National Aeronautics and Space Administration

MICRODEVICES LABORATORY 2017 – 2018 ANNUAL REPORT

Jet Propulsion Laboratory T O D AY, TOMORROW, AND BEYOND

At JPL’s Microdevices Laboratory (MDL), we dare mighty (small) things. Since 1989, the MDL has been a critical player in JPL’s dedicated efforts to create and deliver high-risk, high-payoff micro- and nanoscale technology for NASA’s planetary, astrophysics, and Earth science missions. From the beginning, MDL has cultivated an environment that values and promotes leadership, vision, and innovation while improving and implementing new technologies that drive NASA’s ongoing quest to probe the mysteries of the universe. From breaking new ground through unique strategies in the lab to enabling the latest missions to probe the cosmos like never before, MDL technology is out there helping to answer big questions about how stars and galaxies form, the possibility of life beyond our planet, the evolution of other worlds, and the health of Earth.

Credit: NASA

1 JPL ASSOCIATE DIRECTOR FOR MDL STRATEGIC INTEGRATION DIRECTOR

Consistent with NASA’s 2018 This past year has been an exceptionally Strategic Plan, the JPL 2018 Strategic strong one for the Microdevices Implementation Plan calls for the Laboratory (MDL), with the delivery continued investment and leadership of enabling devices for a diverse set in robotic space exploration for the of NASA space missions as well as the benefit of humankind. The Micro- selection of new projects that will use devices Laboratory (MDL) at JPL has MDL technologies and devices. Thanks played a leadership role over the past to the efforts of the technical staff, there 25 years in inventing, developing, and are now more than 20 MDL devices delivering unique microdevices that included in NASA missions planned for have enabled a broad set of NASA space flight in the next few years. These missions. Currently MDL-developed devices contribute to JPL Directorates devices are contributing to JWST, including Solar System Exploration, Mars 2020, Europa Clipper, ECOSTRESS, instruments for Mars Exploration, ISS Spacecraft Atmosphere Monitor, Astronomy and Physics, Earth Science and more than 20 other NASA missions and Technology, and Interplanetary and projects. As we look to the future, Network future optical communications. JPL will continue its strong support and MDL continues to excel as it fulfills its investment in MDL’s people, facilities, charter as a facility to create, develop, and research, and continue to build deliver, and integrate novel microdevices on this exceptional track record to and critical microdevice technologies ensure that future missions benefit that enable instruments and missions from this unique capability for many for JPL and NASA. MDL’s sustained years to come. success is highlighted through the innovative devices, technologies, and capabilities described in this annual DAVID GALLAGHER report. Looking forward, MDL is commit- Associate Director for Strategic Integration, ted to delivering the current devices for JPL planned space missions and, equally as important, investing now in new THIS PAGE technologies, capabilities, and people to The Compact Reconnaissance Imaging Spectrometer for Mars (CRISM) confirms evidence of liquid water on Mars. invent, develop, and deliver the next MDL provided the curved diffraction gratings essential for generation of enabling devices for future CRISM. Credit: NASA/JPL/University of Arizona JPL and NASA projects and missions. ABOUT THE COVER A 64-pixel 320- micron-diameter SNSPD array under development for a future ground terminal for NASA’s Deep Space Optical Communication (DSOC) project, ROBERT O. GREEN mounted in a chip carrier. Read more about the SNSPD Director, for DSOC on page 10. JPL Microdevices Laboratory

2 JPL | MICRODEVICES LABORATORY 3 TABLE OF CONTENTS

7 TODAY’S TECHNOLOGIES ARE TOMORROW’S MISSIONS 8 Gratings for PIXL & SHERLOC, Mars 2020

10 Superconducting Nanowire Single Photon Detectors for DSOC

12 Cryogenic Electronics Packaging for Euclid

14 Laser-Based Instrument for Combustion Product Monitor

16 High Efficiency Detectors for SPARCS

18 Photon-Counting Ultraviolet Detector for FIREBALL 2

20 Grating, Slit, and Black Silicon for EMIT

22 Thermopile Detector Array for PREFIRE

24 NEXT: LOOKING BEYOND TOMORROW

26 STRATEGIC EQUIPMENT INVESTMENTS

28 MDL VISITING COMMITTEE

30 INNOVATIVE INSTRUMENTS

32 SAM: Spacecraft Atmosphere Monitor

34 Lab on a Chip

36 Magnetometer

38 CORE TECHNOLOGY

40 Diffractive Optics

42 Semiconductor Lasers

44 UV-Visible Detectors

46 III-V Infrared Detectors

50 Superconducting Materials

54 Submillimeter Devices

56 Microelectromechanical Systems EARTH’S MOON View of a crescent moon rising and the cusp of Earth’s atmosphere. 58 APPENDIX The dominant gases and particles in each layer of the atmosphere act as prisms, revealing distinct colors.

Credit: NASA

4 JPL | MICRODEVICES LABORATORY 5 WE’RE OUT THERE

The evidence of the Microdevices Laboratory’s (MDL) achievements can be seen in the numerous cutting-edge devices and components that have flown in space, enabling new science measurements and novel investigations for JPL and NASA. Whether the goal is to explore how Earth is changing, to investigate the possibility of past or present life on the planets or their moons in our solar system, to find extra- solar Earth-like planets, or to study the formation and evolution of our universe, MDL plays a crucial role in advancing these missions. From ground-based telescopes and atmospheric balloons, to planetary rovers and instruments that assemble in space, innovative MDL technology is out there.

6 TOMORROW’S MISSIONS JPL | MICRODEVICES LABORATORY 7 SEM OF GRATING SHERLOC Scanning electron Scanning Habitable Environments with microscope Raman & Luminescence for Organics (SEM) image of the seven-by-seven and Chemicals (SHERLOC) will use spot array grating an ultraviolet laser to illuminate a tiny area of Martian soil. A deep ultraviolet spectrometer will analyze Raman MICRODEVICES LAB scattering and material fluorescence, which will enable non-contact, spatially SPOT ARRAY resolved, and highly sensitive detection Seven-by-seven spot array produced by and characterization of organics and 830 nm infrared laser minerals in the Martian surface and transmitted through the near subsurface. This may provide above CGH grating GRATINGS evidence of the Martian surface’s past aqueous history and may also detect the presence and preservation of potential biosignatures. In support of SHERLOC, MDL is fabricating gratings FOR PIXL & by electron-beam lithography for the PIXL Raman and fluorescence spectrometer The Planetary Instrument evenly spaced grids of laser (below). To provide the required spectral for X-ray Lithochemistry spots. These spot array resolution, the grating has a very fine (PIXL) is an X-ray fluorescence generators are transmissive pitch, on the order of 4000 grooves/mm, instrument that will examine computer-generated holo- SHERLOC, and the groove profile was optimized to fine scale elemental chemistry gram (CGH) gratings. The achieve maximum diffracted signal. in Martian rocks and soils. The CGH gratings were designed, These fabricated gratings have been instrument’s sub-millimeter patterned by electron-beam measured to produce near the theoretical resolution will allow scientists lithography, and plasma- maximum diffraction efficiency at the to pinpoint tiny features such etched into glass at MDL. 248.6 nm operating wavelength. as individual grains, spherules, Each unit cell of the two- MARS 2020 veins, and crystals, and dimensional CGH grating is examine their elemental made up of submicron square Building upon the success of NASA’s Mars Science SHERLOC’S principal investigator is makeup. Previous Martian pixels, first electron-beam Laboratory mission involving the Curiosity rover, Luther Beegle. The principal investigator X-ray spectrometers could patterned into a chrome the Mars 2020 rover mission will address additional for the grating is Dan Wilson at MDL. only measure the bulk stencil layer, and then high-priority science goals for Mars exploration, composition of samples. transfer-etched to the proper including key questions about the potential for life on For example, the X-ray depth in glass. After the the Red Planet. Led by JPL, Mars 2020 takes the next spectrometer on the Mars chrome etch mask is removed, step in NASA’s Mars Exploration Program, probing the Science Laboratory’s Curiosity the remaining surface relief Martian rocks for evidence of past life. The four goals rover is limited to a 17 mm pattern imparts a phase of Mars 2020 are to identify past environments capable diameter sample area. PIXL pattern on the laser beam, of supporting microbial life, seek signs of biosignatures will scan a 100 micron X-ray causing it to diffract into for past microbial life in those habitable environments, beam in 100 micron steps an array of spots with near collect core rock and “soil” samples and store them over a 25 mm square area. equal intensity. Gratings for on the Martian surface, and test oxygen production In order to precisely map the three-by-five and seven- from the Martian atmosphere. Two instruments being X-ray beam location within the by-seven spot arrays have developed and built at JPL will aid in the quest to high-resolution optical image, been fabricated (see above). meet the goals and include elements fabricated in PIXL will use an optical fiducial the Microdevices Laboratory (MDL). subsystem (OFS) co-aligned with the X-ray beam. A key PIXL’S principal investigator element of the OFS are is Abigail Allwood. The two micro-optic spot array principal investigator for the generators that produce grating is Dan Wilson at MDL.

8 MDL FOR MARS 2020 JPL | MICRODEVICES LABORATORY 9 MICRODEVICES LAB SUPERCONDUCTING

ARRAY WIRES Scanning electron microscope NANOWIRE SINGLE (SEM) image of the SNSPD array PHOTON DETECTORS

Superconducting Nanowire Single the asteroid belt, MDL has developed of ranges up to 2.7 AU, beyond FOR DSOC Photon Detectors (SNSPD) are the a unique 64-pixel SNSPD array sensor Mars’s farthest range. With highest performing detectors available capable of time-tagging individual DSOC, the first demonstration from the ultraviolet to the mid-infrared. photon arrivals to sub-100 picosecond of optical communication from As instruments to explore the solar system developed state-of-the-art superconducting Since 2005, MDL has been a world accuracy at count rates in excess of a deep space will place JPL in and the cosmos increase in complexity, ground detectors for the first demonstration leader in the development of this unique billion counts per second. A cryogenic a strategic position to lead and the reach of human space exploration of laser communication ever to take place from technology, and currently holds world detector instrument based around this the Deep Space Network into expands toward Mars, data rate limitations deep space, the NASA Deep Space Optical records for SNSPD detection efficiency, device will be fielded at the five meter the laser communication era. of conventional radio communications place Communication (DSOC) project. DSOC plans to time resolution, active area, and dark ground telescope at Palomar Observatory serious constraints on the design of future downlink data from a JPL-built laser transmitter counts. While design, nanofabrication, in Southern California for use in the missions. On Earth, laser communication aboard the Psyche spacecraft at 267 Mbps from and testing of SNSPD devices is all DSOC ground terminal. Delivery of the Project manager for the networks over glass fibers have transformed 0.2 AU, and over 1 Mbps at 2.7 AU. In a future performed at JPL, the technology DSOC flight and ground terminals is DSOC mission is Bill Klipstein our society, enabling vast amounts of data to optical Deep Space Network, laser communica- development process for these devices expected in 2021, with the spacecraft at JPL. Abi Biswas at JPL be transferred around the globe in the blink of tion promises to increase data rates by 10 has been highly interdisciplinary, with launch to occur in the summer of 2022. is the project technologist. an eye. But repeating the same feat for a space- to 100 times compared to Ka-band radio, with fruitful collaborations at the National During the spacecraft’s cruise phase, Principal investigator for the craft in deep space is no easy trick. A laser the same mass and power on the spacecraft. Institute of Standards and Technology, DSOC will demonstrate the viability of SNSPD is Matt Shaw at MDL. spot fired from Mars will be hundreds of kilo- To meet the ambitious goals of the DSOC project, the Massachusetts Institute of Tech- laser communication links at a variety meters wide when it reaches Earth, so even the MDL had to develop a superconducting ground nology, and Caltech. SNSPDs are a largest telescopes would only receive signals detector with 100 times the active area and 10 key technology for deep space optical at the single-photon level. Special codes must times the maximum count rate of a conventional communication and JPL SNSPD arrays be used to maximize the efficiency with which state-of-the-art single photon detector, all were fielded on the ground in the Lunar information is sent on each photon, and the while maintaining high efficiency and sub-100 Laser Communication Demonstration SNSPD CHIP world’s most high-performance single photon picosecond timing resolution. (LLCD) in 2013. Next, they are planned for A 64-pixel 320- micron-diameter detectors must be used on the ground. The the ground terminal of the Deep Space SNSPD array under development Microdevices Laboratory (MDL) has recently Optical Communication (DSOC) project, for a future ground terminal for NASA’s Deep Space Optical which is scheduled for launch aboard the Communication (DSOC) project, Psyche spacecraft. The DSOC project mounted in a chip carrier would be the first demonstration of laser communication from beyond lunar orbit and would extend the range of laser communication demonstrations by a factor of 1000 from what was achieved in LLCD. To receive the faint signals from the laser transmitter on its cruise toward

Credit: Phillip Colla / Oceanlight.com

10 MDL FOR DSOC JPL | MICRODEVICES LABORATORY 11 MICRODEVICES LAB CHIP ON BOARD In 1998, the Hubble Space Telescope— Left. Close up view of with the help of ground-based aluminum wirebonds telescopes—made a series of observa- from the ASIC to tions of very distant supernovae the silicon fan out CRYOGENIC and gold wire bond that showed that, a long time ago, from the silicon fan the universe was actually expanding out to the printed more slowly than it is today. This wiring board ELECTRONICS contradicted the common idea that Right. Edge detail of the expansion of the universe had the fan out board been slowing due to gravity and rather gave evidence that it has PACKAGING been accelerating. Theorists still can’t explain why this is happening, but they call the cause dark energy. This mysterious dark energy makes Euclid is a European Space Agency (ESA)– ture required for the Euclid ASIC. FOR EUCLID up roughly 68 percent of the universe. led mission to orbit a telescope at the L2 MDL is manufacturing flight silicon fan Dark matter, which is also puzzling, Sun-Earth Lagrangian point in order to out boards for the new ASIC package. makes up about another 27 percent do a comprehensive survey of galaxies This silicon fan out is necessary to interface and the rest—less than 5 percent— over about one-third of the sky. This the fine wire bond pitch on the ASIC to DARK survey will be used to develop a map of a wider wire bond pitch on the printed MATTER NORMAL is made up of the normal matter that ~27% MATTER makes up everything we can see mass distribution in the universe, which circuit boards. The silicon fan out fabrica- ~5% in the universe, like stars, planets, will then allow powerful tests of cosmo- tion leverages a recently purchased GAS galaxies, and us. The Euclid mission, logical theories. The focal plane of the EX6 stepper photo-lithography system

STARS to be launched in 2021, is designed Euclid telescope contains a visible to produce all units quickly and with near

NEUTRINOS to provide an unprecedented look instrument and a Near Infrared Spectro- 100 percent yield. JPL is also performing at this “dark side” of the universe. Photometer (NISP). JPL/NASA is the epoxy attach of the silicon components The Microdevices Laboratory (MDL) providing 16 “sensor chip systems,” to the metal housing and the fine wire will aid in this exploration of these composed of infrared detectors, cables, bonding of the fan out to the wiring board DARK ENERGY curious components of the cosmos and cryogenic electronics, to ESA and and from the ASIC to the fan out. Both ~68% by manufacturing a key piece of the the NISP team in France. The detector processes have been developed specially integrated circuits for the spacecraft’s arrays and application-specific integrated by JPL/NASA to survive thermal cycling to telescope. “Euclid will be a powerful circuit (ASIC) chip used in the cryogenics cryogenic temperatures. These processes tool for understanding the distribution electronics provided by Teledyne Imaging are directly applicable to future electronics of dark matter in the universe and Systems in Camarillo, California. The to be built for missions to moons of outer how that distribution has been NASA team, including engineers at JPL planets such as Europa, Enceladus, influenced by dark energy over the and the Goddard Space Flight Center, and Titan, and for cutting edge, industry- last 10 billion years,” says JPL’s Jason have developed a package for the ASIC leading “Earth bound” technologies such Rhodes, observational cosmologist that works at cryogenic temperatures as superconducting quantum computing. and a NASA representative on with high reliability. The package is based the Euclid science team. on chip-on-board architectures used for JPL’s Spectral and Photometric Imaging Giuseppe Racca is the Euclid project Receiver (SPIRE), Goddard’s Thermal manager for the ESA, René Laureijs is Infrared Sensor (TIRS), and Goddard’s the Euclid project scientist, and Jason Microshutter Arrays to launch on the Rhodes is the NASA representative on James Webb Space Telescope, all of the Euclid science team. Technical lead which were operated successfully in for the Cryogenic Electronics Packaging space at deep cryogenic temperatures is Warren Holmes at MDL. well below 130 K, the operating tempera-

