Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050 ()

SECTION 1: Identification

Product identifier Material Name PHOSPHINE, ADSORBED Synonyms HYDROGEN PHOSPHIDE; PHOSPHORUS TRIHYDRIDE Chemical Family hydrides Product Description This gas may be packaged in an SDS®, SAGE® or PDS ® gas source package. This cylinder contains an adsorbent material that allows gas contents to be at sub-atmospheric pressures. There is no possibility of contact or exposure to the adsorbent. This MSDS addresses only the hazards of the gas. Product Use semi-conductor fabrication, general synthetic chemical Restrictions on Use None known. Details of the supplier of the safety data sheet Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA

Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America)

Supplier Entegris Singapore Pte. Ltd. 30A Kallang Place, #13-01 Singapore 339213

Telephone: +65-6745-2422 Fax: +65-6745-4477

Emergency # 800-101-2201 (CHEMTREC Toll Free in country) +(65)-31581349 (CHEMTREC local in country) 1-703-527-3887 (CHEMTREC International) E-mail: [email protected]

SECTION 2: Hazards identification

Singapore Standard SS 586-2:2014 Flammable Gases - Category 1 Acute Toxicity - Oral - Category 3 Acute Toxicity - Inhalation - Gas - Category 1

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Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050 (SINGAPORE)

Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 1 ( cardiovascular system , digestive system , liver , nervous system , respiratory system ) Specific Target Organ Toxicity - Repeated Exposure - Category 1 ( nervous system , respiratory system ) Hazardous to the Aquatic Environment - Acute - Category 1 Label elements Hazard symbols

Signal word Danger Hazard statements H220 Extremely flammable gas. H330 Fatal if inhaled. H301 Toxic if swallowed. H314 Causes severe skin burns and eye damage. H370 Causes damage to organs. （cardiovascular system , digestive tract , liver , nervous system , respiratory system ） H372 Causes damage to organs through prolonged or repeated exposure. （nervous system , respiratory system ） H400 Very toxic to aquatic life. Precautionary statements Prevention P210 Keep away from heat/sparks/open flame/hot surfaces - No smoking. P260 Do not breathe gas. P271 Use only outdoors or in a well-ventilated area. P284 Wear respiratory protection. P264 Wash hands thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P270 Do not eat, drink or smoke when using this product. P273 Avoid release to the environment. Response P377 Leaking gas fire: Do not extinguish, unless leak can be stopped safely. P381 Eliminate all ignition sources if safe to do so. P310 Immediately call a POISON CENTER or doctor/physician. P308+P311 If exposed or concerned: Call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P320 Specific treatment is urgent (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if

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Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050 (SINGAPORE)

present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. P391 Collect spillage. Storage P403 Store in a well-ventilated place. P233 Keep container tightly closed. P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Other Hazards Which Do Not Result in Classification None known.

SECTION 3: Composition / information on ingredients

CAS Component Name Percent

7803-51-2 PHOSPHINE 100 Impurities and stabilizing additives contributing to the GHS Classification None

SECTION 4: First aid measures

Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin contact Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing and shoes before reuse. Destroy contaminated shoes. If frostbite or freezing occur, immediately flush with plenty of lukewarm water (105-115°F; 41-46°C). DO NOT USE HOT WATER. If warm water is not available, gently wrap affected parts in blankets. Get immediate medical attention. Eye contact Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion If swallowed, do NOT induce vomiting. Rinse mouth. Get immediate medical attention. Most Important Symptoms/Effects Acute Fatal if inhaled, Toxic if swallowed, respiratory tract burns, skin burns, eye burns, mucous membrane burns, cardiovascular system damage, digestive tract damage, liver damage, nervous system damage, respiratory system damage Delayed nervous system damage, respiratory system damage Indication of any immediate medical attention and special treatment needed Treat symptomatically and supportively. Note to Physicians For inhalation, consider oxygen. Avoid gastric lavage or emesis. ______Page 3 of 11 Issue date: 2021-06-07 Revision 5.0 Print date: 2021-06-18

Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050 (SINGAPORE)

