Visionary Sensor Technology Vacuum Measurement Experience and Passion

INFICON provides you with precise pressure mea- With over 150 years of vacuum experience, INFICON is surement instrumentation and quality fittings for any the worldwide leader in vacuum gauges. INFICON was vacuum system. Our ceramic capacitance diaphragm formed as an independent company with a new market gauges deliver higher accuracy, stability and longer presence and has world-class manufacturing, sales lifetime than conventional metal diaphragm products. and service facilities worldwide. The service spectrum includes development, production and sales of innova- INFICON invented vacuum combination gauge sensors tive products in the vacuum industry. and combine multiple technologies in a single unit to accurately measure a wide range of pressures with reduced complexity and cost.

1850/51 1890 1946 1967 1969 1976 1987 1993 1995 2000

INFICON

LEYBOLD COLOGNE

W.C. HERAEUS HANAU

GERÄTEBAU-ANSTALT BALZERS

ARTHUR PFEIFFER

WETZLAR

2 | VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT | 3 INFICON at a Glance MASS SPECTROMETRY VACUUM GAUGES VACUUM GAUGE CONTROLLERS

Products and Applications

INFICON offers vacuum measurement, components, Certificate

SQS herewith certifies that the company named below has a management system which meets the gas analysis, measurement and advanced process requirements of the standards specified below. control through residual gas analyzers (mass spectro- INFICON AG meters), helium leak detectors, multi-gas leak detec- Alte Landstrasse 6 9496 Balzers tors, thin film deposition controllers and monitors, RF Liechtenstein Emergency Response sensors, sensor integration and analysis software. Scope of certification INFICON refrigerant leak detectors are the recognized According to appendix ent S Display Environmental Health and Safety market leaders in air conditioning / refrigeration and gem ys aField of activity te n m automotive and manufacturing for assembly line quality a Vacuum technology, analytics and surface engineering s M control. For field service, INFICON offers hand-held Optics Military d by e Normative basis refrigerant leak detectors, refrigerant charging scales, i f

ISO 9001:2015i Quality Management System

ISO 14001:2015t Environmental Management System Semiconductor Alternative Energy and Petrochemical r

refrigerant recovery systems and other service tools. r

e e C

INFICON chemical identification systems are used by C Solar Public Utilities emergency response, military and security personnel Scope(s) 18 Validity 23. 11. 2018 – 22. 11. 2021 Reg. no. H13036 Issue 23. 11. 2018 Switzerland and environmental testing agencies worldwide.

X. Edelmann, President SQS F. Müller, CEO SQS

Swiss Association for Quality and Management Systems SQS Quality Standards Bernstrasse 103, 3052 Zollikofen, Switzerland Swiss Made sqs.ch

For INFICON, quality is not limited to the Semi and Vacuum Coating Security and Energy products only. Our primary goal is the fulfilment of customer needs and customer expectations as copy exactly and General Vacuum Refrigeration, Air Conditioning and Automotive change control (CE / CC). Total Quality Management is an integral part of the thinking and performance of every INFICON employee and our sup- CERTIFICATE pliers. INFICON is ISO9001 and ISO14001 certified. SQS and IQNet Partner hereby states that the organization Research and Development Refrigeration These certifications allow us to consistently manufac- INFICON AG Alte Landstrasse 6 9496 Balzers ture high-quality products, while closely monitoring our Liechtenstein

has implemented and maintains a Vacuum Furnace, Metallurgy, Analytic Air Conditioning environmental impacts and the natural resources we Management System for the following scope(s): use in our processes. Since fall 2008, our products are According to appendix SQS registration number H13036 ROHS / WEEE compliant! which fulfills the requirements of the following standard(s): Industrial vacuum Automotive ISO 9001:2015 Quality Management System ISO 14001:2015 Environmental Management System

Issued on: 2018-11-23 Expires on: 2021-11-22 Packaging Service Tools

This attestation is directly linked to the IQNet Partner’s original certificate and shall not be used as a stand-alone document Registration Number: CH - H13036

Alex Stoichitoiu Felix Müller President of IQNet CEO SQS

IQNet Partners*: AENOR Spain AFNOR Certification France APCER Portugal CCC Cyprus CISQ Italy CQC China CQM China CQS Czech Republic Cro Cert Croatia DQS Holding GmbH Germany FCAV Brazil FONDONORMA Venezuela ICONTEC Colombia Inspecta Sertifiointi Oy Finland INTECO Costa Rica IRAM Argentina JQA Japan KFQ Korea MIRTEC Greece MSZT Hungary Nemko AS Norway NSAI Ireland NYCE-SIGE México PCBC Poland Quality Austria Austria RR Russia SII Israel SIQ Slovenia SIRIM QAS International Malaysia SQS Switzerland SRAC Romania TEST St Petersburg Russia TSE Turkey YUQS Serbia IQNet is represented in the USA by: AFNOR Certification, CISQ, DQS Holding GmbH and NSAI Inc.