12 MDL FOR EUCLID JPL | MICRODEVICES LABORATORY 13 Fire experiments in realistic as well as trace amounts of environments help engineers hydrogen fluoride, hydrogen MICRODEVICES LAB understand risks to human chloride, and hydrogen health and formulate protec- cyanide, as these gases are tive measures. Fire hazards produced (or consumed) are particularly dangerous during a combustion event. in the confines of human- The JPL CPM instrument is occupied spacecraft, yet there expected to launch aboard LASER-BASED are limited opportunities to an Orbital Sciences Cygnus test fire protection systems resupply vehicle in 2020. CYGNUS in orbit. Led by NASA’s Fire experiments will be Orbital Supply Vehicle Glenn Research Center, conducted after the space- Credit: NASA INSTRUMENT FOR Saffire consists of a series craft departs from the of full-scale combustion tests International Space Station performed aboard automated and prior to reentering transfer vehicles during the Earth’s atmosphere. COMBUSTION return trip from the Interna- In addition to supporting hours of maintenance-free tional Space Station. Saffire the near-term objectives of operation. Such a robust sensor enables the study of flame Saffire, the CPM instrument platform will be essential as growth, flammability limits, is a valuable testbed for humans push beyond low Earth and other important charac- laser spectroscopy sensors orbit to explore deep space. PRODUCT teristics within the unique designed to support human low-gravity environment of spaceflight operations. Laser- space, without risking the based gas sensors can The Saffire program is led by safety of astronauts. produce accurate concen- Dr. Gary Ruff, at the NASA MONITORING Engineers from MDL have tration measurements over Glenn Research Center in developed the Combustion a broad range of pressures Cleveland, Ohio. The Combus- Fires can happen anywhere—even in space. Product Monitor (CPM) and temperatures and are tion Product Monitor project at So, for the astronauts who live and work there, instrument to measure capable of thousands of JPL is led by MDL’s Ryan Briggs. it is critical to understand how fire spreads in specific fire products during a microgravity environment and how to manage a future Saffire flight. CPM it safely. NASA has conducted studies as part of uses compact semiconductor the space shuttle and International Space Station lasers to probe the abun- (ISS) programs, but these have been limited in size dance of carbon monoxide, and scope due to the risks involved for astronauts. carbon dioxide, and oxygen, Now, new experiments are helping researchers better understand spacecraft fires on a larger scale. The Spacecraft Fire Experiment, known as Saffire, is a series of tests on unmanned supply vehicles returning from the ISS. The Microdevices Laboratory (MDL) is developing a laser-based instrument to measure the gases that the test fires produce. THE COMPLETED COMBUSTION PRODUCT MONITOR INSTRUMENT

14 MDL FOR COMBUSTION PRODUCT MONITOR JPL | MICRODEVICES LABORATORY 15 HELIX OF NEBULA PLANET AROUND 10 SPARCS HST + GALEX ACTIVE M STAR 400 Venus crosses the line /µm) 2 PLANET AROUND of sight between the sun INACTIVE M STAR 1 and Earth four times 300 EARTH AROUND every 243 years in pairs THE SUN separated by eight years. 0.1 200 Courtesy of NASA/SDO

and the AIA, EVE, and 100 0.01 HMI science teams

MICRODEVICES LAB (W/m FLUX INTEGRATED 0 0.001

0.5 1.0 1.5 2.0 FRACTION ROTATION OF STELLAR WAVELENGTH (µm) TARGET

UV FLUX The stellar UV flux has a dramatic UNINTERRUPTED OBSERVATIONS The CubeSat effect on a planet’s detected atmospheric content. platform of SPARCS allows for dedicated, uninterrupted The plot shows an Earth-like planet spectrum in observations of its targets for days or even weeks. HIGH EFFICIENCY the habitable zone of an active (red) and inactive Data from such prolonged observations are essential to (gold) M4 dwarf. The spectrum of Earth around the the development of stellar models but are not available Sun is shown black for comparison. Adapted from from larger missions such as Hubble Space Telescope Rugheimer et al., The Astrophysical Journal, (HST) and Galaxy Evolution Explorer (GALEX), which DETECTORS vol. 809, issue 1, pp. 57, 2015. must share observation resources.

the sensitivity to the desired With advancements made leveraging investments in FOR SPARCS spectral band while rejecting at MDL, silicon detectors now silicon imaging technology the out-of-band light—a break- have an ultraviolet response to develop and deliver In the search for extraterrestrial signs of life, In 2018, the SPARCS mission reality. SPARCS achieves through for silicon detectors. five to 10 times higher than unique ultraviolet sensors many researchers are focusing on exoplanets was one of only two CubeSat this in a six-unit CubeSat the Silicon detectors are used image-tube detectors that based on the latest silicon ­—or planets that exist beyond our solar system— missions selected in astro- size of a cereal box by using universally on NASA missions, have flown before. Through detector designs. so far away that they are undetectable using physics by the Astronomy a small telescope and high- creating images that are nanoengineering, researchers current technology. Flagship mission concepts, and Physics Research and performance UV camera to crucial for the entry, descent, have made it possible to such as the Habitable Exoplanet Imaging Analysis program, which help understand exoplanet and landing process, as produce silicon arrays with Principal investigator for Mission (HabEx) or the Wide-Field Infrared manages the Astrophysics habitability potential through well as providing images for unprecedented capabilities. SPARCS is Professor Evgenya Survey Telescope (WFIRST), will use large CubeSats and suborbital ultraviolet observations. necessary context in science They have achieved tailorable Shkolnik at Arizona State telescopes to directly image and characterize missions for NASA. SPARCS SPARCS will make UV measurements. Image-tube- response such that these University’s School of Earth exoplanets by masking starlight. Interpretation would be the first mission observations of the stars based detectors have been silicon detectors have high and Space Exploration. of data for assessing the habitability of the to provide dedicated, long- and study the effect that used extensively in the sensitivity in the ultraviolet Principal investigator for exoplanet from these large telescopes requires duration ultraviolet (UV) their ultraviolet activity might ultraviolet spectral range in while rejecting background the detector and camera is a complete view of nearby star ultraviolet observations of red dwarf have on the nearby habitable the past; however, they are from visible and infrared Shouleh Nikzad at MDL. activity. A new small mission called the stars. These measurements zone planets’ atmospheric bulky, have low sensitivity, sources. In collaboration Star-Planet Activity Research CubeSat, or are crucial to interpreting signatures and therefore and require high voltage. with the industry, MDL is SPARCS, will do just that in 2021. The goal of observations of planetary may affect the assessment SPARCS is to take a step back and examine the atmospheres around low- of the exoplanet habitability. flares and other stellar activities of red dwarf mass stars. Astrophysics SPARCS is a collaborative stars, which are less than half the size of our missions have been more effort between Arizona State sun and with 1 percent of its brightness. There challenging to fit the form University and JPL. JPL is are about 40 billion red dwarf stars in the Milky factor of small CubeSats responsible for delivery of Way galaxy, and the mission—with the help of because they typically the SPARCam, an ultraviolet unique ultraviolet sensors developed by the depend on large aperture camera with two channels Microdevices Laboratory (MDL)—will provide telescopes. With innovations in the far ultraviolet (FUV) insight into habitable star systems and give in high-efficiency silicon UV and near ultraviolet (NUV). SPARCAM researchers clues about how to interpret detectors, where the need The heart of the SPARCam LOCATION exoplanet data from bigger space telescopes. for high voltage and bulky is the detectors with a SPARCS is a CubeSat mission detectors is eliminated, response tailored at MDL that will be built out of six cubical modules, each about astrophysics UV CubeSat to optimize the SPARCS 10 centimeters on a side. missions are becoming a science return by maximizing

16 MDL FOR SPARCS JPL | MICRODEVICES LABORATORY 17 MICRODEVICES LAB FIREBall 2, a balloon-borne Silicon-based solid- UV spectrograph jointly state devices have become funded by NASA and France’s the chief imaging detectors PHOTON-COUNTING National Centre for Space for many commercial and Studies, is designed to scientific applications due observe emission from the to their low noise, large IGM and the circumgalactic dynamic range, and linear light ULTRAVIOLET medium, the diffuse gas response. MDL-developed around galaxies. These delta- and superlattice-doping emissions carry signatures of (2D-doping) techniques yield galactic feedback, including silicon detectors with reflection- DETECTOR FOR matter and energy outflows. limited response; AR coatings Understanding the morpholo- are used to further improve gy, thermodynamics, chemis- detector response beyond the try, and kinematics of this gas reflection limit. AR coatings FIREBALL 2 is key to understanding galaxy for the UV wavelength range formation and evolution. are particularly challenging For the past three decades, theoretical physicists The new FIREBall because most materials will have predicted that primordial gas from the Big instrument is optimized for absorb UV light. We have FLIGHT READY FIREBall 2 in the Bang is not spread uniformly throughout space narrowband observations developed AR coatings using hanger at the Columbia Scientific Balloon but is instead distributed as a “cosmic web,” spanning the stratospheric UV-transmitting materials Facility in Fort Sumner, New Mexico. or a network of smaller and larger filaments window (200–210 nanometers) and atomic layer deposition Image courtesy P. Balard crisscrossing one another across the vastness centered at 205 nanometers. which allows us to prepare of space, called the intergalactic medium (IGM) These measurements are coatings with a thickness of by astronomers. This cosmic web is the source complementary to those only a few tens of nanometers. of gas that fuels the birth and growth of galaxies. made by Caltech’s Cosmic This approach has enabled The energy released by the IGM is extremely Web Imager, which examines our technologies to achieve faint and can therefore only be measured by IGM emission at a larger nearly 80 percent quantum highly sensitive instruments like the one used redshift. efficiency in the FIREBall 2 in the Faint Intergalactic Redshifted Emission Using MDL technologies, window. Balloon (FIREBall) experiment. FIREBall is JPL has delivered a high- designed to measure IGM emission that has performance, UV, photon- been redshifted through time and space to an counting science detector The FIREBall mission’s ultraviolet (UV) wavelength range that is accessible by optimizing the response principal investigator is at stratospheric balloon altitudes. Two missions of an electron multiplying Christopher Martin, professor preceded FIREBall 2; Galaxy Evolution Explorer charge-coupled device of physics at Caltech. (GALEX) and FIREBall 1. FIREBall 1, while a (EMCCD) to the observation Principal investigator SCIENTIFIC BALLOON technical and engineering success, used a spare window of FIREball 2. The for the Photon-counting Scientific Balloon Flight Facility microchannel plate detector from GALEX that in Fort Sumner, N.M. Image courtesy EMCCD is a powerful imaging Ultraviolet Detector is HySICS Team/LASP elucidated the need for lower detection limits. architecture with photon- Shouleh Nikzad at MDL. Improvements to FIREBall 2 were made possible, counting capability. When in part, by the incorporation of a high-performance combined with JPL’s 2D silicon detector developed at the Microdevices doping and custom antireflec- Laboratory (MDL). tion (AR) coatings, the result is a mission-enabling UV

FIREBall 2 during pre-flight sky tests detector with unprecedented at the Columbia Scientific Balloon quantum efficiency and Facility in Fort Sumner, New Mexico noise characteristics. Image courtesy P. Balard

18 MDL FOR FIREBALL 2 JPL | MICRODEVICES LABORATORY 19 MICRODEVICES LAB In February 2018, NASA of technologies invented at selected the JPL-led Earth JPL for advanced imaging Surface Mineral Dust Source spectrometer instruments and Investigation (EMIT) as an science missions, including: Earth Venture Instrument for a three-octave, high-uniformity development and deployment Dyson imaging spectrometer GRATING, SLIT, to the International Space design; submicron adjustable Station. EMIT will use detector mounts; an e-beam advanced JPL imaging fabricated grating; a silicon

spectroscopy to measure nitride slit; and a black silicon DETECTOR MOUNTS the mineral composition of zero-order light trap. The JPL technology cryogen AND BLACK detector array mount with six the Earth’s dust source grating, slit, and light trap degree of freedom adjustment regions. This will determine are fabricated at MDL. to submicron tolerances the optical and chemical A prototype of the EMIT properties of the dust aerosols imaging spectrometer has SILICON FOR EMIT emitted into the atmosphere been developed and used during high wind conditions, to advance the readiness Does mineral dust blown into the atmosphere warm providing accurate boundary of these key technologies. or cool the atmosphere? That is the fundamental conditions for today’s High-throughput imaging question that researchers hope a new, space-based state-of-the-art Earth system spectrometers of the EMIT instrument called EMIT (Earth Surface Mineral Dust models. With accurate type are relevant to a broad Source Investigation) will help them answer. Since initialization, these models range of future NASA missions much of the Earth’s desert regions are remote and will be used to understand the to address new science inhospitable, the best way to study them may be from global dust cycle and predict questions on the moon, on

space. Using imaging spectroscopy methods, EMIT the future role of mineral dust Mars, and throughout the LIGHT TRAP will measure surface soil and mineral composition of in the Earth’s climate system. solar system. Black silicon and slit the Earth’s dust source regions to learn more about Mineral dust impacts the its impact on the climate and predict how it can be atmosphere, oceans, terrestri- expected to change in the future. Developed and al ecosystems, cryosphere, The principal investigator built at JPL, the imaging spectrometer will benefit and inhabited lands. The for the EMIT mission at JPL from numerous components fabricated in the EMIT instrument uses a set is MDL’s Robert O. Green. Microdevices Laboratory (MDL).

DUST IN THE WIND E-BEAM GRATING Large dust plume Microdevices Laboratory blowing off the Sahara e-beam fabricated Desert and out over structured blaze concave the Mediterranean Sea grating technology for the EMIT prototype Credit: NASA image cour- imaging spectrometer tesy Jeff Schmaltz, LANCE with atomic force MODIS Rapid Response micrograph of achieved structured blaze

20 MDL FOR EMIT JPL | MICRODEVICES LABORATORY 21 SEA ICE 2011 composite satellite PREFIRE image shows the expanse CALIBRATION of Arctic sea ice and the PAYLOAD MICRODEVICES LAB MIRROR/MOTOR Greenland Ice Sheet Payload is miniaturized and fits within roughly Credit: NASA THERMOPILE a 1.5U volume CubeSat TELESCOPE THERMOPILE FOCAL PLANE DETECTOR ARRAY MODULE

OPTICS METERING FOR PREFIRE STRUCTURE

As our planet continues to warm, climate In 2018, NASA selected spheric greenhouse effect, loaf of bread. Performing accurate and insensitive to instrument drift, so it is the Earth over long integration scientists need novel ways of exploring the PREFIRE to perform first-of- allowing quantitative modeling sensitive radiometric measurements possible to make accurate radiometric times to enhance the signal-to- processes that drive change and of measuring a-kind infrared and far-infrared of the surface/atmosphere across infrared and far-infrared wave- measurements even within a CubeSat noise ratio of the measurement. the markers that predict such alterations. measurements of Earth’s feedbacks that are hypothe- lengths in a miniaturized satellite is where the instrument’s thermal environ- These scientists recognize that the remote atmosphere from space. sized to amplify the effects of challenging, but, fortunately, PREFIRE ment is not stable. Arctic region of Earth is unique in that it One key question PREFIRE climate change. The dual will have the help of MDL’s focal plane Each pixel of the thermopile detector Principal investigator for helps regulate the planet’s temperature like will attempt to answer is: Why spacecraft measurement module (FPM). array has a broadband optical coating PREFIRE is Tristan L’Ecuyer, a thermostat by radiating back into space is the Arctic warming faster capability specifically creates In particular, the FPM will use a called “gold black” that provides near- associate professor of much of the excess energy from the Sun than the rest of the planet? sub-diurnal sampling that thermopile detector array designed unity optical efficiency across the entire atmospheric and oceanic that is received in the tropics. However, More than 60 percent of can test the hypothesis that and fabricated at MDL with a pixel and spectrum that PREFIRE will measure. sciences at the University more than half of these Arctic emissions energy radiated from the cold, time-varying errors in current format size customized for PREFIRE. Finally, the FPM will utilize custom of Wisconsin–Madison. occur at far-infrared (FIR) wavelengths greater dry polar regions resides in models of FIR surface The array operates uncooled, so minimal readout integrated circuits built by Principal investigator for than 15 micrometers and have never been FIR wavelengths. Energy in emissivity cause biases in resources are needed to integrate the Black Forest Engineering that show the Thermopile Detector systematically measured from space before. these bands is both dynamic estimates of the energy array into each CubeSat. It is important no measureable low frequency noise. is Matt Kenyon at MDL. A new mission called Polar Radiant Energy and poorly characterized, exchange between the to note that thermopiles are fundamentally Therefore, the entire FPM can observe in the Far Infrared Experiment (PREFIRE) yet it plays a critical role in surface and the atmosphere will use a JPL-designed instrument that defining the rapidly evolving of the Arctic. Elucidation and uses critical technology from the Micro- polar climates. mitigation of these biases devices Laborabory (MDL) including a fully PREFIRE will fly two through PREFIRE measure- THERMOPILE custom thermopile detector array. This CubeSat satellites making ments and analyses may DETECTOR CHIP thermopile array will help probe this little- radiometric measures of the reduce the large spreads The FPM utilizes a studied portion of the radiant energy emitted atmosphere between five to observed in past projected thermopile detector by Earth for the first time, seeking clues 50 micrometers, completely rates of Arctic warming, chip customized for PREFIRE in terms about Arctic warming, sea ice loss, and characterizing the variability sea-ice loss, ice sheet melt, of pixel layout and ice-sheet melting. Finally, PREFIRE will in FIR emission on scales of and sea level rise. 150 µm format size. The explore how changes in thermal infrared hours to months. This spectral CubeSats are lower-cost, chip has “gold black” deposited on the emissions at the top of Earth’s atmosphere data provides critical insight lightweight, and very small pixels to make the are related to changes in cloud cover and into the surface emissivity, compared to traditional pixels sensitive to surface conditions below. its variability, and the atmo- satellites—some as small as a infrared and far- infrared light

SUPPORT BEAMS

22 MDL FOR PREFIRE JPL | MICRODEVICES LABORATORY 23 LOOKING BEYOND TOMORROW

At the Microdevices Laboratory (MDL), the future is in our favor. As technology aims to get smaller and smaller, we are already armed with expertise on building micro- and nanoscale devices, giving us a jumpstart on what NASA missions will need in the decades ahead. By investing in highly productive, creative people who seek to answer the most important and curious questions we have in science and technology, MDL has secured a strong track record of thinking outside the box to deliver successful high-risk, high-payoff results. We look forward to an exciting, challenging, and dynamic future of creating new technologies that enable NASA space missions to make unique Earth, planetary, and astrophysics discoveries, and pioneering technology development for many areas of national importance, from medical applications to national security.