SECTION 5: Firefighting measures

Suitable extinguishing media regular dry chemical, carbon dioxide, water spray, alcohol-resistant foam. Let burn unless leak can be stopped immediately. Large fires: water spray or fog, alcohol-resistant foam Unsuitable Extinguishing Media Do not use halogenated extinguishing agents. Special Hazards Arising from the Chemical Severe fire hazard. May ignite on exposure to air. Vapor/air mixtures are explosive. Containers may rupture or explode if exposed to heat. Hazardous combustion products oxides of phosphorus Fire Fighting Measures Move container from fire area if it can be done without risk. Cool containers with water spray until well after the fire is out. Stay away from the ends of tanks. For fires in cargo or storage area: Cool containers with water from unmanned hose holder or monitor nozzles until well after fire is out. If this is impossible then take the following precautions: Keep unnecessary people away, isolate hazard area and deny entry. Let the fire burn. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. For tank, rail car or tank truck: Evacuation radius: 1600 meters (1 mile). Do not attempt to extinguish fire unless flow of material can be stopped first. Flood with fine water spray. Cool containers with water. Apply water from a protected location or from a safe distance. Avoid inhalation of material or combustion by-products. Stay upwind and keep out of low areas. Special Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure.

SECTION 6: Accidental release measures

Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. Environmental precautions Avoid release to the environment. Collect spillage. Methods and Materials for Containment and Cleaning Up Remove sources of ignition. Ventilate closed spaces before entering. Avoid heat, flames, sparks and other sources of ignition. Stop leak if possible without personal risk. Reduce vapors with water spray. Keep unnecessary people away, isolate hazard area and deny entry.

SECTION 7: Handling and storage

Precautions for safe handling Keep away from heat, sparks, open flame, and hot surfaces - No smoking. Do not breathe gas. Use only outdoors or in a well-ventilated area. Wear respiratory protection. Wash hands thoroughly after handling. Wear protective gloves/clothing and eye/face protection. Do not eat, drink, or smoke when using this product. Conditions for safe storage, including any incompatibilities Store in a well-ventilated place. Keep container tightly closed. Store locked up.

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Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050 (SINGAPORE)

Store and handle in accordance with all current regulations and standards. Protect from sunlight. May ignite on exposure to air. Store in a cool, dry place. Avoid contact with water or moisture. Avoid heat, flames, sparks and other sources of ignition. Protect from physical damage. Keep separated from incompatible substances. Incompatible Materials acids, halocarbons, halogens, metals, oxidizing materials, oxygen

SECTION 8: Exposure controls/personal protection

Exposure Guidelines Component Exposure Limits PHOSPHINE 7803-51-2

Singapore: 0.3 ppm PEL ; 0.42 mg/m3 PEL

1 ppm STEL ; 1.4 mg/m3 STEL

11 mg/m3

ACGIH: 0.05 ppm TWA

0.15 ppm Ceiling Biological limit value There are no biological limit values for any of this product's components. IDLH 50 ppm Engineering controls Ventilation equipment should be explosion-resistant if explosive concentrations of material are present. Provide local exhaust or process enclosure ventilation system. Ensure compliance with applicable exposure limits. PERSONAL PROTECTIVE EQUIPMENT Eye/face protection Wear splash resistant safety goggles with a faceshield. Contact lenses should not be worn. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Protective Clothing Wear appropriate protective, cold insulating clothing. Glove Recommendations Wear insulated gloves. Protective Materials Responder®, Tychem® BR/LV, Tychem® TK Respiratory Protection The following respirators and maximum use concentrations are drawn from NIOSH and/or OSHA. 3 ppm. Any supplied-air respirator. 7.5 ppm. Any supplied-air respirator operated in a continuous-flow mode. 15 ppm. Any air-purifying full-facepiece respirator (gas mask) with a chin-style, front-mounted or back- mounted canister providing protection against the compound of concern. Any self-contained breathing apparatus with a full facepiece. Any supplied-air respirator with a full facepiece. 50 ppm. Any supplied-air respirator operated in a pressure-demand or other positive-pressure mode. Emergency or planned entry into unknown concentrations or IDLH conditions -. Any self-contained breathing apparatus that has a full