* The list of IQNet partners is valid at the time of issue of this certificate. Updated information is available under www.iqnet-certification.com

FITTINGS AND FEEDTHROUGHS LEAK DETECTORS THIN FILM CONTROLLERS

4 | VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT | 5 Experts in Precise Vacuum Measurement

Capacitive Diaphragm Gauges (CDG) measure PorterTM via the temperature compensated SKY interface options, including the EtherCAT fieldbus vacuum pressures gas type independent with the CDG025D, to the process gauges SKY®, EdgeTM and interface make the integration easy. INFICON unique ceramic cell. CDGs offer the best StripeTM. For calibration purposes, the Cube CDGSci INFICON also offers pressure switches for process corrosion resistance with unmatched scale stability is the best choice. control and interlock functions. Nevertheless, INFICON over many years. INFICON CDGs are available with all common vacuum also supports innovation by developing customized To cover the individual application needs, INFICON flange connections used in the industry and can be sensor solutions such as the Spot series and custom CDGs range from the cost effective, small sized customized to others. A variety of different electrical engineered solutions.

Capacitance Diaphragm Gauges

Cold Capacitance Hot Ion Cathode Pirani Diaphragm

™ ® Porter CDG020D Ultra High High Medium Low Ultra High High Medium Low Edge CDG045D2 Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Temperature Compensated CDG100D2 10-11 10-7 10-3 1 1000 10-11 10-7 10-3 1 1000 Capacitance Diaphragm Gauge Temperature Controlled Compact Accurate and gas type independent Capacitance Diaphragm Gauge Compact, smallest size in its class Compact, saves valuable tool space • Sterilization Long lifetime due to double sensor protection • Vacuum coating Corrosion resistant pure ceramic sensor • Vacuum monitoring • Semiconductor and other harsh processes • Chemical and corrosive applications • Sterilization 10-11 mbar – 1000 mbar (ATM) 10-11 mbar – 1000 mbar (ATM)

® ® SKY CDG025D Ultra High High Medium Low Ultra High High Medium Low Stripe CDG100Dhs Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum CDG025D-X3 Temperature Controlled High Speed 10-11 10-7 10-3 1 1000 10-11 10-7 10-3 1 1000 Capacitance Diaphragm Gauge Temperature Compensated Capacitance Diaphragm Gauge Faster than 1 ms response time Flexible integration with EtherCAT with fieldbus Very accurate and gas type independent Corrosion resistant pure ceramic sensor Excellent long-term and temperature stability Corrosion resistant pure ceramic sensor • Atomic layer deposition • High speed process control • Semiconductor and other plasma processes • PVD, CVD, Etch • Industrial vacuum applications • Accurate pressure measurement 10-11 mbar – 1000 mbar (ATM) 10-11 mbar – 1000 mbar (ATM)

® ® SKY CDG045D Ultra High High Medium Low Ultra High High Medium Low Cube CDGSci Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum CDG200D Temperature Controlled Reference 10-11 10-7 10-3 1 1000 10-11 10-7 10-3 1 1000 Capacitance Diaphragm Gauge Temperature Controlled Capacitance Diaphragm Gauge True high precision vacuum measurement Full stable output – Proven by PTB Very accurate and gas type independent Flexible communication – Various modern interfaces Long lifetime due to double sensor protection Corrosion resistant pure ceramic sensor • Transfer standard • Main reference gauge • Semiconductor and other harsh processes • Research • Chemical and corrosive vacuum applications • Quality and reference pressure monitoring 10-11 mbar – 1000 mbar (ATM) 10-11 mbar – 1000 mbar (ATM)

6 | VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT | 7 Experts in Precise Vacuum Measurement

Application Specific CDG Solutions

Cold Capacitance Hot Ion Cathode Pirani Diaphragm

® Spot CDS500D Ultra High High Medium Low Ultra High High Medium Low Remote CDG Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Temperature Compensated OEM Custom Engineered 10-11 10-7 10-3 1 1000 10-11 10-7 10-3 1 1000 Capacitance Diaphragm Sensor Standard heated CDG products are not Excellent repeatability and long-term stability matching your design requirements? Fast response time Remote heated CDG could be the perfect Corrosion resistant pure ceramic sensor solution. • For integration into vacuum instrumentation and • Smaller footpring systems • Applicable in hot environments • Field proven repeatability and accuracy