24 NEXT: LOOKING BEYOND TOMORROW JPL | MICRODEVICES LABORATORY 25 E-BEAM AT WORK • Electron-beam • lithography produces small, laboratory-scale starshade masks from thin silicon wafers STRATEGIC HIGHLIGHT: EQUIPMENT NEW INVESTMENTS IN CUTTING EDGE EQUIPMENT INVESTMENTS AND TOOLING

Since its inception, the Microdevices down to ISO4 (Class 10), facilities Laboratory (MDL) has delivered a designed and engineered with remarkable number of improved anti-vibration measures to allow sensor technologies and capabilities sub-micron processing, and flexible for JPL and NASA space missions equipment designs and controls that have enabled enhanced science allowing the use of different size returns. Sustained strategic invest- and thickness wafers and the use of ment in a world-class technical a variety of materials. In addition, a staff, critical facility infrastructure, full suite of semiconductor processing and cutting-edge equipment and equipment providing end-to-end tooling are all crucial to achieving device fabrication are available at and continuing to achieve these MDL. (For complete equipment list, PATTERNING ETCHING SAMPLE important contributions. see page 63–64.) CAPABILITY CAPABILITY PREPARATION The sustained strategic invest- Of course, the improvements to CAPABILITY ments over the past 25 years have infrastructure and capabilities do not The installation, qualification, An Oxford PlasmaPro 100 paid off. Contributions have been happen without help. The oversight and the initial direct-write Cobra Load-Locked Cryo/ The Laurell Technologies and continue to be made through the and implementation of numerous fabrications took place ALE/Bosch Etcher, procured EDC 650 Dilute Dynamic creation and delivery of improved infrastructure systems, equipment for a state-of-the-art JEOL and installed in the past year, cleaning System (DDS) sensor technologies across a wide capabilities, and operations have been JBX 9500FS Electron Beam will allow the flight-qualified is another new equipment swath of the electromagnetic spec- maintained, renewed, and upgraded Lithography System in 2017. fabrication of black silicon— investment that improves trum, from the soft X-ray regime by the members of the Central This major investment took a textured silicon surface that the processing yield through through the ultraviolet, the visible, Processing and MDL Support group two years to procure and acts as a zero-order-light-trap less contamination during the near-infrared, the mid-infrared, assisted by numerous other organiza- fabricate and one year to to provide world-record broad- sample preparation. Not only the far-infrared, sub-millimeter, tional elements. These elements allow install and qualify. The band light-absorption efficiency. does this capability improve and millimeter spectral regions. the continuation of the Lab’s cutting- dedication ceremony took the ability to clean surfaces, Highlights of the facility infrastruc- edge capabilities and enable its highly place on June 7, 2017, when it does so with less cleaning ture include the ability to safely educated, talented, and skilled users, Michael Watkins, director material waste since it utilizes handle and monitor acutely hazardous researchers, developers, and tech- of JPL, initiated the first activated vapor streams materials, three separate exhaust nologists to continue to contribute official patterning write onto a spinning substrate as systems, certified cleanroom areas now and well into the future. from this system. opposed to large liquid vats.

26 NEXT: STRATEGIC EQUIPMENT INVESTMENTS JPL | MICRODEVICES LABORATORY 27 Meeting every two years to review the ongoing work at the Microdevices Laboratory (MDL) and make valuable MDL suggestions for future directions, the Visiting Committee, consisting of a broad spectrum of highly talented and accomplished individuals, has recognized the leadership, VISITING vision, and innovation of MDL. They have acknowledged that MDL is a key national asset with unique state-of-the- COMMITTEE art capabilities and staff well-focused on space applications of micro- and nanotechnologies. The committee’s reports have been of tremendous value in the pursuit of the highest quality research and development programs targeted toward the key scientific and technical goals of interest to NASA and our other sponsors.

DR. THOMAS L. KOCH DR. BARBARA WILSON DR. EUSTACE DERENIAK DR. VENKATESH NARAYANAMURTI DR. OSKAR PAINTER ALBERT P. PISANO Committee Chair Committee Co-Chair Former Chairman (2008–2015) Director of Science, Technology Professor of Applied Physics Professor and Dean of the Dean of College of Optical Sciences Retired Chief Technologist Professor of Optical and Public Policy Program California Institute of Technology School of Engineering and Professor of Optical Sciences Jet Propulsion Laboratory Sciences, Electrical and and Professor of Physics University of California, University Of Arizona Computer Engineering— Harvard University San Diego University of Arizona

DR. SANJAY BANERJEE DR. JED HARRISON MR. GILBERT HERRERA DR. REGINA RAGAN DR. RONALD REAGO MR. DAVID SANDISON Director of Microelectronics Professor of Chemistry Director of the Laboratory Professor of Chemical Director of Communications, Director of the Center for Research Center and and Department Chair for Physical Sciences Engineering and Electronic Research, Development Microsystems Science, Professor of Electrical University of Alberta University of Maryland, Materials Science and Engineering Center (CERDEC) Technology & Components and Computer Engineering College Park, MD University of California, Irvine Night Vision and Electronic Sandia National Laboratories University of Texas at Austin Sensors Directorate (NVESD)

DR. WILLIAM HUNT MR. GEORGE KOMAR DR. GREGORY KOVACS DR. ROBERT WESTERVELT DR. JONAS ZMUIDZINAS DR. MEIMEI TIDROW Professor of Electrical and Associate Director Professor of Electrical Engineering Professor of Physics Former JPL Chief Technologist, Chief Scientist for Focal Plane Arrays Computer Engineering NASA’s Earth Science and courtesy appointment to and Applied Physics former Director of JPL’s Microdevices at the U.S. Army RDECOM CERDEC Georgia Institute of Technology Technology Office (ESTO) Department of Medicine, Division Harvard University Laboratory, and Merle Kingsley Night Vision and Electronic Sensors of Cardiovascular Medicine Professor of Physics Directorate (NVESD) Stanford University California Institute of Technology

28 2018 MDL VISITING COMMITTEE JPL | MICRODEVICES LABORATORY 29 INNOVATIVE INSTRUMENTS Building instruments for scientific investigations requires curiosity, dedication, and new ways of looking at old problems. At the Microdevices Laboratory (MDL), we aim for the trifecta of efficient, reliable, and cost-effective in everything that we do, including key devices that we focused on this year: next-generation solid-state magnetometers, highly miniature gas chromatograph mass spectrometers, and multiplexed subcritical water extractors. Having a unique and diverse set of state-of-the-art micro- and nano-fabrication tools located in one place gives MDL the ability to pioneer the development of original devices and novel assembly techniques. And by being at the forefront of the inspiration and implementation of new innovations developed from cutting-edge research at JPL and throughout NASA, MDL-designed technology enables instruments to be greater than the sum of their parts.

30 INNOVATIVE INSTRUMENTS JPL | MICRODEVICES LABORATORY 31 The Microdevices Labora- implemented by combining MEMBRANE TOP CAP (TCAP)/ (MEM) VALVE CLOSING (VC) tory (MDL) has been develop- a MEMS preconcentrator, A B ing a microelectromechanical a microvalve, and gas system (MEMS) gas chromato- chromatograph chips that SAM graph that is a crucial part of replace the macro PCGC Next Generation Gas JPL’s Spacecraft Atmosphere components in the VCAM: Chromatograph Monitor (SAM). The SAM This significantly reduces VALVE OPENING (VO)/ PRESSURE BOTTOM CAP (BCAP) BALANCING Mass Spectrometers instrument is a highly the total volume and mass of miniaturized gas chromato- the gas chromatograph/mass MICROVALVE Recent years have witnessed graph/mass spectrometer spectrometer instrument from CENTER significant progress made for monitoring the atmosphere 64.4 L and 37.9 kg (VCAM) (a) JPL microvalve chip; (b) a scanning electron microscope PAD image of the cross-sectional view of the JPL microvalve in the miniaturization of mass of crewed spacecraft for both to 10 L and 9.5 kg (SAM). spectrometers for a variety trace organic compounds The JPL preconcentrator of field applications. The and the major constituents consists of the silicon doped main focus at JPL is on the of the cabin air. The SAM heater and a Carboxen layer two most common space- instrument, scheduled for in the chamber (see below). The JPL microvalve is mechanism to lower differen- level of the chip design. related applications of mass launch to the International The heater can be flash heated an electrostatically operated tial pressure across the Silicon-silicon layers of spectrometers: studying the Space Station (ISS) in 2019, to 250°C in 0.5 seconds microvalve that is composed membrane, lowering stress microcolumn deliver less tailing composition of planetary is the next generation of due to the thermally isolated of three main components: and allowing the valve to open and peak broadening than atmospheres and monitoring gas chromatograph/mass design and material of the the top cap (TCAP)/valve against high pressure; and an conventional silicon-Pyrex air quality on manned space spectrometer, based on JPL’s heater, which are made closing (VC), the membrane, interface treatment to prevent microcolumns due to the higher missions. JPL’s quadrupole Vehicle Cabin Air Monitor possible by through-etching and the valve opening (VO)/ charge buildup, which is the uniform temperature profile. A ion trap mass spectrometer (VCAM). VCAM was launched around the heating plate and bottom cap (BCAP) (see main failure mode of most photograph of the serpentine product has been under to the ISS in April 2010 and a silicon insulator, respectively. above). The VC/TCAP and VO/ other electrostatic valves. channel and a cross-sectional development for human successfully operated for The JPL preconcentrator BCAP are bonded as a stack The JPL gas chromato- scanning electron microscope space flight applications two years. SAM consists of demonstrated more than a using gold diffusion bonding graph microcolumn is image of the bonded serpen- since 2003 and for planetary the quadrupole ion trap mass 10,000-fold concentration technology. The VC/TCAP composed of multiple stacks tine channel is below. The gas applications since 2011. spectrometer interfaced with increment for alcohols, and VO/BCAP stack sandwich of a 1 m serpentine column chromatograph microcolumn NASA has made a significant a micro-fabricated precon- which is high enough for is bonded to the membrane and a capping layer, which also has a uniform self-assembly commitment to this measure- centrator and gas chromato- analysis of parts per billion layer using benzocyclobutene are hermetically sealed by monolayer coating along the ment technology on which graph unit (together forming concentrations of volatile adhesive to complete the metal diffusion or direct wall of the serpentine channel, astronaut lives depend, and the PCGC subassembly) and organic compounds. microvalve assembly. The fusion bonding. The serpen- which is facilitated by unique its precision, mass, power, a small gas carrier reservoir. membrane layer has four tine channel generates better coating methodology. and robustness will benefit The micro-fabricated PCGC membranes embedded, each separation than that of spiral both human exploration unit employs a novel MEMS of which independently moves channel design in the micro and planetary science. PCGC technology that is up and down in response to an applied electric field between the stacks. These are the first electro- static MEMS valves to achieve more than a million cycles. In A B C PRECONCENTRATOR A B GAS (a) Thermally isolated fact, they achieved 47 million CHROMATOGRAPH 150µ silicon heater in the cycles before failure, which MICROCOLUMN middle chamber where is equivalent to 5.9 years of (a) JPL gas Carboxen adsorbent chromatograph particles are packed; (b) operation when the valve is microcolumn; microposts for attaching switched every four seconds. (b) a scanning micro/nano adsorbents; Other unique features include electron microscope (c) Carboxen 1000 parti- the center pad to reduce image of the cross- cles to be packed into sectional view of the middle chamber opening voltage and charge the gas chromatograph that has no micropost buildup; a pressure balancing serpentine channel

32 INNOVATIVE INSTRUMENTS: SAM JPL | MICRODEVICES LABORATORY 33 JPL’s in situ chemical analyzer team in Chile’s Atacama Desert EXTRACTOR SAMPLE FUNNEL LINEAR CORE ACTUATOR CAD rendering of the open front of the subcritical water extractor with the brass funnel on top and important parameters to the sample carousel with four extraction cells in understand the local habit- the center of the image ability and sample characteri- zation prior to down-stream measurements. Afterward, CAP RELEASE miniaturized valves and MECHANISM pumps automatically PLUNGER LAB ON portion and transfer the SAMPLE pre-characterized extract CELL to a liquid analyzer such HEATER as the Chemical Laptop. PRESSURE CAROUSEL A CHIP The Chemical Laptop is PUMP Portable Subcritical Water a portable battery-powered, Extraction Unit and Microchip automated, and reprogram- Electrophoresis Chemical Analyzer mable microchip electropho- resis instrument coupled to laser-induced fluorescence detection (ME-LIF). It utilizes commercially available microchips, a monolithic pneumatic manifold, and 3D printed chemical It has been over 40 years an extraction step prior to using a single nontoxic and cartridges that can hold an onboard ARM Cortex-M4 since the Viking missions in situ organic analysis, environmentally benign all the liquids and reagents processor that reads from arrived at Mars and became in addition to new surface solvent: water. needed for ME-LIF analysis each sensor, controls the the first landed missions to sampling methods, it is now The SCWE system of amino acids or carboxylic various actuators, and search for chemical signs possible to release trace-level receives approximately 2 cm3 acids. Using this base communicates with the of life on another planet. biomarkers from the sample of the drill tailings through its hardware, the user is able operator’s computer. Remote Along with its famous biology matrix, or to liberate organics vibrating inlet funnel into one to “reprogram” the system operations were performed by experiments, Viking was from macromolecular carbon of four extraction cells in the to perform a variety of connecting the Ethernet port also equipped to scan for such as proteins or even cells. instrument’s sample carousel. different chemical analyses. of the extractor to a TCP/IP the presence of organic To improve the ability First, the cell is hermetically Earlier this year, the SCWE network to send commands molecules using gas chroma- of in situ instruments to sealed; then the cell is filled prototype was taken to the and display measurement tography-mass spectrometry. detect organics in a variety and precisely pressurized with Atacama Desert in Chile as data on a web server. To The results of the scan of low-biomass samples, water; and finally the cell is part of the Atacama Rover our knowledge, this was showed the presence of only we developed an automated, heated up to the desired Astrobiology Drilling Studies the first time an automated carbon dioxide and water, remotely controlled and temperature, which can be effort, a multi NASA-center, and remotely controlled CHEMICAL LAPTOP A closeup of the liquid handling stage nothing that astrobiologists multiplexed subcritical water set depending on the target Planetary Science and subcritical water extraction, on the microchip electrophoresis could use to indicate the extractor (SCWE) system. The molecules to be extracted. Technology through Ana- or “dirt-to-data” process, chemical analyzer (Chemical Laptop) presence of life on Mars. extraction principle is based After a defined amount of time, log Research (PSTAR) project has been performed in the However, it is possible that on the ability of water to the extract is released from led by Ames Research Center. Atacama Desert. To get organic material could change its dielectric constant the cell and pumped into In the field, the extractor further organic compositional be locked within selected as a function of temperature an internal collection vessel. unit was installed on Ames’s data about the dirt, the minerals on the Martian and pressure. This enables Miniaturized electrochemical autonomous test rover extracts from the field were surface and Viking just did efficient extraction of both sensors measure the extract’s platform KREX-2 and tested. collected and returned to not have the instrumentation polar and nonpolar, organic pH, redox potential, and The entire process was JPL for analysis by the to access it. By incorporating and inorganic compounds conductivity, which are performed automatically by Chemical Laptop.