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Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050 (SINGAPORE)

facepiece and is operated in a pressure-demand or other positive-pressure mode. Any supplied-air respirator with a full facepiece that is operated in a pressure-demand or other positive-pressure mode in combination with an auxiliary self-contained breathing apparatus operated in pressure-demand or other positive-pressure mode. Escape -. Any air-purifying full-facepiece respirator (gas mask) with a chin-style, front-mounted or back-mounted canister providing protection against the compound of concern. Any appropriate escape-type, self-contained breathing apparatus. Any supplied-air respirator with a full facepiece that is operated in a pressure-demand or other positive-pressure mode in combination with an auxiliary self-contained breathing apparatus operated in pressure-demand or other positive-pressure mode. Any self-contained breathing apparatus that has a full facepiece and is operated in a pressure-demand or other positive-pressure mode.

SECTION 9: Physical and chemical properties

Appearance colorless gas Physical State gas Odor fishy odor Color colorless (Neutral in Odor Threshold 0.03 - 3 ppm pH solution ) Melting Point -134 °C Boiling Point -87.7 °C Boiling Point Range Not available Freezing point -134 °C Evaporation Rate Not available Flammability (solid, gas) Flammable gas Autoignition (Not applicable 37.8 °C Flash Point Temperature ) Lower Explosive Decomposition 1 % 375 - 593 °C Limit temperature Upper Explosive 98 % (by volume 607 psia @ 20 Vapor Pressure Limit Estimated ) °C Vapor Density 1.2 Specific Gravity (water=1) Not available (air=1) Partition coefficient: n- Water Solubility (Slightly soluble ) Not available octanol/water Viscosity Not available Kinematic viscosity Not available

Solubility (Other) Not available Density 0.09 lbs/ft3 Physical Form gas Molecular Formula P-H3 Molecular Weight 34 triple point -133.8 °C Solvent Solubility Soluble alcohol, ether, cuprous chloride solutions, cyclohexanol

SECTION 10: Stability and reactivity

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Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050 (SINGAPORE)

Reactivity May ignite on exposure to air. Chemical stability May ignite on exposure to air. Possibility of hazardous reactions Will not polymerize. Conditions to avoid Avoid heat, flames, sparks and other sources of ignition. Minimize contact with material. Containers may rupture or explode if exposed to heat. Materials to Avoid (Incompatibilities) acids, halocarbons, halogens, metals, oxidizing materials, oxygen Hazardous decomposition products Thermal decomposition products oxides of phosphorus

SECTION 11: Toxicological information

Information on Likely Routes of Exposure Inhalation: Fatal if inhaled, burns, cardiovascular system damage, liver damage, nervous system damage, respiratory system damage Skin contact skin burns Eye contact eye burns Ingestion Toxic if swallowed, burns, digestive tract damage Component Analysis - LD50/LC50 The components of this material have been reviewed in various sources and the following selected endpoints are published: PHOSPHINE (7803-51-2) Oral LD50 Rat 77.8 mg/kg Inhalation LC50 Rat 49 - 66 ppm 4 h Acute Toxicity Estimate Inhalation - Gas 11 ppm

Oral 77.8 mg/kg (QSAR model prediction) Immediate Effects Fatal if inhaled, Toxic if swallowed, respiratory tract burns, skin burns, eye burns, mucous membrane burns, cardiovascular system damage, digestive tract damage, liver damage, nervous system damage, respiratory system damage Delayed Effects nervous system damage, respiratory system damage Irritation/Corrosivity Data respiratory tract burns, skin burns, eye burns, mucous membrane burns Respiratory Sensitization No data available. Dermal Sensitization

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Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050 (SINGAPORE)

No data available. Carcinogenicity Component Carcinogenicity PHOSPHINE 7803-51-2

ACGIH: A4 - Not Classifiable as a Human Carcinogen Mutagenic Data Both positive and negative results have been reported in human and animal tests, however, generally considered not to be mutagenic. Reproductive Effects Data No reproductive effects were seen in two inhalation studies using rats. Tumorigenic Data No data available. Specific Target Organ Toxicity - Single Exposure respiratory system, cardiovascular system, digestive system, liver, nervous system Specific Target Organ Toxicity - Repeated Exposure nervous system, respiratory system Aspiration hazard Not applicable. Medical Conditions Aggravated by Exposure None known. Additional Data Phosphine exists as a gas under standard conditions, so testing through the skin is limited. Therefore, acute dermal toxicity testing is scientifically impossible.