10-11 mbar – 1000 mbar (ATM) 10-11 mbar – 1000 mbar (ATM)

VSA / VSD200 Ultra High High Medium Low Ultra High High Medium Low UHP Porter Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Absolute / Differential You need a Ultra High Purity compatible CDG? 10-11 10-7 10-3 1 1000 10-11 10-7 10-3 1 1000 Vacuum Switch INFICON’s xParts coating lifts the product performance to UHP level matched with clean Corrosion resistant fully stainless steel sensor room double packaging. High accuracy Excellent long-term stability • Lower particle contamination • Chemical resistant • Atmospheric pressure detection • Lower metal contamination • Pressure interlocks • Industrial vacuum applications

10-11 mbar – 1000 mbar (ATM) 10-11 mbar – 1000 mbar (ATM)

VGD500 AllCeramic Option Vacuum Gauge Display The metal free process CDG Compact small size Only ceramic surfaces (aluminum oxide) are Four digit display for easy read out wetted to process media. This option is available for all CDG products (SKY, Edge, Stripe) • Higher corrosion resistance • Lower metal contamination • Lower particle contamination • Longer lifetime, less maintenance

8 | VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT | 9 Experts in Wide Range Vacuum Measurement

INFICON wide range vacuum gauges offer superior ac- gas type independent measurement in the low vacuum curacy and reliability in compact designs. Four physical range, whereas the ultra and high vacuum ranges are measurement technologies cover the whole range of covered by the hot or cold ionization technologies. vacuum from ultra-high vacuum up to atmosphere. Each measurement technology is available as a stand- The INFICON Pirani technology enables cost effective alone sensor or combined with complementary mea- measurement in the low vacuum range and up to surement technologies to enable optimum price to atmospheric pressure. The INFICON miniature capa- performance ratio over the complete vacuum range. citance diaphragm technology enables precise and

Thermal Conductivity Gauges

Cold Capacitance Hot Ion Cathode Pirani Diaphragm

PSG500 Ultra High High Medium Low Ultra High High Medium Low PGE500 Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Pirani Standard Gauge 10-11 10-7 10-3 1 1000 10-11 10-7 10-3 1 1000 Pirani Gauge Enhanced

Single sensor technology Gold plated tungsten filament Stainless steel measurement cell All-in-one active gauge with analog ouput and Space saving rugged design integrated RS485 and OLED display Corrosion resistant version • Fore vacuum pressure measurement • Fore vacuum pressure measurement • General vacuum measurement and control • Interlocks in vacuum systems from low to high vacuum range • General vacuum measurement and control 10-11 mbar – 1000 mbar (ATM) 10-11 mbar – 1000 mbar (ATM) from low to high vacuum

PSG55x Ultra High High Medium Low Ultra High High Medium Low PGE300 Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Pirani Standard Gauge 10-11 10-7 10-3 1 1000 10-11 10-7 10-3 1 1000 Pirani Gauge Enhanced

Single sensor technology Gold plated tungsten filament Tungsten, nickel or fully ceramic coated sensor All-in-one active gauge with integrated LED display Factory pre-set possibility • Fore vacuum pressure measurement • Interlocks in vacuum systems • Fore vacuum pressure measurement • General vacuum measurement and control • General vacuum measurement and control from from low to high vacuum low to high vacuum range

10-11 mbar – 1000 mbar (ATM) 10-11 mbar – 1000 mbar (ATM)

PCG55x Ultra High High Medium Low Ultra High High Medium Low PGE050 Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Pirani Capacitance Diaphragm Gauge 10-11 10-7 10-3 1 1000 10-11 10-7 10-3 1 1000 Pirani Gauge Enhanced – PASSIVE

Dual sensor technology Gold plated tungsten filament Tungsten, nickel or fully ceramic coated sensor Ideal gauge sensor for upgrading your installed High accuracy and gas type independence above 10mbar thermocouple gauges • Load lock control • Fore vacuum pressure measurement • Fore vacuum pressure measurement • General vacuum measurement and control • Interlocks in vacuum systems from low to high vacuum range

10-11 mbar – 1000 mbar (ATM) 10-11 mbar – 1000 mbar (ATM)