34 INNOVATIVE INSTRUMENTS: LAB ON A CHIP JPL | MICRODEVICES LABORATORY 35 5 ZERO-FIELD SDR MAGNETOMETER B

Planetary Magnetic Field Sensing with B gµ

Quantum Centers in Silicon Carbide s 0 ∆E = ∆m In the Microdevices Laboratory (MDL), with a single large-scale spacecraft. researchers are working to develop Additionally, because of SiCMag’s a next-generation solid-state magneto- simplicity and small scale, dozens meter that leverages quantum centers— can be placed around a large-scale i.e. atomic scale defects—intrinsic to spacecraft which allows for inter-sensor a silicon carbide (SiC) semiconductor calibration, redundancy, gradiometric (-5) to sense the magnetic fields of planetary measurements, and cancellation of bodies. These mid-gap quantum centers the contaminant spacecraft field, RESONANT SDR (EDMR) give rise to a magnetoresistive response which could potentially remove the hv = ∆E = ∆msgµBB that is facilitated by electron-nuclear need for a magnetometer boom. v = 250MHz,B0 = 8.9mT hyperfine mixing of the electron spin In essence, the entire instrument pairs involved in spin-dependent is composed of a SiC diode enclosed (-1 0) (-5) 0 5 10

recombination (SDR) at near-zero by three very small sets of orthogonal CURRENTDEVICE (pA) magnetic fields. The zero-field SDR Helmholtz coils, a high-gain current MAGNET FIELD (mT) phenomenon therefore allows for the amplifier, a few analog-to-digital and electrical readout of a spin-dependent digital-to-analog converters, and a current that encodes the ambient field-programmable gate array (FPGA). environments due to the wide fundamental physical constants magnetic field in which the sensor is The coil system is used to modulate DEFECT SPECTRUM bandgap (3.3 electron volts) of in nature. immersed. It is the first ever magneto- the ambient magnetic field in each Low-field defect the material. It therefore has Currently, our “off-the-shelf” spectrum of a 4H SiC meter of its kind. dimension with a different frequency diode, implanted with the potential to operate in the sensor is characterized with a Magnetometers are essential for that is sensed by the diode. The current nitrogen, illustrating high-radiation belts of Jupiter sensitivity on the order of 100 scientific exploration of planetary bodies, from the diode is amplified, conditioned, the resonant spin- or even on the hot Venusian nT/Hz1/2, as it was not designed dependent recombination as they can remotely probe the interiors and then sampled prior to being digitally surface, which can exceed in any way for magnetometry. (electrically detected of planets to gain insight on internal demodulated in the FPGA for extraction magnetic resonance 460 degrees Celsius. This We are currently working composition, dynamics, and even the of the three frequency-division multi- at n = 250MHz) and robustness provides SiCMag with NASA’s Glenn Research evolution of the body being investigated. plexed vectorized current components. zero-field spin-dependent with the ability to simultane- Center to design and fabricate recombination (hyperfine These instruments are therefore ubiqui- A controller within the FPGA tracks mixing). The arrows ously be used as a total dose a variety of custom sensors, tous on almost all missions in space. the zero-crossing of each component, illustrate the electron- radiation monitor as well as a which we foresee will operate If shown to be as sensitive as optically which is proportional to the ambient nuclear hyperfine temperature sensor. Addition- with a sensitivity on the order pumped atomic gas and fluxgate magnetic field in each axis and interactions that allow ally, the magnetic isotopes of 1 nT/Hz1/2 with the aid of for self-calibration and magnetometers, the SiC Magnetometer therefore used to null the field at the facilitate the mixing of of the host and dopant atoms quantum center engineering (SiCMag) being developed in MDL could sensor using the three-axis coil system. the quantum center that are responsible for the via controlled proton irradia- be the future instrument of choice since Note that no optical or high frequency energy states. nuclear hyperfine interaction tion. SiCMag is not currently it is significantly less complex and radio components are required for act as tiny bar magnets in the set to fly on a mission due to SiC SENSOR smaller than previous designs. As a the instrument. vicinity of the quantum center the technology’s infancy, but Photograph of the SiC result, SiCMag is well-suited for imple- SiCMag inherits many of its import- site. These magnetic signa- there has been a lot of interest sensor and the three-axis, 3D printed Helmholtz coil mentation on nano- or pico-satellites ant features from the 4H SiC crystalline tures allow for the magneto- in flying the instrument on a system used to modulate where swarms or a constellation of sensor that lies at the heart of the meter to self-calibrate and CubeSat or even a drone and null the external very small research spacecraft can be instrument. SiC is extremely robust do not change with time or here on Earth. magnetic field deployed for science returns not possible and has the ability to operate in harsh temperature, as they are

36 INNOVATIVE INSTRUMENTS: MAGNETOMETER JPL | MICRODEVICES LABORATORY 37 CORE TECHNOLOGY The Microdevices Laboratory’s (MDL) leadership, vision, and innovation is illuminated in its rise to the challenge of JPL and NASA missions through its contributions of core technologies. As JPL pursues some of NASA’s most ambitious scientific and technical quests, technological advances achieved at MDL serve critical micro- and nanotechnology needs for finding answers and for devising pathways for new explorations. By fostering a community in which one can interact with people with different backgrounds, interests, and expertise, unexpected inspirations become a way of life. JPL excels at bringing experts together to create an environment where new ideas can evolve into useful technologies, and MDL exemplifies this spirit of collaboration. From infrared photodetectors and focal plane arrays to semiconductor lasers and unique fabrication techniques, the MDL team works together to help position JPL at the cutting-edge of core space and planetary mission technology.

38 CORE TECHNOLOGY JPL | MICRODEVICES LABORATORY 39 PATTERNING CAPABILITY The JEOL JBX 9500FS light sources for absorption Electron Beam Lithography spectroscopy, precision System investment provides nanoscale patterning for improved capabilities with quantum capacitance a 3.6 nanometer spot size, detectors and plasmonic 100 kV and 48 kV operation devices, and 3D patterning modes, and two times more to create shaped pillars with resolution and four times channels that allow capillary the speed of the previous metal pumping for micro- 17-year-old system that it electrospray propulsion replaced. This provides MDL concepts. The current list of E-BEAM DEDICATION CEREMONY On June 7, 2017, JPL Director Mike Watkins an opportunity to continue space missions with delivera- initiated the first official patterning write its leadership in fabricating bles from this electron-beam from this system diffractive optic gratings on lithography direct writing curved surfaces, with up to capability includes: 10 millimeters of curvature on substrates up to nine inches • Wide Field Infrared in diameter. This capability, Survey Telescope together with processes (WFIRST) coronagraph developed in MDL over the instrument, supporting past 26 years to provide analog both the hybrid Lyot relief surface profiles have coronagraph (HLC) and DIFFRACTIVE enabled the fabrication of the shaped-pupil coronagraph Electron Beam Generated game-changing Offner- and (SPC) designs Diffractive Optics Components Dyson-type imaging spectro- meters. These spectrometers • Mars 2020’s Planetary OPTICS are transformational in that Instrument for X-ray they allow the miniaturization Lithochemistry (PIXL) The Microdevices Laboratory developed nano-patterning niques, substrate-mounting of spectrometers from the size instrument gratings (MDL) develops electron beam processes for fabricating both fixtures, and pattern prepara- of a small table to the size of lithography techniques to binary-layered and grayscale tion software to allow fabrica- a pound cake or a soda can • Mars 2020’s Scanning fabricate unique nano- surface-relief structures in tion of these diffractive with improved performance Habitable Environments structures and optics with a variety of polymers, dielec- optics on non-flat (convex and sensitivity over an with Raman and Lumines- the aim of pushing the state trics, metals, and substrate or concave) substrates with extended wavelength regime. cence for Organics and of the art even further and materials. This allows the up to 10 millimeters of height The system also allows the Chemicals (SHERLOC) establishing breakthrough creation of nearly arbitrary variation. This has enabled fabrication of coronagraph instrument gratings technologies that can enable transmissive and reflective the fabrication of high-perfor- occulting masks to mask the E-BEAM LITHOGRAPHY entirely new instrument and diffractive optics, such as mance convex and concave light from stars to allow the • Europa’s Mapping Imaging State-of-the-art JEOL JBX 9500FS Electron observatory architectures. blazed gratings, lenses, diffraction gratings for Offner- direct imaging of exoplanets. Spectrometer for Europa Beam Lithography System at MDL A variety of JPL flight and and computer-generated and Dyson-type imaging Other supporting applications (MISE) gratings research projects rely on MDL’s holograms, for wavelengths spectrometers that have are: the fabrication of precision capability to fabricate special- ranging from ultraviolet to been used for many airborne Bragg spectral gratings to • Gratings for EMIT, the Earth purpose components for both long-wave infrared. Further, and spaceborne instruments. eliminate the side lobes Surface Mineral Dust Source NASA and non-NASA instru- we have developed custom of semiconductor lasers to Investigation mission ments. Lab members have E-beam calibration tech- obtain pure single-mode

40 CORE TECH: DIFFRACTIVE OPTICS JPL | MICRODEVICES LABORATORY 41 DUAL-COMB SPECTROSCOPY SET-UP Two slightly different ICL combs are mixed and detected by a single length band with high spectral importance in turbulent and resolution (<1 MHz) sensing photoreceiver. As a result of the comb resolution and fast acquisition noisy environments. within the same acquisition, structure, each pair of optical teeth yields an rf heterodyne signal at a time. Dual-comb spectro- Recently, MDL, in collabo- utilizing both amplitude unique rf frequency. The rf teeth can scopy (DCS) offers an ration with the U.S. Naval and phase information. be tightly packed such that a few THz unprecedented opportunity Research Laboratory, demon- Precise control of the of optical spectrum can be squeezed into a few GHz of electrical signal. to simultaneously acquire strated the first electrically ICL comb lasers’ parameters, broadband and high-resolu- pumped interband cascade enabled by microfabrication tion spectra within microsec- laser (ICL) optical frequency techniques used in the onds and is characterized by combs. This demonstration processing of these devices, high signal-to-noise ratio, a has filled the spectral gap has allowed us to achieve small footprint, and implemen- around 3–4 µm previously combs with a slight mismatch tation free of moving parts. dominated by optically in repetition frequency (<0.1% In this technique, shown pumped combs with larger of the center frequency). left, two combs with slightly complexity and unsuitability Therefore, we have been different repetition rates are for scarce power applications, able to map > THz of optical interfered on a photodiode and it has allowed us to bandwidth into > 600 MHz of generating a radio frequency extend these powerful electrical spectrum, as shown (RF) comb composed of spectroscopic techniques into below. We have used these SEMICONDUCTOR distinguishable heterodyne a spectral region of electro- comb lasers to detect and Subheader. Aut de te dit ratem lat molorep beats between pairs of optical magnetic spectrum where a analyze methane gas in a At es obus. Uci pultus. Ti. Opubliusus res. comb teeth. This RF comb large fraction of the absorp- multi-pass cell configuration. LASERS Iquibus adis dolo tet aligent ection nia is easily accessible with RF tion features associated with The spectroscopic measure- electronics and contains the carbon-hydrogen bonds are ment below shows a one- The impact of semiconductor Laboratory (MDL), significant to thermal cycling, random relevant spectral information clustered. In contrast to the millisecond acquisition and lasers in space flight missions progress has been made vibration, and shock, and in the optical comb spectra. well-established single-mode fit for a 76-meter multi-pass has increased steadily with toward developing flight- tested for longevity. Based To perform spectroscopy, a distributed feedback lasers cell with pure methane applications in spectroscopy, ready semiconductor lasers on this study, MDL is now sample is introduced into one (DFB) that probe a small at atmospheric pressure. laser altimeters, metrology, operating with low input power capable of delivering lasers or both optical beam paths. fraction of the optical spec- The measurement sensitivity optical communications, across the infrared spectral suited for future missions The sample’s response is trum at a time, the ICL combs demonstrated here (~ ppm) and future life-detection region from 2 to 10 μm. to explore the atmospheres encoded on the comb light; are equivalent to an array can be further improved fluorescence experiments. These lasers are the enabling of Venus, Saturn, and other this response is then recov- of phase-locked DFB lasers (sub-ppm) by tuning the ICL In the area of spectroscopy, technology for the next solar system bodies. ered through heterodyne that probe multiple spectral comb emission wavelength momentum has built on the generation of miniature, detection. Furthermore, DCS regions concurrently with to the absorption peak of success of the Tunable Laser low-power laser spectrome- allows using both amplitude higher precision and sensi- methane gas (3060 cm-1). Spectrometer (TLS) instru- ters for planetary, earth and phase information. tivity. The ICL combs allow ment on the Mars Science atmosphere, and environmen- HIGHLIGHT The latter feature is of great for broadband and high Laboratory (MSL) Curiosity tal monitoring on human Dual-comb Gas Spectroscopy rover. By selectively targeting space missions. with Interband Cascade Laser absorption lines of key A major challenge for Frequency Combs atmospheric gases and their space applications is the FREQUENCY (GHz) + 0.8 GHz ) 1.0 B) -40 less abundant isotopologues reliability of semiconductor Modern spectroscopic d a.u. across the infrared spectrum, lasers. During the past year, systems can accurately -60 0.5

instruments based on TLS our efforts confirmed the measure the real-time POWER ( -80 technology can provide reliability of infrared semicon- dynamics of mixed atomic and -10 0 valuable information about the ductor lasers in relevant space molecular species with weak 0.0

composition and origins of environments. Lasers pack- spectral features, assuming -1.0 -0.8 -0.6 -0.4 -0.2 -0.0 0.2 0.4 0.6 0.8 TRANSMISSION ( 2755 2760 2765 2770 2775 bodies throughout the solar aged in specially designed the availability of a broadband FREQUENCY (GHz) + 0.8 GHz WAVENUMBER (cm-1) system. At the Microdevices enclosures were subjected source in the relevant wave- OPTICAL BANDWIDTH SPECTROSCOPIC MEASUREMENT Multi-heterodyne spectrum extracted from Spectroscopic measurement (scattered red dots) a beating signal acquired over 1 ms and fit (solid curve) for a 76 m multi-pass cell with pure methane at atmospheric pressure

