, it is used for electromagnetic (EM) energy generation for watch powering. This kind of energy harvester is based on inertial move of pendulum and electromagnetic energy conversion. Pendulum microgenerators are patented and produced by at least 3 companies (i.e. Seiko, Eta, Kinetron) but their solutions are indirect, based on one inductor coil and microgear system. This approach is expensive (involved precision micromechanic processes) and harvested power is low (only for quartz clock powering). Here we propose direct power generation where the pendulum is integrated with magnets. Inductor coils are below pendulum in the generator housing. This kind of generator is simpler, easier to fabricate and power generated is higher.
PT-25h SYSTEMATIC COMPARISON OF BASIC STRUCTURES FOR ELECTROMAGNETIC ENERGY HARVESTERS USING AN AUTOMATED DESIGN METHODOLOGY B. Leistritz and W. Kattanek IMMS Institut für Mikroelektronik- und Mechatronik-Systeme Gemeinnützige GmbH, GERMANY
An automated design methodology for electromagnetic harvesters was developed and implemented, which allows a cost-effective design of adapted energy harvesters for application-specific requirements. In the current study the influence of different boundary conditions on the evaluation of basic structures is shown and sensitivity analyses are carried out. It can be shown that none of the structures always provides the highest output power. 51
Mechanical Energy-Harvesting - Electrostatic
PT-26h DEMONSTRATION OF AN ELECTRET GENERATOR USING SELF-ASSEMBLED ELECTRET FOR ENERGY HARVESTING WITHOUT ANY CHARGING PROCESS N. Matsuura1, H. Ishii1, and Y. Tanaka1,2 1Chiba University, JAPAN and 2Japan Science and Technology Agency (JST), JAPAN
Giant surface potential (GSP) of 46.5 V at 739 nm appears in TPBi vacuum evaporated film due to spontaneous orientation of the molecules. In this study, we found that the GSP of the film was relatively stable even in atmosphere under room light illumination. By taking advantage of this film, we demonstrated that electret generator for energy harvesting including TPBi, which does not need any charging process, operated well in living environment.
PT-27h INVESTIGATION OF PARALLELLY CONNECTED MEMS ELECTROSTATIC ENERGY HARVESTERS FOR ENHANCMENT IN POWER OUTPUT AND BANDWIDTH J. Li, X. Tong, J. Oxaal, Z. Liu, M. Hella, and D.-A. Borca-Tasciuc Rensselaer Polytechnic Institute, USA
We develop, model, and test an energy harvesting system with parallelly connected selected MEMS devices for enhanced power output and broadened bandwidth. A nonlinear numerical model is built and studied to find the proper operating conditions as well as the relationship between the devices' design parameters for constructive interaction. Testing results show that the system exhibits a 2x broadened operational region along with a 32.5% increase in maximum power compared to a single device.
PT-28h TEXTILE BASED FERROELECTRET FOR WEARABLE ENERGY HARVESTING J. Shi and S.P. Beeby University of Southampton, UK
This paper reports the fabrication and testing of a ferrolectret-textile which is made from two fluorinated ethylene propylene (FEP) films and a conventional textile (cotton, silk or poly-cotton) formed into a sandwich structure. The ferroelectret textile harvester is based on a rapidly assembled fabrication method.
Mechanical Energy-Harvesting - Piezoelectric
PT-29h A 120°C 20G-COMPLIANT VIBRATION ENERGY HARVESTER FOR AERONAUTIC ENVIRONMENTS P. Gasnier1, M. Boucaud2, M. Gallardo1, J. Willemin1, S. Boisseau1, A. Morel1, D. Gibus1, and M. Moreau3 1University Grenoble Alpes, CEA-Leti, FRANCE, 2ABYLSEN, FRANCE, and 3SAFRAN Power Units, FRANCE
Our paper reports the design, fabrication, and testing of a piezoelectric energy harvester operating at 90°C and withstanding 120°C and 20G of acceleration. This harvester, along with its dedicated power management circuit, have been designed to supply a 3-channel Acceleration Measurement System (AMS) for the structural health monitoring of an aircraft engine.