10 | VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT | 11 Experts in Wide Range Vacuum Measurement

Ultra High High Medium Low BAG302 Vacuum Vacuum Vacuum Vacuum Bayard-Alpert Hot Ion Gauge 10-11 10-7 10-3 1 1000 Two standard long-life yttrium oxide coated iridium filaments Brigth digital OLED display with keypad Easy to exchange sensing element • Semiconductor process and transfer chambers • Industrial coating • General vacuum measuurement and Ionization Gauges (Hot and Cold) control in low to ultra high vacuum range 10-11 mbar – 1000 mbar (ATM)

Cold Capacitance Hot Ion Cathode Pirani Diaphragm

BPG400 / BPG402 / BAG402 Ultra High High Medium Low Ultra High High Medium Low Gemini MAG500 / MPG500 Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Bayard Alpert Gauge Cold Cathode Gauge 10-11 10-7 10-3 1 1000 10-11 10-7 10-3 1 1000 Bayard Alpert and Pirani Gauge Cold Cathode and Pirani Gauge Single sensor technology (BAG402) Long lifetime in harsh environments Dual sensor technology (BPG400/BPG402) Excellent ignition properties Long lifetime No stray magnetic field Automatic emission control Exchangeable ionization chambers • Semiconductor process and transfer chambers • Analytical and R&D applications • Industrial coating • General vacuum measurement • Measurement and control from atmosphere • Base pressure monitoring and control, to ultra-high vacuum (BPG400 / BPG402) 10-11 mbar – 1000 mbar (ATM) 10-11 mbar – 1000 mbar (ATM) from atmosphere to ultra-high vacuum

HPG400 Ultra High High Medium Low Ultra High High Medium Low BAG05x Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum High Pressure Ionization Pirani Gauge Bayard-Alpert Hot Ion Gauge – PASSIVE 10-11 10-7 10-3 1 1000 10-11 10-7 10-3 1 1000 Dual sensor technology Drop in for most nude hot ion gauge heads Long lifetime Can be degassed using electron bombardment Automatic emission control Wide range of emission currents • Sputter applications • Analytical and R&D applications • Semiconductor process and transfer chambers • General vacuum measurement • Industrial coating

10-11 mbar – 1000 mbar (ATM) 10-11 mbar – 1000 mbar (ATM)

® TripleGauge BCG450 Ultra High High Medium Low Ultra High High Medium Low MAG050 / MAG060 Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Vacuum Bayard-Alpert Pirani Capacitance Cold Cathode Gauge – PASSIVE 10-11 10-7 10-3 1 1000 10-11 10-7 10-3 1 1000 Diaphragm Gauge Bakeable up to 250°C Triple sensor technology Corrosion resistant with ceramic feedthrough Gas type independence above 10mbar Good ignition properties Long lifetime • Analytical and R&D applications • Semiconductor process and transfer chambers • General vacuum measurement • Industrial coating • Base pressure monitoring and control, • Measurement and control from from atmosphere to high vacuum atmosphere to ultra high vacuum 10-11 mbar – 1000 mbar (ATM) 10-11 mbar – 1000 mbar (ATM)

12 | VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT | 13 Experts in Vacuum Control and Components

Gauge Controller Components

VGC501 / 502 / 503 PGD500 Fittings Heated Components Active Gauge Controller for all Active Sensors Active Pirani Gauge Display for PSG, PCG, MPG High- and Ultra-High Vacuum Heated Exhaust Lines and Assemblies including CDG Components, Feedthroughs and Viewports Large display Fully vulcanized surface heater for low power consumption Automatic gauge identification Compact design for use on benchtop or rack mount High quality fittings according to international standards, Customized design with molded hard shell covers High signal resolution Low cost of ownership pressure visualization device Stocked worldwide for immediate delivery Cool to the touch on the outside Up to six free adjustable setpoints Wide variety of mechanical and electrical feedthroughs • Filling stations in the automotive and RAC industry • Exhaust line applications • Remote gauge control applications • Pressure control in light bulb production lines • All vacuum processes from low to ultra high vacuum • Condensation exposed vacuum processes • Process pressure control • General vacuum process and test lab monitoring • High current feedthrough applications • All vacuum systems • Production site and test lab monitoring • Visual inspection of vacuum systems through viewports