42 CORE TECH: SEMICONDUCTOR LASERS JPL | MICRODEVICES LABORATORY 43 to expose “fresh” silicon. efficiency-killing oxidation ULTRAVIOLET IMAGING We are developing n-type from the aluminum surface SPECTROMETER superlattice doping using prior to encapsulation with This year, we extended our antimony (Sb) and employing protective coatings. development of a miniaturized a new valved cracker cell. ultraviolet imaging spectrometer The cell has three-zone High Efficiency Solar (UVIS) to include a far-ultraviolet

heating control; Sb4 molecules Blind Photocathode (FUV; 100–250 nm) channel. evaporated from bulk source and Detectors based Additionally, we adapted the material move through regions on Group III-Nitride near-ultraviolet (NUV; 250–600 nm) of increasing temperature Together with SUNY Polytech- channel’s configuration to facilitate where they are “cracked” to nic and TU-Delft, we are testing and a pathway towards a

smaller species (Sb2 and Sb developing gallium nitride, flight-like configuration. Testing atoms). The result is better aluminum nitride, and of the combined NUV and FUV incorporation and activation their alloys for UV detector system has yielded promising of Sb—a notoriously difficult applications. These wide results. The two spectrometers dopant for silicon due to bandgap III-N materials operate as expected within their

the bulkiness of Sb4 and are intrinsically blind to spectral ranges and character- its tendency to segregate. long-wavelength light; ization of the system is ongoing. A newly installed Auger their bandgaps range probe system will be used from 3.4 eV to 6.2 eV, with to monitor the growth process long-wavelength cut-offs UV-VISIBLE OPTICAL DETECTOR in real time providing immedi- spanning 365–200 nm. COMPONENT MOUNT MOUNT ate feedback related to dopant We are pursuing technologies and silicon concentration for UV photon-counting DETECTORS at the growth surface. using III-N photocathodes (PCs) and III-N avalanche High Reflectivity Mirror photodiodes (APDs). PCs Coatings for Future based on III-N materials, UV/Vis/IR Missions typically require cesiation Exciting new science in and long-term missions. HIGHLIGHTS We have recently developed of the surface, which cannot ultraviolet (UV) astrophysics, These include development Silicon Molecular Beam several new atomic layer be exposed to air. We are planetary science, and of silicon-based image Epitaxy System Upgrades deposition (ALD) processes developing band structure helio-physics—beyond sensors with spectral We have upgraded our for metal fluorides. The engineering techniques discoveries of Hubble tailorability, gallium nitride– large capacity molecular simplicity of this new ALD that do not require cesiation Space Telescope, Galaxy based photo-emissive beam epitaxy (MBE) to chemistry enables processing for activation. Record high Evolution Explorer, and devices for harsh environ- enable new capabilities and temperatures as low as quantum efficiencies (QEs) Cassini—can be enabled by ment applications, stable reduce downtime by installing 100 °C with reduced impurity have been achieved, and ULTRAVIOLET SPECTROMETER employing high-performance and high-re­flectivity mirror a custom-built electron concentration and superior modeling indicates a path to Newly designed spectrometer for far- ultraviolet measurements, including an detectors, coatings and other coatings, filters with precise beam silicon source that UV optical properties. MgF , QE > 50% using achievable 2 improved detector mount (center foreground)

instrument technologies. spectral response, combined extends the lifetime of the AlF3, and LiF protective material doping and growth. to maintain detector alignment and reduce The Microdevices in compact cameras and source material and allows coatings were successfully thermal losses, an optical component mount Laboratory (MDL) has taken imaging spectrometers. for longer growth campaigns. deposited on on Al mirrors (left) to permit better integration into test chambers for characterization, and optimized a comprehensive approach The hearth—the location for the first time with ALD. internal construction (not visible) reducing to improve ultraviolet instru- of the source material— We have also demonstrated light obstructions and permitting easier ment technologies and is approximately four times new low temperature atomic replacement of the diffraction grating. instruments for short- larger than the previous layer etching (ALE) processes source, and it can be rotated that enables the removal of

44 CORE TECH: UV-VISIBLE DETECTORS JPL | MICRODEVICES LABORATORY 45 DETECTOR ARRAY A scanning electron microscope (SEM) image of a part of a detector array. Indium bumps have been deposited on the individual delineated detector pixels to facilitate hybridization with silicon readout integrated circuit (ROIC) for imaging focal plane array (FPA) fabrication.

Our detector technology is based on artificially designed, multi-layer III-V semiconductor structures that exploit quantum effects to provide continuous adjustability in cutoff wavelength, while III-V INFRARED simultaneously delivering high signal-to- noise ratio and retaining the advantages offered by the robustness of III-V semi- conductors. The development of this DETECTORS technology requires constant exploration and experimentation in design, material The Microdevices Laboratory (MDL) has length infrared (VLWIR), making it suitable growth and characterization, and device been working to develop a new genera- for a wide range of applications. The fabrication and measurement. The tion of high-performance, cost-effective challenges associated with MCT are that well-maintained state-of-the-art facilities infrared photodetectors and focal plane it is soft and brittle, and therefore requires in MDL are essential to our success. arrays with the flexibility to meet a variety extreme care in growth, fabrication, and MDL’s Infrared Photonics Technology of application requirements. Mercury storage. As a result, large-format MCT Group has been at the forefront of cadmium telluride, also known as focal plane arrays tend to be very costly. advanced infrared detector technology HgCdTe or MCT, is the most successful Focal plane arrays based on traditional development and has created many high-performance infrared detector bulk III-V semiconductors such as indium patented novel concepts in the past, material to date, offering continuous gallium arsenide (InGaAs) and indium including the antimonides type-II super- adjustability in cutoff wavelengths (the antimonide (InSb) have excelled in lattice-based, high operating temperature longest wavelength of electromagnetic operability, spatial uniformity, temporal (HOT) barrier infrared detectors (BIRD) for radiation that can be detected effectively) stability, scalability, producibility, and space and terrestrial applications. HOT ranging from the short-wavelength affordability, but they lack the versatility BIRD is a breakthrough infrared detector MWIR HOT BIRD infrared (SWIR) to the very long wave- in cutoff wavelength adjustability. technology capable of operating at 150K MWIR HOT BIRD focal plane array mounted onto a cold finger of the 6U CubeSat Infrared Atmospheric Continued on page 50 Sounder (CIRAS)

46 CORE TECH: III-V INFRARED DETECTORS JPL | MICRODEVICES LABORATORY 47 nBn DETECTOR Schematic of the nBn detector with a monolithically integrated microlens.

The microlens is fabricated on the TOP METAL CONTACT / REFLECTOR backside of the substrate prior to TOP CONTACT detector fabrication on the front side. BARRIER The top metal contact serves as a temperatures accessible with This method negates the exhibited a detectivity of mirror to increase detector responsivity. thermoelectric coolers are time-consuming optical D* (λ) = 2.7 × 1010 cmHz0.5/W essential for new generation post-alignments of other at T = 250 K, which can of compact instruments for microlens-detector integration be reached easily with a small satellites. approaches. single-stage thermoelectric Recently, novel nBn The increase in the optical cooler, or with a passive detector architecture, using collection area in the detector radiator in a space environ- SUBSTRATE an n-type absorption layer, with an integrated microlens ment. This represents a 25 K an electron Barrier layer, and resulted in a five-fold enhance- increase in the operating an n-type contact layer, has ment of the responsivity. temperature of these devices been demonstrated. In nBn These 4.5 µm cut-off wave- compared to the uncoated detectors, a unipolar barrier length antireflection-coated detectors without an inte- MICROLENS suppresses the dark current detectors with microlenses grated microlens. (noise) without impeding the flow of the photocurrent (signal). The increased signal- to-noise ratio leads to higher sensitivity and operating µLENS SHAPE (Top) Two-dimensional profile of the µlens taken temperature than in the through the µlens vertex as shown in the bottom figure conventional p-n junction (Bottom) Three-dimensional map of the µlens shape photodiode. In recent work, measured with a Zygo interferometric microscope we further increased sensitivity IR RADIATION r = 280µm and operating temperature µm of nBn detectors by monolith- 20 ically integrating them with microlenses. These micro- lenses were fabricated on the 10 backside of the detector wafer. with spectral coverage of not HIGHLIGHT such as smartphone cameras. The microlens shape sets the only the entire mid-wavelength High Operating Temperature However, microlens tech- focal length, which has to be 0 100 200 µm infrared (MWIR) atmospheric nbn Detector with Monolith- nology in the mid- and long- close to the wafer thickness transmission window (3–5 µm), ically Integrated Microlens wavelength infrared spectral to optimize light-focusing PROFILE [224.44 µm] but also the SWIR, 1.4–3 µm, bands lags behind. These efficiency. Microlenses are 25 µm and the near infrared (NIR, The sensitivity and operating spectral bands are important defined by photoresist reflow 0.75–1.4 µm). HOT BIRD focal temperature of infrared for identification of material and material etching processes plane array is at the heart of detectors can be increased composition of planetary that were optimized to achieve the Hyperspectral Thermal by integrating detectors with surfaces and atmospheres. the desired microlens shape 50 Imager (HyTI) 6U CubeSat optical concentrators such as Therefore, there is a great and focal length. After 100 that was recently selected by refractive microlenses. Single interest at JPL and at NASA fabrication of the microlens, NASA’s In-Space Validation microlens and microlens to improve performance of the detector’s pixels were 0 µm 150 of Earth Science Technologies arrays operating in the visible infrared imagers, in particular fabricated on the front side. (InVEST) program. and near-infrared spectral to increase their operating Detectors and microlenses

bands are well-developed and temperature. Highly sensitive were precisely aligned to 200 are utilized in many devices infrared imagers operating at each other during fabrication.

0 50 100 150 200 µm

48 CORE TECH: III-V INFRARED DETECTORS JPL | MICRODEVICES LABORATORY 49 SUPERCONDUCTING The small energy gap and strong non-linearity of superconducting parameters make these materials MATERIALS uniquely suited for ultrasensitive detectors and electronics

The Microdevices Laboratory tory. Current development on several generations of (MDL) develops and deploys is aimed at cometary water radio telescopes, including novel superconducting—and observations. MDL was also the Background Imaging related non-superconducting— an early leader in developing of Cosmic Extragalactic sensor technologies for and deploying Hot Electron Polarization telescopes application in areas such as Bolometer (HEB) mixers, (BICEP-2 and -3), the Keck astrophysics, optical communi- primarily for frequencies Array, and the BICEP Array, cations, quantum computing, above 1 THz. MDL is also to gather cosmic microwave and Earth, planetary, and developing Josephson and background polarization cometary sciences. HEB mixers based on the high- measurements at millimeter Beginning in the early temperature superconductor wavelengths. A more recent software radio streams this (4,000 detectors) for terrestrial 1980s, cryogenic sensor MgB , for frequencies above innovation, and a potential data by high-speed Ethernet passive millimeter-wave TKIDS 2 TKIDs under development for millimeter-wave research at JPL focused on 1 THz and/or for operation replacement for TES devices, to a desktop computer that imaging in degraded optical astrophysics. As with traditional KIDs, TKIDs are superconductor-insulator- at temperatures up to 20 K. are thermal kinetic inductance demodulates and filters the environments. Prototype arrays built around high-Q resonators with resonances superconductor (SIS) hetero- In parallel with these detectors (TKIDs). Currently data, accelerating demanding have demonstrated photon that shift under loading. TKIDs differ from KIDs in that the inductors are membrane-isolated and dyne mixers for astrophysical mixer developments, there under development is a 250 computations in the comput- noise-limited sensitivity for function as thermometers in a bolometer. applications. In collaboration has been long-term involve- GHz camera with 20,000 er’s graphics card. This imaging a 300K background. with Caltech, MDL SIS milli- ment with direct detectors, such detectors for a BICEP system is more flexible than This instrument will also serve meter- and submillimeter- such as transition-edge deployment in 2021. TKIDs a field-programmable gate as a technology demonstrator wave mixer technology was sensors (TES). Increasingly are bolometers that use the array-based solution because for future astrophysics experi- deployed in terrestrial radio complex focal plane arrays thermally sensitive kinetic it is programmed with conven- ments such as the Stage-4 telescopes, balloon and based on superconducting inductance of a supercon- tional languages and is already ground-based cosmic micro- airborne observatories, and TES have been, and are being, ducting film in a resonator facilitating the study of novel wave background experiment the Herschel Space Observa- deployed at the South Pole to monitor temperature shifts readout techniques. (CMB-S4). from changes in loading. Microwave kinetic induc- In collaboration with These detectors offer multi- tance detectors (MKIDs) Professor Ben Mazin’s group plexing that is extendible to originated at Caltech and JPL at UC Santa Barbara, near- large arrays. JPL engineers and are attracting increasing infrared-optical MKIDs are MKID ARRAY MKID array for passive, are developing a flexible interest due to the promise also being deployed on the polarization-sensitive microwave readout system of larger and more sensitive 10,000-pixel Dark-speckle imaging at 150 GHz applicable to all types of detector arrays for key Near-infrared Energy-resolved kinetic inductance detectors astrophysical and planetary Superconducting Spectro- and related sensors. It uses science investigations. photometer (DARKNESS) commercial off-the-shelf With support from the at Palomar Observatory’s software-defined radios that Office of Naval Research, 200-inch Hale telescope and generate radio frequency an instrument is currently on the 20,000 pixel MKID MKID IMAGING CHIP interrogation tones and under construction that will Exoplanet Camera (MEC) 20,000-pixel MKID imaging chip fabricated in MDL for the MKID Exoplanet Camera (MEC) on the digitized response from house a 2000 pixel MKID Subaru telescope in Hawaii, fielded by Professor cryogenic cameras. The dual polarization array Continued on page 54 Ben Mazin’s group at UC Santa Barbara

50 CORE TECH: SUPERCONDUCTING MATERIALS JPL | MICRODEVICES LABORATORY 51 MgB2 THz JOSEPHSON MIXER Scanning Electron Microscope

(SEM) image of an MgB2 Josephson mixer fabricated HIGHLIGHT using a He+ ion beam. The raised MgB in the recently been made in the single-photon detectors, spiral is the gold antenna for 2 frequencies from ~200 GHz to 5 Microdevices Laboratory 0.6–4.3 THz range. Operation phased antenna arrays, THz. There is an ultra-thin super- at temperatures of 15–20 K frequency multipliers, conducting MgB bridge across 2 Magnesium diboride (MgB ) with high sensitivity and and parametric amplifiers. the center of the spiral and the 2 narrow line through the bridge is a simple metallic compound an intermediate frequency Recently, MDL researchers

is the He+ ion beam irradiation discovered in 2001 to be bandwidth nearly three times began developing MgB2 thin creating a weak-link Josephson superconducting. Currently, larger than the state-of-the- film growth using an atomic Junction across this line ultra-thin films (5–20 nano- art (> 7 GHz) are important layer deposition (ALD) system

meters) of this material with benefits of the MgB2 material. to emulate the process used characteristics similar to These devices were devel- at Temple University. The those in the bulk have been oped at MDL in collaboration goal is to enable large-area achieved. The moderate with Temple University, which deposition on silicon sub- critical temperature around grew the superconducting strates (> 3” diameter) for 40K and large superconduct- thin films. Researchers are fast throughput processing. ing gap are very useful for currently working to develop Large area film with improved high-frequency (THz) super- waveguide-based mixers on uniformity will allow applica- conducting electronics with silicon membranes in order to tion of advanced projection space applications. enable multi-pixel heterodyne lithography in order to achieve

The primary NASA/JPL receivers for future instrument submicron-size MgB2 devices on the 315-inch Subaru Network applications and ducting technology that grew application for these films concepts including the with good yield. This research telescope in Hawaii to search cosmic microwave back- out of early group activity on is in THz mixers (hot-electron Heterodyne Receiver for at JPL is funded by NASA’s for habitable exoplanets. ground measurements, and superconducting sensors and bolometers and Josephson the Origins Space Telescope Nancy Grace Roman Fellow- Another ongoing development the W band, for application continues to this day. Recent junctions) for astrophysics. (HERO). Other emerging appli- ship in Astrophysics. is kinetic inductance bolome- to millimeter-wave interfero- applications include far-infrared Proof-of-concept demonstra- cations include mid-infrared ters based on the high meters such as the Atacama spectrometers for the Radiation tions of such mixers have heterodyne detectors, optical temperature superconductor, Large Millimeter Array. Budget Instrument (RBI) and yttrium barium copper oxide. Nonlinear superconducting the planned Polar Radiant The goal of this work is to transmission lines can Energy in the Far Infrared achieve low-noise operation efficiently generate harmonics Experiment (PREFIRE). Super- at 50–55K to provide the of an input waveform with an conducting nanowire single basis for a passively cooled efficiency approaching unity photon detectors (SNSPDs) Fourier-transform infrared for a narrow band of > 50 provide the highest available spectrometer for outer planet percent over a bandwidth of sensor performance from THz JOSEPHSON JUNCTION MIXER missions. Development also tens of percent. This effect ultraviolet to mid-infrared continues on the quantum has been harnessed to wavelengths. MDL has been BASED ON MgB2 THICK MgB2/AU ANTENNA capacitance detector, which produce highly efficient a world leader in the develop- has achieved record sensi- multipliers for frequencies ment of this unique technology,

tivity, making it a promising up to ~ 1 THz using niobium currently holding world records THIN MgB2 MICROBRIDGE candidate for future far- titanium nitride transmission for SNSPD detection efficiency, infrared missions. lines. This range may be time resolution, active area, A microwave frequency extended using other super- and dark counts. JPL SNSPDs MgB2 MgB2 version of the kinetic induc- conductors. Triplers for an are to be employed in the tance traveling-wave paramet- initial demonstration at 300 ground terminal of the Deep ric amplifier developed in MDL GHz (output frequency) Space Optical Communication has demonstrated quantum have been designed and (DSOC) project in 2022. limited sensitivity over nearly are currently in fabrication. A novel mixer recently set a record for high-frequency operation of a Josephson an octave of bandwidth. New Thermopile arrays for far Junction detector. The mixing occurs in WEAK LINK SiC SUBSTRATE designs are targeting the IR — IR imagers are an a weak link within a small superconducting Ka-band, for Deep Space example of a non-supercon- bridge where the energy gap is large due to the particular orientation of the junction

and specific properties of MgB2.

