Smart Optoelectronic Microsensors by OLED-On-Silicon

FRAUNHOFER INSTITUTE FOR ORGANIC ELECTRONICS, ELECTRON BEAM AND PLASMA TECHNOLOGY FEP

Si CMOS chip carrier PCB 1 2 1 2 3

1 OLED-on-Silicon sensor test chip 2 Optical fingerprint sensor based on SMART OPTOELECTRONIC a bidirectional microdisplay MICROSENSORS BY 3 Feedback demonstrator OLED-ON-SILICON

Introduction Fraunhofer Institute for Organic Electronics, Electron Beam Since the emergence of silicon-based micro- Nowadays organic-light emitting diodes and Plasma Technology FEP electronics, the combination of circuitry and (OLED) cross that barrier. The highly embedded sensors, especially photodetec- efficient OLED layers can be monolithically Winterbergstr. 28 tors has been evident (e.g. image sensor). integrated on top of silicon CMOS backpla- 01277 Dresden, Germany However, there is a specific area that cannot nes (referred to as “OLED-on-Silicon”). be covered by this technology inherently Contact persons due to the silicon bandgap – efficient The so formed optoelectronic devices can Ines Schedwill photoemission. That application is so far be designed as highly-integrated micro-scale Phone +49 351 8823-238 reserved to the III-V semiconductor industry optical illumination components and de- and prevents the monolithic integration of tection units on a smart single chip (adding light-emitting optoelectronic devices into on-chip signal processing capabilities). Bernd Richter silicon processes which are common in These can be realized by single elements Phone +49 351 8823-285 microsystems manufacturing. Light-emitting (e.g., OLED-photodiode combination), in components for optoelectronic sensors segments, or as arrays. have to be added in a hybrid way, which increases cost and reduces reliability. www.fep.fraunhofer.de 4 5

Perspective Achievements Development offer

Based on OLED-on-Silicon a novel optoelec- ▪▪Bidirectional devices ▪▪OLED-on-Silicon device integration tronic device generation with the following ▪▪Brightness: > 1000 cd / m² ▪▪R&D in OLED-based integrated optoelec- benefits is foreseen: ▪▪OLED emitter in RGB / NIR / UV tronics ▪▪Monolithic OLED integration ▪▪Customer specific display and camera ▪▪Electronics design (backplane (integrated ▪▪Real solid state device (no moving parts, resolution, e.g., QVGA, XGA, ... circuitry / ASIC), control, interface, …) no fluids, ...) ▪▪Active matrix diagonal size typically < 1,0 ˝ ▪▪System design (sensor electronics, ▪▪Reduced number of system components, packaging, module) lower size, weight and costs of the ▪▪Product development and qualification system Applications ▪▪Pilot-production ▪▪Highly-precise optical adjustment of (small to medium volume fabrication) the OLED emitter with respect to the Fingerprint sensor integrated photodiodes ▪▪OLED for controlled finger illumination ▪▪Arbitrary shaped and patterned ▪▪Photodiodes detect papillary lines as well References OLED-on-Silicon light sources allow as sweat pores with high resolution new approaches for dimensional sensors ▪▪Microdisplay can still work as imaging ▪▪Zoom: BMBF/ 16SV2283 ▪▪Wafer-level integration of beam-steering device for notification, branding, ... ▪▪ISEMO: BMBF/D 16SV3682 micro-optics Particle flow sensor ▪▪OLED stripes for fluid illumination and Further exploitation opportunities of photodiodes for detection OLED-on-silicon opto sensor technology ▪▪Light reflection depending on local fluid beyond the scope of this project can be velocity and particle density expected, e.g., single-chip reflection light ▪▪Analyzing photocurrents and correlation barriers, optical sensors requiring embed- functions, the fluid particle velocity can ded illumination (slope sensors, stray light be calculated sensors, wave front sensors, single-chip Optical inspection optical heads for 3D shape detection by ▪▪Patterned illumination and detection of patterned illumination, …), lab-on-chip pattern distortion modules with embedded microfluidics, ▪▪Dimensional optical measuring of surface 4 Fingerprint application excitation and sensors, optical fingerprint topology 5 Sample of detected fingerprint sensors, chip-to-chip communication and Opto-coupler OLED-based print-heads. That shows the ▪▪OLED as embedded light source for broad market potential of this new tech- integrated opto-couplers (e.g., in drivers, nology and devices in several areas beside controllers,…) biomedicine and biotechnology (including Biosensors pharmacy), such as mechanical enginee- ▪▪OLED for fluorescence excitation We focus on quality ring, telecommunication, or automotive. ▪▪Photodiodes for detection and the ISO 9001.