VGC031 VGC083 xParts Passive Gauge Controller for PGE050 Passive Gauge Controller for BAG05x, MAG05x and PGE050 ALD Coating Service Four user selectable analog output signals Simple operation with special OLED display Highly uniform, out of line of sight, thin film ALD coatings for Displays and controls wide measurement range from Remote digital I/O sensor and emission on/off complex 3D structures 1.3 x 10-4 to 1333 mbar Three definable setpoints per channel with adjustable Bright digital OLED display hysteresis • Longer lifetime - less corrosion with dense, pin hole free layer • Fore vacuum pressure measurement • Higher process yield - less particles, metal-free surface • General vacuum measurement and control from low to high • Faster pump down without out-baking vacuum range • Filling stations in the automotive and RAC industry

14 | VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT | 15 Maximizing Productivity and Yield

Leak Detectors Chemical identification and Monitoring Systems

INFICON refrigerant, hydrogen and helium leak de- Gas chromatography / mass spectrometry (GC / MS) tectors are the worldwide leading brand for quality sets the benchmark for the most accurate identification control at refrigeration, air conditioner, food packaging, of organic chemicals of any analytical technique. appliance and automotive manufacturing facilities and INFICON technology is being used throughout the their supply chains, as well as in the semiconductor/ world for emergency response, chemical warfare agent coating markets. As product quality, safety and envi- detection, early detection of chemical contamination in ronmental concerns lead to more stringent leak testing water source and distribution systems, hazardous waste requirements, INFICON helps you respond by provi- site investigation and industrial hygiene. HAPSITE ER ding a complete line of highly sensitive leak detectors Chemical Identification Systems give you immediate, in a variety of configurations for sub-assembly and laboratory quality results in the field, and gives you the mid-production quality testing, as well as final testing to answers you need to make better and faster decisions UL3000 Fab Helium Leak Detector ensure system integrity. Field service professionals in about critical health and safety issues. HAPSITE® ER Chemical Identification System air conditioning/refrigeration and automotive rely on the superior performance of our reliable, convenient and affordable service tools. The INFICON toolbox of market-leading products for service technicians includes innovative refrigerant leak detectors, combustible gas leak detectors, ultrasonic leak detectors, refrigerant recovery systems, refrigerant charging scales and vacuum pressure gauges. With INFICON service tools, you are assured of having the right tool to get the job done quickly and accurately, saving you time and money. Sensistor Sentrac® Hydrogen Leak Detector

Gas Analysis Systems Thin Film Controllers, Monitors, and Crystals

INFICON instruments are used in renewable energy Control your profit and maximize your competitive research and production, hydrocarbon processing, edge with market-leading products for thin film depo- refining and chemical productions. From research and sition, proven expertise, and worldwide support from development to production, we are investing in gas the technology leader in measurement and control. analysis technologies to help enable you to operate INFICON controllers, monitors, quartz crystal sensors, more efficiently. INFICON offers compact, transporta- and quartz crystals are designed and manufactured ble, easy-to-use instruments, like our Micro GC Fusion to provide the best quality, accuracy, and the longest IC6 Thin Film Deposition Controller Gas Analyzer to make measurements in the lab, at the crystal life in thickness monitoring and process control pilot plant or in the field close to the sample point. The for PVD applications. accurate analysis provides better understanding of Micro GC Fusion® Gas Analyzer raw materials, process control of intermediates or the quality of final products.

Transpector® MPH

16 | VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT | 17 Visionary Sensor Technology Excellent Customer Support is a Commitment

INFICON provides a global network of sales and service centers. These centers are staffed with local service and application experts who can assist you in choosing the best solution for your individual product application and provide fast support if service is needed.

Korea

INFICON Ltd. Gyoenggi-do Phone : +82 31 783 2942 Asia and Pacifica E-mail : [email protected]

China Singapore and Australia

INFICON Ltd. INFICON PTE Ltd. Beijing Singapore Phone : +86 10 6590 0164 Phone : +65 6631 0300 Europe, Middle East E-mail : [email protected] E-mail : [email protected] Americas and Africa Japan Taiwan

INFICON Inc. INFICON GmbH INFICON Co. Ltd. INFICON Co. Ltd. East Syracuse, NY Cologne Kawasaki-shi, Kanagawa-ken Chupei City Phone : +1 315 434 1100 Phone : +49 221 567 881 00 Phone : +81 44 822 1111 Phone : +886 3 552 5828 E-mail : [email protected] E-mail : [email protected] E-mail : [email protected] E-mail : [email protected]

www.inficon.com [email protected] twitter.com/inficon

20 | VISIONARY SENSOR TECHNOLOGY VACUUM MEASUREMENT