52 CORE TECH: SUPERCONDUCTING MATERIALS JPL | MICRODEVICES LABORATORY 53 TERAHERTZ DEVICE Advanced semicon- ductor fabrication HIGHLIGHT power generation at thermal stability, Gaussian technologies at Closing the “Terahertz Gap” submillimeter-waves and radiation patterns, and at least MDL are utilized to fabricate THz with Room-Temperature, terahertz frequencies and a 10 times reduction in size devices that provide All-Solid-State Local contribute enormously to and DC power consumption. world-record Oscillator Sources close the so-called “terahertz The new high-power JPL 1.6 output powers that enable future space gap.” Prototypes at 180, 230, THz local oscillator source submillimeter-wave MDL recently demonstrated 340, 530, and 1000 GHz have is shown below. It has a DC spectrometers. room-temperature, all-solid- been designed, fabricated, power consumption of around state local oscillator sources assembled, and tested at 20 watts and produces and with output power levels more JPL. Record output power of output power of > 0.7 milliwatts than 10 times higher than 600, 120, 40, 30, 2.0, and 0.7 at 1.6 THz at room tempera- the previous state-of-the-art. milliwatts have been measured, ture. Further improvement can These local oscillator sources respectively. The local be achieved by cooling the are Schottky diode–based oscillator sources operate at source down to 120 K. frequency multiplied chains room temperature and exhibit With these sources featuring a novel JPL-patented state-of-the art conversion available, high-resolution THz circuit topology called on- efficiencies and frequency imaging radar systems and chip power-combining. This bandwidths of around 15–20 high-data bit rate communica- concept, together with a percent. These Schottky- tion systems are now possible. precise optimization of the based sources have impor- For astrophysics, heterodyne devices for high-power tant advantages over other array receivers beyond 1 THz Novel circuit designs and advanced operation, yield an improve- technologies used such as are necessary to map galaxies chip fabrication technology from ment in power-handling quantum cascade lasers. For in the search for nitrogen, MDL have demonstrated more than capabilities by one order example, no cryogenic cooling oxygen, carbon, and other 1 mW of output power at 1 THz of magnitude. is required and they have tracers of star-forming regions SUBMILLIMETER These results represent frequency tunability over a to fully understand how solar DEVICES a major breakthrough in 15–20 percent bandwidth, systems form and evolve.

The Microdevices Laboratory During the past year, power. These coherent (MDL) specializes in developing we have developed super- sources are needed to Pout>0.7 m W and implementing submillimeter- conductor-insulator-super- pump heterodyne receivers (at 30 0K) wave receivers and terahertz conductor (SIS) tunnel as well as to be deployed in remote sensing technologies junction receivers in the 500 submillimeter-wave radars— for a variety of applications. GHz range with close to technologies that are being 85–95 GHz The primary focus is to develop quantum-limited sensitivity. advanced to design and GaN PA components and technologies Similarly, novel materials are build the next generation MODULE to enable space-borne, high- being investigated to produce of instruments for space JPL 170–190 GHz FREQUENCY DOUBLER resolution heterodyne spectro- hot-electron mixers that will exploration. From investigating JPL 510–570 GHz meters for Earth remote allow astrophysicists to probe water isotopes and the FREQUENCY TRIPLER

sensing missions, planetary deeper into the interstellar deuterium-to-hydrogen ratio JPL 1.53–1.66 THz missions, and astrophysics medium for answers concern- of water found in the universe FREQUENCY TRIPLER observatories. Heterodyne ing star formation. to investigating star-forming

technology allows one to Semiconductor based regions, submillimeter-wave TRIPLER DESIGN LOCAL OSCILLATOR SOURCE map and/or detect unique low-parasitic Schottky diodes technology provides a unique A dual on-chip power-combined gallium arsenide High-power 1.6 THz frequency multiplied local oscillator molecular signatures with very continue to be fabricated at tool for better understanding 527 GHz tripler design is combined with a compact source recently demonstrated at JPL, exhibiting a world- housing able to handle more than 500 milliwatts and record output power of 0.7 milliwatts at room-temperature high-spectral resolution over MDL that provide high-effi- the cosmos. produce a world-record output power of 30 milliwatts. operation, which is a 10 times improvement over the a wide range of wavelengths. ciency and impressive output previous state-of-the-art.

54 CORE TECH: SUBMILLIMETER DEVICES JPL | MICRODEVICES LABORATORY 55 HEART OF THE CLOCK (Facing page) Optical image and (this page) scanning electron microscope (SEM) image of a gallium nitride based resonator that is the heart of an ultra-stable clock working at 500°C (operational and stable at the surface of Venus)

Work done in collaboration with University of Florida MICRO- Gainesville ELECTROMECHANICAL

II-V MEMS for SYSTEMS Harsh Environment

The Advanced Optical and devices, unique micro- high-temperature-tolerant quality factor (Q) and high- The high-temperature Electromechanical Microsys- machined components to sensors but also for building temperature coefficient of clock technology uses a similar tems group within the enhance the performance of electronics that can work frequency (TCF). The resonator material stack but its properties Microdevices Laboratory existing instruments or to at temperatures up to 1,000 geometry is engineered such are engineered to achieve near- (MDL) was formed to take enable new measurements. degrees Celsius. Sensors that their TCF is not limited by zero shift in frequency with a advantage of combined and microsystems such as the material properties of the change in temperature. Currently, expertise in microfabrication, infrared (IR) detectors and high- material set in the resonating the group, in collaboration with nanomaterials, and packaging temperature tolerant clocks stack. Instead, the resonator Stanford University and University technologies to develop HIGHLIGHT are currently being developed exhibits TCF in the order of of Florida, is developing clocks miniature instruments, Microsystems for Frequency as part of this effort: the IR 1,000 parts per million per that are stable at temperatures sensors, and microsystems Control and Frequency detectors are sensitive to degree Celsius, which is up to 500 degrees Celsius in RESONANT DETECTOR ARRAY for space flight. The long-term Shifting Sensors in a broad range of spectra 30-fold larger than the TCF indium aluminum nitride/Gallium Scanning electron microscope (SEM) goal of the group is to deliver Harsh Environments from ultraviolet to far-IR with if defined by the temperature nitride (InAlN/GaN) material image of a resonant piezoelectric smaller payloads that are ultra-low-noise performance coefficient of elasticity. These stacks. InAlN/GaN high-mobility infrared detector array with a very wide dynamic range of operation either stand-alone, highly Missions to hot planets, such and frequency multiplexing detectors need not be cooled transistors have been shown to (wide temperature range of operation) capable, or distributed and as Venus or Mercury, have capability. The frequency of the to be functional, but their work at temperatures as high as networked with dedicated traditionally been extremely detectors shifts proportionally background noise will be 1,000 degrees Celsius. This work, capability for planetary short in duration and have to the amount of absorbed IR significantly suppressed at supported by a NASA HOTTech exploration. To that end, the had a very narrow scope power. These detectors are low temperatures and their Award, is aimed at demonstrating group focus is on employing mainly due to the unavailability higher performance alternatives Qs will become even higher. high-temperature-tolerant clock novel techniques, designs, of sensors and readout to microbolometers and offer This means that, depending technologies using the same and materials to produce electronics that can survive lower cost, lower power, and on the application, they can stack for the first time to enable sensors and microsystems the extreme environments smaller-size alternatives to be cooled to any temperature data transfer at high tempera- that can accurately measure of those planets. To address kinetic inductance detectors to meet the science need. tures. Since the data collected unique signatures (e.g., this problem, MDL is working with similar frequency multiplex- In addition, nanofabrication from any probe, lander, explorer, magnetic field and seismic to develop several sensor ing capabilities and without allows integration of or sensor in a harsh environment signals) of planetary bodies technologies that can survive the need to be operated at thousands of pixels to needs to be transferred to

or electronic components at extreme temperatures and a specific and narrow temper- form a large imaging array. the main spacecraft in a robust RESONANT DETECTOR ARRAY that can withstand prolonged in high-radiation environments. ature range defined by the A provisional patent has fashion, realizing a local clock Scanning electron microscope extreme environments. These new sensors use III-V superconducting transition been filed on the design with a stable frequency output (SEM) image of a stress engineered resonant array with high sensitivity The group also specializes piezoelectric compounds that temperature. Each pixel of the of the resonant pixels. is the most crucial part of such and very wide dynamic range of in resonant microelectrome- are chemically inert and can detector array is composed of a communication system. operation suitable for operation in chanical systems (MEMS) be used not only for making an acoustic resonator with high- extreme environments

56 CORE TECH: MICROELECTROMECHANICAL SYSTEMS JPL | MICRODEVICES LABORATORY 57 APPENDIX

JOURNAL PUBLICATIONS: M. Zemco, ”Hafnium Films and 16. J. Hennessy, and S. Nikzad, 24. N. Acharya, M.A. Wolak, T. 31. A. Plazas, C. Shapiro, R. 37. E. E. Wollman, V. B. Verma, A. D. IN A JOURNAL FORMAT Magnetic Shielding for TIME, “Atomic Layer Deposition of Melbourne, D. Cunnane, B. S. Smith, J. Rhodes, and E. Huff, Beyer, R. M. Briggs, F. Marsili, J. A mm-Wavelength Spectrometer Lithium Fluoride Optical Coatings Karasik, and X.X. Xi, “As-Grown “Nonlinearity and pixel shifting P. Allmaras, A. E. Lita, R. P. Mirin, 1. P. Mouroulis, and R. O. Green. Array,” Journal of Low Temperature for the Ultraviolet,” Inorganics, vs Ion-Milled MgB2 Ultrathin effects in HXRG infrared S. W. Nam, and M. D. Shaw, “Review of high fidelity imaging Physics, 2018. vol. 6, no. 2, pp. 46, May 2018. Films for THz Sensor Applica- detectors,” Journal of Instru- “UV superconducting nanowire spectrometer design for remote tions,” IEEE Transactions on mentation, vol. 12, no. 04, single-photon detectors with sensing,” Optical Engineering, 9. S. R. Meeker, B. A. Mazin, A. B. 17. J. Marini, I. Mahaboob, E. Rocco, Applied Superconductivity, p. C04009, Apr. 2017. high efficiency, low noise, and vol. 57, no. 4, 040901, 2018. Walter, P. Strader, N. Fruitwala, L. D. Bell, and F. Shahedi- vol. 27, no. 4, 2300304, 2017. 4 K operating temperature,” C. Bockstiegel, P. Szypryt, G. pour-Sandvik, “Polarization 32. J. Hennessy, C. S. Moore, K. Optics Express, vol. 25, no. 22, 2. D. R. Thompson, B. H. Kahn, Ulbricht, G. Coiffard, B. Bumble, Engineered N-polar Cs-free GaN 25. E. Velasco, D. P. Cunnane, Balasubramanian, A. D. Jewell, K. pp. 26792–26801, Oct. 2017. R. O. Green, S. A. Chien, E. M. G. Cancelo, T. Zmuda, K. Treptow, Photocathodes,” submitted to S. Frasca, T. Melbourne, France, and S. Nikzad, “Enhanced Middleton, and D. Q. Tran. “Global N. Wilcer, G. Collura, R. Dodkins, Journal of Applied Physics, 2018. N. Acharya, R. Briggs, A. D. atomic layer etching of native 38. M. Rais-Zadeh, H. Zhu and A. spectroscopic survey of cloud I. Lipartito, N. Zobrist, M. Bottom, Beyer, M. D. Shaw, B. S. Karasik, aluminum oxide for ultraviolet Ansari, “Applications of Gallium thermodynamic phase at high J. C. Shelton, D. Mawet, J. C. van 18. D. R. Thompson, J. W. Boardman, M. A. Wolak, V. B. Verma, A. E. optical applications,” Journal of Nitride in MEMS and Acoustic spatial resolution, 2005–2015,” Eyken, G. Vasisht, and E. Serabyn, M. L. Eastwood, and R. O. Green. Lita, H. Shibata, M. Ohkubo, N. Vacuum Science & Technology A, Microsystems,” 2017 IEEE Atmospheric Measurement Tech- “DARKNESS: A Microwave Kinetic “A large airborne survey of Zen, M. Ukibe, X. Xi, F. Marsili, vol. 35, no. 4, pp. 041512, Jun. 2017. 17th Topical Meeting on Silicon niques, vol. 11, no. 2, 1019, 2018. Inductance Detector Integral Field Earth’s visible-infrared spectral “High-Operating-Temperature Monolithic Integrated Circuits Spectrograph for High-contrast dimensionality,” Optics Express, Superconducting Nanowire 33. S. Nikzad, A. D. Jewell, M. E. in RF Systems (SiRF). 3. K. B. Cooper, R. Rodriguez Monje, Astronomy,” Publications of the vol. 25, no. 8, 9186-9195, 2017. Single Photon Detectors based Hoenk, T. J. Jones, J. Hennessy, L. Millán, M. Lebsock, S. Tanelli, Astronomical Society of the Pacific, on Magnesium Diboride,” Proc. T. Goodsall, A. G. Carver, 39. H. Zhu, M. Rais-Zadeh, “Switch- J. V. Siles, C. Lee, and A. Brown, vol. 130, no. 988, April 2018. 19. A. Hazari, S. Soibel, D. Gunapala, CLEO: 2017 OSA Technical C. Shapiro, S. R. Cheng, E. T. able Lamb wave delay lines “Atmospheric Humidity Sounding and P. Bhattacharya, “Infrared Digest (online) (Optical Society Hamden, G. Kyne, D. C. Martin, using AlGaN/GaN heterostruc- Differential Absorption Radar 10. P. M. Echternach, B. J. Pepper, Absorption at 300 K in InGaN/GaN of America, 2017), paper FF1E.7. D. Schiminovich, P. Scowen, K. ture”, Solid-State Sensors, Near 183 GHz,” IEEE Geoscience T. Reck, and C. M. Bradford, Disk-in-Nanowire Arrays Grown France, S. McCandliss, and R. E. Actuators and Microsystems and Remote Sensing Letters vol. “Single photon detection of on (001) Silicon,” IEEE Photonics 26. G. Chattopadhyay, T. Reck, Lupu, “High-efficiency UV/optical/ (TRANSDUCERS), 2017. 15, no. 2, 2018. 1.5 THz radiation with the quantum Technology Letters vol. 29, no. 20, C. Lee, and C. Jung-Kubiak, NIR detectors for large aperture capacitance detector,” Nature 1751; Digital Object Identifier “Micromachined Packaging for telescopes and UV explorer 40. J. Cochrane, J. Blacksberg, 4. M. Bagheri, C. Frez, L. A. Astronomy, vol. 2, 90–97, Nov. 2017. 10.1109/LPT.2017.2752716, 2017. Terahertz Systems,” Proceedings missions: development of and M.A. Anders, P.M. Lenahan, Sterczewski, I. Gruidin, M. Fradet, of the IEEE, vol. 105, no. 6, field observations with delta- “Vectorized magnetometer I. Vurgaftman, C. L. Canedy, W. W. 11. S. Soibel, A. Keo, A. Fisher, 20. G. Davies, S. Gunapala, A. Soibel, pp. 1139-1150, Jun. 2017. doped arrays,” Journal of Astro- for space applications using Bewley, C. D. Merritt, C. Soo Kim, C. J. Hill, E. Luong, D. Z. Ting, D. Ting, S. Rafol, M. Blackwell, nomical Telescopes, Instruments, electrical readout of atomic scale M. Kim & J. R. Meyer. “Passively S. D. Gunapala, D. Lubyshev, P. O. Hayne, and Michael Kelly. 27. D. González-Ovejero, G. Minatti, and Systems, vol. 3, no. 3, defects in SiC”, Nature Scientific mode-locked interband cascade Y. Qiu, J. M. Fastenau, and “A novel technology for measuring G. Chattopadhyay, S. Maci, pp. 036002, Sep. 2017. Reports, vol. 6, 37077, 2016. optical frequency combs,” Scien- A. W. K. Liu, “High operating the eruption temperature of “Multibeam by Metasurface tific Reports, vol. 8, 3322, 2018. temperature nBn detector silicate lavas with remote sensing: Antennas,” IEEE Transactions 34. J. Marini, I. Mahaboob, K. Hogan, 41. Zhu, M. Rais-Zadeh, with monolithically integrated Application to Io and other on Antennas and Propagation, S. Novak, L. D. Bell, and F. “Non-Reciprocal Acoustic 5. C. J. Cochrane, H. Kraus, microlens,” Applied Physics planets,” Journal of Volcanology vol. 65, no. 6, pp. 2923-2930, Shahedipour-Sandvik, “Mg Transmission in a GaN Delay P.G. Neudeck, D. Spry, et al., Letters, vol. 112, 041105, 2018. and Geothermal Research, Jun. 2017. Incorporation Efficiency in Pulsed Line Using the Acoustoelectric “Magnetic Field Sensing with vol. 343, p. 1–16, 2017. MOCVD of N-polar GaN:Mg,” Effect,” IEEE Electron Device 4H SiC Diodes,” accepted for 12. P. Padmanabhan, B. Hancock, 28. M. Alonso-delPino, T. Reck, Journal of Electronic Materials, Letters vol. 38, no. 6, 802–805 publication in Material Science S. Nikzad, L. D. Bell, K. Kroep, 21. K. Thorpe, C. Frankenberg, C. Jung-Kubiak, C. Lee, and vol. 46, no. 10, pp. 5820–5826, 2, 2017. Forum, 2018. and E. Charbon, “A hybrid readout D. R. Thompson, R. M. Duren, A. G. Chattopadhyay, “Development Oct. 2017. solution for GaN-based detectors D. Aubrey, B. D. Bue, R. O. Green of Silicon Micromachined 6. T. Oshima, T. Satoh, H. Kraus, using CMOS technology,” Sensors, et al. “Airborne DOAS retrievals Microlens Antennas at 1.9 THz,” 35. B. Fleming, M. Quijada, J. et al., “Functionalization of SiC vol. 18, no. 2, pp. 449, Feb. 2018. of methane, carbon dioxide, and IEEE Transactions on Terahertz Hennessy, A. Egan, J. Del Hoyo, CONFERENCE by Proton Beam Writing toward water vapor concentrations at Science and Technology, vol. 7, B. A. Hicks, J. Wiley, N. Kruczek, AND PROCEEDINGS Quantum Devices,” IOPScience 13. A. Plazas, C. Shapiro, R. Smith, high spatial resolution: application no. 2, pp. 191–198, Mar. 2017. N. Erickson, and K. France, Journal of Physics D: Applied E. Huff, and J. Rhodes, “Laboratory to AVIRIS-NG,” Atmospheric “Advanced environmentally 1. C.J. Cochrane, “Magnetic Field Physics, vol. 51, 2018. Measurement of the Brighter- Measurement Techniques, 29. Z. Hu, M. Alonso-delPino, D. resistant lithium fluoride mirror Sensing with Quantum Centers in fatter Effect in an H2RG Infrared vol. 10, no. 10, 3833, 2017. Cavallo, H. T. Shivamurthy, and coatings for the next generation of SiC,” Society for Brain Mapping 7. Y.Y. Chang, B. Cornell, T. Aralis, Detector,” Publications of the M. Spirito, “Integrated waveguide broadband space observatories,” and Therapeutics (SMBT) Annual B. Bumble, and S. R. Golwala, Astronomical Society of the Pacific, 22. D. R. Thompson, E. J. Hochberg, power combiners with artificial Applied Optics, vol. 56, no. 36, Congress, Los Angeles, CA “Development of a Massive, Highly vol. 130, pp. 065004, Apr. 2018. G. P. Asner, R. O. Green, D. E. dielectrics for mm-wave systems,” 9941–9950, Dec. 2017. 4/15/2018. Invited Multiplexible, Phonon-Mediated Knapp, B-C. Gao, R. Garcia et al. IEEE MTT-S International Micro- Particle Detector Using Kinetic 14. J. Marini, L. D. Bell, and F. “Airborne mapping of benthic wave Symposium (IMS), Honolulu, 36. J.P. Allmaras, A.D. Beyer, R.M. 2. S.R. Cheng, D. Budzyn, and Inductance Detectors,” Journal Shahedipour-Sandvik, “Monte reflectance spectra with Bayesian HI, pp. 646–649, 2017. Briggs, F. Marsili, M.D. Shaw, G.V. S. Nikzad, “UV/VIS Fluorescence of Low Temperature Physics, Carlo Simulation of III-Nitride linear mixtures,” Remote Sensing of Resta, J.A. Stern, V.B. Verma, R.P. and Reflectance Measurements vol. 191, p. 1, May 2018. 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58 APPENDIX JPL | MICRODEVICES LABORATORY 59 APPENDIX, CONT.