PT-30h AN UMBRELLA-SHAPED TOPOLOGY FOR BROADBAND MEMS PIEZOELECTRIC VIBRATION ENERGY HARVESTING Y. Jia1,2, S. Du1, and A.A. Seshia1 1University of Cambridge, UK and 2University of Chester, UK
Cantilever topologies offer high power responsiveness for MEMS vibration energy harvesting (VEH), but they are less robust than membrane topologies. This paper proposes an umbrella-shaped topology to address the problem of having to compromise between power density and robustness. An implemented AlN on Si device recorded a peak power of 173µW. The normalised power density compares favourably against the state-of-the-art cantilever piezoelectric MEMS VEH, while not sacrificing robustness.
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PT-31h INCREASED PIEZOELECTRIC COUPLING FORCE IN AUTOPARAMETRIC EXCITATION HARVESTER CONNECTING TO SELF-POWERED SERIES AND PARALLEL SYNCHRONIZED SWITCH HARVESTING ON INDUCTOR (SSHI) INTERFACES H. Asanuma, T. Komatsuzaki, and Y. Iwata Kanazawa University, JAPAN
We report the importance of the increase in the piezoelectric coupling force in a high output piezoelectric autoparametric excitation harvester connecting to the self-powered synchronized switch harvesting on inductor (SSHI) interface. The piezoelectric coupling force, which increases as the piezoelectric voltage enhanced by the SSHI technique increases, may suppress harvester's displacement and thus decrease output power and shift the optimal resistive load.
PT-32h MEMS MEANDER HARVESTER WITH TUNGSTEN PROOF-MASS E. Köhler1, P. Johannisson2, D. Kolev2, F. Ohlsson2, P. Ågren3, J. Liljeholm3, P. Enoksson1, and C. Rusu2 1Chalmers University of Technology, SWEDEN, 2RISE Acreo, SWEDEN, and 3Silex Microsystems, SWEDEN
This work investigates the use of a MEMS piezoelectric harvester as complementary energy source to the battery in a leadless pace maker (20 mm x 4 mm x 2 mm). This requires a harvester with low mass displacement. The fabricated harvester is a meander-type bridge harvester with a large 500 mg tungsten mass. To protect the fragile harvester the proof-mass was fixed with small support bridges that was later released with FIB. Measured power output with 50 µm deflection reached 0.13 nW at 60 Hz.
PT-33h OMNIDIRECTIONAL LOW FREQUENCY ENERGY HARVESTER FOR WEARABLE APPLICATIONS C. Ou, V. Pinrod, B. Davaji, and A. Lal Cornell University, USA
We present an omnidirectional energy harvester with lowest resonance mode at 14.85 Hz. The geometry is designed as a spiral shape to achieve a low resonance frequency while minimizing the area required. Multiple resonance modes widen bandwidth and enable harvesting energy from all directions. The device is fabricated by a rapid laser micromachining process on PZT. The energy harvester is mounted on a 3D printed package mimicking a typical smartwatch so that it can be worn on a human wrist.
PT-34h POLYMER-BASED PIEZOELECTRIC ENERGY HARVESTER FOR LOW-FREQUENCY VIBRATION USING FREQUENCY UP-CONVERSION DRIVEN BY COLLISION WITH A FLEXIBLE BEAM T. Tsukamoto1, Y. Umino1, K. Hashikura1, S. Shiomi1, K. Yamada1, and T. Suzuki1,2 1Gunma University, JAPAN and 2Japan Science and Technology Agency (JST), JAPAN
We developed a polymer-based piezoelectric vibration energy harvester (PVEH) using mechanical frequency up-conversion driven by collision with a flexible beam, targeting for low-frequency vibration (under 10 Hz). By driving the flexible beam with low-frequency, the beam periodically hits against the impact-driven piezoelectric component and excites the free oscillation, i.e. frequency up-conversion. The PVEH generates several tens of microwatts at the excitation frequency of under 10 Hz.