SECTION 12: Ecological information

Ecotoxicity Very toxic to aquatic life. Component Analysis - Aquatic Toxicity No LOLI ecotoxicity data are available for this product's components. Abiotic degradation This product is inert, but will oxidize under influence of radiation and UV light. Persistence No data available. Bioaccumulative potential No data available. Mobility May bind to sub-surface soil. Other adverse effects Is expected to volatilize rapidly from water and both moist and dry soil.

SECTION 13: Disposal considerations

Disposal Methods Dispose in accordance with all applicable regulations. Component waste information There is no applicable waste information for this product's components.

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Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050 (SINGAPORE)

Contaminated packaging disposal Dispose in accordance with all applicable regulations.

SECTION 14: Transport information

IATA Information: Shipping Name: PHOSPHINE, ADSORBED Hazard Class: 2.3 UN#: UN3525 Forbidden by Air Marine pollutant

ICAO Information: Shipping Name: PHOSPHINE, ADSORBED Hazard Class: 2.3 UN#: UN3525 Forbidden by Air Marine pollutant

IMDG Information: Shipping Name: PHOSPHINE, ADSORBED Hazard Class: 2.3 UN#: UN3525 Required Label(s): 2.3, 2.1 Marine pollutant Further information: Marine pollutants packaged in single or combination packagings containing a net quantity per single or inner packaging of 5 L or less for liquids or having a net mass per single or inner packaging of 5 kg or less for solids are not subject to any other provisions of the IMDG Code relevant to marine pollutants provided the packagings meet the general provisions of 4.1.1.1, 4.1.1.2 and 4.1.1.4 to 4.1.1.8. International Bulk Chemical Code This material does not contain any chemicals required by the IBC Code to be identified as dangerous chemicals in bulk. Special precautions None

SECTION 15: Regulatory information

Singapore Regulations List of Hazardous Substances PHOSPHINE 7803-51-2

Present Poisons List No information was found for the substance(s) on the List of Hazardous Substances. Hazardous Substance Transport Quantities

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Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050 (SINGAPORE)

PHOSPHINE 7803-51-2

0 kg Maritime and Port Authority This product contains no components identified on Singapore's Maritime and Port Authority - Dangerous Goods. Arms and Explosives Act None of this product's components are on the list. Schedule of Chemical Weapons None of this product's components are on the list. Misuse of Drugs Act None of this product's components are on the list. Petroleum and Flammable Materials This product contains no components identified on Singapore's Petroleum and Flammable Materials. Strategic Goods Control This product contains no components identified on Singapore's Strategic Goods Control. Toxic Industrial Wastes This product contains no components identified on Singapore's Toxic Industrial Wastes. Component Analysis - Inventory PHOSPHINE (7803-51-2) US CA AU CN EU JP - ENCS JP - ISHL KR KECI - Annex 1 KR KECI - Annex 2

Yes DSL Yes Yes EIN Yes Yes Yes No

KR - REACH CCA MX NZ PH TH-TECI TW, CN VN (Draft)

Yes Yes Yes Yes No Yes Yes

SECTION 16: Other information

NFPA Ratings Health: 4 Fire: 4 Instability: 2 Hazard Scale: 0 = Minimal 1 = Slight 2 = Moderate 3 = Serious 4 = Severe Summary of Changes 06/07/2021 - Update to Section(s) 14. Preparation and Revision Date 3/27/2012 Revision date 06/07/2021 Key / Legend ACGIH - American Conference of Governmental Industrial Hygienists; ADR - European Road Transport; AU - Australia; BOD - Biochemical Oxygen Demand; C - Celsius; CA - Canada; CA/MA/MN/NJ/PA - California/Massachusetts/Minnesota/New Jersey/Pennsylvania*; CAS - Chemical Abstracts Service; CERCLA - Comprehensive Environmental Response, Compensation, and Liability Act; CFR - Code of Federal Regulations (US); CLP - Classification, Labelling, and Packaging; CN - ; CPR - Controlled Products Regulations; DFG - Deutsche Forschungsgemeinschaft; DOT - Department of Transportation; DSD ______Page 10 of 11 Issue date: 2021-06-07 Revision 5.0 Print date: 2021-06-18

Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050 (SINGAPORE)

- Dangerous Substance Directive; DSL - Domestic Substances List; EC – European Commission; EEC - European Economic Community; EIN - European Inventory of (Existing Commercial Chemical Substances); EINECS - European Inventory of Existing Commercial Chemical Substances; ENCS - Existing and New Chemical Substance Inventory; EPA - Environmental Protection Agency; EU - European Union; F - Fahrenheit; F - Background (for Venezuela Biological Exposure Indices); IARC - International Agency for Research on Cancer; IATA - International Air Transport Association; ICAO - International Civil Aviation Organization; IDL - Ingredient Disclosure List; IDLH - Immediately Dangerous to Life and Health; IMDG - International Maritime Dangerous Goods; ISHL - Japan Industrial Safety and Health Law; IUCLID - International Uniform Chemical Information Database; JP - Japan; Kow - Octanol/water partition coefficient; KR KECI Annex 1 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL); KR KECI Annex 2 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL) , KR - Korea; LD50/LC50 - Lethal Dose/ Lethal Concentration; KR REACH CCA - Korea Registration and Evaluation of Chemical Substances Chemical Control Act; LEL - Lower Explosive Limit; LLV - Level Limit Value; LOLI - List Of LIsts™ - ChemADVISOR’s Regulatory Database; MAK - Maximum Concentration Value in the Workplace; MEL - Maximum Exposure Limits; MX – Mexico; Ne- Non-specific; NFPA - National Fire Protection Agency; NIOSH - National Institute for Occupational Safety and Health; NJTSR - New Jersey Trade Secret Registry; Nq - Non-quantitative; NSL – Non-Domestic Substance List (Canada); NTP - National Toxicology Program; NZ - New Zealand; OSHA - Occupational Safety and Health Administration; PEL- Permissible Exposure Limit; PH - Philippines; RCRA - Resource Conservation and Recovery Act; REACH- Registration, Evaluation, Authorisation, and restriction of Chemicals; RID - European Rail Transport; SARA - Superfund Amendments and Reauthorization Act; Sc - Semi-quantitative; STEL - Short-term Exposure Limit; TCCA – Korea Toxic Chemicals Control Act; TDG - Transportation of Dangerous Goods; TH-TECI - Thailand - FDA Existing Chemicals Inventory (TECI); TLV - Threshold Limit Value; TSCA - Toxic Substances Control Act; TW – ; TWA - Time Weighted Average; UEL - Upper Explosive Limit; UN/NA - United Nations /North American; US - United States; VLE - Exposure Limit Value (Mexico); VN (Draft) - Vietnam (Draft); WHMIS - Workplace Hazardous Materials Information System (Canada). Other Information Disclaimer: The information in this (Material) Safety Data Sheet ("(M)SDS") is believed to be current and accurate as of the time of shipment of the product by Entegris. Entegris makes no warranties, express or implied, with respect to such information, including, without limitation, the implied warranties of merchantability and fitness for a particular purpose. Entegris assumes no liability for any loss or injury which may result from the use of the information contained in this (M)SDS. The chemical, physical and toxicological properties of the Entegris product described in this (M)SDS have not been thoroughly investigated. Users are responsible for exercising due care in using the Entegris product, and for conducting their own investigation to determine whether the product is fit for their particular purpose and suitable for their method of use or application. It is the user's responsibility to ensure that its activities comply with all applicable laws and regulations. Entegris is a registered trademark of Entegris Inc. or an affiliated company. © 2015 Entegris Inc. or affiliated company. All rights reserved.

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