3. E. E. Wollman, B. A. Korzh, 11. M. Rais-Zadeh, “Application 19. C.J. Cochrane, “Silicon Carbide 27. M.F. Mora, N. Bramall, conductivity effective masses,” filters for visible-blind Si J. P. Allmaras, A. D. Beyer, S. of phase change materials in magnetoresistive magnetometer F. Kehl, P.A. Willis, “Microchip Proc. IEEE Photonics Conference sensors,” Proc. SPIE, vol. 10209, Frasca, R. M. Briggs, E. Ramirez, photonics and reconfigurable with electrically detected Electrophoresis Instrumentation (IPC), 2017. pp. 102090P, 2017. and M. D. Shaw, “Applications RF microsystem,” MRS 2018 magnetic resonance self- for Detection of Biosignatures of superconducting nanowire Spring Meeting & Exhibit, calibration feature for space on Future in situ Planetary 34. Z. Ting, A. Soibel, A. Khoshakh- 41. P. Padmanabhan, B. Hancock, single-photon detectors: deep invited, Phoenix, Apr. 2018. science applications,” Rocky Investigations,” HPLC 2017, lagh, S. A. Keo, Sir B. Rafol, S. Nikzad, L. D. Bell, K. Kroep, space optical communication, Mountain Conference on Prague, Czech Republic, 2017. A. M. Fisher, B. J. Pepper, E.M. and E. Charbon, “A CMOS UV photon counting, and ultra- 12. S. Nikzad, J. Hennessy, Magnetic Resonance (RMCMR), Luong, C. J. Hill, S. D. Gunapala, Front-end for GaN-based high time resolution,” Proc. SPIE A. Jewell, A. Kiessling, M. Hoenk, Breckenridge CO, July 2016. 28. M.F. Mora, F. Kehl, J. Creamer, “Antimonide-based e-SWIR, UV Imaging,” in Proceedings of 10659, Advanced Photon Counting A. Carver, R. Morgan, S. Martin, E.T.d. Costa, A. Guttman, B. MWIR, and LWIR barrier infrared the International Image Sensor Techniques XII. April 18-19, 2018. S. Cheng “Detectors w High 20. P. Willis, F. Mora, J. Creamer, Fonslow, E. Candish, J.Chapman, detector and focal plane array Workshop, no. P33, Jun. 2017. Orlando, FL. Efficiency & Low Noise for F. Kehl, E. Tavares da Costa, M. P.A. Willis, “Status of Develop- development,” Proc. SPIE 10177, Exoplanet Studies & Cosmology,” Darrach, N. Bramall, A.Ricco, and ment of Capillary Electrophoresis Infrared Technology and 42. S. Nikzad, A. D. Jewell, A. G. 4. J.W. Kooi, D.J. Hayton, B. Bumble, Poster Session III, American R. Quinn, “The State-of-the-Art in Electrospray Ionization Mass Applications XLIV, Apr. 2018. Carver, J. J. Hennessy, M. E. H.G. LeDuc, P. Echternach, Physical Society, Los Angeles, Electrophoresis Instrumentation Spectrometry Methods and Hoenk, S. Cheng, T. M. Goodsall, A. Sakalare, J. Kawamura, G. Mar. 2018. for Ocean Worlds Missions Hardware for Spaceflight Missions 35. D. Z. Ting, A. Soibel, A. G. Kyne, E. Hamden, and Chattopadhyay, and I. Medhi, Seeking Signs of Life,” AbSciCon of Exploration,” 2017 Global Khoshakhlagh, S. A. Keo, A. M. T. J. Jones, “UV/Optical Photon “Submillimeter and Terahertz 13. A. Carver, J. Hennessy, D. Wilson, 2017, Mesa, AZ. CESI-MS Symposium, Boston, Fisher, Sir B. Rafol, E. M. Luong, Counting and Large Format Receiver Technology for the A. Jewell, P. Mouroulis, S. Nikzad, MA, 2017. C. J. Hill, B. J. Pepper, and S. D. Imaging Detectors from Detection of Water Isotopes on “Advanced Ultraviolet Imaging 21. J. Creamer, F. Mora, Gunapala “Enhanced quantum CubeSats, SmallSats to Large Cometary Bodies,” Presentation Spectrometer for Planetary P. Willis, “Enhanced Resolution 29. A. Khoshakhlagh, L. Höglund, efficiency type-II superlattice Aperture Space Telescopes W 5.2 at 29th IEEE International Studies,” in Poster Session III, of Chiral Amino Acids with A. Soibel, D. Z. Ting, and S. D. barrier infrared detectors,” & Imaging Spectrometers,” in Symposium on Space Terahertz American Physical Society, Capillary Electrophoresis for Gunapala, “Material growth and Proc. of the Military Sensing Proceedings of the International Technology (ISSTT2018), Los Angeles, Mar. 2018. Detection of Biosignatures optical properties of long-wave Symposium, Mar. 2018. Image Sensor Workshop, Pasadena, CA, Mar. 2018. in Extraterrestrial Samples,” infrared type-II superlatttices,” no. R47, Jun. 2017. 14. D. Bell, S. Nikzad, E. Rocco, AbSciCon 2017, Mesa, AZ. SPIE Photonics West, San 36. C. Shapiro, R. Smith, E. Huff, 5. A. Jewell, A. Carver, S. Nikzad, J. Marini, and S. Shahedipour- Francisco, California, Jan. 2017. A. Plazas, J. Rhodes, J. Fucik, 43. S. Nikzad, Y. Chen, V. Tsytsarev, and M. Hoenk “Two-dimensional Sandvik, “Progress in Cesium- 22. F. Kehl, E.T.d.Costa, D. Wu, T. Goodsall, R. Massey, B. Rowe, B. Kateb, and W. Grundfest. N-type Doping in Silicon with Free III-Nitride Photocathodes M.F. Mora, J.S. Creamer, 30. S. B. Rafol, S. D. Gunapala, S. Seshadri, “Precision Projector Special Section Guest Editorial: Antimony,” Materials Synthesis, Based on Control of Polarization P.A. Willis, “Automated In-Situ D. Z. Ting, A. Soibel, C. J. Hill, Laboratory: Detector Charac- Brain Mapping and Therapeutics. American Physical Society, Charge,” in Semiconductor Subcritical Water Extraction A. Khoshakhlagh, S. A. Keo, terization with an Astronomical Neurophotonics, vol. 4, no. 1, Los Angeles, Mar. 2018. Surfaces and Nanostructures, And Pre-Characterization A. Fisher, J. K. Liu, J. M. Mumolo, Emulation Testbed,” arXiv: p.011001, 2017. American Physical Society, Platform For Martian Regolith,” B. Pepper, “Low frequency 1801.06599, submitted to 6. A. Jewell, M. Hoenk, D. Hitlin, Los Angeles, Mar. 2018. AbSciCon 2017, Mesa, AZ. 1/f noise on QWIPs, nBn, and Proceedings of SDW, 2017. 44. M. E. Hoenk, A. D. Jewell, M. McClish, A. Carver, T. Jones, superlattice focal plane array,” S. Nikzad, D. Trotter, Q. Looker, S. Nikzad “Silicon sensors with 15. C.J. Cochrane, “Magnetic Field 23. M. Rais-Zadeh, “GaN for Infrared Physics & Technology 37. J. Hennessy, C. S. Moore, G. Robertson, “Radiation-hard, integrated UV filters for fast Sensing with 4H SiC Diodes— MEMS and MicroSystems,” 84, 50–57, Aug. 2017. K. Balasubramanian, A. D. Nanosecond-gated CMOS scintillation detectors and Nitrogen vs Phosphorous IEEE EDS mini-colloquia, Jewell, C. Carter, K. C. France, Imaging Detectors,” in Proceed- solar-blind imaging systems,” Implantation,” International Simon Fraser University, 31. J. Pepper, A. Soibel, D. Z. Ting, and S. Nikzad, “Atomic layer ings of the International Image John Hennessy, in Instrumenta- Conference on Silicon Carbide Burnaby, Canada, Oct. 2017. C. J. Hill, A. Khoshakhlagh, deposition and etching methods Sensor Workshop, no. R52, tions and Measurements II, and Related Materials (ICSCRM), A. M. Fisher, S. A. Keo, S. D. for far ultraviolet aluminum Jun. 2017. American Physical Society, Washington D.C., Sept. 2017. 24. M.F. Mora, N. Bramall, F. Kehl, Gunapala, “Evidence of carrier mirrors,” Proc. SPIE, vol. 10401, Los Angeles, Mar. 2018. A. Noell, P.A. Willis, “Microchip localization in InAsSb/InSb digital pp. 1040199, 2017. 45. G. Chattopadhyay, “Interconnect- 16. H. Kraus, C. Cochrane et al., Electrophoresis Instrumentation alloy nBn detector,” Proc. SPIE ing Technologies for Terahertz 7. L. D. Bell, et al., “Progress “Controlled 3D Placement of for Determination of Chemical 10177, Infrared Technology and 38. K. Balasubramanian, J. Hennessy, Components and Instruments,” in Cesium-Free III-Nitride Vacancy Spins for Quantum Distributions of Organic and Applications XLIII, 101770N, N. A. Raouf, S. Nikzad, J. G. IEEE MTT-S International Photocathodes Based on Applications in Silicon Carbide,” Inorganic Ions on Future May 2017. Del Hoyo, and M. A. Quijada, Microwave Symposium Digest, Control of Polarization Charge,” International Conference on Spaceflight Missions,” AbSciCon “Coatings for large-aperture UV Honolulu, Hawaii, USA, Jun. 2017. March Meeting of the American Silicon Carbide and Related Mate- 2017, Mesa, Arizona, 2017. 32. Z. Ting, A. Soibel, A. Khoshakh- optical infrared space telescope Physical Society, Los Angeles, rials (ICSCRM), Washington D.C., lagh, L. Höglund, S. A. Keo, mirrors,” Proc. SPIE, vol. 10398, 46. J. Hennessy, C. S. Moore, California, Mar. 2018. Sept. 2018. 25. P.A. Willis. “Searching for Life S. B. Rafol, C. J. Hill, A. M. Fisher, pp. 103980X, 2017. K. Balasubramanian, A. D. Jewell, on Ocean Worlds with Liquid E. M. Luong, J. Nguyen, J. K. Liu, C. Carter, K. C. France, and S. 8. M. Rais-Zadeh, “Microsensors 17. C.J. Cochrane, European Phase Separation Systems,” J. M. Mumolo, B. J. Pepper, 39. A. Egan, B. T. Fleming, J. H. Nikzad, “Atomic layer deposition and systems for missions to Conference on Silicon Carbide HPLC 2017 in Prague, Czech S. D. Gunapala, “Antimonide Wiley, M. A. Quijada, J. G. Del and etching methods for far hot planets,” 2018 CMOS Emerging and Related Materials (ECSCRM), Republic, June 2017. type-II superlattice barrier infrared Hoyo, J. Hennessy, B. A. Hicks, ultraviolet aluminum mirrors,” Technologies Research Sympo- “Three-axis SiC magnetoresistive detectors ,” Proc. SPIE 10177, K. C. France, N. Kruczek, and SPIE Optics + Photonics, sium, invited plenary talk, based magnetometer”, Halkidiki, 26. P.A. Willis, M.F. Mora, J. Creamer, Infrared Technology and N. Erickson, “The development San Diego, CA, Aug. 2017. Vancouver, Canada, May 2018. Greece, Sept. 2016. F. Kehl, E.T.d. Costa, A. Noell, Applications XLIII, 101770N, and characterization of advanced W. Brinckerhoff, D. Glavin, S. May 2017. broadband mirror coatings for 47. F. Defrance, A. D. Beyer, J. Sayers, 9. M. Rais-Zadeh, “GaN Sensors 18. C.J. Cochrane, “Self-calibrating Getty, A. Ricco, R. Quinn, “The the far-UV,” Proc. SPIE, vol. S. Golwala., “Low-Loss, Low- and Electronics for Missions solid-state SiC magnetometer Organic Capillary Electrophoresis 33. Z. Ting, L. Höglund, A. Soibel, 10397, pp. 1039715, 2017. Noise, Crystalline Silicon to Hot Planets,” ECSMeeting for planetary field mapping,” Analysis System (OCEANS) for A. Khoshakhlagh, S. A.Keo, Dielectric for Superconducting Abstracts, 1403-1403, May 2018. 3rd International Workshop on Astrobiology. Investigations on A. M. Fisher, S. B. Rafol, E. M. 40. J. Hennessy, A. D. Jewell, Microstriplines and Kinetic Instrumentation for Planetary Ocean Worlds,” In The Outer Luong, C. J. Hill, J. M. Mumolo, M. E. Hoenk, D. Hitlin, M. McClish, Inductance Detector Capacitors,” 10. M. Rais-Zadeh, “Gallium Missions (IPM), Pasadena CA, Planets Assessment Group, J. K .Liu, B. J. Pepper, S. D. A. G. Carver, T. J. Jones, and 17th International Workshop Nitride MEMS for Sensing Oct. 2016. La Jolla, CA, 2017. Gunapala, “Aspects of type-II B. Nikzad, “Materials and process on Low Temperature Detectors and Frequency Control,” superlattice infrared detectors: development for the fabrication (LTD17), Fukuoka, Japan, Texas Instrument/U. Texas Minority carrier lifetimes and of far ultraviolet device-integrated Jul. 2017. Dallas, Apr. 2018.