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PT-35h TEXTILE-BASED FREESTANDING TRIBOELECTRIC-LAYER NANOGENERATOR WITH ALTERNATE POSITIVE AND NEGATIVE GRATING STRUCTURE W. Paosangthong, R. Torah, and S. Beeby University of Southampton, UK
This paper will also be presented in Thursday’s PowerMEMS-in-Action Session TPMIA-04
We report a novel design of textile-based triboelectric nanogenerator (TENG) with alternate grated strips of positive and negative triboelectric material operating in freestanding triboelectric-layer mode. Whereas most grating-structured TENGs operate in this mode comprising gratings of one type of triboelectric material separated by air gaps, this design presents a replacement of the air gaps by a triboelectric material with the opposite polarity to the existing triboelectric material.
Motors/Generators, Pumps and Actuators
PT-36h MACROSCOPIC ACTUATION FOR DEPLOYABLE MICROVALVES: COUPLING MECHANICALLY WHILE ISOLATING THERMALLY C. Kelly, X. Xie, A. Dodge, and C. Livermore Northeastern University, USA
This paper presents the design and initial experimental validation of a system that couples macroscale actuations to a micro flow control system via a hydraulic coupler that isolates the actuator from the valve both spatially and thermally. Gas flow is successfully controlled via actuations that are delivered through the hydraulic coupler.
j - THERMAL AND CHEMICAL SCIENCE AND TECHNOLOGIES FOR POWER, PROPULSION, AND COOLING Fuel Cells, Reactors, and Combustors
PT-37j EXPERIMENTAL AND NUMERICAL INVESTIGATION OF MICRO CATALYTIC REACTOR FOR AUTOTHERMAL REFORMING USING METHANOL AND HYDROGEN PEROXIDE WITH BUILT-IN CHROME SILICIDE THERMOCOUPLE E.S. Jung Pusan National University, KOREA
This paper reports new concept of hydrogen generation method using hydrogen peroxide. Development, performance evaluation and numerical simulation of micro hydrogen generator by autothermal reforming process using hydrogen peroxide are carried out. To prove the micro reaction mechanism, chrome silicide thermocouple is built in the micro catalytic reactor by in-situ system. This paper is studied the temperature and pressure effects as parameters for hydrogen generation.
PT-38j USEFULNESS AND PERFORMANCE COMPARISON OF COMPLEX ENZYME-TYPE BIOFUEL CELL USING ELECTRODE MODIFIED WITH TWO DET-TYPE ENZYMES BY COVALENT BONDING H. Fujita, Y. Nishioka, and S. Imai Nihon University, JAPAN
In this paper, we report the usefulness of the EBFC in which two DET-type enzymes were used to modify to the anode by a chemical modification method and show its long-term stability. EBFCs do not require a separator. There are several reports on EBFCs, but none describe modifications of the anode with complex DET-type enzymes. By modifying to the anode with multiple enzymes, and thus, produce a battery that can handle various fuels.
54 k – Late News
PT-39k A PROOF-OF-CONCEPT 70 NA ECG PROCESSOR FOR REAL-TIME R-WAVE AND NN50 DETECTION H. Töreyin San Diego State University, USA
Unobtrusive health monitoring applications necessitate accurate, real-time, and energy-efficient computation of health-related parameters. Two important parameters for cardiovascular and cardiac autonomic health assessment are heart rate (HR) and heart rate variability (HRV). This study presents a proof-of-concept energy-efficient mixed-signal ASIC processor designed in a 0.5 µm CMOS technology; detecting R-waves of ECG signals and comparing successive R-R intervals to identify NN50 events, an HRV metric, in real-time.
PT-40k LOW-VOLTAGE-DRIVEN ELECTROSTATIC MICROSPEAKERS WITH POTASSIUM- ION-ELECTRETS C. Sano1, V. Menon1, H. Honma1, G. Hashiguchi2, and H. Toshiyoshi1 1University of Tokyo, JAPAN and 2Shizuoka University, JAPAN
Electrostatic microactuators require external DC biasing in order to achieve the widest possible range of displacements for a given AC input. This report proposes a novel microspeaker structure that utilizes a potassium-ion-electret to reduce the need for such DC voltage application. Electrets exhibiting quasi- permanent charges enable large fixed voltages to be integrated directly within the MEMS structure, acting as an ersatz DC bias. Prototype devices were fabricated and characterized to approximate the effects of electret incorporation on the device performance.
PT-41k THEORETICAL AND EXPERIMENTAL INVESTIGATION OF A MULTI-STABLE ENERGY HARVESTER FOR ROTATION MOTION X. Mei1, S. Zhou2, T. Kaizuka1, and K. Nakano1 1University of Tokyo, JAPAN and 2Northwestern Polytechnical University, CHINA
Recently, the development in low-power electrical systems has led to increasing requirements for self-power technology due to fixed storage capacity and low energy density of traditional batteries. Thus, energy harvesting from the rotation motion for the self-powered wireless sensors has attracted a lot of interests, and different kinds of nonlinear energy harvesters in rotation environments were proposed to achieve more effective broadband energy harvesting for low-level excitation. To enhance the energy harvesting efficiency, a lot of researches proposed broadband energy harvesting
l – Commercial Posters Table-Top Exhibitors
PT-42l LET NOVA WORK FOR YOU M. Lightfoot and A. Maclin Nova Electronic Materials, LLC, USA
Since 1989, NOVA has been a leading provider of wafers and processing services in the industry. We work as a one-stop shop for our customers, offering a variety of products such as Silicon, Glass, Epi, SOI, II-VI and III-V materials, as well as Sapphire, SiC and Quartz. A few of our services are thermal processing to satisfy MOS/MEMS and Graphene process requirements, such as Dry Chlorinated Thermal Oxide + Forming Gas Anneal, Dry Thermal Oxide and Wet Thermal Oxide. We also offer SOI wafers with etch cavities for Wafer Level Packaging (WLP), Biomedical, 2D/3D materials and other applications.
PT-43l RECENT ACHIEVEMENTS IN REACTIVE SPUTTERING OF PIEZOELECTRIC ALN AND SCALN FILMS V. Felmetsger OEM Group, LLC, USA
This presentation provides familiarization with sputter technologies developed by OEM Group for reactive magnetron sputtering of piezoelectric films based on AlN. It describes Endeavor PVD cluster tool and design and functionality of S-gun magnetron. We explain technical features of our sputter technique for ScAlN reactive sputtering. Stress, stress gradient, and stress range control in AlN and ScAlN is discussed too. 55
PT-44l AN INNOVATE SULFITE GOLD PLATING PROCESS A. Gallegos, T. Souza, T. Tyson, and L. Michaelson Technic, USA
Sulfite gold plating technology has not changed much in the last 20 years. Technic has revisited this tried and true plating chemistry to update it and improve it to meet the standards of today's technology. This newly developed sulfite gold process overcomes the standard weaknesses experienced with traditional sulfite gold plating bath. This innovative chemistry is production proven and has unique attributes not found in any other sulfite gold plating process.
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1 819 821-8000, ext. 65771— [email protected] www.3IT.ca 60
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POSTER & TABLE-TOP FLOOR PLAN
Nova Electronic Materials ...... T-1 OEM Group, LLC ...... T-2 Plasma-Therm, LLC ...... T-3 Rave N.P...... T-4 SUSS MicroTec, Inc...... T-5 Technic ...... T-6 ULVAC, Inc...... T-7
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