60 APPENDIX JPL | MICRODEVICES LABORATORY 61 APPENDIX, CONT.

48. G. Mariani, M. Kenyon, S. Bux, Z. 2. F. Kehl, P. Willis, “General b. H. M. Manohara, JPL Explorer i. W. Holmes, Planck Scientist. • Beneq TFS-200 Atomic Layer —SolarSemi MC204 Microcluster Small, “Next Generation Thermal Purpose Plunger Based Fluidic Award for excellence in leadership The Planck team won the Deposition (ALD) System with Spin Coating System with Hot Imagers for Room-Temperature Extractor for In Situ Planetary and interaction with industry and prestigious Gruber prize. Meaglow Plasma Source Upgrade Plate & Dispense Upgrades Far-Infrared Detection,” SPIE Exploration,” NTR # 50725 the development of advanced Photonics West, 2018. dual use technology. • Tystar (150mm /6-inch) Low-Pres- • Yield Engineering System (YES) sure Chemical Vapor Deposition Reversal Oven 49. G. Mariani, J. Pearson, K. Burke, c. A. Khoshakhlagh, JPL Lew PROFESSIONAL SOCIETY (LPCVD) with 2 Tubes for D. Diner, “Multi Angle Spectropo- PATENTS AWARDED Allen Award for technical DISTINCTION —Low Stress Silicon Nitride • Ovens, Hotplates, furnaces, larimetric Imagers for Aerosols,” innovation in developing the —Atmospheric Wet/Dry Oxidation and Manual Spinners (including SPIE Remote Sensing, 2017. H. Manohara, L Del Castillo, novel Gallium-free antimonies a. D. Ting, IEEE Photonics Society 2 Solitec 5110C spinners, M. Mojarradi, “Micro- and Nanoscale super lattice epitaxial material. Distinguished Lecturer • Carbon Nanotube Furnace and a Suss RC8 Spin Coater) 50. G. Mariani, M. Kenyon, S. Bux, Capacitors that Incorporate an Array Systems (2) W. Johnson, “Kilo-Pixel of Conductive Elements Having d. D. Ting, A. Soibel, A. Khoshakh- b. M. Rais-Zadeh, IEEE Electron Dry Etching Miniaturized Thermal Imagers Elongated Bodies,” U.S. Patent: lagh, S. Rafol, C. Hill, A. Fisher, Device Society Distinguished • Electroplating Capabilities • Commonwealth IBE-80 Ion Mill based on Advanced Thermo- 9,406,442, Issued 08/02/2016. B. Pepper, S. Keo, E. Luong, J. Lecturer electrics,” Infrared, Millimeter, Mumolo, J. Liu, and S. Gunapala, • Molecular-Beam Epitaxy • Branson Plasma Ashers (2) and Terahertz Waves (IRM- M. Hoenk, J. Hennessy, D. Hitlin. MSS (Military Sensing Symposia) c. M. Rais-Zadeh, Technical (MBE) MW-ThHz), 2017. “Subnanosecond scintillation Herschel Award for NASA’s Jet program committee chair of —Veeco GEN200 (200mm/ • Tepla PP300SA Microwave detector,” US20150276947 A1, 2017. Propulsion Laboratory HOT-BIRD the 2018 Hilton Head Workshop 8-inch) Si MBE for UV CCD Plasma Asher 51. L. D. Bell, et al., “Development (High Operating Temperature and General chair of the same Delta Doping (Silicon) of Cesium-Free III-Nitride B. Kateb and S. Nikzad, International Barrier Infrared Detectors) workshop in 2020. —Veeco GEN200 (200mm/8-inch) • Fluorine-based Plasma Photocathodes Based on Control Brain Mapping, Intra-Operative Technology, March 2018. Si MBE for UV CCD Delta Etching Systems of Polarization Charge,” Materials Surgical Planning Foundation and d. S. Forouhar, SPIE Quantum Doping (Silicon) Research Society Fall Meeting, California Institute of Technology, e. JPL Ed Stone Award for Sensing and Nano Electronics —Veeco Epi GEN III MBE • STS Deep Trench Reactive Ion Boston, MA, Nov. 2017. 2017. Multi modality brain outstanding publication: and Photonics committee (Antimonide Materials) Etcher (DRIE) with SOI Upgrade mapping system (MBMS) using member since 2015. —Riber MBE for UV CCD 52. S. Nikzad, J. Hennessy, artificial intelligence and pattern • C.J. Cochrane Delta Doping (Silicon) • PlasmaTherm Versaline Deep A. Kiessling, M. Bolcar, D. Figer, recognition. U.S. Patent: 9,754,371. “Vectorized magnetometer —Riber Device MBE (GaAs) Silicon Etcher (DSE/DRIE) R. Morgan, “Overview of High for space applications using Efficiency and Low Noise S. Seshadri, D. Cole, R.M. Smith, electrical readout of atomic MDL EQUIPMENT COMPLEMENT Lithographic Patterning • Unaxis Shuttleline Load-Locked Solid State Detectors for Future and B.R. Hancock, California scale defects in silicon • Electron-Beam (E-beam) Litho- Fluorine Inductively Coupled Missions including the Flagship Institute of Technology, 2017. carbide,” Nature Scientific Material Deposition graphy: JEOL JBX 9500FS E- Plasma (ICP) RIE Concepts: The Habitable Mapping electrical crosstalk Reports 6, 37077; doi: • Thermal Evaporators (5) beam lithography system with Exoplanet Imaging Mission and in pixelated sensor arrays. 10.1038/srep37077. 2016. a 3.6 nm spot size, switchable • PlasmaTherm APEX SLR The Large UV/Optical/Infrared U.S. Patent: 9,596,460. • Electron-Beam Evaporators (7) 100,000 & 48,000 volt acceleration Fluorine-based ICP RIE with (LUVOIR) Surveyor,” SPIE • Ryan Briggs voltages, ability to handle wafers Laser End Point Detector Optics + Photonics, San A. Khoshakhlagh, D. Z. Ting and “Low-dissipation 7.4-µm- • Angstrom Engineering up to 9 inches in diameter, and Diego, CA, Aug. 2017. S. Gunapala, “P-compensate wavelength single-mode Indium-metal Evaporator hardware and software modifica- • Plasmaster RME-1200 and P-doped superlattice infrared quantum cascade lasers tions to deal with curved substrates Fluorine RIE 53. C. Shapiro, “Precision detectors”, U.S. Patent: 9,831,372, fabricated without epitaxial • Ultra-High-Vacuum (UHV) having up to 10 mm of sag Characterization of Hawaii-2RG Issued: 11/28/2017. regrowth,” Optics Express, Sputtering Systems for • Plasma Tech Fluorine RIE Near-Infrared Detectors,” vol. 24, no. 13, 14589, 2016. Dielectrics and Metals (3) • GCA Mann Wafer Stepper Scientific Detector Workshop D. Z. Ting, A. Soibel, A. Khoshakh- with custom stage allowing • STJ RIE for Superconductors 2017, Space Telescope Institute, lagh, S. Gunapala, “Unipolar f. S. Gunapala, SPIE George W. • Ultra-High-Vacuum (UHV) different sizes and thicknesses Baltimore, MD, Sep. 2017. barrier dual-band infrared Goddard Award in recognition of Sputtering Systems for of wafers (0.7-µm resolution) • Custom XeF2 etcher detectors,” U.S. Patent: 9.799,785, exceptional achievement in optical Superconducting Materials (3) Issued: 11/24/2017. or photonic instrumentation for • Canon FPA3000 i4 i-Line • Oxford PlasmaPro 100 Cobra aerospace, atmospheric science, • AJA Load Locked Thermal Stepper (0.35-µm resolution) Black Silicon Load-Locked Cryo BOOK CONTRIBUTIONS R. M. Briggs; C. F. Frez; S. Forouhar, or astronomy, Aug. 2018. Co-Evaporator for Broadband Etching / Atomic LayerEtching / “Index-Coupled Distributed-Feed- IR Bolometer Depositions • Canon FPA3000 EX3 Stepper with Bosch Etching System. M. Rais-Zadeh, D. Weinstein, “Gallium back Semiconductor Quantum g. S. Gunapala, Presidential Honors; EX4 Optics (0.25-µm resolution) Nitride for M/NEMS,” Piezoelectric Cascade Lasers Fabricated Without The Sri Lanka Ranjana titular • PlasmaTherm 790 Plasma Chlorine-based MEMS Resonators, 73–98, 2017. Epitaxial Regrowth,” U.S. Patent: conferred to non-nationals was Enhanced Chemical Vapor • Canon FPA3000 EX6 DUV Stepper Plasma Etching Systems 9,991,677, Issued: 6/5/2018 conferred on, scientist Dr. Sarath Deposition (PECVD) for Dielectrics (0.15-µm resolution) • Unaxis Shuttleline Load-Locked NEW TECHNOLOGY REPORT, Gunapala, Sri Lanka, Mar. 2017. with Cortex Software Upgrade Chlorine Inductively Coupled PATENTS FILED SPECIAL RECOGNITION • Contact Aligners: Plasma (ICP) RIE h. S. Nikzad, fellow of the National • Oxford Plasmalab System 100 —Karl Suss MJB3 with backside IR 1. C.J. Cochrane, “Self-calibrating a. H. M. Manohara, NASA Academy of Invention. For inventive Advanced Inductively Coupled —Suss MA-6 (UV300) with MO • PlasmaTherm Versaline solid-state based magnetometer Exceptional Technology work extending the UV response Plasma (ICP) 380 High-Density Exposure Optics upgrade Chlorine-based ICP Etcher for vectorized field sensing Achievement Medal for leading in CCDs and more recently, Plasma Enhanced Chemical —Suss BA-6 (UV400) with jigging via zero-field spin dependent the development of the world’s CMOS image sensors, using Vapor Deposition (HD PECVD) supporting Suss bonder Wet Etching & recombination,” NTR NPO 49854; smallest 3D imaging multi-angle low temperature MBE and CVD System for Low Temperature Sample Preparation a. Patent Application 15/969,466 endoscopic tool with unprece- techniques. Dielectric Growths • Wafer Track/Resist/Developer • RCA Acid Wet Bench for submitted on 5/2/2018. dented panning ability. Dispense Systems: 6-inch Wafers • Oxford Plasmalab 80 OpAL —Suss Gamma 4 Module Atomic Layer Deposition Cluster System • Solvent Wet Processing (ALD) System with Radical —Site Services Spin Benches (7) Enhanced Upgrade Developer System

62 APPENDIX JPL | MICRODEVICES LABORATORY 63 APPENDIX, CONT.

• Rinser/Dryers for Wafers • Wire Bonding • McBain BT-IR Z-Scope IR including Semitool 870S Dual Microscope Workstation Spin Rinser Dryer • DISCO 320 and 321 Wafer Dicers (2) • Olympus LEXT 3D Confocal • Chemical Hoods (7) Microscope • Tempress Scriber • Acid Wet Processing Benches (8) • Mitaka NH-5Ns 3D Profiler • Pick and Place Blue Tape • Tousimis 915B Critical Point Dryer Dispenser System • Electrical Probe Stations (4) with Parameter Analyzers (2) • Rapid Thermal Processors/ • Loomis LSD-100 Scriber Breaker Contact Alloyers (2) • RPM2035 Photoluminescence • SCS Labcoater 2 (PDS 2010) Mapping System • Polishing and Planarization Parylene Coating System Stations (5) • Fourier Transform Infrared (FTIR) Characterization Spectrometers (3) including Bruker • Strasbaugh 6EC Chemical • Profilometers (2) (Dektak 8 Optics Vertex 80 FTIR Mechanical Polisher & Alphastep 500) • PANalytical X’Pert Pro MRD • Precitech Nanonform 250 Ultra • Frontier Semiconductor with DHS High Temperature Diamond Point Turning System FSM 128 Film Stress Stage X-ray Diffraction System Measuring system Frontier • SET North America Ontos 7 Semiconductor • Surface Science SSX501 Native Oxide (Indium Oxide) FSM 128-NT (200mm/8-inch) XPS with Thermal Stage Removal Tool with Upgrade Film Stress and Wafer Bow Mapping System • Custom Ballistic Electron • Novascan UV8 Ultraviolet Emission Microscopy Light Ozone Cleaner • LEI 1510 Contactless (BEEM) System Sheet Resistance Tool • New Wave Research EzLaze • Custom UHV Scanning 3 Laser Cutting System • FISBA µPhase 2 HR Compact Tunneling Microscope (STM) THE TEAM Optical Interferometer • Indonus HF VPE-150 Hydrofluoric • Nanometrics ECV Pro Profiler Acid Vapor Phase Etcher • Senetech SE 850 Multispectral Ellipsometer • VEECO / WYKO NT 9300 AT MDL • Laurell Technologies Dilute Surface Profiler (including Dynamic Cleaning System • Horiba UVSEL 2 (190-2100 nm) 50X optics) (DDS), Model EDC 650 – a Dilute Ellipsometer HF/Ozonated DI Water Spin • Zygo ZeMapper non-contact Cleaning System with MKS • Filmetrics F20-UV (190-1100 nm) 3D Profiler Instruments Liquizon Ozonated Thin Film Spectrometer Water Generator Measurement System • Thermo Scientific LCQ Fleet CE / MS (Capillary Electrophoresis / • Osiris Fixxo M200 TT • Filmetrics F40-UVX (190-1700 nm) Mass Spectrometer) System Wafer Mounting Tool Thin Film Spectrometer Measure- ment System with Microscope • Surfx Atomflo 500 Argon Atmospheric Plasma • Dimension 5000 Atomic Surface Activation System Force Microscope (AFM) © 2018 California Institute of Technology. for wafer bonding Government sponsorship acknowledged. • Park Systems Inc. NX20 Atomic Packaging Force Microscope (AFM) Acknowledgment: The research • SET FC-300 Flip Chip described in this report was carried Bump Bonder • KLA-Tencor Surfscan 6220 out at the Jet Propulsion Laboratory, Wafer Particle Monitor California Institute of Technology, • Karl Suss Wafer Bonder under a contract with the National • JEOL JSM-6700 Field Emission Aeronautics and Space Administration. • Electronic Visions AB1 SEM with EDX Reference herein to any specific Wafer Bonder commercial product, process, or • Nikon & Zeiss Inspection Micro- service by trade name, trademark, • EVG 520Is Semi-Automatic scopes with Image Capture (3) manufacturer, or otherwise, does not Wafer Bonding System constitute or imply its endorsement • Keyence VHX-5000 Digital by the United States Government • Finetech Fineplacer 96 Microscope with low power lens or the Jet Propulsion Laboratory, “Lambda” Bump Bonder California Institute of Technology.

• Thinning Station and Inspection Systems for CCD Thinning

64 APPENDIX National Aeronautics and Space Administration Jet Propulsion Laboratory California Institute of Technology Pasadena, California www.jpl.nasa.gov www.microdevices.jpl.nasa.gov

CL#18-3674 JPL 400-1687 7/18